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CN101916664B - Hybrid micro-supercapacitor based on organic electrolyte and manufacturing method thereof - Google Patents

Hybrid micro-supercapacitor based on organic electrolyte and manufacturing method thereof Download PDF

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CN101916664B
CN101916664B CN2010102436411A CN201010243641A CN101916664B CN 101916664 B CN101916664 B CN 101916664B CN 2010102436411 A CN2010102436411 A CN 2010102436411A CN 201010243641 A CN201010243641 A CN 201010243641A CN 101916664 B CN101916664 B CN 101916664B
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electrode
supercapacitor
organic electrolyte
super capacitor
polyvinylidene fluoride
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CN101916664A (en
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王晓峰
尤政
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Tsinghua University
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    • Y02E60/13Energy storage using capacitors

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Abstract

The invention discloses a hybrid minitype super capacitor and a manufacturing method thereof, and belongs to the technical field of MEMS. The minitype super capacitor is composed of a support body, a positive electrode, an isolated body, a negative electrode and aluminum seal covers, wherein the minitype super capacitor is in a coiling structure; the positive electrode, the isolated body and the negative electrode are soaked in a lithium perchlorate organic electrolyte; the positive electrode comprises an active carbon energy storage material, an acetylene black conducting material and polyvinylidene fluoride adhesive, and is prepared by a screen printing method; the negative electrode comprises a lithium titanate energy storage material, acetylene black and polyvinylidene fluoride adhesive, and is prepared by the screen printing method; the isolated body is a copolymer in a polyvinylidene fluoride-hexafluoropropylene porous structure and is prepared by a spin coating method; and the ends of the positive electrode and the negative electrode are respectively provided with the aluminum seal cover prepared by a magnetron sputtering method, and the aluminum seal covers are used as electrode terminals to perform the function of a current collector. The large contact area of the aluminum seal covers and the electrodes can effectively reduce the resistance of the minitype super capacitor, thereby enhancing the energy storage characteristic of the minitype super capacitor; and the invention can increase the voltage of the minitype super capacitor to 3.6 V.

Description

Hybrid micro super capacitor and manufacturing approach thereof based on organic electrolyte
Technical field
The invention belongs to the MEMS technical field, particularly a kind of hybrid micro super capacitor and manufacturing approach thereof based on organic electrolyte.
Background technology
Miniaturization of electronic products, microminiaturization, integrated be the trend of the times of world today's technical development.Microelectromechanical systems (Micro Electro Mechanical Systems is called for short MEMS) has mobility, automatic control property, characteristics such as integrated, is one of most important technological innovation in recent years.When a sub-systems can be integrated on the chip piece, power supply also must be accomplished the revolution of miniaturization, microminiaturization.The MEMS micro-energy resource system is meant the technology based on MEMS; It is that micron order, overall dimension are the micro-system of Centimeter Level that one or more electric energy feedwaies are integrated into a characteristic size; Can realize long-time, high-effect, multi-mode power supply, be specially adapted to some particular surroundings that conventional power source can't be used.The miniature energy of excellent performance is to the development of MEMS system and improve and just have special meaning.At present the patent in external this field mainly concentrates on fields such as miniature lithium ion battery, miniature zinc aluminum cell, like the patent (US.6610440BS) of the relevant miniature zinc aluminum cell of the patent (US.5567210) of the relevant miniature lithium ion battery of U.S. oak ridge National Laboratory and U.S. Bipolar technologies company.Preparation method in the involved little energy device of above-mentioned related patent U.S. Patent No. technology is through the small electrode of prepared in various methods yardstick; Receive the restriction of factors such as electrode area is limited; Indexs such as the internal resistance of prepared miniature energy device, capacity can not satisfy device requirement, have seriously restricted the application of miniature energy device.Compare with minicell, micro super capacitor requires to have lower internal resistance to satisfy its instantaneous high power discharge ability.And up to the present,, effective solution is not proposed as yet to the internal resistance that how effectively to reduce micro super capacitor.In addition, be no more than 2.7V based on the micro super capacitor cell operation voltage of organic electrolyte and same structure activated carbon positive and negative electrode, up to the present, the cell operation voltage to how improving micro super capacitor does not propose effective solution yet.
Summary of the invention
The objective of the invention is to provide a kind of hybrid micro super capacitor of organic electrolyte, it is characterized in that, the structure of this micro super capacitor is on a slice polyimides supporter, to be arranged in order positive pole, slider, negative pole; In positive pole, slider, negative pole, flooded organic electrolyte; On combination surface, cover identical a slice polyimides supporter again and form a capacitor unit; Interconnecting the back with the polyimides supporter of a plurality of capacitor units reels and becomes the coin structure; In coin shape structure both sides is that a proper utmost point, the other end are negative pole, is tightly connected by the aluminium capping respectively, and the aluminium capping plays collector as electrode terminal simultaneously; The aluminium capping contacts with the large tracts of land of negative pole with anodal, effectively reduces micro super capacitor resistance.
Comprise energy storage material, electric conducting material acetylene black and adhesive Kynoar in said positive pole and the negative pole respectively; Anodal and negative pole adopts different materials to form composite super capacitor can be increased to 3.6V with cell voltage.
Said anodal energy storage material is an activated carbon, and electric conducting material is an acetylene black, and adhesive is a Kynoar, and adds the 1-methyl pyrrolidone, presses ratio of quality and the number of copies 7: 2: 1: 30 fully stir the slurry that the back forms good fluidity.
Said negative pole comprises that energy storage material is lithium titanate Li 4Ti 5O 12, electric conducting material is an acetylene black, adhesive is a Kynoar, and adds the slurry that the 1-methyl pyrrolidone fully stirs back formation good fluidity; Lithium titanate, acetylene black, Kynoar and 1-methyl pyrrolidone ratio of quality and the number of copies are 7: 2: 1: 30, fully stir the slurry that the back forms good fluidity.
Said slider is a loose structure, and its composition is a Kynoar PVDF-hexafluoropropylene PHFP copolymer.Flooded organic electrolyte in said positive pole, negative pole and the slider, electrolyte solute composition is lithium perchlorate LiClO 4, solvent composition is ethylene carbonate EC and carbonic acid diethyl ester DEC mixed liquor, the ratio of quality and the number of copies of EC and DEC is 1: 2; Add lithium perchlorate LiClO 4In solvent, being configured to concentration is the organic electrolysis liquor of 1mol/L.
A kind of manufacturing approach of hybrid micro super capacitor of organic electrolyte is characterized in that, at first the slurry of positive pole and negative pole energy storage material adopts silk screen print method to be prepared in polyimide-based surface; Form positive pole and negative pole array, between positive pole and negative pole, coat slider, the dipping organic electrolyte; With the polyimide matrix surface that is incumbent on; Adopt the method that cuts that said structure is partitioned into unit one by one then, positive pole and negative pole are divided into equal two parts respectively in the cutting process, and belong to different units respectively; Be formed between two polyimides supporters; Arrange by positive pole, slider and negative pole, each unit connects and reels by equidirectional becomes the coin structure, and coin shape structure both sides deposition of aluminum capsule is to accomplish capacitor package.The aluminium capsule contacts as contact conductor with anodal, negative pole respectively, to reduce the micro super capacitor internal resistance.
The invention has the beneficial effects as follows that anodal and negative pole adopt different materials to form composite super capacitor and can cell voltage be increased to 3.6V to overcome in the correlation technique micro super capacitor internal resistance higher; Cell operation voltage is on the low side, can't satisfy the defective of device energy storage requirement.Can reduce the micro super capacitor internal resistance, and then reach the effect of improving the micro super capacitor energy storage characteristic.
Description of drawings
Fig. 1 is based on the hybrid micro super capacitor of organic electrolyte and forms structural representation.
Fig. 2 is based on the hybrid micro super capacitor schematic diagram of fabrication technology of organic electrolyte.
Embodiment
The present invention provides a kind of hybrid micro super capacitor and manufacturing approach thereof based on organic electrolyte.Below with reference to accompanying drawing and combine embodiment to specify the present invention.
Fig. 1 is based on the hybrid micro super capacitor of organic electrolyte and forms structural representation.Micro super capacitor is arranged positive pole 2, slider 4 and negative pole 3 by between two polyimide matrixes 1 by vertical direction from top to bottom, forms a unit; A plurality of unit interconnect and are wound into cylinder; Aluminium capping 5 is covered respectively at the cylinder two ends; Flooded organic electrolyte in above-mentioned anodal 2, negative pole 3 and the slider 4, anodal 2, negative pole 3 is drawn from two ends respectively, plays the effect of collector simultaneously as electrode terminal; Contact with anodal 2 and the effective of negative pole 3 through large-area aluminium capping 5; Thereby reduced the micro super capacitor internal resistance, adopt different energy storage materials through anodal 2 respectively with negative pole 3, thereby the cell operation voltage of micro super capacitor has been brought up to 3.6V; And then improved energy storage characteristic based on the said structure micro super capacitor.The aluminium capping contacts with the large tracts of land of electrode can effectively reduce micro super capacitor resistance.
Fig. 2 is based on the hybrid micro super capacitor schematic diagram of fabrication technology of organic electrolyte.Electrode manufacturing process of the present invention, it mainly comprises the silk screen print method preparation of 1 positive pole of polyimide matrix and negative pole array, what electrode gap exsomatized coats the covering of upper strata polyimide matrix; The assembly slitting of polyimide matrix, positive pole, negative pole array and upper strata polyimide matrix becomes unit 11, between two sheet matrixes 1, comprises positive pole 2, slider 4 and negative pole 3 this moment in the unit 11.Reel and become coin structure 12 in unit 11.Coin structure both sides deposition of aluminum capping 5.The encapsulation of completion micro super capacitor.
The preparation of the silk screen print method of polyimide matrix surface electrode array comprises the choosing of positive pole and negative pole energy storage material, the preparation of electrode slurry and the silk screen print method preparation of electrod-array.
Anodal energy storage material is an activated carbon, and the activated carbon with characteristics such as high-specific surface area and low impurity contents can be elected to be negative material, and its specific area should be greater than 1500m 2/ g, carbon content in the material (mass ratio) should be higher than 98%, the YP-15 type activated carbon that typical case's representative as Japanese Kuraray company (kuraray) produce.The anode sizing agent preparation method is for admixture partially conductive material and adhesive in above-mentioned anodal energy storage material and add the slurry that the 1-methyl pyrrolidone fully stirs back formation good fluidity.Conductive material is an acetylene black.Adhesive is a Kynoar.The anode sizing agent composition is activated carbon, acetylene black, Kynoar, 1-methyl pyrrolidone, and its best in quality ratio is 8: 1: 1: 30.Acetylene black is the key factor of restriction cathode performance, and acetylene black is very few in the anode sizing agent, and then prepared electrode internal resistance is big, and acetylene black is too much in the anode sizing agent, and then prepared pole strength is relatively poor.
The negative pole energy storage material is a lithium titanate, and its molecular formula is Li 4Ti 5O 12The cathode size preparation method is for admixture partially conductive material and adhesive in above-mentioned negative pole energy storage material and add the slurry that the 1-methyl pyrrolidone fully stirs back formation good fluidity.Conductive material is an acetylene black.Adhesive is a Kynoar.The cathode size composition is lithium titanate, acetylene black, Kynoar, 1-methyl pyrrolidone, and its best in quality ratio is 7: 2: 1: 30.Acetylene black is the key factor of restriction negative pole performance, and acetylene black is very few in the anode sizing agent, and then prepared electrode activity is lower, and acetylene black is too much in the anode sizing agent, and then prepared pole strength is relatively poor.
The preparation method of electrod-array is based on above-mentioned electrode slurry, adopts method for printing screen, on large tracts of land polyimide matrix 1, prints anodal array and negative pole array, like Fig. 2 (a).Need after microelectrode array print to be accomplished in 80~150 ℃ of temperature ranges, preferred 120 ℃, vacuum drying 1 hour is with thorough removal 1-crassitude ketone solvent.Temperature is crossed to hang down and is prone to cause the removal of 1-methyl pyrrolidone not thorough, can influence capacitor performance.Temperature is too high to be prone to cause polyimide matrix to curl distortion.
Print anodal measure-alike with negative pole.500 microns-3000 microns of electrode widths, preferred 2000 microns.500 microns-1000 microns of electrode spacings, preferred 500 microns.200 microns-2000 microns of thickness of electrode, preferred 1000 microns.With additive method, method for printing screen can prepare thickness on matrix higher, the trickle clearly figure of figure.
The process of coating of porous polymer slider 4 is between electrode: with Kynoar-hexafluoropropylene copolymer (like Belgian SOLVAY Company products; Hexafluoropropylene content is 10%) be dissolved in the acetone fully dissolving, adopt then and get rid of the method that is coated with and be coated with and be formed between the electrod-array.Concrete grammar is that polyimide matrix is fixed on the photoresist spinner platform; On substrate, drip an amount of above-mentioned Kynoar-hexafluoropropylene copolymer acetone soln; The substrate rotating speed is evenly accelerated to necessarily than the slow-speed of revolution from static; Range of speeds 800-1200 rev/min, preferred 1000 rev/mins, and kept 10 seconds; Evenly accelerate to higher rotation speed then, range of speeds 1500-2000 rev/min, preferred 1800 change, and keep 25 seconds, evenly are decelerated to static then.Get rid of the substrate horizontal positioned 30 minutes in 25 ℃ of room temperature environments that is coated with completion, so that polymer oneself leveling and slowly discharge acetone solvent.Place it in thoroughly oven dry in 40 ℃ of vacuum drying ovens then.Acetone thoroughly removes back Kynoar-hexafluoropropylene copolymer and forms vesicular texture.
Kynoar-hexafluoropropylene slider gets rid of and is coated with the dipping that need carry out organic electrolyte after the completion, to be full of electrolyte in the pore space structure of guaranteeing electrode and slider.The electrolyte that the present invention adopted is the organic electrolysis liquor, and concentration is 1mol/L, and solute is lithium perchlorate LiClO 4, solvent is ethylene carbonate EC and carbonic acid diethyl ester DEC mixed liquor (ratio of quality and the number of copies of EC and DEC is 1: 2 in the solvent).The electrolyte dipping process fully floods for the structure that will accomplish the preparation of electrode printing and slider is placed in the organic electrolyte, takes out the back and dries to remove unnecessary electrolyte.
After accomplishing, the electrolyte dipping above electrod-array, places one deck and the identical polyimide matrix 1 of matrix again, shown in Fig. 2 (c).The method that employing cuts is partitioned into several unit 11 with said structure, and shown in Fig. 2 (d), positive pole and negative pole are divided into two parts in the cutting process, and belong to different units respectively.In the unit 11, the sequence arrangement by positive pole 2, slider 4, negative pole 3 is arranged between two polyimide matrixes 1 at this moment; Be impregnated with electrolyte in positive pole 2, negative pole 3 and the slider 4, this moment anodal 2 and negative pole 3 lay respectively at the both sides up and down of coin structure and expose.A plurality of unit interconnect to reel becomes coin structure 12, coin structure both sides deposition of aluminum capping 5.The encapsulation of completion micro super capacitor is like Fig. 2 (e).
The magnetron sputtering technique process of aluminium capping is included in coin structure 12 both side surface magnetically controlled sputter methods and prepares aluminum metal layer completion encapsulation, like Fig. 2 (e).Aluminum metal layer is also born the function of electrode outside terminal when the performance sealing role is realized the micro super capacitor sealing, electric charge passes through aluminium capping 5 inflows or flows out electrode in the charge and discharge process.Magnetron sputtering aluminium capping technology can realize that electrode contacts with large tracts of land between the electrode terminal, has realized effective reduction of contact resistance between electrode and the aluminium capping, and then has reduced condenser resistance, improves the heavy-current discharge characteristic of capacitor.Magnetron sputtering technique can also be guaranteed effective sealing of micro super capacitor, has avoided ultracapacitor failure phenomenon in the course of the work.
The magnetron sputtering technique process of aluminium capping does; Coin structure 12 one sides upwards are fixed on the specimen holder of magnetron sputtering apparatus; Adopt aluminium (99.99%) as target; Under high-purity argon gas atmosphere, carry out sputtering technology, preparation aluminum metal layer thickness is greater than 10 microns, through prolonging the aluminum metal layer that the sputter reaction time can prepare higher thickness.The coin structure simultaneously deposits after the completion its upset, the deposition another side.Thickness is crossed to hang down and is prone to cause the electrode covering imperfect, is prone to cause electrolyte to reveal.The too high processing cost that then causes of thickness is too high.Can adopt plating or chemical plating method that capsule is further thickeied after deposition is accomplished, compare with magnetically controlled sputter method, magnetron sputtering combines processing cost much lower with plating or chemical plating method.
The present invention proposes a kind of hybrid micro super capacitor structure and manufacturing approach thereof; Can improve the capacitor unit operating voltage; Can reduce the capacitor internal resistance; And then improve the energy storage characteristic of micro super capacitor, be widely used in fields such as sensor network nodes power supply, fuze power supplies based on micro super capacitor described in the invention.
The above is merely the preferred embodiments of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1.一种有机电解液的混合式微型超级电容器,其特征在于,该微型超级电容器的结构是在一片聚酰亚胺支撑体上依次排列正极、隔离体、负极;在正极、隔离体、负极中浸渍了有机电解液,在组合体面上再盖上相同的一片聚酰亚胺支撑体形成一个电容器单元,以多个电容器单元的聚酰亚胺支撑体相互连接后卷绕成为硬币状结构,在币状结构两侧为一端正极、另一端为负极,分别由铝封盖密封连接,铝封盖同时作为电极端子起集流体的作用,铝封盖与正极和负极的大面积接触,有效降低微型超级电容器电阻。1. A kind of hybrid micro-supercapacitor of organic electrolyte, it is characterized in that, the structure of this micro-supercapacitor is to arrange positive pole, separator, negative pole successively on a piece of polyimide support body; The organic electrolyte is impregnated, and the same piece of polyimide support is covered on the surface of the assembly to form a capacitor unit. The polyimide supports of multiple capacitor units are connected to each other and wound into a coin-shaped structure. On both sides of the coin-shaped structure is a positive electrode at one end and a negative electrode at the other end, which are respectively sealed and connected by aluminum covers. The aluminum covers also serve as electrode terminals and act as current collectors. Lower micro supercapacitor resistance. 2.根据权利要求1所述的一种有机电解液的混合式微型超级电容器,其特征在于,所述正极与负极中分别包含储能材料、导电材料乙炔黑和粘合剂聚偏氟乙烯;正极与负极采用不同材料组成混合式超级电容器能够将单元电压提高至3.6V。2. The hybrid micro-supercapacitor of a kind of organic electrolyte according to claim 1, wherein, the positive pole and the negative pole respectively comprise energy storage material, conductive material acetylene black and binder polyvinylidene fluoride; The hybrid supercapacitor composed of different materials for positive and negative electrodes can increase the cell voltage to 3.6V. 3.根据权利要求1所述的一种有机电解液的混合式微型超级电容器,其特征在于,所述正极储能材料为活性碳,导电材料为乙炔黑,粘合剂为聚偏氟乙烯,并加入1-甲基吡咯烷酮,按质量份数比7∶2∶1∶30充分搅拌后形成流动性良好的浆料。3. The hybrid micro supercapacitor of a kind of organic electrolyte according to claim 1, is characterized in that, described anode energy storage material is activated carbon, conductive material is acetylene black, binder is polyvinylidene fluoride, And add 1-methylpyrrolidone, according to the ratio of parts by mass of 7:2:1:30, fully stir to form a slurry with good fluidity. 4.根据权利要求1所述的一种有机电解液的混合式微型超级电容器,其特征在于,所述负极包括储能材料为钛酸锂Li4Ti5O12导电材料为乙炔黑,粘合剂为聚偏氟乙烯,并加入1-甲基吡咯烷酮充分搅拌后形成流动性良好的浆料;钛酸锂、乙炔黑、聚偏氟乙烯和1-甲基吡咯烷酮质量份数比为7∶2∶1∶30,充分搅拌后形成流动性良好的浆料。4. the hybrid micro-supercapacitor of a kind of organic electrolytic solution according to claim 1, is characterized in that, described negative electrode comprises energy storage material and is lithium titanate Li 4 Ti 5 O 12 conductive material is acetylene black, bonding The agent is polyvinylidene fluoride, and 1-methylpyrrolidone is added to form a slurry with good fluidity after fully stirring; the ratio of mass parts of lithium titanate, acetylene black, polyvinylidene fluoride and 1-methylpyrrolidone is 7:2 : 1:30, a slurry with good fluidity is formed after fully stirring. 5.根据权利要求1所述的一种有机电解液的混合式微型超级电容器,其特征在于,所述隔离体为多孔结构,其成分为聚偏氟乙烯PVDF-六氟丙烯PHFP共聚物。5. The hybrid micro-supercapacitor of a kind of organic electrolyte according to claim 1, characterized in that, the separator is a porous structure, and its composition is polyvinylidene fluoride PVDF-hexafluoropropylene PHFP copolymer. 6.根据权利要求1所述的一种有机电解液的混合式微型超级电容器,其特征在于,所述正极、负极及隔离体中浸渍了有机电解液,电解液溶质成分为高氯酸锂LiClO4,溶剂成分为碳酸乙烯脂EC和碳酸二乙脂DEC混合液,EC和DEC的质量份数比为1∶2;加入高氯酸锂LiClO4于溶剂中,配置成浓度为1mol/L的有机电解液溶液。6. the hybrid micro-supercapacitor of a kind of organic electrolytic solution according to claim 1, is characterized in that, impregnated organic electrolytic solution in described positive pole, negative pole and separator, and electrolytic solution solute composition is lithium perchlorate LiClO 4. The solvent component is a mixture of ethylene carbonate EC and diethyl carbonate DEC, and the mass-number ratio of EC and DEC is 1:2; add lithium perchlorate LiClO 4 to the solvent, and configure it to be 1mol/L Organic electrolyte solution. 7.一种有机电解液的混合式微型超级电容器的制造方法,其特征在于,首先正极及负极储能材料的浆料采用丝网印刷法制备在聚酰亚胺基体表面,形成正极及负极阵列,在正极及负极间涂制隔离体,浸渍有机电解液,将聚酰亚胺基体覆盖在上表面,然后采用裁切的方法将上述结构分割成为一个一个的单元,分切过程中正极及负极分别被分成相等两部分,并分别属于不同单元,形成在两片聚酰亚胺支撑体之间,按正极、隔离体及负极排列,各单元按相同方向连接并卷绕成为硬币状结构,币状结构两侧沉积铝封壳以完成电容器封装,铝封壳分别与正极、负极接触作为电极引线,以降低微型超级电容器内阻。7. A method for manufacturing a hybrid micro-supercapacitor with an organic electrolyte, characterized in that first, the slurry of the positive and negative energy storage materials is prepared on the surface of the polyimide substrate by screen printing to form a positive and negative array , apply a separator between the positive electrode and the negative electrode, impregnate the organic electrolyte, cover the polyimide matrix on the upper surface, and then use the cutting method to divide the above structure into units one by one. During the cutting process, the positive electrode and the negative electrode They are divided into two equal parts and belong to different units respectively. They are formed between two polyimide supports and arranged according to the positive electrode, separator and negative electrode. Each unit is connected in the same direction and wound into a coin-like structure. Aluminum casings are deposited on both sides of the shape structure to complete the capacitor package, and the aluminum casings are respectively in contact with the positive and negative electrodes as electrode leads to reduce the internal resistance of the micro supercapacitor. 8.根据权利要求7所述的有机电解液的混合式微型超级电容器的制造方法,其特征在于,正极及负极阵列的制备是将上述电极浆料,采用丝网印刷方法,在大面积聚酰亚胺基体上印制正极阵列及负极阵列;正极阵列及负极阵列印制完成后需在80-150℃温度范围内,真空烘干1小时以彻底去除1-甲基吡咯烷酮溶剂;所印制正极与负极尺寸相同,电极宽度500微米-3000微米,电极间距500微米-1000微米,电极厚度200微米-2000微米。8. The manufacture method of the hybrid micro-supercapacitor of organic electrolyte according to claim 7, is characterized in that, the preparation of positive electrode and negative electrode array is with above-mentioned electrode paste, adopts screen printing method, on large-area polyamide The positive electrode array and the negative electrode array are printed on the imine substrate; after the positive electrode array and the negative electrode array are printed, they need to be dried in vacuum within the temperature range of 80-150°C for 1 hour to completely remove the 1-methylpyrrolidone solvent; the printed positive electrode The same size as the negative electrode, the electrode width is 500 microns-3000 microns, the electrode spacing is 500 microns-1000 microns, and the electrode thickness is 200 microns-2000 microns. 9.根据权利要求7所述的有机电解液的混合式微型超级电容器的制造方法,其特征在于,所述隔离体的制备是将聚偏氟乙烯-六氟丙烯共聚物于丙酮中充分溶解,然后采用甩涂的方法涂制于电极阵列之间,甩涂完成的基片在25℃室温环境中水平放置30分钟,然后将其放置在40℃真空烘箱中彻底烘干脱去丙酮后形成多孔聚偏氟乙烯隔离体。9. the manufacture method of the hybrid micro-supercapacitor of organic electrolyte according to claim 7, is characterized in that, the preparation of described spacer is that polyvinylidene fluoride-hexafluoropropylene copolymer is fully dissolved in acetone, Then it is coated between the electrode arrays by spin-coating method, and the spin-coated substrate is placed horizontally at room temperature at 25°C for 30 minutes, and then placed in a vacuum oven at 40°C to dry thoroughly to remove acetone and form pores. Polyvinylidene fluoride separator. 10.根据权利要求7所述的有机电解液的混合式微型超级电容器的制造方法,其特征在于,所述浸渍有机电解液是在聚偏氟乙烯-六氟丙烯隔离体甩涂完成后进行有机电解液的浸渍,以确保电极和隔离体的孔洞结构中充满了电解液;所采用的电解液为有机电解液溶液,浓度为1mol/L,溶质为高氯酸锂LiClO4,溶剂为碳酸乙烯脂EC和碳酸二乙脂DEC混合液,溶剂中EC和DEC的质量份数比为1∶2;电解液浸渍过程为将完成电极印刷及隔离体制备的结构放置在有机电解液中充分浸渍,取出后甩干以除去多余电解液。10. The manufacture method of the hybrid miniature supercapacitor of organic electrolyte according to claim 7, is characterized in that, described impregnating organic electrolyte is after spin-coating of polyvinylidene fluoride-hexafluoropropylene separator is finished organically. Electrolyte impregnation to ensure that the pore structure of the electrode and separator is filled with electrolyte; the electrolyte used is an organic electrolyte solution with a concentration of 1mol/L, the solute is lithium perchlorate LiClO 4 , and the solvent is ethylene carbonate Grease EC and diethyl carbonate DEC mixture, the mass ratio of EC and DEC in the solvent is 1:2; the electrolyte impregnation process is to place the structure that has completed electrode printing and separator preparation in the organic electrolyte and fully impregnate it. Take it out and shake dry to remove excess electrolyte.
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