CN101959103B - Vibrating diaphragm and the mike including this vibrating diaphragm - Google Patents

Abstract

The present invention provides a vibrating membrane, which includes a vibrating part and several supporting parts connected to the vibrating part, the supporting parts extend outward from the outer circumference of the vibrating part, the vibrating membrane includes at least one central line, and the supporting parts are on the same side of the centerline. This diaphragm improves sensitivity.

Description

Diaphragm and microphone including the same

technical field

The invention relates to a vibrating membrane and a microphone comprising the vibrating membrane.

Background technique

With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality.

Micro-Electro-Mechanical-System Microphone (MEMS for short) is currently the most widely used microphone with better performance. In the related art, a silicon capacitor microphone includes a substrate, a back plate and a diaphragm. Among them, the diaphragm is an important part of the silicon condenser microphone, and its general structure is that the diaphragm includes a vibrating part and a supporting part connected with the vibrating part, and the supporting part is evenly and regularly distributed on the outer periphery of the vibrating part. The stress gradient generated by this structural layer stress on the diaphragm cannot be released. Therefore, it is necessary to provide a novel diaphragm.

Contents of the invention

The technical problem to be solved by the present invention is to provide a diaphragm capable of improving sensitivity.

According to the technical problems to be solved above, a vibrating membrane is designed, which includes a vibrating part and several supporting parts connected to the vibrating part, the supporting parts extend outward from the outer circumference of the vibrating part, and the vibrating membrane includes at least one center line, the support parts are located on the same side of the center line.

Preferably, an adjustable damping device is provided near the outer circumference of the diaphragm.

Preferably, the adjusting damping device is a plurality of sound holes, and the connecting line between the centers of the sound holes is a circle.

Preferably, the damping device is several irregular slits distributed in the area near the outer periphery of the diaphragm.

Preferably, the support part includes two beams, and the angle between the two beams is 180°.

The present invention also provides a microphone, which is characterized in that the microphone includes the diaphragm as described above.

The beneficial effect of the present invention is that: the support parts are all located on the same side of the center line of the diaphragm, providing a large-area free end film, thereby releasing the stress and improving the sensitivity; the acoustic hole can further release the stress and improve the sensitivity; the acoustic hole can adjust the damping, improve Microphone performance; the free end can be in contact with the backplane after the voltage is applied, with a certain degree of sealing, and the damping can be adjusted.

Description of drawings

Fig. 1 is a three-dimensional schematic diagram of the first embodiment of the diaphragm provided by the present invention;

Fig. 2 is a schematic perspective view of the second embodiment of the diaphragm provided by the present invention.

detailed description

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

The diaphragm provided by the invention is used in microelectronic devices, such as silicon capacitor microphones, loudspeakers, receivers and the like. Silicon condenser microphones are mainly used in electronic devices such as mobile phones to receive sound.

Referring to Fig. 1 and Fig. 2, the first embodiment provided by the present invention. The diaphragm 1 provided by the present invention includes a vibrating part 11 and a supporting part 12 connected to the vibrating part 11 , and the supporting part 12 extends outward from the outer circumference of the vibrating part 11 .

The vibrating membrane 1 is provided with at least one center line, and all the supporting parts 12 are located on the same side of the center line.

The supporting part 12 includes at least two beams, and the beams are unevenly distributed on the periphery of the diaphragm. Referring to Fig. 2, there are 3 beams.

The area near the outer periphery of the diaphragm 1 is provided with adjusting damping devices such as acoustic holes 13 or gaps.

It can be seen from Figure 1 and Figure 2 that the center line of the sound hole is a circle.

Certainly, sound holes, gaps, etc. may also be irregularly distributed in the area close to the outer periphery of the diaphragm 1 .

In one embodiment, the supporting part 12 includes two beams, and the angle between the two beams is 180°.

The shape of the vibrating membrane 1 can be circular, square or the like.

The microphone provided by the present invention includes the above-mentioned diaphragm 1 .

The protection scope of the present invention is not limited to the above-mentioned embodiments, but all equivalent modifications or changes made by those skilled in the art based on the content disclosed in the present invention shall be included in the protection scope described in the claims.

Claims (10)

1. A vibrating membrane comprising a vibrating part and several supporting parts connected to the vibrating part, the supporting parts extending outward from the outer circumference of the vibrating part, characterized in that: the vibrating membrane comprises at least one centerline, the The supporting parts are all located on the same side of the central line. 2. The diaphragm according to claim 1, characterized in that: an adjustable damping device is provided near the outer periphery of the diaphragm. 3 . The diaphragm according to claim 2 , wherein the adjusting damping device is a plurality of sound holes, and the connecting line between the centers of the sound holes is a circle. 4 . 4 . The diaphragm according to claim 2 , wherein the adjusting damping device is a plurality of irregular slits distributed near the outer periphery of the diaphragm. 5 . 5 . The diaphragm according to claim 1 , 2 or 3 , characterized in that: the supporting part comprises two beams, and the angle between the two beams is 180°. 6. A microphone, characterized in that the microphone comprises the diaphragm as claimed in claim 1. 7. The microphone according to claim 6, characterized in that an adjustable damping device is provided near the outer periphery of the diaphragm. 8 . The microphone according to claim 7 , wherein the adjusting damping device is a plurality of sound holes, and a line connecting the centers of the sound holes is a circle. 9 . The microphone according to claim 7 , wherein the adjustable damping device is a plurality of irregular slits distributed in the area near the outer periphery of the diaphragm. 10 . 10. The microphone according to claim 6, 7 or 8, characterized in that: the supporting part comprises two beams, and the angle between the two beams is 180°.