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CN102128701B - Micro-differential voltage gauge based on eddy current displacement measuring technology - Google Patents

Micro-differential voltage gauge based on eddy current displacement measuring technology Download PDF

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Publication number
CN102128701B
CN102128701B CN2010106022237A CN201010602223A CN102128701B CN 102128701 B CN102128701 B CN 102128701B CN 2010106022237 A CN2010106022237 A CN 2010106022237A CN 201010602223 A CN201010602223 A CN 201010602223A CN 102128701 B CN102128701 B CN 102128701B
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China
Prior art keywords
micro
housing
diaphragm
circuit board
differential pressure
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Expired - Fee Related
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CN2010106022237A
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Chinese (zh)
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CN102128701A (en
Inventor
李岩峰
任克强
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Pfeiffer (Beijing) Technology Co., Ltd.
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SAILSORS INSTRUMENTS CO Ltd
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Abstract

The invention discloses a micro-differential voltage gauge based on an eddy current displacement measuring technology. The micro-differential voltage gauge comprises a shell, a gauge cover arranged on the shell, a leaf spring and a measuring diaphragm which are arranged in the shell, a diaphragm arranged at the upper end of the measuring diaphragm, wherein one end of the leaf spring is connected with the measuring diaphragm through an elastic part, and the other end of the leaf spring is fixed on the shell; a measurement circuit board is arranged in the shell, is positioned at the upper end of the leaf spring, and is provided with a gauge display; a U-shaped metal plate is arranged on the measuring diaphragm, and a planar inductive circuit board which is vertical to the measurement circuit board is arranged in the center of the U-shaped metal plate; and the planar inductive circuit board is connected with the measurement circuit board through a right angle bent needle. By adopting the micro-differential voltage gauge based on the eddy current displacement measuring technology, tiny displacement is measured by adopting an eddy current principle, a planar inductor is manufactured on a printed circuit board (PCB), and accurate measurement on voltage difference can be realized in a non-contact mode by utilizing a variable-area high-frequency reflective eddy current technology.

Description

Micro-differential pressure gauge based on the current vortex displacement measuring technique
Technical field
The present invention relates to a kind of micro-differential pressure gauge, especially relate to a kind of micro-differential pressure gauge based on the current vortex displacement measuring technique.
Background technology
Be widely used in measuring pressure, filter resistance, wind speed, furnace pressure, orifice plate differential pressure, bubble water level and the industries such as liquid amplifier or hydraulic system pressure of fan and fan blower based on the mechanical type micro-differential pressure gauge of rubber diaphragm principle; Also be used for simultaneously the control of air gas ratio and the autovalve control of combustion process, and fields such as blood pressure in the medical health equipment and respiratory pressure monitoring.
Mostly the structure of mechanical type micro-differential pressure gauge of the prior art is that be that high pressure chest and low-pressure cavity are separated by a diaphragm that moves flexibly with two pressure chambers; Measure as sensitive element with rubber diaphragm and sheet spring; When differential pressure (comprising malleation, negative pressure) when acting on diaphragm; Diaphragm produces distortion, and the position of diaphragm changes, and carries out displacement by high pressure to the low pressure place.Simultaneously, diaphragm links to each other with another mechanical part again, drives its motion, drives pointer through physical construction and carries out the pressure indication.
Like the patent No. is that the application for a patent for invention of ZL 200810103280.3 just discloses a kind of mechanical differential pressure gauge with temperature and humidity indicating function; Comprise outer cover and the humiture watch glasses that is connected with outer cover, hyperbaric chamber and low-pressure chamber are set in the outer cover, the middle part, hyperbaric chamber is provided with introduces the gas heat-insulation layer; Introducing gas heat-insulation layer lower end, a left side, hyperbaric chamber downside are provided with the high pressure admission hole; The low-pressure chamber lower wall is provided with the low-pressure admission hole, separates through diaphragm between hyperbaric chamber and the low-pressure chamber and the diaphragm gland is set on diaphragm, is connected through pressure ring between hyperbaric chamber and the outer cover and through the sealing of hyperbaric chamber O-ring seal; The magnetic screw mechanism is set in the hyperbaric chamber; The pressure survey gauge outfit is installed on the magnetic screw mechanism, also is provided with temperature and humidity measurement heat-insulation layer and temperature and humidity measurement mechanism in the humiture watch glasses, and temperature and humidity is measured gauge outfit and is installed in the temperature and humidity measurement mechanism.The mechanical differential pressure gauge that possesses said structure exists measures inadequately accurately, shows inadequately defective intuitively.
Continuous development along with sensing technology has engendered the electronic type differential pressure gauge, and the displacement that is about to the mechanical motion generation comes out through sensor measurement; Become the differential pressure gauge that electric signal carries out differential pressure measurement, the sensor of Displacement Measurement has a lot, for example; Inductance type, condenser type, Hall element; Linear variable difference transformers etc. are because of convenience and the accuracy of electronic type differential pressure gauge in its measurement receives more and more multi-user's welcome.
Summary of the invention
The object of the invention overcomes deficiency of the prior art exactly, and a kind of convenient measurement, the micro-differential pressure gauge based on the current vortex displacement measuring technique that measuring accuracy is high are provided.
For solving the problems of the prior art; The present invention has adopted following technical scheme: comprise housing, be arranged on the watch glasses on the said housing, the diaphragm gland that is arranged on sheet spring and the measuring diaphragm in the said housing and is arranged on said measuring diaphragm upper end; One end of said spring is connected with said measuring diaphragm through elastomeric element; The other end is fixed on the said housing, also is provided with the metering circuit plate in the said housing, and said metering circuit plate is positioned at the upper end of said spring; Said metering circuit plate is provided with instrument display; Said measuring diaphragm is provided with U type sheet metal, and the center of said U type sheet metal is provided with and the perpendicular planar inductor circuit board of said metering circuit plate, and said planar inductor circuit board is connected with said metering circuit plate through the right angle looper.
Further, said measuring diaphragm is circular, and the bottom stiff end of said U type sheet metal and said elastomeric element all are arranged on the home position of said measuring diaphragm.
Further, said U type sheet metal and the noncontact of said planar inductor circuit board.
Further, said U type sheet metal is a U type copper sheet.
Further, said metering circuit plate also be fixed on said housing on electric connector be connected.
Further, said electric connector pass said housing by silica gel sealing on said housing.
Further, said watch glasses is the sealed transparent cover, and the junction of said sealed transparent cover and said housing is provided with O-ring seal.
The advantage that the present invention is based on the micro-differential pressure gauge of current vortex displacement measuring technique is: adopt eddy current principle to measure micro-displacement; On the PCB circuit board, made planar inductor; Utilize variable area reflective high frequency current vortex technology, realize the accurate measurement of differential pressure through non-contacting mode.
Description of drawings
Fig. 1 is the floor map that the present invention is based on the micro-differential pressure gauge of current vortex displacement measuring technique.
Fig. 2 is the main cut-open view that the present invention is based on the micro-differential pressure gauge of current vortex displacement measuring technique.
Fig. 3 is the structural representation after the micro-differential pressure gauge that the present invention is based on the current vortex displacement measuring technique is removed metering circuit plate and diaphragm gland.
Fig. 4 is the structural representation that the present invention is based on the micro-differential pressure gauge of current vortex displacement measuring technique.
Description of reference numerals: 1-sheet spring, 2-U type sheet metal, 3-housing, 4-measuring diaphragm, 5-planar inductor circuit board, 6-metering circuit plate, 7-diaphragm gland, 8-right angle looper, 9-electric connector, 10-watch glasses, 11-O-ring seal, 12-diaphragm spring, 13-instrument display.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further detailed explanation.
As depicted in figs. 1 and 2, the present invention is based on the micro-differential pressure gauge of current vortex displacement measuring technique, comprise housing 3, housing 3 is provided with watch glasses 10, and housing 3 is provided with O-ring seal 11 with the junction of watch glasses 10; Be provided with sheet spring 1 and measuring diaphragm 4 in the housing 3; The upper end of sheet spring 1 is provided with metering circuit plate 6; Metering circuit plate 6 is provided with instrument display 13, and the upper end of measuring diaphragm 4 is provided with diaphragm gland 7, and diaphragm gland 7 is with being pressed on the housing 3 around the measuring diaphragm 4.
Like Fig. 1, Fig. 2 and shown in Figure 3, an end of sheet spring 1 is connected through the center of diaphragm spring 12 with measuring diaphragm 4, and the other end passes through screw retention on housing 3.
Like Fig. 3 and shown in Figure 4, measuring diaphragm 4 is circular, and the bottom stiff end of U type sheet metal 2 is arranged on its home position; The center of U type sheet metal 2 is provided with planar inductor circuit board 5; Planar inductor circuit board 5 is connected with metering circuit plate 6 through right angle looper 8, and vertical each other with metering circuit plate 6, in the present embodiment; Through the welding and assembling height of adjustment right angle looper 8 on metering circuit plate 6, make planar inductor circuit board 5 be in the center of U type sheet metal 2.U type sheet metal 2 can the front and back displacement under the drive of measuring diaphragm 4.Amount of displacement depends on the rigidity of sheet spring 1, and in the process of displacement, planar inductor circuit board 5 is noncontact with U type sheet metal 2 all the time.
In the present embodiment, U type sheet metal 2 adopts the U type copper sheet that conducts electricity very well.
As shown in Figure 1, metering circuit plate 6 is wired on the electric connector 9, and electric connector 9 provides power supply for micro-differential pressure gauge on the one hand, on the other hand micro-differential pressure gauge data measured information is outputed to external unit.
In the present embodiment, said electric connector 9 is circular electrical connector socket, and circular electrical connector socket has passed housing 3, and with silica gel sealing on housing 3.
In the present embodiment, said watch glasses 10 is the sealed transparent cover, and the demonstration numerical value on the instrument display 13 can read clearly.
Like Fig. 2 and shown in Figure 4, measuring diaphragm 4 has been divided into two cavitys up and down naturally with housing 3, and the top is a high pressure chest; The below is a low-pressure cavity, and metering circuit plate 6 is in the high pressure chest, and high pressure chest is realized the sealing of high pressure chest through watch glasses 10 and O-ring seal 11; The center of measuring diaphragm 4 is under the effect of differential pressure; Overcome sheet spring 1 the front and back displacement is taken place its acting force, under certain differential pressure effect, sheet spring 1 reaches balance with measuring diaphragm 4 in new position again.Yet the displacement of measuring diaphragm 4 then drives and is installed in its RC U type sheet metal 2 generation displacements; The change in location of U type sheet metal 2 makes the area that covers on the planar inductor circuit board 5 change; Thereby the inductance value of planar inductor circuit board 5 is changed; Metering circuit plate 6 is realized the accurate measurement to the differential pressure subtle change through detecting the variation of inductance value, and measurement data is shown on instrument display 13.
Specific embodiment of the present invention has been announced its preferred implementation, but is not limited to this kind embodiment.Those of ordinary skill in the art understands spirit of the present invention very easily according to the foregoing description, and makes different amplifications and variation.But only otherwise break away from spirit of the present invention, all in this patent protection domain.

Claims (6)

1. micro-differential pressure gauge based on the current vortex displacement measuring technique; Comprise housing, be arranged on the watch glasses on the said housing, the diaphragm gland that is arranged on sheet spring and the measuring diaphragm in the said housing and is arranged on said measuring diaphragm upper end; One end of said spring is connected with said measuring diaphragm through elastomeric element; The other end is fixed on the said housing; It is characterized in that: also be provided with the metering circuit plate in the said housing, said metering circuit plate is positioned at the upper end of said spring, and said metering circuit plate is provided with instrument display; Said measuring diaphragm is provided with U type sheet metal; The center of said U type sheet metal is provided with and the perpendicular planar inductor circuit board of said metering circuit plate, and said planar inductor circuit board is connected with said metering circuit plate through the right angle looper, said U type sheet metal and the noncontact of said planar inductor circuit board.
2. the micro-differential pressure gauge based on the current vortex displacement measuring technique according to claim 1 is characterized in that: said measuring diaphragm is for circular, and the bottom stiff end of said U type sheet metal and said elastomeric element all are arranged on the home position of said measuring diaphragm.
3. the micro-differential pressure gauge based on the current vortex displacement measuring technique according to claim 1 is characterized in that: said U type sheet metal is a U type copper sheet.
4. the micro-differential pressure gauge based on the current vortex displacement measuring technique according to claim 1 is characterized in that: said metering circuit plate also be fixed on said housing on electric connector be connected.
5. the micro-differential pressure gauge based on the current vortex displacement measuring technique according to claim 4 is characterized in that: said electric connector pass said housing by silica gel sealing on said housing.
6. the micro-differential pressure gauge based on the current vortex displacement measuring technique according to claim 1 is characterized in that: said watch glasses is the sealed transparent cover, and the junction of said sealed transparent cover and said housing is provided with O-ring seal.
CN2010106022237A 2010-12-23 2010-12-23 Micro-differential voltage gauge based on eddy current displacement measuring technology Expired - Fee Related CN102128701B (en)

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CN2010106022237A CN102128701B (en) 2010-12-23 2010-12-23 Micro-differential voltage gauge based on eddy current displacement measuring technology

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CN102128701B true CN102128701B (en) 2012-06-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105004257A (en) * 2015-05-21 2015-10-28 浙江大学 Eddy current displacement sensor with display function

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108106758B (en) * 2017-12-21 2020-06-26 中国电子科技集团公司第四十八研究所 Silicon film eddy current micro-pressure sensor
CN109682404B (en) * 2018-12-24 2020-10-30 彭希南 Water temperature and water level measuring instrument for dead nuclear fuel pool of nuclear power station

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1040682A (en) * 1988-09-02 1990-03-21 株式会社日立制作所 Differential pressure pick-up
CN2295208Y (en) * 1996-11-05 1998-10-21 张震 Differential pressure meter
US6418793B1 (en) * 1998-02-18 2002-07-16 A Theobald Sa Differential pressure sensor
CN1666097A (en) * 2002-06-18 2005-09-07 罗斯蒙德公司 Low-cost capacitive pressure transmitter with plate coating, particle filter, self-contained
CN201909694U (en) * 2010-12-23 2011-07-27 北京塞尔瑟斯仪表科技有限公司 Differential pressure gauge based on eddy current displacement measurement technology

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1040682A (en) * 1988-09-02 1990-03-21 株式会社日立制作所 Differential pressure pick-up
CN2295208Y (en) * 1996-11-05 1998-10-21 张震 Differential pressure meter
US6418793B1 (en) * 1998-02-18 2002-07-16 A Theobald Sa Differential pressure sensor
CN1666097A (en) * 2002-06-18 2005-09-07 罗斯蒙德公司 Low-cost capacitive pressure transmitter with plate coating, particle filter, self-contained
CN201909694U (en) * 2010-12-23 2011-07-27 北京塞尔瑟斯仪表科技有限公司 Differential pressure gauge based on eddy current displacement measurement technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105004257A (en) * 2015-05-21 2015-10-28 浙江大学 Eddy current displacement sensor with display function

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Owner name: BEIJING SAILSORS INSTRUMENTS LTD.

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Address after: North Fourth Ring Road 100083 Beijing Haidian District City 229 Haitai building room 621

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Patentee before: Sailsors Instruments Co., Ltd.

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Address after: Room 537-A, 229 Haitai building 100083 North Fourth Ring Road in Beijing city of Haidian District

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Patentee before: Sailsors Instruments Ltd. Beijing

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Termination date: 20181223

CF01 Termination of patent right due to non-payment of annual fee