CN102122525B - Readout amplifying circuit for resistive random access memory (RRAM) cell - Google Patents
Readout amplifying circuit for resistive random access memory (RRAM) cell Download PDFInfo
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Abstract
本发明公开了一种阻变存储单元读出放大电路,目的是提供一种新型阻变存储单元读出放大电路,降低干扰电流对读操作的影响,降低整体直流功耗,提高参考电压产生电路的精确性。本发明由比较读出级和参考电压产生电路组成,比较读出级由N个读出位组成,N个读出位与阻变存储单元阵列位线一一对应,参考电压产生电路由M个分压元件和一个运算放大器组成;每个读出位由一个敏感放大器、一个反馈电阻、一个电压比较器组成;参考电压产生电路中的每个分压元件均为电容,电容采用串联的方式,运算放大器的正向输入端与一个分压点相连。采用本发明可降低误读率,降低整体直流功耗,提高参考电压产生电路输出参考电压的精度。
The invention discloses a readout amplifier circuit of a resistive variable memory unit, and aims to provide a novel readout amplifier circuit of a resistive variable memory unit, reduce the influence of interference current on the read operation, reduce the overall DC power consumption, and improve the reference voltage generating circuit the accuracy. The present invention is composed of a comparison readout stage and a reference voltage generation circuit, the comparison readout stage is composed of N readout bits, and the N readout bits correspond to the bit lines of the resistive memory cell array one by one, and the reference voltage generation circuit consists of M Composed of a voltage dividing element and an operational amplifier; each readout bit is composed of a sensitive amplifier, a feedback resistor, and a voltage comparator; each voltage dividing element in the reference voltage generating circuit is a capacitor, and the capacitor is connected in series. The non-inverting input of the op amp is connected to a voltage divider. By adopting the invention, the misreading rate can be reduced, the overall DC power consumption can be reduced, and the precision of the reference voltage output by the reference voltage generating circuit can be improved.
Description
技术领域technical field
本发明涉及集成电路设计领域阻变存储单元阵列外围的读出放大电路,具体涉及一种用直流增益变化来采样阻值变化,用可控电容分压器来产生参考电压的读出放大电路。The invention relates to a readout amplifier circuit on the periphery of a resistive variable memory unit array in the field of integrated circuit design, in particular to a readout amplifier circuit which uses a DC gain change to sample resistance value changes and uses a controllable capacitor voltage divider to generate a reference voltage.
背景技术Background technique
非易失性存储器是一种能在掉电后仍保存原有存储信息的存储器,在现代电子系统中得到了广泛的运用。非易失性存储器种类繁多,阻变存储器(Resistive RandomAccess Memory,RRAM)是其中的一种。由于阻变存储器具有超高的存储密度、结构简单、速度快和非易失性的特点,应用前景十分广阔。Non-volatile memory is a kind of memory that can retain the original stored information after power failure, and is widely used in modern electronic systems. There are many types of non-volatile memory, and resistive random access memory (RRAM) is one of them. Due to the characteristics of ultra-high storage density, simple structure, high speed and non-volatility of RRAM, the application prospect is very broad.
阻变存储单元阵列是阻变存储器的核心,由大量的阻变存储单元按照一定的空间结构组成。交叉电极结构是一种典型的阻变存储单元阵列结构,其集成度较高、兼容主流的微电子工艺。交叉电极结构为两层相互垂直交叉的平行纳米线,形成一个网格。在每个交叉点处形成一个阻变存储单元,阻变存储单元以高阻态和低阻态分别表示逻辑“0”和“1”。图1是交叉电极结构阻变存储单元阵列物理结构示意图。阻变存储单元由顶电极、底电极和中间插入的阻变材质组成,图2是其横截面示意图。图3为阻变存储单元的电压和电流关系示意图,其中虚线为高阻态存储单元的I-V曲线,实线为低阻态存储单元的I-V曲线。阻变存储单元两端的电压达到或超过高阻态转换电位A点电压值时,阻变存储单元转变为高阻态,阻变存储单元两端的电压达到或超过低阻态转换电位B点电压值时,转变为低阻态。阻变存储单元两端的电压在A点电压值和B点电压值之间时阻态不发生转变。利用阻变存储单元的这个特性,通过改变外加电压的大小来改变阻变存储单元的阻态从而实现信息的写入;读取数据时,在阻变存储单元两个电极上施加读取电压,通过检测阻变存储单元阻态,实现信息的读取。为了检测分辨阻变存储单元的阻态,将流过阻变阻变存储单元的电流信号转变为电压信号进行读出放大是一种有效的方式。The resistive memory cell array is the core of the resistive memory, and is composed of a large number of resistive memory cells according to a certain spatial structure. The interdigitated electrode structure is a typical resistive memory cell array structure, which has a high degree of integration and is compatible with mainstream microelectronics processes. The cross-electrode structure is two layers of parallel nanowires perpendicularly intersecting each other to form a grid. A resistive memory cell is formed at each intersection, and the resistive memory cell represents logic "0" and "1" in a high-resistance state and a low-resistance state, respectively. FIG. 1 is a schematic diagram of the physical structure of a resistive memory cell array with an interdigitated electrode structure. The resistive memory cell is composed of a top electrode, a bottom electrode and a resistive material inserted in the middle, and FIG. 2 is a schematic cross-sectional view thereof. 3 is a schematic diagram of the relationship between voltage and current of a resistive memory cell, wherein the dotted line is the I-V curve of the memory cell in the high resistance state, and the solid line is the I-V curve of the memory cell in the low resistance state. When the voltage at both ends of the resistive memory unit reaches or exceeds the voltage value at point A of the high-resistance transition potential, the resistive memory unit turns into a high-impedance state, and the voltage at both ends of the resistive memory unit reaches or exceeds the voltage value at point B of the low-resistance transition potential , transitions to a low-impedance state. When the voltage at both ends of the resistive memory cell is between the voltage value of point A and the voltage value of point B, the resistance state does not change. Utilizing this characteristic of the resistive memory cell, the resistance state of the resistive memory cell is changed by changing the applied voltage to realize writing of information; when reading data, a read voltage is applied to the two electrodes of the resistive memory cell, Information reading is realized by detecting the resistance state of the resistive memory unit. In order to detect and distinguish the resistance state of the resistive memory unit, it is an effective way to convert the current signal flowing through the resistive memory unit into a voltage signal for read amplification.
图4是一种典型的读出放大结构,WL1为阻变存储阵列的第一字线,WL2为阻变存储阵列的第二字线,……,WLj为阻变存储阵列的第j字线,……,WLP为阻变存储阵列的第P字线,BL1为阻变存储阵列的第一位线,BL2为阻变存储阵列的第二位线,……,BLi为阻变存储阵列的第i位线,……,BLN为阻变存储阵列的第N位线,N为阻变存储单元阵列的位线数目,P为阻变存储阵列字线的数目,P和N均为正整数。该读出放大结构由比较读出级、参考电压产生电路两部分组成。其中比较读出级由N个读出位组成,分别对应阻变存储单元阵列的N个位线,即第一读出位对应第一位线,第二读出位对应第二位线,以此类推。每个读出位均由负载电阻、电压比较器组成,第一读出位的负载电阻的一端连接阻变存储单元阵列的第一位线和第一读出位的敏感放大器的正向输入端,另一端接地,第一读出位中的敏感放大器的反相输入端连接参考电压产生电路的输出端Vref,第一读出位的输出Vout1连接到外部输出;第二读出位至第N读出位中负载电阻和敏感放大器的连接方式与第一读出位类似,即每个读出位的负载电阻的一端与该读出位对应的位线和该读出位中的敏感放大器的正向输入端相连,另一端接地,每个读出位的敏感放大器的反相输入端连接参考电压产生电路的输出端Vref,每个读出位的输出端接外部输出。参考电压产生电路由M个分压元件和运算放大器组成,M为正整数,每个分压元件均为电阻,M个分压元件采用串连方式连接,每两个分压元件的结合部形成一个分压点,分压点的电位可计算得出,根据电路的需要,选择合适的分压点(图中以A点表示)。运算放大器的正向输入端连接一个分压点如A点,运算放大器的输出端Vref与其反相输入端相连形成一个电压跟随器,用以提高驱动能力。参考电压产生电路的输出端Vref连接到比较读出级中每个读出位的敏感放大器的反相输入端,用以提供参考电压。Figure 4 is a typical read amplifier structure, WL 1 is the first word line of the resistive memory array, WL 2 is the second word line of the resistive memory array, ..., WL j is the first word line of the resistive memory array j word line, ..., WL P is the Pth word line of the resistive memory array, BL 1 is the first bit line of the resistive memory array, BL 2 is the second bit line of the resistive memory array, ..., BL i is the i-th bit line of the resistive memory array, ..., BL N is the Nth bit line of the resistive memory array, N is the number of bit lines of the resistive memory cell array, and P is the number of word lines of the resistive memory array , P and N are both positive integers. The sense amplification structure is composed of two parts: a comparison readout stage and a reference voltage generating circuit. The comparison readout stage is composed of N readout bits, which respectively correspond to N bitlines of the resistive memory cell array, that is, the first readout bit corresponds to the first bitline, and the second readout bit corresponds to the second bitline, so that And so on. Each readout bit is composed of a load resistor and a voltage comparator, and one end of the load resistor of the first readout bit is connected to the first bit line of the resistive memory cell array and the positive input terminal of the sensitive amplifier of the first readout bit , the other end is grounded, the inverting input terminal of the sensitive amplifier in the first readout position is connected to the output terminal V ref of the reference voltage generation circuit, the output V out1 of the first readout position is connected to the external output; the second readout position is connected to The connection mode of the load resistor and the sensitive amplifier in the Nth read bit is similar to that of the first read bit, that is, one end of the load resistor of each read bit is connected to the bit line corresponding to the read bit and the sensitive amplifier in the read bit. The positive input terminal of the amplifier is connected, and the other terminal is grounded, the inverting input terminal of the sensitive amplifier of each readout bit is connected to the output terminal V ref of the reference voltage generating circuit, and the output terminal of each readout bit is connected to the external output. The reference voltage generation circuit is composed of M voltage dividing elements and operational amplifiers, M is a positive integer, each voltage dividing element is a resistor, and the M voltage dividing elements are connected in series, and the junction of each two voltage dividing elements forms A voltage division point, the potential of the voltage division point can be calculated, according to the needs of the circuit, select the appropriate voltage division point (indicated by point A in the figure). The positive input terminal of the operational amplifier is connected to a voltage dividing point such as point A, and the output terminal V ref of the operational amplifier is connected to its inverting input terminal to form a voltage follower to improve the driving capability. The output terminal V ref of the reference voltage generation circuit is connected to the inverting input terminal of the sense amplifier of each readout bit in the comparison readout stage to provide a reference voltage.
这种典型的读出放大电路对阻变存储单元rm0进行读操作时,在第一字线WL1上加读取电压,第一位线BL1接地,第一读出位的电压比较器将第一读出位的负载电阻上的分压与参考电压产生电路的输出电压Vref比较,当负载电阻上的分压大于Vref时,放大产生一个二进制输出信号1,即Vout1为1,当负载电阻上的分压小于Vref时,放大产生一个二进制输出信号0,即Vout1为0,从而实现对阻变存储单元rm0阻态的读取。其他存储单元的读出方式与此相同。然而,对于图4的读出放大电路而言,有几个方面的不足将严重影响读出放大电路的性能:When this typical sense amplifier circuit reads the resistive memory cell rm0 , the read voltage is applied to the first word line WL1 , the first bit line BL1 is grounded, and the voltage comparator of the first read bit Compare the divided voltage on the load resistance of the first read bit with the output voltage V ref of the reference voltage generating circuit, when the divided voltage on the load resistance is greater than V ref , amplify and generate a
1.无法消除由图1所示的交叉电极结构产生的干扰电流的影响,阻变存储单元阵列容量的增大受到了限制。由于阻变存储单元本身的电学特性和交叉电极结构的特性,使得采用如图4的读出放大电路时无法消除阻变存储单元阵列的位线之间的干扰电流,在阻变存储单元阵列的字线和位线数量增加时,干扰电流将随之增大,从而对阻变存储单元阵列容量的增大造成了限制。其具体产生原因如图6所示,若rm0单元为高阻态,rm1、rm2、rm3三个单元都为低阻态,在第一字线WL1上加读取电压,第一位线BL1接地,读rm0单元的值时,虚线标明的路径表示流经rm0的电流,实线标明的路径为潜通路,流过潜通路的为干扰电流。随着阻变存储单元阵列容量的增大,潜通路的数量增加,干扰电流将逐渐趋于严重,导致读出放大电路不能正确地识别阻变存储单元的阻态。1. The influence of the interference current generated by the interdigitated electrode structure shown in FIG. 1 cannot be eliminated, and the increase of the capacity of the resistive memory cell array is limited. Due to the electrical characteristics of the resistive memory cell itself and the characteristics of the cross electrode structure, it is impossible to eliminate the interference current between the bit lines of the resistive memory cell array when the sense amplifier circuit shown in Figure 4 is used. When the number of word lines and bit lines increases, the interference current will increase accordingly, thus limiting the increase of the capacity of the resistive memory cell array. The specific reason for this is shown in Figure 6. If unit rm 0 is in a high-impedance state, and the three units rm 1 , rm 2 , and rm 3 are in a low-impedance state, the read voltage is applied to the first word line WL 1 , and the second One bit line BL 1 is grounded. When reading the value of rm 0 unit, the path indicated by the dotted line indicates the current flowing through rm 0 , the path indicated by the solid line is the sneak path, and the interference current flows through the sneak path. As the capacity of the resistive memory cell array increases, the number of sneak paths increases, and the interference current will gradually become more serious, resulting in the sense amplifier circuit not being able to correctly identify the resistance state of the resistive memory cell.
2.读出放大电路的直流功耗较大。由于比较读出级的各个读出位中使用负载电阻作为检测阻变存储单元阻态的元件,从而导致从阻变存储单元阵列的字线到地之间存在直流通路,当阻变存储单元阵列的位线数量增多时导致读操作的直流功耗随之增大。同时,由于参考电压产生电路中使用电阻作为分压元件,导致输入电压Vinput对地存在直流通路,产生了较大的直流功耗。以上原因导致读出放大电路整体的直流功耗较大。2. The DC power consumption of the sense amplifier circuit is large. Since the load resistance is used as the element for detecting the resistance state of the resistive memory cell in each readout bit of the comparison readout stage, there is a direct current path from the word line of the resistive memory cell array to the ground, when the resistive memory cell array When the number of bit lines increases, the DC power consumption of the read operation increases accordingly. At the same time, since the reference voltage generation circuit uses resistors as voltage dividing elements, there is a DC path between the input voltage V input and the ground, resulting in large DC power consumption. The above reasons result in relatively large DC power consumption of the sense amplifier circuit as a whole.
3.参考电压产生电路的精确性受到影响。参考电压产生电路的输出电压Vref的精度对其中的分压元件的匹配精度有较强的依赖性,在集成电路的制备工艺过程中,电阻不易实现精确的匹配,由于参考电压产生电路中使用了电阻作为分压元件,从而降低了参考电压产生电路的精确性。3. The accuracy of the reference voltage generating circuit is affected. The accuracy of the output voltage V ref of the reference voltage generation circuit has a strong dependence on the matching accuracy of the voltage divider components. In the manufacturing process of integrated circuits, it is not easy to achieve accurate matching of resistors. The resistor is used as a voltage dividing element, thereby reducing the accuracy of the reference voltage generating circuit.
由于以上缺点的存在,需要对原有的阻变存储单元读出放大电路加以改进,以降低由交叉电极结构和阻变存储单元本身的电学特性产生的干扰电流的影响,进一步降低原有读出放大电路的直流功耗,同时提高参考电压产生电路的精确性。Due to the existence of the above shortcomings, it is necessary to improve the original readout amplifier circuit of the resistive memory unit to reduce the influence of the interference current caused by the cross electrode structure and the electrical characteristics of the resistive memory unit itself, and further reduce the original readout. Amplifies the DC power consumption of the circuit while improving the accuracy of the reference voltage generation circuit.
发明内容Contents of the invention
本发明要解决的问题是:提供一种新型阻变存储单元读出放大电路,降低由交叉电极结构阻变存储单元阵列本身的电学特性带来的干扰电流对读操作的影响,降低读出放大电路的整体直流功耗,提高参考电压产生电路的精确性。The problem to be solved by the present invention is to provide a new type of readout amplifier circuit for resistive memory cells, which can reduce the influence of the interference current on the read operation caused by the electrical characteristics of the cross-electrode structure resistive memory cell array itself, and reduce the readout amplification. The overall DC power consumption of the circuit is improved, and the accuracy of the reference voltage generation circuit is improved.
本发明的技术方案是:Technical scheme of the present invention is:
本发明阻变存储单元读出放大电路也由比较读出级和参考电压产生电路组成。比较读出级由N个(N为阻变存储单元阵列位线的数目)读出位组成,分别与阻变存储单元阵列位线一一对应,即第i读出位对应第i位线BLi,1≤i≤N,。每个读出位由一个敏感放大器、一个反馈电阻、一个电压比较器组成。在第i读出位中,敏感放大器的正向输入端接地,反相输入端与第i位线BLi相连,敏感放大器的输出端Voi通过反馈电阻连接到该敏感放大器的反相输入端,电压比较器的反相输入端与敏感放大器的输出端Voi相连,电压比较器的正向输入端与参考电压产生电路的输出端Vref相连,电压比较器的输出端Vouti作为第i读出位的输出端连接到外部输出。The sense amplifier circuit of the resistive memory unit of the present invention is also composed of a comparison read stage and a reference voltage generating circuit. The comparison readout stage is composed of N (N is the number of bit lines of the resistive memory cell array) readout bits, which correspond to the bit lines of the resistive memory cell array one by one, that is, the i-th readout bit corresponds to the i-th bit line BL i , 1≤i≤N,. Each read bit consists of a sense amplifier, a feedback resistor, and a voltage comparator. In the i-th read bit, the positive input terminal of the sensitive amplifier is grounded, the inverting input terminal is connected to the i-th bit line BL i , and the output terminal V oi of the sensitive amplifier is connected to the inverting input terminal of the sensitive amplifier through a feedback resistor , the inverting input terminal of the voltage comparator is connected with the output terminal V oi of the sensitive amplifier, the positive input terminal of the voltage comparator is connected with the output terminal V ref of the reference voltage generating circuit, and the output terminal V outi of the voltage comparator is used as the ith The output of the read bit is connected to an external output.
参考电压产生电路由M个(M为正整数)分压元件和一个运算放大器组成,每个分压元件均为电容。M个分压元件按照如下方式串连:第一分压元件的输入端IN1接地,第一分压元件的输出端OUT1连接到第二分压元件的输入端IN2,第二分压元件的输出端OUT2连接到第三分压元件的输入端IN3,以此类推,第k(1≤k≤M-1)分压元件的输出端OUTk连接到第k+1分压元件的输入端INk+1,第M个分压元件的输出端与基准电压源Vinput相连。在第一分压元件的输出端OUT1与第二分压元件的输入端IN2接合部产生第一分压点,以此类推,在第k分压元件的输出端OUTk与第k+1分压元件的输入端INk+1产生第k分压点,即在每两个分压元件的接合部产生一个分压点。这些分压元件对基准电压源的电压Vinput进行分压,第k分压点的电位Vk满足:The reference voltage generating circuit is composed of M (M is a positive integer) voltage dividing elements and an operational amplifier, and each voltage dividing element is a capacitor. M voltage-dividing elements are connected in series as follows: the input terminal IN 1 of the first voltage-dividing element is grounded, the output terminal OUT 1 of the first voltage-dividing element is connected to the input terminal IN 2 of the second voltage-dividing element, and the second voltage-dividing element The output terminal OUT 2 of the element is connected to the input terminal IN 3 of the third voltage dividing element, and so on, and the output terminal OUT k of the kth (1≤k≤M-1) voltage dividing element is connected to the k+1th voltage dividing element The input terminal IN k+1 of the element, and the output terminal of the Mth voltage dividing element are connected to the reference voltage source V input . The first voltage dividing point is generated at the junction of the output terminal OUT 1 of the first voltage dividing element and the input terminal IN 2 of the second voltage dividing element, and so on, the output terminal OUT k of the kth voltage dividing element and the k+th The input terminal IN k+1 of a voltage dividing element generates a kth voltage dividing point, that is, a voltage dividing point is generated at the junction of every two voltage dividing elements. These voltage dividing elements divide the voltage V input of the reference voltage source, and the potential V k of the kth voltage dividing point satisfies:
记阻变存储单元位于高阻态时读出位中敏感放大器输出端Voi对应的电压值为VH,阻变存储单元位于低阻态时读出位中敏感放大器输出端Voi对应的电压值为VL。对于给定的电压分辨精度T,电压分辨精度是指一个分压元件所分的最小电压(例如Vinput为4V时,采用4个分压元件可以达到1V的电压分辨精度),存在:Record the voltage value corresponding to the output terminal V oi of the sensitive amplifier in the read bit when the resistance variable memory unit is in the high resistance state, and read the voltage corresponding to the output terminal V oi of the sensitive amplifier in the bit when the resistance variable memory unit is in the low resistance state The value is V L . For a given voltage resolution accuracy T, the voltage resolution accuracy refers to the minimum voltage divided by a voltage dividing element (for example, when V input is 4V, the voltage resolution accuracy of 1V can be achieved by using 4 voltage dividing elements), there are:
为了使每个读出位中的电压比较器可以有效地区分该读出位中敏感放大器采样输出的阻变存储单元的高阻态和低阻态所对应的电压值,选取的分压点的电位Vj应满足:In order to make the voltage comparator in each read-out bit can effectively distinguish the voltage value corresponding to the high-impedance state and the low-impedance state of the resistive memory cell output by the sensitive amplifier in the read-out bit, the selected voltage division point The potential V j should satisfy:
由公式一、公式二和公式三得:From
参考电压产生电路中的运算放大器的正向输入端与选取的第j分压点相连,运算放大器的输出端Vref连接到该运算放大器的反相输入端,构成一个电压跟随器,运算放大器的输出端Vref作为参考电压产生电路的输出端与比较读出级中每个读出位中电压比较器的正向输入端相连。The positive input terminal of the operational amplifier in the reference voltage generation circuit is connected to the selected jth voltage division point, and the output terminal V ref of the operational amplifier is connected to the inverting input terminal of the operational amplifier to form a voltage follower. The output terminal V ref serves as the output terminal of the reference voltage generating circuit and is connected to the positive input terminal of the voltage comparator in each readout bit in the comparison readout stage.
对阻变存储单元rm0和rm1的采样过程可用图9中的等效电路来表示,RQ表示潜通路上的等效电阻,SA1表示第一读出位的敏感放大器,SA2表示第二读出位的敏感放大器,Vi1表示敏感放大器SA1的反相输入端电位,Vi2表示敏感放大器SA2的反相输入端电位,I1表示读操作时SA1的反馈电阻上的电流,I2表示读操作时SA2的反馈电阻上的电流,I3表示读操作时潜通路等效电阻RQ上的电流,I4表示读操作时流经阻变存储单元rm0的电流,I5表示读操作时流经阻变存储单元rm1的电流。The sampling process of resistive memory cells rm 0 and rm 1 can be represented by the equivalent circuit in Figure 9, R Q represents the equivalent resistance on the sneak path, SA 1 represents the sensitive amplifier of the first readout bit, and SA 2 represents The sensitive amplifier of the second readout bit, V i1 represents the potential of the inverting input terminal of the sensitive amplifier SA 1 , V i2 represents the potential of the inverting input terminal of the sensitive amplifier SA 2 , and I 1 represents the voltage on the feedback resistor of SA 1 during the read operation Current, I 2 represents the current on the feedback resistor of SA 2 during the read operation, I 3 represents the current on the equivalent resistance R Q of the sneak path during the read operation, and I 4 represents the current flowing through the resistive memory unit rm 0 during the read operation , I 5 represents the current flowing through the resistive memory cell rm 1 during the read operation.
在每个读出位中,敏感放大器和反馈电阻构成的反馈结构实现了对阻变存储单元阻态的采样,每个读出位中的电压比较器将采样的信号与参考电压进行比较后放大,形成二进制数字信号输出。In each readout bit, the feedback structure composed of the sensitive amplifier and the feedback resistor realizes the sampling of the resistance state of the resistive memory unit, and the voltage comparator in each readout bit compares the sampled signal with the reference voltage and then amplifies it. , forming a binary digital signal output.
采用本发明可以达到以下技术效果:The following technical effects can be achieved by adopting the present invention:
1.使用敏感放大器采样阻变存储单元的阻态,利用敏感放大器的输入端零电流的特性,减小了位线之间的干扰电流的影响,从而实现较低的误读率。1. Use the sensitive amplifier to sample the resistance state of the resistive memory unit, and use the zero-current characteristic of the input terminal of the sensitive amplifier to reduce the influence of the interference current between the bit lines, thereby achieving a lower misread rate.
2.在比较读出级中利用了敏感放大器的零输入电流的特征,同时参考电压产生电路中分压元件采用了电容,降低了电路的整体直流功耗。2. The characteristic of zero input current of the sensitive amplifier is utilized in the comparison readout stage, and the voltage dividing element in the reference voltage generating circuit adopts a capacitor, which reduces the overall DC power consumption of the circuit.
3.由于在集成电路的制备工艺中,电容比电阻更易实现精确的匹配,分压元件采用电容提高了参考电压产生电路输出参考电压的精度。3. Because in the manufacturing process of integrated circuits, capacitors are easier to achieve precise matching than resistors, and the use of capacitors in the voltage dividing element improves the accuracy of the reference voltage output by the reference voltage generating circuit.
附图说明Description of drawings
图1是背景技术所述典型的交叉电极结构阻变存储单元阵列物理结构;Fig. 1 is the physical structure of a typical cross-electrode structure resistive memory cell array described in the background technology;
图2是图1所示交叉电极结构阻变存储单元的横截面示意图;Fig. 2 is a schematic cross-sectional view of the cross-electrode structure resistive memory cell shown in Fig. 1;
图3是图1所示交叉电极结构阻变存储单元阵列中阻变存储单元的I-V特性示意图;Fig. 3 is a schematic diagram of the I-V characteristics of the resistive memory cell in the cross-electrode structure resistive memory cell array shown in Fig. 1;
图4是背景技术所述典型的交叉电极结构阻变存储单元读出放大电路结构图;FIG. 4 is a structural diagram of a readout amplifier circuit of a typical cross-electrode structure resistive memory cell described in the background art;
图5是图4中参考电压产生电路结构图;Fig. 5 is a structural diagram of the reference voltage generation circuit in Fig. 4;
图6是图4交叉电极结构阻变存储单元读出放大电路结构中的干扰电流示意图;Fig. 6 is a schematic diagram of the interference current in the readout amplifier circuit structure of the interdigitated electrode structure resistive memory cell in Fig. 4;
图7是本发明阻变存储单元读出放大电路结构图;Fig. 7 is a structure diagram of a read amplifier circuit of a resistive memory cell of the present invention;
图8是图7中参考电压产生电路结构图;Fig. 8 is a structural diagram of the reference voltage generation circuit in Fig. 7;
图9是本发明比较读出级中敏感放大器信号采样过程等效电路图。Fig. 9 is an equivalent circuit diagram of the signal sampling process of the sensitive amplifier in the comparative readout stage of the present invention.
具体实施方式Detailed ways
以下结合附图,详细说明本发明阻变存储单元读出放大电路的结构和工作过程。The structure and working process of the sense amplifier circuit of the resistive memory cell of the present invention will be described in detail below in conjunction with the accompanying drawings.
图7是本发明阻变存储单元读出放大电路结构图,本发明由比较读出级、参考电压产生电路组成。比较读出级由N个读出位组成,分别与阻变存储单元阵列位线一一对应,即第一读出位对应第一位线BL1,第二读出位对应第二位线BL2,以此类推,第N读出位对应第N位线BLN。每个读出位由一个敏感放大器、一个反馈电阻、一个电压比较器组成。在第i读出位中,敏感放大器的正向输入端接地,反相输入端与第i位线BLi相连,敏感放大器的输出端(Voi)通过反馈电阻连接到该敏感放大器的反相输入端,电压比较器的反相输入端与敏感放大器的输出端相连,电压比较器的正向输入端与参考电压产生电路的输出端Vref相连,电压比较器的输出端Vouti作为第一读出位的输出端连接到外部输出。Fig. 7 is a structure diagram of the sense amplifier circuit of the resistive memory cell of the present invention, and the present invention is composed of a comparison readout stage and a reference voltage generating circuit. The comparison readout stage is composed of N readout bits, which correspond to the bit lines of the resistive memory cell array one by one, that is, the first readout bit corresponds to the first bitline BL1 , and the second readout bit corresponds to the second bitline BL 2 , and so on, the Nth read bit corresponds to the Nth bit line BL N . Each read bit consists of a sense amplifier, a feedback resistor, and a voltage comparator. In the i-th read bit, the positive input terminal of the sensitive amplifier is grounded, the inverting input terminal is connected to the i-th bit line BL i , and the output terminal (V oi ) of the sensitive amplifier is connected to the inverting terminal of the sensitive amplifier through a feedback resistor The input terminal, the inverting input terminal of the voltage comparator is connected with the output terminal of the sensitive amplifier, the positive input terminal of the voltage comparator is connected with the output terminal V ref of the reference voltage generation circuit, and the output terminal V outi of the voltage comparator is used as the first The output of the read bit is connected to an external output.
图8中参考电压产生电路由M个(M为正整数)分压元件和一个运算放大器组成,每个分压元件由一个电容组成。M个分压元件按照如下方式串连:第一分压元件的输入端IN1接地,第一分压元件的输出端OUT1连接到第二分压元件的输入端IN2,第二分压元件的输出端OUT2连接到第三分压元件的输入端IN3,以此类推,第k(1≤k≤M)分压元件的输出端OUTk连接到第k+1分压元件的输入端INk+1,第M个分压元件的输出端与基准电压源Vinput相连。在第一分压元件的输出端OUT1与第二分压元件的输入端IN2接合部产生第一分压点,以此类推,在第k(1≤k≤M)分压元件的输出端OUTk与第k+1分压元件的输入端INk+1产生第k分压点,即在每两个分压元件的接合部产生一个分压点。第j分压点的电位满足:The reference voltage generating circuit in FIG. 8 is composed of M (M is a positive integer) voltage dividing elements and an operational amplifier, and each voltage dividing element is composed of a capacitor. M voltage-dividing elements are connected in series as follows: the input terminal IN 1 of the first voltage-dividing element is grounded, the output terminal OUT 1 of the first voltage-dividing element is connected to the input terminal IN 2 of the second voltage-dividing element, and the second voltage-dividing element The output terminal OUT 2 of the element is connected to the input terminal IN 3 of the third voltage dividing element, and so on, the output terminal OUT k of the kth (1≤k≤M) voltage dividing element is connected to the k+1th voltage dividing element The input terminal IN k+1 , the output terminal of the Mth voltage dividing element is connected to the reference voltage source V input . The first voltage dividing point is generated at the junction of the output terminal OUT 1 of the first voltage dividing element and the input terminal IN 2 of the second voltage dividing element, and so on, the output of the kth (1≤k≤M) voltage dividing element The terminal OUT k and the input terminal IN k+1 of the k+1th voltage dividing element generate a kth voltage dividing point, that is, a voltage dividing point is generated at the junction of every two voltage dividing elements. The potential of the jth voltage division point satisfies:
分压元件的个数M满足:The number M of voltage dividing elements satisfies:
参考电压产生电路中的运算放大器的正向输入端与选取的分压点相连,运算放大器的输出端Vref连接到该运算放大器的反相输入端,构成一个电压跟随器,运算放大器的输出端Vref作为参考电压产生电路的输出端与比较读出级中每个读出位中电压比较器的正向输入端相连。The positive input terminal of the operational amplifier in the reference voltage generation circuit is connected to the selected voltage dividing point, and the output terminal V ref of the operational amplifier is connected to the inverting input terminal of the operational amplifier to form a voltage follower. The output terminal of the operational amplifier V ref is used as the output terminal of the reference voltage generation circuit and is connected to the positive input terminal of the voltage comparator in each readout bit in the comparison readout stage.
进行读操作时,在对应的字线上施加读电压,一次读取一行字线上的阻变存储单元的数据。由于每个读出位的组成完全相同,记每个读出位中反馈电阻的阻值为Rf,当对该字线上的阻变存储单元进行读操作时,每个读出位中敏感放大器的直流增益由反馈电阻和阻变存储单元电阻的比值决定。以读取第一字线WL1上的阻变存储单元为例进行说明:在第一字线WL1上施加读取电压Vr,第一位线BL1与敏感放大器的反相输入端相连接,记rm0单元的阻值为Rm0,对rm0单元进行读操作时,由反相放大器的闭环特性可得,对应的第一读出位中敏感放大器的直流增益由反馈电阻和阻变存储单元电阻的比值Rf/Rm0决定,输出和输入电压之间关系为:When performing a read operation, a read voltage is applied to a corresponding word line, and the data of the resistive memory cells on a row of word lines are read at a time. Since the composition of each read-out bit is exactly the same, record the resistance value of the feedback resistor in each read-out bit as R f , when the resistive memory cell on the word line is read, the sensitive The DC gain of the amplifier is determined by the ratio of the feedback resistor and the resistance of the resistive memory unit. Take the reading of the resistive memory cell on the first word line WL 1 as an example for illustration: the read voltage V r is applied on the first word line WL 1 , and the first bit line BL 1 is in phase with the inverting input terminal of the sensitive amplifier. Connect, record the resistance value of unit rm 0 as R m0 , when the unit rm 0 is read, it can be obtained from the closed-loop characteristics of the inverting amplifier, and the DC gain of the sensitive amplifier in the corresponding first readout bit is determined by the feedback resistance and resistance The ratio R f /R m0 of the variable memory cell resistance is determined, and the relationship between the output and input voltage is:
处于不同阻态时,阻变存储单元rm0具有不同的阻值,从而导致输出电压Vo1随采样单元阻值的不同而变化,将阻变存储单元的阻值的变化转换为敏感放大器的输出电压的变化,以此来采样阻变存储单元的阻值。Vo1的输出与第一读出位中电压比较器的反相输入端相连,电压比较器通过对参考电压和敏感放大器的输出信号进行比较产生输出信号。When in different resistance states, the resistive memory unit rm 0 has different resistance values, which causes the output voltage V o1 to vary with the resistance of the sampling unit, and convert the resistance change of the resistive memory unit into the output of the sensitive amplifier The change of the voltage is used to sample the resistance value of the resistive memory unit. The output of V o1 is connected to the inverting input terminal of the voltage comparator in the first sense bit, and the voltage comparator generates an output signal by comparing the reference voltage with the output signal of the sense amplifier.
每一个读出位中,敏感放大器和反馈电阻实现了该读出位对阻变存储单元阻值的采样功能。下面分析读出放大电路的工作过程,以对第一字线WL1上的阻变存储单元rm0、rm1的采样过程为例进行分析说明,由于RQ可以看做是任意两个存储单元位线之间的等效电阻,又因为读操作原理相同,所以此分析同样适用于同一字线上的任意两个阻变存储单元。对rm0、rm1的的等效采样电路如图9所示:rm0、rm1的一端与字线WL1相连,rm0的另一端通过第一位线与第一读出位中的敏感放大器SA1的反相输入端相连,SA1的输出端Vo1经过反馈电阻与它的反相输入端相连,SA1的正相输入端接地;rm1的另一端通过第二位线与第二读出位中的敏感放大器SA1的反相输入端相连,SA1的输出端Vo2经过反馈电阻与它的反相输入端相连,SA1的正相输入端接地,所有潜通路上的电阻用RQ来等效表示。第一读出位的敏感放大器SA1和rm0、反馈电阻构成了一个反相放大器;第二读出位的敏感放大器SA2和rm1、反馈电阻构成了另外一个反相放大器。记rm0的阻值为Rm0,rm1的阻值为Rm1,各个读出位中反馈电阻的阻值等于常数Rf。根据基尔霍夫定律得出以下方程:In each readout bit, the sensitive amplifier and the feedback resistor realize the sampling function of the readout bit for the resistance value of the resistive memory unit. The following is an analysis of the working process of the sense amplifier circuit, taking the sampling process of the resistive memory cells rm 0 and rm 1 on the first word line WL 1 as an example, because R Q can be regarded as any two memory cells The equivalent resistance between the bit lines, and because the principle of the read operation is the same, this analysis is also applicable to any two resistive memory cells on the same word line. The equivalent sampling circuit for rm 0 and rm 1 is shown in Figure 9: one end of rm 0 and rm 1 is connected to the word line WL 1 , and the other end of rm 0 is connected to the first readout bit through the first bit line. The inverting input terminal of the sensitive amplifier SA 1 is connected, the output terminal V o1 of SA 1 is connected with its inverting input terminal through the feedback resistor, and the non-inverting input terminal of SA 1 is grounded; the other end of rm 1 is connected with the second bit line The inverting input terminal of the sensitive amplifier SA 1 in the second readout position is connected, the output terminal V o2 of SA 1 is connected with its inverting input terminal through the feedback resistor, the non-inverting input terminal of SA 1 is grounded, and all sneak paths The resistance of RQ is equivalently represented. Sensitive amplifiers SA 1 and rm 0 of the first readout, and feedback resistors form an inverting amplifier; sensitive amplifiers SA 2 and rm 1 of the second readout, and feedback resistors form another inverting amplifier. Note that the resistance value of rm 0 is R m0 , the resistance value of rm 1 is R m1 , and the resistance value of the feedback resistor in each readout bit is equal to the constant R f . The following equation follows from Kirchhoff's laws:
其中a表示信号采样放大级中敏感放大器的开环增益,字线上施加值为Vr的读电压,R表示两条位线之间潜通路等效电阻RQ的阻值,I3表示潜通路干扰电流。由以上方程整理可得Among them, a represents the open-loop gain of the sensitive amplifier in the signal sampling amplification stage, the read voltage of V r is applied on the word line, R represents the resistance value of the equivalent resistance R Q of the sneak path between the two bit lines, and I3 represents the potential Path interference current. Arranging from the above equations, we can get
由方程(8)可得,当敏感放大器的开环增益a趋于无穷大时(理想情况),位线之间干扰电流的影响可以忽略,输出电压比值仅与阻变存储单元的高阻态阻值和低阻态阻值的比值相关,即:It can be obtained from equation (8) that when the open-loop gain a of the sensitive amplifier tends to infinity (ideal situation), the influence of the interference current between the bit lines can be ignored, and the output voltage ratio is only related to the high-resistance state resistance of the resistive memory cell The value is related to the ratio of the resistance value of the low resistance state, that is:
由公式(9)得,输出电压的比值取决于阻变存储单元的高阻态阻值和低阻态阻值的比值,而与潜通路上的等效电阻RQ无关,从而表明该读出放大电路可以降低潜通路上干扰电流的影响,有效地采样阻变存储单元的阻态。From the formula (9), the ratio of the output voltage depends on the ratio of the resistance value of the high-resistance state and the resistance value of the low-resistance state of the resistive memory cell, and has nothing to do with the equivalent resistance R Q on the sneak path, thus indicating that the readout The amplifying circuit can reduce the influence of the interference current on the sneak path, and effectively sample the resistance state of the resistive memory unit.
参考电压产生电路中的分压元件使用了电容进行分压,在集成电路的工艺中,电容比电阻更容易实现精确匹配,当温度变化时,电容的容值发生改变,但相互之间的比例关系仍能保持一定,所以产生的参考电压随温度变化很小,且由于电容对直流信号具有抑制作用,所以理论上可将参考电压产生电路的直流功耗降至0。参考电压产生电路的输入基准电压Vinput可由通用的基准电压产生电路产生。The voltage dividing element in the reference voltage generation circuit uses capacitors to divide the voltage. In the process of integrated circuits, capacitors are easier to achieve precise matching than resistors. When the temperature changes, the capacitance of the capacitors changes, but the ratio between them The relationship can still be kept constant, so the generated reference voltage changes little with temperature, and because the capacitor has an inhibitory effect on the DC signal, the DC power consumption of the reference voltage generating circuit can be reduced to zero theoretically. The input reference voltage V input of the reference voltage generation circuit can be generated by a general reference voltage generation circuit.
参考电压产生电路输出的参考电压Vref连接到每个读出位中的电压比较器,由每个读出位的电压比较器实现将参考电压Vref与该读出位的敏感放大器采样输出的电压进行比较放大,从而将阻变存储单元的低摆幅采样电压放大至数字电路可以识别的电压,进而将读出结果输出到外部电路。The reference voltage V ref output by the reference voltage generation circuit is connected to the voltage comparator in each readout position, and the voltage comparator of each readout position realizes the sampling output of the reference voltage V ref and the sense amplifier of the readout position The voltage is compared and amplified, so that the low-swing sampling voltage of the resistive memory unit is amplified to a voltage that can be recognized by the digital circuit, and then the readout result is output to the external circuit.
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| GB2502553A (en) | 2012-05-30 | 2013-12-04 | Ibm | Read measurements of resistive memory cells |
| KR20140002184A (en) * | 2012-06-28 | 2014-01-08 | 에스케이하이닉스 주식회사 | Semiconductor memory apparatus |
| CN102891678A (en) * | 2012-09-25 | 2013-01-23 | 北京大学 | Phase inverter circuit and chip |
| CN102882513B (en) * | 2012-10-09 | 2015-04-15 | 北京大学 | Full adder circuit and chip |
| CN102882514B (en) * | 2012-10-09 | 2015-05-13 | 北京大学 | AND logic circuit and chip |
| CN102882509B (en) * | 2012-10-10 | 2015-09-02 | 北京大学 | Carry circuit and chip |
| CN102891679B (en) * | 2012-10-10 | 2015-05-20 | 北京大学 | OR logic circuit and chip |
| CN108257634B (en) * | 2016-12-28 | 2021-03-30 | 上海磁宇信息科技有限公司 | Magnetic tunnel junction reading circuit, MRAM chip and reading method |
| CN108257633B (en) * | 2016-12-28 | 2020-10-23 | 上海磁宇信息科技有限公司 | MRAM chip and reading method of memory cell thereof |
| CN108564978B (en) * | 2018-04-20 | 2021-09-24 | 电子科技大学 | A read circuit with redundant structure |
| CN109524447B (en) * | 2018-12-26 | 2021-04-09 | 上海天马有机发光显示技术有限公司 | Organic light emitting display panel and display device |
| CN109859786B (en) * | 2019-01-28 | 2020-10-02 | 北京航空航天大学 | A data computing method based on spin magnetic memory |
| CN111724830B (en) * | 2019-03-18 | 2022-07-26 | 中芯国际集成电路制造(上海)有限公司 | Voltage enhancement type reading amplification circuit |
| CN111210859B (en) * | 2020-01-03 | 2022-03-22 | 首都师范大学 | Method for relieving sneak path influence in memristor cross array and related equipment |
| CN112365911B (en) * | 2020-11-09 | 2025-02-07 | 无锡舜铭存储科技有限公司 | Memory and reference signal generating circuit thereof |
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| CN1746964A (en) * | 2004-08-09 | 2006-03-15 | 恩益禧电子股份有限公司 | Gray scale voltage generating circuit and method |
| CN101783182A (en) * | 2009-01-21 | 2010-07-21 | 中国科学院微电子研究所 | Detection circuit and detection equipment of resistive random access memory |
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| US7038959B2 (en) * | 2004-09-17 | 2006-05-02 | Freescale Semiconductor, Inc. | MRAM sense amplifier having a precharge circuit and method for sensing |
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| CN1746964A (en) * | 2004-08-09 | 2006-03-15 | 恩益禧电子股份有限公司 | Gray scale voltage generating circuit and method |
| CN101783182A (en) * | 2009-01-21 | 2010-07-21 | 中国科学院微电子研究所 | Detection circuit and detection equipment of resistive random access memory |
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