CN102156053A - Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot - Google Patents

Abstract

A test bench for assembly adjustment/simulation station transfer of a dual-arm transfer robot. After the double-arm robot is assembled, through the adjustment of the test bench of the present invention, when the T-axis is at zero position, the circle centers of the left and right arms of the double-arm transmission robot FORK can be overlapped up and down in the respective rotation planes of the R-axis, thereby forming a dual-arm robot. The trajectory of the center of the FORK circle provides the original positioning reference. After the benchmark is determined, a simulated silicon wafer transfer experiment between stations can also be carried out on the test bench of the present invention to verify the functional indicators of the dual-arm transfer robot.

Description

A test bench for assembly adjustment/simulation station transfer of a dual-arm transfer robot

technical field

The invention relates to a test bench for assembly adjustment/simulation station transmission of a dual-arm transmission robot in the field of semiconductor equipment manufacturing. After the double-arm transfer robot is assembled, after the adjustment of the test bench, when the T-axis is at zero position, the center of the double-arm robot FORK can be overlapped up and down in the respective rotation planes of the R-axis, so that the trajectory of the center of the double-arm robot FORK The original positioning datum is provided. After benchmarking, simulated wafer-to-station transfers can also be performed on the test bench.

Background technique

From the point of view of theory and design, when the T-axis of the dual-arm transfer robot is at zero position and the arms are stretched forward, the centers of circles of the left and right mechanical arms of FORK are coincident. However, due to the existence of manufacturing errors and assembly errors, in fact the centers of circles of the left and right mechanical arms of the dual-arm transfer robot FORK do not coincide. In order to make the degree of misalignment of the centers of the left and right mechanical arms FORK less than the specified index, it is necessary to have a benchmark for determining the center of the left and right mechanical arms FORK during assembly and debugging of the dual-arm transfer robot; when the centers of the left and right mechanical arms FORK are debugged according to this benchmark , but also according to the work flow determined by the dual-arm transfer robot, plan the work path, and carry out the silicon wafer transfer experiment between the stations to verify the functional indicators of the dual-arm transfer robot.

Contents of the invention

The object of the present invention is to provide a test bench which has a reasonable structure and can conveniently and reliably adjust the coincidence of the midpoints of the left and right mechanical arms FORK, and provides a benchmark for determining the midpoint of the dual-arm FORK through the test bench. After the double-arm FORK is qualified for debugging based on this benchmark, remove the benchmark/clamping module installed at the zero position of the T-axis on the test bench, install the simulation station at the original position, and plan the work according to the workflow determined by the dual-arm transfer robot In order to test the functional indicators of the dual-arm transfer robot and the reliability of long-term operation, the silicon wafer transfer experiment was carried out between the stations.

The purpose of the present invention is achieved in this way: a test bench for assembly adjustment/simulation station transmission of a dual-arm transfer robot, including a simulation 1 station 1, a host support plate 2, a simulation 2 station support plate 3, Simulation 2 station 4, frame combination 5, simulation 1 box 6, simulation 2 box 7, simulation box support plate 8, reference/clamping module 9, mounting screw 10, adjustment device bottom plate 11, left forearm positioning activity Splint 12, left arm rubber contact plate 13, left forearm fixed splint 14, forearm middle positioning plate 15, right arm rubber contact plate 16, right forearm positioning movable splint 17, right forearm fixed splint 18, center positioning block 19 .

On the top of the test bench frame assembly 5 assembled with industrial aluminum profiles, there are host support plate 2, simulation 2 station support plate 3, and simulation cassette support plate 8; The host of the arm transmission robot, the zero position of the T-axis can be installed with the reference/clamping module 9 or the analog 1 station 1 according to different functions; the analog 2 station support plate 3 is equipped with the analog 2 station 4; the analog piece The box support plate 8 is equipped with an analog 1-piece box 6 and an analog 2-piece box 7 .

When debugging the circle center reference of the left and right mechanical arms of the dual-arm transmission robot FORK, install the reference/clamping module 9 on the T-axis zero position of the host support plate 2, and fasten it with the mounting screw 10. Put the main body of the dual-arm transfer robot into the test bench and fix it in a unique position, then adjust the T-axis to zero; On the positioning plate 15 in the middle of the arm, and clamp the left forearm with the left forearm fixed splint 14, the left forearm positioning movable splint 12; clamp the right forearm with the right forearm fixed splint 18, the right forearm positioning movable splint 17. At this moment, the large arm and the small arm of the two arms are all fixed, and only the slice arm can move.

Loosen the connecting screws of the two taking-up arms and the FORK combination, rotate back and forth, left and right or translate the upper and lower taking-up arms, so that the center of the circle of the FORK combination and the center of the center positioning block 19 completely coincide, and then tighten all the loosened screws. solid in place. Maintain the existing fastening state, install and engage the timing belts of the two small arms with the pulleys, adjust the timing belt pretension mechanism to maintain sufficient pretension, and check the transmission mechanism of the arms to ensure that there is no unrestricted free rotation or move. Then remove the reference/clamping module 9 according to the prescribed steps.

When carrying out the silicon wafer transmission experiment between the stations, install the simulation 1 station 1 on the T-axis zero position of the host support plate 2, and then plan the working path according to the workflow determined by the dual-arm transfer robot. The transmission experiment of silicon wafers is carried out in order to test the various functional indicators and the reliability of long-term operation of the dual-arm transmission robot.

The present invention is a test bench for assembly adjustment/simulation station transmission of a dual-arm transmission robot, which has the following advantages:

1. In the present invention, the center positioning block 19 of the same reference is used in the adjustment process of the coincidence of the center of the FORK of the left and right mechanical arms, so the positioning accuracy is high and the repeatability is good.

2. After completing the adjustment of the center coincidence of the left and right mechanical arms FORK, there is no need to carry the main machine, just remove the reference/clamping module 9, and install the simulation 1 station 1 on the T-axis zero position of the main machine support plate 2, then silicon can be performed. Sheet transport test. Therefore, the invention can reduce the systematic error of the station test and improve the transmission precision of the silicon wafer.

3. The assembly adjustment/simulation station transfer test bench of the present invention has simple structure, reliable function, easy operation, and can effectively reduce the debugging cost of the dual-arm transfer robot.

Description of drawings

Fig. 1 is a top view of a test bench for assembly adjustment/simulation station transmission of a dual-arm transfer robot according to the present invention. At this time, the test bench is in the transmission experimental state of silicon wafers due to the installation of simulation 1 station 1.

In Figure 1, the specific numbers indicate: 1-simulation 1 station, 2-host support plate, 3-simulation 2-station support plate, 4-simulation 2-station, 5-frame combination, 6-simulation 1 piece box, 7-analog 2-piece box, 8-analog box support plate.

Fig. 2 is a top view of a test bench used for assembly adjustment/simulation station transmission of a dual-arm transfer robot according to the present invention. At this time, the test bench is in the state of adjusting the center of the FORK circle center of the left and right mechanical arms due to the installation of the benchmark/clamping module 9.

In Figure 2, the specific numbers indicate: 9- Datum/clamping module

FIG. 3 is a three-dimensional perspective view of the reference/clamping module 9 .

In Figure 3, the specific numbers indicate: 10-mounting screw, 11-adjusting device bottom plate, 12-left forearm positioning movable splint, 13-left arm rubber contact plate, 14-left forearm fixing splint, 15-forearm middle Positioning plate, 16-right arm rubber contact plate, 17-right forearm positioning movable splint, 18-right forearm fixed splint, 19-center positioning block.

Detailed ways

The present invention will be further described in conjunction with accompanying drawing:

As shown in the accompanying drawings, a test bench for assembly adjustment/simulation station transmission of a dual-arm transfer robot, including a simulation 1 station 1, a host support plate 2, a simulation 2 station support plate 3, and a simulation 2 station 4. Frame combination 5. Simulated 1-piece box 6. Simulated 2-piece box 7. Support plate for simulated film box 8. Reference/clamping module 9. Mounting screw 10. Adjusting device bottom plate 11. Left forearm positioning movable splint 12, left Arm rubber contact plate 13, left forearm fixed splint 14, forearm middle positioning plate 15, right arm rubber contact plate 16, right forearm positioning movable splint 17, right forearm fixed splint 18, center positioning block 19.

The test bench for assembly adjustment/simulation station transmission of a double-transmission arm robot is characterized in that: on the top of the test bench frame assembly 5 assembled with industrial aluminum profiles, a host support plate 2, a simulation station 2 Position support plate 3, analog cassette support plate 8; host support plate 2 has a host installation hole to install the host of the dual-arm transmission robot. The zero position of the T-axis can be installed with reference/clamping according to different functions. Module 9 or analog 1 station 1; analog 2 station support plate 3 is equipped with analog 2 station 4; analog cassette support plate 8 is equipped with analog 1 cassette 6 and analog 2 cassette 7.

The test bench for the assembly adjustment/simulation station transmission of the dual-arm transmission robot, when performing the center reference debugging of the left and right mechanical arms of the dual-arm transmission robot FORK, the reference/clamping module 9 is installed on the base of the host support plate 2 T-axis zero position, and fasten with mounting screws 10. Put the main body of the dual-arm transfer robot into the test bench and fix it in a unique installation position, then adjust the T-axis to zero, and then put the forearms of the left and right arms against the middle positioning plate of the forearm of the reference/clamping module 9 15, and clamp the left forearm with the left forearm fixed splint 14, the left forearm positioning movable splint 12; clamp the right forearm with the right forearm fixed splint 18, the right forearm positioning movable splint 17. At this time, the large arms and the small arms of the two arms are all fixed, and only the sheet-taking arm can move. Loosen the connecting screws of the two taking-up arms and the FORK combination, rotate back and forth, left and right or translate the upper and lower taking-up arms, so that the center of the circle of the FORK combination and the center of the center positioning block 19 completely coincide, and then tighten all the loosened screws. solid in place. Maintain the existing fastening state, install and engage the timing belts of the two small arms with the pulleys, adjust the timing belt pretension mechanism to maintain sufficient pretension, and check the transmission mechanism of the arms to ensure that there is no unrestricted free rotation or move. Then remove the reference/clamping module 9 according to the prescribed steps.

The test bench for the assembly adjustment/simulation station transmission of a double-transmission arm robot, when carrying out the transmission experiment of silicon wafers between the stations, the reference/clamping module 9 is removed, and the simulation 1 station 1 is installed At the zero position of the T-axis of the host support plate 2, the working path is planned according to the workflow determined by the dual-arm transfer robot, and the silicon wafer transfer experiment is carried out between each station to test the various functional indicators of the dual-arm transfer robot and long-term reliability.

Claims (2)

1. a testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot comprises simulation 1 station (1), main frame back up pad (2), simulate 2 station back up pads (3), simulate 2 stations (4), frame combination (5), simulate 1 film magazine (6), simulate 2 film magazines (7), simulation film magazine back up pad (8), benchmark/clamp module (9), mounting screw (10), regulating device base plate (11), left side forearm geocoded activity clamping plate (12), left arm rubber contact plate (13), left side forearm strap (14); forearm interfix plate (15); right arm rubber contact plate (16); right forearm geocoded activity clamping plate (17); right forearm strap (18); centralized positioning piece (19); It is characterized in that: described assembling adjustment/simulation station transmission test platform, above the test bed framework combination (5) of industrial aluminum profile assembling, main frame back up pad (2), simulation 2 station back up pads (3), simulation film magazine back up pad (8) are housed; Have in the main frame mounting hole on the described main frame back up pad (2), so that the main frame of both arms transferring robot to be installed; The zero-bit position of T axle is according to the functions of use difference, but reference for installation/clamp module (9) or simulate 1 station (1); On the described simulation 2 station back up pads (3), simulation 2 stations (4) are housed; On the described simulation film magazine back up pad (8), simulation 1 film magazine (6) and simulation 2 film magazines (7) are housed.

2. a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot according to claim 1, it is characterized in that: described assembling adjustment/simulation station transmission test platform, when carrying out the benchmark debugging of the mechanical arm FORK center of circle, the both arms transferring robot left and right sides, benchmark/clamp module (9) is installed in the T axle zero-bit position of main frame back up pad (2), and fastening with mounting screw (10); Both arms transferring robot main frame is put into the mounting hole of testing table main frame back up pad (2) and fix with only installation site, after then the T axle being transferred to zero-bit, about the forearm of two arms abut against on the forearm interfix plate (15) of benchmark/clamp module (9), and clamp left forearm with left forearm strap (14), left forearm geocoded activity clamping plate (12); Clamp right forearm with right forearm strap (18), right forearm geocoded activity clamping plate (17); At this moment, the big arm of two arms and forearm are all with fixing, only getting the sheet arm can be movable, two joint bolts of getting sheet arm and FORK combination are unscrewed, the sheet arm is got in rotation all around or translation up and down, after the center of circle of the center of circle of FORK combination and centralized positioning piece (19) was fitted like a glove, the screw that all are unclamped is fastening again put in place.Keep existing tightening state, the synchronous band and the belt wheel of two forearms are installed engagement, adjust band pre-tightening mechanism synchronously, keeps enough pretightning forces, and the gear train of inspection both arms, guarantee not have unconfined freely rotate or mobile.Step is removed benchmark/clamp module (9) in accordance with regulations then; Described assembling adjustment/simulation station transmission test platform, when between station, carrying out the transmission experiment of silicon chip, remove benchmark/clamp module (9), to simulate 1 station (1) and be installed in the T axle zero-bit position of main frame back up pad (2), the workflow of determining according to the both arms transferring robot is come the planning path then, between each station, carry out the transmission experiment of silicon chip, with the every functional parameter of check both arms transferring robot and the reliability of long-term operation.

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