CN102163960B - Multilayer chip filter and preparation method thereof - Google Patents
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- 239000000919 ceramic Substances 0.000 abstract description 31
- 239000000463 material Substances 0.000 abstract description 19
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052709 silver Inorganic materials 0.000 abstract description 12
- 239000004332 silver Substances 0.000 abstract description 12
- 239000004020 conductor Substances 0.000 abstract description 11
- 238000000462 isostatic pressing Methods 0.000 abstract description 11
- 238000005245 sintering Methods 0.000 abstract description 10
- 239000003990 capacitor Substances 0.000 abstract description 9
- 238000002360 preparation method Methods 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 238000007639 printing Methods 0.000 abstract description 6
- 238000005520 cutting process Methods 0.000 abstract description 5
- 238000011049 filling Methods 0.000 abstract description 5
- 230000008878 coupling Effects 0.000 abstract description 4
- 238000010168 coupling process Methods 0.000 abstract description 4
- 238000005859 coupling reaction Methods 0.000 abstract description 4
- 238000005553 drilling Methods 0.000 abstract description 3
- 238000002347 injection Methods 0.000 abstract description 3
- 239000007924 injection Substances 0.000 abstract description 3
- 238000003475 lamination Methods 0.000 abstract description 3
- 238000004080 punching Methods 0.000 abstract description 3
- 230000032798 delamination Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 24
- 238000001035 drying Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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Abstract
本发明公开了一种多层片式滤波器及其制备方法,所述滤波器由两个平板电容、三个片式空心电感和两个磁芯电感组成,三个片式空心电感依次排列在所述滤波器的上层,两个磁芯电感分别位于所述滤波器的下层的左右两端,两个平板电容位于所述滤波器的下层的中间,其中片式空心电感由银浆料印刷形成,磁芯电感由连接两层银导体的通孔中的铁氧体材料构成,平板电容则由不同层间的大面积银导体耦合形成。所述的制备方法包括预处理、打孔、金属填孔、铁氧体材料注入、印刷、叠片、等静压、热切、烧结等步骤。通过在陶瓷生瓷片中打孔注入铁氧体材料得到多层片式滤波器,有效解决了叠层片式滤波器中不同材料混烧后出现的分层断裂等问题,提高了成品率。
The invention discloses a multi-layer chip filter and a preparation method thereof. The filter is composed of two plate capacitors, three chip air-core inductors and two magnetic core inductors, and the three chip air-core inductors are arranged in sequence On the upper layer of the filter, two magnetic core inductors are respectively located at the left and right ends of the lower layer of the filter, and two plate capacitors are located in the middle of the lower layer of the filter, wherein the chip air core inductor is formed by printing with silver paste , the magnetic core inductor is formed by the ferrite material in the through-hole connecting two layers of silver conductors, and the plate capacitor is formed by the coupling of large-area silver conductors between different layers. The preparation method includes the steps of pretreatment, drilling, metal hole filling, ferrite material injection, printing, lamination, isostatic pressing, hot cutting, sintering and the like. The multi-layer chip filter is obtained by punching holes and injecting ferrite materials into the ceramic green ceramic sheet, which effectively solves the problems of delamination and fracture after different materials are mixed fired in the multi-layer chip filter, and improves the yield.
Description
技术领域 technical field
本发明属于电子元器件制作技术领域,特别涉及一种滤波器及其制备方法。The invention belongs to the technical field of manufacturing electronic components, and in particular relates to a filter and a preparation method thereof.
背景技术 Background technique
目前,传统的制备和生产小体积叠层片式滤波器主要有单元件形式和LC结构形式。针对上述两种方式的缺点,申请号为200810046266.4的发明专利公布了一种叠层片式滤波器及其制备方法,这种叠层片式滤波器是将所需的磁芯电感印制在整个一层铁氧体材料上,再将铁氧体材料与其他陶瓷材料叠在一起,进行共烧,叠层顺序为介质陶瓷/铁氧体材料/介质陶瓷/铁氧体材料/……/铁氧体材料/介质陶瓷。这种方法在理论上可实现高感值的磁芯电感的滤波器,但由于铁氧体和陶瓷两种材料的烧结应力不同,共烧后的基板往往出现断层分裂,平整度很难控制,因此成品率很低,实用性不强。At present, the traditional preparation and production of small-volume multilayer chip filters mainly include single-element form and LC structure form. In view of the shortcomings of the above two methods, the invention patent with the application number of 200810046266.4 discloses a multilayer chip filter and its preparation method. This kind of multilayer chip filter is to print the required magnetic core inductance on the whole On a layer of ferrite material, the ferrite material and other ceramic materials are stacked together for co-firing. The stacking sequence is dielectric ceramic/ferrite material/dielectric ceramic/ferrite material/…/iron Oxygen materials/dielectric ceramics. This method can theoretically realize a filter with a high-inductance magnetic core inductance, but due to the different sintering stresses of ferrite and ceramics, the co-fired substrate often has fault splitting, and the flatness is difficult to control. Therefore yield is very low, and practicability is not strong.
发明内容 Contents of the invention
本发明的目的是为了解决上述方法存在的问题,提出了一种多层片式滤波器及其制备方法。The object of the present invention is to solve the problems existing in the above method, and propose a multilayer chip filter and a preparation method thereof.
为了实现上述目的,本发明的技术方案是:一种多层片式滤波器由两个平板电容、三个片式空心电感和两个磁芯电感组成,三个片式空心电感依次排列在所述滤波器的上层,两个磁芯电感分别位于所述滤波器的下层的左右两端,两个平板电容位于所述滤波器的下层的中间,其中所述片式空心电感由陶瓷材料上的银导体印刷制成,所述磁芯电感由两层银导体及其通孔中的铁氧体材料构成,所述平板电容由不同层间的大面积银导体耦合形成。In order to achieve the above object, the technical solution of the present invention is: a multi-layer chip filter is composed of two plate capacitors, three chip air-core inductors and two magnetic core inductors, and the three chip air-core inductors are arranged in sequence. The upper layer of the filter, the two magnetic core inductors are respectively located at the left and right ends of the lower layer of the filter, and the two plate capacitors are located in the middle of the lower layer of the filter, wherein the chip air-core inductor is made of ceramic material The magnetic core inductance is made of two layers of silver conductors and the ferrite material in the through holes, and the plate capacitance is formed by coupling large-area silver conductors between different layers.
本发明针对上述多层片式滤波器,提出了一种多层片式滤波器的制备方法,具体包括如下步骤:The present invention proposes a preparation method of a multilayer chip filter for the above-mentioned multilayer chip filter, which specifically includes the following steps:
步骤1:预处理,对所采用的陶瓷生瓷片进行烘干,烘干条件:温度80~90℃,时间25~35分钟;Step 1: pretreatment, drying the used ceramic raw porcelain sheets, drying conditions: temperature 80-90°C, time 25-35 minutes;
步骤2:打孔,即在烘干的陶瓷生瓷片上打孔,其中磁芯电感的直径小于1mm,空心电感及层间连接线的直径范围为0.1~2.0mm;Step 2: Drilling holes, that is, punching holes on the dried ceramic green sheets, wherein the diameter of the magnetic core inductor is less than 1mm, and the diameter range of the air-core inductor and the interlayer connecting wire is 0.1-2.0mm;
步骤3:金属填孔,即在通孔内填充上金属浆料,填充后的陶瓷生瓷片需要烘干处理,使孔内金属固化,烘干条件:温度65~75℃,时间10~15分钟;Step 3: Metal hole filling, that is, filling the through hole with metal slurry. The filled ceramic green ceramic sheet needs to be dried to solidify the metal in the hole. Drying conditions: temperature 65-75°C, time 10-15 minute;
步骤4:铁氧体材料注入,在陶瓷生瓷片上需要实现磁芯电感的位置注入铁氧体材料,并对其进行烘干处理,烘干条件:温度65~75℃,时间10~15分钟;Step 4: Ferrite material injection, inject ferrite material on the ceramic green sheet where the magnetic core inductance needs to be realized, and dry it. Drying conditions: temperature 65-75°C, time 10-15 minutes ;
步骤5:印刷,通过精密丝网印刷使每层陶瓷生瓷片形成电路图形;Step 5: Printing, each layer of ceramic green ceramic sheet forms a circuit pattern through precision screen printing;
步骤6:叠片,即把印刷好的图形和形成互连通孔的陶瓷生瓷片,在温度25~45℃、压力5~10MPa条件下叠压在一起,形成一个完整的多层基板坯体;Step 6: Lamination, that is, the printed graphics and the ceramic green ceramic sheets forming interconnected holes are laminated together at a temperature of 25-45°C and a pressure of 5-10MPa to form a complete multi-layer substrate blank body;
步骤7:等静压,对多层基板坯体进行等静压,即利用陶瓷生瓷片的热塑性进行等静压,等静压过程在真空环境中进行,所述等静压条件为:压力20~40MPa,温度35~60℃;Step 7: Isostatic pressing, performing isostatic pressing on the multi-layer substrate green body, that is, using the thermoplasticity of the ceramic green sheet to perform isostatic pressing, the isostatic pressing process is carried out in a vacuum environment, and the isostatic pressing conditions are: pressure 20~40MPa, temperature 35~60℃;
步骤8:热切,在烧结前对层压后的多层生瓷片进行切割以形成滤波器个体;Step 8: hot cutting, cutting the laminated multi-layer green ceramic sheet before sintering to form individual filters;
步骤9:烧结,将热切后的陶瓷生坯放入炉中排胶烧结,烧结温度为850~950℃。最终得到本发明的多层片式滤波器。Step 9: sintering, put the hot-cut ceramic green body into a furnace for debinding and sintering, and the sintering temperature is 850-950°C. Finally, the multilayer chip filter of the present invention is obtained.
本发明的有益效果:本发明的多层片式滤波器的磁芯电感由两层银导体及其通孔中的铁氧体材料构成,在制备时通过在陶瓷生瓷片中打孔注入铁氧体材料得到多层片式滤波器,从而有效的解决了叠层片式滤波器中不同材料混烧后出现的分层断裂等问题,使成品率大大提高。Beneficial effects of the present invention: the magnetic core inductance of the multilayer chip filter of the present invention is composed of two layers of silver conductors and the ferrite material in the through holes thereof. Oxygen material is used to obtain a multi-layer chip filter, which effectively solves the problems of delamination and fracture after different materials are mixed and fired in the multi-layer chip filter, and greatly improves the yield.
附图说明 Description of drawings
图1是本发明提供的多层片式滤波器示意图。Fig. 1 is a schematic diagram of a multilayer chip filter provided by the present invention.
图2是本发明提供的多层片式滤波器的等效电路图。Fig. 2 is an equivalent circuit diagram of the multilayer chip filter provided by the present invention.
图3是本发明提供的多层片式滤波器的制备方法流程图。Fig. 3 is a flowchart of the preparation method of the multilayer chip filter provided by the present invention.
具体实施方式 Detailed ways
下面结合附图给出本发明的具体实施方式。Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.
多层片式滤波器如图1所示:由两个平板电容、三个片式空心电感和两个磁芯电感组成。三个片式空心电感依次排列在所述滤波器上层,两个磁芯电感分别位于所述滤波器下层的左右两端,两个平板电容位于所述滤波器下层的中间。其中所述片式空心电感由陶瓷材料上的银导体印刷制成,所述磁芯电感由两层银导体及其通孔中的铁氧体材料构成,所述平板电容由不同层间的大面积银导体耦合形成。The multilayer chip filter is shown in Figure 1: it consists of two plate capacitors, three chip air-core inductors and two magnetic core inductors. Three chip air-core inductors are arranged sequentially on the upper layer of the filter, two magnetic core inductors are respectively located at the left and right ends of the lower layer of the filter, and two plate capacitors are located in the middle of the lower layer of the filter. The chip air-core inductor is made by printing silver conductors on ceramic materials, the magnetic core inductor is made of two layers of silver conductors and ferrite materials in the through holes, and the plate capacitor is made of large interlayers Area silver conductor coupling is formed.
在电连接关系方面,本发明所述的多层片式滤波器的等效电路如图2所示:空心电感L1、L2、L3由陶瓷材料上的银导体印刷制成,其中空心电感L1和L3分别与整个滤波器的输入、输出端电极相连。磁芯电感L4和L5由两层银导体及其通孔中的铁氧体材料(磁芯)构成。平板电容由不同层间的大面积银导体耦合形成,并和磁芯电感并联后,与整个滤波器的地电极板相连。In terms of electrical connections, the equivalent circuit of the multilayer chip filter of the present invention is shown in Figure 2: the air-core inductors L1, L2, and L3 are made by printing silver conductors on the ceramic material, wherein the air-core inductors L1 and L3 is respectively connected to the input and output electrodes of the whole filter. Core inductors L4 and L5 consist of two layers of silver conductors with ferrite material (core) in their vias. The plate capacitor is formed by the coupling of large-area silver conductors between different layers, and is connected in parallel with the magnetic core inductance, and connected to the ground electrode plate of the entire filter.
多层片式滤波器的制备方法的流程图如图3所示,具体包括如下步骤:The flow chart of the preparation method of the multilayer chip filter is shown in Figure 3, which specifically includes the following steps:
步骤1:预处理,即用烘干炉对所采用的陶瓷生瓷片进行烘干,烘干条件:温度80~90℃,时间25~35分钟;Step 1: Pretreatment, that is, drying the ceramic raw porcelain sheets used in a drying furnace, drying conditions: temperature 80-90°C, time 25-35 minutes;
步骤2:打孔,即在烘干的陶瓷生瓷片上打孔,其中磁芯电感的直径小于1mm,空心电感及层间连接线的直径范围为0.1~2.0mm;Step 2: Drilling holes, that is, punching holes on the dried ceramic green sheets, wherein the diameter of the magnetic core inductor is less than 1mm, and the diameter range of the air-core inductor and the interlayer connecting wire is 0.1-2.0mm;
步骤3:金属填孔,即在通孔内填充上金属浆料,填充后的陶瓷生瓷片需要烘干处理,使孔内金属固化,烘干条件:温度65~75℃,时间10~15分钟;Step 3: Metal hole filling, that is, filling the through hole with metal slurry. The filled ceramic green ceramic sheet needs to be dried to solidify the metal in the hole. Drying conditions: temperature 65-75°C, time 10-15 minute;
步骤4:铁氧体材料注入,在陶瓷生瓷片上需要实现磁芯电感的位置注入铁氧体材料,并对其进行烘干处理,烘干条件:温度65~75℃,时间10~15分钟;Step 4: Ferrite material injection, inject ferrite material on the ceramic green sheet where the magnetic core inductance needs to be realized, and dry it. Drying conditions: temperature 65-75°C, time 10-15 minutes ;
步骤5:印刷,通过精密丝网印刷使每层陶瓷生瓷片形成电路图形;Step 5: Printing, each layer of ceramic green ceramic sheet forms a circuit pattern through precision screen printing;
步骤6:叠片,即把印刷好的图形和形成互连通孔的陶瓷生瓷片,在温度25~45℃,压力:5~10MPa条件下叠压在一起,形成一个完整的多层基板坯体;Step 6: Lamination, that is, the printed graphics and the ceramic green ceramic sheets forming interconnected holes are laminated together at a temperature of 25-45°C and a pressure of 5-10MPa to form a complete multi-layer substrate Body;
步骤7:等静压,对多层基板坯体进行等静压,即利用陶瓷生瓷片的热塑性进行等静压,等静压过程在真空环境中进行,等静压条件为:压力20~40MPa,温度35~60℃;Step 7: Isostatic pressing. Isostatic pressing is performed on the multi-layer substrate green body, that is, isostatic pressing is carried out by utilizing the thermoplasticity of the ceramic raw ceramic sheet. The isostatic pressing process is carried out in a vacuum environment. The isostatic pressing conditions are: pressure 20~ 40MPa, temperature 35~60℃;
步骤8:热切,在烧结前对层压后的多层生瓷片进行切割以形成滤波器个体;Step 8: hot cutting, cutting the laminated multi-layer green ceramic sheet before sintering to form individual filters;
步骤9:烧结,将热切后的陶瓷生坯放入炉中排胶烧结,烧结温度为850~950℃,最终得到本发明的多层片式滤波器。Step 9: sintering, put the hot-cut ceramic green body into a furnace for debinding and sintering, the sintering temperature is 850-950°C, and finally obtain the multilayer chip filter of the present invention.
以上实例仅为本发明的优选例子而已,本发明的使用并不局限于该实例,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above example is only a preferred example of the present invention, and the use of the present invention is not limited to this example. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in this document. within the scope of protection of the invention.
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| CN109905981B (en) * | 2019-03-22 | 2021-05-28 | 中国电子科技集团公司第四十三研究所 | A kind of manufacturing method of low temperature co-fired ceramic circuit board |
| CN116161967A (en) * | 2022-12-30 | 2023-05-26 | 上海泽丰半导体科技有限公司 | Ceramic substrate preparation method and ceramic substrate |
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| CN101404485A (en) * | 2008-10-13 | 2009-04-08 | 电子科技大学 | Lamination sheet type wave filter and method for producing the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107465395A (en) * | 2014-04-03 | 2017-12-12 | 深圳振华富电子有限公司 | A kind of lamination sheet type ceramic RF low pass filter and preparation method thereof |
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| CN102163960A (en) | 2011-08-24 |
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