CN102253505B - Substrate position detecting method and device - Google Patents
Substrate position detecting method and device Download PDFInfo
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- CN102253505B CN102253505B CN 201010185073 CN201010185073A CN102253505B CN 102253505 B CN102253505 B CN 102253505B CN 201010185073 CN201010185073 CN 201010185073 CN 201010185073 A CN201010185073 A CN 201010185073A CN 102253505 B CN102253505 B CN 102253505B
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- 239000000758 substrate Substances 0.000 title claims abstract description 101
- 238000000034 method Methods 0.000 title claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 59
- 238000006243 chemical reaction Methods 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 53
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000005260 corrosion Methods 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 8
- 239000002253 acid Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 3
- 230000035807 sensation Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The embodiment of the invention discloses a substrate position detecting method and device. The substrate position detecting device comprises a supporting device arranged in a reaction cavity, wherein at least one set of swinging devices provided with a reflecting plate at the bottom is erected on the supporting device, each set of swinging devices swing along with the change of a position of a substrate, and an optical transceiving device is arranged outside the reaction cavity corresponding to the reflecting plate and used for transmitting light to the reflecting plate and judging whether the substrate reaches the detecting position according to the strength of light reflected back by the reflecting plate, wherein the wall of the reaction cavity between the optical transceiving device and the reflecting plate is made of a light transmitting material. The substrate position detecting device disclosed by the invention is suitable for being used for detecting the position of the substrate in the reaction cavity.
Description
Technical field
The present invention relates to the liquid crystal panel technical field, particularly a kind of substrate position detection method and device.
Background technology
Usually, in the process of making liquid crystal panel, need in reaction chamber, process substrate.When substrate is transferred into reaction chamber, need to detect the position of substrate, to judge whether substrate arrives assigned address.
At present, substrate position detection apparatus commonly used is made according to magnetic induction principle, and this device comprises the line of induction that places the magnetic head in the reaction chamber and pass reaction cavity, and a line of induction part places in the reaction chamber, is used for the induction magnetic head change in location; The part of this line of induction places outside the reaction chamber, is connected with signal processing unit, and signal processing unit is connected with the device control module of control reaction chamber; Substrate drives the change in location of magnetic head in transport process, thereby cause magnetic induction density to change, the outer signal processing module of reaction chamber is judged the position of substrate according to the magnetic induction density that receives, and is exported corresponding voltage or current value to the input end of device control module.
In realizing process of the present invention, the inventor finds that there are the following problems at least in the prior art:
Because magnetic head and the line of induction exist together in the reaction chamber, and be strong acid, highly basic, organic liquid or water environment in the reaction chamber, magnetic head, the line of induction very easily are corroded and then cause induction unusual, thereby reduce the sensitivity of substrate position detection.
Summary of the invention
Embodiments of the invention provide a kind of substrate position detection method and device, can improve the sensitivity that substrate position detects.
The technical scheme that the embodiment of the invention adopts is:
A kind of substrate position detection apparatus, comprise: be arranged at the fastening in the reaction chamber, described fastening is added to be provided with the rocking apparatus that at least one cover bottom is provided with reflector, described every cover rocking apparatus swings with the substrate position variation, the outer position corresponding to described reflector of described reaction chamber is provided with optical transmit-receive device, described optical transmit-receive device is used for to described reflector emission of light, and judges according to the intensity of the light that is reflected by described reflector whether substrate arrives the detection position;
Wherein, the reactor wall between described optical transmit-receive device and the described reflector is the light transmission material.
A kind of substrate position detection method, fastening is set in reaction chamber, described fastening is added to be provided with the rocking apparatus that at least one cover bottom is provided with reflector, described every cover rocking apparatus swings with the substrate position variation, the outer position corresponding to described reflector of described reaction chamber is provided with optical transmit-receive device, and the reactor wall between described optical transmit-receive device and the described reflector is the light transmission material;
Described method comprises:
Optical transmit-receive device is to the reflector emission of light;
Optical transmit-receive device receives the light that described reflector reflects;
The light intensity that the more described reflector of optical transmit-receive device reflects and the Intensity threshold of presetting;
If the light intensity that described reflector reflects, judges that substrate does not arrive the detection position more than or equal to default Intensity threshold;
If the light intensity that described reflector reflects, judges that substrate arrives the detection position less than default Intensity threshold.
Embodiment of the invention substrate position detection method and device, optical transmit-receive device can expose to the light of launching on the reflector through the light transmission reactor wall, and the reception reflector passes through the light that this light transmission reactor wall reflects, when substrate position changes, rocking apparatus swings and causes the position of reflector to change, the intensity that reflector reflexes to the light of optical transmit-receive device also can change thereupon, and optical transmit-receive device is judged the position of substrate according to the intensity of the light that receives.Compared with prior art, adopt the light sensation mode to carry out position probing, can effectively improve sensing range and sensitivity; Optical transmit-receive device is positioned at outside the reaction chamber, can avoid the corrosion of strong acid, highly basic, organic liquid or water environment in the reaction chamber, thereby improves the mission life of optical transmit-receive device, guarantees the sensitivity that substrate position detects.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the front view of the substrate position detection apparatus in the embodiment of the invention 1;
Fig. 2 is the side view of substrate position detection apparatus when not perceiving substrate in the embodiment of the invention 1;
Fig. 3 is the side view of substrate position detection apparatus when perceiving substrate in the embodiment of the invention 1;
Fig. 4 is the front view of the substrate position detection apparatus in the embodiment of the invention 2;
Fig. 5 is the front view of the substrate position detection apparatus in the embodiment of the invention 3;
Fig. 6 is the substrate position detection method process flow diagram in the embodiment of the invention 4.
Mark among the figure: 1, transmitting terminal; 2, receiving end; 3, pendulum mass; 4, reflector; 5, roller; 6, support; 7, fixed head; 8, fixed screw; 9, connecting link; 9a, connecting link and carriage interface section; 9b, connecting link and pendulum mass interface portion; 10, pad; 11, fastening device; 12, reaction chamber; 13, namely plug joint; 14, power wheel; 15, substrate.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making all other embodiment that obtain under the creative work prerequisite.
For the advantage that makes technical solution of the present invention is clearer, below in conjunction with drawings and Examples the present invention is elaborated.
The embodiment of the invention provides a kind of substrate position detection apparatus, such as Fig. 1, shown in Figure 2, described substrate position detection apparatus comprises: be arranged at the fastening in the reaction chamber 12, described fastening is added to be provided with the rocking apparatus that a bottom is provided with reflector 4, described rocking apparatus swings with substrate 15 change in location, described reaction chamber 12 outer positions corresponding to described reflector 4 are provided with optical transmit-receive device, described optical transmit-receive device is used for to described reflector 4 emission of lights, and judges according to the intensity of the light that is reflected by described reflector 4 whether substrate 15 arrives the detection position;
Wherein, the reactor wall between described optical transmit-receive device and the described reflector 4 is the light transmission material.
The both sides of described substrate position detection apparatus also are provided with power wheel 14, are used for described substrate 15 is transmitted to the position of described substrate position detection apparatus; The roller 5 that described rocking apparatus comprises pendulum mass 3 and is convexly set in described pendulum mass 3 tops, the height of described roller 5 is higher than the height of power wheel 14.Described roller 5 can be to be connected setting by bearing with described pendulum mass 3, and has part to be convexly set in the top of described pendulum mass 3, can drive described pendulum mass 3 motions by friction force during described roller 5 motion; Described roller 5 can also be to be integral setting with pendulum mass 3, and has part to be convexly set in the top of described pendulum mass 3, can drive described pendulum mass 3 motions during described roller 5 motion.
Further, described fastening comprises: two " L " shape supports 6 that stand on reaction chamber 12 diapires and be spaced apart, and the fixed head 7 that fixed screw 8 passes described support 6 bottoms is fixed in reaction chamber 12 diapires with described support 6;
Described rocking apparatus is between two supports 6 of described fastening, and described rocking apparatus and described two supports 6 are coupling.
As shown in Figure 1, described rocking apparatus top offers cylindrical cavity, and the inside of described cylindrical cavity is equipped with connecting link 9, and the two ends of described connecting link 9 are set up in respectively on two supports 6 of described fastening; The connecting link and the pendulum mass interface portion 9b that are positioned at described cylindrical cavity are right cylinder.
Described support 6 tops offer groove, and the two ends of connecting link 9 are set up in respectively in the described groove, are positioned at the connecting link of described groove and the shape of the 9a of carriage interface section and the shape of described groove and are complementary, so that described connecting link 9 just is stuck in the described groove;
Preferably, described groove is trapezoidal groove, be positioned at the connecting link of described groove and the 9a of carriage interface section be shaped as with described trapezoidal groove be complementary trapezoidal.Certainly, described groove also can be the shapes such as rectangle, square or circular arc, and the shape of described connecting link and the 9a of carriage interface section also can be the shapes such as rectangle, square or circular arc that are complementary with described groove.
Certainly, the connected mode between two supports 6 of described rocking apparatus and described fastening is not limited to this, as long as described rocking apparatus can be fixed on a certain height between described two supports 6, and described rocking apparatus can swing and gets final product.
Described substrate 15 places on the power wheel 14, power wheel 14 is in rotation process, driving substrate 15 along continuous straight runs moves towards roller 5, because the height of roller 5 is a little more than power wheel 14, when substrate 15 moves to the power wheel top, will press roller 5, thereby driving described pendulum mass 3, roller 5 motions rotate around described connecting link 9, can reduce and substrate between friction force, avoid substrate to be damaged.
Further, the connecting link 9 between described rocking apparatus and support 6 is arranged with pad 10, horizontally slips along described connecting link 9 to prevent described pendulum mass 3.
Further, the connecting link 9 in described support 6 outsides is provided with the fastening device 11 for fixing described connecting link 9, and is up and down to prevent described connecting link 9; Fastening device 11 is detachable, and after taking described fastening device 11 apart, described rocking apparatus can by whole taking-up the on the described support 6, be convenient to change.
Wherein, described optical transmit-receive device comprises transmitting terminal 1, receiving end 2 and signal processing module (not shown), and described signal processing module is connected with the input end of device control module (not shown);
Described transmitting terminal 1 is used for to described reflector 4 emission of lights; Described receiving end 2 is used for receiving the light that described reflector 4 reflects; Described signal processing module compares for intensity and the predefined Intensity threshold of the light that described receiving end 2 is received, and judges whether described substrate 15 arrives the detection position, and exports corresponding voltage or current value.
Further, described substrate position detection apparatus also comprises the i.e. plug joint 13 that links to each other with described optical transmit-receive device, described optical transmit-receive device is connected with the input end of device control module by the described joint 13 that namely plugs, described device control module is used for voltage or the current value according to described signal processing module output, and the equipment in the cavity is sent corresponding steering order.When described optical transmit-receive device breaks down, described optical transmit-receive device can be extracted by described joint 13 integral body that namely plug, change, greatly reduced the time of equipment downtime.
Preferably, described reflector 4 is corrosion-resistant material, for example: glass, when in the described reaction chamber being strong acid, highly basic, organic liquid or water environment, can effectively avoid described reflector 4 to be corroded; When described reflector 4 work are malfunctioning, pendulum mass 3 and connecting link 9 integral body can be changed by taking out on the support 6, easy and simple to handle, reduced maintenance time.
The below is introduced the duty of described substrate position detection apparatus.
In advance the receiving end 2 of optical transmit-receive device is set an Intensity threshold, the minimum value of the light intensity that described reflector 4 reflected when described Intensity threshold can not swing for described rocking apparatus, but be not limited only to this; Light that transmitting terminal 1 is launched arrives receiving end 2 after through reflector 4 reflections, and the intensity of the light that receives when receiving end 2 shows that substrate does not arrive the detection position during more than or equal to this Intensity threshold, and substrate position detection apparatus does not perceive substrate and arrives; The intensity of the light that receives when receiving end 2 shows that substrate has arrived the detection position during less than this Intensity threshold, and substrate position detection apparatus perceives substrate and arrives.
As shown in Figure 2, substrate 15 not yet contacts with roller 5, pendulum mass 3 does not swing, at this moment, receiving end 2 is sent to signal processing module with the light intensity that reflector 4 reflects, signal processing module compares this light intensity and predefined Intensity threshold, judge that this light intensity is more than or equal to described Intensity threshold, and then judge that substrate not yet arrives the detection position, then signal processing module is exported the first level to the input end of device control module, device control module and then send steering order according to this first level, the processing substrate operation is not carried out in indication.
As shown in Figure 3, the roller 5 of substrate 15 above arrival pendulum mass 3 under the transmission of power wheel 14, and pressed described roller 5, at this moment, roller 5 Sports band movable pendulum bodies 3 rotate around connecting link 9, the position of reflector 4 changes thereupon, and then cause reflector 4 to reflex to the strength decreased of the light of receiving end 2, the light intensity notification signal processing module that receiving end 2 reflects reflector 4, signal processing module compares this light intensity and predefined Intensity threshold, judge that this light intensity is less than described Intensity threshold, and then judge that substrate arrives the detection position, then signal processing module is to the input end of device control module output second electrical level, device control module and then send steering order according to this second electrical level, and indication is processed operation accordingly to substrate.
The height of described the first level and second electrical level according to the actual conditions setting, needs only the level value that guarantees described the first level and second electrical level not identical by signal processing module.For example: it is high level that the first level is set, and second electrical level is low level; Perhaps, it is low level that the first level is set, and second electrical level is high level.The output of described signal processing module is not limited to level signal, and the light intensity value that described signal processing module also can receive according to receiving end 2 is to the input end output current value of device control module.
Further, for the light transmission that reduces reactor wall on detecting the impact of performance, can regulate the light intensity of transmitting terminal emission, the light intensity of transmitting terminal emission can be far longer than this Intensity threshold, thereby can reduce various environmental factors to detecting the impact of performance.
Embodiment of the invention substrate position detection apparatus has adopted the light sensation mode to carry out the position probing of substrate, can effectively improve sensing range and sensitivity; Optical transmit-receive device is positioned at outside the reaction chamber, can avoid the corrosion of strong acid, highly basic, organic liquid or water environment in the reaction chamber, thereby improves the mission life of optical transmit-receive device, guarantees the sensitivity that substrate position detects; When the breaking down of rocking apparatus bottom, rocking apparatus and connecting link integral body can be changed by taking-up on the support, reduced maintenance time; Optical transmit-receive device is connected with the input end of device control module by namely plugging joint, when described optical transmit-receive device breaks down, described optical transmit-receive device can be extracted by the described joint integral body that namely plugs, and changes.
The present embodiment provides a kind of substrate position detection apparatus, as shown in Figure 4, be with the difference of substrate position detection apparatus among the embodiment 1, in the substrate position detection apparatus of the present embodiment, described fastening is added to be provided with the rocking apparatus that a plurality of bottoms are provided with reflector 4, the position of the outer reflector 4 corresponding to each rocking apparatus of described reaction chamber 12 is provided with optical transmit-receive device, wherein the concrete structure of each rocking apparatus and optical transmit-receive device and effect all can be as described in rocking apparatus and the optical transmit-receive devices among the embodiment 1, other structures can as described in the substrate position checkout equipment among the embodiment 1, not repeat them here yet.
The substrate position detection apparatus that the present embodiment provides is because be provided with a plurality of rocking apparatus and the optical transmit-receive device corresponding with described rocking apparatus, when the reflector in one of them rocking apparatus or optical transmit-receive device break down, other rocking apparatus and the optical transmit-receive device corresponding with rocking apparatus will be proceeded to detect, thereby can improve the reliability that substrate position detects.
The present embodiment provides a kind of substrate position detection apparatus, as shown in Figure 5, be with the difference of substrate position detection apparatus among the embodiment 2, in the substrate position detection apparatus of the present embodiment, the position of the outer reflector 4 corresponding to a plurality of rocking apparatus of described reaction chamber 12 is provided with an optical transmit-receive device, described optical transmit-receive device receives the light that each reflector reflects to each reflector emission of light, and the light intensity that reflects according to each reflector is judged the position of substrate.
The substrate position detection apparatus that the present embodiment provides, an optical transmit-receive device can transmit and receive multichannel light, and according to the intensity of the multichannel light that receives the position of substrate is judged, with only transmit and receive one road light and compare, can reduce erroneous judgement, thereby further improve the reliability that substrate position detects; Because rocking apparatus is arranged in the reaction chamber, chemical environment is complicated, and also can wear and tear because of swing, therefore the present embodiment arranges a plurality of rocking apparatus that are easy to change, and the optical transmit-receive device stability that is arranged at outside the reaction chamber is high, the optical transmit-receive device that can process multipath light signal only is set reduces cost, and those skilled in the art can arrange optical transmit-receive device as required to the Processing Algorithm of multiple signals.
The embodiment of the invention provides a kind of substrate position detection method, fastening is set in reaction chamber, described fastening is added to be provided with the rocking apparatus that at least one cover bottom is provided with reflector, described every cover rocking apparatus swings with the substrate position variation, the outer position corresponding to described reflector of described reaction chamber is provided with optical transmit-receive device, and the reactor wall between described optical transmit-receive device and the described reflector is the light transmission material;
As shown in Figure 6, described method comprises:
601, optical transmit-receive device is to the reflector emission of light.
602, optical transmit-receive device receives the light that described reflector reflects.
603, optical transmit-receive device compares described the reflector light intensity that reflects and the Intensity threshold of presetting, if the light intensity that described reflector reflects is more than or equal to default Intensity threshold, execution in step 604; If the light intensity that described reflector reflects is less than default Intensity threshold, execution in step 605.
Wherein, the minimum value of the light intensity that described reflector reflected when described Intensity threshold can not swing for described rocking apparatus, but be not limited only to this.
604, judge that substrate does not arrive the detection position.
605, judge that substrate arrives the detection position.
Embodiment of the invention substrate position detection method has adopted the light sensation mode to carry out the position probing of substrate, can effectively improve sensing range and sensitivity; Optical transmit-receive device is positioned at outside the reaction chamber, can avoid the corrosion of strong acid, highly basic, organic liquid or water environment in the reaction chamber, thereby improves the mission life of optical transmit-receive device, guarantees the sensitivity that substrate position detects.
The above; be the specific embodiment of the present invention only, but protection scope of the present invention is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (10)
1. substrate position detection apparatus, it is characterized in that, comprise: be arranged at the fastening in the reaction chamber, described fastening is added to be provided with the rocking apparatus that at least one bottom is provided with reflector, described each rocking apparatus swings with the substrate position variation, the outer position corresponding to described reflector of described reaction chamber is provided with optical transmit-receive device, described optical transmit-receive device is used for to described reflector emission of light, and receive the light that described reflector reflects, the light intensity that more described reflector reflects and the Intensity threshold of presetting, if the light intensity that described reflector reflects is more than or equal to default Intensity threshold, judge that substrate does not arrive the detection position, if the light intensity that described reflector reflects, judges that substrate arrives the detection position less than default Intensity threshold;
Wherein, the reactor wall between described optical transmit-receive device and the described reflector is the light transmission material.
2. device according to claim 1 is characterized in that, the both sides of described substrate position detection apparatus also are provided with power wheel, is used for described substrate is transmitted to the position of described substrate position detection apparatus; The roller that described rocking apparatus comprises pendulum mass and is convexly set in described pendulum mass top, the height of described roller is higher than the height of power wheel.
3. device according to claim 1 is characterized in that, described fastening comprises the support that stands on the reaction chamber diapire and be spaced apart.
4. device according to claim 3 is characterized in that, described rocking apparatus is between two supports of described fastening, and described rocking apparatus and described two supports are coupling.
5. device according to claim 4 is characterized in that, the top of described rocking apparatus offers cylindrical cavity, and the inside of described cylindrical cavity is equipped with connecting link, and the two ends of described connecting link are set up in respectively on two supports of described fastening; The connecting link that is positioned at described cylindrical cavity partly is right cylinder.
6. device according to claim 1 is characterized in that, described optical transmit-receive device comprises transmitting terminal, receiving end and signal processing module;
Described transmitting terminal is used for to described reflector emission of light; Described receiving end is used for receiving the light that described reflector reflects; Described signal processing module compares with predefined Intensity threshold for the intensity of the light that described receiving end is received, and judges whether described substrate arrives the detection position, and exports corresponding voltage or current value.
7. device according to claim 6, it is characterized in that, also comprise the i.e. plug joint that links to each other with described optical transmit-receive device, described optical transmit-receive device is connected with the input end of device control module by the described joint that namely plugs, described device control module is used for voltage or the current value according to described signal processing module output, sends corresponding steering order.
8. each described device in 7 according to claim 1 is characterized in that, described reflector is corrosion-resistant material.
9. substrate position detection method, it is characterized in that, fastening is set in reaction chamber, described fastening is added to be provided with the rocking apparatus that at least one cover bottom is provided with reflector, described every cover rocking apparatus swings with the substrate position variation, the outer position corresponding to described reflector of described reaction chamber is provided with optical transmit-receive device, and the reactor wall between described optical transmit-receive device and the described reflector is the light transmission material;
Described method comprises:
Optical transmit-receive device is to the reflector emission of light;
Optical transmit-receive device receives the light that described reflector reflects;
The light intensity that the more described reflector of optical transmit-receive device reflects and the Intensity threshold of presetting;
If the light intensity that described reflector reflects, judges that substrate does not arrive the detection position more than or equal to default Intensity threshold;
If the light intensity that described reflector reflects, judges that substrate arrives the detection position less than default Intensity threshold.
10. method according to claim 9 is characterized in that, described Intensity threshold is the minimum value of the described rocking apparatus light intensity that described reflector reflects when not swinging.
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| CN 201010185073 CN102253505B (en) | 2010-05-20 | 2010-05-20 | Substrate position detecting method and device |
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| CN 201010185073 CN102253505B (en) | 2010-05-20 | 2010-05-20 | Substrate position detecting method and device |
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| CN102253505A CN102253505A (en) | 2011-11-23 |
| CN102253505B true CN102253505B (en) | 2013-04-03 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6000019B2 (en) * | 2012-08-22 | 2016-09-28 | 芝浦メカトロニクス株式会社 | Substrate processing equipment |
| CN105185283B (en) | 2015-10-23 | 2017-12-08 | 京东方科技集团股份有限公司 | Detection means, frame substrate, the method for detection frame substrate upper substrate position |
| TWI596575B (en) * | 2016-10-11 | 2017-08-21 | Int Currency Tech Corp | A device that detects coins in the pipeline using distance and ambient light sensors |
| CN108415082B (en) * | 2018-01-23 | 2020-05-05 | 武汉华星光电半导体显示技术有限公司 | Sensor with a sensor element |
| CN109142388B (en) * | 2018-08-01 | 2021-04-13 | 京东方科技集团股份有限公司 | Substrate detector, drive device, and substrate cleaning equipment |
| CN110490929A (en) * | 2019-07-26 | 2019-11-22 | 深圳市华星光电半导体显示技术有限公司 | Substrate detection equipment and its detection method |
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| CN1818764A (en) * | 2005-02-07 | 2006-08-16 | Lg.菲利浦Lcd株式会社 | Method and apparatus of forming alignment layer for liquid crystal display device |
| CN101261960A (en) * | 2007-03-06 | 2008-09-10 | 三星电子株式会社 | Method of manufacturing liquid crystal display including forming alignment marks in insulating mother substrate |
| JP2009094184A (en) * | 2007-10-05 | 2009-04-30 | Toray Ind Inc | Substrate treatment apparatus and treating method |
| WO2009157154A1 (en) * | 2008-06-26 | 2009-12-30 | 株式会社ニコン | Method and apparatus for manufacturing display element |
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2010
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1818764A (en) * | 2005-02-07 | 2006-08-16 | Lg.菲利浦Lcd株式会社 | Method and apparatus of forming alignment layer for liquid crystal display device |
| CN101261960A (en) * | 2007-03-06 | 2008-09-10 | 三星电子株式会社 | Method of manufacturing liquid crystal display including forming alignment marks in insulating mother substrate |
| JP2009094184A (en) * | 2007-10-05 | 2009-04-30 | Toray Ind Inc | Substrate treatment apparatus and treating method |
| WO2009157154A1 (en) * | 2008-06-26 | 2009-12-30 | 株式会社ニコン | Method and apparatus for manufacturing display element |
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