CN102269933B - Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle - Google Patents
Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle Download PDFInfo
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- CN102269933B CN102269933B CN201110021357A CN201110021357A CN102269933B CN 102269933 B CN102269933 B CN 102269933B CN 201110021357 A CN201110021357 A CN 201110021357A CN 201110021357 A CN201110021357 A CN 201110021357A CN 102269933 B CN102269933 B CN 102269933B
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- photoresist nozzle
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 63
- 238000009434 installation Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 239000003292 glue Substances 0.000 abstract description 3
- 230000006978 adaptation Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention relates to the field of semiconductor, and specifically provides an auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle in a semiconducting even glue developing equipment. The device can be used for auxiliary positioning and semi-automatic fixing during manually replacing of a plurality of photoresist nozzles and has advantages of convenient replacing, adaptation to replacing of a plurality of nozzles, accurate positioning and firm fixing. The device comprises a carriage fixing system for photoresist nozzles and a photoresist nozzle system arranged on the carriage fixing system for photoresist nozzles. The carriage fixing system for photoresist nozzles is equipped with a cylinder carriage and a nozzle carriage which are connected with each other; the cylinder carriage has a pneumatic detent fixed thereon, and locating detents are arranged on a motion portion of the pneumatic detent. The photoresist nozzle system is equipped with a nozzle body, a nozzle and a guiding fixing clamp column, wherein the nozzle and the guiding fixing clamp column are parallel and fixed on the nozzle body. According to the invention, problems in prior art, such as time-consuming and labor-consuming replacing and influence to capacity, can be solved.
Description
Technical field
The present invention relates to semiconductor applications; Be specially a kind of in order to partly to lead the semi-automatic stationary installation of photoresist nozzle exchange assist location in the gel developer; In order to the assist location when many photoresists nozzle is manually changed and semi-automatic fixing, reach and change conveniently, adapt to multi-nozzle and change; Accurate positioning, fixing solid advantage.
Background technology
At present, behind the semiconductor in the road encapsulation, gel developer need be in an even glue unit nozzle system of integrated multiple photoresist, reach a tractor serves several purposes, the needs that reduce cost.But general nozzle exchange is because the glue kind is numerous, and the photoresist supply line varies in size, and just needs manually to change.Many times changing wastes time and energy, and has a strong impact on the production capacity of production, sometimes also because fixing the error impacts the result of technology.
Summary of the invention
In order to overcome above-mentioned all deficiencies; The present invention provides a kind of photoresist nozzle exchange assist location semi-automatic stationary installation; Solve the replacing that exists in the prior art and waste time and energy, influence problems such as production capacity; As the rotational automatic fastener of semiconductor square substrate in the semiconductor production,, reach the dual needs of quick loading and unloading and safety rotation square substrate through utilizing the rotating centrifugal effect.
Technical scheme of the present invention is:
The semi-automatic stationary installation of a kind of photoresist nozzle exchange assist location, this device is provided with the carriage fixed system and the photoresist nozzle system of photoresist nozzle, and the photoresist nozzle system is installed on the carriage fixed system of photoresist nozzle;
The carriage fixed system of photoresist nozzle is provided with cylinder bracket and nozzle bracket, and cylinder bracket links to each other with nozzle bracket, on cylinder bracket, is fixed with the gas pawl, at the action part of gas pawl locating detent is installed;
The photoresist nozzle system is provided with nozzle body, nozzle and guide securement card post, and nozzle is parallel with guide securement card post, and nozzle and guide securement card post are fixed on the nozzle body.
The semi-automatic stationary installation of described photoresist nozzle exchange assist location, the photoresist nozzle system vertically is placed on the nozzle bracket, and the photoresist nozzle system is located with nozzle bracket through nozzle and guide securement card post simultaneously; After the photoresist nozzle system was put on the nozzle bracket, the gas pawl was closed, and it is closed to drive the locating detent that connects on the gas pawl simultaneously, fixed nozzle; In the time of need taking the photoresist nozzle system away, the gas pawl opens, and takes the photoresist nozzle system away.
The semi-automatic stationary installation of described photoresist nozzle exchange assist location; Nozzle body is placed on the platform that has pilot hole of nozzle bracket; Nozzle is located through pilot hole; When placing the photoresist nozzle body, the guide securement card post parallel with nozzle is placed in the locating detent of pilot hole platform back simultaneously.
Advantage of the present invention and beneficial effect are:
1, the present invention can realize that loading and unloading fast.
2, the present invention can realize accurate positioning.
3, the present invention can realize fixation, safety.
In a word, the present invention reaches and changes conveniently in order to the assist location when many photoresists nozzle is manually changed and semi-automatic fixing, adapts to multi-nozzle and changes, accurate positioning, fixing solid advantage.
Description of drawings
Fig. 1 is the carriage fixed system synoptic diagram of photoresist nozzle of the present invention.
Fig. 2 is a photoresist nozzle system synoptic diagram of the present invention.
Fig. 3 is the synoptic diagram of carriage fixed system and the photoresist nozzle system of photoresist nozzle of the present invention after fixing.
Among the figure, 1 cylinder bracket; 2 gas pawls; 3 locating detents; 4 nozzle brackets; 5 guide securement card posts; 6 nozzles; 7 nozzle bodies; 8 pilot holes.
Embodiment
Shown in Fig. 1-3; The present invention is the semi-automatic stationary installation of photoresist nozzle exchange assist location in semiconductor production; Mainly comprise: the carriage fixed system (Fig. 1) of a photoresist nozzle and a photoresist nozzle system (Fig. 2); Perhaps the carriage fixed system of a photoresist nozzle and a plurality of photoresist nozzle system, the photoresist nozzle system is installed on the carriage fixed system of photoresist nozzle.
As shown in Figure 1, the carriage fixed system of photoresist nozzle is to be formed by connecting cylinder bracket 1 and nozzle bracket 4, on cylinder bracket 1, is fixed with gas pawl 2, at the action part of gas pawl 2 a pair of locating detent 3 is installed.
As shown in Figure 2, the photoresist nozzle system is made up of nozzle body 7, the nozzle 6 and the guide securement card post 5 that are fixed on the nozzle body 7, and nozzle 6 is parallel with guide securement card post 5.
As shown in Figure 3; The carriage fixed system of photoresist nozzle is fixed, and the photoresist nozzle system vertically is being placed on above the nozzle bracket 4 on the nozzle bracket 4, locatees simultaneously through nozzle 6 and guide securement card post 5; After being put on the nozzle bracket; Let gas pawl 2 closures, drive locating detent 3 closures that connect on the gas pawl 2 simultaneously, thereby fix nozzle 6.In the time of need taking the photoresist nozzle system away, only need let gas pawl 2 open, can take the photoresist nozzle system away.
Among the present invention; The carriage fixed system of whole photoresist nozzle is a system platform; When needs are changed different spray nozzles 6; Nozzle body 7 is placed on the platform that has pilot hole 8 of nozzle bracket 4, and nozzle 6 is located through pilot hole 8, and effect is the effect of when placing the photoresist nozzle system, playing assist location.When placing photoresist nozzle body 7, the guide securement card post parallel with nozzle 6 is placed in the locating detent 3 of pilot hole 8 platform back simultaneously, and locating detent 3 closures finally reach placement, location and fastening effect then.
Claims (1)
1. semi-automatic stationary installation of photoresist nozzle exchange assist location, it is characterized in that: this device is provided with the carriage fixed system and the photoresist nozzle system of photoresist nozzle, and the photoresist nozzle system is installed on the carriage fixed system of photoresist nozzle;
The carriage fixed system of photoresist nozzle is provided with cylinder bracket and nozzle bracket, and cylinder bracket links to each other with nozzle bracket, on cylinder bracket, is fixed with the gas pawl, at the action part of gas pawl locating detent is installed;
The photoresist nozzle system is provided with nozzle body, nozzle and guide securement card post, and nozzle is parallel with guide securement card post, and nozzle and guide securement card post are fixed on the nozzle body;
The photoresist nozzle system vertically is placed on the nozzle bracket, and the photoresist nozzle system is located with nozzle bracket through nozzle and guide securement card post simultaneously; After the photoresist nozzle system was put on the nozzle bracket, the gas pawl was closed, and it is closed to drive the locating detent that connects on the gas pawl simultaneously, fixed nozzle; In the time of need taking the photoresist nozzle system away, the gas pawl opens, and takes the photoresist nozzle system away;
Nozzle body is placed on the platform that has pilot hole of nozzle bracket, and nozzle is located through pilot hole, and when placing the photoresist nozzle body, the guide securement card post parallel with nozzle is placed in the locating detent of pilot hole platform back simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110021357A CN102269933B (en) | 2011-01-19 | 2011-01-19 | Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110021357A CN102269933B (en) | 2011-01-19 | 2011-01-19 | Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102269933A CN102269933A (en) | 2011-12-07 |
| CN102269933B true CN102269933B (en) | 2012-07-04 |
Family
ID=45052273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110021357A Active CN102269933B (en) | 2011-01-19 | 2011-01-19 | Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102269933B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI549324B (en) * | 2014-11-21 | 2016-09-11 | 財團法人工業技術研究院 | Test board, test and current annealing apparatus of thermoelectric legs and the method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103809390B (en) * | 2012-11-14 | 2016-08-31 | 沈阳芯源微电子设备有限公司 | A kind of development shower nozzle |
| CN104597714A (en) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | Gluing nozzle distribution device and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3134678B2 (en) * | 1994-10-19 | 2001-02-13 | 松下電器産業株式会社 | Bond application method |
| CN1611341A (en) * | 2003-10-28 | 2005-05-04 | 发那科株式会社 | Aligning device for an injection nozzle |
| CN101428280A (en) * | 2008-12-23 | 2009-05-13 | 中国科学院广州能源研究所 | Continuous washing device spray groove for band |
| CN101474685A (en) * | 2009-01-16 | 2009-07-08 | 江苏格尔顿传动有限公司 | Equipment for automatically processing vehicle steering universal-joint fork ear punch |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK1506464T3 (en) * | 2001-06-21 | 2010-05-03 | Proveris Scient Corp | Precise position controlled activation system |
| WO2004082916A2 (en) * | 2003-03-17 | 2004-09-30 | Manufacturing Technologies International Corporation | Rotary injection molding apparatus and method for use |
-
2011
- 2011-01-19 CN CN201110021357A patent/CN102269933B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3134678B2 (en) * | 1994-10-19 | 2001-02-13 | 松下電器産業株式会社 | Bond application method |
| CN1611341A (en) * | 2003-10-28 | 2005-05-04 | 发那科株式会社 | Aligning device for an injection nozzle |
| CN101428280A (en) * | 2008-12-23 | 2009-05-13 | 中国科学院广州能源研究所 | Continuous washing device spray groove for band |
| CN101474685A (en) * | 2009-01-16 | 2009-07-08 | 江苏格尔顿传动有限公司 | Equipment for automatically processing vehicle steering universal-joint fork ear punch |
Non-Patent Citations (1)
| Title |
|---|
| JP特许第3134678号B2 2000.12.01 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI549324B (en) * | 2014-11-21 | 2016-09-11 | 財團法人工業技術研究院 | Test board, test and current annealing apparatus of thermoelectric legs and the method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102269933A (en) | 2011-12-07 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |