CN102263045A - lateral movement mechanism - Google Patents
lateral movement mechanism Download PDFInfo
- Publication number
- CN102263045A CN102263045A CN2011101631411A CN201110163141A CN102263045A CN 102263045 A CN102263045 A CN 102263045A CN 2011101631411 A CN2011101631411 A CN 2011101631411A CN 201110163141 A CN201110163141 A CN 201110163141A CN 102263045 A CN102263045 A CN 102263045A
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- screw rod
- horizontal thrust
- thrust gear
- collar
- microscope carrier
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- 238000013519 translation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000014616 translation Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002650 habitual effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000012956 testing procedure Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention provides a crosswise thrusting mechanism which comprises a loading platform, a moveable carrier, a fixed base, a screw rod and a sleeve ring, wherein an opening slot is formed on the loading platform; a hole is perforated on the moveable carrier; the fixed base has a screw cap structure; one end of the screw rod is combined with the screw cap structure; the other end of the screw rod is connected to the moveable carrier, so that the moveable carrier translates relative to the fixed base by the virtue of the screw rod and the screw cap structure; and the sleeve ring penetrates through the opening slot and is buckled with the hole, thereby ensuring that the moveable carrier moves along the direction of the opening slot. The crosswise thrusting mechanism provided by the invention has the advantages that the structure is simple and the operation is convenient. Besides, under the actions of the opening slot, the hole and the sleeve ring, the movement of the moveable carrier becomes smoother, because the moveable carrier is prevented from deviating when moving along the direction of the opening slot.
Description
Technical field
The invention relates to a kind of travel mechanism, and particularly relevant for a kind of horizontal thrust gear.
Background technology
At integrated circuit (Integrated Circuits; IC) in the manufacturing process, all can carry out the testing procedure of product in the different phase of its processing procedure, and the analytical instrument of utilizing precision is simultaneously done the every check relevant for quality control in whole processing procedure, use and guarantee that process rate and wafer quality can reach best level, and detect the flaw that integrated circuit is taken place in manufacture process.Then, find out the reason that causes product to produce flaw,, reach the purpose that promotes process rate to guarantee the product quality conformance with standard further.Therefore, in the manufacture process of integrated circuit, the real yield of test for the lifting integrated circuit component, and set up the important step that effective data is used for project analysis.
Carrying out with test distinguished opportunity, and the test of integrated circuit (IC) products mainly can be divided into the wafer pin and survey and two stages of finished product test.Wherein, the wafer pin is surveyed when step ties up to wafer form and is carried out, and uses the good and the bad of distinguishing crystal grain (Die) before encapsulation earlier, to avoid unnecessary waste.Further, the function series that the wafer pin is surveyed detects the flaw that integrated circuit taken place and finds out reason in manufacture process, guaranteeing the product yield, and provides test data with as integrated circuit (IC) design and make the usefulness of analyzing.The finished product test is used and guaranteed this wafer behind encapsulation procedure then in the back execution of encapsulation, and is still up to specification.
Wherein the design of detection platform will influence the efficient of detection, therefore, how to provide a kind of operation simple and easy, and the detection platform that stability is high just becomes an important problem.
Summary of the invention
Therefore purpose of the present invention is providing a kind of horizontal thrust gear exactly, makes that the operation when detecting is more simple and easy steadily.
According to an embodiment of the present invention, a kind of horizontal thrust gear is proposed, comprise carrying platform, movable microscope carrier, holder, screw rod and the collar.Carrying platform has fluting, and movable microscope carrier has perforation.Holder has nut structure.One end of screw rod is combined in nut structure, the other end connection activity microscope carrier of screw rod, make movable microscope carrier by screw rod and nut structure with respect to the holder translation.The collar then is to pass fluting to engage with perforation, moves and can not be offset along the direction of fluting to guarantee movable microscope carrier.
Laterally thrust gear more comprises support bar and spring.The collar is socketed on an end of support bar, and the collar passes fluting and engages with perforation.Spring is connected and fixed seat and support bar.The thickness of the collar is greater than the thickness of carrying platform.The major axis of fluting is parallel to the major axis of screw rod.The collar comprises external screw thread, and perforation comprises internal thread, makes the collar be locked on perforation.Wherein movable microscope carrier is only at the monolateral screw rod that disposes.Laterally thrust gear more comprises setting element, is arranged on the support bar, in order to positioning ring.Laterally thrust gear more comprises setting element, is arranged on the support bar, in order to retainer spring.Support bar can have screw thread, and setting element can be nut.
This horizontal thrust gear has advantage simple in structure, easy to operate.In addition, make that by the effect of fluting, perforation and the collar moving of movable microscope carrier is more smooth-going, because can not move and can be offset along the fluting direction by assurance activity microscope carrier.
Description of drawings
Fig. 1 illustrates the schematic diagram of horizontal thrust gear first execution mode of the present invention.
Fig. 2 illustrates the explosive view of horizontal thrust gear second execution mode of the present invention.
Fig. 3 illustrates horizontal thrust gear among Fig. 2 in the schematic diagram of operational phase.
Fig. 4 illustrates the schematic diagram of horizontal thrust gear the 3rd execution mode of the present invention.
Embodiment
Below will and describe clear explaination embodiments of the present invention in detail with accompanying drawing, for the purpose of simplifying accompanying drawing, some known habitual structures and assembly will illustrate in the mode of simple signal in the accompanying drawings.
With reference to Fig. 1, it illustrates the schematic diagram of horizontal thrust gear 100 first execution modes of the present invention.Laterally thrust gear 100 comprises carrying platform 110, movable microscope carrier 120, holder 130, screw rod 140, the collar 160.Carrying platform 110 has fluting 112, and movable microscope carrier 120 has perforation 122.Movable microscope carrier 120 is positioned on the carrying platform 110, and holder 130 is positioned at carrying platform 110 1 sides.Wherein carrying platform 110 can integrate with holder 130 and be fixed on wall or the ground, or is individually fixed on wall or the ground.Has nut structure 132 on the holder 130, one end 142 of screw rod 140 is combined in nut structure 132,144 of the other ends of screw rod 140 are connection activity microscope carriers 120, make movable microscope carrier 120 by screw rod 140 with nut structure 132 and can be with respect to holder 130 translations.The collar 160 passes fluting 112 and engage with perforation 122, guarantees that movable microscope carrier 120 moves along 112 directions of slotting, and makes the mobile more smooth-going of movable microscope carrier 120.Laterally thrust gear 100 can be used for detection platform, and seeing through mechanism design can be so that movable microscope carrier 120 be along with screw rod 140 laterally moves, but can be along with screw rod 140 upsets.For example, the end 144 that screw rod 140 is connected with movable microscope carrier 120 has otch 146, screw rod 140 stretches in the groove 124 of movable microscope carrier 120, one end 144 of screw rod 140 props up the bottom 125 of groove 124, the flange 126 that sees through groove 124 opening parts again engages with the otch 146 of screw rod 140, makes an end 144 of screw rod 140 be connected in movable microscope carrier 120.Thus, when rotating screw bolt 140, this end 144 of screw rod 140 can make movable microscope carrier 120 laterally to move along with screw rod 140 in the middle idle running of groove 124, but can be along with screw rod 140 upsets.
The collar 160 engages with perforation 122 on the movable microscope carrier 120, and the user can place product 200 to be detected on movable microscope carrier 120, then, sees through as microscope or the imaging apparatus display screen of arranging in pairs or groups is observed this product 200 to be detected.By rotating screw bolt 140, making screw rod 140 reach with the movable microscope carrier 120 of its interlock can use and locate product 200 to be detected more accurately with respect to holder 130 left and right sides translations.
With reference to Fig. 2, it illustrates the explosive view of horizontal thrust gear 100 second execution modes of the present invention.If screw rod 140 only can advance with respect to holder 130, then laterally thrust gear 100 more includes support bar 150 and spring 170 except that aforesaid carrying platform 110, movable microscope carrier 120, holder 130, screw rod 140 and the collar 160.Support bar 150 is positioned at the below of carrying platform 110.The collar 160 is socketed on an end of support bar 150, and the collar 160 passes fluting 112 and engages with perforation 122.170 on spring is to connect support bar 150 and holder 130, to retract movable microscope carrier 120 by spring 170 and support bar 150.
Wherein the outer diameter D 1 of the collar 160 is preferably identical with 122 the inside diameter D 2 of boring a hole, make the collar 160 that is connected support bar 150 1 ends can firmly be stuck in perforation 122 in, make support bar 150 and movable microscope carrier 120 interlocks.The thickness W1 of the collar 160 also need be greater than the thickness W2 of carrying platform 110, makes the collar 160 can pass fluting 112 and engages with perforation 122.The thickness W1 of the collar 160 preferably for the thickness W3 of the thickness W2 that is equal to carrying platform 110 and movable microscope carrier 120 and, make the collar 160 firmly to be sticked in to bore a hole 122 in, do not expose and do not have unnecessary part.Can include external screw thread on the collar 160, perforation 122 can include internal thread, makes the collar 160 be locked in the perforation 122.The shape of fluting 112 can be strip, and the length L 1 of fluting 112 is greater than the inside diameter D 2 of perforation 122.112 the major axis of wherein slotting is parallel to the major axis of screw rod 140.In the present embodiment, movable microscope carrier 120 is only at the monolateral screw rod 140 that disposes.
With reference to Fig. 3, it illustrates horizontal thrust gear 100 among Fig. 2 in the schematic diagram of operational phase.The end 144 that screw rod 140 is connected with movable microscope carrier 120 has otch 146, screw rod 140 stretches in the groove 124 of movable microscope carrier 120, one end 144 of screw rod 140 props up the bottom 125 of groove 124, the flange 126 that sees through groove 124 opening parts again engages with the otch 146 of screw rod 140, makes an end 144 of screw rod 140 be connected in movable microscope carrier 120.Thus, when rotating screw bolt 140, this end 144 of screw rod 140 can make movable microscope carrier 120 laterally to move along with screw rod 140 in the middle idle running of groove 124, but can be along with screw rod 140 upsets.
The collar 160 on the support bar 150 engages with perforation 122 on the movable microscope carrier 120, and the user can place product 200 to be detected on movable microscope carrier 120, then, sees through as microscope or the imaging apparatus display screen of arranging in pairs or groups is observed this product 200 to be detected.By rotating screw bolt 140, making screw rod 140 reach with the movable microscope carrier 120 of its interlock can use and locate product 200 to be detected more accurately with respect to holder 130 left and right sides translations.
With this execution mode, with respect to nut structure 132 along first direction (as clockwise direction) rotating screw bolt 140, can be so that screw rod 140 reaches and the movable microscope carrier 120 of its interlock is moved to the left, and by the support bar 150 support activity microscope carriers 120 of movable microscope carrier 120 belows, make that moving of movable microscope carrier 120 is comparatively smooth-going, the situation that does not have shake takes place, and spring 170 can be stretched.Support bar 150 more can be in order to retract movable microscope carrier 120 with spring 170.With respect to nut structure 132 during along second direction (as counterclockwise) rotating screw bolt 140, then can be so that screw rod 140 and move right with the movable microscope carrier 120 of its interlock.At this moment, can be by the support of support bar 150 so that moving of movable microscope carrier 120 is more smooth-going, and the involution elastic force that sees through spring 170 and the provided movable microscope carrier 120 that retracts support bar 150 and see through the collar 160 sockets.
With reference to Fig. 4, it illustrates the schematic diagram of horizontal thrust gear 100 the 3rd execution mode of the present invention.Laterally thrust gear 100 removes aforesaid carrying platform 110, movable microscope carrier 120, holder 130, screw rod 140, support bar 150, the collar 160, and spring 170 outside, more include setting element 180.Setting element 180 is arranged on the support bar 150, is positioned at the collar 160 belows, in order to positioning ring 160.Setting element 180 is arranged on the support bar 150, is positioned at spring 170 belows, in order to retainer spring 170.Can optionally have screw thread on the support bar 150, and setting element 180 can be nut, setting element 180 can be fixed on the precalculated position on the support bar 150, gets loose to prevent the collar 160 and spring 170.
By the invention described above better embodiment as can be known, use the present invention and have following advantage.This horizontal thrust gear has advantage simple in structure, easy to operate.In addition, make that by the effect of fluting, perforation and the collar moving of movable microscope carrier is more smooth-going, because can not move and can be offset along the fluting direction by assurance activity microscope carrier.
Above, describe the specific embodiment of the present invention with reference to the accompanying drawings.But those skilled in the art can understand, and under situation without departing from the spirit and scope of the present invention, can also do various changes and replacement to the specific embodiment of the present invention.These changes and replace all drop in claims of the present invention institute restricted portion.
Claims (10)
1. a horizontal thrust gear is characterized in that, comprises:
One carrying platform has a fluting;
One movable microscope carrier has a perforation;
One holder has a nut structure;
One screw rod, an end of described screw rod is combined in described nut structure, the other end of described screw rod connects described movable microscope carrier, make described movable microscope carrier by described screw rod and described nut structure with respect to described holder translation; And
One collar, the described collar pass described fluting and engage with described perforation.
2. horizontal thrust gear according to claim 1 is characterized in that the thickness of the described collar is greater than the thickness of described carrying platform.
3. horizontal thrust gear according to claim 1 is characterized in that, the major axis of described fluting is parallel to the major axis of described screw rod.
4. horizontal thrust gear according to claim 1 is characterized in that the described collar comprises external screw thread, and described perforation comprises internal thread, makes the described collar be locked on described perforation.
5. horizontal thrust gear according to claim 1 is characterized in that, described movable microscope carrier only disposes described screw rod monolateral.
6. horizontal thrust gear according to claim 1 is characterized in that, described horizontal thrust gear more comprises a support bar, and the described collar is socketed on an end of described support bar, and the described collar passes described fluting and engages with described perforation.
7. horizontal thrust gear according to claim 6 is characterized in that, described horizontal thrust gear more comprises a spring, connects described support bar and described holder.
8. horizontal thrust gear according to claim 7 is characterized in that, described horizontal thrust gear more comprises a setting element, is arranged on the described support bar, in order to locate described spring.
9. horizontal thrust gear according to claim 6 is characterized in that, described horizontal thrust gear more comprises a setting element, is arranged on the described support bar, in order to locate the described collar.
10. according to Claim 8 or 9 described horizontal thrust gears, it is characterized in that described support bar has screw thread, described setting element is a nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110163141 CN102263045B (en) | 2011-06-09 | 2011-06-09 | Crosswise thrusting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110163141 CN102263045B (en) | 2011-06-09 | 2011-06-09 | Crosswise thrusting mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102263045A true CN102263045A (en) | 2011-11-30 |
| CN102263045B CN102263045B (en) | 2013-05-01 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110163141 Expired - Fee Related CN102263045B (en) | 2011-06-09 | 2011-06-09 | Crosswise thrusting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102263045B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240454A (en) * | 1994-03-01 | 1995-09-12 | Kiyoshi Takahashi | Wafer transfer apparatus |
| US6013920A (en) * | 1997-11-28 | 2000-01-11 | Fortrend Engineering Coirporation | Wafer-mapping load post interface having an effector position sensing device |
| CN2689447Y (en) * | 2004-01-09 | 2005-03-30 | 温大明 | Die dicing device |
| CN2899975Y (en) * | 2006-04-10 | 2007-05-16 | 乔辉企业股份有限公司 | Multifunctional optoelectronic material screening platform |
| DE202009004746U1 (en) * | 2009-04-28 | 2009-07-23 | Kumatec Sondermaschinenbau & Kunststoffverarbeitung Gmbh | Fastening device for fixing a spar or a strip on a C-profile |
| CN101539481A (en) * | 2009-04-17 | 2009-09-23 | 北京航空航天大学 | Plume diagnosis device of electric propulsion engine |
-
2011
- 2011-06-09 CN CN 201110163141 patent/CN102263045B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240454A (en) * | 1994-03-01 | 1995-09-12 | Kiyoshi Takahashi | Wafer transfer apparatus |
| US6013920A (en) * | 1997-11-28 | 2000-01-11 | Fortrend Engineering Coirporation | Wafer-mapping load post interface having an effector position sensing device |
| CN2689447Y (en) * | 2004-01-09 | 2005-03-30 | 温大明 | Die dicing device |
| CN2899975Y (en) * | 2006-04-10 | 2007-05-16 | 乔辉企业股份有限公司 | Multifunctional optoelectronic material screening platform |
| CN101539481A (en) * | 2009-04-17 | 2009-09-23 | 北京航空航天大学 | Plume diagnosis device of electric propulsion engine |
| DE202009004746U1 (en) * | 2009-04-28 | 2009-07-23 | Kumatec Sondermaschinenbau & Kunststoffverarbeitung Gmbh | Fastening device for fixing a spar or a strip on a C-profile |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102263045B (en) | 2013-05-01 |
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Granted publication date: 20130501 Termination date: 20200609 |