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CN102284307A - Modularized integrated large-scale vacuum device available for partitioning operation - Google Patents

Modularized integrated large-scale vacuum device available for partitioning operation Download PDF

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Publication number
CN102284307A
CN102284307A CN2011101516038A CN201110151603A CN102284307A CN 102284307 A CN102284307 A CN 102284307A CN 2011101516038 A CN2011101516038 A CN 2011101516038A CN 201110151603 A CN201110151603 A CN 201110151603A CN 102284307 A CN102284307 A CN 102284307A
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module
standard
modules
flange
flanges
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段萍
鄂鹏
江滨浩
刘金远
许矢林
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Dalian Maritime University
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Dalian Maritime University
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Abstract

模块化集成式可分区操作的大型真空装置,包括真空机组和真空容器,真空容器包括中央模块、标准模块和端部模块,所述中央模块上设有舱门,中央模块的前后左右四面设有法兰接口;标准模块的前后两端设有与中央模块真空容器上的法兰相配合的法兰;端部模块的前端设有与延伸模块上的法兰相配合的法兰,端部模块的后端设有舱门;闸板阀置于需分区的模块与模块之间连接的法兰中间。本发明的有益效果是:模块间采用标准接口,可任意组合、互换集成为需要形状;可将不同的实验内容在同一个真空设备的不同分区中完成,减少投资,提高功效;系统组装简单方便,易于操作。可广泛应用于特种物质分离、航天、航空飞行器、空间环境、外星模拟及微波技术等领域。

Figure 201110151603

A modular integrated large-scale vacuum device that can be operated in partitions, including a vacuum unit and a vacuum container. The vacuum container includes a central module, a standard module and an end module. The central module is provided with hatches, and the central module is equipped with Flange interface; the front and rear ends of the standard module are provided with flanges that match the flanges on the vacuum container of the central module; the front end of the end module is provided with flanges that match the flanges on the extension module, and the end modules There is a hatch at the rear end; the gate valve is placed in the middle of the flanges between the modules to be partitioned and the modules connected. The beneficial effects of the present invention are: standard interfaces are adopted between modules, which can be arbitrarily combined and interchanged into required shapes; different experimental contents can be completed in different partitions of the same vacuum equipment, reducing investment and improving efficacy; system assembly is simple Convenient and easy to operate. It can be widely used in special material separation, aerospace, aerospace vehicles, space environment, alien simulation and microwave technology and other fields.

Figure 201110151603

Description

But the large-scale vacuum device of modularized integrated division operation
Technical field
The invention belongs to the laboratory apparatus field, be specifically related to experiment large-scale vacuum device.
Background technology
The experiment vacuum plant of prior art, its function nearly all are single.The deficiencies in the prior art are: the different experiment content of research need be finished in different vacuum equipments, often needs to prepare the different vacuum equipment of several covers.
Summary of the invention
But the large size vacuum vessel device that the purpose of this invention is to provide a kind of modularized integrated division operation, device can make up arbitrarily, exchange integrated required form, satisfy different experiments content demand.
Technical scheme of the present invention is: but the large-scale vacuum device of modularized integrated division operation, comprise vacuum unit and vacuum tank, vacuum tank is provided with observation window and input output window, the vacuum unit is connected by vacuum line with vacuum tank, it is characterized in that described vacuum tank comprises central module, standard module and end module, described central module is provided with hatch door, and the four sides all around of central module is provided with flange-interface; The rear and front end of described standard module is provided with the flange that matches with flange on the central module; The front end of described end module is provided with the flange that matches with flange on the standard module, and the rear end of end module is provided with hatch door; But the large-scale vacuum device of described modularized integrated division operation also comprises the subregion slide valve, the subregion slide valve places between the central module that needs subregion and the standard module in the middle of the flange connecting, or between standard module and the standard module in the middle of the flange connecting, but the large-scale vacuum device of described modularized integrated division operation is interconnected to constitute by central module, standard module and end module.
But the large-scale vacuum device of modularized integrated division operation of the present invention, it is characterized in that described central module is cross cylindrical container or cross spherical shape container, to be that four the one ends cylinder that is provided with adpting flange is mutually perpendicular pass through connection mutually with described cross cylindrical vessel, and described cross spheroidal container is offered four flanged (FLGD) interfaces for mutually perpendicular at the four sides of spherosome.
But the large-scale vacuum device of modularized integrated division operation of the present invention, it is characterized in that described standard module is standard round tubular container or standard round spheroid, described standard round tubular container is a cylindrical section, the cylinder two ends are provided with flange, described standard round spheroid is the spherosome of excision two ends spherical crown, excision spherical crown place is provided with flange, the standard module front end flange is connected with central module, perhaps connect with another standard module that is connected with central module, the terminal flange of standard module is connected with end module, perhaps is connected with the standard module hatch door.
But the large-scale vacuum device of modularized integrated division operation of the present invention, it is characterized in that described end module is the combination container of hemispherical container and cylindrical pressure vessel, described hemispherical container is respectively to be connected a hemisphere at the two ends of cylindrical pressure vessel with the cylindrical pressure vessel combination container, the two ends of cylindrical pressure vessel are provided with flange, the anterior hemisphere that is connected with the cylindrical pressure vessel front end flange is the hemisphere of excision spherical crown, orchid is managed at the hemisphere two ends, the hemisphere front end flange is the flange that matches with the standard module front end flange, back end flanges is the flange that matches with the cylindrical pressure vessel front end flange, the diameter of cylindrical pressure vessel is the 1/2-1/4 of anterior hemisphere diameter, be provided with slide valve between the end flanges behind cylindrical pressure vessel front end flange and the anterior hemisphere, the rear portion hemisphere that is connected with end flanges behind the cylindrical pressure vessel is the hatch door of cylindrical pressure vessel, and being connected between hatch door and the cylindrical pressure vessel is tightly connected.
But the large-scale vacuum device of modularized integrated division operation of the present invention is characterized in that described central module, standard module and end module interconnect and comprises that central module is connected with standard module, central module is connected with end module, standard module is connected with standard module, standard module is connected with end module or standard module is connected with the standard module hatch door.
But the large-scale vacuum device of modularized integrated division operation of the present invention, when but each module that it is characterized in that the large-scale vacuum device of described modularized integrated division operation is plane figure, each module is provided with base, base places on the guide rail, base is made of support and rolling mechanism, support is the framework of fixedlying connected with each module, and rolling mechanism is located at the bottom of framework.
But the large-scale vacuum device of modularized integrated division operation of the present invention is characterized in that described rolling mechanism is roller and guide rail, perhaps ball and guide rail.
But the large-scale vacuum device of modularized integrated division operation of the present invention is characterized in that described guide rail becomes groined type to arrange, with each module placement coupling, the intersection point place is provided with rotating disk.
Characteristics of the present invention are: based on central module, make the vacuum tank device be extended expansion by standard module and end module, and container is separated into different subregions by slide valve, make experiment under the situation that does not influence main vacuum chamber, each subregion can be changed experimental provision and instrument arbitrarily.System can be radial structure at three dimensions extends, and also can connect to extend into ring-type or network structure, also can be the plane and extend.
All modules all are equipped with base, under the base rolling mechanism are installed, and base places on the track, and track becomes groined type, and infall is established rotating disk, are convenient to module and move installation and transposing in orbit.
The invention has the beneficial effects as follows:
1, system and device is made of plurality of modules, and intermodule adopts standard interface, and can make up arbitrarily, exchange and be integrated into needs the genuine empty of shape system.
2, owing to can be different subregions, different experiment contents can be finished in the different subregions of same vacuum equipment, be reduced investment, improve effect system partitioning.
3, this system all has broad application prospects in fields such as general vacuum technique, extraordinary separating substances, space flight, aviation aircraft, space environment, extraterrestrial simulation and microwave technologies.
4, system assembles is simple and convenient, easy operating.
Description of drawings
Drawings attached five width of cloth of the present invention, wherein
Fig. 1 is a cross large-scale vacuum device cylindraceous schematic diagram for central module
Fig. 2 is the large-scale vacuum device schematic diagram of cross spherical shape for central module
Fig. 3 is a cross spherical shape central module schematic diagram
Fig. 4 is the understructure schematic diagram
Fig. 5 is the track structure schematic diagram
In the accompanying drawing: 1, central module 2, cylinder type standard module, 3, the anterior hemisphere 4 of end module, ball-shaped standard module 5, subregion slide valve 6, slide valve 7, flange 8, the cylindrical pressure vessel 9 of end module, end module rear portion hemisphere 10, input output window 11, observation window 12, support 13, roller 14, guide rail 15, rotating disk 16, standard module hatch door
The specific embodiment
The present invention will be further described below in conjunction with drawings and Examples.
Embodiment 1
Embodiment 1 is that central module 1 is cross large-scale vacuum device cylindraceous as shown in Figure 1.Central module 1 is connected by vacuum line with main vacuum unit.Central module 1 upper flanges 7 is connected extension by a cylinder type standard module 2 with an end module 3,8,9.Following end flanges 7 is connected extension by a spherical shape standard module 4 with an end module 3,8,9, is connected to subregion slide valve 5 between spherical shape standard module 4 and central module 1 flange connecting 7.Left end flange 7 is connected extension by two cylindric standard modules 2 with an end module 3,8,9.Right-hand member flange 7 is connected extension by a cylindric standard module 2 with a spherical shape standard module 4, and the end of spherical shape standard module 4 is connected with standard module hatch door 16.Present embodiment is the large-scale vacuum device that is criss-cross band subregion, and each subregion is connected to the small size vacuum unit respectively.
Embodiment 2
Embodiment 2 is that central module 1 is the large-scale vacuum device of cross spherical shape as shown in Figure 2.It is identical with embodiment 1 that it connects extension.
Except that above embodiment, also can form the three dimensions radial structure and distribute, can also connect by standard module 2,4 and extend, constitute ring-type or network structure.Connect the laying standard track in ring-type or cancellated vacuum plant, test specimen, sample and relevant device can orbit, and finish various research, are more suitable for the continuous analog experiment of space and extraterrestrial environment.
If each module is plane figure, then all standard modules all can be installed on the standard base, base is made up of support 12 and roller 13, the support upper end is connected with module, four rollers 13 are installed in the support lower end, and roller 13 places on the guide rail 14, can move on guide rail.Guide rail 14 can be designed to groined type, or with the ring-type of plane figure coupling or netted, infall is established rotating disk 15, is convenient to the installation and the transposing of module.

Claims (8)

1.模块化集成式可分区操作的大型真空装置,包括真空机组和真空容器,真空容器上设有观察窗(11)和输入输出窗口(10),真空机组和真空容器通过真空管路连接,其特征在于所述真空容器包括中央模块(1)、标准模块(2、4)和端部模块(3、8、9),所述中央模块(1)上设有舱门,中央模块(1)的前后左右四面设有法兰接口;所述标准模块(2、4)的前后两端设有与中央模块上的法兰相配合的法兰;所述端部模块(3、8、9)的前端设有与标准模块上的法兰相配合的法兰,端部模块(3、8、9)的后端设有舱门;所述模块化集成式可分区操作的大型真空装置还包括分区闸板阀(5),分区闸板阀(5)置于需分区的中央模块(1)与标准模块(2、4)之间连接的法兰中间,或标准模块(2、4)与标准模块(2、4)之间连接的法兰中间,所述模块化集成式可分区操作的大型真空装置由中央模块(1)、标准模块(2、4)和端部模块(3、8、9)相互连接构成。1. A modular integrated large-scale vacuum device that can be operated in different regions, including a vacuum unit and a vacuum container. The vacuum container is provided with an observation window (11) and an input and output window (10). The vacuum unit and the vacuum container are connected by a vacuum pipeline. It is characterized in that the vacuum container includes a central module (1), standard modules (2, 4) and end modules (3, 8, 9), the central module (1) is provided with a hatch, and the central module (1) Flange interfaces are provided on the front, rear, left, and right sides; the front and rear ends of the standard modules (2, 4) are provided with flanges that match the flanges on the central module; the end modules (3, 8, 9) The front end is provided with a flange matching the flange on the standard module, and the rear end of the end module (3, 8, 9) is provided with a hatch; the modularized integrated large-scale vacuum device that can be operated in partitions also includes The partition gate valve (5), the partition gate valve (5) is placed in the middle of the flange connected between the central module (1) and the standard module (2, 4) to be partitioned, or the standard module (2, 4) and In the middle of the flanges connected between the standard modules (2, 4), the modular integrated large-scale vacuum device that can be operated in partitions is composed of a central module (1), standard modules (2, 4) and end modules (3, 8 , 9) interconnected composition. 2.根据权利要求1所述模块化集成式可分区操作的大型真空装置,其特征在于所述中央模块(1)为十字圆筒状模块或十字圆球状模块,所述十字圆筒形模块为四个一端设有连接法兰的圆筒互相垂直的相贯连接,所述十字圆球形模块为在圆球体的四面互相垂直的开设四个带法兰的接口。2. According to claim 1, the modular integrated large-scale vacuum device that can be operated in different regions is characterized in that the central module (1) is a cross cylindrical module or a cross spherical module, and the cross cylindrical module is The four cylinders with connecting flanges at one end are connected vertically to each other, and the cross spherical module is provided with four flanged interfaces perpendicular to each other on the four sides of the spherical body. 3.根据权利要求2所述模块化集成式可分区操作的大型真空装置,其特征在于所述标准模块(2、4)为圆筒型标准模块(2)或圆球型标准模块(4),所述圆筒型标准模块(2)是一段圆筒,圆筒两端设置法兰,所述圆球型标准模块(4)是切除两端球冠的圆球体,切除球冠处设置法兰。3. According to claim 2, the modular integrated large-scale vacuum device that can be operated in different regions is characterized in that the standard modules (2, 4) are cylindrical standard modules (2) or spherical standard modules (4) , the cylindrical standard module (2) is a section of cylinder, flanges are arranged at both ends of the cylinder, and the spherical standard module (4) is a spherical body with spherical caps removed at both ends, and the setting method at the spherical cap is removed orchid. 4.根据权利要求3所述模块化集成式可分区操作的大型真空装置,其特征在于所述端部模块(3、8、9)为半球形容器与圆筒型容器的组合模块,所述半球形容器与圆筒型容器组合模块是在圆筒型容器(8)的两端各连接一个半球体,圆筒型容器(8)的两端设有法兰,与圆筒型容器(8)前端法兰连接的前部半球体(3)是切除球冠的半球体,半球体两端设法兰,半球体前端法兰是与标准模块(2、4)法兰相配合的法兰,半球体后端法兰是与圆筒型容器(8)前端法兰相配合的法兰,圆筒型容器(8)的直径是前部半球体(3)直径的1/2-1/4,圆筒型容器前端法兰与前部半球体后端法兰之间设有闸板阀(6),与圆筒型容器(8)后端法兰连接的后部半球体(9)是圆筒型容器的舱门,舱门与圆筒型容器(8)之间的连接为密封连接。4. According to claim 3, the modular integrated large-scale vacuum device that can be operated in different regions is characterized in that the end modules (3, 8, 9) are combined modules of a hemispherical container and a cylindrical container, and the The combined module of the hemispherical container and the cylindrical container is to connect a hemisphere at both ends of the cylindrical container (8), the two ends of the cylindrical container (8) are provided with flanges, and the cylindrical container (8) ) The front hemispherical body (3) connected by the front end flange is a hemispherical body with the spherical cap removed, flanges are arranged at both ends of the hemispherical body, and the hemispherical body front end flange is a flange matched with the standard module (2, 4) flange, The rear flange of the hemisphere is a flange matched with the front flange of the cylindrical container (8), and the diameter of the cylindrical container (8) is 1/2-1/4 of the diameter of the front hemisphere (3) A gate valve (6) is provided between the front flange of the cylindrical container and the rear flange of the front hemisphere, and the rear hemisphere (9) connected to the rear flange of the cylindrical container (8) is The hatch of the cylindrical container, the connection between the hatch and the cylindrical container (8) is a sealed connection. 5.根据权利要求4所述模块化集成式可分区操作的大型真空装置,其特征在于所述中央模块(1)、标准模块(2、4)和端部模块(3、8、9)相互连接包括中央模块(1)与标准模块(2、4)连接、中央模块(1)与端部模块(3、8、9)连接、标准模块(2、4)与标准模块(2、4)连接、标准模块(2、4)与端部模块(3、8、9)连接或标准模块(2、4)与标准模块舱门(16)连接。5. According to claim 4, the modular integrated large-scale vacuum device that can be operated in different regions is characterized in that the central module (1), standard modules (2, 4) and end modules (3, 8, 9) are mutually Connections include central module (1) to standard modules (2, 4), central module (1) to end modules (3, 8, 9), standard modules (2, 4) to standard modules (2, 4) Connection, connection of standard modules (2, 4) with end modules (3, 8, 9) or connection of standard modules (2, 4) with standard module hatch (16). 6.根据权利要求1所述模块化集成式可分区操作的大型真空装置,其特征在于所述模块化集成式可分区操作的大型真空装置的各模块呈平面布局时,各模块上设有底座(12、13),底座置于导轨(14)上,底座由支架(12)和滚动机构(13)构成,支架(12)是与各模块固定连接的框架,滚动机构(13)设在框架的底部。6. According to claim 1, the modular integrated large-scale vacuum device that can be operated in different regions is characterized in that when each module of the large-scale vacuum device that can be operated in modularized and integrated regions is arranged in a plane, each module is provided with a base (12,13), the base is placed on the guide rail (14), the base is made of a support (12) and a rolling mechanism (13), the support (12) is a frame fixedly connected with each module, and the rolling mechanism (13) is located on the frame bottom of. 7.根据权利要求6所述模块化集成式可分区操作的大型真空装置,其特征在于所述滚动机构(13)是滚轮和导轨,或者滚珠和导轨。7. The modularized integrated large-scale vacuum device that can be operated in sections according to claim 6, characterized in that the rolling mechanism (13) is a roller and a guide rail, or a ball and a guide rail. 8.根据权利要求7所述模块化集成式可分区操作的大型真空装置,其特征在于所述导轨(14)成井字形布置,与各模块布局匹配,交点处设有转盘(15)。8. According to claim 7, the modularized integrated large-scale vacuum device that can be operated in partitions is characterized in that the guide rails (14) are arranged in a well shape, matching the layout of each module, and a turntable (15) is provided at the intersection.
CN2011101516038A 2011-06-08 2011-06-08 Modularized integrated large-scale vacuum device available for partitioning operation Pending CN102284307A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105645107A (en) * 2014-11-13 2016-06-08 中国科学院苏州纳米技术与纳米仿生研究所 Sample transfer system and method applied to ultra-high vacuum environment
CN112295612A (en) * 2020-11-12 2021-02-02 之江实验室 A segmented vacuum device

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Publication number Priority date Publication date Assignee Title
US5436465A (en) * 1993-05-13 1995-07-25 High Yield Technology, Inc. Modular particle monitor for vacuum process equipment
TW359849B (en) * 1994-12-08 1999-06-01 Tokyo Electron Ltd Sputtering apparatus having an on board service module
CN1517769A (en) * 2003-01-10 2004-08-04 周星工程股份有限公司 Cluster equipment of dual structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5436465A (en) * 1993-05-13 1995-07-25 High Yield Technology, Inc. Modular particle monitor for vacuum process equipment
TW359849B (en) * 1994-12-08 1999-06-01 Tokyo Electron Ltd Sputtering apparatus having an on board service module
CN1517769A (en) * 2003-01-10 2004-08-04 周星工程股份有限公司 Cluster equipment of dual structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105645107A (en) * 2014-11-13 2016-06-08 中国科学院苏州纳米技术与纳米仿生研究所 Sample transfer system and method applied to ultra-high vacuum environment
CN105645107B (en) * 2014-11-13 2019-10-18 中国科学院苏州纳米技术与纳米仿生研究所 Sample transfer system and method for ultra-high vacuum environment
CN112295612A (en) * 2020-11-12 2021-02-02 之江实验室 A segmented vacuum device

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Application publication date: 20111221