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CN102373407A - Coating processing method - Google Patents

Coating processing method Download PDF

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Publication number
CN102373407A
CN102373407A CN2010102589830A CN201010258983A CN102373407A CN 102373407 A CN102373407 A CN 102373407A CN 2010102589830 A CN2010102589830 A CN 2010102589830A CN 201010258983 A CN201010258983 A CN 201010258983A CN 102373407 A CN102373407 A CN 102373407A
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Prior art keywords
mask
workpiece
pattern
processing method
coating processing
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CN2010102589830A
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王仲培
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Priority to CN2010102589830A priority Critical patent/CN102373407A/en
Publication of CN102373407A publication Critical patent/CN102373407A/en
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Abstract

The invention discloses a coating processing method. The method comprises the following steps of: providing a workpiece, wherein the workpiece is provided with a first surface on which patterns are to be processed; depositing a coating on the first surface by adopting a physical vapor deposition method; providing a mask, wherein the shape of the mask is as same as that of the patterns to be formed, and the mask magnetically attracts the workpiece; adsorbing the mask to the first surface to shield a predetermined area of the coated first surface; removing the coating beyond the predetermined area of the first surface by using magnetic grinding; and removing the mask to obtain the patterns on the first surface of the workpiece.

Description

镀膜加工方法Coating processing method

技术领域 technical field

本发明涉及镀膜加工方法,尤其涉及在薄膜沉积后的表面形成预定图案的方法。The invention relates to a coating processing method, in particular to a method for forming a predetermined pattern on the surface after film deposition.

背景技术 Background technique

传统的镀膜技术领域,在工件表面加工以形成图案的方法通常是将预定的图案区域之外掩盖,而直接对该预定的图案区域进行镀膜。然,由于遮盖非图案区域的遮罩具有一定的厚度,因此当对图案区域镀膜之后,因此遮罩的厚度导致部分反应微粒附着,从而导致图案的边缘不清晰且整个图案的厚度不均。边缘不清晰在高倍显微镜下表现得边缘模糊,即,图案精度太低,尤其是当待镀表面形状复杂时,更难形成高精度图案。图案厚度不均则会引起图案的物理性质不良,例如硬度及耐磨度变差。In the traditional coating technology field, the method of processing the workpiece surface to form a pattern is usually to cover the predetermined pattern area and directly coat the predetermined pattern area. However, since the mask covering the non-patterned area has a certain thickness, after coating the patterned area, the thickness of the mask causes some reactive particles to adhere, resulting in unclear edges of the pattern and uneven thickness of the entire pattern. Unclear edges appear as fuzzy edges under a high-power microscope, that is, the pattern accuracy is too low, especially when the surface to be plated has a complex shape, it is more difficult to form a high-precision pattern. The uneven thickness of the pattern will cause poor physical properties of the pattern, such as deterioration of hardness and wear resistance.

发明内容 Contents of the invention

有鉴于此,提供一种高精度镀膜加工方法实为必要。In view of this, it is necessary to provide a high-precision coating processing method.

一种镀膜加工方法,其包括以下步骤:提供一个工件,该工件具有一个待加工形成图案的第一表面;采用物理气相沉积法对该第一表面沉积一膜层;提供一遮罩,该遮罩的形状与待形成的图案的形状相同,该遮罩与该工件可磁性相吸;将该遮罩吸附于该第一表面并遮蔽已镀膜的该第一表面的预定区域;利用磁力研磨去除该第一表面的该预定区域之外的膜层;去除该遮罩以于该工件的第一表面获得该图案。A coating processing method, which includes the following steps: providing a workpiece, the workpiece has a first surface to be processed to form a pattern; using a physical vapor deposition method to deposit a film layer on the first surface; providing a mask, the mask The shape of the mask is the same as the shape of the pattern to be formed, and the mask and the workpiece can be magnetically attracted; the mask is adsorbed to the first surface and covers a predetermined area of the first surface that has been coated; it is removed by magnetic grinding The film layer outside the predetermined area of the first surface; removing the mask to obtain the pattern on the first surface of the workpiece.

相对于现有技术,本发明采用的镀膜加工方法是在物理气相沉积镀膜的基础上采用遮罩遮住图案区域,并对非图案区域进行磁力研磨,从而避免直接对图案区域镀膜时所发生的图案边缘不清晰、产生晕影的缺陷,而且,由于采用磁力研磨可以对图案的边缘之外的区域进行精确的研磨,从而进一步提高图案的边缘的清晰度。由于先对图案所在的表面均沉积薄膜,所以可以最大限度地保证膜层厚度的均匀性,从而图案的物理性质较佳。Compared with the prior art, the coating processing method adopted in the present invention uses a mask to cover the pattern area on the basis of physical vapor deposition coating, and performs magnetic grinding on the non-pattern area, thereby avoiding the occurrence of direct coating on the pattern area. The edge of the pattern is not clear and the defects of vignetting are generated. Moreover, since the magnetic grinding can be used to precisely grind the area outside the edge of the pattern, the definition of the edge of the pattern can be further improved. Since the thin film is first deposited on the surface where the pattern is located, the uniformity of the thickness of the film layer can be guaranteed to the greatest extent, so that the physical properties of the pattern are better.

附图说明 Description of drawings

图1是本发明实施例提供的镀过膜的工件的立体示意图。FIG. 1 is a schematic perspective view of a coated workpiece provided by an embodiment of the present invention.

图2是本发明实施例提供的吸附有遮罩的镀过膜的工件的立体示意图。FIG. 2 is a schematic perspective view of a coated workpiece with a mask adsorbed thereon according to an embodiment of the present invention.

图3是已将非图案区域的膜层研磨、去除之后、显现该图案的工件的立体示意图。Fig. 3 is a schematic perspective view of the workpiece showing the pattern after the film layer in the non-pattern area has been ground and removed.

主要元件符号说明Description of main component symbols

工件        10Workpiece 10

第一表面    101First Surface 101

膜层        20Film layer 20

遮罩        30Mask 30

图案        40pattern 40

具体实施方式 Detailed ways

下面将结合附图对本发明作进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings.

请参阅图1,本发明实施例提供的镀膜加工方法至少包括以下步骤:Referring to Fig. 1, the coating processing method provided by the embodiment of the present invention at least includes the following steps:

首先,提供一个工件10,该工件10具有一个第一表面101。该工件10由可被磁性物质吸引的金属或合金制成,具体地,该工件10可由金属制成,如铁、镍;或由含有金属的合金制成,例如不锈钢。First, a workpiece 10 is provided, and the workpiece 10 has a first surface 101 . The workpiece 10 is made of metals or alloys that can be attracted by magnetic substances, specifically, the workpiece 10 can be made of metals, such as iron and nickel; or made of alloys containing metals, such as stainless steel.

其次,采用物理气相沉积法(Physical Vapor Deposition,PVD)对该第一表面101沉积一膜层20。物理气相沉积法是以物理机制来进行薄膜沉积而不涉及化学反应的制程技术,污染低。物理气相沉积法一般包括真空蒸镀、溅射蒸镀及离子蒸镀。本实施例采用单一腔体进行反应式磁控溅射镀膜法,亦可采用其它方式。Secondly, a film layer 20 is deposited on the first surface 101 by physical vapor deposition (Physical Vapor Deposition, PVD). The physical vapor deposition method is a process technology that deposits thin films by physical mechanisms without involving chemical reactions, and has low pollution. Physical vapor deposition methods generally include vacuum evaporation, sputtering evaporation and ion evaporation. In this embodiment, a single cavity is used for the reactive magnetron sputtering coating method, and other methods may also be used.

本实施例中,该膜层20为金属单层膜,具有高度金属质感、色彩艳离饱满。在其它实施例中,该膜层可包括多层膜。In this embodiment, the film layer 20 is a metal single-layer film, which has a high metal texture and vivid and full colors. In other embodiments, the film layer may comprise a multilayer film.

请一并参阅图2,然后,提供一个遮罩30,该遮罩30的形状与待形成的图案的形状相同,该遮罩30对该第一表面101的遮蔽区域正好是图案的形状。该遮罩可与该工件磁性相吸。例如,该遮罩30具有较强的磁性,该工件10由可被磁性物质吸引的金属或合金制成。将该遮罩30吸附于该第一表面101并遮蔽已镀膜的该第一表面的预定区域。由于该遮罩30与该工件10可磁性相吸,所以该遮罩可以方便快捷地吸附、固定在该第一表面101而不会在后续流程中移动位置,从而最大限度地保证图案的精度。图案可以是文字、图形、数字、字母等各种标记,在本实施例中,该图案为圆形。Please refer to FIG. 2 together. Then, a mask 30 is provided, the shape of the mask 30 is the same as that of the pattern to be formed, and the mask 30 is just in the shape of the pattern for the masked area of the first surface 101 . The mask is magnetically attracted to the workpiece. For example, the mask 30 has strong magnetism, and the workpiece 10 is made of metal or alloy that can be attracted by magnetic substances. The mask 30 is adsorbed on the first surface 101 and covers a predetermined area of the first surface that has been coated. Since the mask 30 and the workpiece 10 are magnetically attracted, the mask can be quickly and easily adsorbed and fixed on the first surface 101 without moving in the subsequent process, thereby ensuring the accuracy of the pattern to the greatest extent. The pattern can be various marks such as characters, graphics, numbers, letters, etc. In this embodiment, the pattern is a circle.

然后,对该镀有膜层20的第一表面101进行磁力研磨以去除该预定区域之外的膜层20。Then, magnetic grinding is performed on the first surface 101 coated with the film layer 20 to remove the film layer 20 outside the predetermined area.

磁力研磨是利用磁场作用进行研磨加工,其主要包括磁性浮动研磨和利用磁性磨料进行磁力研磨。本发明采用后者。具体来讲,先将该工件10放入由两个磁极形成的磁场中,在该工件10和磁极的间隙中放入磁性磨料。在磁场力的作用下,磨料沿磁力线方向整齐排列,形成一只柔软且具有一定刚性的“磁研磨刷”。当该工件10在磁场中旋转并作轴向振动时,该工件10与磁性磨料发生相对运动从而实现对膜层20的研磨加工。磁力研磨可利用改变磁场强度来控制研磨压力,由于磁极与工件表面之间有加工间隙(1~4mm),因此可通过磁性磨料进行柔性研磨,尤其适合对异形表面及自由曲面进行研磨。Magnetic grinding is a grinding process using a magnetic field, which mainly includes magnetic floating grinding and magnetic grinding using magnetic abrasives. The present invention adopts the latter. Specifically, the workpiece 10 is first put into a magnetic field formed by two magnetic poles, and magnetic abrasives are placed in the gap between the workpiece 10 and the magnetic poles. Under the action of the magnetic field force, the abrasives are arranged neatly along the direction of the magnetic force lines to form a soft and rigid "magnetic abrasive brush". When the workpiece 10 rotates in the magnetic field and vibrates axially, the workpiece 10 and the magnetic abrasive will move relative to each other so as to realize the grinding process of the film layer 20 . Magnetic grinding can control the grinding pressure by changing the strength of the magnetic field. Since there is a processing gap (1-4mm) between the magnetic pole and the surface of the workpiece, it can be used for flexible grinding with magnetic abrasives, especially suitable for grinding special-shaped surfaces and free-form surfaces.

请一并参阅图3,然后,去除该遮罩30,形成在该第一表面101的图案40即显露。该图案40的厚度可控制在2微米以内,图3中,图案40的厚度被增大以便清楚显示图案40与其它区域的厚度差异。Please refer to FIG. 3 together. Then, the mask 30 is removed to reveal the pattern 40 formed on the first surface 101 . The thickness of the pattern 40 can be controlled within 2 micrometers. In FIG. 3 , the thickness of the pattern 40 is increased to clearly show the thickness difference between the pattern 40 and other regions.

进行磁力研磨之后,去除该遮罩30之前,可以对该第一表面101进行抛光。抛光可采用抛光轮为工具,抛光轮采用材质匀细经脱脂处理的木材或特制的细毛毡制成,其运动轨迹为均匀稠密的网状,抛光后的表面粗糙度非常低,在放大40倍的显微镜下观察不到任何表面缺陷。此外还可采用电解抛光。After magnetic grinding, before removing the mask 30, the first surface 101 may be polished. The polishing wheel can be used as a tool for polishing. The polishing wheel is made of even and fine degreased wood or special fine felt. Its movement track is a uniform and dense network. The surface roughness after polishing is very low. When magnified 40 times No surface defects were observed under a microscope. In addition, electrolytic polishing can also be used.

去除该遮罩30之后,还可对该图案40的边缘进行修饰。After the mask 30 is removed, the edge of the pattern 40 can also be modified.

本实施例所提供的镀膜加工方法是在物理气相沉积镀膜的基础上采用遮罩遮住图案区域,并对非图案区域进行磁力研磨,从而避免直接对图案区域镀膜时所发生的图案边缘不清晰、产生晕影的缺陷,而且,由于采用磁力研磨可以对图案的边缘之外的区域进行精确的研磨,从而进一步提高图案的边缘的清晰度。由于先对图案所在的表面均沉积薄膜,所以可以最大限度地保证膜层厚度的均匀性,从而图案的物理性质较佳。The coating processing method provided in this embodiment uses a mask to cover the patterned area on the basis of the physical vapor deposition coating, and performs magnetic grinding on the non-patterned area, so as to avoid the unclear edge of the pattern that occurs when the patterned area is directly coated. 1. The defects of vignetting, and because the magnetic grinding can accurately grind the area outside the edge of the pattern, so as to further improve the definition of the edge of the pattern. Since the thin film is first deposited on the surface where the pattern is located, the uniformity of the thickness of the film layer can be guaranteed to the greatest extent, so that the physical properties of the pattern are better.

可以理解的是,要满足遮罩30与工件10可磁性相互吸引,不一定要求遮罩30或工件10本身就具有较强磁性,该遮罩30或工件10可在一定条件下,例如外加磁场作用下被磁化后即可磁性相互吸引,在该外加磁场撤消后该工件10或遮罩30的磁性无需保留。It can be understood that, to satisfy the requirement that the mask 30 and the workpiece 10 can magnetically attract each other, it is not necessarily required that the mask 30 or the workpiece 10 itself has strong magnetism. After being magnetized under action, they can magnetically attract each other, and the magnetism of the workpiece 10 or the mask 30 does not need to be retained after the external magnetic field is cancelled.

可以理解的是,本领域技术人员还可于本发明精神内做其它变化,都应包含在本发明所要求保护的范围之内。It can be understood that those skilled in the art can also make other changes within the spirit of the present invention, which should be included within the scope of the present invention.

Claims (8)

1.一种镀膜加工方法,其包括以下步骤:1. A coating processing method, comprising the following steps: 提供一个工件,该工件具有一个待加工形成图案的第一表面;providing a workpiece having a first surface to be patterned; 采用物理气相沉积法对该第一表面沉积一膜层;提供一遮罩,该遮罩的形状与待形成的图案的形状相同,该遮罩与该工件可磁性相吸;Depositing a film layer on the first surface by physical vapor deposition; providing a mask, the shape of the mask is the same as the shape of the pattern to be formed, and the mask and the workpiece can be magnetically attracted; 将该遮罩吸附于该第一表面并遮蔽已镀膜的该第一表面的预定区域;Adsorbing the mask on the first surface and shielding a predetermined area of the coated first surface; 利用磁力研磨去除该第一表面的该预定区域之外的膜层;removing the film layer outside the predetermined area of the first surface by magnetic grinding; 去除该遮罩以于该工件的第一表面获得该图案。The mask is removed to obtain the pattern on the first surface of the workpiece. 2.如权利要求1所述的镀膜加工方法,其特征在于:对该第一表面进行磁力研磨之后,去除该遮罩之前,对该第一表面进行抛光。2. The coating processing method according to claim 1, characterized in that: after the first surface is magnetically ground, before removing the mask, the first surface is polished. 3.如权利要求1所述的镀膜加工方法,其特征在于:去除该遮罩之后,对该图案的边缘进行修饰。3. The coating processing method according to claim 1, characterized in that: after the mask is removed, the edge of the pattern is modified. 4.如权利要求1所述的镀膜加工方法,其特征在于:该工件由可被磁性物质吸引的金属或合金制成,该遮罩由磁性材料制成。4. The coating processing method according to claim 1, characterized in that: the workpiece is made of metal or alloy that can be attracted by magnetic substances, and the mask is made of magnetic materials. 5.如权利要求4所述的镀膜加工方法,其特征在于:该工件的材质为不锈钢。5. The coating processing method according to claim 4, characterized in that: the workpiece is made of stainless steel. 6.如权利要求1所述的镀膜加工方法,其特征在于:该膜层为金属膜层。6. The coating processing method according to claim 1, wherein the film layer is a metal film layer. 7.如权利要求1所述的镀膜加工方法,其特征在于:该膜层为单层膜。7. The coating processing method according to claim 1, characterized in that: the film layer is a single-layer film. 8.如权利要求1所述的镀膜加工方法,其特征在于:该膜层包括多层膜。8. The coating processing method according to claim 1, wherein the film layer comprises a multi-layer film.
CN2010102589830A 2010-08-20 2010-08-20 Coating processing method Pending CN102373407A (en)

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CN103478092A (en) * 2012-06-15 2014-01-01 苏州市京伦陶瓷有限公司 Method for machining two-transverse-plane ceramic ring of fishing tool
CN104513969A (en) * 2013-09-27 2015-04-15 群创光电股份有限公司 Structure with diamond-like carbon film, fingerprint identifier and manufacturing method thereof
CN108048795A (en) * 2017-12-27 2018-05-18 西安文理学院 A kind of machinery part surface coating process
CN114875354A (en) * 2022-05-05 2022-08-09 常州市方正型钢有限公司 High-strength seamless deformed steel and processing technology thereof
CN116623127A (en) * 2023-05-31 2023-08-22 北京创思镀膜有限公司 Optical film preparation method and fixture for pyramid prism

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CN103478092A (en) * 2012-06-15 2014-01-01 苏州市京伦陶瓷有限公司 Method for machining two-transverse-plane ceramic ring of fishing tool
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CN114875354A (en) * 2022-05-05 2022-08-09 常州市方正型钢有限公司 High-strength seamless deformed steel and processing technology thereof
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CN116623127A (en) * 2023-05-31 2023-08-22 北京创思镀膜有限公司 Optical film preparation method and fixture for pyramid prism
CN116623127B (en) * 2023-05-31 2024-02-09 北京创思镀膜有限公司 Optical film preparation method and fixture for pyramid prism

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Application publication date: 20120314