CN102427200B - Method for manufacturing ultra-stable ultra-high-fineness micro-optical cavity - Google Patents

Abstract

The invention relates to a micro-optical cavity, in particular to a method for manufacturing an ultra-stable ultra-high-fineness micro-optical cavity, which solves the problem that the traditional micro-optical cavity cannot meet the measurement requirements due to lower fineness. The method for manufacturing the ultra-stable ultra-high-fineness micro-optical cavity comprises the following steps of: selecting two lenses; constructing an air purifying device connected with a closed operation space; bonding the two lenses with two flaky piezoelectric ceramics together to form the micro-optical cavity; calculating cavity length and fineness of the micro-optical cavity; and placing the micro-optical cavity in a vacuum gas chamber and maintaining vacuum degree to be 10-80Pa. The fineness of the optical cavity manufactured by the manufacturing method disclosed by the invention can reach 330,000 so that the ultra-stable ultra-high-fineness micro-optical cavity can be widely suitable for use in the fields of environment monitoring, material analysis, biological medicine, food sanitation, safety production and information technology.

Description

A method of manufacturing ultra-stable ultra-high-definition micro-optical cavity

technical field

The invention relates to a micro-optical cavity, in particular to a manufacturing method of an ultra-stable ultra-high-precision micro-optical cavity.

Background technique

Optical cavities are one of the indispensable tools for modern optical testing, optical metrology and optical analysis, as well as general optical experiments. From laser generation, laser mode detection, mode selection to cavity enhancement, the use of optical cavities is becoming more and more Wide range; among them, ultra-stable and ultra-high-definition micro-optical cavity plays an important role in current high-precision measurement, weak signal detection, optoelectronic engineering technology and cutting-edge scientific research due to its extremely high fineness and extremely small film volume . With the development of technology and actual needs, the high-reflection multilayer dielectric film technology can currently achieve 1-R=1.6ppm, and theoretically can reach 1-R=10 ^-9 , where R is the reflectivity of the lens; such a high quality The so-called super-mirror (super-mirror) can greatly improve the fineness of the optical cavity, so that the high-precision optical cavity is widely used in the cavity ring-down technology (Cavity Ring-Down) for trace gas detection, weak absorption measurement, atmospheric Precision measurement and analysis such as monitoring, humidity measurement, extremely low speed measurement, nuclear reaction monitoring, chemical detection, molecular spectrometry, medical detection and surface physical analysis. Due to its extremely narrow linewidth, the high-precision optical cavity can obtain extremely high optical spectral resolution and displacement resolution, and has a unique role in laser optical clocks, gravitational wave detection, and thermal noise measurement; high-precision The optical cavity can also greatly increase the optical power density in the cavity, thus providing an ideal platform for the research of various nonlinear effects and the application of femtosecond pulses; at the same time, the ultra-high-precision optical cavity can not only select specific optical mode, and can enhance the coherence of photons, thus opening up a new field of quantum optics research and quantum information research - cavity quantum electrodynamics (cavity QED) in the optical frequency region. In addition, in the research of atomic physics, the detection and manipulation of a single atom has always been a very difficult task. In 2001, in free space, the French Grangier experimental group obtained a long-term capture of a single atom in a dipole force trap, and Using ultra-high-precision micro-optical cavities that are strongly coupled to atoms, we can achieve sensitive detection of very small amounts of atoms or even single atoms (see literature ZHANG Peng-Fei, ZHANG Yu-Chi, LI Gang, DU Jin-Jin, ZHANG Yan- Feng, GUO Yan-Qiang, WANG Jun-Min, ZHANG Tian-Cai, LI Wei-Dong, Chin. Phys. Lett. 28, 044203 (2011)). With the continuous advancement of technology, people can even use micro-optical cavities to measure the orbital information of the center of mass of a single atom. Internationally, the California Institute of Technology in the United States and the Max Planck Laboratory in Germany have used micro-optical cavities to measure single atoms. Therefore, as an important device, high-quality micro-optical cavities are increasingly used in precision measurement (such as single atoms, ions or molecules) and weak light (single photon) control and measurement. An important device in the field of science.

While high-definition optical cavities are widely used in engineering, they also provide powerful tools for the precise measurement of some basic physical parameters, and the precise measurement of basic physical parameters has always been an important foundation of physics. For an optical cavity with a fineness of 100,000, when the corresponding frequency fluctuation is controlled at one tenth of its line width, the required cavity length fluctuation must be less than 10 ^-13 m, which is already far smaller than a Atoms; and in some extremely low-signal measurements, such as gravitational wave measurement devices, the requirement for the fluctuation of the cavity length has reached an astonishing 2×10 ^-18 m. This requires higher-quality optical cavities, which has brought great challenges to people. In fact, many physical measurement processes have reached the quantum limit. Therefore, people urgently need to find new ways to overcome quantum fluctuations and achieve measurements beyond quantum noise. The micro-optical cavities that realize atoms and their strong coupling can sense single atoms or single photons very sensitively. , so that it can be used as an important tool for ultra-low signal measurement and trace analysis, and it has great application potential in micro-phase detection, gravitational wave detection, frequency standards, etc.; Optical cavities have become a measurement tool that people urgently need, but none of the existing micro-optical cavities can meet their measurement needs.

Contents of the invention

The invention aims to solve the problem that the existing micro-optical cavity has low fineness and cannot meet the measurement requirements, and provides a method for manufacturing an ultra-stable ultra-high-precision micro-optical cavity.

The present invention is realized by adopting the following technical means: a method for manufacturing an ultra-stable ultra-high-definition micro-optical cavity, comprising the following steps:

(1) Use a biological microscope to select two pieces of the first lens and the second lens with intact film layers, no stains, no scratches, no pits, and a reflectivity greater than 99.999%. The reflective surfaces of the first and second lenses are uniform. It is cone-shaped; to remove the dust on the surface of the first lens and the second lens, first use clean compressed air to remove the dust on the surface, and then place it in acetone for ultrasonic cleaning. If there is still tiny dust that is difficult to remove, use an absorption spectrum Gently wipe off the mirror paper with pure grade acetone;

(2) Due to the extremely high reflectivity of the lens, it is easily polluted by dust in the outside air and seriously affects its reflectivity, resulting in a decrease in the fineness of the produced micro-optical cavity, so it is necessary to construct an air purification device for making the micro-optical cavity , the air purification device includes sequentially cascaded air pumps, the first sealed jar, the second sealed jar, and the third sealed jar; both the first sealed jar and the second sealed jar are filled with If there is water, the third sealed jar is equipped with a desiccant; the third sealed jar is connected to the closed operating space; the desiccant can be liquid or solid desiccant, and a filter layer is set above the desiccant when the solid desiccant is selected (The filter layer can use absorbent cotton or filter paper) to prevent the fine particles of the desiccant from entering the closed operating space; when working, the air pump draws the outside air through the first sealed jar, the second sealed jar, and the third sealed jar in turn. Enter the airtight operating space after purification; there is an air outlet on the airtight operating space, so that the air in the operating space can circulate with the outside air;

(3) In the closed operating space, use vacuum glue to bond the first lens to the first sheet piezoelectric ceramics working in shear mode, and then place them together on the operating platform, at a distance from the first sheet piezoelectric ceramics in the horizontal direction 2.8-3.2mm place the second piece of piezoelectric ceramics working in shear mode and make the shear direction of the first piece of piezoelectric ceramics and the second piece of piezoelectric ceramics be the cavity axis direction of the optical cavity to be constructed ; Bond the second lens to the bottom of the five-dimensional precision frame supported on the operating platform and approach the second sheet piezoelectric ceramic from the top until it is 0.5mm away from the upper surface of the second sheet piezoelectric ceramic, adjust the second The position of the lens is such that the first lens and the second lens are on the same optical axis and the reflecting surfaces are opposite;

(4) Use a CCD or a magnifying glass to observe the reflective surface of the first lens and the second lens so that the distance is 10um-500um; the invisible laser and the visible laser with a working wavelength emitted by a laser with a wavelength adjustment range of 0-20nm The emitted visible laser is injected into the beam space coincidence device (the beam space coincidence device can choose single-mode fiber, polarization beam splitter prism, and dichroic mirror) so that the outgoing light is combined in space and then combined by lens (the lens combination can use a single convex lens, Two convex lenses, and a combination of two convex lenses and one concave lens) are incident on the first lens together; a high-voltage amplifier is connected to the first sheet piezoelectric ceramic to scan the first lens and adjust the position and pitch angle of the second lens to make it visible The interference rings where the laser is located between the left and right surfaces of the first lens and the second lens are all coincident; at this time, the positions of the first lens and the second lens are aligned, and the first lens, the second lens, the first sheet piezoelectric ceramics, and The second piezoelectric ceramic sheet forms an optical cavity;

(5) Turn off the visible light laser, use a high-bandwidth photodetector located on the other side of the optical cavity to detect changes in the transmitted light intensity of the invisible laser, and fine-tune the position and pitch angle of the second lens so that the fundamental mode in the optical cavity occupies 90% The above energy (as shown in Figure 3) bonds the second lens and the second sheet piezoelectric ceramic together, and takes away the five-dimensional precision frame; then adjusts the wavelength of the invisible laser to make it match the optical cavity Adjacent to two longitudinal mode resonances, use a wavelength meter to record the two resonance wavelengths to obtain the free spectral region of the optical cavity to determine the cavity length of the optical cavity;

(6) Since the cavity length of the micro-optical cavity is very small and has ultra-high precision, a very small mechanical disturbance will cause a large deflection angle of the cavity axis, which will cause drastic changes in the optical field in the cavity and cause the optical cavity It is difficult to control. In order to improve the stability of the optical cavity, the optical cavity is placed on a three-stage microcavity passive vibration isolation base composed of three layers of oxygen-free copper blocks arranged crosswise and elastic buffer blocks made of three layers of silica gel. The modulator adds a 5-500Mhz modulation signal to the invisible laser incident in front of the first lens, linearly scans the cavity length of the optical cavity to obtain the transmission spectrum of the optical cavity (as shown in Figure 5), and obtains the main mode on the transmission spectrum and modulate the sidebands to calculate the linewidth of the optical cavity (the linewidth refers to the frequency difference corresponding to the half-maximum transmission spectrum of the optical cavity's fundamental mode transmission spectrum, also known as the full width at half maximum of the cavity transmission spectrum); multiple scans The cavity length of the optical cavity obtains multiple sets of transmission spectra to calculate the average line width, and calculates the fineness of the microcavity by comparing the obtained free spectral region with the average line width, and then calculates the overall loss of the optical cavity according to the fineness and quality factor;

(7) During the construction of the micro-optical cavity, the refractive index of the film layer in different directions will be different due to the stress deformation caused by the grinding process of the lens and the bonding process in the early stage, and the reflectivity of the lens is extremely high, and the photons in the cavity The number of oscillations has also been greatly increased, thus forming an obvious birefringence phenomenon. The birefringence phenomenon will change the polarization state of the light field inside the micro-optical cavity, which will affect the use of the micro-optical cavity; A polarizing lens is set between them, and the polarizing lens is rotated to change the polarization direction of the invisible laser, and the transmission spectrum of the optical cavity is obtained by detecting with a high-bandwidth photodetector, and the main mode frequency difference of different polarization directions is obtained on the transmission spectrum to calculate the optical cavity The birefringent optical axis of , and then determine the polarization direction of the invisible laser;

(8) Place the optical cavity in a vacuum chamber, connect the first sheet piezoelectric ceramics, the second sheet piezoelectric ceramics and the control electrode installed in the vacuum chamber with wires resistant to high temperatures of 150 degrees Celsius; after baking After evacuation, use a vacuum ion pump to maintain the vacuum degree in the vacuum chamber at 10 ^-8 Pa; this can reduce the pollution of dirty air to the cavity mirror and maintain the quality of the optical cavity, while reducing the impact of air flow on the stability of the optical cavity .

The present invention has the following beneficial effects:

(1) In the process of building the micro-optical cavity, a "super mirror" lens with a reflectivity as high as 99.999% is used to build it, and its fineness can reach hundreds of thousands. In the process of building, reference light (visible laser) and working light (invisible Laser) is injected simultaneously to complete the collimation and adjustment of the optical cavity; and the laser that can adjust the wavelength in a wide range is used to determine the frequency difference between two adjacent longitudinal modes of the micro-optical cavity to determine the cavity length, and the electro-optic modulator is used to measure the micro-optical The line width of the cavity finally determines the fineness of the optical cavity; therefore, the fineness of the micro-optical cavity manufactured by the method of the present invention is as high as 330,000.

(2) The characteristics of a high-quality micro-optical cavity determine that it must work in a stable environment. For this reason, in the present invention, a three-stage micro-cavity passive vibration isolation base is used during the construction of the micro-optical cavity, which greatly reduces the external environment. The interference to the micro-optical cavity provides favorable conditions for the active control and tuning of the micro-optical cavity; The vibration amplitude is less than 1/3200 of that before isolation.

(3) In order to make the cavity length of the built micro-optical cavity as small as possible, auxiliary means such as CCD are used to reduce the cavity length during the construction process, and the front end of the cavity mirror is ground into a tapered shape to maximize the The cavity length is reduced, thereby greatly improving the detection sensitivity of the optical cavity.

(4) Two sheet piezoelectric ceramics working in the shear mode are used to operate simultaneously, so that the cavity length of the micro-optical cavity can be precisely adjusted, and combined with various active feedback technologies, the micro-optical cavity can work in different wavelength bands. The cavity length can be precisely controlled.

(5) Placing the micro-optical cavity in an ultra-high vacuum chamber can maintain its long-term stability and quality, keep the cavity lens of the built micro-optical cavity from being polluted, and always maintain ultra-high fineness; at the same time reduce air The effect of flow on the stability of micro-optical cavities.

The fineness of the optical cavity produced by the invention can reach 330,000, which solves the problem that the existing micro-optical cavity has a low fineness and cannot meet the measurement requirements, and can be widely used in environmental monitoring, material analysis, biomedicine, food hygiene, and safe production and the field of information technology.

Description of drawings

Fig. 1 is a schematic diagram of the connection of the air cleaning device of the present invention.

Fig. 2 is a diagram of the location of the device in the enclosed operating space of the present invention.

Fig. 3 is a schematic diagram of the signal of the transmitted light intensity of the optical cavity in the fifth step of the present invention; the peak is the fundamental mode (TEM00 mode), and the low peak is the high-order transverse mode (TEM10 mode and TEM01 mode).

Fig. 4 is the frequency response characteristic curve of the three-stage microcavity passive vibration isolation base in the present invention.

Fig. 5 is a graph of the transmission spectrum obtained by linearly scanning the length of the optical cavity after adding a modulation signal in the present invention; wherein: the peak in the middle is the main mode, and the peaks on both sides are modulation sidebands.

In the figure: 1-air pump; 2-first sealed jar; 3-second sealed jar; 4-third sealed jar; 5-desiccant; 6-closed operating space; 7-first Lens; 8-second lens; 9-first sheet piezoelectric ceramic; 10-second sheet piezoelectric ceramic; 11-five-dimensional precision adjustment frame; 12-laser with a wavelength adjustment range of 0-20nm; 13- Visible light laser; 14-beam spatial coincidence device; 15-lens combination; 16-polarization lens; 17-high bandwidth photodetector.

Detailed ways

A method for manufacturing an ultra-stable ultra-high-definition micro-optical cavity, comprising the following steps:

(1) Use a biological microscope to select two pieces of the first lens 7, the second lens 8, the first lens 7, and the second lens 8 with intact film layers, no stains, no scratches, no pits, and a reflectivity greater than 99.999%. The reflective surface ends are all conical; remove the dust on the surface of the first lens 7 and the second lens 8;

(2) Build an air purification device for making a micro-optical cavity, the air purification device includes an air pump 1 cascaded in sequence, a first sealed jar 2, a second sealed jar 3, and a third sealed jar 4; water is housed in the first sealed jar 2 and the second sealed jar 3, and desiccant 5 is housed in the third sealed jar; the third sealed jar 4 is connected with the airtight operation space 6, airtight There is an air outlet on the operating space 6;

(3) In the airtight operating space 6, use vacuum glue to bond the first lens 7 to the first sheet piezoelectric ceramic 9 working in the shearing mode, and then put them together on the operating platform. Place the second sheet piezoelectric ceramic 10 working in the shear mode at 2.8-3.2mm (2.8mm, 3.0mm, 3.2mm) in the horizontal direction of the ceramic 9 and make the first sheet piezoelectric ceramic 9 and the second sheet piezoelectric ceramic The shear direction of the electric ceramic 10 is the cavity axis direction of the optical cavity to be constructed; the second lens 8 is bonded to the bottom of the five-dimensional precision mirror frame 11 supported on the operating platform and is close to the second sheet piezoelectric ceramic from the top 10 until it is 0.5 mm away from the upper surface of the second sheet piezoelectric ceramic 10, adjust the position of the second mirror 8 so that the first mirror 7 and the second mirror 8 are on the same optical axis and the reflecting surfaces are opposite;

(4) Observing with a CCD or a magnifying glass, the reflective surfaces of the first mirror 7 and the second mirror 8 are brought close to make the distance 10um-500um; the invisible laser with the working wavelength emitted by the laser 12 with a wavelength adjustment range of 0-20nm The visible laser light emitted by the visible light laser 13 is injected into the beam space coincidence device 14 so that the outgoing light is coincident in space and then incident on the first lens 7 through the lens combination 15; the high-voltage amplifier is connected with the first sheet piezoelectric ceramic 9 Scan the first mirror 7 and adjust the position and pitch angle of the second mirror 8 so that the visible laser light is located in the interference rings between the left and right surfaces of the first mirror 7 and the second mirror 8. At this time, the first mirror 7 and the second mirror 8 8 are aligned, the first lens 7, the second lens 8, the first sheet piezoelectric ceramic 9, and the second sheet piezoelectric ceramic 10 form an optical cavity;

(5) Turn off the visible light laser 13, use the high-bandwidth photodetector 17 located on the other side of the optical cavity to detect the change of the cavity transmitted light intensity of the invisible laser, and finely adjust the position and pitch angle of the second mirror 8 to make the fundamental mode in the optical cavity Occupy more than 90% of the energy, bond the second lens 8 and the second sheet piezoelectric ceramic 10 together, remove the five-dimensional precision frame 11; then adjust the wavelength of the invisible laser to make it adjacent to the optical cavity Two longitudinal modes resonate, record the two resonant wavelengths with a wavelength meter to obtain the free spectral region of the optical cavity to determine the cavity length of the optical cavity;

(6) Place the optical cavity on a three-stage microcavity passive vibration isolation base composed of three layers of oxygen-free copper blocks arranged crosswise and elastic buffer blocks made of three layers of silica gel. Add a 5-500Mhz (5Mhz, 300Mhz, 500Mhz) modulation signal to the invisible laser in front of the lens 7, linearly scan the cavity length of the optical cavity to obtain the transmission spectrum of the optical cavity, and obtain the main mode and modulation sidebands on the transmission spectrum to calculate The line width of the optical cavity is obtained; the cavity length of the optical cavity is scanned multiple times to obtain multiple sets of transmission spectra to calculate the average line width, and the fineness of the microcavity is calculated by comparing the obtained free spectral region with the average line width, and then Calculate the overall loss and quality factor of the optical cavity according to the fineness;

(7) A polarizing lens 16 is set between the beam space coincidence device 14 and the lens combination 15, and the polarizing lens 16 is rotated to change the polarization direction of the invisible laser light, and the transmission spectrum of the optical cavity is obtained by detecting with a high-bandwidth photodetector 17. The main mode frequency difference of different polarization directions is obtained on the spectrum to calculate the birefringent optical axis of the optical cavity, and then determine the polarization direction of the invisible laser;

(8) The optical cavity is placed in a vacuum chamber, and the first sheet piezoelectric ceramic 9, the second sheet piezoelectric ceramic 10 are connected to the control electrode installed in the vacuum chamber with a wire resistant to a high temperature of 150 degrees Celsius; After baking and evacuation, a vacuum ion pump was used to maintain a vacuum degree of 10 ^-8 Pa in the vacuum chamber.

Claims (4)

1. the manufacture method in an overstable superelevation fineness micro-optic chamber is characterized in that: comprise the steps:

(1) select two intact, the no spots of rete, no marking, no pit and reflectivity greater than 99.999% first eyeglass (7), second eyeglass (8) with biomicroscope, the reflecting surface end of first eyeglass (7), second eyeglass (8) is taper; Remove the dust on first eyeglass (7) and second eyeglass (8) surface;

(2) structure is used to make the air cleaning unit in micro-optic chamber, and air cleaning unit comprises air pump (1), the first sealing wide-mouth bottle (2), the second sealing wide-mouth bottle (3) and the 3rd sealing wide-mouth bottle (4) of cascade successively; In the first sealing wide-mouth bottle (2), the second sealing wide-mouth bottle (3) water is housed all, in the 3rd sealing wide-mouth bottle drier (5) is housed; The 3rd sealing wide-mouth bottle (4) links to each other with closed-loop operation space (6), and the closed-loop operation space has the gas outlet on (6);

(3) in closed-loop operation space (6), first eyeglass (7) is bonded in and is placed on together on the operating platform after first chip type piezoelectric pottery (9) that works in shear mode is gone up, place second chip type piezoelectric pottery (10) that works in shear mode apart from first chip type piezoelectric pottery (9) horizontal direction 2.8-3.2mm place and make the shear direction of first chip type piezoelectric pottery (9), second chip type piezoelectric pottery (10) be the chamber direction of principal axis of desire structure optics cavity with vacuum glue; With second eyeglass (8) be bonded in be supported in the accurate mirror holder of five on operating platform dimension (11) bottom and from the top near second chip type piezoelectric pottery (10) until upper surface 0.5mm apart from second chip type piezoelectric pottery (10), the position of adjusting second eyeglass (8) make eyeglass of winning (7) and second eyeglass (8) be on the same optical axis and reflecting surface relative;

(4) observing the reflecting surface with first eyeglass (7), second eyeglass (8) with CCD or magnifying glass is 10um-500um near making its distance; The visible laser that the invisible laser with operation wavelength that the wavelength regulation scope is sent at the laser (12) of 0-20nm sends with visible laser (13) injects light beam space coincidence device (14) overlaps after combination of lenses (15) incides on first eyeglass (7) its emergent light in the space; Make visible laser be positioned at that the interference ring between the surface all overlaps about first eyeglass (7) and second eyeglass (8) the link to each other position and the luffing angle that scan first eyeglass (7) and regulate second eyeglass (8) of high-voltage amplifier and first chip type piezoelectric pottery (9); This moment first eyeglass (7), second eyeglass (8) aligned in position, first eyeglass (7), second eyeglass (8), first chip type piezoelectric pottery (9) and second chip type piezoelectric pottery (10) form optics cavity;

(5) close visible laser (13); The chamber transmitted light intensity of surveying invisible laser with the high bandwidth photodetector (17) that is positioned at the optics cavity opposite side changes; The position of fine adjusting second eyeglass (8) and luffing angle make that basic mode occupies the energy more than 90% in the optics cavity; Second eyeglass (8) and second chip type piezoelectric pottery (10) are bonded together, take five dimension accurate mirror holders (11) away; Then regulate adjacent two longitudinal modes resonance that invisible Wavelength of Laser makes itself and optics cavity, thereby confirm that with the free spectral range that two resonant wavelengths of wavemeter record obtain optics cavity the chamber of optics cavity is long;

(6) optics cavity is put on three grades of microcavity passive vibration isolation bases that the elastic buffer piece processed by three layers of oxygen-free copper block of cross arrangement and three layers of silica gel constitutes; Inciding the modulation signal that adds 5-500Mhz on the preceding invisible laser of first eyeglass (7) with electrooptic modulator; The chamber of the linear scan optics cavity transmission spectrum of optics cavity of looking, thus the live width that main mould and modulation sideband, calculate optics cavity on transmission spectrum, obtained; Repeatedly thereby the chamber in scanning optical chamber many groups transmission spectrum of looking calculates live width mean value, compares the fineness that calculates microcavity with the free spectral range that obtains and the mean value of live width, calculates the overall loss and the quality factor of optics cavity then according to fineness;

(7) between light beam space coincidence device (14) and combination of lenses (15), polarized lenses (16) is set; Rotatory polarization eyeglass (16) thus change the polarization direction of invisible laser; Survey the transmission spectrum that obtains optics cavity with high bandwidth photodetector (17); Thereby the main mould difference on the frequency that on transmission spectrum, obtains the different polarization direction calculates the birefringent optical axis of optics cavity, confirms the polarization direction of invisible laser then;

(8) be positioned over optics cavity in the vacuum room, with first chip type piezoelectric pottery (9), second chip type piezoelectric pottery (10) and the control electrode in being installed on vacuum room be connected with the lead of anti-150 celsius temperatures; After overbaking was bled, the vacuum degree of using vacuum ion pump to keep in the vacuum room was 10 ^-8Pa.

2. the manufacture method in a kind of overstable superelevation fineness micro-optic according to claim 1 chamber is characterized in that: be provided with the filter course that is positioned at drier (5) top in said the 3rd sealing wide-mouth bottle (4).

3. the manufacture method in a kind of overstable superelevation fineness micro-optic according to claim 1 and 2 chamber, it is characterized in that: said light beam space coincidence device (14) is selected monomode fiber or polarization beam splitter prism or dichroic mirror for use; Combination of lenses (15) is selected the combination of single convex lens or two convex lens or two convex lens and concavees lens for use.

4. the manufacture method in a kind of overstable superelevation fineness micro-optic according to claim 1 and 2 chamber, it is characterized in that: said biomicroscope is a dark field microscope; Said wavelength regulation scope adopts ti sapphire laser at the laser (12) of 0-20nm; Said visible laser (13) adopts helium neon laser or green glow solid state laser.

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