CN102520587B - Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms - Google Patents

Abstract

The method and device for double workpiece table rotation exchange based on the cable box anti-rotation mechanism belongs to semiconductor manufacturing equipment technology, and the device includes two workpiece tables, a rotary transfer table and two cable box anti-rotation devices; During the table rotation exchange process, the rotary transfer table grabs and clamps the double workpiece table, and rotates around the center of the abutment to realize the exchange of the exposure station and the pretreatment station. The anti-rotation mechanism of the cable box controls the rotation of the double workpiece table. Guarantee the same phase of the double workpiece table during the table changing process; the present invention solves the problem of the large impact torque and many beats of the table changing in the existing linear table changing scheme, the phase inversion of the double workpiece table in the existing rotary table changing scheme, the cable For problems such as winding and laser interferometer target loss, the use of a smaller mass balance system is conducive to shortening the balance time, while simplifying the system, reducing costs, reducing the beat of changing channels, shortening the time of changing channels, and effectively improving the productivity of the lithography machine.

Description

Method and device for double workpiece platform rotation exchange based on cable box anti-rotation mechanism

technical field

The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and device for rotating and exchanging double workpiece tables based on a cable box anti-rotation mechanism.

Background technique

Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. The resolution and engraving accuracy of the lithography machine determine the minimum line width of the integrated circuit chip. At the same time, the yield of the lithography machine greatly affects the production cost of the integrated circuit chip. As the key subsystem of the lithography machine, the workpiece table It also determines the resolution, overlay accuracy and productivity of the lithography machine to a large extent.

Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and thus improving the productivity of the lithography machine is the development direction of the workpiece table technology. The most direct way to improve the operating efficiency of the workpiece table is to increase the motion acceleration and speed of the cable table, but in order to ensure the original accuracy, the speed and acceleration cannot be increased without limit. The initial workpiece table only had one silicon wafer carrier, and the lithography machine could only process one silicon wafer at a time. All processes were processed serially, and the production efficiency was low. For this reason, someone has proposed a double worktable technology, which is also the mainstream technical means to improve the production efficiency of lithography machines. The double worktable technology has an exposure station, two pretreatment stations and two cable stations on the worktable. The exposure and measurement adjustment can be processed in parallel, which greatly shortens the time and improves the production efficiency. The current representative product is the lithography machine based on the TwinScan technology, that is, the double-workpiece technology of the Dutch ASML company.

Improving the operating efficiency of the double workpiece table is one of the development goals of the current lithography machine workpiece table technology. The double-workpiece technology involves the switching of the cable table between two stations, and the efficiency of the table change directly affects the operating efficiency of the double-workpiece table and the productivity of the lithography machine. How to reduce the interference of channel switching to other systems while shortening the channel switching time as much as possible has always been the focus of research. In the traditional double-stage switching process, the cable stage is linearly driven as in the exposure and pretreatment process. In the double-table patent US2001/0004105A1 and WO98/40791, each cable table has two interchangeable and coordinated units to realize the exchange of the double table, which improves the production rate without increasing the speed of the cable table. However, due to The coupling connection method is also adopted between the cable table and the guide rail, and the cable table and the drive unit will be separated temporarily during the channel change process, which will have a great impact on the positioning accuracy of the cable table. At the same time, the motion unit and the guide rail are longer, and the motion mass is larger, which has adverse effects on the improvement of the motion speed and acceleration. In the patent CN101231471A, the H-type drive unit is used to dock with the friction wheel on the transition receiving device to avoid the problem of the docking accuracy of the guide rail. However, when the cable table is changed, it is necessary to wait for the drive unit to complete the docking with the friction wheel before performing the table change operation. , which has a great influence on the yield. In the patent CN1828427A, one X-guiding guide rail is set at the pretreatment station, and two X-guiding guide rails are provided at the exposure station to realize parallel work of the two stations. However, since the drive unit is fixed on the base, the cable table There will be greater force transmitted to the base during exercise, which will have a bad effect on the whole.

In the above solutions, the influence of the movement of the guide device on the efficiency during the channel change is not taken into account. From the perspective of the channel change rhythm, the five-beat form is adopted, that is, during the channel change process, the two cable platforms need to stay for a period of time to allow the card grabbing device to complete the exchange, thereby completing the channel change work. In the case of higher and higher requirements on the productivity of lithography machines, the replacement time of the card grabbing device will also have a great impact on the productivity. In the patent CN101201555, the conveyor belt and the docking slider are used to complete the stage changing process, the movement rhythm is small, and the operation and maintenance are simple. However, the conveyor belt mechanism and the docking slider are fixed on the abutment, so there will be a large force during the stage changing process On the abutment, it has a great influence on the overall dynamic performance. In the patent CN1485694, the table-changing operation is completed by the docking of the Y-direction linear motor and the linear guide rail. However, due to the excessive gap in the middle of the abutment, a bridging device is introduced, which increases the movement rhythm and increases the time for table-changing. At the same time, the X-direction linear motor magnetically The steel part is fixed on the abutment, and the movement of the moving parts will generate a large reaction force on the abutment when changing the stage, which in turn affects the dynamic performance of the entire system. In the patent CN101770181, the docking of the replacement unit is used to complete the table changing work, but its guide device is fixed on the abutment. During the table changing movement, the moving parts will generate a large reaction force on the abutment, which in turn affects the dynamic performance of the entire system. Therefore, the current two-stage straight-line exchange program needs to be improved.

Compared with the straight-line table-changing scheme, the rotary table-changing scheme has unique advantages, so the double-workpiece table technology that adopts the rotary method for table-changing has emerged. For example, the European patent WO98/28665 uses a belt drive to exchange positions between the exposure station and the pretreatment station on the workpiece table, which simplifies the stage changing process, but the belt drive is difficult to achieve nanometer positioning accuracy. Patent CN101071275 adopts the way of rotating the whole abutment to realize the transposition of the double cable table, which simplifies the system structure, and at the same time, there is no overlapping area in the movement of the two cable tables, which avoids the potential safety hazard of collision. However, there are problems such as large moment of inertia, difficult precise positioning of high-power rotary motors, and high heat generation causing system temperature rise by rotating the entire base to realize the transposition of the cable table. At the same time, the radius of rotation is large, which significantly increases the main structure of the lithography machine. The patent CN102141739 uses a rotary motor to complete the exchange of the wafer stage station, which avoids the rotation of the base stage with large inertia, and saves the extremely demanding guide rail docking device and auxiliary device. The phases of the alignment marks are reversed, making it difficult to exchange double work stages with the same phase. None of the above-mentioned solutions considers the problem that the phase inversion of the cable platform and the optical system are difficult to cooperate in the way of returning to the conversion platform. In the exposure and pretreatment process of the lithography machine, the optical system needs to detect the position sensors and alignment marks of the cable table. Due to the uneven distribution of the position sensors and alignment marks, the structural principles of the alignment marks are inconsistent, and the cable There is an orientation problem with the platform. After returning to the conversion table, the cable table rotates 180°, causing the position sensor of the cable table and the alignment mark to be reversed. Therefore, the current solution of returning to the conversion table still needs to be improved. In addition, problems such as the gyration characteristics of the gyro-conversion table method causing the cable entanglement of the cable table and the loss of the target due to the rotation of the laser interferometer mirror have yet to be resolved.

Contents of the invention

The present invention aims at the deficiencies in the above-mentioned prior art, and designs and provides a method and device for rotating and exchanging double worktables based on a cable box anti-rotation mechanism. This device adopts a rotary method to switch between two sets, which reduces the time for switching between two sets, improves the efficiency of switching between sets and the productivity of the lithography machine. At the same time, it solves a series of problems such as phase inversion of the cable table, cable winding of the cable table, target loss of the laser interferometer, large radius of gyration, and large moment of inertia. The present invention can also solve the problems of large impact torque and many beats in the existing linear channel change scheme, and can adopt a smaller mass balance system, which is beneficial to shorten the balance time, simplify the system at the same time, reduce costs, and shorten the cycle time of channel change. The time for changing the platform can effectively improve the productivity of the lithography machine.

The purpose of the present invention is achieved like this:

Based on the anti-rotation mechanism of the cable box, the double workpiece table rotary exchange method is composed of three beats. The first beat is: after the first workpiece table completes the exposure process and the second workpiece table completes the pretreatment process, respectively from The exposure station and the pretreatment station move towards the center of the abutment, and the card grabbing device of the rotary transfer table absorbs the first workpiece table rotary ring sleeve and the second workpiece table rotary ring sleeve through electromagnetic adsorption. At the same time, the X-direction first linear motor mover and the clamping mechanism on the second linear motor mover in the X direction to loosen the first workpiece table adapter device and the second workpiece table adapter device respectively, and at the same time, one end of the first air flotation anti-rotation device is connected to the first cable table , the other end forms an air-floating surface with the X-direction side of the first workpiece table after the gas is injected, one end of the second air-floating anti-rotation device is connected to the second cable table, and the other end is connected to the second workpiece table after the gas is injected. The X-direction side forms an air-floating surface to realize the opposite docking of the two workpiece tables and the rotary transfer table; the second beat is: the rotary transfer table absorbs the first workpiece table and the second workpiece table around the central axis of the abutment in a clockwise or counterclockwise direction Rotate 180° (the next rotation exchange is counterclockwise or clockwise), the first cable platform and the second cable platform keep synchronous movement with the first workpiece platform and the second workpiece platform respectively in the Y direction; at the same time, the first line The first air flotation anti-rotation device on the cable platform and the first cable platform keep synchronous movement to prevent the phase change caused by the rotary motion of the first workpiece table during the platform change; at the same time, the second air flotation anti-rotation device and the second The cable table keeps synchronous movement to prevent the phase change caused by the rotary motion of the second workpiece table during the table change process, and realizes the same phase of the first work table and the second work table during the entire rotary transfer table transmission process; the third The beat is: after the rotary transfer table rotates 180°, the card grabbing device of the rotary transfer table releases the rotary ring sleeve of the first workpiece table and the rotary ring sleeve of the second workpiece table; at the same time, the first air flotation anti-rotation device stops the air supply, and the second The air flotation anti-rotation device stops the air supply; at the same time, the clamping mechanism on the X-direction first linear motor mover grabs the second workpiece table adapter device and moves to the exposure station, and the X-direction second linear motor mover The clamping mechanism on the upper grips the first workpiece table transfer device and moves to the pretreatment station to realize the reverse separation of the two workpiece tables from the rotary transfer table and to their respective stations; complete the line-based processing through the above three beats. The double worktables of the anti-rotation mechanism of the cable box are rotated and exchanged in the same phase.

The double workpiece platform rotary exchange device based on the anti-rotation mechanism of the cable box includes the base platform, the first workpiece platform, and the second workpiece platform. The two ends of the long side of the base platform in the Y direction are respectively the exposure station and the pretreatment station. The first The workpiece table and the second workpiece table run in the exposure station and the pretreatment station respectively. The Y-direction first linear motor, the Y-direction first static pressure air bearing guide rail and the Y-direction first linear motor and the Y-direction Two Y-direction long-stroke linear motion units composed of the second linear motor and the Y-direction second static pressure air bearing guide rail. The exposure station is equipped with the X-direction first linear motor mover and the X-direction first linear motor. The stator, the X-direction first static pressure air bearing guide rail and the first X-direction long-stroke linear motion unit are composed of the X-direction first long-stroke linear motion unit. The pretreatment station is equipped with an X-direction second linear motor The second X-direction long-stroke linear motion unit composed of the motor stator, the X-direction second static pressure air bearing guide rail and the second load beam, the Y-direction first linear motor and the Y-direction first linear motion unit of the Y-direction long-stroke linear motion unit The first cable platform matched with the first workpiece platform is set on the upper part of the static pressure air bearing guide rail, and the second cable matching the second workpiece platform is set on the upper part of the Y direction second linear motor and the Y direction second static pressure air bearing guide rail. A laser interferometer is installed around the base; the first workpiece table and the second workpiece table are respectively equipped on the X-direction first long-stroke linear motion unit and the X-direction second long-stroke linear motion unit, and the X-direction first The long-stroke linear motion unit and the second long-stroke linear motion unit in the X direction are arranged in an H shape with the Y-direction long-stroke linear motion unit; a rotary is installed on the base between the exposure station and the pretreatment station The transfer table, the rotary transfer table includes a rotary motor stator, a rotary motor mover, and a card grabbing device for a rotary transfer table, wherein the rotary motor stator is fitted on the lower side of the base, and the rotary motor mover is fitted on the rotary On the motor stator, the upper end of the rotor of the rotary motor is fixed back to the clamping device of the conversion table; the first workpiece table rotary ring is installed in the middle of the first workpiece table, and the first workpiece table is installed on the X-direction side of the bottom of the first workpiece table The transfer device; the second workpiece table rotary ring is set in the middle of the second work table, and the second work table transfer device is installed on the X-direction side of the bottom of the second work table; a first gas is fixed on the first cable table. A floating anti-rotation device, a second air-floating anti-rotation device is fixed on the second cable platform; the bottom surfaces of the first workpiece platform and the second workpiece platform are air-floating surfaces, and the first workpiece platform and the second workpiece platform are air-floated The upper part of the abutment; the contact ring surface between the rotary ring sleeve of the first workpiece table and the first workpiece table is a static pressure air bearing, and the sleeve and the table make relative rotary motion when turning the transfer table; The contact surface of the table is an air flotation ring surface, and the sleeve and the table make relative rotary motion when turning back to the transfer table; the first cable table and the first air flotation anti-rotation device matched with the first workpiece table carry the cables of the first workpiece table , the first cable table is slidably fitted on the Y-direction first static pressure air bearing guide rail, driven by the Y-direction first linear motor, and remains relatively stationary with the first workpiece table in the Y direction; and the second The second cable table and the second air flotation anti-rotation device matched with the workpiece table carry the cables of the second workpiece table, and the second cable table is slidably fitted on the second static pressure air bearing guide rail in the Y direction Driven by the second linear motor in the Y direction, it is always relatively stationary with the second workpiece table in the Y direction; during operation, the beam emitted by the laser interferometer is always in line with the corresponding sides of the first workpiece table and the second workpiece table. The reflector is vertical; Y-direction to the first linear motor, Y-direction to the second linear motor, X-direction to the first linear motor mover, X-direction to the first linear motor stator, X-direction to the second linear motor mover, X-direction to the second linear motor The stator of the second linear motor adopts a flat motor or a U-shaped slot motor.

The present invention has the following innovations and significant advantages:

1. Using the double workpiece table rotary exchange method based on the cable box anti-rotation mechanism only needs three beats to change the table, that is, the first beat is that the two workpiece tables are oppositely docked with the rotary transfer table along the axis (Z axis O-O); the second The second beat is that the rotary transfer table and the two workpiece tables rotate 180° clockwise (or counterclockwise) around the rotary axis (the next indexing will turn 180° counterclockwise (or clockwise)); the third beat is two The workpiece table is reversely separated from the rotary transfer table and goes to their respective stations. The method solves the problem of too many beats (five beats) in the existing linear channel changing method, and also solves the problem of large moment of inertia and long completion time of the overall rotating platform mode. Compared with the existing method, the method has a shorter time for changing the stage, and significantly improves the efficiency of changing the stage and the film production rate of the photolithography machine, which is one of the innovative points and outstanding advantages of the present invention.

2. Propose a double-workpiece rotary exchange device based on the anti-rotation mechanism of the cable box. During the process of the two workpiece tables turning 180° around the axis (Z axis O-O) with the rotary transfer table, the two workpiece tables control the autorotation movement through their corresponding cable box anti-rotation mechanisms, and always keep the two workpiece tables at the zero position. The phase does not change, ensuring the same phase of the double workpiece table in the process of changing the table. It solves the three major problems existing in the existing method of returning to the conversion table, namely, the phase reversal of the workpiece table, the winding of the workpiece table cable, and the loss of the laser interferometer target. No winding of the cable and continuous tracking of the target by the laser interferometer are two of the innovative points and outstanding advantages of the present invention.

3. Propose a fast and stable slewing drive control method and structure scheme. The process of turning the table is continuous and stable, the torque impact is small, and the speed is fast; at the same time, the turning torque strictly acts on the axis of the precision air bearing shaft, without impact force, so that the balance direction, position and balance force are accurate and controllable. It solves the problem that the impact force and impact torque are too large in the existing linear table changing method and scheme, and the force balance direction, size, and force and moment balance position cannot be accurately predicted and accurately balanced. The mass and inertia are too large, the required torque is large, the impact torque is large, the required motor volume is large, the function and the heat generation are large, and it has the advantages of no impact force, small impact torque, and fast channel change during the channel change process. It has multiple advantages such as stability, precise moment balance and short balance time, which is the third innovative point and outstanding advantage of the present invention.

4. Propose a counteracting method and structural scheme of the channel changing system. During the docking and separation process of the two workpiece tables and the rotary transfer table, the center of mass of the two workpiece tables and the rotary axis of the rotary transfer table are on a straight line, and the line is in the y direction of the air bearing platform of the double workpiece table system The geometric center line coincides with the position of the center of mass of the balance mass frame; the impact force generated when the two workpiece tables and the rotary transfer table are linearly docked and separated during the stage change process is equal in magnitude and opposite in direction, and the force on the balance mass frame The resultant force is zero. It solves the problems of large linear impact force, large mass and volume of the balance quality frame, and slow balance speed in the existing linear channel changing scheme. Multiple advantages such as small impact, this is innovation and outstanding advantage four of the present invention.

Description of drawings

Figure 1 is a schematic diagram of the overall structure of the present invention.

Fig. 2 is a sectional view of the overall structure of the present invention.

Figure 3 is a schematic diagram of the assembly structure of the rotary transfer table, the cable table, and the anti-rotation device.

Fig. 4 is an isometric view of the first workpiece table.

Figures 5, 6, 7, 8, 9, 10, and 11 are schematic diagrams of the process of changing two workpiece stages.

Part number in the picture: 1-base platform; 2-exposure station; 3-pretreatment station; 4a-first workpiece table; 4b-second workpiece table; 5-Y long-stroke linear motion unit; 5a-Y To the first linear motor; 5b-Y to the first static pressure air bearing guide rail; 5c-Y to the second linear motor; 5d-Y to the second static pressure air bearing guide rail; 6-X to the first long stroke linear motion Unit; 6a-X to the first linear motor mover; 6b-X to the first linear motor stator; 6c-X to the first static pressure air bearing guide rail; 6d- the first load beam; 7-X to the second Long stroke linear motion unit; 7a-X to the second linear motor mover; 7b-X to the second linear motor stator; 7c-X to the second static pressure air bearing guide rail; 7d- the second load beam; 8a- the first Cable table; 8b-second cable table; 8c-first air flotation anti-rotation device; 8d-second air flotation anti-rotation device; 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h-laser interference Instrument; 10-rotary transfer table; 10a-rotary motor stator; 10b-rotary motor mover; 10c-rotary conversion table gripping device; 11a-first workpiece table rotary ring sleeve; 11b-second workpiece table rotary ring sleeve ; 12a-the first workpiece table transfer device; 12b-the second workpiece table transfer device.

Detailed ways

Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

Based on the anti-rotation mechanism of the cable box, the double workpiece table rotation exchange method in the same phase is composed of three beats. The first beat is: after the first workpiece table completes the exposure process and the second workpiece table completes the pretreatment process, Moving from the exposure station and the pretreatment station to the center of the abutment respectively, the card grabbing device of the rotary transfer table absorbs the rotary ring sleeve of the first workpiece table and the rotary ring sleeve of the second workpiece table through electromagnetic adsorption, and at the same time, the X-direction first linear electric The gripping mechanism on the motor and the second linear motor mover in the X direction releases the first workpiece table adapter device and the second workpiece table adapter device respectively. The other end forms an air bearing surface with the X-direction side of the first workpiece table after the gas is injected, and one end of the second air bearing anti-rotation device is connected to the second cable table, and the other end is connected to the second workpiece after the gas The X-direction side of the table forms an air-floating surface to realize the opposite docking of the two workpiece tables and the rotary transfer table; the second beat is: the rotary transfer table absorbs the first workpiece table and the second workpiece table around the central axis of the abutment in a clockwise or Rotate 180°counterclockwise (the next rotation exchange is counterclockwise or clockwise), the first cable table and the second cable table keep synchronous movement with the first workpiece table and the second workpiece table respectively in the Y direction; at the same time The first air flotation anti-rotation device on a cable table keeps synchronous movement with the first cable table to prevent the phase change caused by the rotary motion of the first workpiece table during the table change process; at the same time, the second air flotation anti-rotation device and The second cable table maintains synchronous movement, preventing the phase change caused by the rotary motion of the second workpiece table during the table change process, and realizing the same phase of the first work table and the second work table during the entire rotary transfer table transmission process; the second table The three beats are: after the rotary transfer table rotates 180°, the card grabbing device of the rotary transfer table releases the rotary ring sleeve of the first workpiece table and the rotary ring sleeve of the second workpiece table; at the same time, the first air flotation anti-rotation device stops the air supply, The second air flotation anti-rotation device stops the air supply; at the same time, the clamping mechanism on the X-direction first linear motor mover grabs the second workpiece table adapter device and moves to the exposure station, and the X-direction second linear motor The card grabbing mechanism on the motor grabs the first workpiece table transfer device and moves to the pretreatment station to realize the reverse separation of the two workpiece tables from the rotary transfer table and to their respective stations; complete the process through the above three beats The same-phase rotary exchange of double workpiece tables based on the anti-rotation mechanism of the cable box.

The same-phase rotary exchange device for double workpiece tables based on the anti-rotation mechanism of the cable box. The device includes a base 1, a first workpiece 4a, and a second workpiece 4b. The two ends of the long side of the base 1 in the Y direction are exposure stations. 2 and pretreatment station 3, the first workpiece table 4a and the second workpiece table 4b respectively run in the second exposure station 2 and the pretreatment station 3, and are respectively arranged along the two sides of the long side of the base 1 from the Y direction to the first The linear motor 5a, the first Y-direction static pressure air bearing guide rail 5b and the two Y-direction long-stroke linear motion units 5 composed of the Y-direction second linear motor 5c and the Y-direction second static pressure air bearing guide rail 5d, the exposure worker Position 2 is provided with the X-direction first long axis composed of the X-direction first linear motor mover 6a, the X-direction first linear motor stator 6b, the X-direction first static pressure air bearing guide rail 6c and the first load beam 6d. The stroke linear motion unit 6, the pretreatment station 3 is provided with a second linear motor mover 7a in the X direction, a second linear motor stator 7b in the X direction, a second static pressure air bearing guide rail 7c in the X direction, and a second load beam 7d The constituted X-direction second long-stroke linear motion unit 7 is arranged on the upper part of the Y-direction first linear motor 5a and the Y-direction first static pressure air bearing guide rail 5b of the Y-direction long-stroke linear motion unit 5 to be arranged with the first workpiece table 4a The supporting first cable table 8a is provided with the second cable table 8b matching the second workpiece table 4b on the upper part of the second linear motor 5c in the Y direction and the second static pressure air bearing guide rail 5d in the Y direction, and is surrounded by the base 1 Equipped with laser interferometers 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h; the first work table 4a and the second work table 4b are respectively equipped on the X-direction first long-stroke linear motion unit 6 and the X-direction second On the second long-stroke linear motion unit 7, the X-direction first long-stroke linear motion unit 6 and the X-direction second long-stroke linear motion unit 7 are arranged in an H shape with the Y-direction long-stroke linear motion unit 5 respectively; A rotary transfer table 10 is installed between the exposure station 2 and the pretreatment station 3, and the rotary transfer table 10 includes a rotary motor stator 10a, a rotary motor mover 10b, and a rotary transfer table grabbing device 10c, wherein the rotary motor stator 10a is assembled on the lower side of the base 1, the rotary motor mover 10b is fitted on the rotary motor stator 10a, and the upper end of the rotary motor mover 10b is fixedly installed back to the card grabbing device 10c of the conversion table ; Set the first workpiece platform rotary ring 11a in the middle of the first workpiece platform 4a, and set the first workpiece platform adapter device 12a on the side X side of the bottom of the first workpiece platform 4a; set the second workpiece platform in the middle of the second workpiece platform 4b Turn the ring sleeve 11b, set the second workpiece table adapter device 12b on the X-side of the bottom of the second work table 4b; fix a first air flotation anti-rotation device 8c on the first cable table 8a, and install a first air flotation anti-rotation device 8c on the second cable table 4b A second air-floating anti-rotation device 8d is fixed on the table 8b; the bottom surfaces of the first workpiece table 4a and the second workpiece table 4b are air-floating surfaces, and the first workpiece table 4a and the second workpiece table 4b are air-floated on the upper part of the base 1 ; The contact ring surface of the first workpiece table rotary ring sleeve 11a and the first workpiece table 4a is a static pressure air bearing, and the sleeve and the table do relative rotary motion when the conversion table is turned; the second workpiece table rotary ring sleeve 1 The contact surface between 1b and the second workpiece table 4b is an air-flotation ring surface, and the sleeve and the table perform relative rotary motion when turning the transfer table; the first cable table 8a and the first air-flotation anti-rotation device matched with the first workpiece table 4a 8c carries the cables of the first workpiece table 4a, and the first cable table 8a is slidably fitted on the Y-direction first static pressure air bearing guide rail 5b, driven by the Y-direction first linear motor 5a, in the Y direction Always remain relatively stationary with the first workpiece table 4a; the second cable table 8b and the second air flotation anti-rotation device 8d supporting the second workpiece table 4b carry the cables of the second workpiece table 4b, and the second cable table 8b It is slidably fitted on the second Y-direction static pressure air bearing guide rail 5d, driven by the Y-direction second linear motor 5c, and keeps relatively stationary with the second workpiece table 4b in the Y direction; during operation, laser interference The light beams emitted by the instruments 9a, 9b, 9c, 9d, 9e, 9f, 9g, and 9h are always perpendicular to the side mirrors corresponding to the first work table 4a and the second work table 4b; the Y direction, the first linear motor 5a, and the Y direction The second linear motor 5c, the X-directed first linear motor mover 6a, the X-directed first linear motor stator 6b, the X-directed second linear motor mover 7a, and the X-directed second linear motor stator 7b adopt flat motors, or U-shaped groove motor is adopted.

The work flow of the channel changing scheme proposed by the present invention is as follows:

As shown in Figure 5, in the initial working state, the first workpiece stage 4a in the exposure station 2 is pre-aligned, and the second workpiece stage 4b in the pretreatment station 3 is loaded with new silicon wafers; The first workpiece table 4a at station 2 starts to perform exposure processing, and at the same time, the second workpiece table 4b at pre-processing station 3 starts to perform pre-alignment processing. The time required for the two cable tables to complete this station is different. Generally, the exposure processing time is longer. After a workpiece table 4a completes the exposure work, the cable table is exchanged.

As shown in Figure 6, after the first workpiece table 4a completes the exposure process and the second workpiece table 4b completes the pretreatment process, it moves from the exposure station 2 and the pretreatment station 3 to the center of the base 1 respectively, and returns to the conversion table to grab the card The device 10c electromagnetically adsorbs the first cable table rotary ring 11a of the first workpiece table 4a and the second cable table rotary ring 11b of the second workpiece table 4b, and at the same time, the X-direction first linear motor mover 6a and The clamping mechanism on the X-direction second linear motor mover 7a releases the first cable table adapter device 12a of the first workpiece table 4a and the second cable table adapter device 12b of the second workpiece table 4b respectively, and at the same time One end of the first air flotation anti-rotation device 8c is connected to the first cable table 8a, and the other end forms an air flotation surface with the X-direction side of the first workpiece table 4a after gas is introduced into it, and one end of the second air flotation anti-rotation device 8d is connected to The second cable table 8b is connected, and the other end forms an air bearing surface with the X-direction side of the second workpiece table 4b after the gas is introduced.

As shown in Fig. 7, Fig. 8, Fig. 9, and Fig. 10, the rotary transfer table 10 absorbs the first work table 4a and the second work table 4b and rotates 180° around the center of the base 1, the first cable table 8a and the second work table The two cable platforms 8b keep moving synchronously with the first workpiece platform 4a and the second workpiece platform 4b respectively in the Y direction; at the same time, the first air flotation anti-rotation device 8c on the first cable platform 8a and the first cable platform 8a Maintain synchronous movement to prevent the phase change caused by the rotary motion of the first workpiece table 4a during the stage change process; at the same time, the second air flotation anti-rotation device 8d on the second cable table 8b and the second cable table 8b keep synchronous movement , to prevent the phase change caused by the rotary motion of the second workpiece table 4b during the stage change process, and realize the same phase of the first workpiece table 4a and the second workpiece table 4b during the entire rotary transfer table transmission process.

As shown in Figure 11, after the rotary transfer table 10 rotates 180°, the card grabbing device 10c of the rotary transfer table releases the first cable table rotary ring sleeve 11a of the first workpiece table 4a and the second line of the second workpiece table 4b. The cable platform slewing ring 11b, the first air flotation anti-rotation device 8c stops the air supply, the second air flotation anti-rotation device 8d stops the air supply, and the clamping mechanism on the X-direction first linear motor mover 6a grabs the second The second cable table adapter device 12b of the second workpiece table 4b moves to the exposure station, and the clamping mechanism on the second linear motor mover 7a in the X direction grabs and blocks the first cable table of the first workpiece table 4a transfer device 12a, and move to the pretreatment station; through the above three beats, the process of changing the double workpiece table is completed.

Claims (2)

1. A method for exchanging double workpiece tables in phase with the anti-rotation mechanism of the cable box, characterized in that the method is composed of three beats, the first beat is: the first workpiece table completes the exposure process, the second workpiece After the table completes the pretreatment process, it moves from the exposure station and the pretreatment station to the center of the abutment, and the card grabbing device of the rotary transfer table electromagnetically adsorbs the first workpiece table rotary ring sleeve and the second workpiece table rotary ring sleeve. At the same time, The clamping mechanisms on the X-direction first linear motor mover and the X-direction second linear motor mover loosen the first workpiece table adapter device and the second workpiece table adapter device respectively, and at the same time, the first air flotation anti-rotation One end of the device is connected to the first cable table, and the other end forms an air-floating surface with the X-direction side of the first workpiece table after the gas is passed through. One end of the second air-floating anti-rotation device is connected to the second cable table, and the other end After entering the gas, it forms an air floating surface with the X-direction side of the second workpiece table, realizing the opposite docking of the two workpiece tables and the rotary transfer table; the second beat is: the rotary transfer table absorbs the first workpiece table and the second workpiece table around the base The center axis of the table rotates 180° clockwise or counterclockwise, and the first cable table and the second cable table keep synchronous movement with the first work table and the second work table respectively in the Y direction; at the same time, the first cable table The first air flotation anti-rotation device and the first cable table keep synchronous movement; at the same time, the second air flotation anti-rotation device and the second cable table keep synchronous movement, so that the first workpiece table and the second workpiece table can be switched throughout the cycle The same phase during the table transmission process; the third beat is: after the rotary transfer table rotates 180°, the card grabbing device of the rotary transfer table releases the rotary ring sleeve of the first workpiece table and the rotary ring sleeve of the second workpiece table; at the same time, the first The air flotation anti-rotation device stops the air supply, and the second air flotation anti-rotation device stops the air supply; at the same time, the clamping mechanism on the X-direction first linear motor mover grabs the second workpiece table adapter device and moves to the exposure Station, the clamping mechanism on the second linear motor mover in the X direction grabs the first workpiece table transfer device and moves to the preprocessing station to realize the reverse separation of the two workpiece tables from the rotary transfer table and transfer them to their respective positions. Station: through the above three beats, the same-phase rotary exchange of the double workpiece table is completed. the 2. a kind of double workpiece platform same-phase rotary exchange device based on cable box anti-rotation mechanism, this device comprises base platform (1), the first workpiece platform (4a), the second workpiece platform (4b), base platform ( 1) The two ends of the long side in the Y direction are the exposure station (2) and the pretreatment station (3), and the first workpiece table (4a) and the second workpiece table (4b) run on the exposure station (2) and the pretreatment station (3) respectively. The processing station (3) is respectively provided with the first linear motor (5a) in the Y direction , the first static pressure air bearing guide rail (5b) in the Y direction and the second Two Y-direction long-stroke linear motion units (5) constituted by a linear motor (5c) and a Y-direction second static pressure air bearing guide rail (5d), and the exposure station (2) is provided with an X-direction first linear motor The X-direction first long-stroke linear motion unit ( 6), the pretreatment station (3) is provided with the second linear motor mover (7a) to the X direction, the second linear motor stator (7b) to the X direction, the second static pressure air bearing guide rail (7c) to the X direction and The second long-stroke linear motion unit (7) in the X direction constituted by the second load beam (7d), the first linear motor (5a) in the Y direction and the first static motor (5a) in the Y direction of the long-stroke linear motion unit (5) in the Y direction The first cable table (8a) matched with the first workpiece table (4a) is arranged on the upper part of the pressure air bearing guide rail (5b), and the second linear motor (5c) in the Y direction and the second static pressure air bearing guide rail (5d) in the Y direction ) is provided with a second cable platform (8b) matching the second workpiece platform (4b), and laser interferometers (9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h are installed around the base platform (1) ); the first workpiece table (4a) and the second workpiece table (4b) are respectively fitted on the X-direction first long-stroke linear motion unit (6) and the X-direction second long-stroke linear motion unit (7), and the X-direction The first long-stroke linear motion unit (6) and the second X-direction long-stroke linear motion unit (7) are arranged in an H-shape with the Y-direction long-stroke linear motion unit (5); the feature is that: on the base (1) A rotary transfer table (10) is installed between the exposure station (2) and the pretreatment station (3), and the rotary transfer table (10) includes a rotary motor stator (10a), a rotary motor The motor (10b) and the card grabbing device (10c) of the rotary conversion table, wherein the rotary motor stator (10a) is fitted on the lower side of the base (1), and the rotary motor mover (10b) is fitted on the rotary motor stator ( 10a), on the upper end of the rotor (10b) of the rotary motor (10b), fix the clamping device (10c) of the conversion table; set the first workpiece table rotary ring sleeve (11a) in the middle of the first workpiece table (4a), and set The bottom X of a workpiece table (4a) is provided with the first workpiece table transfer device (12a) to the side; the second workpiece table rotary ring sleeve (11b) is arranged in the middle part of the second workpiece table (4b), and the second workpiece table (4b) ) bottom X to the side is provided with the second workpiece platform transfer device (12b); on the first cable platform (8a ) is fixed with a first air flotation anti-rotation device (8c), and a second air flotation anti-rotation device (8d) is fixed on the second cable table (8b); the first workpiece table (4a) and the second The bottom surface of the workpiece table (4b) is an air-floating surface, and the first workpiece table (4a) and the second workpiece table (4b) are air-floated on the upper part of the base platform (1); the first workpiece table rotary ring sleeve (11a) and the first workpiece table The contact ring surface of the table (4a) is a static pressure air bearing, and the cover and the table perform relative rotary motion when the table is turned back; Floating ring surface, when turning back to the transfer table, the sleeve and the table perform relative rotary motion; the first cable table (8a) and the first air flotation anti-rotation device (8c) matched with the first workpiece table (4a) carry the first workpiece table (4a), the first cable platform (8a) is slidably fitted on the Y-direction first static pressure air bearing guide rail (5b), and is driven by the Y-direction first linear motor (5a). The direction is always relatively static with the first workpiece platform (4a); the second cable platform (8b) and the second air flotation anti-rotation device (8d) supporting the second workpiece platform (4b) carry the second workpiece platform ( 4b), the second cable table (8b) is slidably fitted on the Y-direction second static pressure air bearing guide rail (5d), driven by the Y-direction second linear motor (5c), in the Y direction Always remain relatively stationary with the second workpiece table (4b); during operation, the beams emitted by the laser interferometers (9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h) are always in line with the first workpiece table (4a) Vertical to the side reflector corresponding to the second workpiece table (4b); Y to the first linear motor (5a), Y to the second linear motor (5c), X to the first linear motor mover (6a), X The first linear motor stator (6b), the X-direction second linear motor mover (7a) and the X-direction second linear motor stator (7b) adopt flat motors, or adopt U-shaped groove motors.

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