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CN102590157B - Element spectrum analysis method and laser element exploration equipment adopting same - Google Patents

Element spectrum analysis method and laser element exploration equipment adopting same Download PDF

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CN102590157B
CN102590157B CN201210038157.4A CN201210038157A CN102590157B CN 102590157 B CN102590157 B CN 102590157B CN 201210038157 A CN201210038157 A CN 201210038157A CN 102590157 B CN102590157 B CN 102590157B
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胡志裕
张雷
赵刚
尹王保
马维光
董磊
贾锁堂
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Abstract

本发明属于光谱分析与检测领域,具体涉及一种元素光谱分析方法及采用该方法的激光元素勘探设备。本发明是为了解决目前对元素的原子发射光谱分析方法存在缺陷,以及目前所用激光元素勘探设备上的激光光源强度不够稳定及携带不够方便的技术问题,提供一种元素光谱分析方法及采用该方法的激光元素勘探设备。一种元素光谱分析方法,包括对待测样品的原子发射谱线所进行的定性分析方法和定量分析方法。一种激光元素勘探设备,包括激光光源系统、光谱采集系统、和信号处理模块。本发明公开的元素光谱分析方法克服了之前分析方法存在的缺陷。本发明公开的设备输出的激光能量强度稳定,且其体积小,重量轻,非常适合野外现场作业。

Figure 201210038157

The invention belongs to the field of spectrum analysis and detection, and in particular relates to an element spectrum analysis method and laser element exploration equipment adopting the method. The present invention aims to solve the technical problems that the current atomic emission spectrum analysis method for elements has defects, and the intensity of the laser light source on the currently used laser element exploration equipment is not stable enough and is not convenient to carry, and provides an element spectrum analysis method and adopts the method. Laser element exploration equipment. An element spectrum analysis method includes a qualitative analysis method and a quantitative analysis method for the atomic emission spectrum line of a sample to be tested. A laser element prospecting device includes a laser light source system, a spectrum acquisition system, and a signal processing module. The element spectrum analysis method disclosed by the invention overcomes the defects of the previous analysis methods. The laser energy intensity output by the device disclosed by the invention is stable, and the device is small in size and light in weight, and is very suitable for field operations.

Figure 201210038157

Description

元素光谱分析方法及采用该方法的激光元素勘探设备Element spectrum analysis method and laser element exploration equipment using the method

技术领域 technical field

本发明属于光谱分析与检测领域,具体涉及一种元素光谱分析方法及采用该方法的激光元素勘探设备。 The invention belongs to the field of spectrum analysis and detection, and in particular relates to an element spectrum analysis method and laser element exploration equipment adopting the method.

背景技术 Background technique

在工业生产、科学研究中常常要对相关材料及矿物的化学元素进行定性、定量的检测分析。传统的材料、矿石检测和分析法主要有化学化验法、原子吸收法和电感耦合等离子体发射光谱法。其中,化学分析法和原子吸收法需要从野外采集样品,需要较长的分析时间和繁琐的操作程序,而且易形成二次污染,所以仅限于实验室分析;电感耦合等离子体发射光谱法灵敏度高,可对多种元素同时测量,但需要对样品进行复杂的预处理,试剂用量也较大,而且等离子体炬管容易被沾污。目前国内外在现场勘探行业中占主导地位的方法为X射线荧光光谱法(XRF),采用X荧光能量色散或波长色散原理,测量精确,不需要取样及破坏待测样品,可现场对矿石成分进行直接检测分析,但其在空气环境中对轻元素(如Mg,Al,Si,P,S等) 鉴别能力弱,对原子量为23以下的元素测量则需要选配充氦装置,而且测量时须与被测样品直接接触,不可以实现遥测,另外X射线有辐射危害,长期使用容易引起各类疾病,以上均限制了该方法的进一步推广。 In industrial production and scientific research, it is often necessary to conduct qualitative and quantitative detection and analysis of chemical elements of related materials and minerals. Traditional materials and ore detection and analysis methods mainly include chemical assay, atomic absorption method and inductively coupled plasma emission spectrometry. Among them, chemical analysis method and atomic absorption method need to collect samples from the field, require a long analysis time and cumbersome operating procedures, and are prone to secondary pollution, so they are limited to laboratory analysis; inductively coupled plasma emission spectrometry has high sensitivity , can measure multiple elements at the same time, but requires complex pretreatment of the sample, the amount of reagents is also large, and the plasma torch is easily contaminated. At present, the dominant method in the field exploration industry at home and abroad is X-ray fluorescence spectrometry (XRF), which uses the principle of X-ray fluorescence energy dispersion or wavelength dispersion. Perform direct detection and analysis, but its ability to identify light elements (such as Mg, Al, Si, P, S, etc.) It must be in direct contact with the sample to be tested, and telemetry cannot be realized. In addition, X-rays have radiation hazards, and long-term use is likely to cause various diseases, all of which limit the further promotion of this method.

激光诱导击穿光谱法(laser induced breakdown spectroscopy)简称LIBS,是一种激光烧蚀光谱分析技术,具有无需样品预处理、测量速度快、灵敏度高、对样品破坏性小、可多元素同时分析、对轻元素(如Mg,Al,Si,P,S等) 鉴别能力强、安全无辐射、可遥测等优点。激光诱导击穿光谱法是基于脉冲激光技术,将一束高能量的激光聚焦到待分析的物质的表面,将聚焦处部分物质烧蚀后产生高温等离子体,等离子体温度上升至几千度,产生更多的带电离子。等离子体中各元素的电离线形成连续背景谱线,该过程需要几百纳秒;之后形成等离子体中各元素的原子发射谱线,原子发射谱线包含了各元素的特征信息,不同的元素对应各自的原子发射谱线,谱线强度与元素浓度近似成正比,该过程持续几微秒,是进行元素定性分析特别是定量分析的重要环节。分析原子发射谱线可判断出样品中所含元素的种类;通过分析各谱线之间的强度之比即可定量分析出样品中各元素的相对含量。对元素进行定量分析时采用本行业所熟知的自由定标法,即直接根据得到的原子发射谱线的相对强度,归一化计算出各组分的浓度,这样可以避免不同种类的矿石基底变化带来的干扰。计算谱线的相对强度时,采用谱线峰高作为谱线相对强度。 Laser-induced breakdown spectroscopy (laser induced breakdown spectroscopy) referred to as LIBS, is a laser ablation spectroscopy analysis technology, which has the advantages of no need for sample pretreatment, fast measurement speed, high sensitivity, less destructive to samples, simultaneous analysis of multiple elements, It has the advantages of strong identification ability for light elements (such as Mg, Al, Si, P, S, etc.), safety and no radiation, and remote measurement. Laser-induced breakdown spectroscopy is based on pulsed laser technology. A beam of high-energy laser is focused on the surface of the substance to be analyzed, and part of the substance at the focus is ablated to generate high-temperature plasma. The temperature of the plasma rises to several thousand degrees. produce more charged ions. The electric lines of each element in the plasma form a continuous background line, which takes hundreds of nanoseconds; then the atomic emission lines of each element in the plasma are formed, and the atomic emission lines contain the characteristic information of each element. Different elements Corresponding to the respective atomic emission lines, the intensity of the line is approximately proportional to the concentration of the element, and this process lasts for several microseconds, which is an important part of qualitative analysis, especially quantitative analysis of elements. The type of elements contained in the sample can be determined by analyzing the atomic emission spectrum; the relative content of each element in the sample can be quantitatively analyzed by analyzing the intensity ratio between the spectral lines. The free calibration method well known in the industry is used in the quantitative analysis of elements, that is, the concentration of each component is calculated directly according to the relative intensity of the atomic emission spectrum obtained by normalization, which can avoid the variation of different types of ore substrates caused interference. When calculating the relative intensity of the spectral line, the peak height of the spectral line is used as the relative intensity of the spectral line.

所述定量分析法利用自由定标法分析元素浓度时,通过提高相关中间计算参数的计算准确性(等离子温度,电子密度,谱线强度等)来提高自由定标法的测量精度。计算等离子体温度时,利用Saha-Boltzmann多线图方法代替常用的Boltzmann斜线法,用同一元素的一价离子谱和中性原子谱通过Saha方程变化,做斜线来确定温度。因为选用来自不同电离态的发射谱线,而它们的上能级具有更大的能级差,所以对温度的计算有更高的准确性。进行Saha变换需要测量等离子体的电子密度,这里通过分析发射谱线的Stark展宽来计算电子密度。谱线Stark加宽主要线型为Lorentzian型,采用Lorentzian轮廓线型拟合对谱线线型进行修正,可避免谱线有重叠造成的干扰,提高谱峰半高宽的计算精度,间接提高测量精度。 When the quantitative analysis method uses the free calibration method to analyze the element concentration, the measurement accuracy of the free calibration method is improved by improving the calculation accuracy of relevant intermediate calculation parameters (plasma temperature, electron density, spectral line intensity, etc.). When calculating the plasma temperature, the Saha-Boltzmann multi-line diagram method is used instead of the commonly used Boltzmann oblique method, and the monovalent ion spectrum and neutral atomic spectrum of the same element are changed through the Saha equation to determine the temperature. Because the emission lines from different ionization states are selected, and their upper energy levels have a larger energy level difference, the calculation of temperature has higher accuracy. The Saha transformation needs to measure the electron density of the plasma. Here, the electron density is calculated by analyzing the Stark broadening of the emission line. The main linetype of spectral line Stark broadening is Lorentzian type, and Lorentzian contour linetype fitting is used to correct the spectral linetype, which can avoid the interference caused by overlapping spectral lines, improve the calculation accuracy of spectral peak half maximum width, and indirectly improve the measurement precision.

目前对元素的定性分析还需要用肉眼观察法寻找原子发射谱峰,再通过美国国家标准与技术研究院(National Institute of Standards and Technology)简称NIST的原子光谱数据库查找和比对;由于对峰所在位置的判断常常不够准确,使得无法实现对未知矿物样品的准确的定性分析;定量分析中采用光谱峰高表示原子发射谱线的相对强度,导致分析结果不够可靠;目前使用的LIBS检测系统存在激光强度不够稳定,发射出的激光在对样品进行烧蚀时,导致样品所产生的等离子体辐射出的原子发射谱线强度同样不稳定,影响了定量分析的精确性;目前成型的LIBS检测系统一般由氙灯泵浦的调Q式Nd:YAG激光器、光谱仪、信号发生器、数据采集与信号处理系统等组成,体积较大,并且需要220V市电供电,限制了其移动性,不便于野外作业或现场勘查时随身携带。 At present, the qualitative analysis of elements still needs to use the naked eye to find the atomic emission spectrum peak, and then search and compare it through the atomic spectrum database of the National Institute of Standards and Technology (NIST). The judgment of position is often not accurate enough, making it impossible to realize accurate qualitative analysis of unknown mineral samples; in quantitative analysis, the spectral peak height is used to represent the relative intensity of atomic emission lines, resulting in unreliable analysis results; the currently used LIBS detection system has laser The intensity is not stable enough. When the emitted laser ablates the sample, the intensity of the atomic emission spectrum radiated by the plasma generated by the sample is also unstable, which affects the accuracy of quantitative analysis; the currently formed LIBS detection system is generally It consists of a Q-switched Nd:YAG laser pumped by a xenon lamp, a spectrometer, a signal generator, a data acquisition and signal processing system, etc. It is large in size and needs 220V mains power supply, which limits its mobility and is not convenient for field work or Take it with you during site inspections.

发明内容 Contents of the invention

本发明是为了解决目前对于元素的原子发射光谱分析方法存在缺陷导致分析结果不准确,以及目前所用激光元素勘探设备上的激光光源强度不够稳定及携带不够方便的技术问题,提供一种元素光谱分析方法及采用该方法的激光元素勘探设备。 The present invention aims to solve the technical problems of inaccurate analysis results caused by defects in the current atomic emission spectrum analysis method for elements, and the technical problems that the intensity of the laser light source on the currently used laser element exploration equipment is not stable enough and the carrying is not convenient enough, and provides an element spectrum analysis method. Method and laser element prospecting equipment using the method.

本发明所述元素光谱分析方法采用了如下技术方案来实现:一种元素光谱分析方法,包括对待测样品的原子发射谱线所进行的定性分析方法和采用自由定标法的定量分析方法;所述定性分析方法包括以下步骤:(a)对样品的原子发射谱线求二次微商;(b)对于谱线二次微商后的结果,按照如下规定的阈值判断标准判断微商后的极小值点: The element spectrum analysis method of the present invention adopts the following technical scheme to realize: a kind of element spectrum analysis method, comprises the qualitative analysis method that the atomic emission spectrum line of the sample to be measured is carried out and adopts the quantitative analysis method of free calibration method; The qualitative analysis method includes the following steps: (a) calculate the second derivative of the atomic emission spectrum of the sample; (b) judge the result of the second derivative of the spectral line according to the threshold judgment standard as follows: Minimum point:

Figure 523567DEST_PATH_IMAGE001
Figure 523567DEST_PATH_IMAGE001

只保留二次微商后小于阈值的点,所述标准偏差为谱线二次微商后所得数据的标准偏差;(c)对小于阈值的点,采用三点比较法确定其中的极小值点,该极小值点即对应原谱线的特征峰;(d)将选出的特征峰与NIST原子发射光谱数据库进行比较,对各谱线对应的元素种类进行标定;采用自由定标法的定量分析方法在计算发射谱线的相对强度时采用谱峰面积的积分强度来表示相对强度,在计算谱峰面积时采用LIBS谱线修正方法修正谱线展宽的影响。 Only keep the points that are smaller than the threshold after the second derivative, and the standard deviation is the standard deviation of the data obtained after the second derivative of the spectral line; (c) For the points that are smaller than the threshold, use the three-point comparison method to determine the minimum value point, the minimum value point is the characteristic peak corresponding to the original spectral line; (d) compare the selected characteristic peak with the NIST atomic emission spectrum database, and calibrate the element type corresponding to each spectral line; use the free calibration method The quantitative analysis method uses the integrated intensity of the spectral peak area to represent the relative intensity when calculating the relative intensity of the emission spectrum, and uses the LIBS spectral line correction method to correct the influence of spectral line broadening when calculating the spectral peak area.

所述定性分析方法中,对采集到的LIBS谱线求二次微商,如图1(b)所示,依据二阶导数的性质,峰址位于极小值处。对于原谱线基底上的弱峰,因其变化较为缓慢,二阶微商后会变成幅值很小的峰或者平滑线。设定一个阈值,大于阈值的极小值点,视为基底上的缓变假峰引起的,不予考虑;仅考虑二阶导小于阈值的部分,如图1(c);用三点比较法确定其极小值点,即为原谱线的峰址,如图1(d)所示。为了最大限度的抑制基底上无意义的假峰而又不漏掉真峰,需要选择合适的阈值,才能获得良好的找峰效果。阈值过低,会找出许多基底上的假峰或统计上无意义的峰;而阈值过大,又会漏掉有意义的真峰。本方法在大量试验的基础上,选择的阈值以数据的标准偏差(Stanard Deviation,SD)为参考上下浮动。经过实验发现,当数据的标准偏差较大时,取标准偏差为阈值可最大限度地抑制假峰而又不漏掉真峰;当标准偏差较小时,需要适当地增大阈值以免基底上的假峰被误识,且SD越小,需要增大的倍数越大,才能获得良好的找峰效果。采用本方法能够很好的消除背景噪声的影响,提高定性分析的精度。所述三点比较法广泛应用于信号分析领域,为本领域技术人员的公知常识。 In the qualitative analysis method, the second derivative is calculated for the collected LIBS spectral lines, as shown in Figure 1(b), according to the properties of the second derivative, the peak is located at the minimum value. For the weak peak on the base of the original spectral line, because of its slow change, the second-order derivative will become a peak or a smooth line with a small amplitude. Set a threshold, and the minimum point greater than the threshold is regarded as caused by the slowly changing false peak on the substrate, and will not be considered; only the part where the second order derivative is smaller than the threshold is considered, as shown in Figure 1 (c); compare with three points The minimum value point is determined by the method, which is the peak location of the original spectral line, as shown in Figure 1(d). In order to suppress meaningless false peaks on the substrate as much as possible without missing true peaks, it is necessary to select an appropriate threshold to obtain a good peak finding effect. A threshold that is too low will find many spurious or statistically insignificant peaks on the substrate, while a threshold that is too high will miss meaningful true peaks. This method is based on a large number of experiments, and the selected threshold value fluctuates up and down based on the standard deviation (Stanard Deviation, SD) of the data. After experiments, it is found that when the standard deviation of the data is large, taking the standard deviation as the threshold can suppress false peaks to the greatest extent without missing the true peak; when the standard deviation is small, the threshold needs to be appropriately increased to avoid false peaks on the substrate. The peak is misrecognized, and the smaller the SD is, the larger the multiple needs to be increased to obtain a good peak finding effect. This method can well eliminate the influence of background noise and improve the precision of qualitative analysis. The three-point comparison method is widely used in the field of signal analysis and is common knowledge of those skilled in the art.

对元素进行定量分析采用本行业所熟知的自由定标法,计算发射谱线的相对强度时,不用其峰值高度而用谱峰面积来表示。相比于传统的仅仅依靠峰高来判断峰值强度的分析方法,本方法能够有效提高分析结果的准确性。但是本方法应用于原子发射谱线强度的分析时,会出现下述问题,即个别谱线的展宽会引起谱峰面积的改变,如图2中a、b谱线,a线的峰值高度小于b线,但由于展宽,a线的峰值面积大于b线的峰值面积,导致测量结果不准确。因此在计算谱峰面积时需采用LIBS谱线修正方法修正谱线展宽的影响,提高谱线相对强度的计算精确性。 Quantitative analysis of elements adopts the free calibration method well known in the industry. When calculating the relative intensity of the emission spectrum, the peak area is used instead of the peak height. Compared with the traditional analysis method that only relies on the peak height to judge the peak intensity, this method can effectively improve the accuracy of the analysis results. However, when this method is applied to the analysis of the intensity of atomic emission lines, the following problems will occur, that is, the broadening of individual lines will cause changes in the area of the spectral peaks, as shown in Figure 2 for lines a and b, the peak height of line a is less than B line, but due to broadening, the peak area of a line is larger than that of b line, resulting in inaccurate measurement results. Therefore, when calculating the spectral peak area, it is necessary to use the LIBS spectral line correction method to correct the influence of spectral line broadening and improve the calculation accuracy of the relative intensity of spectral lines.

本发明公开的激光元素勘探设备是采用以下技术方案实现的:一种采用元素光谱分析方法的激光元素勘探设备,包括激光光源系统、光谱采集系统、包含有光电转换器和计算机系统的信号处理模块;光电转换器的输出端与计算机系统的输入端相连接;所述激光光源系统包括激光头、与激光头连接的激光电源、与激光电源相连接的触发器以及与触发器相连接的供电电源;光谱采集系统包括微型聚焦系统、通过光纤与微型聚焦系统相连接且与供电电源相连接的光谱仪,所述光纤与光谱仪的输入端相连接;沿激光头的光路设有角度可调的聚焦透镜;光谱仪输出端与光电转换器的输入端相连接;计算机系统输出端连接有显示屏;信号处理模块中的计算机系统在相应软件的支持下,采用所述的元素光谱分析方法对所采集到的原子发射谱线进行分析,并将分析结果输出至显示屏。 The laser element exploration equipment disclosed in the present invention is realized by adopting the following technical scheme: a laser element exploration equipment adopting an element spectrum analysis method, including a laser light source system, a spectrum acquisition system, a signal processing module including a photoelectric converter and a computer system ; The output end of the photoelectric converter is connected with the input end of the computer system; The laser light source system includes a laser head, a laser power supply connected to the laser head, a trigger connected to the laser power supply, and a power supply connected to the trigger The spectrum acquisition system includes a micro-focusing system, a spectrometer connected to the micro-focusing system through an optical fiber and connected to a power supply, and the optical fiber is connected to the input end of the spectrometer; an angle-adjustable focusing lens is provided along the optical path of the laser head The output end of the spectrometer is connected with the input end of the photoelectric converter; the output end of the computer system is connected with a display screen; the computer system in the signal processing module, with the support of corresponding software, adopts the described element spectrum analysis method to collect the The atomic emission spectrum is analyzed, and the analysis results are output to the display.

所述的激光元素勘探设备还包括闭环能量负反馈式激光能量稳定系统,所述闭环能量负反馈式激光能量稳定系统包括设置在激光头与聚焦透镜之间的角度可调的分光棱镜、与分光棱镜相配合的探测装置、与探测装置连接的反馈电路,反馈电路与激光电源相连接,探测装置包括热电堆探测器和与热电堆探测器相连接的计算机控制系统;热电堆探测器的信号输出端与计算机控制系统的信号输入端相连接,计算机控制系统的信号输出端与反馈电路相连接;所述闭环能量负反馈式激光能量稳定系统采用如下方法对激光头输出的脉冲激光强度进行控制:激光头发出的部分脉冲激光经分光棱镜反射至热电堆探测器,热电堆探测器将采集到的脉冲激光的光信号转换为电信号并输入至计算机控制系统,计算机控制系统在相应软件的支持下对采集到的已转化为电信号的脉冲激光能量进行强度计算,计算时采用脉冲激光的谱峰面积的积分强度来表示脉冲激光的能量强度,并将计算结果与激光头输出的额定激光强度的数值进行比较,计算机控制系统将比较后所得差值的电信号输入至反馈电路,反馈电路根据输入的差值信号自动调整激光电源的泵浦电压以使脉冲激光能量稳定。 The laser element prospecting equipment also includes a closed-loop energy negative feedback laser energy stabilization system, the closed-loop energy negative feedback laser energy stabilization system includes an angle-adjustable beam splitter prism and a beam splitter arranged between the laser head and the focusing lens The detection device matched with the prism, the feedback circuit connected with the detection device, the feedback circuit is connected with the laser power supply, the detection device includes a thermopile detector and a computer control system connected with the thermopile detector; the signal output of the thermopile detector terminal is connected with the signal input end of the computer control system, and the signal output end of the computer control system is connected with the feedback circuit; the closed-loop energy negative feedback type laser energy stabilization system adopts the following method to control the pulsed laser intensity output by the laser head: Part of the pulsed laser light emitted by the laser head is reflected to the thermopile detector by the beam splitter. The thermopile detector converts the collected optical signal of the pulsed laser into an electrical signal and inputs it to the computer control system. The computer control system is supported by the corresponding software. Calculate the intensity of the collected pulsed laser energy that has been converted into an electrical signal. During the calculation, the integrated intensity of the spectral peak area of the pulsed laser is used to represent the energy intensity of the pulsed laser, and the calculation result is compared with the rated laser intensity output by the laser head. The values are compared, and the computer control system inputs the electrical signal of the difference obtained after the comparison to the feedback circuit, and the feedback circuit automatically adjusts the pumping voltage of the laser power supply according to the input difference signal to stabilize the pulsed laser energy.

所述的激光元素勘探设备还包括一个整体机身,整体机身包括手持式机身和与手持式机身相连接的手提箱;激光头、微型聚焦系统、聚焦透镜和探测装置设置在手持式机身内部;激光电源、信号处理模块、反馈电路、触发器、供电电源、光谱仪设置在手提箱内部;所述供电电源为蓄电池,光纤设置在整体机身内部,手持式机身沿激光头光路的一端设有锥形测量头,微型聚焦系统设置在锥形测量头附近;所述显示屏为微型显示屏且设置在手持式机身外侧,手持式机身外侧还设有手柄。 The laser element exploration equipment also includes a whole body, the whole body includes a hand-held body and a suitcase connected with the hand-held body; the laser head, micro-focusing system, focusing lens and detection device are arranged on the hand-held Inside the fuselage; the laser power supply, signal processing module, feedback circuit, trigger, power supply, and spectrometer are set inside the suitcase; the power supply is a battery, the optical fiber is set inside the overall fuselage, and the hand-held fuselage is along the optical path of the laser head A conical measuring head is provided at one end of the device, and the micro-focusing system is arranged near the conical measuring head; the display screen is a micro-display screen and is arranged on the outside of the hand-held body, and a handle is also provided on the outside of the hand-held body.

供电电源为触发器和光谱仪供电,触发器用来控制激光电源的泵浦电压,起到开关的作用;计算机系统内设有蓄电池,可以为整个信号处理模块供电。工作时,将激光头对准样品,通过触发器启动激光电源,激光电源控制激光头发出脉冲激光,脉冲激光经聚焦透镜聚焦,并照射到待测样品表面,使样品在聚焦部位被激发产生等离子体,该等离子体所辐射的原子发射谱线被微型聚焦系统接收并经过一根光纤传至光谱仪中,由光谱仪对其进行分光,并将光谱信号传入信号处理模块,信号处理模块内的光电转换器将光信号转换成相应的电信号,计算机系统在相应软件的支持下采用元素光谱分析方法对转换成电信号的光谱信号进行定性与定量分析,并将分析结果显示在显示屏上。本技术领域人员根据本发明所公开的元素光谱分析方法很容易容易编写出相应的软件。 The power supply supplies power to the trigger and the spectrometer, and the trigger is used to control the pumping voltage of the laser power supply, which acts as a switch; the computer system is equipped with a storage battery, which can supply power to the entire signal processing module. When working, aim the laser head at the sample, start the laser power supply through the trigger, the laser power supply controls the laser head to emit pulsed laser, the pulsed laser is focused by the focusing lens, and irradiates the surface of the sample to be tested, so that the sample is excited to generate plasma at the focused part The atomic emission line radiated by the plasma is received by the micro-focusing system and transmitted to the spectrometer through an optical fiber. The spectrometer splits it and transmits the spectral signal to the signal processing module. The converter converts the optical signal into a corresponding electrical signal. With the support of corresponding software, the computer system uses the element spectrum analysis method to conduct qualitative and quantitative analysis on the spectral signal converted into an electrical signal, and displays the analysis results on the display. Those skilled in the art can easily write corresponding software according to the element spectrum analysis method disclosed in the present invention.

在运用LIBS进行元素勘探时,激光能量的不稳定及镜片玷污等因素的影响会导致脉冲激光产生的等离子体存在一定的波动,光谱信号的强度会出现差异,从而会极大的影响定量分析的准确性。为克服此缺点,设计了闭环能量负反馈式激光能量稳定系统,可将脉冲激光能量稳定。具体实施方案为:在激光出射光路中放置了分光棱镜以及与分光棱镜相配合的探测装置,分光棱镜将一部分激光反射至探测装置,探测装置用来检测输出的脉冲激光能量的大小,并将相应的反馈信号输入到反馈电路中,通过反馈电路实时调整激光电源中的泵浦电压使出射脉冲激光能量稳定。所述激光光源系统、探测装置、反馈电路之间形成一个闭环控制系统。反馈电路可以有多种结构来实现,相关的技术为本领域技术人员所公知的。探测装置中计算机控制系统内设有蓄电池,为整个探测装置供电;电热堆探测器采集激光能量时,采样率为200000S/s,如图4为采集到的脉冲能量信号。在对脉冲激光能量进行计算时,为提高计算精度,不用其峰值高度而采用谱峰面积的积分强度来表示脉冲激光的能量,即图4中阴影部分面积与背景信号所占面积之差,背景信号的强度可由谱峰两边较为平坦的部分的平均值来表示。对用此种方法计算得到的脉冲能量与通过功率计测得结果作比较,结果如图5所示。由图5可见,两者之间几乎成线性关系,相关度较高。热电堆探测器将探测到的脉冲激光能量信号转换为电信号后输入至计算机控制系统,计算机控制系统在相应软件的支持下将输入的已转换为电信号的脉冲激光能量的强度值I与所用激光光源系统的额定脉冲激光输出强度I进行比较,并将反映I与I的差值的电信号输入至反馈电路,反馈电路根据输入的差值电信号对激光电源的泵浦电压进行实时调整,如果输出的激光强度大于额定值,反馈电路控制激光电源的泵浦电压降低,使激光头输出的激光强度降低,直到接近额定值;输出的激光强度小于额定值时,反馈电路控制激光电源的泵浦电压升高,使激光头输出的激光强度增强,直到接近额定值。本发明可将脉冲激光输出能量的不稳定度控制在±2%以内。图6显示了同等参数下,在使用闭环能量负反馈式激光能量稳定系统前后,激光器输出100个连续激光脉冲时脉冲能量的稳定性测试图。从图6中可看到,本发明采用的闭环能量负反馈式激光能量稳定可大幅提升激光输出能量的稳定性,从而提高定量分析的精度和稳定性。 When using LIBS for element exploration, the influence of factors such as laser energy instability and lens contamination will cause certain fluctuations in the plasma generated by the pulsed laser, and the intensity of the spectral signal will vary, which will greatly affect the quantitative analysis. accuracy. In order to overcome this shortcoming, a closed-loop energy negative feedback laser energy stabilization system is designed to stabilize the pulsed laser energy. The specific implementation is as follows: a beam splitting prism and a detection device matched with the beam splitting prism are placed in the laser output light path, the beam splitting prism reflects a part of the laser light to the detection device, and the detection device is used to detect the output pulsed laser energy. The corresponding feedback signal is input into the feedback circuit, and the pumping voltage in the laser power supply is adjusted in real time through the feedback circuit to stabilize the output pulse laser energy. A closed-loop control system is formed among the laser light source system, the detection device and the feedback circuit. The feedback circuit can be implemented in various structures, and related technologies are well known to those skilled in the art. The computer control system in the detection device is equipped with a battery to supply power to the entire detection device; when the electrothermal pile detector collects laser energy, the sampling rate is 200000S/s, as shown in Figure 4 for the collected pulse energy signal. When calculating the pulsed laser energy, in order to improve the calculation accuracy, the integrated intensity of the spectral peak area is used instead of its peak height to represent the energy of the pulsed laser, that is, the difference between the shaded area in Figure 4 and the area occupied by the background signal, the background The strength of the signal can be represented by the average of the flatter parts on both sides of the spectral peak. Comparing the pulse energy calculated by this method with the result measured by the power meter, the result is shown in Figure 5. It can be seen from Figure 5 that there is almost a linear relationship between the two, and the correlation is relatively high. The thermopile detector converts the detected pulsed laser energy signal into an electrical signal and then inputs it to the computer control system. With the support of the corresponding software, the computer control system compares the intensity value I of the input pulsed laser energy converted into an electrical signal with The rated pulse laser output intensity I of the laser light source system used is compared, and the electrical signal reflecting the difference between I and I is input to the feedback circuit, and the feedback circuit controls the pumping voltage of the laser power supply according to the input difference electrical signal. Real-time adjustment, if the output laser intensity is greater than the rated value, the feedback circuit controls the pumping voltage of the laser power supply to reduce, so that the output laser intensity of the laser head decreases until it is close to the rated value; when the output laser intensity is lower than the rated value, the feedback circuit controls The pumping voltage of the laser power supply increases to increase the laser intensity output by the laser head until it is close to the rated value. The invention can control the instability of pulsed laser output energy within ±2%. Figure 6 shows the pulse energy stability test chart when the laser outputs 100 continuous laser pulses before and after using the closed-loop energy negative feedback laser energy stabilization system under the same parameters. It can be seen from FIG. 6 that the closed-loop energy negative feedback laser energy stabilization adopted in the present invention can greatly improve the stability of laser output energy, thereby improving the accuracy and stability of quantitative analysis.

将LIBS探测系统的各个部件设置在整体机身内部,并通过蓄电池为触发器和光谱仪进行供电,方便在野外或现场勘探时随身携带;手持式机身内部的聚焦透镜和微型聚焦系统的角度均可微调,确保出射激光经聚焦透镜会焦后的焦点位于锥形测量头中心,使样品被激发成等离子体,并使微型聚焦系统能够接收到信噪比足够高的原子发射谱线;整体机身外部设有控制内部各部件的开关,方便对整个设备的操控;手柄的设置有利于操作人员的把握。采用锥形测量头有助于使机身对准样品;供电电源采用蓄电池,充放电十分简便,且可随时更换,方便了外出作业时的携带;微型显示屏在减小设备体积的同时可以及时显示分析结果。 The various components of the LIBS detection system are set inside the overall fuselage, and the trigger and spectrometer are powered by the battery, which is convenient to carry around in the field or on-site exploration; the angles of the focusing lens and the micro-focusing system inside the handheld fuselage are uniform. It can be fine-tuned to ensure that the focus of the outgoing laser light after being focused by the focusing lens is located in the center of the conical measuring head, so that the sample is excited into plasma, and the micro-focusing system can receive atomic emission lines with a high enough signal-to-noise ratio; the overall machine There are switches on the outside of the body to control the internal components, which is convenient for the operation of the whole equipment; the setting of the handle is conducive to the operator's grasp. The use of a tapered measuring head helps to align the body with the sample; the power supply uses a battery, which is very simple to charge and discharge, and can be replaced at any time, which is convenient for carrying when going out; Displays the analysis results.

本发明所述的激光光源系统、光谱采集系统、信号处理模块和探测装置均为现有公知技术,可以有多种结构及相关型号以供选择,市场上很容易购买到。 The laser light source system, spectrum acquisition system, signal processing module and detection device described in the present invention are all known technologies, and can have various structures and related models for selection, and are easy to purchase on the market.

本发明公开的定性分析方法克服了之前类似方法存在的寻峰不够精准、分析过程缓慢且结果不准确的问题;定量分析方法中采用谱峰面积来表示相对强度,在计算谱峰面积时需采用LIBS谱线修正方法修正谱线展宽的影响,提高了定量分析结果的准确性。所采用的闭环能量负反馈式激光能量稳定系统使得激光光源系统发射的激光更加稳定,采样时产生的等离子体发射的光谱更为稳定,提高了定量分析结果的可靠性。本发明由于其体积小,重量轻,可实时显示结果,非常适合野外现场作业。 The qualitative analysis method disclosed in the present invention overcomes the problems of inaccurate peak finding, slow analysis process and inaccurate results in previous similar methods; The LIBS spectral line correction method corrects the influence of spectral line broadening and improves the accuracy of quantitative analysis results. The closed-loop energy negative feedback laser energy stabilization system adopted makes the laser emitted by the laser light source system more stable, and the spectrum emitted by the plasma generated during sampling is more stable, which improves the reliability of quantitative analysis results. Due to its small volume and light weight, the present invention can display the results in real time, and is very suitable for field operations.

附图说明 Description of drawings

图1 定性分析方法示意图。图a为光谱仪测得的样品原子发射谱线;图b为对测得的光谱求二次微商后的结果;图c为按照阈值判断标准去掉大于阈值的点后留下的峰;图d为根据三点比较法找到的原谱线的峰址,图中实心点代表峰址。 Figure 1 Schematic diagram of the qualitative analysis method. Figure a is the sample atomic emission spectrum line measured by the spectrometer; Figure b is the result of calculating the second derivative of the measured spectrum; Figure c is the peak left after removing points greater than the threshold according to the threshold judgment standard; Figure d It is the peak position of the original spectral line found according to the three-point comparison method, and the solid point in the figure represents the peak position.

图2 计算谱峰面积时峰的展宽所造成的影响。 Figure 2. Effect of peak broadening in calculating peak area.

图3 本发明所述激光元素勘探设备结构示意图。 Fig. 3 Schematic diagram of the structure of the laser element exploration equipment of the present invention.

图4 热电堆探测器采集到的脉冲激光能量信号及激光能量的面积积分示意图。 Fig. 4 Schematic diagram of the pulsed laser energy signal collected by the thermopile detector and the area integral of the laser energy.

图5 采用谱峰面积的积分强度计算出的激光强度与功率计测得的结果比较示意图。图中实心点表示功率计测得的激光强度与相应峰面积的对应关系,斜线表示峰面积的积分强度与激光强度的对应关系。 Figure 5 Schematic diagram of the comparison between the laser intensity calculated by using the integrated intensity of the spectral peak area and the result measured by the power meter. The solid dots in the figure indicate the corresponding relationship between the laser intensity measured by the power meter and the corresponding peak area, and the oblique lines indicate the corresponding relationship between the integrated intensity of the peak area and the laser intensity.

图6使用闭环能量负反馈式激光能量稳定系统前后,激光器输出100个连续激光脉冲时脉冲能量的稳定性测试图。图a为使用前,图b为使用后。实心点表示测得的脉冲激光的能量强度。 Figure 6. The pulse energy stability test chart when the laser outputs 100 continuous laser pulses before and after using the closed-loop energy negative feedback laser energy stabilization system. Picture a is before use and picture b is after use. Solid points indicate the measured energy intensity of the pulsed laser.

图7 本发明对四种样品的检测结果。图a为黄铜,图b为铝板,图c为太阳能硅板,图d为硼酸镁压片。 Fig. 7 The present invention is to the detection result of four kinds of samples. Picture a is brass, picture b is aluminum plate, picture c is solar silicon plate, picture d is magnesium borate sheet.

1-激光头,2-探测装置,3-分光棱镜,4-聚焦透镜,5-锥形测量头,6-微型聚焦系统,7-光纤,8-微型显示屏,9-手柄,10-信号处理模块,11-供电电源,12-反馈电路;13-激光电源,14-触发器,15-光谱仪,16-手持式机身,17-手提箱,18-样品。 1-laser head, 2-detection device, 3-beam splitting prism, 4-focusing lens, 5-taper measuring head, 6-miniature focusing system, 7-optical fiber, 8-miniature display, 9-handle, 10-signal Processing module, 11-power supply, 12-feedback circuit; 13-laser power supply, 14-trigger, 15-spectrometer, 16-handheld body, 17-suitcase, 18-sample.

具体实施方式 Detailed ways

一种元素光谱分析方法,包括对待测样品的原子发射谱线所进行的定性分析方法和采用自由定标法的定量分析方法;所述定性分析方法包括以下步骤:(a)对样品的原子发射谱线求二次微商;(b)对于谱线二次微商后的结果,按照如下规定的阈值判断标准判断微商后的极小值点: An elemental spectral analysis method, including a qualitative analysis method for the atomic emission line of a sample to be tested and a quantitative analysis method using a free calibration method; the qualitative analysis method includes the following steps: (a) analyzing the atomic emission line of the sample Calculate the second derivative of the spectral line; (b) For the result of the second derivative of the spectral line, judge the minimum value point after the derivative according to the threshold judgment standard specified below:

Figure 346029DEST_PATH_IMAGE001
Figure 346029DEST_PATH_IMAGE001

只保留二次微商后小于阈值的点,所述标准偏差为谱线二次微商后所得数据的标准偏差;(c)对小于阈值的点,采用三点比较法确定其中的极小值点,该极小值点即对应原谱线的特征峰;(d)将选出的特征峰与NIST原子发射光谱数据库进行比较,对各谱线对应的元素种类进行标定;采用自由定标法的定量分析方法在计算发射谱线的相对强度时采用谱峰面积的积分强度来表示相对强度,在计算谱峰面积时采用LIBS谱线修正方法修正谱线展宽的影响。 Only keep the points that are smaller than the threshold after the second derivative, and the standard deviation is the standard deviation of the data obtained after the second derivative of the spectral line; (c) For the points that are smaller than the threshold, use the three-point comparison method to determine the minimum value point, the minimum value point is the characteristic peak corresponding to the original spectral line; (d) compare the selected characteristic peak with the NIST atomic emission spectrum database, and calibrate the element type corresponding to each spectral line; use the free calibration method The quantitative analysis method uses the integrated intensity of the spectral peak area to represent the relative intensity when calculating the relative intensity of the emission spectrum, and uses the LIBS spectral line correction method to correct the influence of spectral line broadening when calculating the spectral peak area.

一种采用元素光谱分析方法的激光元素勘探设备,包括激光光源系统、光谱采集系统、包含有光电转换器和计算机系统的信号处理模块10;光电转换器的输出端与计算机系统的输入端相连接;所述激光光源系统包括激光头1、与激光头1连接的激光电源13、与激光电源13相连接的触发器14以及与触发器14相连接的供电电源11;光谱采集系统包括微型聚焦系统6、通过光纤7与微型聚焦系统6相连接且与供电电源11相连接的光谱仪15,所述光纤7与光谱仪15的输入端相连接;沿激光头1的光路设有角度可调的聚焦透镜4;光谱仪15输出端与光电转换器的输入端相连接;计算机系统输出端连接有显示屏8;信号处理模块10中的计算机系统在相应软件的支持下,采用所述的元素光谱分析方法对所采集到的原子发射谱线进行分析,并将分析结果输出至显示屏8。还包括闭环能量负反馈式激光能量稳定系统,所述闭环能量负反馈式激光能量稳定系统包括设置在激光头1与聚焦透镜4之间的角度可调的分光棱镜3、与分光棱镜3相配合的探测装置2、与探测装置2连接的反馈电路12,反馈电路12与激光电源13相连接;探测装置2包括热电堆探测器和与热电堆探测器相连接的计算机控制系统;热电堆探测器的信号输出端与计算机控制系统的信号输入端相连接,计算机控制系统的信号输出端与反馈电路12相连接;所述闭环能量负反馈式激光能量稳定系统采用如下方法对激光头1输出的脉冲激光强度进行控制:激光头1发出的部分脉冲激光经分光棱镜3反射至热电堆探测器2,热电堆探测器2将采集到的脉冲激光的光信号转换为电信号并输入至计算机控制系统,计算机控制系统在相应软件的支持下对采集到的已转化为电信号的脉冲激光能量进行强度计算,计算时采用脉冲激光的谱峰面积的积分强度来表示脉冲激光的能量强度,并将计算结果与激光头1的额定激光强度的数值进行比较,计算机控制系统将比较后所得差值的电信号输入至反馈电路12,反馈电路12根据输入的差值信号自动调整激光电源13的泵浦电压以使脉冲激光能量稳定。还包括一个整体机身,整体机身包括手持式机身16和与手持式机身16相连接的手提箱17;激光头1、微型聚焦系统6、聚焦透镜4和探测装置2设置在手持式机身16内部;激光电源13、信号处理模块10、反馈电路12、触发器14、供电电源11、光谱仪15设置在手提箱17内部;所述供电电源11为蓄电池,光纤7设置在整体机身内部,手持式机身16沿激光头光路的一端设有锥形测量头5,微型聚焦系统6设置在锥形测量头5附近;所述显示屏8为微型显示屏且设置在手持式机身外侧,手持式机身16外侧还设有手柄9。手持式机身16与手提箱17通过螺纹管连接。激光头1为高压触发式激光头。信号处理模块10中的计算机系统采用微型笔记本电脑。蓄电池为12V蓄电池。 A laser element prospecting device adopting an element spectrum analysis method, comprising a laser light source system, a spectrum acquisition system, a signal processing module 10 including a photoelectric converter and a computer system; the output end of the photoelectric converter is connected to the input end of the computer system The laser light source system includes a laser head 1, a laser power supply 13 connected to the laser head 1, a trigger 14 connected to the laser power supply 13, and a power supply 11 connected to the trigger 14; the spectrum acquisition system includes a micro focus system 6. A spectrometer 15 connected to the micro-focusing system 6 and connected to the power supply 11 through an optical fiber 7, the optical fiber 7 is connected to the input end of the spectrometer 15; an angle-adjustable focusing lens is provided along the optical path of the laser head 1 4; the output end of the spectrometer 15 is connected with the input end of the photoelectric converter; the output end of the computer system is connected with a display screen 8; the computer system in the signal processing module 10 adopts the described element spectral analysis method under the support of corresponding software The collected atomic emission lines are analyzed, and the analysis results are output to the display screen 8 . It also includes a closed-loop energy negative feedback laser energy stabilization system. The closed-loop energy negative feedback laser energy stabilization system includes an angle-adjustable beam-splitting prism 3 arranged between the laser head 1 and the focusing lens 4, and cooperates with the beam-splitting prism 3. The detection device 2, the feedback circuit 12 connected with the detection device 2, the feedback circuit 12 is connected with the laser power supply 13; the detection device 2 comprises a thermopile detector and a computer control system connected with the thermopile detector; the thermopile detector The signal output end of the computer control system is connected with the signal input end of the computer control system, and the signal output end of the computer control system is connected with the feedback circuit 12; the closed-loop energy negative feedback type laser energy stabilization system adopts the following method to the pulse output by the laser head 1 Laser intensity control: Part of the pulsed laser light emitted by the laser head 1 is reflected by the beam splitter 3 to the thermopile detector 2, and the thermopile detector 2 converts the collected optical signal of the pulsed laser into an electrical signal and inputs it to the computer control system. With the support of corresponding software, the computer control system calculates the intensity of the collected pulsed laser energy that has been converted into an electrical signal. During the calculation, the integrated intensity of the peak area of the pulsed laser spectrum is used to represent the energy intensity of the pulsed laser, and the calculated result Compared with the value of the rated laser intensity of the laser head 1, the computer control system inputs the electrical signal of the difference obtained after the comparison to the feedback circuit 12, and the feedback circuit 12 automatically adjusts the pumping voltage of the laser power supply 13 according to the input difference signal. Stabilize the pulsed laser energy. Also comprise an integral body, integral body comprises hand-held body 16 and the suitcase 17 that is connected with hand-held body 16; The inside of the fuselage 16; the laser power supply 13, the signal processing module 10, the feedback circuit 12, the trigger 14, the power supply 11, and the spectrometer 15 are arranged inside the suitcase 17; the power supply 11 is a storage battery, and the optical fiber 7 is arranged on the whole fuselage Inside, the hand-held body 16 is provided with a tapered measuring head 5 along one end of the optical path of the laser head, and the miniature focusing system 6 is arranged near the tapered measuring head 5; the display screen 8 is a miniature display and is arranged on the hand-held body On the outside, a handle 9 is also provided on the outside of the hand-held body 16 . The handheld body 16 is connected with the suitcase 17 by a threaded pipe. The laser head 1 is a high voltage trigger laser head. The computer system in the signal processing module 10 adopts a miniature notebook computer. The battery is a 12V battery.

手持式机身16与手提箱17通过螺纹管连接,可以方便手持式机身的活动,有利于探测时对准目标样品;计算机系统采用微型笔记本电脑,进一步减小了本设备的体积;12V蓄电池体积小巧,充电快速;高压触发式激光头具有可靠性高,待机电流小等优点。 The hand-held body 16 is connected with the suitcase 17 through a threaded pipe, which can facilitate the movement of the hand-held body and facilitate the alignment of the target sample during detection; the computer system adopts a miniature notebook computer, which further reduces the volume of the device; 12V battery Small size, fast charging; high-voltage trigger laser head has the advantages of high reliability and low standby current.

具体实施时,所用激光光源系统为便携式高功率Nd:YAG激光器系统,其中的激光头1采用的型号为LMS-367的高压触发式激光头;触发器14所用型号为MK-367HC;激光电源13所用型号为MK-106.20,光谱仪15采用荷兰Avantes公司生产的Avantes AvaSpec-2048-USB2光谱仪,光纤7采用荷兰Avantes公司生产的全硅光纤,数值孔径0.22,光纤芯直径600微米。 During specific implementation, the laser light source system used is a portable high-power Nd:YAG laser system, and the model used in the laser head 1 is a high-voltage trigger laser head of LMS-367; the model used by the trigger 14 is MK-367HC; the laser power supply 13 The model used is MK-106.20, the spectrometer 15 is Avantes AvaSpec-2048-USB2 spectrometer produced by Avantes Company of the Netherlands, and the optical fiber 7 is an all-silica optical fiber produced by Avantes Company of the Netherlands, with a numerical aperture of 0.22 and a fiber core diameter of 600 microns.

图7为本发明具体应用于实际勘探后微型显示屏8所显示的分析结果。图中各实心点代表信号处理模块分析出的样品18中的各元素的原子发射谱线的峰值。本发明能够准确的分析出样品的成分,并给出样品所含各元素的组分。 Fig. 7 is the analysis result displayed on the micro-display screen 8 after the present invention is specifically applied to actual exploration. Each solid point in the figure represents the peak value of the atomic emission spectrum of each element in the sample 18 analyzed by the signal processing module. The invention can accurately analyze the composition of the sample and give the composition of each element contained in the sample.

Claims (10)

1. an element spectrum analysis method, comprises the method for qualitative analysis that the atomic emission line of testing sample is carried out and the quantitative analysis method that adopts free scaling method; It is characterized in that, described method for qualitative analysis comprises the following steps: (a) atomic emission line of sample is asked to second derivative; (b), for the result after spectral line second derivative, according to the stimulus threshold criterion of following regulation, judge the minimum point after difference quotient:
Figure 2012100381574100001DEST_PATH_IMAGE001
Only retain the point that is less than threshold value after second derivative, described standard deviation is the standard deviation of the data obtained after spectral line second derivative; (c) to being less than the point of threshold value, adopt triangle test to determine minimum point wherein, this minimum point is the characteristic peak of corresponding former spectral line; (d) characteristic peak of selecting and NIST atomic emission spectrum database are compared, the element kind that each spectral line is corresponding is demarcated; Adopt the quantitative analysis method of free scaling method when calculating the relative intensity of the spectral line of emission, to adopt the integrated intensity of spectrum peak area to represent relative intensity, when calculating spectrum peak area, adopt the impact of LIBS spectral line modification method innovation spectrum line broadening.
2. adopt a laser element exploring equipment for element spectrum analysis method as claimed in claim 1, comprise laser source system, spectra collection system, include the signal processing module (10) of photoelectric commutator and computer system; The output terminal of photoelectric commutator is connected with the input end of computer system; Described laser source system comprises laser head (1), the Laser Power Devices (13) that are connected with laser head (1), the trigger (14) being connected with Laser Power Devices (13) and the power supply (11) being connected with trigger (14); Spectra collection system comprises miniature focusing system (6), the spectrometer (15) that is connected and is connected with power supply (11) with miniature focusing system (6) by optical fiber (7), and described optical fiber (7) is connected with the input end of spectrometer (15); Light path along laser head (1) is provided with the adjustable condenser lens of angle (4); Spectrometer (15) output terminal is connected with the input end of photoelectric commutator; Computer system output terminal is connected with display screen (8); It is characterized in that, the computer system in signal processing module (10), under the support of corresponding software, adopts described element spectrum analysis method to analyze collected atomic emission line, and exports analysis result to display screen (8).
3. laser element exploring equipment as claimed in claim 2, characterized by further comprising closed loop energy negative feedback laser energy systems stabilisation, described closed loop energy negative feedback laser energy systems stabilisation comprises the feedback circuit (12) that is arranged on laser head (1) Amici prism (3) adjustable with angle between condenser lens (4), the sniffer (2) matching with Amici prism (3), is connected with sniffer (2), and feedback circuit (12) is connected with Laser Power Devices (13), sniffer (2) comprises thermopile detector and the computer control system being connected with thermopile detector, the signal output part of thermopile detector is connected with the signal input part of computer control system, and the signal output part of computer control system is connected with feedback circuit (12), described closed loop energy negative feedback laser energy systems stabilisation is adopted with the following method the pulse laser intensity of laser head (1) output is controlled: the partial pulse laser that laser head (1) sends reflexes to thermopile detector (2) through Amici prism (3), thermopile detector (2) is converted to the light signal of the pulse laser collecting electric signal and inputs to computer control system, computer control system is carried out intensity calculating to the pulsed laser energy that is converted into electric signal collecting under the support of corresponding software, during calculating, adopt the integrated intensity of the spectrum peak area of pulse laser to carry out the energy intensity of indicating impulse laser, and the numerical value of the specified laser intensity of result of calculation and laser head (1) is compared, computer control system inputs to feedback circuit (12) by the electric signal of relatively rear gained difference, feedback circuit (12) is adjusted the pumping voltage of Laser Power Devices (13) so that pulsed laser energy is stable automatically according to the difference signal of input.
4. laser element exploring equipment as claimed in claim 3, characterized by further comprising an integral body, and integral body comprises hand-held fuselage (16) and the suitcase (17) being connected with hand-held fuselage (16); Laser head (1), miniature focusing system (6), condenser lens (4) and sniffer (2) are arranged on hand-held fuselage (16) inside; Laser Power Devices (13), signal processing module (10), feedback circuit (12), trigger (14), power supply (11), spectrometer (15) are arranged on suitcase (17) inside; Described power supply (11) is accumulator, and optical fiber (7) is arranged on integral body inside, and hand-held fuselage (16) is provided with taper measuring head (5) along one end of laser head (1) light path, and miniature focusing system (6) is arranged near taper measuring head (5); Described display screen (8) is for miniature display screen and be arranged on hand-held fuselage outer side, and hand-held fuselage (16) outside is also provided with handle (9).
5. laser element exploring equipment as claimed in claim 4, is characterized in that hand-held fuselage (16) is connected by threaded line pipe with suitcase (17).
6. laser element exploring equipment as claimed in claim 2 or claim 3, is characterized in that described laser head (1) is high pressure trigger-type laser head.
7. laser element exploring equipment as claimed in claim 4, is characterized in that described laser head (1) is high pressure trigger-type laser head.
8. laser element exploring equipment as claimed in claim 2 or claim 3, is characterized in that the computer system in described signal processing module (10) adopts mini-notebook computer.
9. laser element exploring equipment as claimed in claim 4, is characterized in that the computer system in described signal processing module (10) adopts mini-notebook computer.
10. laser element exploring equipment as claimed in claim 4, is characterized in that described accumulator is 12V accumulator.
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