CN102621437B - Method for initiatively testing invalidation positioning of voltage contrast ratio - Google Patents
Method for initiatively testing invalidation positioning of voltage contrast ratio Download PDFInfo
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- CN102621437B CN102621437B CN201210066520.3A CN201210066520A CN102621437B CN 102621437 B CN102621437 B CN 102621437B CN 201210066520 A CN201210066520 A CN 201210066520A CN 102621437 B CN102621437 B CN 102621437B
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- adhesive tape
- sample
- sided conductive
- tape
- active voltage
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000012360 testing method Methods 0.000 title claims abstract description 20
- 239000002390 adhesive tape Substances 0.000 claims abstract description 48
- 238000004458 analytical method Methods 0.000 claims description 25
- 238000002955 isolation Methods 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 48
- 238000010884 ion-beam technique Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The invention provides a method for initiatively testing the invalidation positioning of voltage contrast ratio, which comprises the following technical steps of: firstly, sticking a sample to be tested onto a support disc by a conductive double-side adhesive tape; secondly, sticking a single-side isolating adhesive tape onto the support disc, and enabling two ends of the single-side isolating adhesive tape to be close to the sample to be tested; thirdly, setting a plurality of batteries on the single-side isolating adhesive tape, connecting every two batteries with each other by gaskets, setting a conductive single-side adhesive tape on the top surface of the front-end battery, sticking the conductive single-side adhesive tape onto the single-side isolating adhesive tape, setting a conductive double-side adhesive tape at the bottom surface of the tail-end battery, and sticking the conductive double-side adhesive tape onto the single-side isolating adhesive tape; fourthly, connecting one ends of the conductive single-side adhesive tape and the conductive double-side adhesive tape on the single-side isolating adhesive tape, which are far away from the batteries, with a press point of the sample to be tested by a lead wire; and fifthly, testing the sample to be tested. According to the method for initiatively testing the invalidation positioning of the voltage contrast ratio, the detection operation method can be efficiently changed to be easy, and an operator does not need abundant operational experience, so that the method is low in use and operation cost, and the sample to be tested can be flexibly tested.
Description
Technical field
The present invention relates to a kind of method of testing, particularly relate to a kind of method preparing active voltage Analysis of Contrast sample.
Background technology
At present, to passive voltage-contrast location (passive voltabe contrast, be called for short PVC) method of testing be applied in widely in the analysis of failure of semiconductor, scanning electron microscope (scanning electron microscopy is typically used in voltage-contrast localization method, be called for short SEM) sample voltage contrast is tested, by focused ion beam (focused ion beam in the process of test, be called for short FIB) bombard sample surfaces, and observe focused ion beam reflection morphological image brightness to determine that in sample, whether voltage-contrast out of order.
As shown in Figure 1, when there is fracture in test chain type sample intermediate connection, focused ion beam bombardment has different forms at sample surfaces, concrete is when focused ion beam bombardment has the upper surface of connecting line breaking portion at sample, and the reflection of focused ion beam is that bending is not for luminous; When focused ion beam bombardment has the upper surface of the non-breaking portion of connecting line at sample, the reflection of focused ion beam be linearly luminescence, judges and which point the fault analyzed in sample is present in this.
But PVC still has limitation, as shown in Figure 2, when testing chain type sample in parallel, due to the cause of parent metal leakage current, it is linearly also luminous all the time that focused ion beam bombards the ray reflected on sample, cannot go out the sample breaking part middle when leaking power supply by test analysis thus.Can overcome this defect can test under the use of the cooperation of scanning electron microscope and nanometer probe system, but nanometer probe system is the solution of a high cost, and certain experiences is needed for operator.
Summary of the invention
A kind of method preparing active voltage Analysis of Contrast sample of disclosure of the invention.In order to solve in prior art, using the high cost of nanometer probe system and the problem of complicated operation to during chain type sample test in parallel.
For achieving the above object, the technical scheme that invention adopts is:
Prepare a method for active voltage Analysis of Contrast sample, wherein, comprise following processing step:
Step one, pastes the sample that will test on supporting disk by conductive double-sided tape;
Step 2, supporting disk is pasted one side isolation adhesive tape, and makes one side isolate the two ends of adhesive tape close to sample;
Step 3, one side isolation adhesive tape is provided with multiple battery, and between every two batteries, be provided with pad connection, be provided with a single-sided conductive adhesive tape at the end face of head end battery afterwards and paste on one side isolation adhesive tape, be provided with a two-sided conductive tape in the bottom surface of end cell and paste on one side isolation adhesive tape;
Step 4, the single-sided conductive adhesive tape of isolating on adhesive tape is connected with the pressure point of sample away from one end of battery with two-sided conductive tape by one side to utilize lead-in wire;
Step 5, tests sample.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described battery is button cell.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described lead-in wire is gold, aluminium or copper conductor.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, the material of described single-sided conductive adhesive tape and two-sided conductive tape is aluminum.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, the material of described single-sided conductive adhesive tape and two-sided conductive tape is copper product.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described battery, single-sided conductive adhesive tape, two-sided conductive tape, lead-in wire and sample are connected in series.
A kind of method preparing active voltage Analysis of Contrast sample in the present invention, the as above scheme that have employed has following effect:
1, operation detection mode effectively can be made to become simple and easy, not need operator to have very abundant operating experience to it, use low operation cost;
2, simultaneously can dirigibility test sample be tested.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to following accompanying drawing, the further feature of invention, object and advantage will become more obvious.
Fig. 1 is that under regular situation, focused ion beam bombardment has different form schematic diagram at sample surfaces;
When Fig. 2 is test chain type sample in parallel, focused ion beam bombardment has the schematic diagram of same modality at sample surfaces;
Fig. 3 is a kind of enforcement schematic diagram of active testing voltage contrast failure positioning method;
Reference diagram sequence: sample 1, supporting disk 2, conductive double-sided tape 3, one side isolation adhesive tape 4, single-sided conductive adhesive tape 5, two-sided conductive tape 6, pad 7, lead-in wire 8, pressure point 9, battery 10.
Embodiment
The technological means realized to make invention, creating feature, reach object and effect is easy to understand, lower combination specifically illustrates, and sets forth the present invention further.
As shown in Figure 3, a kind of method preparing active voltage Analysis of Contrast sample, wherein, comprises following processing step:
Step one, pastes the sample 1 that will test on supporting disk 2 by conductive double-sided tape 3, and further this supporting disk 2 is the supporting disk 2 in scanning electron microscope;
Step 2, supporting disk 2 is pasted one side isolation adhesive tape 4, and makes one side isolate the two ends of adhesive tape 4 close to sample;
Step 3, one side isolation adhesive tape 4 is provided with multiple battery 10, and the connection of pad 7 as two batteries 10 is provided with between every two batteries 10, further, in order to open the ductility of battery 10, be provided with a single-sided conductive adhesive tape 5 at the end face of head end battery 10 afterwards and paste on one side isolation adhesive tape 4, be provided with a two-sided conductive tape 6 in the bottom surface of end cell 10 and paste on one side isolation adhesive tape 4;
Step 4, the single-sided conductive adhesive tape 5 utilizing lead-in wire 8 to be isolated by one side on adhesive tape 4 is connected with the pressure point 9 of sample 1 away from one end of battery with two-sided conductive tape 6;
Step 5, tests sample 1.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described battery 10 is button cell, further, in order to reduce the space in scanning electron microscope.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described lead-in wire 8 is gold, aluminium or copper conductor.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described single-sided conductive adhesive tape 5 is aluminum with the material of two-sided conductive tape 6.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described single-sided conductive adhesive tape 5 is copper product with the material of two-sided conductive tape 6.
The above-mentioned method preparing active voltage Analysis of Contrast sample, wherein, described battery 10, single-sided conductive adhesive tape 5, two-sided conductive tape 6, lead-in wire 8 are connected in series with sample 1.
In sum, invent a kind of method preparing active voltage Analysis of Contrast sample, operation detection mode effectively can be made to become simple and easy, do not need operator to have very abundant operating experience to it, use low operation cost, simultaneously can dirigibility test sample be tested.
Above the specific embodiment of invention is described.It is to be appreciated that invention is not limited to above-mentioned particular implementation, the equipment wherein do not described in detail to the greatest extent and structure are construed as to be implemented with the common mode in this area; Those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect essence of an invention content.
Claims (6)
1. prepare a method for active voltage Analysis of Contrast sample, it is characterized in that, comprise following processing step:
Step one, pastes the sample that will test on supporting disk by conductive double-sided tape;
Step 2, supporting disk is pasted one side isolation adhesive tape, and makes one side isolate the two ends of adhesive tape close to sample;
Step 3, one side isolation adhesive tape is provided with multiple battery, and between every two batteries, be provided with pad connection, be provided with a single-sided conductive adhesive tape at the end face of head end battery afterwards and paste on one side isolation adhesive tape, be provided with a two-sided conductive tape in the bottom surface of end cell and paste on one side isolation adhesive tape;
Step 4, the single-sided conductive adhesive tape of isolating on adhesive tape is connected with the two ends pressure point of sample respectively with two-sided conductive tape one end away from battery by one side to utilize lead-in wire;
Step 5, tests sample.
2. the method preparing active voltage Analysis of Contrast sample according to claim 1, is characterized in that, described battery is button cell.
3. the method preparing active voltage Analysis of Contrast sample according to claim 1, is characterized in that, described lead-in wire is gold, aluminium or copper conductor.
4. the method preparing active voltage Analysis of Contrast sample according to claim 1, is characterized in that, the material of described single-sided conductive adhesive tape and two-sided conductive tape is aluminum.
5. the method preparing active voltage Analysis of Contrast sample according to claim 1, is characterized in that, the material of described single-sided conductive adhesive tape and two-sided conductive tape is copper product.
6. the method preparing active voltage Analysis of Contrast sample according to claim 1, is characterized in that, described battery, single-sided conductive adhesive tape, two-sided conductive tape, lead-in wire and sample are connected in series.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210066520.3A CN102621437B (en) | 2012-03-14 | 2012-03-14 | Method for initiatively testing invalidation positioning of voltage contrast ratio |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210066520.3A CN102621437B (en) | 2012-03-14 | 2012-03-14 | Method for initiatively testing invalidation positioning of voltage contrast ratio |
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| Publication Number | Publication Date |
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| CN102621437A CN102621437A (en) | 2012-08-01 |
| CN102621437B true CN102621437B (en) | 2015-05-20 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103887150B (en) * | 2014-03-20 | 2016-06-08 | 上海华力微电子有限公司 | A kind of preparation method testing sample |
| CN104078343B (en) * | 2014-07-02 | 2017-02-01 | 武汉新芯集成电路制造有限公司 | Failure analysis method for gate oxide defect original appearance |
| CN110223928B (en) * | 2019-04-30 | 2025-03-21 | 通威太阳能（合肥）有限公司 | Shingled interconnect failure detection device, system and method |
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| CN1877292A (en) * | 2005-06-10 | 2006-12-13 | 联华电子股份有限公司 | Defect detection method |
| US7525325B1 (en) * | 2006-12-18 | 2009-04-28 | Sandia Corporation | System and method for floating-substrate passive voltage contrast |
| CN101499433A (en) * | 2007-11-05 | 2009-08-05 | 以色列商·应用材料以色列公司 | System and method for electric test of semiconductor wafer |
| US7848562B1 (en) * | 2005-09-26 | 2010-12-07 | National Semiconductor Corporation | Method of reducing the time required to perform a passive voltage contrast test |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7074628B2 (en) * | 2004-09-22 | 2006-07-11 | Agere Systems, Inc. | Test structure and method for yield improvement of double poly bipolar device |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877292A (en) * | 2005-06-10 | 2006-12-13 | 联华电子股份有限公司 | Defect detection method |
| US7848562B1 (en) * | 2005-09-26 | 2010-12-07 | National Semiconductor Corporation | Method of reducing the time required to perform a passive voltage contrast test |
| US7525325B1 (en) * | 2006-12-18 | 2009-04-28 | Sandia Corporation | System and method for floating-substrate passive voltage contrast |
| CN101499433A (en) * | 2007-11-05 | 2009-08-05 | 以色列商·应用材料以色列公司 | System and method for electric test of semiconductor wafer |
Non-Patent Citations (2)
| Title |
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