CN102654688A - Color-film substrate, manufacturing method and liquid crystal display device thereof - Google Patents
Color-film substrate, manufacturing method and liquid crystal display device thereof Download PDFInfo
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Abstract
本发明提供一种彩膜基板及其制造方法、液晶显示装置,涉及液晶显示领域,用于提高产品的良率。所述彩膜基板包括:黑矩阵和彩膜;在所述黑矩阵正对区域内设置有至少一个主隔垫物和至少一个副隔垫物;在所述主隔垫物和所述黑矩阵之间且与所述主隔垫物正对的位置上,设置有预定厚度的增高层,且所述主隔垫物和所述副隔垫物的高度相同。
The invention provides a color filter substrate, a manufacturing method thereof, and a liquid crystal display device, which relate to the field of liquid crystal displays and are used for improving the yield rate of products. The color filter substrate includes: a black matrix and a color filter; at least one main spacer and at least one sub-spacer are arranged in the area facing the black matrix; A booster layer with a predetermined thickness is provided between them and directly opposite to the main spacers, and the heights of the main spacers and the auxiliary spacers are the same.
Description
技术领域 technical field
本发明涉及液晶显示领域,尤其涉及一种彩膜基板及其制造方法、液晶显示装置。The invention relates to the field of liquid crystal display, in particular to a color filter substrate, a manufacturing method thereof, and a liquid crystal display device.
背景技术 Background technique
在TFT-LCD(Thin Film Transistor-Liquid Crystal Display,薄膜晶体管液晶显示器)中,液晶显示面板是由彩膜基板和阵列基板对盒而成的,且液晶层夹设在彩膜基板和阵列基板之间。为了保证液晶层的厚度的均一性,需要设置隔垫物。在目前的隔垫物设计中,通常采用主隔垫物和副隔垫物相结合的结构。In TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-Liquid Crystal Display), the liquid crystal display panel is composed of a color film substrate and an array substrate, and the liquid crystal layer is sandwiched between the color film substrate and the array substrate. between. In order to ensure the uniformity of the thickness of the liquid crystal layer, spacers need to be provided. In the current design of the spacer, the structure combining the main spacer and the auxiliary spacer is usually adopted.
如图1所示,彩膜基板100包括基板11、黑矩阵12、彩膜13、绝缘层16、公共电极层17,主隔垫物18和副隔垫物19。其中,彩膜13包括按顺序排列的红绿蓝三种滤光层(三种滤光层在图示中分别用不同的填充标识)。另外,主隔垫物18与副隔垫物19的高度不同,主隔垫物的高度为d1,副隔垫物的高度d2,且d1比d2大;主隔垫物18用来控制液晶层的厚度,副隔垫物19是在液晶显示面板受到外界压力时,与主隔垫物18共同承压,使得液晶层保持一定厚度。As shown in FIG. 1 , the
但是,在制造上述主隔垫物18和副隔垫物19的过程中,若采用负性光刻胶作为制造隔垫物的材料,则在主隔垫物18的对应位置所需要的曝光量较大,在副隔垫物19的对应位置所需要的曝光量较小;对于同一层材料进行曝光量不同的光刻工艺时,现有技术中通常采用半透光(Half-tone)或灰阶(Gray-tone)工艺;在半透光或灰阶工艺中,曝光量的微小变化会严重影响工艺的结果,即很容易出现副隔垫物的高度不均等问题,从而影响产品的良率。However, in the process of manufacturing the above-mentioned
发明内容 Contents of the invention
本发明的实施例提供一种彩膜基板及其制造方法、液晶显示装置,用以提高产品的良率。Embodiments of the present invention provide a color filter substrate, a manufacturing method thereof, and a liquid crystal display device, so as to improve product yield.
为达到上述目的,本发明的实施例采用如下技术方案:In order to achieve the above object, embodiments of the present invention adopt the following technical solutions:
一方面,提供一种彩膜基板,包括:黑矩阵和彩膜;在所述黑矩阵正对区域内设置有至少一个主隔垫物和至少一个副隔垫物;其特征在于,在所述主隔垫物和所述黑矩阵之间且与所述主隔垫物正对的位置上,设置有预定厚度的增高层,且所述主隔垫物和所述副隔垫物的高度相同。On the one hand, a color filter substrate is provided, including: a black matrix and a color filter; at least one main spacer and at least one sub-spacer are arranged in the area facing the black matrix; it is characterized in that, in the Between the main spacer and the black matrix and at the position facing the main spacer, a booster layer with a predetermined thickness is provided, and the height of the main spacer and the auxiliary spacer are the same .
一方面,提供一种彩膜基板的制造方法,包括:On the one hand, a method for manufacturing a color filter substrate is provided, including:
利用构图工艺,在透明基板上形成黑矩阵;Form a black matrix on a transparent substrate by patterning process;
利用构图工艺,在形成黑矩阵的基板上形成增高层和至少三种滤光层;Using a patterning process, forming a booster layer and at least three kinds of filter layers on the substrate forming the black matrix;
在形成所述滤光层和所述增高层的基板上,制作高度相同的主隔垫物和副隔垫物,其中,所述主隔垫物设置在所述增高层正对的位置上。On the substrate on which the filter layer and the booster layer are formed, a main spacer and a sub-spacer with the same height are fabricated, wherein the main spacer is arranged at a position facing the booster layer.
一方面,提供一种液晶显示装置,包括上述的彩膜基板。In one aspect, a liquid crystal display device is provided, including the above-mentioned color filter substrate.
本发明实施例提供一种彩膜基板及其制造方法、液晶显示装置,在主隔垫物和黑矩阵之间且与主隔垫物正对的位置上,设置有预定厚度的增高层,且主隔垫物和副隔垫物的高度相同;以透明基板所在平面为参考面,主隔垫物比副隔垫物高出上述的预定厚度,该预定厚度为现有技术中所需要的主隔垫物与副隔垫物的高度差,主、副隔垫物高度相同,从而可以利用普通掩膜板的光刻工艺,相对于现有技术中采用半透光(Half-tone)或灰阶(Gray-tone)工艺,降低了工艺难度,提高了产品的良率。Embodiments of the present invention provide a color filter substrate, a manufacturing method thereof, and a liquid crystal display device, in which a heightening layer with a predetermined thickness is provided at a position between the main spacer and the black matrix and facing the main spacer, and The height of the main spacer and the auxiliary spacer is the same; taking the plane where the transparent substrate is located as a reference plane, the main spacer is higher than the auxiliary spacer by the above-mentioned predetermined thickness, which is the main spacer required in the prior art. The height difference between the spacer and the sub-spacer, the height of the main spacer and the sub-spacer are the same, so that the photolithography process of a common mask can be used, compared with the use of half-tone (Half-tone) or gray in the prior art The gray-tone process reduces the difficulty of the process and improves the yield of the product.
附图说明 Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1为现有技术中彩膜基板的截面图;FIG. 1 is a cross-sectional view of a color filter substrate in the prior art;
图2为本发明实施例中彩膜基板的截面图;2 is a cross-sectional view of a color filter substrate in an embodiment of the present invention;
图3、图4、图5为本发明实施例彩膜基板制造过程的示意图。FIG. 3 , FIG. 4 , and FIG. 5 are schematic diagrams of the manufacturing process of the color filter substrate according to the embodiment of the present invention.
附图标记:Reference signs:
100-彩膜基板;11-透明基板;12-黑矩阵;13-彩膜;131-红色滤光层;132-绿色滤光层;133-蓝色滤光层;16-绝缘层;17-公共电极层;18-主隔垫物;19-副隔垫物;21-第一增高层;22-第二增高层。100-color film substrate; 11-transparent substrate; 12-black matrix; 13-color film; 131-red filter layer; 132-green filter layer; 133-blue filter layer; 16-insulation layer; 17- Common electrode layer; 18-main spacer; 19-secondary spacer; 21-first booster layer; 22-second booster layer.
具体实施方式 Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
如图2所示,本发明实施例提供一种彩膜基板100,包括:黑矩阵12和彩膜13;在所述黑矩阵12正对区域内设置有至少一个主隔垫物18和至少一个副隔垫物19;在所述主隔垫物18和所述黑矩阵12之间且与所述主隔垫物18正对的位置上,设置有预定厚度的增高层,且所述主隔垫物18和所述副隔垫物19的高度相同。As shown in FIG. 2 , an embodiment of the present invention provides a
其中,增高层的预定厚度优选的为图1中所需的主隔垫物18与副隔垫物19的高度差(d1-d2)。另外,增高层可以是黑矩阵材料、制作彩膜的材料等材料中的任一种制成。通过设置该增高层,可以保证在主隔垫物18和副隔垫物19发挥其各自作用的情况下,使得主副隔垫物的高度相同。这样就便于利用普通掩膜板的光刻工艺(只可以对待图案化的薄膜,按照图案所需进行完全去除或完全保留的光刻工艺)制作主副隔垫物,从而降低了工艺难度,提高了产品的良率。Wherein, the predetermined thickness of the booster layer is preferably the required height difference (d 1 -d 2 ) between the
进一步的,所述彩膜基板100还包括:覆盖所述黑矩阵12和所述彩膜13的绝缘层16;Further, the
在所述主隔垫物18和所述黑矩阵12之间且与所述主隔垫物18正对的位置上,设置有预定厚度的增高层具体为,在所述绝缘层16和所述黑矩阵12之间且与所述主隔垫物18正对的位置上,设置有预定厚度的增高层。Between the
在本发明实施例中,不局限将增高层设置在固定的某一层,例如,可以将增高层设置公共电极层17和绝缘层16之间且与主隔垫物正对的区域,但是在综合考虑工艺和液晶面板显示效果等多种情况之后,优选的,将增高层设置在绝缘层和黑矩阵之间且与主隔垫物正对的位置。In the embodiment of the present invention, it is not limited to set the booster layer on a fixed layer. For example, the booster layer can be set in the area between the
进一步的,在本发明实施例中所述增高层至少为一层,增高层的层数并不受限于实施例中的增高层的层数,可以在考虑生产成本、制造工艺难易程度等因素条件下,选定需要的层数。Further, in the embodiment of the present invention, the increase layer is at least one layer, and the number of layers of the increase layer is not limited to the number of layers in the embodiment, and can be considered in consideration of production cost, manufacturing process difficulty, etc. Under the factor condition, select the required number of layers.
优选的,所述彩膜包括:红绿蓝三种滤光层,所述增高层分为第一增高层21和第二增高层22;Preferably, the color filter includes: three kinds of filter layers of red, green and blue, and the enhancement layer is divided into a
所述第一增高层21和第一滤光层为同层,所述第二增高层22和第二滤光层为同层,其中,所述第一滤光层和所述第二滤光层为所述三种滤光层中的任意两种。The
在本发明实施例中,所述第一增高层21和第一滤光层为同层是指采用第一滤光层的材料制作薄膜,并使用普通掩膜板的构图工艺,将该薄膜图案化形成第一增高层和第一滤光层,由于两者同层,故第一增高层21的厚度等于第一滤光层的厚度;所述第二增高层22和第二滤光层为同层是指采用第二滤光层的材料制作薄膜,并使用普通掩膜板的构图工艺,将该薄膜图案化形成第二增高层和第二滤光层,由于两者同层,故第二增高层22的厚度等于第二滤光层的厚度。考虑到增高层的预定厚度即现有技术所需的主隔垫物与副隔垫物的高度差,与两层滤光层的厚度大致相等,故在本发明实施例中采用分别与两层滤光层同层制作的方法制作增高层,这样可以减少工艺上的复杂性。In the embodiment of the present invention, the
本发明实施例提供了一种制造彩膜基板的方法,该方法包括至少S1、S2、及S3三个步骤实现。An embodiment of the present invention provides a method for manufacturing a color filter substrate, and the method includes at least three steps of S1, S2, and S3.
S1、如图3所示,利用构图工艺,在透明基板11上形成黑矩阵12;S1. As shown in FIG. 3, a
S2、利用构图工艺,在形成黑矩阵12的基板上形成增高层和至少三种滤光层;在本发明实施例中,形成滤光层的层数至少为三层,也就是说,在彩膜基板上形成红色滤光层、绿色滤光层、蓝色滤光层之外,还可以在彩膜基板上形成其他颜色的滤光层,例如还可以形成白色滤光层等。S2. Using a patterning process, form a booster layer and at least three kinds of filter layers on the substrate forming the
在本发明实施例中,以形成红绿蓝三种颜色的滤光层为例,如图4所示,三种滤光层分别为红色滤光层131、绿色滤光层132、蓝色滤光层133,这三种滤光层的排列顺序在图示中只是作为描述方案的示例,且虽然图示中顺序排列三种滤光层,但并不表示是指的同一像素中的三种滤光层;也就是说,图示中的三种滤光层可以是同一像素中的,也可以是不同像素中的。In the embodiment of the present invention, taking the formation of three color filter layers of red, green and blue as an example, as shown in FIG. 4, the three filter layers are
优选的,在形成黑矩阵的基板上形成增高层和至少三种滤光层具体包括:在图案化以形成任意两种滤光层的过程中,在设置主隔垫物对应的区域将覆盖在黑矩阵上的滤光层材料保留以形成增高层。Preferably, forming the raising layer and at least three kinds of filter layers on the substrate forming the black matrix specifically includes: in the process of patterning to form any two kinds of filter layers, the area corresponding to the main spacer will cover the The material of the filter layer on the black matrix remains to form the enhancement layer.
具体的,如图4,当形成三种滤光层的顺序依次是红色滤光层、绿色滤光层、蓝色滤光层,并选用红色滤光层和绿色滤光层作为所述三种滤光层的任意两种滤光层;则此步骤具体可以是,在完成步骤S1的基板上沉积红色滤光层材料,并利用构图工艺形成红色滤光层131和第一增高层21;继续沉积绿色滤光层材料,并利用构图工艺形成绿色滤光层132和第二增高层22;继续沉积蓝色滤光层材料,并利用构图工艺形成蓝色滤光层133。此具体方法只是作为示例供参考。Specifically, as shown in Figure 4, when the order of forming three kinds of filter layers is red filter layer, green filter layer, and blue filter layer, and the red filter layer and the green filter layer are selected as the three kinds of filters. Any two kinds of filter layers of the filter layer; then this step can be specifically, depositing a red filter layer material on the substrate that has completed step S1, and using a patterning process to form the
从上述制造方法可见,在形成有黑矩阵的基板上形成滤光层过程中,同时实现了对增高层的设置,方法步骤较为简单,为一种优选的制造方法。当然也可以有其他制造方法,例如,在图4所示的设置增高层的位置上,利用黑矩阵材料制作增高层,继续按照以下步骤也可以完成彩膜基板的制造。It can be seen from the above manufacturing method that during the process of forming the filter layer on the substrate on which the black matrix is formed, the setting of the booster layer is realized at the same time, and the steps of the method are relatively simple, which is a preferred manufacturing method. Of course, other manufacturing methods are also possible. For example, at the position where the booster layer is set as shown in FIG. 4 , the black matrix material is used to make the booster layer, and the manufacture of the color filter substrate can also be completed by continuing to follow the steps below.
需要说明的是,覆盖黑矩阵上设置主隔垫物对应的区域的滤光层材料的面积,可以与近似与主隔垫物的横截面积相等,或大于主隔垫物的横截面积;It should be noted that the area of the filter layer material covering the area corresponding to the main spacer on the black matrix can be approximately equal to the cross-sectional area of the main spacer, or larger than the cross-sectional area of the main spacer;
S3、在形成所述滤光层和所述增高层的基板上,制作高度相同的主隔垫物和副隔垫物,其中,所述主隔垫物设置在所述增高层正对的位置上。在制作高度相同的主副隔垫物时,需将主隔垫物18设置在增高层正对的位置上,副隔垫物19的设置与现有技术一致,设置在未设置增高层的黑矩阵正对的区域中。在本发明实施例中对主隔垫物18和副隔垫物19的横截面积不做限定,根据实际需要,主副隔垫物的横截面积可以相同也可以不同。另外,因彩膜基板有多种类型,例如有些彩膜基板上没有公共电极层,制造多种类型的彩膜基板的实现方法也有很多种。S3. On the substrate forming the filter layer and the booster layer, make a main spacer and a sub-spacer with the same height, wherein the main spacer is arranged at a position facing the booster layer superior. When making the main and auxiliary spacers with the same height, the
进一步的,在制造彩膜基板的过程中,在S3之前,如图5所示,在形成有所述滤光层和所述增高层的基板上制作绝缘层16和公共电极层17。Further, in the process of manufacturing the color filter substrate, before S3, as shown in FIG. 5 , an insulating
如图2所示,在形成有所述滤光层和所述增高层的基板上制作绝缘层16和公共电极层17之后。在所述公共电极层17上,制作高度相同的主隔垫物18和副隔垫物19,其中,所述主隔垫物18设置在所述增高层正对的位置上。As shown in FIG. 2 , after the insulating
在上述每一步骤中,都需要经过沉积、曝光、显影等工艺过程。In each of the above steps, processes such as deposition, exposure, and development are required.
在本发明实施例中提供的彩膜基板及其制造方法中,通过在主隔垫物和黑矩阵之间且与主隔垫物正对的位置上,设置有预定厚度的增高层,且主隔垫物和副隔垫物的高度相同,这样就可以使用普通掩膜板的光刻工艺制作主副隔垫物,相对于现有技术中采用半透光(Half-tone)或灰阶(Gray-tone)工艺,降低了工艺难度;并且,利用普通掩膜板能够解决制作主副隔垫物时的高度不均的问题,提高了产品的良率。In the color filter substrate and its manufacturing method provided in the embodiments of the present invention, a heightening layer with a predetermined thickness is provided between the main spacer and the black matrix and at the position facing the main spacer, and the main The heights of the spacers and the sub-spacers are the same, so that the main and sub-spacers can be produced by using the photolithography process of a common mask plate, compared with the half-tone (Half-tone) or gray-scale ( Gray-tone) technology reduces the difficulty of the process; moreover, the use of a common mask plate can solve the problem of uneven height when making the main and auxiliary spacers, and improve the yield rate of the product.
本发明实施例还提供一种液晶显示装置,包括上述实施例中提供的彩膜基板,该彩膜可以是上述任一彩膜基板。具体的,该彩膜基板包括:黑矩阵和彩膜;在所述黑矩阵正对区域内设置有至少一个主隔垫物和至少一个副隔垫物;在所述主隔垫物和所述黑矩阵之间且与所述主隔垫物正对的位置上,设置有预定厚度的增高层,且所述主隔垫物和所述副隔垫物的高度相同。An embodiment of the present invention also provides a liquid crystal display device, including the color filter substrate provided in the above embodiments, and the color filter may be any color filter substrate described above. Specifically, the color filter substrate includes: a black matrix and a color filter; at least one main spacer and at least one sub-spacer are arranged in the area facing the black matrix; A booster layer with a predetermined thickness is provided between the black matrices and at a position facing the main spacers, and the heights of the main spacers and the auxiliary spacers are the same.
该液晶显示装置可以是包含对盒成形的彩膜基板和阵列基板的液晶显示面板,该液晶显示装置还可以是在该液晶显示面板的基础上进一步包括背光源的液晶显示器。The liquid crystal display device may be a liquid crystal display panel including a color filter substrate and an array substrate formed in a box, and the liquid crystal display device may also be a liquid crystal display further comprising a backlight on the basis of the liquid crystal display panel.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以所述权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Anyone skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present invention. Should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.
Claims (8)
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| CN104298010A (en) * | 2014-08-28 | 2015-01-21 | 合肥京东方光电科技有限公司 | Display substrate, display substrate manufacturing method and display device |
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| CN107688254A (en) * | 2017-10-11 | 2018-02-13 | 深圳市华星光电半导体显示技术有限公司 | COA type liquid crystal display panels and preparation method thereof |
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