CN102683556A - White Light Emitting Diode with Fluorescent Layer - Google Patents
White Light Emitting Diode with Fluorescent Layer Download PDFInfo
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- CN102683556A CN102683556A CN2011100616768A CN201110061676A CN102683556A CN 102683556 A CN102683556 A CN 102683556A CN 2011100616768 A CN2011100616768 A CN 2011100616768A CN 201110061676 A CN201110061676 A CN 201110061676A CN 102683556 A CN102683556 A CN 102683556A
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- 229910002601 GaN Inorganic materials 0.000 claims abstract description 52
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 35
- XKACOHCJRNAGSH-UHFFFAOYSA-N [O-2].[Tb+3].[In+3].[O-2].[O-2] Chemical compound [O-2].[Tb+3].[In+3].[O-2].[O-2] XKACOHCJRNAGSH-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 22
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 7
- 239000010980 sapphire Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 229910052771 Terbium Inorganic materials 0.000 claims description 8
- 229910003437 indium oxide Inorganic materials 0.000 claims description 8
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 8
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims 7
- 238000000576 coating method Methods 0.000 claims 7
- 239000000956 alloy Substances 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- 239000004411 aluminium Substances 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 238000007747 plating Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 abstract description 9
- 229910002704 AlGaN Inorganic materials 0.000 abstract description 4
- 238000005215 recombination Methods 0.000 abstract description 3
- 230000006798 recombination Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 8
- 238000000695 excitation spectrum Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 5
- 239000000084 colloidal system Substances 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000001194 electroluminescence spectrum Methods 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明涉及一种白光发光二极管,尤其涉及一种具有荧光特性的氧化铟铽透明导电层的氮化镓白光发光二极管。The invention relates to a white light emitting diode, in particular to a gallium nitride white light emitting diode having a transparent conductive layer of indium terbium oxide with fluorescent properties.
背景技术 Background technique
发光二极管因具有高效率的发光特性,因此已广泛应用于发光源及显示器中。发光二极管的发光原理是利用顺向偏压时P型半导体层与N型半导体之间的PN接面发生电子电洞复合而将电能转换成相对应的光能,因而产生出射光。出射光的波长是依据能隙大小,所以可利用调配适当组成的P型半导体层与N型半导体,以实现所需的能隙大小,进而产生所需的可见光。Light-emitting diodes have been widely used in light-emitting sources and displays due to their high-efficiency light-emitting characteristics. The light-emitting principle of light-emitting diodes is to use the electron-hole recombination at the PN junction between the P-type semiconductor layer and the N-type semiconductor to convert electrical energy into corresponding light energy when forward biased, thus generating outgoing light. The wavelength of the emitted light depends on the size of the energy gap, so the appropriate composition of the P-type semiconductor layer and the N-type semiconductor can be used to achieve the required size of the energy gap, and then generate the required visible light.
一般的发光二极管所产生出射光具有紫外线成分,因此常利用添加在透明荧光胶体层中荧光粉的荧光作用将高能量的紫外光转换成较低能量的可见光以供使用。然而,上述现有技术的缺点在于,透明荧光胶体层会有胶体老化的问题,影响发光二极管的出射光质量,因此,需要一种以半导体制程制造出具有荧光作用的半导体荧光层的白光发光二极管,以解决上述现有技术的问题。The outgoing light produced by general light-emitting diodes has ultraviolet components, so the fluorescent effect of phosphor powder added in the transparent fluorescent colloid layer is often used to convert high-energy ultraviolet light into lower-energy visible light for use. However, the disadvantage of the above-mentioned prior art is that the transparent fluorescent colloid layer has the problem of colloid aging, which affects the quality of the light emitted by the light-emitting diode. Therefore, a white light-emitting diode with a semiconductor fluorescent layer having a fluorescent effect manufactured by a semiconductor process is required. , to solve the above-mentioned problems of the prior art.
发明内容 Contents of the invention
本发明的主要目的是提供一种具荧光层的白光发光二极管,包括蓝宝石基板、氮化镓缓冲层、N型氮化镓层、多量子位阱氮化铝镓层、P型氮化镓层、透明导电层、氧化铟铽荧光层、负极金属连接层及正极金属连接层,其中氮化镓缓冲层、N型氮化镓层、多量子位阱氮化铝镓层、P型氮化镓层、透明导电层、氧化铟铽荧光层依序堆栈在蓝宝石基板上,而负极金属连接层连接至N型氮化镓层,用以连接外部负电源端,正极金属连接层位于氧化铟铽荧光层上并贯穿氧化铟铽荧光层而连接至透明导电层,用以连接外部正电源端,以使得电流由正极金属连接层经过透明导电层、P型氮化镓层、氮化铝镓多量子位阱层、N型氮化镓层而至负极金属连接层,并由多量子位阱氮化铝镓层发射光线,穿透P型氮化镓层、透明导电层及氧化铟铽荧光层,且经具有荧光性的氧化铟铽荧光层转变成白光的出射光而射向外部。The main purpose of the present invention is to provide a white light emitting diode with a fluorescent layer, including a sapphire substrate, a gallium nitride buffer layer, an N-type gallium nitride layer, a multi-quantum well aluminum gallium nitride layer, and a p-type gallium nitride layer , transparent conductive layer, indium terbium oxide fluorescent layer, negative metal connection layer and positive metal connection layer, of which gallium nitride buffer layer, N-type gallium nitride layer, multi-qubit well aluminum gallium nitride layer, P-type gallium nitride layer Layer, transparent conductive layer, and indium terbium oxide fluorescent layer are sequentially stacked on the sapphire substrate, while the negative metal connection layer is connected to the N-type gallium nitride layer to connect to the external negative power supply terminal, and the positive metal connection layer is located on the indium terbium oxide fluorescent layer. Layer and through the indium terbium oxide fluorescent layer and connected to the transparent conductive layer, used to connect the external positive power supply terminal, so that the current passes through the transparent conductive layer, P-type gallium nitride layer, aluminum gallium nitride multi-quantum from the positive metal connection layer Potential well layer, N-type gallium nitride layer to the negative electrode metal connection layer, and the multi-quantum well aluminum gallium nitride layer emits light, which penetrates the P-type gallium nitride layer, transparent conductive layer and indium terbium oxide fluorescent layer, And through the fluorescent indium terbium oxide fluorescent layer, it is converted into white light to emit to the outside.
因此,本发明的发光二极管不需外加荧光粉至透明胶体中形成胶体荧光层以便将紫外线转换成可见光,而是可利用射频反应式磁控溅镀法的半导体制程直接在透明导电层上沉积以形成具荧光作用的氧化铟铽荧光层,来产生具白光光谱的出射光。Therefore, the light-emitting diode of the present invention does not need to add fluorescent powder to the transparent colloid to form a colloidal fluorescent layer in order to convert ultraviolet light into visible light, but can be directly deposited on the transparent conductive layer by using the semiconductor process of radio frequency reactive magnetron sputtering method. An indium terbium oxide fluorescent layer with fluorescent effect is formed to generate outgoing light with a white light spectrum.
附图说明 Description of drawings
图1为本发明具荧光层的白光发光二极管的示意图。FIG. 1 is a schematic diagram of a white light emitting diode with a fluorescent layer of the present invention.
图2为本发明实施例白光发光二极管的光激发光谱。Fig. 2 is the light excitation spectrum of the white light emitting diode of the embodiment of the present invention.
图3为本发明另一实施例白光发光二极管的光激发光谱。FIG. 3 is a light excitation spectrum of a white light emitting diode according to another embodiment of the present invention.
图4为本发明实施例白光发光二极管的电激发光谱。Fig. 4 is the electric excitation spectrum of the white light emitting diode of the embodiment of the present invention.
图5为本发明实施例白光发光二极管的荧光层的电激发光谱。FIG. 5 is an electrical excitation spectrum of a fluorescent layer of a white light emitting diode according to an embodiment of the present invention.
图6为本发明另一实施例白光发光二极管的电激发光谱。FIG. 6 is an electrical excitation spectrum of a white light emitting diode according to another embodiment of the present invention.
图7为本发明另一实施例白光发光二极管的荧光层的电激发光谱。FIG. 7 is an electrical excitation spectrum of a fluorescent layer of a white light emitting diode according to another embodiment of the present invention.
图8为本发明的10%TIO/GaN-based LED的发光照片,其中电流为20mA。Fig. 8 is a luminescence photo of the 10% TIO/GaN-based LED of the present invention, wherein the current is 20mA.
图9为本发明的20%TIO/GaN-based LED的发光照片,其中电流为20mA。Fig. 9 is a luminescence photo of the 20% TIO/GaN-based LED of the present invention, wherein the current is 20mA.
具体实施方式 Detailed ways
以下配合说明书附图及组件符号对本发明的实施方式做更详细的说明,以使本技术领域的技术人员在研读本说明书后能据以实施。The implementation of the present invention will be described in more detail in conjunction with the drawings and component symbols in the description below, so that those skilled in the art can implement it after studying the description.
参阅图1,为本发明具荧光层的白光发光二极管的示意图。如图1所示,本发明具荧光层的白光发光二极管包括蓝宝石基板10、氮化镓缓冲层20、N型氮化镓层30、多量子位阱(Multiple Quantum Well,MQW)氮化铝镓层40、P型氮化镓层50、透明导电层60、氧化铟铽荧光层70、负极金属连接层80及正极金属连接层90,用以产生白光。Referring to FIG. 1 , it is a schematic diagram of a white light emitting diode with a fluorescent layer of the present invention. As shown in FIG. 1 , the white light emitting diode with fluorescent layer of the present invention includes a
氮化镓缓冲层20、N型氮化镓层30、多量子位阱氮化铝镓层40、P型氮化镓层50、透明导电层60及氧化铟铽荧光层70依序堆栈在蓝宝石基板10上,且曝露出一部分的N型氮化镓层30,用以电气连接负极金属连接层80,而负极金属连接层80连接外部电源的负端V-。正极金属连接层90用以连接外部电源的正端V+,且位于氧化铟铽荧光层70上,氧化铟铽荧光层70具有贯穿孔,因而正极金属连接层90可经该贯穿孔而电气连接至透明导电层60。Gallium
多量子位阱氮化铝镓层40具有多个交替堆栈且不同能阶的薄状氮化铝镓,可利用其中低能阶层所形成的量子位阱,使电子及电洞更容易局限在一起,因而可增加发光强度。The multi-quantum well
当电流由正极金属连接层90经过透明导电层60、P型氮化镓层50、多量子位阱氮化铝镓层40、N型氮化镓层30而至负极金属连接层80时,多量子位阱氮化铝镓层40会因电子电洞复合作用而发射光线,且该光线穿透P型氮化镓层50、透明导电层60及氧化铟铽荧光层70,并经具有荧光性的氧化铟铽荧光层70转变成白光的出射光而射向外部。When the current passes through the transparent
本发明的氧化铟铽荧光层70为透明的薄膜,其主要成分包括氧化铟铽(Terbium Indium Oxide),化学式为In2O3∶Tb,一般简称TIO,其中氧化铟与铽的最佳比例范围为In2O3∶Tb=95∶5至5∶95。氧化铟铽荧光层70可利用射频反应式磁控溅镀法的半导体制程而沉积在透明导电层60上。The indium terbium oxide
参阅图2及图3,以清楚了解本发明的特点,其中图2为本发明实施例白光发光二极管的光激发光谱(photoluminescence,PL),且其氧化铟与铽的比例为90∶10,而图3为本发明另一实施例白光发光二极管的光激发光谱,且其氧化铟与铽的比例为80∶20。图2及图3显示10K至300K温度范围内的光激发荧光光谱变化,且图2及图3分别显示在575nm及565nm附近具有宽广的吸收特性。Referring to Fig. 2 and Fig. 3, to clearly understand the characteristics of the present invention, wherein Fig. 2 is the photoluminescence spectrum (photoluminescence, PL) of the white light-emitting diode of the embodiment of the present invention, and the ratio of its indium oxide to terbium is 90:10, and 3 is a photoexcitation spectrum of a white light emitting diode according to another embodiment of the present invention, and the ratio of indium oxide to terbium is 80:20. Fig. 2 and Fig. 3 show the change of photoexcited fluorescence spectrum in the temperature range from 10K to 300K, and Fig. 2 and Fig. 3 show broad absorption characteristics around 575nm and 565nm respectively.
参阅图4及图5,分别为本发明实施例白光发光二极管及其荧光层的电激发光(electroluminescence,EL)的光谱,且氧化铟与铽的比例为90∶10,电流为100mA。由图4中可知,该实施例的白光发光二极管具有385nm紫外光,由图5中可知,其荧光层具有450nm至700nm的轨域跃迁,也即D轨域至F轨域的跃迁,图中并标示出相对应跃迁的波长。Referring to FIG. 4 and FIG. 5 , they are the electroluminescence (EL) spectra of the white light-emitting diode and its fluorescent layer of the embodiment of the present invention, respectively, and the ratio of indium oxide to terbium is 90:10, and the current is 100mA. It can be seen from FIG. 4 that the white light emitting diode of this embodiment has 385nm ultraviolet light. It can be seen from FIG. 5 that the fluorescent layer has an orbital transition from 450nm to 700nm, that is, a transition from D orbital to F orbital. And indicate the wavelength of the corresponding transition.
接着,参阅图6及图7,分别为本发明另一实施例白光发光二极管及其荧光层的EL光谱,且氧化铟与铽的比例为80∶20,电流为100mA。在图6中,白光发光二极管同样具有385nm紫外光,而图7中,其荧光层也具有类似图5所示450nm至700nm的轨域跃迁,图中并标示出相对应跃迁的波长。Next, referring to FIG. 6 and FIG. 7 , they are EL spectra of another embodiment of the present invention, the white light emitting diode and its fluorescent layer, and the ratio of indium oxide to terbium is 80:20, and the current is 100mA. In FIG. 6, the white light emitting diode also has 385nm ultraviolet light, and in FIG. 7, its fluorescent layer also has an orbital transition from 450nm to 700nm similar to that shown in FIG. 5, and the corresponding transition wavelengths are marked in the figure.
因此,可由图2至图7的光谱而清楚了解到,本发明的白光发光二极管确实可产生白光,用以提供高质量的光源,可适用于显示器的背光光源或一般的照明光源。为进一步显示上述本发明具荧光层的白光发光二极管的具体表现,可参考图8及图9所示的照片,其中图8为包含10%氧化铟铽荧光层(也即氧化铟与铽的比例为90∶10)的GaN白光发光二极管发射白光的照片,而图9为包含20%氧化铟铽荧光层(也即氧化铟与铽的比例为80∶20)的GaN白光发光二极管发射白光的照片,且导通电流为20mA。Therefore, it can be clearly understood from the spectra of FIG. 2 to FIG. 7 that the white light emitting diode of the present invention can indeed produce white light to provide a high-quality light source, and can be applied to a backlight source for a display or a general lighting source. In order to further show the specific performance of the above-mentioned white light emitting diode with a fluorescent layer of the present invention, please refer to the photos shown in Figure 8 and Figure 9, wherein Figure 8 is a fluorescent layer containing 10% indium terbium oxide (that is, the ratio of indium oxide to terbium 90:10) of a GaN white light emitting diode emitting white light, and Figure 9 is a photo of a GaN white light emitting diode containing 20% indium terbium oxide fluorescent layer (that is, the ratio of indium oxide to terbium is 80:20) emitting white light , and the conduction current is 20mA.
以上所述者仅为用以解释本发明的较佳实施例,并非企图据以对本发明做任何形式上的限制,因此,凡有在相同的发明原理下所作有关本发明的任何修饰或变更,皆仍应包括在本发明意图保护的范畴。The above are only preferred embodiments for explaining the present invention, and are not intended to limit the present invention in any form. Therefore, any modification or change of the present invention made under the same principle of the invention, All should still be included in the category that the present invention intends to protect.
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| JP2019537255A (en) * | 2016-11-22 | 2019-12-19 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | Method of manufacturing at least one optoelectronic semiconductor component and optoelectronic semiconductor component |
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