CN102789143A - Exposure machine target image alignment device and exposure machine using the device - Google Patents

Abstract

A target image alignment device of an exposure machine and the exposure machine using the device, the target image alignment device of the exposure machine is provided with more than one pair of photographic lens and alignment light source on a translation transfer unit, and the photographic lens and the alignment light source are transferred to and fro above an exposure frame which is parked above the alignment device by the translation transfer unit; an exposure machine using a translation type target image alignment device, comprising: an alignment device; an exposure device; the upper and lower exposure frames are alternatively shifted and parked relative to the alignment device and the exposure device; the jacking device jacks the lower exposure frame in the parking state to the same height as the upper exposure frame; and a target image alignment device, wherein more than one pair of photographic lens and alignment light source are arranged on a translation transfer unit, and the photographic lens and the alignment light source are transferred to the upper part of an exposure frame which is positioned above the alignment device in a reciprocating way by the translation transfer unit. The invention has the effects that the camera lens and the alignment light source do not shake in the moving process and the two exposure frames receive the exposure energy with the same intensity.

Description

Exposure machine target image alignment device and exposure machine using the device

technical field

The invention relates to a design for translational transfer of a photographic lens and an alignment light source through a sliding seat arranged on a slide rail, so that the transfer process is very stable and does not shake, and particularly relates to an exposure machine target image alignment device and an exposure machine using the device.

Background technique

As shown in Figures 1 to 3, an exposure machine is usually provided with two exposure frames 10a, 10b, which are alternately displaced relative to the alignment device 20 and the exposure device 30, so that one exposure frame 10a is aligned The positioning device 20 performs the alignment procedure, and the other exposure frame 10b is subjected to the exposure procedure by the exposure device 30, so that the alignment procedure and the exposure procedure can be alternately performed; however, the workpiece must be borrowed before the exposure procedure is performed by the exposure device 30. The alignment device 20 is aligned relative to the film to obtain better exposure quality. In addition to the quality of the target recognition algorithm, the image quality of the target is another important factor for the alignment accuracy between the workpiece and the film.

Secondly, the traditional exposure machine target image alignment device 40 is arranged above the alignment device 20 of the exposure machine, and the target image alignment device 40 sets more than one pair of photographic lenses 41 and alignment light sources 42 on one Lifting and transferring unit 43; wherein, the target image alignment device 40 must make the photographic lens 41 and the alignment light source 42 descend close to the workpiece surface placed on the exposure frame 10a or 10b before performing the alignment procedure, so as to obtain Better target image alignment quality; but because the target image alignment device 40 is located at the high center of gravity of the entire exposure machine, the photographic lens 41 and the alignment light source 42 will be lowered The process produces serious shaking, and the shaking is very unfavorable to the alignment process. It is necessary to wait for the shaking to stop naturally before the alignment process can be carried out, thus affecting the production speed.

Again, because the photographing lens 41 and the alignment light source 42 of the aforementioned target image alignment device 40 can have different lifting strokes relative to the upper and lower exposure frames 10a, 10b, the two exposure frames 10a, 10b are then set at different heights , but the exposure frames 10a and 10b of different heights will receive different intensities of exposure energy during the exposure process, resulting in uneven exposure.

Contents of the invention

The main technical problem to be solved by the present invention is to overcome the above-mentioned defects in the prior art, and provide an exposure machine target image alignment device and an exposure machine using the device, which has a photographic lens and an alignment light source in the moving process It has the effect of not shaking, and has the effect of making the two exposure frames of the exposure machine receive the same intensity of exposure energy.

The technical solution adopted by the present invention to solve its technical problems is:

The structural feature of a target image alignment device of an exposure machine is that more than one pair of photographic lenses and alignment light sources are arranged on a translational transfer unit, and the photographic lens and alignment light source are reciprocally transferred by the translational transfer unit To stop above the exposure frame above the alignment device.

In the aforementioned exposure machine target image alignment device, the distance from the front edge of the photographic lens to the surface of the workpiece placed on the exposure frame is between 50 mm and 150 mm.

In the above-mentioned exposure machine target image alignment device, wherein the translation transfer unit is provided with a first axial slide rail parallel to the displacement direction of the exposure frame, and a first axis is provided on the first axial slide rail. to the sliding seat, and the second axial sliding seat is provided on the first axial sliding seat, and the second axial sliding seat is provided on the second axial sliding seat, and the second axial sliding seat is provided for The photographic lens and alignment light source settings.

Furthermore, the structural features of the exposure machine of the present invention include: an alignment device; an exposure device; upper and lower exposure frames, which alternately shift and stop relative to the alignment device and the exposure device; a jacking device, which The lower exposure frame in the parked state is lifted to the same height as the upper exposure frame; and a target image alignment device is used to set more than one pair of photographic lenses and alignment light sources on a translation transfer unit, and by the The translation transfer unit reciprocates and transfers the photographic lens and alignment light source to the exposure frame above the alignment device.

In addition, the distance from the front edge of the photographic lens to the surface of the workpiece placed in the exposure frame is between 50mm and 150mm. Also, the translation transfer unit is provided with a first axial slide rail parallel to the displacement direction of the exposure frame, and a first axial slide seat is provided on the first axial slide rail, and a first axial slide seat is arranged on the first axial slide rail. A second axial sliding rail is arranged on the axial sliding seat, and a second axial sliding seat is arranged on the second axial sliding rail, and the second axial sliding seat is provided for the photographic lens and alignment light source.

The beneficial effect of the present invention is that it has the effect of not shaking the photographic lens and the alignment light source during the moving process, and has the effect of allowing the two exposure frames of the exposure machine to receive the same intensity of exposure energy.

Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

FIG. 1 is an explanatory diagram of the operating state of a conventional exposure machine.

Fig. 2 is the second explanatory diagram of the operating state of the conventional exposure machine.

Fig. 3 is the third explanatory diagram of the operating state of the conventional exposure machine.

Fig. 4 is an explanatory diagram 1 of the operating state of the present invention.

Fig. 5 is the second explanatory diagram of the operating state of the present invention.

Fig. 6 is an explanatory diagram 3 of the action state of the present invention.

Explanation of symbols in the figure:

10a, 10b exposure frame

20 alignment device

30 exposure device

40, 50 target image alignment device

41, 51 photography lens

42, 52 alignment light source

43 Lifting and transferring unit

53 translation transfer unit

531 first axial slide rail

532a, 532b first axial sliding seat

533a, 533b second axial slide rail

534a, 534b second axial sliding seat

60 jacking device

Detailed ways

First, please refer to FIGS. 4 to 6, the exposure machine target image alignment device 50 of the present invention is to install more than one pair of photographic lenses 51 and alignment light sources 52 on a translation transfer unit 53, the translation The transfer unit 53 reciprocally transfers the photographic lens 51 and the alignment light source 52 to the top of the exposure frames 10a, 10b parked above the alignment device 20 to capture target images, and the front edge of the photographic lens 51 reaches The preferred distance from the surface of the workpiece placed on the exposure frame is about 50-150 mm.

Furthermore, the translation transfer unit 53 is provided with a first axial slide rail 531 parallel to the displacement direction of the exposure frames 10a and 10b, and a first axial slide rail 531 is provided on the first axial slide rail 531. seat 532a, 532b, and the second axial slide rail 533a, 533b is provided on the first axial slide seat 532a, 532b, and the second axial slide rail is provided on the second axial slide rail 533a, 533b. seats 534a, 534b, and the second axial sliding seats 534a, 534b are provided for the photographic lens 51 and the alignment light source 52, and the photographic lens 51 and the alignment light source 52 slide along the first axial sliding seats 532a, 532b moved, and reciprocally transferred to above the exposure frames 10a, 10b parked above the alignment device 20 .

In addition, the exposure machine of the present invention includes: a positioning device 20; an exposure device 30; upper and lower exposure frames 10a, 10b, which alternately shift and stop relative to the positioning device 20 and the exposure device 30; Device 60, lifts the lower exposure frame 10b in the parked state to the same height as the upper exposure frame 10a; A translational transfer unit 53 , and the photographic lens 51 and alignment light source 52 are reciprocally transferred by the translational transfer unit 53 to above the exposure frames 10 a , 10 b parked above the alignment device 20 .

According to the above structure, the exposure machine target image alignment device 50 of the present invention uses the translation transfer unit 53 to reciprocally transfer the photographic lens 51 and the alignment light source 52 to the exposure frame 10a parked above the alignment device 20 , 10b above, used to capture the target image, and the photographic lens 51 and alignment light source 52 are transferred by the first axial sliding seats 532a, 532b arranged on the first axial sliding rail 531, so they move The loading process is very stable, and it has the effect that the camera lens and the alignment light source do not shake during the moving process.

In addition, two exposure frames 10a, 10b, up and down, are usually installed in one exposure machine. In order to make the two exposure frames 10a, 10b have the same target image quality, the lower exposure The frame 10b is jacked up to the same height as the upper exposure frame 10a, and then the process of capturing the target image and alignment is carried out; and the action of lifting the lower exposure frame 10b to the same height as the upper exposure frame 10a is also It can be applied to the exposure program, and has the effect of making the two exposure frames of the exposure machine receive the same intensity of exposure energy.

The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still belong to within the scope of the technical solutions of the present invention.

In summary, the present invention fully meets the needs of industrial development in terms of structural design, practicability and cost-effectiveness, and the disclosed structure also has an unprecedented innovative structure, novelty, creativity and practicability, and meets the requirements of relevant According to the requirements of the invention patent requirements, the application is filed according to law.

Claims (6)

1. An exposure machine target image alignment device, characterized in that more than a pair of photographic lenses and alignment light sources are arranged on a translation transfer unit, and the photographic lens and the alignment unit are reciprocally transferred by the translation transfer unit The alignment light source is parked above the exposure frame above the alignment device. 2 . The target image alignment device of an exposure machine according to claim 1 , wherein the distance from the front edge of the photographic lens to the surface of the workpiece placed in the exposure frame is between 50 mm and 150 mm. 3 . 3. The target image alignment device of an exposure machine according to claim 1 or 2, wherein the translational transfer unit is provided with a first axial slide rail parallel to the displacement direction of the exposure frame, and A first axial sliding seat is arranged on the first axial sliding rail, a second axial sliding rail is arranged on the first axial sliding seat, and a second axial sliding seat is arranged on the second axial sliding rail. Two axial sliding seats, the second axial sliding seat is provided for the photographic lens and alignment light source. 4. An exposure machine of a target image alignment device as claimed in claim 1, characterized in that, comprising: a pair of alignment devices; an exposure device; The upper and lower exposure frames are alternately shifted and parked relative to the alignment device and the exposure device; A jacking device, which lifts the lower exposure frame in the parked state to the same height as the upper exposure frame; A target image alignment device, which sets more than one pair of photographic lenses and alignment light sources on a translation transfer unit, and uses the translation transfer unit to reciprocally transfer the photographic lenses and alignment light sources to the pair of above the exposure frame above the bit device. 5 . The exposure machine according to claim 4 , wherein the distance from the front edge of the photographic lens to the surface of the workpiece placed in the exposure frame is between 50 mm and 150 mm. 6. The exposure machine according to claim 4 or 5, characterized in that, the translational transfer unit is provided with a first axial slide rail parallel to the displacement direction of the exposure frame, and in the first axial direction A first axial slide seat is provided on the slide rail, a second axial slide rail is provided on the first axial slide seat, and a second axial slide seat is provided on the second axial slide rail, The second axial sliding seat is provided for the photographic lens and alignment light source.

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