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CN102864476B - Preparation method of through-hole anodic aluminum oxide template - Google Patents

Preparation method of through-hole anodic aluminum oxide template Download PDF

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CN102864476B
CN102864476B CN201210375745.7A CN201210375745A CN102864476B CN 102864476 B CN102864476 B CN 102864476B CN 201210375745 A CN201210375745 A CN 201210375745A CN 102864476 B CN102864476 B CN 102864476B
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aluminum foil
hole
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aluminum oxide
anodic oxidation
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CN102864476A (en
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宋晔
朱绪飞
蒋龙飞
杨斌
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Abstract

The invention discloses a preparation method directly producing a barrier-free through-hole anodic aluminum oxide template during anodizing. According to extensibility of metallic aluminum and the diffusion principle of intermetallic interface, double aluminum foil layers are laminated by pressurizing. The first aluminum foil layer is completely oxidized by single-side anodizing and reaches the second aluminum foil layer, so that a fully through-hole first porous anodic aluminum oxide film. The aluminum oxide template with 100% through holes can be obtained by the preparation method, and the need of using complex post-treatment process to remove a barrier layer is avoided. Through-hole time points can be precisely positioned according to anodizing curves. The thickness of the through-hole aluminum oxide template can be controlled by regulating thickness of the first aluminum foil layer or by double anodizing. The preparation method is applicable to the process of mild anodizing and high-field anodizing of aluminum foils in various aqueous electrolytes.

Description

一种通孔阳极氧化铝模板的制备方法A kind of preparation method of through-hole anodized aluminum template

技术领域 technical field

本发明属于电化学技术领域,涉及一种通孔的多孔阳极氧化铝模板的制备方法,具体涉及一种无需特殊后处理,仅通过单面阳极氧化双层复合铝箔,从而得到不带阻挡层的通孔阳极氧化铝模板的简易电化学制备方法。 The invention belongs to the technical field of electrochemistry, and relates to a method for preparing a through-hole porous anodized aluminum template, in particular to a method for obtaining a double-layer composite aluminum foil without a barrier layer by only anodizing on one side without special post-treatment. Facile electrochemical preparation of through-hole anodized alumina templates.

背景技术 Background technique

多孔阳极氧化铝(PAA)是一类在适当的电解液中通过电化学阳极氧化得到的,具有规则孔道排布且元胞呈六棱柱密堆积的多孔材料。PAA作为纳米模板材料,具有制备工艺简单、孔密度高、长径比大、孔道排布规则、孔径大小可控等特点,被广泛应用于金属、合金、非金属、非金属氧化物、聚合物等各类材料的低维纳米结构的制备,在非线性光学、纳电子学、电化学等众多领域都具有广阔的应用前景。 Porous anodized aluminum (PAA) is a kind of porous material obtained by electrochemical anodization in a suitable electrolyte, with regular pore arrangement and hexagonal close-packed cells. As a nano-template material, PAA has the characteristics of simple preparation process, high pore density, large aspect ratio, regular pore arrangement, and controllable pore size. It is widely used in metals, alloys, non-metals, non-metal oxides, polymers, etc. The preparation of low-dimensional nanostructures of various materials has broad application prospects in many fields such as nonlinear optics, nanoelectronics, and electrochemistry.

就PAA模板的应用而言,大多数情况下需要通孔模板。然而,由于在PAA膜的多孔层底部存在一层致密的氧化铝阻挡层,欲得到通孔的PAA模板必须设法去除这层阻挡层。目前,制备通孔PAA模板的通用方法是:首先采用CuCl2、HgCl2或者SnCl4溶液将制备好的PAA膜底部的铝基体腐蚀溶解掉,得到纯PAA膜;再将其浸泡在磷酸溶液中,通过化学腐蚀法去除PAA膜的阻挡层,最终得到通孔的PAA模板。然而,这种方法在去除铝基体的过程中,不可避免地会在纳米孔洞内带入一些重金属杂质,这可能对模板的应用带来限制。另外,磷酸溶液去除阻挡层的化学腐蚀过程不可控,且PAA膜浸泡在磷酸溶液中孔道亦受到腐蚀,因此此法制备的通孔PAA模板会发生不同程度的扩孔。另一种去除PAA膜阻挡层的方法是所谓的阶梯降压法:根据阻挡层厚度与电压呈正比的原理,通过逐步降低阳极氧化电压,使阻挡层逐步减薄,直至通孔。Furneaux等最早报道了通过阶梯降压法,使磷酸溶液中制备的PAA膜通孔(Furneaux, et al. Nature, 1989, 337: 147)。但该方法必须严格控制降压幅值、电解液温度等工艺参数,整个降压过程十分复杂,耗时较长,并且很难保证阻挡层100%穿孔。因此,多数情况下,仍需要再用磷酸溶液浸泡处理以得到完全通孔的PAA模板。 As far as the application of PAA stencil is concerned, through-hole stencil is required in most cases. However, since there is a dense alumina barrier layer at the bottom of the porous layer of the PAA film, the PAA template to obtain through holes must try to remove this barrier layer. At present, the general method for preparing through-hole PAA templates is: first, use CuCl 2 , HgCl 2 or SnCl 4 solution to corrode and dissolve the aluminum substrate at the bottom of the prepared PAA film to obtain a pure PAA film; then soak it in phosphoric acid solution , remove the barrier layer of the PAA film by chemical etching, and finally obtain the PAA template of the through hole. However, this method will inevitably bring some heavy metal impurities into the nanopores during the process of removing the aluminum matrix, which may limit the application of the template. In addition, the chemical corrosion process of the phosphoric acid solution to remove the barrier layer is uncontrollable, and the pores of the PAA film soaked in the phosphoric acid solution are also corroded, so the through-hole PAA template prepared by this method will have different degrees of hole expansion. Another method to remove the barrier layer of PAA film is the so-called step-down method: according to the principle that the thickness of the barrier layer is proportional to the voltage, the barrier layer is gradually thinned until the through hole is reached by gradually reducing the anodic oxidation voltage. Furneaux et al. first reported that the PAA membrane prepared in phosphoric acid solution was perforated by step-down method (Furneaux, et al. Nature, 1989, 337: 147). However, this method must strictly control process parameters such as step-down amplitude and electrolyte temperature. The entire step-down process is very complicated and time-consuming, and it is difficult to ensure 100% perforation of the barrier layer. Therefore, in most cases, it is still necessary to soak in a phosphoric acid solution to obtain a completely through-hole PAA template.

制备PAA通孔模板还有一种较简便的电化学方法:在高氯酸/甲醇混合液中,以样片为阳极,大面积铝片为阴极,在直流电压下通电很短时间,即可获得较大面积的通孔PAA模板(Yuan, et al. Chem. Mater., 2004, 16: 1841)。但该法对PAA膜层厚度和性质均有要求,且PAA膜阻挡层一侧开孔尺寸很难控制,操作难度很大,电解液不环保,膜孔的形貌尺寸可能有所破坏。 There is also a relatively simple electrochemical method for preparing PAA through-hole templates: in the perchloric acid/methanol mixture, the sample is used as the anode, and the large-area aluminum sheet is used as the cathode. Large-area through-hole PAA template (Yuan, et al. Chem. Mater., 2004, 16: 1841). However, this method has requirements on the thickness and properties of the PAA film layer, and it is difficult to control the size of the openings on one side of the barrier layer of the PAA film, the operation is very difficult, the electrolyte is not environmentally friendly, and the shape and size of the film pores may be damaged.

综上所述,目前制备PAA通孔模板的方法,存在各种缺陷,如:重金属杂质污染、去除阻挡层工艺复杂、耗时长、开孔尺寸难以控制和电解液不环保等。因此,寻找一种简便高效地制备PAA通孔模板,且不破坏膜的固有结构和尺寸,同时适用于不同厚度PAA膜的方法,成为迫切需要解决的难点问题。 In summary, the current methods for preparing PAA through-hole templates have various defects, such as: heavy metal impurity contamination, complex and time-consuming process for removing barrier layers, difficulty in controlling the size of openings, and unenvironmental protection of the electrolyte. Therefore, finding a simple and efficient way to prepare PAA through-hole templates without destroying the inherent structure and size of the film, and being applicable to PAA films with different thicknesses, has become an urgent and difficult problem to be solved.

发明内容 Contents of the invention

本发明的目的在于提供一种不需要特别后处理,在阳极氧化过程中直接制备出通孔PAA模板的方法。 The purpose of the present invention is to provide a method for directly preparing through-hole PAA templates in the anodic oxidation process without special post-treatment.

实现本发明目的的技术解决方案为:一种通孔阳极氧化铝模板的制备方法,包括以下步骤: The technical solution for realizing the purpose of the present invention is: a method for preparing a through-hole anodized aluminum template, comprising the following steps:

步骤1、去除高纯铝箔表面的天然氧化膜; Step 1. Remove the natural oxide film on the surface of high-purity aluminum foil;

步骤2、对相叠的两片高纯铝箔进行加压复合,加压压力为5-10 MPa,保压时间为30-60 min; Step 2. Pressurize and compound the stacked two pieces of high-purity aluminum foil, the pressurized pressure is 5-10 MPa, and the pressure holding time is 30-60 min;

步骤3、对复合的高纯铝箔进行单面阳极氧化; Step 3, performing single-sided anodic oxidation on the composite high-purity aluminum foil;

步骤4、当阳极氧化曲线上的电压出现突变后,则将恒流阳极氧化的电流减半,或当阳极氧化曲线上的电流出现突变后,则维持恒压阳极氧化的电压不变,再继续氧化半小时后结束; Step 4. When the voltage on the anodizing curve changes suddenly, the current of constant-current anodizing is halved, or when the current on the anodizing curve changes suddenly, the voltage of constant-voltage anodizing remains unchanged, and then continue Oxidation ends after half an hour;

步骤5、最后,通过机械剥离即获得完全通孔的PAA模板。 Step 5. Finally, a fully through-hole PAA template is obtained by mechanical stripping.

步骤1中所述的去除天然氧化膜是将铝箔浸入70℃的2wt %的氢氧化钠溶液中2分钟。 The removal of the natural oxide film described in step 1 is to immerse the aluminum foil in a 2wt% sodium hydroxide solution at 70°C for 2 minutes.

步骤2中所述的加压是采用油压机。 The pressurization described in step 2 adopts a hydraulic press.

步骤3中所述的被单面阳极氧化的复合铝箔的适宜厚度为20-150 μm。 The suitable thickness of the single-side anodized composite aluminum foil described in step 3 is 20-150 μm.

步骤3中所述的单面阳极氧化可采用温和阳极氧化或高场阳极氧化。 The one-sided anodizing described in step 3 can adopt mild anodizing or high field anodizing.

步骤3中所述的单面阳极氧化可采用一次阳极氧化或二次阳极氧化。 The single-sided anodizing described in step 3 can adopt primary anodizing or secondary anodizing.

本发明与现有技术相比,其显著优点: Compared with the prior art, the present invention has significant advantages:

(1)第一层铝箔完全氧化并过渡到第二层铝箔后,阻挡层随之转移至第二层铝箔,通过机械剥离,使第一层PAA膜脱离,直接得到通孔状态的PAA模板,无需考虑阻挡层的去除问题。 (1) After the first layer of aluminum foil is completely oxidized and transitioned to the second layer of aluminum foil, the barrier layer is then transferred to the second layer of aluminum foil, and the first layer of PAA film is detached by mechanical peeling, and the PAA template in the through-hole state is directly obtained. There is no need to consider the removal of the barrier layer.

(2)由于不需要考虑PAA膜阻挡层的去除问题,因此制备通孔PAA模板的时间只是由阳极氧化的时间决定,制备效率明显提高。 (2) Since there is no need to consider the removal of the barrier layer of the PAA film, the time for preparing the through-hole PAA template is only determined by the anodic oxidation time, and the preparation efficiency is significantly improved.

(3)由于不需要考虑PAA膜阻挡层的去除问题,因此制备完成后,所得PAA模板的孔道与制备时的状态完全一致,不存在扩孔、过度腐蚀等问题,从而实现PAA模板纳米孔道尺寸的精确控制。 (3) Since there is no need to consider the removal of the PAA film barrier layer, after the preparation is completed, the pores of the obtained PAA template are completely consistent with the state of the preparation, and there are no problems such as pore expansion and excessive corrosion, so as to realize the nanopore size of the PAA template. precise control.

(4)通过调节第一层铝箔的厚度,或采用二次阳极氧化方法,可以制备厚度在较大范围内变化的PAA通孔模板。 (4) By adjusting the thickness of the first layer of aluminum foil, or using the secondary anodizing method, PAA through-hole templates with a thickness varying in a wide range can be prepared.

(5)通过观察PAA膜制备过程中阳极氧化参数的变化状态,可以半定量地确定PAA膜的通孔状态,从而及时了解通孔程度及控制通孔时间,避免了纯经验式的去除阻挡层的腐蚀工艺。 (5) By observing the change state of the anodic oxidation parameters during the PAA film preparation process, the through-hole state of the PAA film can be determined semi-quantitatively, so as to understand the degree of through-hole and control the through-hole time in time, avoiding the pure empirical removal of the barrier layer corrosion process.

(6)由于通孔PAA模板是一步直接获得,且不与铝基体相连,因此无需用化学试剂处理铝基体,节省了资源,同时避免了PAA模板污染和环境污染,有利于工业化生产。 (6) Since the through-hole PAA template is directly obtained in one step and is not connected to the aluminum substrate, there is no need to treat the aluminum substrate with chemical reagents, which saves resources and avoids PAA template pollution and environmental pollution, which is conducive to industrial production.

(7)采用本发明的方法在硫酸、草酸和磷酸三类PAA制备体系中均可采用,且同时适用于温和阳极氧化及高场阳极氧化,另外也适用于二次阳极氧化。 (7) The method of the present invention can be used in three types of PAA preparation systems including sulfuric acid, oxalic acid and phosphoric acid, and is suitable for both mild anodic oxidation and high-field anodic oxidation, and is also suitable for secondary anodic oxidation.

附图说明 Description of drawings

图1是本发明实施例1复合双层铝箔的单面恒流阳极氧化曲线图。 Fig. 1 is a single-side constant current anodic oxidation curve diagram of a composite double-layer aluminum foil in Example 1 of the present invention.

图2是实施例1制备的PAA通孔模板的扫描电镜图(a为PAA通孔模板的底面SEM图,b为是PAA通孔模板的断面靠近底部区域的SEM图)。 2 is a scanning electron microscope image of the PAA through-hole template prepared in Example 1 (a is the SEM image of the bottom surface of the PAA through-hole template, and b is the SEM image of the section near the bottom of the PAA through-hole template).

图3是实施例3制备的PAA通孔模板断面的金相显微镜图。 FIG. 3 is a metallographic microscope image of a section of a PAA through-hole template prepared in Example 3. FIG.

具体实施方式 Detailed ways

下面结合附图对本发明作进一步详细描述。 The present invention will be described in further detail below in conjunction with the accompanying drawings.

本发明的原理如下:采用加压复合双层铝箔,通过单面阳极氧化过程,使第一层铝箔(即被单面阳极氧化的铝箔)完全氧化,并过渡到第二层铝箔,从而得到完全通孔的第一层多孔阳极氧化铝膜。铝是一种延展性极佳的金属,将两片铝箔贴合后,在外力作用下,两层铝箔的界面处发生挤压延展,在微观上产生相互锚链、嵌入等物理过程,从而使两层铝箔复合;随着外力作用的持续,已经复合的两层铝箔界面处,彼此之间的原子开始相互扩散,界面开始变得模糊,经过一段时间后即形成了一个原子扩散混合的过渡区域,由于金属原子间的相互作用远高于纯粹的物理作用,因此两层铝箔之间的作用力强度进一步增加,这也确保了阳极氧化过程能从第一层铝箔过渡至第二层铝箔。由于该发明采用单面阳极氧化的方式,铝箔氧化具有方向性,即从第一层氧化至第二层。在氧化初始阶段,与传统的单片铝箔阳极氧化过程无异。但到了接近两层铝箔交界区域时,由于单层铝箔整体的厚度在微观上是不均匀的,同时阳极氧化过程中电场的分布也会有所差异,所以必定导致某些位置率先发生过渡至第二层铝箔的阳极氧化。由于过渡区域原子排布处于无序状态,因此原子间作用力要弱于铝箔本体,当两层铝箔界面处过渡区域被完全阳极氧化并继续氧化第二层铝箔的本体时,由于铝阳极氧化过程会发生体积膨胀,使界面处应力急剧提高,导致该区域的PAA膜在界面过渡区位置发生断裂,从而得到通孔的膜。而断裂发生后,电解液快速渗透断裂层,到达断裂处露出的金属铝层,此时对阳极氧化参数产生较大影响,因此通过观察阳极氧化参数的变化,可以确定断裂开始的时间点。即当阳极氧化曲线上的电压出现突变后,则将恒流阳极氧化的电流减半,或当阳极氧化曲线上的电流出现突变后,则维持恒压阳极氧化的电压不变,为了确保阳极氧化完全过渡到第二层,再继续氧化半小时后结束。 The principle of the present invention is as follows: the first layer of aluminum foil (that is, the aluminum foil that has been anodized on one side) is completely oxidized by using a pressurized composite double-layer aluminum foil through the single-sided anodic oxidation process, and transitions to the second layer of aluminum foil, thereby obtaining complete The first layer of porous anodized aluminum oxide membrane for through holes. Aluminum is a metal with excellent ductility. After laminating two pieces of aluminum foil, under the action of external force, the interface of the two layers of aluminum foil will be extruded and extended, and physical processes such as mutual anchoring and embedding will occur on the microscopic level, so that Two layers of aluminum foil are composited; as the external force continues, the atoms between the two layers of aluminum foil that have been composited begin to diffuse each other, and the interface begins to become blurred. After a period of time, a transition zone of atomic diffusion and mixing is formed. , Since the interaction between metal atoms is much higher than the purely physical interaction, the strength of the force between the two layers of aluminum foil is further increased, which also ensures that the anodizing process can transition from the first layer of aluminum foil to the second layer of aluminum foil. Since the invention adopts a single-sided anodic oxidation method, the oxidation of the aluminum foil has directionality, that is, from the first layer to the second layer. In the initial stage of oxidation, it is no different from the traditional single-piece aluminum foil anodizing process. However, when approaching the junction area of the two layers of aluminum foil, since the overall thickness of the single-layer aluminum foil is microscopically inhomogeneous, and the distribution of the electric field during the anodic oxidation process will also be different, it must lead to some positions taking the lead in the transition to the first Anodizing of two layers of aluminum foil. Since the atomic arrangement in the transition region is in a disordered state, the interatomic force is weaker than that of the main body of the aluminum foil. When the transition region at the interface of the two layers of aluminum foil is completely anodized and continues to oxidize the body of the second layer of aluminum foil, due to the aluminum anodic oxidation process Volume expansion will occur, causing the stress at the interface to increase sharply, causing the PAA film in this area to break at the interface transition zone, thereby obtaining a through-hole film. After the fracture occurs, the electrolyte quickly penetrates the fracture layer and reaches the metal aluminum layer exposed at the fracture, which has a great impact on the anodic oxidation parameters. Therefore, by observing the changes in the anodic oxidation parameters, the time point at which the fracture begins can be determined. That is, when the voltage on the anodizing curve changes suddenly, the current of constant current anodizing is halved, or when the current on the anodizing curve changes suddenly, the voltage of constant voltage anodizing remains unchanged. Complete transition to the second layer, and continue to oxidize for half an hour before ending.

本发明是通过以下步骤实现的:采用高纯铝箔,首先将两片铝箔浸入70℃的2wt %的氢氧化钠溶液中2分钟,去除其表面的天然氧化膜。再将两片铝箔重叠贴合,固定于模具中,并预留一段相互分离的铝箔在模具外,然后将模具放入油压机中,工作压力为5-10 MPa,保压时间为30-60 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以第一层铝箔一侧作为阳极,再以铂网作为阴极,进行单面阳极氧化。第一层铝箔的适宜厚度范围为20-150 μm。电解液可采用硫酸、草酸或磷酸的水溶液,电源模式可采用恒压或者恒流,阳极氧化类型可以是温和阳极氧化或者高场阳极氧化。实时测定阳极氧化曲线,在阳极氧化参数发生明显变化时,将电流降为原来的一半(对于恒流阳极氧化)或维持电压不变(对于恒压阳极氧化)并维持半小时。然后停止阳极氧化,用刀片从未粘合的区域切入,使双层铝箔分离,最终得到通孔PAA模板。 The present invention is realized through the following steps: using high-purity aluminum foil, first immerse two pieces of aluminum foil in 2wt% sodium hydroxide solution at 70°C for 2 minutes to remove the natural oxide film on the surface. Then overlap two pieces of aluminum foil, fix them in the mold, and reserve a piece of separated aluminum foil outside the mold, then put the mold into the hydraulic press, the working pressure is 5-10 MPa, and the holding time is 30-60 min . Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, use the side of the first layer of aluminum foil as the anode, and then use the platinum mesh as the cathode to perform single-sided anodic oxidation. The suitable thickness range of the first layer of aluminum foil is 20-150 μm. The electrolyte can be an aqueous solution of sulfuric acid, oxalic acid or phosphoric acid, the power supply mode can be constant voltage or constant current, and the anodic oxidation type can be mild anodic oxidation or high field anodic oxidation. Measure the anodic oxidation curve in real time, and when the anodic oxidation parameters change significantly, reduce the current to half (for constant current anodic oxidation) or keep the voltage constant (for constant voltage anodic oxidation) for half an hour. Then stop the anodizing, and use a blade to cut into the unbonded area to separate the double-layer aluminum foil, and finally get the through-hole PAA template.

下面通过实施例进一步说明本发明。 The present invention is further illustrated below by way of examples.

实施例1 Example 1

首先取两条纯度99.99%、长度70 mm、宽度20 mm、厚度150 μm的铝箔条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压10 MPa,并维持30 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度(高场阳极氧化),在恒定温度20 °C下,进行单面恒流阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止,具体测试曲线见图1。所得样品的微观形貌如图2所示。图2(a)是所制得的PAA通孔模板即第一层铝箔完全阳极氧化后的底面SEM图,可观察到规整排列的已经完全通孔的模板底部,PAA膜纳米孔道的平均孔间距约为120 nm。图2(b)是第一层氧化铝膜的断面靠近底部区域的SEM图,可看出孔道笔直且完全通孔。通过样品断面的金相显微镜照片,可以测得PAA通孔模板的厚度约211.46 μm。 First, two aluminum foil strips with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm were taken and soaked in 2 wt% NaOH solution at 70 ° C for 2 min to remove the natural oxide film on the surface of the aluminum foil. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 10 MPa, and maintained for 30 min. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, and use it as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 (high-field anodization). The oxidation time is determined by measuring the change of voltage in real time. When the voltage rises rapidly, the current is halved and stopped after 30 min. The specific test curve is shown in Figure 1. The microscopic morphology of the obtained samples is shown in Fig. 2. Figure 2(a) is the SEM image of the bottom surface of the prepared PAA through-hole template, that is, the first layer of aluminum foil after complete anodization. It can be observed that the bottom of the template that has been completely through-holed in a regular arrangement, and the average pore spacing of the PAA membrane nanopores About 120nm. Figure 2(b) is the SEM image of the cross section of the first layer of aluminum oxide film near the bottom area, it can be seen that the channel is straight and completely through the hole. Through the metallographic microscope photos of the sample cross-section, the thickness of the PAA through-hole template can be measured to be about 211.46 μm.

实施例2 Example 2

首先取两条纯度99.99%、长度70 mm、宽度20 mm、厚度150 μm的铝箔条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压5 MPa,并维持60 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度,在恒定温度20 °C下,进行单面恒流阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止。PAA膜纳米孔道的平均孔间距约为117 nm,PAA通孔模板的厚度约218.25 μm。 First, two aluminum foil strips with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm were taken and soaked in 2 wt% NaOH solution at 70 ° C for 2 min to remove the natural oxide film on the surface of the aluminum foil. Two pieces of aluminum foil were overlapped and fixed in the mold, then the mold was put into the hydraulic press, pressurized at 5 MPa, and maintained for 60 min. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, and use it as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 . The oxidation time was determined by measuring the change of the voltage in real time. When the voltage rose rapidly, the current was halved and kept for 30 min before stopping. The average pore spacing of the PAA membrane nanochannels is about 117 nm, and the thickness of the PAA through-hole template is about 218.25 μm.

实施例3 Example 3

首先取纯度99.99%、长度70 mm、宽度20 mm,厚度分别为150 μm和100 μm的铝箔条各一条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压10 MPa,并维持30 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以厚度100 μm的铝箔一侧作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度,在恒定温度20 °C下,进行单面恒流阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止。图3是该样品断面的金相显微镜照片,通过图可知,PAA通孔模板的厚度约111.59 μm。 First, take a strip of aluminum foil with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm and 100 μm, and soak it in 2 wt% NaOH solution at 70 ° C for 2 min to remove the aluminum foil surface. natural oxide film. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 10 MPa, and maintained for 30 min. Then take out the bonded double-layer composite aluminum foil, rinse it repeatedly with deionized water, use the side of the aluminum foil with a thickness of 100 μm as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 . The oxidation time was determined by measuring the change of the voltage in real time. When the voltage rose rapidly, the current was halved and kept for 30 min before stopping. Figure 3 is a metallographic microscope photo of the cross-section of the sample. It can be seen from the figure that the thickness of the PAA through-hole template is about 111.59 μm.

实施例4 Example 4

首先取纯度99.99%、长度70 mm、宽度20 mm,厚度分别为150 μm和50 μm的铝箔条各一条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压7.5 MPa,并维持45 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以厚度50 μm的铝箔一侧作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度,在恒定温度20 °C下,进行单面恒流阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止。测得PAA通孔模板的厚度约60.38 μm。 First, take a strip of aluminum foil with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm and 50 μm, and soak it in 2 wt% NaOH solution at 70 ° C for 2 min to remove the aluminum foil surface. natural oxide film. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 7.5 MPa, and maintained for 45 minutes. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, use the side of the aluminum foil with a thickness of 50 μm as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 . The oxidation time was determined by measuring the change of the voltage in real time. When the voltage rose rapidly, the current was halved and kept for 30 min before stopping. The thickness of the PAA through-hole template was measured to be about 60.38 μm.

实施例5 Example 5

首先取两条纯度99.99%、长度70 mm、宽度20 mm、厚度150 μm的铝箔条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压10 MPa,并维持30 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度,在恒定温度20 °C下,进行单面恒流第一次阳极氧化。在反应1 h之后停止阳极氧化,确保第一层铝箔未完全氧化,将样品放入60 °C的1.8 wt% HCrO4 和 6 wt% H3PO4混合液中浸泡10 h,以去除第一次氧化膜。再以该样品为阳极,以第一次阳极氧化的条件进行第二次阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止。测得PAA通孔模板的厚度约20.32 μm。 First, two aluminum foil strips with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm were taken and soaked in 2 wt% NaOH solution at 70 ° C for 2 min to remove the natural oxide film on the surface of the aluminum foil. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 10 MPa, and maintained for 30 min. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, and use it as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, and at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 , the first anodic oxidation was carried out on one side with constant current. After 1 h of reaction, the anodic oxidation was stopped to ensure that the first layer of aluminum foil was not completely oxidized, and the sample was soaked in a mixture of 1.8 wt% HCrO 4 and 6 wt% H 3 PO 4 at 60 °C for 10 h to remove the first layer of aluminum foil. secondary oxide film. The sample is then used as an anode, and the second anodic oxidation is carried out under the conditions of the first anodic oxidation. The oxidation time was determined by measuring the change of the voltage in real time. When the voltage rose rapidly, the current was halved and kept for 30 min before stopping. The thickness of the PAA through-hole template was measured to be about 20.32 μm.

实施例6 Example 6

首先取纯度99.99%、长度70 mm、宽度20 mm,厚度分别为150 μm和50 μm的铝箔条各一条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压7.5 MPa,并维持45 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以厚度50 μm的铝箔一侧作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以80 V的电压(高场阳极氧化),在恒定温度20 °C下,进行单面恒压阳极氧化。氧化时间通过实时测定电流的变化情况确定,在电流下降趋势逐步加快后,保持电压不变并维持30 min后停止。测得PAA膜纳米孔道的平均孔间距约为152 nm,PAA通孔模板的厚度约54.23 μm。 First, take a strip of aluminum foil with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm and 50 μm, and soak it in 2 wt% NaOH solution at 70 ° C for 2 min to remove the aluminum foil surface. natural oxide film. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 7.5 MPa, and maintained for 45 minutes. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, use the side of the aluminum foil with a thickness of 50 μm as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, single-sided constant voltage anodization was performed at a constant temperature of 20 ° C at a voltage of 80 V (high-field anodization). The oxidation time was determined by measuring the change of the current in real time. After the current downward trend gradually accelerated, the voltage was kept constant for 30 min and then stopped. The average pore spacing of the PAA membrane nanochannels was measured to be about 152 nm, and the thickness of the PAA through-hole template was about 54.23 μm.

实施例7 Example 7

首先取两条纯度99.99%、长度70 mm、宽度20 mm、厚度150 μm的铝箔条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压10 MPa,并维持30 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,作为阳极氧化的阳极,再以铂网作为阴极。以6 M的硫酸溶液为电解液,以50 mA·cm-2的电流密度(高场阳极氧化),在恒定温度20 °C下,进行单面恒流阳极氧化。氧化时间通过实时测定电压的变化情况确定,在电压出现快速上升时将电流减半,并维持30 min后停止。测得PAA膜纳米孔道的平均孔间距约为47 nm,PAA通孔模板的厚度约187 μm。 First, two aluminum foil strips with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm were taken and soaked in 2 wt% NaOH solution at 70 ° C for 2 min to remove the natural oxide film on the surface of the aluminum foil. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 10 MPa, and maintained for 30 min. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, and use it as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 6 M sulfuric acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 (high-field anodization). The oxidation time was determined by measuring the change of the voltage in real time. When the voltage rose rapidly, the current was halved and kept for 30 min before stopping. The average pore spacing of the PAA film nanochannels was measured to be about 47 nm, and the thickness of the PAA through-hole template was about 187 μm.

实施例8 Example 8

首先取纯度99.99%、长度70 mm、宽度20 mm,厚度分别为150 μm和50 μm的铝箔条各一条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压7.5 MPa,并维持45 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以厚度50 μm的铝箔一侧作为阳极氧化的阳极,再以铂网作为阴极。以0.3 M的草酸溶液为电解液,以40 V的电压(温和阳极氧化),在恒定温度10 °C下,进行单面恒压阳极氧化。在反应8 h之后停止阳极氧化,将样品放入60 °C的1.8 wt% HCrO4 和 6 wt% H3PO4混合液中浸泡8 h,以去除第一次阳极化生成的氧化膜。再以该样品为阳极,以第一次阳极氧化的条件进行第二次阳极氧化。氧化时间通过实时测定电流的变化情况确定,在电流下降趋势逐步加快后,保持电压不变并维持30 min后停止。测得PAA膜纳米孔道的平均孔间距约为92 nm,PAA通孔模板的厚度约13 μm。 First, take a strip of aluminum foil with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm and 50 μm, and soak it in 2 wt% NaOH solution at 70 ° C for 2 min to remove the aluminum foil surface. natural oxide film. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 7.5 MPa, and maintained for 45 minutes. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, use the side of the aluminum foil with a thickness of 50 μm as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.3 M oxalic acid solution as the electrolyte, single-sided constant voltage anodization was performed at a constant temperature of 10 ° C at a voltage of 40 V (mild anodization). After 8 h of reaction, the anodic oxidation was stopped, and the sample was immersed in a mixture of 1.8 wt% HCrO 4 and 6 wt% H 3 PO 4 at 60 °C for 8 h to remove the oxide film formed by the first anodization. The sample is then used as an anode, and the second anodic oxidation is carried out under the conditions of the first anodic oxidation. The oxidation time was determined by measuring the change of the current in real time. After the current downward trend gradually accelerated, the voltage was kept constant for 30 min and then stopped. The average pore spacing of the PAA membrane nanochannels was measured to be about 92 nm, and the thickness of the PAA through-hole template was about 13 μm.

实施例9 Example 9

首先取纯度99.99%、长度70 mm、宽度20 mm,厚度分别为150 μm和20 μm的铝箔条各一条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压10 MPa,并维持30 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,以厚度20 μm的铝箔一侧作为阳极氧化的阳极,再以铂网作为阴极。以0.3 M的硫酸溶液为电解液,以25 V的电压(温和阳极氧化),在恒定温度0 °C下,进行单面恒压阳极氧化。在反应5 h之后停止阳极氧化,将样品放入60 °C的1.8 wt% HCrO4 和 6 wt% H3PO4混合液中浸泡4 h,以去除第一次阳极化生成的氧化膜。再以该样品为阳极,以0.3 M的硫酸溶液为电解液,以第一次阳极氧化的条件进行第二次阳极氧化。氧化时间通过实时测定电流的变化情况确定,在电流下降趋势逐步加快后,保持电压不变并维持30 min后停止。测得PAA通孔模板的厚度约7.57 μm。 First, take a strip of aluminum foil with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm and 20 μm, and soak it in 2 wt% NaOH solution at 70 ° C for 2 min to remove the surface of the aluminum foil. natural oxide film. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 10 MPa, and maintained for 30 min. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, use the side of the aluminum foil with a thickness of 20 μm as the anode for anodic oxidation, and use the platinum mesh as the cathode. With 0.3 M sulfuric acid solution as the electrolyte, single-sided constant voltage anodization was performed at a constant temperature of 0 ° C at a voltage of 25 V (mild anodization). After 5 h of reaction, the anodization was stopped, and the sample was soaked in a mixture of 1.8 wt% HCrO 4 and 6 wt% H 3 PO 4 at 60 °C for 4 h to remove the oxide film formed by the first anodization. Then, the sample was used as the anode, and the 0.3 M sulfuric acid solution was used as the electrolyte, and the second anodic oxidation was carried out under the conditions of the first anodic oxidation. The oxidation time was determined by measuring the change of the current in real time. After the current downward trend gradually accelerated, the voltage was kept constant for 30 min and then stopped. The thickness of the PAA through-hole template was measured to be about 7.57 μm.

实施例10 Example 10

首先取两条纯度99.99%、长度70 mm、宽度20 mm、厚度150 μm的铝箔条,同时放入2 wt%、70 °C的NaOH溶液中浸泡2 min,以去除铝箔表面的天然氧化膜。将两条铝箔重叠贴合,并固定于模具中,然后将模具放入油压机中,加压7.5 MPa,并维持45 min。随后取出已经粘合的双层复合铝箔,用去离子水反复冲洗干净,作为阳极氧化的阳极,再以铂网作为阴极。以0.75 M的草酸溶液为电解液,以50 mA·cm-2的电流密度,在恒定温度20 °C下,进行单面恒流阳极氧化。在反应1 h之后停止阳极氧化,确保第一层铝箔未完全氧化,将样品放入60 °C的1.8 wt% HCrO4 和 6 wt% H3PO4混合液中浸泡10 h,以去除一次氧化膜。再以该样品为阳极,以0.5 M的磷酸溶液为电解液,以60 V的电压,在恒定温度20 °C下,进行单面恒压第二次阳极氧化。氧化时间通过实时测定电流的变化情况确定,在电流下降趋势逐步加快后,保持电压不变并维持30 min后停止。由于实验所用电压远低于磷酸溶液中PAA膜的自组织电压195 V,因此得到锯齿状纳米孔道结构的PAA模板。测得PAA通孔模板的厚度约10.58 μm。 First, two aluminum foil strips with a purity of 99.99%, a length of 70 mm, a width of 20 mm, and a thickness of 150 μm were taken and soaked in 2 wt% NaOH solution at 70 ° C for 2 min to remove the natural oxide film on the surface of the aluminum foil. Two pieces of aluminum foil were overlapped and fixed in the mold, and then the mold was put into a hydraulic press, pressurized at 7.5 MPa, and maintained for 45 minutes. Then take out the double-layer composite aluminum foil that has been bonded, rinse it repeatedly with deionized water, and use it as the anode for anodic oxidation, and then use the platinum mesh as the cathode. Using 0.75 M oxalic acid solution as the electrolyte, the single-sided constant current anodization was carried out at a constant temperature of 20 ° C at a current density of 50 mA·cm -2 . Stop the anodic oxidation after 1 h of reaction to ensure that the first layer of aluminum foil is not completely oxidized, and soak the sample in a mixture of 1.8 wt% HCrO 4 and 6 wt% H 3 PO 4 at 60 °C for 10 h to remove the primary oxidation membrane. Then, the sample was used as the anode, 0.5 M phosphoric acid solution was used as the electrolyte, and a voltage of 60 V was used at a constant temperature of 20 ° C to carry out the second anodic oxidation on one side at constant voltage. The oxidation time was determined by measuring the change of the current in real time. After the current downward trend gradually accelerated, the voltage was kept constant for 30 min and then stopped. Since the voltage used in the experiment is much lower than the self-organization voltage 195 V of the PAA film in phosphoric acid solution, a PAA template with a zigzag nanopore structure was obtained. The thickness of the PAA through-hole template was measured to be about 10.58 μm.

Claims (8)

1. a preparation method for through-hole anodic aluminum oxide template, is characterized in that said method comprising the steps of:
The Natural Oxide Film on step 1, removal high-purity aluminum foil surface;
Step 2, carry out pressurization compound to the two panels high-purity aluminum foil be stacked, moulding pressure is 5-10 MPa, and the dwell time is 30-60 min;
Step 3, one side anodic oxidation is carried out to the high-purity aluminum foil of compound;
Step 4, after sudden change appears in the voltage on anodic oxidation curve, then anodised for constant current electric current to be reduced by half, or after sudden change appears in the electric current on anodic oxidation curve, then maintain constant voltage anodised voltage constant, then terminate after continuing to be oxidized half an hour;
Step 5, last, the PAA template of complete through hole is namely obtained by mechanically peel.
2. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the removal Natural Oxide Film described in step 1 is in the sodium hydroxide solution of 2wt % aluminium foil being immersed 70 DEG C 2 minutes.
3. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the pressurization described in step 2 adopts oil press.
4. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the thickness of the clad aluminum foil of the coverlet surface anode oxidation described in step 3 is 20-150 μm.
5. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the anode oxidation process described in step 3 adopts constant current oxidation pattern or constant voltage oxidation model.
6. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that using clad aluminum foil as anode in the one side anodic oxidation described in step 3, using platinum guaze as negative electrode; Electrolytic solution used comprises sulfuric acid, oxalic acid or phosphorus aqueous acid.
7. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the one side anodic oxidation described in step 3 adopts gentle anodic oxidation or High-Field anodic oxidation.
8. the preparation method of through-hole anodic aluminum oxide template according to claim 1, is characterized in that the one side anodic oxidation described in step 3 adopts an anodic oxidation or two-step anodization.
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