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CN102897488B - Silicon wafer carrying device - Google Patents

Silicon wafer carrying device Download PDF

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Publication number
CN102897488B
CN102897488B CN201110209304.5A CN201110209304A CN102897488B CN 102897488 B CN102897488 B CN 102897488B CN 201110209304 A CN201110209304 A CN 201110209304A CN 102897488 B CN102897488 B CN 102897488B
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CN
China
Prior art keywords
track
carrying device
sheet carrying
guide vane
silicon sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110209304.5A
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Chinese (zh)
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CN102897488A (en
Inventor
刘琴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RENESOLA ZHEJIANG Ltd
Original Assignee
Zhejiang Yuhui Yangguang Energy Resources Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201110209304.5A priority Critical patent/CN102897488B/en
Publication of CN102897488A publication Critical patent/CN102897488A/en
Application granted granted Critical
Publication of CN102897488B publication Critical patent/CN102897488B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention provides a silicon wafer carrying device which comprises a support frame (1) and a carrying trolley. The support frame (1) is provided with tracks, roller grooves (121) are arranged on the tracks (12), and the carrying trolley is positioned on the support frame (1) and is provided with silica-gel rollers (22) which are matched with the roller grooves (121) in a rolling manner. The silicon wafer carrying device has the advantages that damage to silicon wafers in a transportation process is reduced, and accordingly production cost is lowered for a silicon wafer manufacturer.

Description

Silicon sheet carrying device
Technical field
The present invention relates to silicon chip production technical field of auxiliary equipment, more particularly, relate to a kind of silicon sheet carrying device.
Background technology
Solar photovoltaic industry is one of energy industry with fastest developing speed in the world.Under the support of national governments, solar energy power generating industry has obtained and develops rapidly since the eighties in 20th century.And the silicon materials material that to be photovoltaic apparatus necessary, therefore the fast development of photovoltaic industry is that upstream silicon chip is produced and brought good opportunity to develop.By 2010, the year demand of solar silicon wafers reached 280520.Along with the use amount of silicon chip constantly increases, reducing the damage of silicon chip in production procedure to reduce production cost, is the most important thing of current silicon chip manufacturer.
In the production process of silicon chip, need to clean silicon chip and check, and realize cleaning and check general in different places, therefore silicon chip carries out needing to be transported between inspection vehicle after cleaning completes testing.Existing transport arranges support skid between generally adopting between Wafer Cleaning workshop and inspection vehicle, is contained in silicon box by the silicon chip cleaned, and then promotes silicon box and slides in support skid thus complete the transport to silicon chip.
Above-mentioned in the transportation of silicon chip, due to the out-of-flatness of operator's firmly excessive or support skid, easily cause jolting or shaking of silicon box, make silicon chip be subject to shock and cause breakage.Existing silicon chip between cleaning Vehicle in the process of transporting inspection vehicle, breakage rate is approximately 3/1000ths, and the breakage of silicon chip is larger.Silicon chip after breakage needs to return manufacture initial process and again manufactures, and adds the production cost of silicon chip manufacturer.
In sum, how to provide a kind of silicon chip conveying arrangement, to reduce the breakage of silicon chip in transportation, and then reducing the production cost of silicon chip manufacturer, is current those skilled in the art's problem demanding prompt solution.
Summary of the invention
In view of this, the invention provides a kind of silicon sheet carrying device, to reduce the breakage of silicon chip in transportation, and then reduce the production cost of silicon chip manufacturer.
In order to achieve the above object, the invention provides following technical scheme:
A kind of silicon sheet carrying device, comprising: the bracing frame being provided with track, described track is provided with race; With
Be positioned on support frame as described above, and be provided with the carrying dolly of the silica gel roller coordinated that to roll with described race.
Preferably, in above-mentioned silicon sheet carrying device, described carrying dolly comprises movable stand and is positioned at the loading plate on described movable stand, and described silica gel roller is arranged on the side frame of described movable stand by roller mounting panel.
Preferably, in above-mentioned silicon sheet carrying device, support frame as described above is at least provided with track described in two groups.
Preferably, in above-mentioned silicon sheet carrying device, also comprise the side guide vane end stop being arranged on and described track limiting the laterally offset of described roller mounting panel.
Preferably, in above-mentioned silicon sheet carrying device, the vertical sectional shape of described side guide vane end stop is L-type, and the side of described track is provided with the mounting groove coordinated with the bottom of described side guide vane end stop.
Preferably, in above-mentioned silicon sheet carrying device, the bottom of described side guide vane end stop is embedded in described mounting groove.
Preferably, in above-mentioned silicon sheet carrying device, also comprise the end guide vane end stop of two terminals being arranged on described track.
Preferably, in above-mentioned silicon sheet carrying device, the side that described end guide vane end stop is relative with described movable stand is provided with bump rubber or buffer spring.
Preferably, in above-mentioned silicon sheet carrying device, also comprise two handles being separately positioned on described movable stand two ends.
Preferably, in above-mentioned silicon sheet carrying device, support frame as described above, movable stand assemble by many aluminium section bars.
In silicon sheet carrying device provided by the invention, the track of bracing frame is provided with race, the silica gel roller on carrying dolly and wheel slot fit, and then achieves the movement of carrying dolly on bracing frame.The carrying dolly provided in the present invention is connected with realizing rolling by silica gel roller between bracing frame, in the process that silicon chip is transported, because silica gel roller has good pooling feature, avoid the silicon box be placed on carrying dolly jolt or shake, reduce silicon chip and clashed into caused breakage, decrease the breakage of silicon chip, reduce the production cost of silicon chip manufacturer.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the silicon sheet carrying device that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is the fit structure schematic diagram between carrying dolly and bracing frame;
Fig. 3 is the structure for amplifying schematic diagram of part A in Fig. 1;
Fig. 4 is the structure for amplifying schematic diagram of part B in Fig. 1;
Fig. 5 is the syndeton schematic diagram of side guide vane end stop and track.
In upper Fig. 1-5:
Bracing frame 1, movable stand 2, loading plate 3, track 11, track 12, race 121, end guide vane end stop 13, side guide vane end stop 14, side frame 21, silica gel roller 22, handle 23, roller mounting panel 24.
Embodiment
The invention provides a kind of silicon sheet carrying device, decrease the breakage of silicon chip in transportation, and then reduce the production cost of silicon chip manufacturer.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Please refer to accompanying drawing 1-4, the structural representation of the silicon sheet carrying device that Fig. 1 provides for the embodiment of the present invention; Fig. 2 is the fit structure schematic diagram between carrying dolly and bracing frame; Fig. 3 is the structure for amplifying schematic diagram of part A in Fig. 1; Fig. 4 is the structure for amplifying schematic diagram of part B in Fig. 1.
The silicon sheet carrying device embodiments provided, comprising: the bracing frame 1 being provided with track, and described track 12 is provided with race 121; With
Be positioned on support frame as described above 1, and be provided with the carrying dolly of the silica gel roller 22 coordinated that to roll with described race 121.
In silicon sheet carrying device provided by the invention, the track 12 of bracing frame 1 is provided with race 121, the silica gel roller 22 on carrying dolly coordinates with race 121, and then achieves the movement of carrying dolly on bracing frame 1.The carrying dolly provided in the present invention is connected with realizing rolling by silica gel roller 22 between bracing frame 1, in the process that silicon chip is transported, because silica gel roller 22 has good pooling feature, avoid the silicon box be placed on carrying dolly jolt or shake, reduce silicon chip and clashed into caused breakage, decrease the breakage of silicon chip, reduce the production cost of silicon chip manufacturer.
In the silicon sheet carrying device provided in the present embodiment, carrying dolly Main Function is carrying silicon box, and then realizes the movement on bracing frame 1, and to reach the object of transport, above-mentioned carrying dolly can be various rolling dolly.Concrete, embodiments provide a kind of carrying dolly, the loading plate 3 that this carrying dolly comprises movable stand 2 and is positioned on movable stand 2, silica gel roller 22 is arranged on the side frame 21 of movable stand 2 by roller mounting panel 24.In order to optimize technique scheme further, in above-mentioned carrying dolly, bracing frame 1 is at least provided with track 12 described in two groups, at least two group tracks make whole silicon sheet carrying device between cleaning Vehicle to when carrying silicon chip between inspection vehicle, one group of track wherein can load silicon chip to carry between inspection vehicle from feeding between cleaning Vehicle, another group track can after silicon chip is unsnatched between inspection vehicle to cleaning workshop operation, improve the conevying efficiency to silicon chip.Please refer to accompanying drawing 1, the figure shows two groups of tracks, be respectively track 11 and track 12, the structure of two groups of tracks just as, in the present embodiment, the annexation of the structure of track and itself and carrying dolly is described for track 12, other track, such as its structure of track 11 and can reference orbit 12 with the annexation of carrying dolly disposed thereon.
In the silicon sheet carrying device provided in above-described embodiment, roll in silica gel roller 22 race 121 on the track 12 of carrying dolly, in order to avoid carrying dolly to depart from definitive orbit further, in above-mentioned track 12, be also provided with the side guide vane end stop 14 of restriction roller mounting panel 24 laterally offset.Please refer to accompanying drawing 5, the vertical sectional shape of the side guide vane end stop 14 in the silicon sheet carrying device in the present embodiment is L-type, and the side of track 12 is provided with the mounting groove coordinated with the bottom of side guide vane end stop 14.Above-mentioned side guide vane end stop 14 can realize the connection with track 12 by modes such as connector, welding, riveted joints.Preferred in the present embodiment, the bottom of above-mentioned side guide vane end stop 14 is embedded in mounting groove.
In above-mentioned silicon sheet carrying device, carrying dolly is in the process of movement, and when preventing it from moving to the end of track 12, silica gel roller 22 comes off from track 12, and two terminals of above-mentioned track are provided with the end guide vane end stop 13 that restriction carries moving of car.When workman promotes to carry moving of car to end (the arriving destination) of track, the continuation that end guide vane end stop 13 limits carrying dolly runs, there are larger vibrations during in order to prevent spacing, the side that above-mentioned end guide vane end stop 13 is relative with movable stand 2 is provided with bump rubber or buffer spring, reduce further the vibrations occurred in silicon chip transportation, further reduce the breakage of silicon chip.
Conveniently to the operation of carrying dolly, in above-mentioned silicon sheet carrying device, also comprise two handles 23 at the two ends being separately positioned on movable stand 2.
In order to reduce the weight of whole silicon sheet carrying device, in above-mentioned silicon sheet carrying device, bracing frame 1, movable stand 2 preferably adopt many aluminium section bars to assemble.Certainly, above-mentioned silicon sheet carrying device can also be made by other building materials, is not limited to aluminium section bar.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (7)

1. a silicon sheet carrying device, is characterized in that, comprising: the bracing frame (1) being provided with track, described track (12) is provided with race (121); With
Be positioned on support frame as described above (1), and be provided with the carrying dolly of the silica gel roller (22) coordinated that to roll with described race (121); (1) is at least provided with track described in two groups to support frame as described above, and wherein one group of track to be carried from feeding between cleaning Vehicle for loading silicon chip between inspection vehicle, another group track be used for after silicon chip is unsnatched between inspection vehicle to cleaning workshop operation; Described carrying dolly comprises movable stand (2) and is positioned at the loading plate (3) on described movable stand (2), and described silica gel roller (22) is arranged on the side frame (21) of described movable stand (2) by roller mounting panel (24);
Be arranged on the side guide vane end stop (14) of the upper restriction of described track (12) described roller mounting panel (24) laterally offset.
2. silicon sheet carrying device according to claim 1, it is characterized in that, the vertical sectional shape of described side guide vane end stop (14) is L-type, and the side of described track (12) is provided with the mounting groove coordinated with the bottom of described side guide vane end stop (14).
3. silicon sheet carrying device according to claim 2, is characterized in that, the bottom of described side guide vane end stop (14) is embedded in described mounting groove.
4. silicon sheet carrying device according to claim 1, is characterized in that, also comprises the end guide vane end stop (13) of two terminals being arranged on described track (12).
5. silicon sheet carrying device according to claim 4, is characterized in that, described end guide vane end stop (13) side relative with described movable stand (2) is provided with bump rubber or buffer spring.
6. silicon sheet carrying device according to claim 5, is characterized in that, also comprises two handles (23) being separately positioned on described movable stand (2) two ends.
7. silicon sheet carrying device according to claim 6, is characterized in that, support frame as described above (1), movable stand (2) assemble by many aluminium section bars.
CN201110209304.5A 2011-07-25 2011-07-25 Silicon wafer carrying device Expired - Fee Related CN102897488B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110209304.5A CN102897488B (en) 2011-07-25 2011-07-25 Silicon wafer carrying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110209304.5A CN102897488B (en) 2011-07-25 2011-07-25 Silicon wafer carrying device

Publications (2)

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CN102897488A CN102897488A (en) 2013-01-30
CN102897488B true CN102897488B (en) 2015-07-08

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108242417B (en) * 2016-12-26 2020-10-16 北京北方华创微电子装备有限公司 Manual silicon chip conveying mechanism
CN107521896A (en) * 2017-08-25 2017-12-29 浙江羿阳太阳能科技有限公司 A kind of silicon chip toter

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2263089Y (en) * 1996-07-09 1997-09-24 刘淑媛 Loading and unloading device for transport vehicle
CN201052915Y (en) * 2007-06-08 2008-04-30 中国第一汽车集团公司 Friction plate vehicle conveyor
CN201128604Y (en) * 2007-12-24 2008-10-08 宝山钢铁股份有限公司 Transportation rail for steel coil
CN202163829U (en) * 2011-07-25 2012-03-14 浙江思博恩新材料科技有限公司 Silicon sheet carrying device
CN101284553B (en) * 2007-04-13 2013-09-18 艾森曼股份公司 Skid for supporting an object, and transfer station, drive unit, drive system and conveyor installation for such skids

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2263089Y (en) * 1996-07-09 1997-09-24 刘淑媛 Loading and unloading device for transport vehicle
CN101284553B (en) * 2007-04-13 2013-09-18 艾森曼股份公司 Skid for supporting an object, and transfer station, drive unit, drive system and conveyor installation for such skids
CN201052915Y (en) * 2007-06-08 2008-04-30 中国第一汽车集团公司 Friction plate vehicle conveyor
CN201128604Y (en) * 2007-12-24 2008-10-08 宝山钢铁股份有限公司 Transportation rail for steel coil
CN202163829U (en) * 2011-07-25 2012-03-14 浙江思博恩新材料科技有限公司 Silicon sheet carrying device

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Owner name: YUHUI YANGGUANG ENERGY RESOURCES CO., LTD., ZHEJIA

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Address after: Jiaxing City, Zhejiang province 314117 Jiashan County Yaozhuang Manhattan Road No. 158 building three layer 1

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Denomination of invention: Silicon wafer carrying device

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Termination date: 20210725