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CN103024301B - The formation method of floating gate type imageing sensor - Google Patents

The formation method of floating gate type imageing sensor Download PDF

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CN103024301B
CN103024301B CN201310011410.1A CN201310011410A CN103024301B CN 103024301 B CN103024301 B CN 103024301B CN 201310011410 A CN201310011410 A CN 201310011410A CN 103024301 B CN103024301 B CN 103024301B
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floating gate
pixel
pixel units
pixel unit
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CN103024301A (en
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伍冬
谢南
刘辉
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Tsinghua University
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Abstract

The present invention proposes a kind of formation method of floating gate type imageing sensor, comprises step: resetted by each pixel cell of floating gate type imageing sensor; The primary data of reading section pixel cell; Carry out exposure image; Read data after the exposure of all pixel cells; And according to data after the primary data of partial pixel unit and the exposure of all pixel cells, carry out data operation process according to interpolation, obtain final image.It is simple that the present invention has algorithm, and operand is little, the advantage that image taking speed is fast.

Description

浮栅型图像传感器的成像方法Imaging method of floating gate image sensor

技术领域technical field

本发明属于浮栅型图像传感器应用技术领域,尤其涉及到一种浮栅型图像传感器的成像方法。The invention belongs to the technical field of application of floating gate image sensors, and in particular relates to an imaging method of floating gate image sensors.

背景技术Background technique

快闪存储器是一种常见的存储器,在电子数码行业有着广泛的应用,比如智能手机、平板电脑等。快闪存储器是通过其浮栅结构来实现数据的存储,通过编程操作注入电子到浮栅以提高存储单元的阈值电压来实现数据1的存储,通过擦除操作拉出浮栅上的电子以降低存储单元的阈值电压来实现数据0的存储。Flash memory is a common memory that is widely used in the electronic digital industry, such as smart phones and tablet computers. Flash memory realizes the storage of data through its floating gate structure, injects electrons into the floating gate through the programming operation to increase the threshold voltage of the memory cell to realize the storage of data 1, and pulls out the electrons on the floating gate through the erasing operation to reduce the The threshold voltage of the memory cell is used to realize the storage of data 0.

浮栅型图像传感器是一种新型的图像传感器,该种图像传感器的像素单元类似快闪存储器,采用了浮栅结构。浮栅型图像传感器的像素单元在一定的加压环境下,通过“编程”操作将光信号产生的光电子注入到浮栅以提高像素单元的阈值电压,来实现光强度信息的记录,并通过“擦除”操作拉出浮栅上的电子以实现像素单元光强度信息的复位。再通过读取电路,可以将像素单元上记录的信息转化成数字信息,输出并处理,最后形成图像。The floating gate image sensor is a new type of image sensor. The pixel unit of this image sensor is similar to a flash memory and adopts a floating gate structure. In a certain pressurized environment, the pixel unit of the floating gate image sensor injects the photoelectrons generated by the light signal into the floating gate through the "programming" operation to increase the threshold voltage of the pixel unit, so as to realize the recording of light intensity information, and through " The "erase" operation pulls out the electrons on the floating gate to reset the light intensity information of the pixel unit. Then through the reading circuit, the information recorded on the pixel unit can be converted into digital information, output and processed, and finally form an image.

浮栅型图像传感器的操作步骤如图1所示,“复位”操作是通过擦除和编程等手段,将像素单元阈值恢复到初始状态;“第一次数据读出”操作是利用特殊的读出电路将像素单元上的信息第一次读取出来;“曝光成像”操作是对像素单元进行曝光,再通过变换加压操作将光强信息存储在像素单元里;“第二次数据读出”操作是利用特殊的读出电路将像素单元上的信息第二次读取出来;“数据运算处理”操作将第二次读取得到的数据减去复位后读取的数据作为最终的图像信号。这样,浮栅型图像传感器每成一次像就需要读取两次数据。CMOS和CCD是目前最常见的两种图像传感器,这两种图像传感器在成像的过程中,只需要读取一次数据。相比而言,浮栅型图像传感器一次成像的速度比较慢。The operation steps of the floating gate image sensor are shown in Figure 1. The "reset" operation is to restore the threshold value of the pixel unit to the initial state by means of erasing and programming; the "first data readout" operation is to use a special readout The output circuit reads out the information on the pixel unit for the first time; the "exposure imaging" operation is to expose the pixel unit, and then store the light intensity information in the pixel unit through the transformation and pressure operation; "the second data readout "The operation is to use a special readout circuit to read the information on the pixel unit for the second time; the "data operation processing" operation uses the data obtained by the second read minus the data read after reset as the final image signal . In this way, the floating gate image sensor needs to read data twice every time an image is formed. CMOS and CCD are currently the two most common image sensors, and these two image sensors only need to read data once during the imaging process. In comparison, the imaging speed of a floating gate image sensor is relatively slow.

发明内容Contents of the invention

本发明旨在至少在一定程度上解决上述技术问题之一或至少提供一种有用的商业选择。为此,本发明的目的在于提出一种速度更快的针对上述背景技术中提到的浮栅型图像传感器数据读取速度的问题,本发明提出来一种更快的浮栅型图像传感器的成像方法。The present invention aims at solving one of the above technical problems at least to a certain extent or at least providing a useful commercial choice. For this reason, the object of the present invention is to propose a faster solution to the data reading speed of the floating gate image sensor mentioned in the background art. The present invention proposes a faster floating gate image sensor. Imaging method.

根据本发明实施例的浮栅型图像传感器的成像方法,包括:A.将所述浮栅型图像传感器的各个像素单元复位;B.读取部分像素单元的初始数据;C.进行曝光成像;D.读取所有像素单元的曝光后数据;以及E.根据所述部分像素单元的初始数据和所述所有像素单元的曝光后数据,根据插补法进行数据运算处理,得到最终图像。The imaging method of a floating gate image sensor according to an embodiment of the present invention includes: A. resetting each pixel unit of the floating gate image sensor; B. reading initial data of some pixel units; C. performing exposure imaging; D. reading post-exposure data of all pixel units; and E. performing data calculation processing according to an interpolation method according to the initial data of the partial pixel units and the post-exposure data of all pixel units to obtain a final image.

在本发明的一个实施例中,所述步骤B包括:每行像素单元中,每相邻k个像素单元为一组,读取该组第一个像素单元的初始数据,其中K为大于1且小于传感器阵列中成像单元的列数目的正整数,以及,所述步骤E包括:E1.定义该组像素单元中未读出的k-1个像素单元的初始数据的取值为该组的第一个像素单元的初始数据和下一组像素单元的第一个像素单元的初始数据的平均值;和E2.各个像素单元的曝光后数据减去各个像素单元的初始数据,得到最终图像。In one embodiment of the present invention, the step B includes: in each row of pixel units, every k adjacent pixel units form a group, and read the initial data of the first pixel unit in the group, where K is greater than 1 and a positive integer less than the number of columns of the imaging unit in the sensor array, and the step E includes: E1. Define the value of the initial data of the unread k-1 pixel units in the group of pixel units as the value of the group The average value of the initial data of the first pixel unit and the initial data of the first pixel unit of the next group of pixel units; and E2. Subtracting the initial data of each pixel unit from the post-exposure data of each pixel unit to obtain the final image.

在本发明中,由于复位后的数据只读取了其中一部分,从而减少了读取时间,提高了成像速度。同时,由于复位后的数据只读取了其中一部分,需要对剩余部分进行插值填补。本发明具有算法简单,计算量小的优点。In the present invention, since only a part of the reset data is read, the reading time is reduced and the imaging speed is improved. At the same time, since only a part of the reset data is read, the remaining part needs to be interpolated and filled. The invention has the advantages of simple algorithm and small amount of calculation.

本发明的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

附图说明Description of drawings

本发明的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings, wherein:

图1为现有的浮栅型图像传感器的成像方法的示意图Fig. 1 is the schematic diagram of the imaging method of existing floating gate type image sensor

图2为本发明的浮栅型图像传感器的成像方法的示意图Fig. 2 is the schematic diagram of the imaging method of the floating gate image sensor of the present invention

图3为m×n像素单元阵列的浮栅型图像传感器的示意图Figure 3 is a schematic diagram of a floating gate image sensor with an m×n pixel cell array

具体实施方式Detailed ways

下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore It should not be construed as a limitation of the present invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

在本发明中,除非另有明确的规定和限定,第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触,也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且,第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise clearly specified and limited, a first feature being "on" or "under" a second feature may include direct contact between the first and second features, and may also include the first and second features Not in direct contact but through another characteristic contact between them. Moreover, "above", "above" and "above" the first feature on the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. "Below", "beneath" and "under" the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.

本发明提出了一种新的浮栅型图像传感器的成像方法,能够帮助浮栅型图像传感器实现更快的成像速度。The invention proposes a new imaging method of the floating grid image sensor, which can help the floating grid image sensor to achieve faster imaging speed.

如图2所示,本发明的成像方法包括如下步骤:As shown in Figure 2, the imaging method of the present invention comprises the following steps:

A.对像素单元进行复位,通过擦除和编程等手段,将像素单元阈值恢复到初始状态。A. Reset the pixel unit, and restore the threshold value of the pixel unit to the initial state by means of erasing and programming.

B.进行复位后的数据读取。在这一步骤中,对于一个m×n个像素单元的感光阵列(如图3所示),每一行像素里,每隔k个像素读取一次数据(其中,k<n),具体操作为:每k个像素为一组,每组的值中取这一组数据的第一个出来(例如图3中第m-1行的Pm-1,1、Pm-1,2、Pm-1,3、Pm-1,4.,...,Pm-1,k-1、Pm-1,k这k个像素为一组,该组像素的复位后只读取出Pm-1,1的值)。这样一来复位后数据的读取次数将减少到原来的1/k,读取时间也减少到原来的1/k。其中,k的值根据成像精度需要可以在一定范围内调整,k的值越小,成像精度越高但成像速度越慢,反之,k的值越大,成像精度越低但成像速度越快。k为1的时候,即完整读取复位后的数据,此时速度最慢但精度最高。B. Perform data reading after reset. In this step, for a photosensitive array with m×n pixel units (as shown in Figure 3), in each row of pixels, read data every k pixels (wherein, k<n), the specific operation is : Each k pixel is a group, and the first one of this group of data is taken out of the value of each group (for example, P m-1,1 , P m-1,2 , P m-1,3 , P m-1,4. ,...,P m-1,k-1 , P m-1,k are a group of k pixels, and the group of pixels can only read after reset out the value of P m-1,1 ). In this way, the number of data reads after reset will be reduced to the original 1/k, and the read time will also be reduced to the original 1/k. Among them, the value of k can be adjusted within a certain range according to the needs of imaging accuracy. The smaller the value of k, the higher the imaging accuracy but the slower the imaging speed. Conversely, the larger the value of k, the lower the imaging accuracy but the faster the imaging speed. When k is 1, the data after reset is completely read. At this time, the speed is the slowest but the precision is the highest.

C.进行曝光成像,将图像信息保存在图像传感器上。C. Carry out exposure imaging, and save the image information on the image sensor.

D.将曝光成像后像素上的数据全部读出。D. Read out all the data on the pixel after exposure and imaging.

E.将曝光成像后的数据与第二步读出的数据进行处理,得到最后的图像。在“数据运算处理”环节利用插补法,近似还原第二步中每k个数据中未读取出来的那k-1个数据。插补法的具体实现方法为:每一组数据中,未读出的这k-1个像素的值都取与它们所在的这一组读出的值和下一组读出的值这两个值的平均值(例如图3中第m-1行的Pm-1,2、Pm-1,3、Pm-1,4.,...,Pm-1,k这k-1个像素的值都取该组读出值Pm-1,1和下一组读出值Pm-1,k+1的平均值,这一行下一组未读出的k-1个像素Pm-1,k+2、Pm-1,k+3、Pm-1,k+4,...,Pm-1,2k,将取Pm-1,k+1和Pm-1,2k+1的平均值,以此类推),由于复位操作能够将像素统一还原到初始阈值,所以部分读取复位后数据的方法能够保证数据的精确度。E. Process the data after exposure and imaging with the data read out in the second step to obtain the final image. In the "data operation and processing" link, the interpolation method is used to approximately restore the k-1 data that has not been read out of every k data in the second step. The specific implementation method of the interpolation method is: in each group of data, the values of the k-1 pixels that have not been read out are taken from the value read out of the group they are in and the value read out in the next group. The average value of values (for example, P m-1,2 , P m-1,3 , P m-1,4 .,...,P m-1,k of row m-1 in Fig. 3 The value of -1 pixel is the average value of this group of readout values P m-1,1 and the next group of readout values P m-1,k+1 , and the next group of unread k-1 in this row pixels P m-1,k+2 , P m-1,k+3 , P m-1,k+4 ,...,P m-1,2k , will take P m-1,k+1 and P m-1, the average value of 2k+1 , and so on), because the reset operation can uniformly restore the pixels to the initial threshold, so the method of partially reading the reset data can ensure the accuracy of the data.

在本发明中,由于复位后的数据只读取了其中一部分,从而减少了读取时间,提高了成像速度。同时,由于复位后的数据只读取了其中一部分,需要对剩余部分进行插值填补。本发明具有算法简单,计算量小的优点。In the present invention, since only a part of the reset data is read, the reading time is reduced and the imaging speed is improved. At the same time, since only a part of the reset data is read, the remaining part needs to be interpolated and filled. The invention has the advantages of simple algorithm and small amount of calculation.

流程图中或在此以其他方式描述的任何过程或方法描述可以被理解为,表示包括一个或更多个用于实现特定逻辑功能或过程的步骤的可执行指令的代码的模块、片段或部分,并且本发明的优选实施方式的范围包括另外的实现,其中可以不按所示出或讨论的顺序,包括根据所涉及的功能按基本同时的方式或按相反的顺序,来执行功能,这应被本发明的实施例所属技术领域的技术人员所理解。Any process or method descriptions in flowcharts or otherwise described herein may be understood to represent modules, segments or portions of code comprising one or more executable instructions for implementing specific logical functions or steps of the process , and the scope of preferred embodiments of the invention includes alternative implementations in which functions may be performed out of the order shown or discussed, including substantially concurrently or in reverse order depending on the functions involved, which shall It is understood by those skilled in the art to which the embodiments of the present invention pertain.

在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

尽管上面已经示出和描述了本发明的实施例,可以理解的是,上述实施例是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在不脱离本发明的原理和宗旨的情况下在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limitations to the present invention. Variations, modifications, substitutions, and modifications to the above-described embodiments are possible within the scope of the present invention.

Claims (1)

1.一种浮栅型图像传感器的成像方法,其特征在于,包括:1. An imaging method of a floating gate type image sensor, characterized in that, comprising: A.将所述浮栅型图像传感器的各个像素单元复位;A. Resetting each pixel unit of the floating gate image sensor; B.读取部分像素单元的初始数据,具体包括:每行像素单元中,每相邻k个像素单元为一组,读取该组第一个像素单元的初始数据,其中k为大于1且小于传感器阵列中成像单元的列数目的正整数;B. Read the initial data of some pixel units, specifically including: in each row of pixel units, each adjacent k pixel units form a group, and read the initial data of the first pixel unit of the group, wherein k is greater than 1 and a positive integer less than the number of columns of imaging elements in the sensor array; C.进行曝光成像;C. Perform exposure imaging; D.读取所有像素单元的曝光后数据;以及D. Reading the post-exposure data of all pixel units; and E.根据所述部分像素单元的初始数据和所述所有像素单元的曝光后数据,根据插补法进行数据运算处理,得到最终图像,具体包括:E. According to the initial data of the part of the pixel units and the exposed data of all the pixel units, perform data calculation processing according to the interpolation method to obtain the final image, specifically including: E1.定义该组像素单元中未读出的k-1个像素单元的初始数据的取值为该组的第一个像素单元的初始数据和下一组像素单元的第一个像素单元的初始数据的平均值;E1. Define the value of the initial data of the unread k-1 pixel units in the group of pixel units as the initial data of the first pixel unit in the group and the initial data of the first pixel unit in the next group of pixel units the mean of the data; E2.各个像素单元的曝光后数据减去各个像素单元的初始数据,得到最终图像。E2. Subtracting the initial data of each pixel unit from the post-exposure data of each pixel unit to obtain a final image.
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CN1429016A (en) * 2001-12-28 2003-07-09 富士胶片株式会社 Solid electronic image inductor and control method thereof
CN101263708A (en) * 2005-06-28 2008-09-10 摩托罗拉公司 Image sensor architecture using one or more floating gate devices

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