CN103029225B - Topping machanism - Google Patents

Abstract

The present invention provides a cutting device capable of simplifying operations and improving productivity in straightening. The cutting device (1) has a chuck table (10), cutting members (20a, 20b) having a cutting tool (21a) mounted on a main shaft (22a), and a Y-axis for moving the main shaft (22a) in the Y-axis direction. The moving member (30a, 30b) and the Z-axis moving member (40a, 40b) that moves the main shaft (22a) in the Z-axis direction also has a trimming member (50a, 50b) that is in contact with the chuck table ( 10) Adjacent to and arranged on the moving path driven by the Y-axis moving member (30a, 30b) to move the cutting tool (21a), the trimming member (50a, 50b) has a trimming plate and a holding member that holds The dressing plate is rotatable around the central axis, and the height (H1) of the grinding surface of the dressing plate held by the holding member is equal to or lower than the height (H2) of the surface of the chuck table (10).

Description

cutting device

technical field

The present invention relates to a cutting device for cutting a workpiece held by a chuck table.

Background technique

For wafers formed with devices such as IC (Integrated Circuit) and LSI (LargeScale Integration, large-scale integration), in order to prevent cracks and dust during the manufacturing process, the outer periphery of the wafer is chamfered. Therefore, when the wafer is ground to be thin, the chamfered portion of the outer periphery is formed into an edge shape (eave shape). When the chamfered portion of the outer periphery is shaped like a cutting edge, there is a possibility that a chip is formed from the outer periphery and the wafer is damaged. Therefore, a technique has been proposed (for example, refer to Patent Document 1) in which the chamfered portion of the outer periphery is cut in advance with a cutting tool in the circumferential direction, and the back surface of the wafer is ground after removing a part of the outer periphery in the Z-axis direction.

Here, when the outer periphery of the wafer is cut in the circumferential direction with the cutting tool, the portion of the tip end of the cutting tool that undertakes the cutting is consumed, while the other portion is not consumed, resulting in partial wear. When partial wear occurs, cutting with good precision cannot be performed. Therefore, before partial wear becomes serious, regular flat dressing (for example, refer to Patent Document 2) that uses a dressing plate to flatten the tip of the cutting tool Shaped into a straight shape.

Patent Document 1: Japanese Patent Laid-Open No. 2000-173961

Patent Document 2: Japanese Patent Laid-Open No. 2010-588

However, in the conventional straight dressing, the workpiece held by the chuck table is removed, and the dressing plate is placed and held on the chuck table, that is, replacement is required, and there is a problem that the work becomes cumbersome. . In addition, after straight dressing, the dressing plate held by the chuck table must be removed, and the workpiece must be placed and held on the chuck table again, and the cutting process of the workpiece must be interrupted for straight dressing. The time becomes longer, and there is a problem that the productivity is lowered.

Contents of the invention

The present invention has been made in view of the above, and an object of the present invention is to provide a cutting device capable of achieving at least one of simplification of work in flat dressing and improvement of productivity.

In order to solve the above-mentioned problems and achieve the object, the cutting device according to the present invention has: a chuck table for holding a workpiece on a surface formed as a horizontal plane; a cutting member having a rotatable main shaft and mounted on the a cutting tool of the main shaft; a Y-axis moving member for moving the main shaft in a Y-axis direction which is a direction parallel to the rotation axis of the main shaft; and a Z-axis moving member for moving the main shaft The main shaft moves along the Z-axis direction, and the Z-axis direction is a direction approaching and away from the chuck table, and it is characterized in that the cutting device also has a trimming member, and the trimming member is in contact with the chuck table Adjacent, and the trimming member is arranged on the moving path of the cutting tool driven by the Y-axis moving member, the trimming member has: a trimming plate; and a holding member for holding the trimming plate , the holding member is rotatable around the central axis, and the height of the grinding surface of the dressing plate held by the holding member is equal to or lower than that of the surface of the chuck table.

Furthermore, it is preferable that in the above-mentioned cutting device, when dressing the cutting tool by the dressing member, the cutting tool is moved in the Y-axis direction to a predetermined cutting position facing the dressing plate, The Y-axis moving member moves the rotating cutting tool from the predetermined cutting position in a direction in contact with the grinding surface, and when the cutting tool is out of contact with the grinding surface, the holding member Rotate so that a region without cutting marks on the grinding surface faces the cutting tool in the Z-axis direction on the moving path.

Furthermore, preferably, in the cutting device described above, the dressing member is arranged such that the central axis is located on the rotation axis.

The cutting device of the present invention is equipped with a rotatable trimming plate that is independent of the chuck table holding the workpiece, and the cutting tool is moved relative to the trimming plate by the Y-axis moving member and the Z-axis moving member to perform leveling. Straight trim. Therefore, it is not necessary to remove the workpiece from the chuck table in order to perform straightening, so that the work can be simplified. Furthermore, since the straightening can be performed by using the time when the workpiece is not being cut by the cutting tool, the time for cutting the workpiece can be shortened, thereby achieving an effect of improving productivity.

Description of drawings

FIG. 1 is a diagram showing a configuration example of a cutting device according to an embodiment.

Fig. 2 is a diagram showing a cutting member and a dressing member.

Fig. 3 is a diagram showing a positional relationship between a cutting member and a trimming member.

Fig. 4 is a flow chart showing straightness trimming performed by the cutting device according to the embodiment.

Label description

1: cutting device;

10: chuck table;

20a, 20b: cutting member;

30a, 30b: Y-axis moving member;

40a, 40b: Z-axis moving member;

50a, 50b: trimming components;

51a, 51b: trimming plate;

52a, 52b: holding member;

53a, 53b: grinding surface;

54a, 54b: openings;

60: box lift;

70: Temporary placement of components;

80: cleaning and drying components;

90: control component;

A: axis of rotation;

B: Central axis.

detailed description

Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. However, the present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include elements that can be easily assumed by those skilled in the art, and elements that are substantially the same. In addition, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or changes in the structure can be made without departing from the gist of the present invention.

FIG. 1 is a diagram showing a configuration example of a cutting device according to an embodiment. Fig. 2 is a diagram showing a cutting member and a dressing member. Fig. 3 is a diagram showing a positional relationship between a cutting member and a trimming member. In addition, FIG. 3 is a view of the cutting member and the dressing member viewed from the Z-axis direction, and schematically illustrates the cutting member.

The cutting device according to the present embodiment cuts a workpiece by relatively moving a cutting member having a cutting tool and a chuck table holding the workpiece. As shown in FIG. 1 , the cutting device 1 is a double-spindle cutting machine (dicer), so-called double cutting machine, which is composed of a chuck table 10, two cutting members 20a, 20b, two Y-axis moving members 30a, 30b, two Z-axis moving members 40a, 40b, two trimming members 50a, 50b and a control member 90. In addition, the cutting device 1 according to the present embodiment is configured to further include an X-axis moving member, a cassette elevator 60 , a temporary placing member 70 , and a washing and drying member 80 , which are not shown. The cutting device 1 is provided with a gate-shaped post 3 on a device main body 2 .

The chuck table 10 is used to hold the workpiece W on a horizontal surface. In the present embodiment, the chuck table 10 holds the workpiece W by suction from the back surface of the workpiece W. As shown in FIG. The part constituting the surface of the chuck table 10 is a disc shape formed of porous ceramics, etc., and the part constituting the surface of the chuck table 10 is sucked by a vacuum suction path not shown and a vacuum suction channel not shown. source connection. In addition, a pair of grippers 11 are provided around the chuck table 10 . The gripper 11 is driven by an air actuator to grip the frame F around the workpiece W. As shown in FIG.

Here, the workpiece W is an object to be processed by the cutting device 1 , and in the present embodiment, the workpiece W is a wafer whose base material is silicon, sapphire, gallium, or the like. The workpiece W is attached to the dicing tape T on the back surface of the opposite side to the device side surface on which the plurality of devices are formed, and the dicing tape T attached to the workpiece W is attached to the frame F, so that The workpiece W is fixed to the frame body F. As shown in FIG.

The X-axis moving member is used to relatively move the held workpiece W relative to the cutting tool 21 in the X-axis direction. The X-axis moving member is provided so that the column portion 3 straddles the device main body 2 , and the X-axis moving member includes an X-axis ball screw, an X-axis pulse motor, and a pair of X-axis guide rails. The X-axis ball screw is arranged along the X-axis direction, and is screwed with an unillustrated nut provided on the bottom of the table moving base 4 , and one end of the X-axis ball screw is connected to the X-axis pulse motor. A pair of X-axis guide rails is formed parallel to the X-axis ball screw, and the table moving base 4 is slidably mounted on the pair of X-axis guide rails. The X-axis moving member rotates and drives the X-axis ball screw by using the rotational force generated by the X-axis pulse motor, and guides the table moving base 4 (chuck table 10 ) with a pair of X-axis guide rails while moving the The table moving base (chuck table 10 ) moves in the X-axis direction relative to the device main body 2 .

Here, the table movable base 4 is supported by the apparatus main body 2 so as to be rotatable around the central axis of the table movable base 4 . The table moving base 4 is connected to a base drive source (not shown) housed in the apparatus main body 2 . The table moving base 4 can be rotated by an arbitrary angle (for example, 90 degrees) or continuously rotated by the rotational force generated by the base driving source, and the chuck table 10 can be moved with the center of the table moving base 4 relative to the cutting tools 21a, 21b. Rotation drives such as arbitrary angular rotation and continuous rotation with the axis as the center.

The cutting members 20a, 20b are used to cut the workpiece W held by the chuck table 10 with the cutting tools 21a, 21b. The cutting member 20a provided on one side of the column portion 3 via the Y-axis moving member 30a, the Z-axis moving member 40a, and the tool moving base 6a is supported by the supporting portion 5a. The cutting member 20b provided on the other side of the column portion 3 via the Y-axis moving member 30b, the Z-axis moving member 40b, and the tool moving base 6b is supported by the support portion 5b. The two cutting members 20a, 20b are arranged to face each other across the chuck table 10 . As shown in FIG. 2, the cutting blades 21a, 21b are extremely thin cutting abrasives having a substantially ring shape, and the cutting blades 21a, 21b are detachably attached to the main shafts 22a, 22b, respectively. The main shafts 22a, 22b are rotatably supported by cylindrical housings 23a, 23b, respectively, and the main shafts 22a, 22b are respectively connected to tool drive sources not shown in the figure, and the tool drive sources are respectively housed in the housings. 23a, 23b. The cutting blades 21a, 21b are rotationally driven by the rotational force generated by the blade driving source. In addition, as for the cutting members 20a, 20b, as shown in FIG. 3, the main shafts 22a, 22b are arranged such that the rotation axes A of the main shafts 22a, 22b are parallel to the Y-axis direction.

As shown in FIG. 1 , the Y-axis moving members 30a, 30b are used to move the cutting tools 21a, 21b relative to the workpiece W held by the chuck table 10 and the dressing members 50a, 50b in the Y-axis direction, respectively. Y-axis moving members 30a, 30b are respectively provided on the column portion 3, and each of the Y-axis moving members 30a, 30b is composed of Y-axis ball screws 31a, 31b, Y-axis pulse motors 32a, 32b, and a pair of Y-axis guide rails 33. . Y-axis ball screws 31a, 31b are arranged along the Y-axis direction, and are respectively screwed with unillustrated nuts provided inside the tool moving bases 6a, 6b. One end of the Y-axis ball screws is respectively connected to the Y-axis pulse motor. 32a, 32b are connected together. A pair of Y-axis guide rails 33 is formed parallel to the Y-axis ball screws 31 a and 31 b, and the pair of Y-axis guide rails 33 respectively mount the tool moving bases 6 a and 6 b in a slidable manner. The Y-axis moving members 30a, 30b rotate and drive the Y-axis ball screws 31a, 31b by the rotational force generated by the Y-axis pulse motors 32a, 32b, thereby guiding the tool moving bases 6a, 6b by the pair of Y-axis guide rails 33, The tool moving bases 6 a and 6 b are moved in the Y-axis direction with respect to the apparatus main body 2 , respectively.

The Z-axis moving members 40a, 40b are used to move the cutting tools 21a, 21b closer to and away from the workpiece W held by the chuck table 10 and the dressing members 50a, 50b in the Z-axis direction, that is, along the main shafts 22a, 22b. The directions of the chuck table 10 are relatively moved respectively. The Z-axis moving members 40a, 40b are respectively provided on the tool moving bases 6a, 6b, and the Z-axis moving members 40a, 40b are respectively composed of Z-axis ball screws 41a, 41b, Z-axis pulse motors 42a, 42b and a pair of Z-axis moving members. Shaft guides 43a, 43b. The Z-axis ball screws 41a, 41b are arranged along the Z-axis direction, and are respectively screwed with nuts (not shown) provided inside the supporting parts 5a, 5b. One end of the Z-axis ball screws 41a, 41b is respectively connected to the Z-axis The pulse motors 42a, 42b are connected together. A pair of Z-axis guide rails 43a, 43b are formed parallel to the Z-axis ball screws 41a, 41b, and the pair of Z-axis guide rails 43a, 43b place the support parts 5a, 5b in a slidable manner. The Z-axis moving members 40a, 40b rotate and drive the Z-axis ball screws 41a, 41b by the rotational force generated by the Z-axis pulse motors 42a, 42b, thereby guiding the supporting parts 5a, 5b by a pair of Z-axis guide rails 43a, 43b. , while moving the support parts 5 a and 5 b in the Z-axis direction relative to the device main body 2 .

The trimming members 50a, 50b are respectively disposed on the device so as to be adjacent to the chuck table 10 (in the present embodiment, face each other in the Y-axis direction across the chuck table 10 ) corresponding to the cutting members 20a, 20b. Subject 2. As shown in FIG. 2, the trimming members 50a, 50b are configured to include trimming plates 51a, 51b and holding members 52a, 52b, respectively.

The trimming plates 51a, 51b are formed with grinding surfaces 53a, 53b which are horizontal surfaces. The grinding surfaces 53a, 53b are formed in an annular shape. In this embodiment, the dressing plates 51a, 51b themselves including the grinding surfaces 53a, 53b are formed in an annular shape, and openings 54a, 54b are formed in the center. The dressing plates 51a and 51b are formed of a bonding material in which abrasive grains such as white corundum and green silicon carbide having a grain size smaller than that of the cutting blades 21a and 21b are bound together with a resin or the like. .

The holding members 52a, 52b are used to hold the dressing plates 51a, 51b, respectively, so that the grinding surfaces 53a, 53b are arranged on the side opposite to the side facing the holding members 52a, 52b. The holding members 52a, 52b hold the trimming plates 51a, 51b by suctioning from the back surface on the opposite side to the grinding surfaces 53a, 53b. The parts constituting the surfaces of the holding members 52a, 52b (faces facing the trimming plates 51a, 51b) are disk-shaped formed of porous ceramics, etc., and the surfaces constituting the holding members 52a, 52b (facing the trimming plates 51a, 51b The parts facing each other) are connected to an unillustrated vacuum suction source through an unillustrated vacuum suction path. Furthermore, as shown in FIG. 3 , the holding members 52 a and 52 b are supported by the device main body 2 so as to be rotatable around a center axis B parallel to the Z axis. The holding members 52a and 52b are connected to an unillustrated dressing drive source housed in the device main body 2 . The holding members 52a, 52b can be rotated by an arbitrary angle (symbol S shown in the figure) by the rotational force generated by the dressing drive source, and the dressing plates 51a, 51b can be centered on the central axis B with respect to the cutting tools 21a, 21b. Rotary drives any rotation angle.

Here, the trimming members 50a, 50b are arranged so that the height H1 of the grinding surfaces 53a, 53b held by the holding members 52a, 52b relative to the apparatus main body 2 is the same as the height H1 of the surface of the chuck table 10 relative to the apparatus main body. The height H2 of 2 is the same or lower than said height H2. That is, in the state where the cutting tools 21a, 21b are not in contact with the surface of the chuck table 10, even if the cutting members 20a, 20b are moved in the Y-axis direction, the cutting tools 21a, 21b will not come into contact with the surface held by the holding member. The polishing surfaces 53a, 53b in the state held by 52a, 52b are in contact. Therefore, even if the cutting members 20 a , 20 b are moved in the Y-axis direction to cut the workpiece W held by the chuck table 10 , they do not interfere with the dressing members 50 a , 50 b. Thereby, since the trimming members 50a, 50b can be arranged near the chuck table 10, the amount of movement in the Y-axis direction from the chuck table 10 to the trimming members 50a, 50b can be reduced, and the The time required for straight dressing after cutting and then shifting to cutting again (hereinafter simply referred to as "dressing time").

Furthermore, the trimming members 50a, 50b are arranged on a tool moving path, which is a path along which the cutting tools 21a, 21b move via the Y-axis moving members 30a, 30b. In this embodiment, the trimming members 50a, 50b are arranged such that their central axis B is located on the rotation axis A of the spindles 22a, 22b, that is, the radial direction of the trimming plates 51a, 51b is parallel to the Y-axis direction. Therefore, when the cutting members 20a, 20b are moved in the approaching direction in the Z-axis direction with respect to the trimming members 50a, 50b, cutting The cutters 21a, 21b are in contact with the trimming plates 51a, 51b, and the said straight line is a straight line parallel to the Z-axis direction and passing through the rotation axis A. As shown in FIG.

The cassette elevator 60 has a plurality of storage portions for storing workpieces W one by one along the Z-axis direction, and the cassette elevator 60 accommodates a plurality of workpieces W together. The cassette elevator 60 is configured to freely move up and down in the Z-axis direction in a space portion formed inside the apparatus main body 2 . The temporary placing member 70 has a pair of rails 71 for temporarily placing the workpiece W before and after processing on the pair of rails 71 . The cleaning and drying unit 80 has a rotary table 81 for placing and holding the processed workpiece W. As shown in FIG. The rotary table 81 is connected to a rotary table drive source housed in the apparatus main body 2 . When the workpiece W is held on the rotary table 81, the cleaning and drying member 80 rotates the workpiece W by the rotational force generated by the driving source of the rotary table, and sprays the workpiece W from a washing liquid spraying device (not shown). W is sprayed with a cleaning liquid to perform cleaning, and a gas spraying device (not shown) sprays gas on the cleaned workpiece W to dry it.

The control means 90 is used to individually control the above-mentioned components constituting the cutting device 1 . The control means 90 is used to cause the cutting device 1 to perform a machining operation for machining the workpiece W. As shown in FIG. Furthermore, the control member 90 is used to control the straight dressing of the cutting members 20a, 20b by the dressing members 50a, 50b. In addition, the control means 90 is mainly constituted by an unillustrated microprocessor having, for example, an arithmetic processing device constituted by a CPU or the like, ROM, RAM, etc., and the control means 90 is connected to the display The display means for the state of the processing operation is connected to the operation means for the operator to register the processing content information and the like.

Next, the machining operation of the cutting device 1 according to the present embodiment will be described. First, the operator registers the processing content information, and starts the processing operation when there is a processing operation start command. During the processing operation, the workpiece W is carried out from the cassette elevator 60 to the temporary placement member 70 by a loading and unloading member not shown, and after the workpiece W is placed on the pair of rails 71 of the temporary placement member 70, The workpiece W is conveyed to the chuck table 10 by a conveyance member not shown, and is held by the chuck table 10 . The chuck table 10 holding the workpiece W is moved to the machining start position in the X-axis direction, and the outer circumference of the workpiece W is cut along the circumferential direction to remove a part of the outer circumference of the workpiece W (hereinafter, simply referred to as " Removal processing"), or dividing processing for cutting the workpiece along planned dividing lines to separate a plurality of devices described later into small pieces, etc. In the removal process, one or both cutting tools 21a, 21b of the cutting tools 21a, 21b are positioned on the outer periphery of the workpiece W, and by rotating the workpiece W at this position, one cutting tool A part of the outer circumference of the workpiece W is cut and removed in the Z-axis direction. At the time of divisional processing, one or both of the cutting tools 21a, 21b and the workpiece W are changed in relative position along the planned dividing line, while one or both of the cutting tools 21a, 21b 21b cuts the workpiece W, and divides each device into dice with dicing bands T left. The processed workpiece W is conveyed from the chuck table 10 to the washing and drying member 80 by a conveying member not shown, and after being cleaned and dried by the washing and drying member 80, it is conveyed to The temporary storage unit 70 is then loaded into the cassette elevator 60 from the temporary storage unit 70 by the loading and unloading unit. In addition, since there are two cutting members 20a, 20b, the cutting of the workpiece W by the cutting device 1 may alternate the cutting members 20a, 20b every time one or more workpieces W are cut, or After the one cutting tool reaches the limit of wear (including partial wear), it may be replaced with the other cutting tool.

Next, straightening of the cutting device 1 according to the present embodiment will be described. Fig. 4 is a flow chart showing straightness trimming performed by the cutting device according to the embodiment. In addition, since the straightening of the cutting members 20a and 20b is the same, only the case where the cutting member 20a is straightened will be described here. The straight dressing of the cutting tool 21a is performed by relatively moving the rotating cutting tool 21a and the dressing member 50a.

First, the control member 90 judges whether it is necessary to straighten the cutting member 20 a (step ST1 ). Here, it is judged whether or not the uneven wear of the cutting tool 21a has increased so much that the cutting tool 21a needs to be straightened by the dressing member 50a. In addition, it is preferable to determine whether flat dressing is necessary based on the machining distance and the wear amount of the workpiece W after removal machining by the cutting member 20 a. Preferably, based on the number of workpieces W after removal of the machining, the diameter of the workpiece W, the number and distance of the planned dividing lines with respect to the workpiece W, the cutting amount of the cutting tool 21a, the cutting tool 21a At least one of the hardness, etc. to judge the processing distance and wear amount.

Next, when the control means 90 determines that it is necessary to straighten the cutting means 20a (Yes in step ST1), it is determined whether cutting is being performed by the cutting means 20a (step ST2). In addition, when it is judged that the cutting member 20 a is not necessary to be straightened (Negative of step ST1 ), step ST1 is executed in a loop until it is judged that straightening is necessary.

Next, when the control means 90 determines that the cutting means 20a is not being cut (No in step ST2), straightening of the cutting means 20a is carried out (step ST3). Here, the straight dressing is carried out when the cutting member 20a requiring straight dressing is not currently in the cutting process. The straightness dressing is performed when the cutting member 20a is not in the cutting process during the cutting process by 20b, or when the machining operation of the workpiece W by the cutting device 1 is not being performed.

In straightening the cutting member 20a, first, the control member 90 moves the cutting tool 21a at the standby position without cutting to a predetermined cutting position by the Z-axis moving member 40a. Here, the predetermined cutting position is a position where the cutting tool 21a faces the trimming plate 51a in the Y-axis direction, that is, a position where the cutting tool 21a can contact the trimming plate 51a in the Z-axis direction. Moreover, the predetermined incision position is exactly the incision amount of the cutting tool 21a relative to the trimming plate 51a, which is determined according to the following conditions: the degree of partial wear of the cutting tool 21a; The number of times of contact of 21 a with the polishing surface 53 a (for example, increases when performing straight dressing by one contact, and decreases when performing straight dressing by repeating multiple contacts).

Next, the control member 90 moves the rotating cutting tool 21 a in the Y-axis direction (here, the direction to contact the grinding surface 53 a ) from the predetermined cutting position by the Y-axis moving member. The cutting blade 21a moves in the Y-axis direction while rotating to contact the grinding surface 53a, and the tip of the cutting blade 21a is straightened by the dressing plate 51a. In addition, the control member 90 moves the rotating cutting blade 21a in the Y-axis direction until the cutting blade 21a and the grinding surface 53a are out of contact. That is, the control member 90 moves at least the rotating cutting tool 21a from one end to the other end of the grinding surface 53a. Here, from one end to the other end of the grinding surface 53a includes: from the outer periphery of the trimming plate 51a to the radially opposite outer periphery (from C1 to C2 shown in FIG. 3, or from C2 to C1), from the trimming plate 51a From the outer periphery to the radially facing opening 54a (from C1 to D1 shown in FIG. 3, or from C2 to D2), from the opening 54a of the trimming plate 51a to the radially facing outer periphery (from D1 to C1, or from D2 to C2). Therefore, at the predetermined cutting position, the cutting tool 21a is located near the outer periphery of the trimming plate 51a or the opening 54a of the trimming plate 51a when viewed along the Z-axis direction (when viewed along the vertical direction in FIG. 3 ). Furthermore, for straight dressing, the cutting tool 21a is moved in the Y-axis direction by at least a distance corresponding to the diameter or radius of the dressing plate 51a. In addition, the control member 90 rotates the cutting blade 21a while moving the cutting blade 21a from the predetermined cutting position in the Y-axis direction, but the rotation may be started before or after the cutting blade 21a moves to the predetermined cutting position. For example, after cutting with the cutting blade 21a, the cutting blade 21a moved to the standby position may be moved to the predetermined cutting position without stopping the rotation.

Next, the control member 90 rotates the holding member 52a after the cutting tool 21a is out of contact with the grinding surface 53a. Here, when the rotating cutting blade 21a is moved in the Y-axis direction with respect to the grinding surface 53a in contact, linear cutting marks are formed on the grinding surface 53a. The area in which the cutting marks are formed (hereinafter, simply referred to as "cutting mark area") of the grinding surface 53a has a greater effect on the cutting of the cutting tool 21a than the area where no cutting marks are formed (hereinafter, simply referred to as "non-cutting mark area"). Performance is reduced, so it is best not to use again for flat trimming. Therefore, in order to contact the cutting tool 21a with the non-cutting mark region when the cutting tool 21a contacts the grinding surface 53a again, the control member 90 rotates the holding member 52a so that the non-cutting mark region and the cutting tool 21a are aligned on the moving path of the tool. The Z-axis directions (when viewed from vertically below in FIG. 3 ) face each other. In addition, the rotation angle can also be a predetermined value, but since the width of the cutting mark (the length in the direction perpendicular to the direction in which the cutting mark is formed in the horizontal plane) changes with the predetermined cutting position, it can also be determined according to the predetermined cutting position. Rotation angle. In addition, a part of the cut mark area may be included in the non-cut mark area. For example, in the Z-axis direction (when FIG. 3 is viewed from vertically below), the cutting mark region may be included on the side of the opening 54 a on the moving path of the tool. In this case, the rotation angle of the trimming plate 51a can be reduced, and compared with the case where the movement path of the tool does not include the cutting mark area at all in the Z-axis direction (when FIG. 3 is viewed from vertically below), it can The trimming plate 51a is repeatedly used for flat trimming.

As described above, the cutting device 1 according to this embodiment arranges the trimming plates 51a, 51b so as to be rotatable independently of the chuck table 10, and relatively moves the cutting blades 21a, 21b with respect to the trimming plates 51a, 51b. This performs straight dressing of the cutting tools 21a, 21b. Therefore, compared with the case where the workpiece W is removed from the chuck table for straight dressing, and the trimming plate is held on the chuck table for straight dressing, there is no need for an operator or a transport member. Because it is suitable for performing straight dressing operations, it is possible to simplify the straight dressing work.

In addition, straightness dressing can be performed using the time when the workpiece W is not being cut by the cutting tools 21a and 21b. For example, in the cutting device 1 described above, when one of the cutting blades 21a, 21b is being cut, the other cutting blade that is not being cut can be straightened. Moreover, in the cutting device having only one cutting tool, it is possible to remove the processed workpiece W from the chuck table 10 and keep a new workpiece W until it reaches a state where cutting can be performed. The tool is trimmed straight. Therefore, it is not necessary to interrupt the cutting process of the workpiece W, or even if it is interrupted, the interruption time can be shortened, and productivity can be improved.

Furthermore, since the grinding surfaces 53a, 53b of the trimming plates 51a, 51b are formed in an annular shape and are rotatable about the central axis B, even if the cutting blades 21a, 21b are moved in the Y-axis direction, the grinding surfaces 53a, 53b 53b forms the cutting marks, and by rotating the trimming plates 51a and 51b, when the cutting blades 21a and 21b are moved in the Y-axis direction again, the cutting blades 21a and 21b can contact the cutting blades 21a and 21b in the non-cutting mark region. Therefore, since the trimming boards 51a, 51b can be repeatedly used for straight trimming by rotating the trimming boards 51a, 51b, productivity can be improved. If the grinding surface is disc-shaped, even if it is rotated around the central axis for repeated flat dressing, the cutting tool will pass through the grinding surface on the central axis many times, and in order to keep the cutting tool from contacting the grinding surface, It is necessary to move the cutting tool by a distance equivalent to the diameter. However, when the grinding surfaces 53a, 53b are annular, by moving the cutting tools 21a, 21b relative to the trimming plates 51a, 51b by a distance corresponding to the radius, the cutting tools 21a, 21b and the grinding surfaces 53a, 53b can be non-aligned. contact, it is not necessary to move the cutting tools 21a, 21b by a distance corresponding to the diameter to carry out straight dressing. Furthermore, even if the cutting blades 21a, 21b are moved by a distance corresponding to the diameter, since the openings 54a, 54b are formed on the central axis B, the cutting blades 21a, 21b do not pass through the grinding surfaces 53a, 53b multiple times. Therefore, the durability of the trimming boards 51a and 51b can be improved. In addition, in the cutting process, it is not necessary to use a moving member for relative movement of the cutting members 20a, 20b and the workpiece W, and it is possible to move the tool in the Z-axis direction (the situation in FIG. 3 viewed from vertically below). The non-cutting area of the path is in place. Therefore, since the cutting process of the workpiece W is not interrupted, productivity can be improved.

In addition, in the above-mentioned embodiment, the trimming plates 51a, 51b are constituted as one ring-shaped member formed with the grinding surfaces 53a, 53b, but the present invention is not limited thereto, and the trimming layer including the grinding surfaces 53a, 53b may also be In this case, only the trimming layer may be configured in a ring shape.

Claims (3)

1. a topping machanism, described topping machanism has: chuck table, and described chuck table is used for machined object being remained on the surface being formed as horizontal plane; Cutting member, described cutting member has the main shaft that can rotate and the cutting tool being assemblied in described main shaft; Y-axis mobile member, described Y-axis mobile member moves along the direction and Y direction with the rotation axis parallel of described main shaft for making described main shaft; With Z axis mobile member, described Z axis mobile member for make described main shaft along close to and move away from the direction of chuck table and Z-direction, the feature of described topping machanism is,

Described topping machanism also has trim components, and described trim components is adjacent with described chuck table, and described trim components is disposed in and drives on the mobile route of described cutting tool movement by Y-axis mobile member,

Described trim components has finishing board and retaining member, and described retaining member is for keeping described finishing board, and described retaining member can rotate centered by its central axis,

The height of the abradant surface of the finishing board kept by described retaining member is configured to the height on the surface being equal to or less than described chuck table, and the abradant surface of described finishing board is formed as ring-type.

2. topping machanism according to claim 1, is characterized in that,

When utilizing described trim components to repair described cutting tool, described cutting tool is moved to and described finishing board predetermined cutting into position in opposite directions in Y direction, utilize described Y-axis mobile member that the described cutting tool of rotation is moved from described predetermined cutting into position to the direction contacted with described abradant surface, after described cutting tool and described abradant surface become noncontact, described retaining member is rotated, to make not having the region of cutting mark and described cutting tool in Z-direction in opposite directions in described abradant surface on described mobile route.

3. topping machanism according to claim 1 and 2, is characterized in that,

Described trim components is adapted to and is positioned at described rotation from central axis described during top view.