CN103021511B - A kind of crystal silicon solar energy battery front electrode silver slurry and preparation method thereof - Google Patents
A kind of crystal silicon solar energy battery front electrode silver slurry and preparation method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及晶体硅太阳能电池领域,具体地,涉及一种晶体硅太阳能电池正面电极银浆及其制备方法。The invention relates to the field of crystalline silicon solar cells, in particular to a silver paste for a front electrode of a crystalline silicon solar cell and a preparation method thereof.
背景技术Background technique
晶体硅太阳能电池作为主要的太阳能光伏发电单元得以迅速发展。太阳能电池正面作为直接接收太阳能的一面,通过多层结构以求达到最宽的接收谱线和最少的光反射消耗。常规商用晶体硅太阳能电池片正面包含银电极栅线、不导电的减反射层、n型扩散层、p-n结区四层主要结构。正面电极作为晶体硅太阳能电池的重要组成部分,电极和n型硅间的接触电阻、电极本身的电导率、以及电极的宽高比对其光电转化效率有着直接的影响,成为该行业的主要研究方向之一。Crystalline silicon solar cells have developed rapidly as the main solar photovoltaic power generation unit. The front side of the solar cell is the side that directly receives solar energy, and a multi-layer structure is used to achieve the widest receiving spectral line and the least light reflection consumption. The front side of conventional commercial crystalline silicon solar cells includes four main structures of silver electrode grid lines, non-conductive anti-reflection layer, n-type diffusion layer, and p-n junction region. The front electrode is an important part of crystalline silicon solar cells. The contact resistance between the electrode and n-type silicon, the conductivity of the electrode itself, and the aspect ratio of the electrode have a direct impact on its photoelectric conversion efficiency, which has become the main research in this industry. one of the directions.
目前,商用晶体硅太阳能电池正面电极的制作方法,通常采用印刷和喷墨打印导电银浆形成高宽比尽可能大的栅线结构,随后经过室温到780℃附近的快速烧结过程,形成与n型扩散层紧密接触的导电电极。在该烧结过程中,通常通过浆料中所含有的腐蚀性玻璃料,如常用的硼硅酸铅玻璃料在升温过程中逐渐熔融沉积,铺展在硅片和银粉之间溶解n型硅表面的ARC(减反射)膜和浆料中的Ag粉。随后在降温过程中,Ag过饱和的玻璃料在n型硅表面析出Ag,形成倒金字塔形的Ag岛将光生电流传导至上层的Ag栅线。该电流传导通路由以下几个部分构成:n型硅-Ag岛-玻璃层-Ag电极。晶体硅太阳能电池的实际输出功率受该电流通路的电阻影响较大,一般要求Ag电极自身的低电阻,玻璃层薄且电导率相对较高,Ag岛的数量多且体积不宜过大,以降低整个回路中的串联电阻,提高晶体硅太阳能电池片的整体光电转化效率。但是现有的太阳能电池正面电极的串联电阻较大,使其光电转化效率低。At present, the production method of the front electrode of commercial crystalline silicon solar cells usually adopts printing and inkjet printing of conductive silver paste to form a grid line structure with as large an aspect ratio as possible, and then undergoes a rapid sintering process at room temperature to around 780°C to form a grid line structure similar to n Conductive electrodes that are in close contact with the diffusion layer. In this sintering process, the corrosive glass frit contained in the slurry, such as the commonly used lead borosilicate glass frit, is gradually melted and deposited during the heating process, and spread between the silicon wafer and the silver powder to dissolve the n-type silicon surface. Ag powder in ARC (anti-reflection) film and paste. Subsequently, during the cooling process, the Ag supersaturated glass frit precipitates Ag on the n-type silicon surface, forming an inverted pyramid-shaped Ag island to conduct the photo-generated current to the upper Ag grid line. The current conduction path is composed of the following parts: n-type silicon-Ag island-glass layer-Ag electrode. The actual output power of crystalline silicon solar cells is greatly affected by the resistance of the current path. Generally, the Ag electrode itself is required to have low resistance, the glass layer is thin and the conductivity is relatively high. The number of Ag islands is large and the volume should not be too large. The series resistance in the whole loop improves the overall photoelectric conversion efficiency of the crystalline silicon solar cell. However, the series resistance of the front electrode of the existing solar cell is relatively large, so that the photoelectric conversion efficiency is low.
发明内容Contents of the invention
本发明为解决现有的太阳能电池正面电极银浆存在串联电阻大,光电转化效率低的缺陷,从而提供一种串联电阻小,光电转化效率高的太阳能电池正面电极银浆及其制备方法。The invention aims to solve the defects of large series resistance and low photoelectric conversion efficiency in the existing solar cell front electrode silver paste, thereby providing a solar cell front electrode silver paste with small series resistance and high photoelectric conversion efficiency and a preparation method thereof.
降低Ag电极自身的低电阻要求Ag电极在烧结过程中尽量致密,但目前商用的烧结工艺,有效烧结时间非常短(<10s),Ag电极需要熔融的玻璃料帮助烧结;另外玻璃料还需要沉积铺展在硅片和银粉之间溶解n型硅表面的ARC膜。Reducing the low resistance of the Ag electrode itself requires that the Ag electrode be as dense as possible during the sintering process, but the effective sintering time of the current commercial sintering process is very short (<10s), and the Ag electrode needs molten glass frit to help sinter; in addition, the glass frit needs to be deposited Spread the ARC film on the dissolved n-type silicon surface between the silicon wafer and the silver powder.
本发明的发明人经过大量的实验得出,普通正面银浆中采用单一的玻璃料,在同时实现上述两种功能的情况下将会出现矛盾的现象,其主要原因是,在较低的工艺温度下(<740℃)玻璃粉不能有效的熔融沉积铺展在硅片和银粉之间溶解n型硅表面的ARC膜,且Ag粉此时的烧结活性不够,难以烧结致密;提高烧结温度提高20℃以上或增加烧结时间,银粉之间用于助烧的玻璃料也会沉积下来,导致Ag电极烧结不致密、玻璃层过厚以及对硅片的腐蚀过量,烧穿p/n结等诸多问题。The inventors of the present invention have obtained through a large number of experiments that if a single glass frit is used in the common front silver paste, contradictory phenomena will appear when the above two functions are realized simultaneously. At high temperature (<740°C) the glass frit cannot be fused and deposited effectively to spread the ARC film on the surface of the n-type silicon dissolved between the silicon wafer and the silver powder, and the sintering activity of the Ag powder is not enough at this time, so it is difficult to sinter densely; increase the sintering temperature by 20 If the temperature is higher than ℃ or the sintering time is increased, the glass frit used for sintering between the silver powders will also be deposited, resulting in many problems such as incomplete sintering of the Ag electrode, excessive thickness of the glass layer, excessive corrosion of the silicon wafer, and burn-through of the p/n junction. .
本发明提供了一种晶体硅太阳能电池正面电极银浆,所述银浆包括银粉、第一玻璃粉、第二玻璃粉及有机组分;以银浆的总重量为基准,所述银粉的含量为75-90wt%,所述第一玻璃粉的含量为1-3wt%,所述第二玻璃粉的含量为1-5wt%,所述有机组分的含量为6-25wt%;所述第一玻璃粉的软化点为350-550℃,所述第二玻璃粉的软化点为550-650℃,并且第一玻璃粉与第二玻璃粉的软化点之间相差至少70℃。The invention provides a silver paste for the front electrode of a crystalline silicon solar cell, the silver paste includes silver powder, a first glass powder, a second glass powder and an organic component; based on the total weight of the silver paste, the content of the silver powder 75-90wt%, the content of the first glass powder is 1-3wt%, the content of the second glass powder is 1-5wt%, the content of the organic component is 6-25wt%; The softening point of one glass powder is 350-550°C, the softening point of the second glass powder is 550-650°C, and the difference between the softening points of the first glass powder and the second glass powder is at least 70°C.
本发明还提供了一种电极银浆的制备方法,该方法包括将银粉末、第一玻璃粉、第二玻璃粉以及有机组分混合并研磨。The invention also provides a preparation method of electrode silver paste, which comprises mixing and grinding silver powder, first glass powder, second glass powder and organic components.
本发明的晶体硅太阳能电池正面电极银浆,通过在银浆中添加不同软化点的两种玻璃料粉末,其中第一玻璃粉在烧结过程中用于腐蚀减反射膜,第二玻璃粉在烧结过程中用于帮助银粉烧结,从而达到有效控制对硅片表面的腐蚀程度防止烧穿p/n结区,同时控制发射极与银电极之间玻璃层的厚度,有利于浆料在更为宽广的烧结温度窗口内获得稳定而优秀的电性能指标。The silver paste of the front electrode of the crystalline silicon solar cell of the present invention is obtained by adding two kinds of glass frit powders with different softening points to the silver paste, wherein the first glass frit is used to corrode the anti-reflection film during the sintering process, and the second glass frit is used to corrode the antireflection film during the sintering process. In the process, it is used to help the silver powder sinter, so as to effectively control the degree of corrosion on the surface of the silicon wafer to prevent burning through the p/n junction area, and at the same time control the thickness of the glass layer between the emitter and the silver electrode, which is beneficial to the paste in a wider Stable and excellent electrical performance indicators can be obtained within the sintering temperature window.
具体实施方式detailed description
为了使本发明所解决的技术问题、技术方案及有益效果更加清楚明白,以下结合实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明提供了一种晶体硅太阳能电池正面电极银浆,所述银浆包括银粉、第一玻璃粉、第二玻璃粉及有机组分;以银浆的总重量为基准,所述银粉的含量为75-90wt%,所述第一玻璃粉的含量为1-3wt%,所述第二玻璃粉的含量为1-5wt%,所述有机组分的含量为6-25wt%;所述第一玻璃粉的软化点为350-550℃,所述第二玻璃粉的软化点为550-650℃,并且第一玻璃粉与第二玻璃粉的软化点之间相差至少70℃。The invention provides a silver paste for the front electrode of a crystalline silicon solar cell, the silver paste includes silver powder, a first glass powder, a second glass powder and an organic component; based on the total weight of the silver paste, the content of the silver powder 75-90wt%, the content of the first glass powder is 1-3wt%, the content of the second glass powder is 1-5wt%, the content of the organic component is 6-25wt%; The softening point of one glass powder is 350-550°C, the softening point of the second glass powder is 550-650°C, and the difference between the softening points of the first glass powder and the second glass powder is at least 70°C.
第一玻璃粉与第二玻璃粉的软化点之间相差至少70℃,以保证在合适的工艺条件下,特别是高温或者较长烧结时间的情况下,第一种玻璃粉充分沉降润湿多晶体硅基片表面,同时第二种玻璃粉不至于大量沉积增加玻璃层厚度,影响串联电阻。The difference between the softening points of the first glass powder and the second glass powder is at least 70°C to ensure that the first glass powder is fully settled and wetted under suitable process conditions, especially at high temperature or long sintering time. On the surface of the crystalline silicon substrate, at the same time, the second glass powder will not be deposited in large quantities to increase the thickness of the glass layer and affect the series resistance.
所述第一玻璃粉的软化点不应低于350℃,否则浆料中有机物质还未分解挥发殆尽,其排出通路就被熔融玻璃填满,将造成残碳、内部孔隙、内应力等诸多问题。软化点不应高于550℃,否则难以有效的沉积铺展在硅片和银粉之间。The softening point of the first glass powder should not be lower than 350°C, otherwise the organic matter in the slurry has not been decomposed and volatilized, and its discharge path will be filled with molten glass, which will cause residual carbon, internal pores, internal stress, etc. Many questions. The softening point should not be higher than 550°C, otherwise it will be difficult to effectively deposit and spread between the silicon wafer and the silver powder.
所述第二玻璃粉的软化点范围为550-650℃。软化点低于550℃的情况下,玻璃粉过早熔融沉积,造成Si片和Ag电极之间玻璃层过厚,串联电阻增加,也不能起到助烧Ag电极烧结的作用。软化点高于650℃的情况下,银粉在烧结时,玻璃料黏度较高,起不到助烧作用。The softening point range of the second glass frit is 550-650°C. When the softening point is lower than 550°C, the glass powder is fused and deposited prematurely, causing the glass layer between the Si sheet and the Ag electrode to be too thick, increasing the series resistance, and cannot play the role of assisting the sintering of the Ag electrode. When the softening point is higher than 650°C, when the silver powder is sintered, the glass frit has a high viscosity and cannot play a role in sintering.
优选地,所述第一玻璃粉与第二玻璃粉的软化点之间相差160-260℃。Preferably, the difference between the softening points of the first glass powder and the second glass powder is 160-260°C.
所述第一玻璃粉的用量不应小于1wt%,否则不能有效的铺展在硅片和银粉之间,也无法完全腐蚀70-80nm厚度的ARC层。第一玻璃粉的用量也不应大于3wt%,否则玻璃层过厚,增加串联电阻;或者腐蚀过量,烧穿p/n结,造成短路。优选情况下,第一玻璃粉的用量为1.2-2wt%。The amount of the first glass powder should not be less than 1wt%, otherwise it cannot be effectively spread between the silicon wafer and the silver powder, and the ARC layer with a thickness of 70-80nm cannot be completely corroded. The amount of the first glass frit should not be greater than 3wt%, otherwise the glass layer is too thick, increasing the series resistance; or corroding too much, burning through the p/n junction, causing a short circuit. Preferably, the amount of the first glass powder is 1.2-2wt%.
所述第二玻璃粉的用量不应小于1wt%,否则不能有效均匀地分散于银粉之间,第二玻璃粉的用量也不应大于5wt%,否则玻璃料将形成连通,割裂Ag电极中Ag晶体,严重降低Ag电极的电导率。优选情况下,第二玻璃粉的用量为2.5-3.5wt%。The consumption of the second glass frit should not be less than 1wt%, otherwise it cannot be effectively and evenly dispersed between the silver powders, and the consumption of the second glass frit should not be greater than 5wt%, otherwise the glass frit will form a connection and split the Ag in the Ag electrode. crystals, severely reducing the conductivity of the Ag electrode. Preferably, the amount of the second glass powder is 2.5-3.5wt%.
优选地,所述第一玻璃粉和第二玻璃粉的平均粒径为0.1-10微米。当粒径小于0.1微米时,粉末团聚,难以在浆料中分散;当粒径大于10微米时,难以用于细栅线电极的制备。更优选情况下,第一玻璃粉的平均粒径为0.3-1.5微米,较小的粒径有利于第一玻璃粉熔融后快速通过银粉之间的通道,沉积平铺在Si片和银粉之间。更优选情况下,第二玻璃粉的平均粒径为2-6微米,相对较大粒径有利于单个玻璃粉与周边更多的银粉相接触,帮助烧结,但当粒径过大时,相同用量的情况下,玻璃粉的总数减少,也不利于均匀有效的分散在Ag粉之间。Preferably, the average particle size of the first glass powder and the second glass powder is 0.1-10 microns. When the particle size is less than 0.1 micron, the powder is agglomerated and it is difficult to disperse in the slurry; when the particle size is greater than 10 micron, it is difficult to be used in the preparation of fine-grid electrodes. More preferably, the average particle size of the first glass powder is 0.3-1.5 micron, and the smaller particle size is conducive to the passage between the first glass powder to pass through the silver powder quickly after melting, and deposit and spread between the Si sheet and the silver powder . More preferably, the average particle size of the second glass powder is 2-6 microns, relatively large particle size is conducive to the contact of single glass powder with more silver powder in the periphery, and helps sintering, but when the particle size is too large, the same In the case of lower dosage, the total number of glass powders is reduced, which is also not conducive to uniform and effective dispersion among Ag powders.
优选地,所述第一玻璃粉含有65-90wt%的Pb的化合物或Bi的化合物,或化合物的组合。更优选为含有70-85wt%PbO的硼硅酸铅玻璃。其中Pb或Bi的化合物是用于腐蚀ARC膜的主要物质。例如,玻璃料中的PbO通过与ARC发生氧化还原反应生成SiO2和Pb,其中SiO2溶解进入玻璃料中。玻璃中的Bi3+也有同样的效果。玻璃中的Pb或Bi的化合物含量比需超过65wt%以上,才能保证反应浓度,不断地有效地腐蚀厚度在70-80nm厚度的ARC膜。同时超过65wt%以上的Pb或Bi的化合物在玻璃中还起到强烈降低玻璃软化点的作用,也可以通过添加B2O3和一定量的碱金属降低玻璃的软化点。也可添加其他化合物调整玻璃的热膨胀系数、软化点、润湿性、黏度等性能。Preferably, the first glass powder contains 65-90wt% Pb compound or Bi compound, or a combination of compounds. More preferred is lead borosilicate glass containing 70-85 wt% PbO. Among them, the compound of Pb or Bi is the main substance used to corrode the ARC film. For example, PbO in the glass frit generates SiO2 and Pb through a redox reaction with ARC, where SiO2 dissolves into the glass frit. Bi 3+ in glass also has the same effect. The compound content ratio of Pb or Bi in the glass needs to exceed 65wt%, so as to ensure the reaction concentration and continuously and effectively corrode the ARC film with a thickness of 70-80nm. At the same time, more than 65wt% Pb or Bi compounds in the glass can also strongly lower the softening point of the glass, and the softening point of the glass can also be lowered by adding B 2 O 3 and a certain amount of alkali metal. Other compounds can also be added to adjust the thermal expansion coefficient, softening point, wettability, viscosity and other properties of the glass.
优选地,所述第二玻璃粉对成分没有严格要求,可以选用SiO2、B2O3、PbO、ZnO、Bi2O3、V2O5及碱金属化合物等作为玻璃的主体成分。也可添加其他化合物调整玻璃的热膨胀系数、软化点、润湿性、黏度等性能。优选地,所述第二玻璃粉含有SiO2、B2O3、PbO、ZnO、Bi2O3、V2O5及碱金属化合物中的至少一种。Preferably, the second glass frit has no strict requirements on components, and SiO 2 , B 2 O 3 , PbO, ZnO, Bi 2 O 3 , V 2 O 5 and alkali metal compounds can be selected as the main components of the glass. Other compounds can also be added to adjust the thermal expansion coefficient, softening point, wettability, viscosity and other properties of the glass. Preferably, the second glass frit contains at least one of SiO 2 , B 2 O 3 , PbO, ZnO, Bi 2 O 3 , V 2 O 5 and alkali metal compounds.
优选地,所述银粉的形貌可以为片状、粒状、胶体状、无定形态等任意形状或多种形貌粉末的组合物,平均粒径为0.1-15微米,粉末振实密度大于3g/cm3;更优选情况下,可选择粒状,平均粒径为0.5-2微米之间的银粉。该类型的Ag粉末烧结活性最为合适,在高于740℃的快速烧结条件下均能基本烧结致密。若选择粒径更小的银粉末,其振实密度难以保证大于3g/cm3,易于团聚,导致其在中浆料分散不均匀,且影响浆料的流动性能。Preferably, the shape of the silver powder can be any shape such as flake, granular, colloidal, amorphous, or a combination of powders with various shapes, the average particle size is 0.1-15 microns, and the powder tap density is greater than 3g /cm 3 ; more preferably, granular silver powder with an average particle size of 0.5-2 microns can be selected. The sintering activity of this type of Ag powder is the most suitable, and it can be basically sintered and dense under the condition of rapid sintering higher than 740 °C. If silver powder with a smaller particle size is selected, it is difficult to ensure that the tap density is greater than 3g/cm 3 , and it is easy to agglomerate, resulting in uneven dispersion in the slurry and affecting the fluidity of the slurry.
优选地,所述银粉在浆料中的含量不应低于75wt%,否则即使有玻璃料帮助烧结,也难以烧结致密。更优选情况下,银粉含量为78-85wt%。Preferably, the content of the silver powder in the paste should not be lower than 75wt%, otherwise, even with glass frit to help sintering, it is difficult to sinter densely. More preferably, the silver powder content is 78-85wt%.
根据本发明所提供的电极银浆,所述有机组分包括粘结剂、有机溶剂和添加剂。所述粘结剂为乙基纤维素;所述有机溶剂为松油醇;添加剂为润湿剂或流变助剂。According to the electrode silver paste provided by the present invention, the organic component includes a binder, an organic solvent and additives. The binder is ethyl cellulose; the organic solvent is terpineol; the additive is a wetting agent or a rheological aid.
本发明还提供了该正极银浆的制备方法,该方法包括将银粉末、第一玻璃粉、第二玻璃粉以及有机组分混合并研磨。The present invention also provides a method for preparing the positive electrode silver paste, which includes mixing and grinding silver powder, first glass powder, second glass powder and organic components.
根据本发明具体实施方式的太阳电池正面电极的制备方法,包括如下步骤:将根据本发明具体实施方式的正面电极浆料用丝网印刷法印在半导体基体的受光面上,烘干,然后快速烧结形成太阳电池正面电极;所述快速烧结过程的峰值温度为755-765℃,峰值温度时间为1-3秒。The method for preparing the front electrode of a solar cell according to the specific embodiment of the present invention comprises the following steps: printing the front electrode paste according to the specific embodiment of the present invention on the light-receiving surface of the semiconductor substrate by screen printing, drying, and then rapid sintering Forming the front electrode of the solar cell; the peak temperature of the rapid sintering process is 755-765° C., and the peak temperature time is 1-3 seconds.
正面电极的快速烧结方法是当今大规模工业化生产晶体硅太阳电池的成熟的金属化工艺,一般包括4个阶段:燃烧有机物阶段、升温阶段、峰值温度区间、降温阶段。The rapid sintering method of the front electrode is a mature metallization process for the large-scale industrial production of crystalline silicon solar cells today. It generally includes four stages: the combustion of organic matter stage, the heating stage, the peak temperature range, and the cooling stage.
燃烧有机物阶段一般在300℃,温度过高会造成金属—半导体之间接触电阻过大,温度过低会导致有机物挥发不完全,也会造成同样问题。The stage of burning organic matter is generally at 300°C. If the temperature is too high, the contact resistance between metal and semiconductor will be too large. If the temperature is too low, the organic matter will not be completely volatilized, which will also cause the same problem.
升温阶段有快速升温和缓慢升温2种。迅速升温的工艺一般是在烧结过程的前80秒保持温度在350℃左右,80秒左右时在几秒钟内(3-5秒)迅速升温到780℃。缓慢升温工艺一般是烧结过程的前40秒温度保持在300℃左右,40秒左右时在约50秒内升温到750℃以上。具体的升温速率由使用的烧结炉控制。There are two kinds of heating stages: rapid heating and slow heating. The process of rapid temperature rise is generally to keep the temperature at about 350°C in the first 80 seconds of the sintering process, and then rapidly increase the temperature to 780°C within a few seconds (3-5 seconds) at about 80 seconds. The slow heating process generally keeps the temperature at about 300°C in the first 40 seconds of the sintering process, and then raises the temperature to above 750°C within about 50 seconds after about 40 seconds. The specific heating rate is controlled by the sintering furnace used.
峰值温度区间是比较关键的工艺过程,尤其要注意峰值温度的设定。峰值温度决定了烧结过程中银铝合金、铝硅合金中金属离子的浓度,也就是说,烧结温度控制着合金化过程中金属离子的扩散长度,对正面电极、背面电极的烧结,以及烧结后的太阳电池的串联电阻和填充因子均有较大影响。按照本发明具体实施方式的太阳电池正面电极的制备方法,所述烧结过程的峰值温度为750-790℃,峰值温度时间为1-3秒,这样得到的正面电极对半导体晶体硅基体的粘结强度得到改进,电极厚度均匀,未出现断线、掉料的情况,而且电池的填充因子、串联电阻、光电转化效率均有改进。The peak temperature range is a critical process, and special attention should be paid to the setting of the peak temperature. The peak temperature determines the concentration of metal ions in the silver-aluminum alloy and aluminum-silicon alloy during the sintering process. Both the series resistance and the fill factor of solar cells have a great influence. According to the method for preparing the front electrode of a solar cell according to the specific embodiment of the present invention, the peak temperature of the sintering process is 750-790° C., and the peak temperature time is 1-3 seconds. The bonding of the front electrode obtained in this way to the semiconductor crystalline silicon substrate The strength is improved, the thickness of the electrode is uniform, and there is no disconnection or material drop, and the filling factor, series resistance, and photoelectric conversion efficiency of the battery are all improved.
降温过程一般要求匀速连续,不要有大的温度梯度变化。但也可以根据需要在峰值区间后增加退火工艺。这种工艺对峰值温度过高造成的过烧结有一定改善。The cooling process generally requires constant speed and continuous, without large temperature gradient changes. However, an annealing process may also be added after the peak interval as required. This process can improve the over-sintering caused by too high peak temperature.
晶体硅太阳电池片制备的其他工艺,例如制绒、扩散制结、去除磷硅玻璃、去除硅片边沿的P-N结、沉积减反射膜、丝网印刷等均没有特别限制,均可以采用本领域公知的工艺。例如,用浓度1%左右,温度70-85℃的氢氧化钠溶液对多晶体硅表面进行化学腐蚀制绒;用HF(还可以含有一定量的HNO3和表面活性剂)对多晶体硅表面进行化学腐蚀制绒;用液态POCl3为P源(或以P2O5+H2O为P源)扩P制结;等离子增强型化学气相沉积(PECVD)或辉光放电法沉积氮化硅减反射膜。上述工艺与本发明的发明点关系不大,且都是现有技术,故在此不再赘述。Other processes for preparing crystalline silicon solar cells, such as texturing, diffusion junction, removal of phospho-silicate glass, removal of PN junction at the edge of silicon wafer, deposition of anti-reflection film, screen printing, etc. are not particularly limited, and can all be used in this field. well-known process. For example, use a sodium hydroxide solution with a concentration of about 1 % and a temperature of 70-85°C to chemically etch the polycrystalline silicon surface; Carry out chemical etching for texturing; use liquid POCl 3 as P source (or use P 2 O 5 +H 2 O as P source) to expand P junction; plasma enhanced chemical vapor deposition (PECVD) or glow discharge method to deposit nitride Silicon anti-reflection coating. The above-mentioned processes have little to do with the inventive points of the present invention, and are all prior art, so they will not be repeated here.
下面结合技术实施例,对本发明进行进一步的详细说明。The present invention will be further described in detail below in combination with technical examples.
实施例1Example 1
1、制备电极银浆1. Preparation of electrode silver paste
银粉末79%,平均粒径0.8微米;第一的玻璃料粉末1.5%PbO-B2O3-SiO2(PbO:85wt%)平均粒径1.5微米,软化点360℃;第二的玻璃料粉末3.5%,B2O3-ZnO-V2O5,平均粒径2.5微米,软化点620℃;松中油醇12%,乙基纤维素2%,润湿分散剂2%。Silver powder 79%, average particle size 0.8 micron; first glass frit powder 1.5% PbO-B 2 O 3 -SiO 2 (PbO: 85wt%) average particle size 1.5 micron, softening point 360°C; second glass frit Powder 3.5%, B 2 O 3 -ZnO-V 2 O 5 , average particle size 2.5 microns, softening point 620°C; pine oil alcohol 12%, ethyl cellulose 2%, wetting and dispersing agent 2%.
将上述物质在三辊研磨机混合和研磨,细度达到13微米,得到电极银浆A1。The above materials were mixed and ground in a three-roll mill, and the fineness reached 13 microns to obtain electrode silver paste A1.
2、多晶硅太阳电池制备2. Preparation of polycrystalline silicon solar cells
首先对3片面积156mm×156mm的P型多晶硅片进行表面制绒:将多晶硅片浸泡在75℃的,NaOH和乙醇的质量百分含量分别为20wt%、10wt%的溶液中40min。取出多晶硅片,用去离子水清洗10次,以洗去硅片表面残留的制绒液,然后干燥。First, the surface texture of three P-type polysilicon wafers with an area of 156 mm × 156 mm was carried out: the polysilicon wafers were soaked in a solution of 20 wt % and 10 wt % of NaOH and ethanol at 75 ° C for 40 min. Take out the polysilicon chip, wash it with deionized water 10 times, to wash off the remaining texturing liquid on the surface of the silicon chip, and then dry it.
然后用液态POCl3做磷源对表面制绒的多晶硅片扩磷制结,在P型多晶硅的一个表面形成一层N型硅,从而制成P-N结。扩磷制结后的多晶硅太阳电池的发射结方块电阻通常为每方块65Ω,多晶硅片的厚度180μm。之后对其进行去磷硅玻璃、边缘钝化、PECVD减反射膜处理。Then use liquid POCl 3 as a phosphorus source to diffuse phosphorus on the surface of the textured polysilicon wafer to form a layer of N-type silicon on one surface of the P-type polysilicon, thereby forming a PN junction. The emitter junction square resistance of the polysilicon solar cell after phosphorus expansion is usually 65Ω per square, and the thickness of the polysilicon wafer is 180 μm. Afterwards, it is treated with dephosphorous silicon glass, edge passivation, and PECVD anti-reflection coating.
在多晶硅的背面用商用ferro53-102和3347背面电极浆料涂覆形成负极电极。The backside of the polysilicon is coated with commercial ferro53-102 and 3347 backside electrode paste to form a negative electrode.
随后用丝网目数为280-320的丝网印刷机(东莞优印丝网移印机械厂,UP-S7090)将电极银浆料A1印在扩磷制结后的多晶硅受光面上,每片多晶硅消耗电极银浆A10.18g。250℃下烘干5min,然后在长12米的隧道炉中从300℃开始烧结,烧结终止温度分别为750℃、770℃和790℃,硅片在2分12秒内匀速经过隧道炉,然后以164℃/S的降温速率降温到100℃,形成受光面栅格电极。烧结的峰值温度为750℃、770℃和790℃,峰值温度时间为2s。在三种烧结温度下,分别得到多晶硅太阳能电池B1、C1及D1。The screen printing machine (Dongguan Youyin screen printing machinery factory, UP-S7090) that is 280-320 with screen mesh subsequently prints the electrode silver paste A1 on the polysilicon light-receiving surface after the phosphorus-expanding system is knotted, every A piece of polysilicon consumes 10.18g of electrode silver paste. Dry at 250°C for 5 minutes, and then start sintering at 300°C in a 12-meter-long tunnel furnace. The sintering termination temperatures are 750°C, 770°C, and 790°C. Cool down to 100°C at a cooling rate of 164°C/S to form grid electrodes on the light-receiving surface. The peak temperature of sintering is 750℃, 770℃ and 790℃, and the peak temperature time is 2s. At three sintering temperatures, polycrystalline silicon solar cells B1 , C1 and D1 are respectively obtained.
实施例2Example 2
银粉末83.5%,平均粒径1.2微米;第一的玻璃料粉末2.5%Bi2O3-B2O3-SiO2-K2O(Bi2O3:82wt%)平均粒径0.6微米,软化点420℃;第二的玻璃料粉末2%,PbO-ZnO-SiO2,平均粒径6微米,软化点580℃;松油醇9.5%,乙基纤维素1.5%,润湿分散剂1%。Silver powder 83.5%, average particle size 1.2 microns; first glass frit powder 2.5% Bi 2 O 3 -B 2 O 3 -SiO 2 -K 2 O (Bi 2 O 3 : 82wt%) average particle size 0.6 microns, Softening point 420°C; second glass frit powder 2%, PbO-ZnO-SiO 2 , average particle size 6 microns, softening point 580°C; terpineol 9.5%, ethyl cellulose 1.5%, wetting and dispersing agent 1 %.
将上述物质在三辊研磨机混合和研磨,细度达到15微米,得到电极银浆A2。The above materials were mixed and ground in a three-roller mill to a fineness of 15 microns to obtain electrode silver paste A2.
按照实施例1的方法制备多晶硅太阳能电池B2、C2及D2。Polycrystalline silicon solar cells B2, C2 and D2 were prepared according to the method of Example 1.
实施例3Example 3
银粉末83.5%,平均粒径1.2微米;第一的玻璃料粉末2%PbO-B2O3-SiO2-ZnO(PbO:78wt%)平均粒径0.8微米,软化点380℃;第二的玻璃料粉末2.5%,PbO-ZnO-B2O3,平均粒径1.5微米,软化点550℃;松油醇8.8%,乙基纤维素1.5%,润湿分散剂1.7%。Silver powder 83.5%, average particle size 1.2 microns; first glass frit powder 2% PbO-B 2 O 3 -SiO 2 -ZnO (PbO: 78wt%) average particle size 0.8 microns, softening point 380°C; second Glass frit powder 2.5%, PbO-ZnO-B 2 O 3 , average particle size 1.5 microns, softening point 550°C; terpineol 8.8%, ethyl cellulose 1.5%, wetting and dispersing agent 1.7%.
将上述物质在三辊研磨机混合和研磨,细度达到14微米,得到电极银浆A3。The above-mentioned materials were mixed and ground in a three-roll mill, and the fineness reached 14 microns to obtain electrode silver paste A3.
按照实施例1的方法制备多晶硅太阳能电池B3、C3及D3。Polycrystalline silicon solar cells B3, C3 and D3 were prepared according to the method of Example 1.
实施例4Example 4
银粉末75%,平均粒径0.1微米;第一的玻璃料粉末3%PbO-B2O3-SiO2-ZnO(PbO:78wt%)平均粒径0.3微米,软化点350℃;第二的玻璃料粉末5%,PbO-ZnO-B2O3,平均粒径0.1微米,软化点600℃;松油醇11%,乙基纤维素4%,润湿分散剂2%。Silver powder 75%, average particle size 0.1 micron; first glass frit powder 3% PbO-B 2 O 3 -SiO 2 -ZnO (PbO: 78wt%) average particle size 0.3 micron, softening point 350°C; second Glass frit powder 5%, PbO-ZnO-B 2 O 3 , average particle size 0.1 micron, softening point 600°C; terpineol 11%, ethyl cellulose 4%, wetting and dispersing agent 2%.
将上述物质在三辊研磨机混合和研磨,细度达到13微米,得到电极银浆A4。The above materials were mixed and ground in a three-roller mill, and the fineness reached 13 microns to obtain electrode silver paste A4.
按照实施例1的方法制备多晶硅太阳能电池B4、C4及D4。Polycrystalline silicon solar cells B4, C4 and D4 were prepared according to the method of Example 1.
实施例5Example 5
银粉末90%,平均粒径2微米;第一的玻璃料粉末1%PbO-B2O3-SiO2-ZnO(PbO:78wt%)平均粒径0.1微米,软化点550℃;第二的玻璃料粉末1%,PbO-ZnO-B2O3,平均粒径2微米,软化点620℃;松油醇7%,乙基纤维素1%。Silver powder 90%, average particle size 2 microns; first glass frit powder 1% PbO-B 2 O 3 -SiO 2 -ZnO (PbO: 78wt%) average particle size 0.1 microns, softening point 550°C; second Glass frit powder 1%, PbO-ZnO-B 2 O 3 , average particle size 2 microns, softening point 620°C; terpineol 7%, ethyl cellulose 1%.
将上述物质在三辊研磨机混合和研磨,细度达到15微米,得到电极银浆A5。The above materials were mixed and ground in a three-roller mill to a fineness of 15 microns to obtain electrode silver paste A5.
按照实施例1的方法制备多晶硅太阳能电池B5、C5及D5。Polycrystalline silicon solar cells B5, C5 and D5 were prepared according to the method of Example 1.
实施例6Example 6
银粉末85%,平均粒径15微米;第一的玻璃料粉末1.2%PbO-B2O3-SiO2-ZnO(PbO:78wt%)平均粒径10微米,软化点400℃;第二的玻璃料粉末4%,PbO-ZnO-B2O3,平均粒径10微米,软化点650℃;松油醇7%,乙基纤维素2.8%。Silver powder 85%, average particle size 15 microns; first glass frit powder 1.2% PbO-B 2 O 3 -SiO 2 -ZnO (PbO: 78wt%) average particle size 10 microns, softening point 400°C; second Glass frit powder 4%, PbO-ZnO-B 2 O 3 , average particle size 10 microns, softening point 650°C; terpineol 7%, ethyl cellulose 2.8%.
将上述物质在三辊研磨机混合和研磨,细度达到12微米,得到电极银浆A6。The above materials were mixed and ground in a three-roll mill until the fineness reached 12 microns to obtain electrode silver paste A6.
按照实施例1的方法制备多晶硅太阳能电池B6、C6及D6。Polycrystalline silicon solar cells B6, C6 and D6 were prepared according to the method of Example 1.
对比例1Comparative example 1
商购的电极浆料(Ferro,33-462正面银浆)CA1,按照实施例1的方法制备多晶硅太阳能电池CB1、CC1及CD1。Commercially available electrode paste (Ferro, 33-462 front silver paste) CA1 was used to prepare polycrystalline silicon solar cells CB1, CC1 and CD1 according to the method of Example 1.
对比例2Comparative example 2
银粉末83.5%,平均粒径1.2微米;玻璃料粉末4.5%Bi2O3-B2O3-SiO2-K2O(Bi2O3:82wt%)平均粒径0.6微米,软化点420℃;松油醇9.5%,乙基纤维素1.5%,润湿分散剂1%。Silver powder 83.5%, average particle size 1.2 microns; glass frit powder 4.5% Bi 2 O 3 -B 2 O 3 -SiO 2 -K 2 O (Bi 2 O 3 : 82wt%) average particle size 0.6 microns, softening point 420 ℃; Terpineol 9.5%, ethyl cellulose 1.5%, wetting and dispersing agent 1%.
将上述物质在三辊研磨机混合和研磨,细度达到15微米,得到电极银浆CA2。The above materials were mixed and ground in a three-roll mill, and the fineness reached 15 microns to obtain electrode silver paste CA2.
按照实施例1的方法制备多晶硅太阳能电池CB2、CC2及CD2。Polycrystalline silicon solar cells CB2, CC2 and CD2 were prepared according to the method of Example 1.
对比例3Comparative example 3
银粉末83.5%,平均粒径1.2微米;玻璃料粉末4.5%,PbO-ZnO-B2O3,平均粒径1.5微米,软化点550℃;松油醇8.8%,乙基纤维素1.5%,润湿分散剂1.7%。Silver powder 83.5%, average particle size 1.2 microns; glass frit powder 4.5%, PbO-ZnO-B 2 O 3 , average particle size 1.5 microns, softening point 550°C; terpineol 8.8%, ethyl cellulose 1.5%, Wetting and dispersing agent 1.7%.
将上述物质在三辊研磨机混合和研磨,细度达到14微米,得到电极银浆CA3。The above materials were mixed and ground in a three-roller mill to a fineness of 14 microns to obtain electrode silver paste CA3.
按照实施例1的方法制备多晶硅太阳能电池CB3、CC3及CD3。Polycrystalline silicon solar cells CB3, CC3 and CD3 were prepared according to the method of Example 1.
对比例4Comparative example 4
银粉末83.5%,平均粒径1.2微米;玻璃料粉末分别为2.5%Bi2O3-B2O3-SiO2-K2O(Bi2O3:82wt%)和2%PbO-B2O3-SiO2-ZnO(PbO:78wt%),平均粒径都为0.6微米,软化点分别为420℃,380℃;松油醇9.5%,乙基纤维素1.5%,润湿分散剂1%。Silver powder 83.5%, average particle size 1.2 microns; glass frit powder is 2.5% Bi 2 O 3 -B 2 O 3 -SiO 2 -K 2 O (Bi 2 O 3 : 82wt%) and 2% PbO-B 2 O 3 -SiO 2 -ZnO (PbO: 78wt%), the average particle size is 0.6 microns, the softening point is 420 ° C, 380 ° C; 9.5% terpineol, 1.5% ethyl cellulose, wetting and dispersing agent 1 %.
将上述物质在三辊研磨机混合和研磨,细度达到14微米,得到电极银浆CA4。The above materials were mixed and ground in a three-roller mill to a fineness of 14 microns to obtain electrode silver paste CA4.
按照实施例1的方法制备多晶硅太阳能电池CB4、CC4及CD4。Polycrystalline silicon solar cells CB4, CC4 and CD4 were prepared according to the method of Example 1.
对比例5Comparative example 5
银粉末83.5%,平均粒径1.2微米;玻璃料粉末分别为2.5%的PbO-ZnO-B2O3和2%的PbO-ZnO-SiO2,平均粒径都为1.5微米,软化点分别为550℃和580℃;松油醇8.8%,乙基纤维素1.5%,润湿分散剂1.7%。Silver powder 83.5%, average particle size 1.2 microns; glass frit powders are 2.5% PbO-ZnO-B 2 O 3 and 2% PbO-ZnO-SiO 2 , the average particle size is 1.5 microns, and the softening points are 550°C and 580°C; 8.8% terpineol, 1.5% ethyl cellulose, 1.7% wetting and dispersing agent.
将上述物质在三辊研磨机混合和研磨,细度达到14微米,得到电极银浆CA5。The above materials were mixed and ground in a three-roller mill, and the fineness reached 14 microns to obtain electrode silver paste CA5.
按照实施例1的方法制备多晶硅太阳能电池CB5、CC5及CD5。Polycrystalline silicon solar cells CB5, CC5 and CD5 were prepared according to the method of Example 1.
测试方法及结果Test Method and Results
太阳电池的填充因子、串联电阻、光电转化效率Fill factor, series resistance, photoelectric conversion efficiency of solar cells
用太阳能电池片专用测试仪器(上海居纳科技有限公司,NELC-140A),在标准测试条件(STC)下测试按实施例和对比例的方法得到的多晶硅太阳电池的上述性能。测试结果烧结温度为750℃的如下表1所示,烧结温度为770℃的如表2所示,烧结温度为79℃0的,如表3所示。标准测试条件(STC)如下:光强:1000W/m2;光谱:AM1.5;温度:25℃。The above-mentioned properties of the polycrystalline silicon solar cells obtained by the methods of the examples and the comparative examples were tested under standard test conditions (STC) with a special testing instrument for solar cells (Shanghai Juna Technology Co., Ltd., NELC-140A). The test results are shown in Table 1 below for the sintering temperature of 750°C, shown in Table 2 for the sintering temperature of 770°C, and shown in Table 3 for the sintering temperature of 79°C. Standard test conditions (STC) are as follows: light intensity: 1000W/m 2 ; spectrum: AM1.5; temperature: 25°C.
表1Table 1
表2Table 2
表3table 3
从实验结果可以看出,采用本发明在750-790℃的不同烧结温度条件下,均能获得低的串联电阻和很高的并联电阻,工艺条件较大波动的情况下保证了晶体硅太阳能电池片的光电转化效率在16.0%以上,但是对比例的太阳能电池只能满足较窄的烧结温度范围,超过该温度范围的,其光电转化率很低。It can be seen from the experimental results that the present invention can obtain low series resistance and high parallel resistance under different sintering temperature conditions of 750-790° C. The photoelectric conversion efficiency of the sheet is above 16.0%, but the solar cell of the comparative example can only meet a narrow sintering temperature range, and the photoelectric conversion efficiency is very low if the temperature exceeds this range.
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