[go: up one dir, main page]

CN103048038B - Vibration detecting device of non-contact type fluid component - Google Patents

Vibration detecting device of non-contact type fluid component Download PDF

Info

Publication number
CN103048038B
CN103048038B CN201210547449.0A CN201210547449A CN103048038B CN 103048038 B CN103048038 B CN 103048038B CN 201210547449 A CN201210547449 A CN 201210547449A CN 103048038 B CN103048038 B CN 103048038B
Authority
CN
China
Prior art keywords
flow field
fixed
aluminum profiles
interface
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210547449.0A
Other languages
Chinese (zh)
Other versions
CN103048038A (en
Inventor
傅新
申英男
陈文昱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Qier Electromechanical Technology Co ltd
Original Assignee
Zhejiang University ZJU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University ZJU filed Critical Zhejiang University ZJU
Priority to CN201210547449.0A priority Critical patent/CN103048038B/en
Publication of CN103048038A publication Critical patent/CN103048038A/en
Application granted granted Critical
Publication of CN103048038B publication Critical patent/CN103048038B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Volume Flow (AREA)

Abstract

本发明公开了一种非接触式流体元器件振动检测装置。包括六个结构相同的流场上界面被测流体元器件位姿调节机构、支撑架、三个结构相同的传感测量装置、流场上界面被测流体元器件及其夹持机构、流场下界面结构及其位置调节机构、隔振平台、运动平台、气液管路以及控制器。本发明用于检测缝隙流场下界面静止以及水平运动两种条件下缝隙流场上界面被测流体元器件的振动特性;本发明可实现对缝隙流场的厚度以及上下界面平行度的精确控制;本发明可有效抑制来自地面的振动,并且支撑架具有良好的抗振特性,可实现对微小冲击引起振动的精确检测。

The invention discloses a non-contact vibration detection device for fluid components. Including six fluid components with the same structure on the upper interface of the flow field, the posture adjustment mechanism, the support frame, three sensing and measuring devices with the same structure, the fluid components and their clamping mechanisms on the upper interface of the flow field, and the flow field The lower interface structure and its position adjustment mechanism, vibration isolation platform, motion platform, gas-liquid pipeline and controller. The invention is used to detect the vibration characteristics of the measured fluid components on the upper interface of the slit flow field under two conditions: the lower interface of the slit flow field is static and the horizontal movement; the invention can realize the precise control of the thickness of the slit flow field and the parallelism of the upper and lower interfaces ; The present invention can effectively suppress the vibration from the ground, and the support frame has good anti-vibration characteristics, and can realize accurate detection of vibration caused by tiny impacts.

Description

非接触式流体元器件振动检测装置Non-contact fluid component vibration detection device

技术领域 technical field

本发明涉及一种振动检测装置,尤其是涉及一种非接触式流体元器件振动检测装置。 The invention relates to a vibration detection device, in particular to a non-contact fluid component vibration detection device.

背景技术 Background technique

振动是工程机械和实验设备重要的固有特性,是机械运行状态和故障检测的重要参数。振动检测技术广泛应用在科学研究、日常生活、工业检测等领域。例如,机械振动故障检测,桥梁振动检测,发动机振动检测等。随着传感器技术和计算机技术的发展,测量传感器可测量的频率范围和动态范围大大增加,振动测试仪器向小型化、功能化和多样化发展。 Vibration is an important inherent characteristic of construction machinery and experimental equipment, and an important parameter for mechanical operation status and fault detection. Vibration detection technology is widely used in scientific research, daily life, industrial detection and other fields. For example, mechanical vibration fault detection, bridge vibration detection, engine vibration detection, etc. With the development of sensor technology and computer technology, the measurable frequency range and dynamic range of measuring sensors have greatly increased, and vibration testing instruments are developing towards miniaturization, functionality and diversification.

缝隙流场边界面的振动检测是研究缝隙流场的状态变化对流场边界面的冲击以及流场边界面结构在工作状态下的振动特性的必要手段。 The vibration detection of the boundary surface of the slit flow field is a necessary means to study the impact of the state change of the slit flow field on the flow field boundary surface and the vibration characteristics of the flow field boundary surface structure under working conditions.

目前已有的振动检测装置存在以下不足: There are following deficiencies in existing vibration detection devices at present:

1) 对于高精度(微米级以上)的振动检测需求,目前已有的振动检测装置采取的隔振措施以及具备的抗振性能达不到要求; 1) For high-precision (above micron level) vibration detection requirements, the vibration isolation measures and anti-vibration performance of the existing vibration detection devices cannot meet the requirements;

2) 目前已有的对测量对象进行刚性固定的振动检测装置无法测量出微小冲击引起的振动; 2) The existing vibration detection devices that rigidly fix the measurement object cannot measure the vibration caused by tiny impacts;

3) 对于缝隙流场边界面的振动检测,目前已有的振动检测装置无法实现对于流场边界面的位姿调节功能,即无法控制缝隙流场的厚度以及上下界面的平行度; 3) For the vibration detection of the boundary surface of the slit flow field, the existing vibration detection devices cannot realize the pose adjustment function of the flow field boundary surface, that is, the thickness of the slit flow field and the parallelism of the upper and lower interfaces cannot be controlled;

4) 对于下界面运动条件下的缝隙流场边界面的振动检测,目前已有的振动检测装置无法实现对于流场下界面运动状态的控制。 4) For the vibration detection of the boundary surface of the slit flow field under the condition of the lower interface movement, the existing vibration detection devices cannot realize the control of the movement state of the lower interface of the flow field.

发明内容 Contents of the invention

为了解决缝隙流场边界面的振动检测问题,本发明的目的在于提供一种振动检测装置,可实现流场边界面控制,并保证对流场上界面被测流体元器件振动的可靠检测。 In order to solve the vibration detection problem of the boundary surface of the slit flow field, the purpose of the present invention is to provide a vibration detection device, which can realize the control of the flow field boundary surface and ensure the reliable detection of the vibration of the fluid components measured on the interface of the flow field.

本发明采用的技术方案如下: The technical scheme that the present invention adopts is as follows:

本发明包括六个结构相同的流场上界面被测流体元器件位姿调节机构、支撑架、三个结构相同的传感测量装置、流场上界面被测流体元器件及其夹持机构、流场下界面结构及其位置调节机构、隔振平台、运动平台、气液管路以及控制器;其中: The present invention includes six fluid components with the same structure on the upper interface of the flow field, a position and posture adjustment mechanism, a support frame, three sensing and measuring devices with the same structure, the fluid components on the upper interface of the flow field and its clamping mechanism, The lower interface structure of the flow field and its position adjustment mechanism, vibration isolation platform, motion platform, gas-liquid pipeline and controller; of which:

1) 六个结构相同的流场上界面被测流体元器件位姿调节机构: 1) The position and posture adjustment mechanism of the measured fluid components on the upper interface of the six flow fields with the same structure:

均包括T型螺栓、固定模块、锁紧螺套、精密螺杆、位姿调节弹簧挂钩以及万向挂钩弹簧;固定模块的一端与T型螺栓固定,固定模块的另一端与第一锁紧螺套固定;精密螺杆两端分别与第一锁紧螺套、第二锁紧螺套连接;位姿调节弹簧挂钩的一端与第二锁紧螺套固定,位姿调节弹簧挂钩的另一端万向挂钩弹簧的一端连接; Both include T-bolts, fixing modules, locking nuts, precision screws, posture adjustment spring hooks and universal hook springs; one end of the fixing module is fixed with the T-bolt, and the other end of the fixing module is fixed with the first locking nut. Fixed; both ends of the precision screw are respectively connected with the first locking screw sleeve and the second locking screw sleeve; one end of the posture adjustment spring hook is fixed with the second locking screw sleeve, and the other end of the posture adjustment spring hook is a universal hook One end of the spring is connected;

2)支撑架: 2) Support frame:

包括传感器安装支撑架、位姿调节机构安装支撑架和六边形底座;传感器安装支撑架的3根竖直状态的铝型材下端分别固定于六边形底座3条互不相邻铝型材的上表面,3根竖直状态的铝型材上端的水平状态的铝型材分别固定于各自竖直状态的铝型材的侧面,并且指向六边形底座的内侧;位姿调节机构安装支撑架的3根竖直状态的铝型材下端分别固定于六边形底座其余3条互不相邻的铝型材的上表面,3根竖直状态的铝型材上端的水平状态的铝型材一端分别固定于各自竖直状态的铝型材的侧面,另一端通过螺钉固定在位于中心的正六棱柱壳体的3个互不相邻的侧面;位姿调节机构安装支撑架的3根水平状态的铝型材位于传感器安装支撑架的 3根水平状态的铝型材的上方;六边形底座由6根外形相同的铝型材首尾相接构成,接触面为铝型材一端加工而成的60度斜面,任意2根相邻的铝型材通过斜角连接件固定;支撑架中所有垂直连接的铝型材均通过角件以及T型螺栓固定; Including the sensor installation support frame, the posture adjustment mechanism installation support frame and the hexagonal base; the lower ends of the three vertical aluminum profiles of the sensor installation support frame are respectively fixed on the top of the three non-adjacent aluminum profiles of the hexagonal base On the surface, the upper ends of the three vertical aluminum profiles and the horizontal aluminum profiles are respectively fixed on the sides of the respective vertical aluminum profiles, and point to the inner side of the hexagonal base; The lower ends of the straight aluminum profiles are respectively fixed on the upper surfaces of the other three non-adjacent aluminum profiles of the hexagonal base, and the upper ends of the three vertical aluminum profiles are respectively fixed on the respective vertical positions. The side of the aluminum profile, the other end is fixed on the three non-adjacent sides of the regular hexagonal prism housing in the center by screws; the three horizontal aluminum profiles of the installation support frame of the posture adjustment mechanism are located on the sensor installation support frame The top of 3 horizontal aluminum profiles; the hexagonal base is composed of 6 aluminum profiles with the same shape connected end to end, the contact surface is a 60-degree inclined plane processed by one end of the aluminum profiles, any 2 adjacent aluminum profiles pass through Angle connectors are fixed; all vertically connected aluminum profiles in the support frame are fixed by corner pieces and T-bolts;

3) 三个结构相同的传感测量装置: 3) Three sensing and measuring devices with the same structure:

均包括感测头、手动精密平移台以及固定块;每个感测头分别固定在各自的手动精密平移台上表面;3个手动精密平移台下表面分别固定在各自的固定块上表面; Each includes a sensor head, a manual precision translation platform and a fixed block; each sensor head is fixed on the upper surface of its own manual precision translation platform; the lower surfaces of the three manual precision translation platforms are respectively fixed on the upper surface of their respective fixed blocks;

4) 流场上界面被测流体元器件的夹持机构: 4) The clamping mechanism of the measured fluid components on the interface of the flow field:

包括卡盘以及6个卡盘弹簧挂钩;流场上界面被测流体元器件通过卡盘夹持,流场上界面被测流体元器件下表面为缝隙流场的上界面;卡盘与6个卡盘弹簧挂钩固定; Including the chuck and 6 chuck spring hooks; the fluid component to be measured on the upper interface of the flow field is clamped by the chuck, and the lower surface of the fluid component to be measured on the upper interface of the flow field is the upper interface of the gap flow field; the chuck and 6 Chuck spring hook fixed;

 5) 流场下界面结构及其位置调节机构:包括流场下界面结构和手动精密升降台;流场下界面结构为透明的有机玻璃板与手动精密升降台固定,流场下界面结构上表面为缝隙流场的下界面; 5) The lower interface structure of the flow field and its position adjustment mechanism: including the lower interface structure of the flow field and the manual precision lifting platform; the lower interface structure of the flow field is fixed by a transparent plexiglass plate and the manual precision lifting platform, and the upper surface of the lower interface structure of the flow field is the lower interface of the slit flow field;

所述的T型螺栓一端与位姿调节机构安装支撑架的3根竖直状态的铝型材固定,另一端与固定模块固定;万向挂钩弹簧一端与位姿调节弹簧挂钩连接,另一端与卡盘弹簧挂钩连接;六边形底座下表面与隔振平台或运动平台固定;3个固定块分别通过T型螺栓与传感器安装支撑架固定;手动精密升降台与隔振平台固定;注液管路、回收管路以及气密封管路均通过管路和快速气动接头与流场上界面被测流体元器件连接;控制器通过线缆与感测头连接; One end of the T-bolt is fixed to the three vertical aluminum profiles of the posture adjustment mechanism installation support frame, and the other end is fixed to the fixing module; one end of the universal hook spring is connected to the posture adjustment spring hook, and the other end is connected to the card The disc spring hook is connected; the lower surface of the hexagonal base is fixed with the vibration isolation platform or the motion platform; the three fixed blocks are respectively fixed with the sensor installation support frame through T-shaped bolts; the manual precision lifting platform is fixed with the vibration isolation platform; the liquid injection pipeline The recovery pipeline and air-tight pipeline are all connected to the measured fluid components on the upper interface of the flow field through pipelines and quick pneumatic joints; the controller is connected to the sensing head through cables;

所述的流场上界面被测流体元器件位姿调节机构在水平和竖直方向各有3个,均呈120度中心对称分布,对称轴为流场上界面被测流体元器件的轴心;卡盘弹簧挂钩共有6个,其中3个120度中心对称分布于卡盘的上表面,对称轴为流场上界面被测流体元器件的轴心,上端分别与3个竖直方向的万向挂钩弹簧连接,下端与卡盘固定,另外3个120度中心对称分布于卡盘的下表面,对称轴为流场上界面被测流体元器件的轴心,上端与卡盘固定,下端分别与3个水平方向的万向挂钩弹簧连接。 There are three position and posture adjustment mechanisms for the measured fluid components on the upper interface of the flow field in the horizontal and vertical directions, all of which are symmetrically distributed at 120 degrees, and the axis of symmetry is the axis of the measured fluid components on the upper interface of the flow field. There are 6 chuck spring hooks in total, 3 of which are symmetrically distributed on the upper surface of the chuck with a center of 120 degrees. Connected to the hook spring, the lower end is fixed with the chuck, and the other three 120-degree centers are symmetrically distributed on the lower surface of the chuck. Connect with 3 universal hook springs in horizontal direction.

本发明具有的有益效果是: The beneficial effects that the present invention has are:

1) 支撑架采用大边长加厚铝型材,并通过角件配T型螺栓或斜角连接件进行高强度固定;位姿调节机构安装支撑架的3根水平状态的铝型材分别通过螺钉固定在位于中心的正六棱柱壳体的3个互不相邻的侧面,消除悬臂梁结构;支撑架整体刚度大,抗振能力强,并且通过螺钉与隔振平台固定,有效抑制了来自地面的振动,为激光位移传感器提供了良好的测量环境,可实现有效的高精度(微米级以上)振动检测; 1) The support frame is made of thick aluminum profiles with large side lengths, and is fixed with high strength through corner fittings with T-bolts or bevel connectors; the three horizontal aluminum profiles of the support frame installed by the posture adjustment mechanism are respectively fixed by screws On the three non-adjacent sides of the regular hexagonal prism shell in the center, the cantilever beam structure is eliminated; the support frame has a large overall rigidity and strong vibration resistance, and is fixed to the vibration isolation platform by screws, effectively suppressing the vibration from the ground , providing a good measurement environment for the laser displacement sensor, which can realize effective high-precision (above micron level) vibration detection;

2) 流场上界面被测流体元器件通过万向挂钩弹簧进行柔性固定,可实现对微小冲击引起振动的测量; 2) The measured fluid components on the upper interface of the flow field are flexibly fixed by the universal hook spring, which can realize the measurement of vibration caused by micro-shock;

3) 流场上界面被测流体元器件位姿调节机构通过精密螺杆可实现对流场上界面被测流体元器件位姿的精确控制;手动精密升降台可实现对流场下界面结构位置的较大范围调节;本发明可实现对缝隙流场的厚度以及上下界面的平行度的精确控制; 3) The position and posture adjustment mechanism of the measured fluid components on the upper interface of the flow field can realize the precise control of the position and posture of the measured fluid components on the upper interface of the flow field through the precision screw; the manual precision lifting table can realize the control of the structure position of the lower interface of the flow field Wide range of adjustment; the invention can realize precise control of the thickness of the gap flow field and the parallelism of the upper and lower interfaces;

4) 支撑架与运动平台固定,可实现下界面运动条件下的缝隙流场边界面的振动检测。 4) The support frame and the motion platform are fixed, which can realize the vibration detection of the boundary surface of the gap flow field under the condition of the movement of the lower interface.

附图说明 Description of drawings

图1是本发明的原理示意图。 Fig. 1 is a schematic diagram of the principle of the present invention.

图2是流场上界面被测流体元器件及其夹持机构和位姿调节机构的立体视图。 Fig. 2 is a three-dimensional view of the fluid component under test at the interface on the flow field and its clamping mechanism and posture adjustment mechanism.

图3是流场上界面被测流体元器件位姿调节机构及卡盘挂钩的立体视图。 Fig. 3 is a three-dimensional view of the position and posture adjustment mechanism and the chuck hook of the measured fluid component on the interface of the flow field.

图4是支撑架结构的立体视图。 Fig. 4 is a perspective view of the support frame structure.

图5是本发明整体结构的立体视图。 Fig. 5 is a perspective view of the overall structure of the present invention.

图6是传感测量装置在整体结构中的局部立体视图。 Fig. 6 is a partial perspective view of the sensing and measuring device in the overall structure.

图中:1、流场上界面被测流体元器件位姿调节机构,1A、T型螺栓,1B、固定模块,1C、锁紧螺套,1D、精密螺杆,1E、位姿调节弹簧挂钩,1F、万向挂钩弹簧, 2、支撑架,2A、传感器安装支撑架,2B、位姿调节机构安装支撑架,2C、六边形底座,3、传感测量装置,3A、X方向感测头,3B、Y方向感测头,3C、Z方向感测头,3D、手动精密平移台,3E、固定块,4、流场上界面被测流体元器件及其夹持机构,4A、流场上界面被测流体元器件,4B、卡盘,4C、卡盘弹簧挂钩, 5A、流场下界面结构,5B、手动精密升降台,6、缝隙流场,7、隔振平台,8、运动平台, 9A、注液管路,9B、回收管路,9C、气密封管路,10、控制器。 In the figure: 1. The posture adjustment mechanism of the fluid component under test on the upper interface of the flow field, 1A, T-bolt, 1B, the fixed module, 1C, the locking screw sleeve, 1D, the precision screw, 1E, the spring hook for posture adjustment, 1F. Universal hook spring, 2. Support frame, 2A, sensor installation support frame, 2B, posture adjustment mechanism installation support frame, 2C, hexagonal base, 3. Sensing and measuring device, 3A, X direction sensor head , 3B, sensor head in Y direction, 3C, sensor head in Z direction, 3D, manual precision translation stage, 3E, fixed block, 4, measured fluid components and their clamping mechanism on the flow field upper interface, 4A, flow field Fluid components to be tested on the upper interface, 4B, chuck, 4C, chuck spring hook, 5A, flow field lower interface structure, 5B, manual precision lifting platform, 6, gap flow field, 7, vibration isolation platform, 8, motion Platform, 9A, liquid injection pipeline, 9B, recovery pipeline, 9C, air-tight pipeline, 10, controller.

具体实施方式 Detailed ways

下面结合附图和实施例对本发明作进一步说明。 The present invention will be further described below in conjunction with drawings and embodiments.

图1示意性地表示了本发明实施方案的原理图,缝隙流场6的维持需要注液管路9A、回收管路9B以及气密封管路9C的协同作用;流场上界面被测流体元器件位姿调节机构1和手动精密升降台5B可实现对缝隙流场6边界的控制;传感测量装置3配合控制器10可实现对缝隙流场6的流场上界面被测流体元器件及其夹持机构4振动的检测;隔振平台7可有效抑制来自地面的振动;运动平台8可为下界面运动条件下的缝隙流场边界面的振动检测创造条件; Fig. 1 schematically shows the schematic diagram of the embodiment of the present invention, the maintenance of the slit flow field 6 requires the synergy of the liquid injection pipeline 9A, the recovery pipeline 9B and the air-tight pipeline 9C; The device posture adjustment mechanism 1 and the manual precision lifting platform 5B can realize the control of the boundary of the gap flow field 6; The vibration detection of the clamping mechanism 4; the vibration isolation platform 7 can effectively suppress the vibration from the ground; the motion platform 8 can create conditions for the vibration detection of the boundary surface of the gap flow field under the condition of the lower interface movement;

所述的注液管路9A、回收管路9B以及气密封管路9C均通过管路和快速气动接头与流场上界面被测流体元器件4A连接;控制器10通过线缆与感测头3A~3C连接。 The liquid injection pipeline 9A, the recovery pipeline 9B and the air-tight pipeline 9C are all connected to the measured fluid component 4A on the upper interface of the flow field through pipelines and quick pneumatic joints; the controller 10 is connected to the sensor head through a cable 3A~3C connection.

图2和图3表示了流场上界面被测流体元器件位姿调节机构1和流场上界面被测流体元器件及其夹持机构4的立体结构及装配关系,其中: Figure 2 and Figure 3 show the three-dimensional structure and assembly relationship of the measured fluid component position and posture adjustment mechanism 1 on the upper interface of the flow field and the measured fluid component and its clamping mechanism 4 on the upper interface of the flow field, wherein:

1) 六个结构相同的流场上界面被测流体元器件位姿调节机构1: 1) The position and posture adjustment mechanism 1 of the measured fluid component on the upper interface of the six flow fields with the same structure:

均包括T型螺栓1A、固定模块1B、锁紧螺套1C、精密螺杆1D、位姿调节弹簧挂钩1E以及万向挂钩弹簧1F;固定模块1B的一端与T型螺栓1A固定,固定模块1B的另一端与第一锁紧螺套固定;精密螺杆1D两端分别与第一锁紧螺套、第二锁紧螺套连接;精密螺杆与锁紧螺套均为精密螺纹,螺距足够小(例如0.25mm),可实现位姿精确调节,锁紧螺套在位姿调节完成后可实现锁紧功能,提高螺纹强度和紧固性,防止松脱,有利于振动测量的稳定性与准确性;位姿调节弹簧挂钩1E的一端与第二锁紧螺套固定,位姿调节弹簧挂钩1E的另一端万向挂钩弹簧1F的一端连接;万向挂钩弹簧1F为位姿调节提供了便利性; All include T-bolt 1A, fixing module 1B, lock nut 1C, precision screw 1D, posture adjustment spring hook 1E and universal hook spring 1F; one end of fixing module 1B is fixed with T-bolt 1A, and the fixing module 1B The other end is fixed with the first locking nut; the two ends of the precision screw 1D are respectively connected with the first locking nut and the second locking nut; both the precision screw and the locking nut are precision threads, and the pitch is small enough (for example 0.25mm), can realize the precise adjustment of position and posture, and the lock nut can realize the locking function after the position and posture adjustment is completed, improve the thread strength and fastness, prevent loosening, and help the stability and accuracy of vibration measurement; One end of the posture adjustment spring hook 1E is fixed to the second lock nut, and the other end of the posture adjustment spring hook 1E is connected to one end of the universal hook spring 1F; the universal hook spring 1F provides convenience for posture adjustment;

2) 流场上界面被测流体元器件的夹持机构4: 2) The clamping mechanism 4 of the measured fluid component on the interface of the flow field:

包括卡盘4B以及6个卡盘弹簧挂钩4C;流场上界面被测流体元器件4A通过卡盘4B夹持,流场上界面被测流体元器件4A下表面为缝隙流场6的上界面;卡盘4B与6个卡盘弹簧挂钩4C固定; Including chuck 4B and 6 chuck spring hooks 4C; the fluid component 4A to be tested on the upper interface of the flow field is clamped by the chuck 4B, and the lower surface of the fluid component 4A to be tested on the upper interface of the flow field is the upper interface of the gap flow field 6 ; Chuck 4B is fixed with 6 chuck spring hooks 4C;

所述的万向挂钩弹簧1F一端与位姿调节弹簧挂钩1E连接,另一端与卡盘弹簧挂钩4C连接; One end of the universal hook spring 1F is connected with the posture adjustment spring hook 1E, and the other end is connected with the chuck spring hook 4C;

所述的流场上界面被测流体元器件位姿调节机构1在水平和竖直方向各有3个,均呈120度中心对称分布,对称轴为流场上界面被测流体元器件4A的轴心;卡盘弹簧挂钩4C共有6个,其中3个120度中心对称分布于卡盘4B的上表面,对称轴为流场上界面被测流体元器件4A的轴心,上端分别与3个竖直方向的万向挂钩弹簧1F连接,下端与卡盘4B固定,另外3个120度中心对称分布于卡盘4B的下表面,对称轴为流场上界面被测流体元器件4A的轴心,上端与卡盘4B固定,下端分别与3个水平方向的万向挂钩弹簧1F连接。 The position and posture adjustment mechanism 1 of the measured fluid component on the upper interface of the flow field has three in the horizontal and vertical directions, and they are all symmetrically distributed at a center of 120 degrees. Axis; there are 6 chuck spring hooks 4C in total, 3 of which are symmetrically distributed on the upper surface of the chuck 4B with a center of 120 degrees. The universal hook spring 1F in the vertical direction is connected, and the lower end is fixed to the chuck 4B. The other three 120-degree centers are symmetrically distributed on the lower surface of the chuck 4B. The axis of symmetry is the axis of the measured fluid component 4A on the upper interface of the flow field. , the upper end is fixed with the chuck 4B, and the lower end is respectively connected with three universal hook springs 1F in the horizontal direction.

图4表示了支撑架2的立体结构,包括传感器安装支撑架2A、位姿调节机构安装支撑架2B和六边形底座2C;传感器安装支撑架2A的3根竖直状态的铝型材下端分别固定于六边形底座2C的3条互不相邻铝型材的上表面,并且可以沿着六边形底座2C的顶面在水平方向上进行位置调节,从而满足感测头3A~3C测量位置的调节,3根竖直状态的铝型材上端的水平状态的铝型材分别固定于各自竖直状态的铝型材的侧面,并且指向六边形底座2C的内侧;位姿调节机构安装支撑架2B的3根竖直状态的铝型材下端分别固定于六边形底座2C其余3条互不相邻的铝型材的上表面,3根竖直状态的铝型材上端的水平状态的铝型材一端分别固定于各自竖直状态的铝型材的侧面,并且可以沿着3根竖直状态的铝型材的侧面在竖直方向上进行位置调节,从而满足六边形底座2C与运动平台8固定时对流场上界面被测流体元器件4A在竖直方向上位置的调节,另一端通过螺钉固定在位于中心的正六棱柱壳体的3个互不相邻的侧面;位姿调节机构安装支撑架2B的3根水平状态的铝型材位于传感器安装支撑架2A的 3根水平状态的铝型材的上方;六边形底座2C由6根外形相同的铝型材首尾相接构成,接触面为铝型材一端加工而成的60度斜面,任意2根相邻的铝型材通过斜角连接件固定;支撑架2中所有垂直连接的铝型材均通过角件以及T型螺栓固定; Figure 4 shows the three-dimensional structure of the support frame 2, including the sensor installation support frame 2A, the posture adjustment mechanism installation support frame 2B and the hexagonal base 2C; the lower ends of the three vertical aluminum profiles of the sensor installation support frame 2A are respectively fixed On the upper surface of the three non-adjacent aluminum profiles of the hexagonal base 2C, and the position can be adjusted in the horizontal direction along the top surface of the hexagonal base 2C, so as to meet the measurement position requirements of the sensor heads 3A~3C Adjustment, the horizontal aluminum profiles at the upper ends of the 3 vertical aluminum profiles are respectively fixed on the sides of the respective vertical aluminum profiles, and point to the inner side of the hexagonal base 2C; the posture adjustment mechanism is installed with 3 of the support frame 2B The lower ends of the vertical aluminum profiles are respectively fixed on the upper surfaces of the other three non-adjacent aluminum profiles of the hexagonal base 2C, and one end of the horizontal aluminum profiles at the upper ends of the three vertical aluminum profiles are respectively fixed on their respective The side of the aluminum profile in the vertical state, and the position can be adjusted in the vertical direction along the sides of the three vertical aluminum profiles, so as to meet the upper interface of the convective field when the hexagonal base 2C and the moving platform 8 are fixed To adjust the position of the measured fluid component 4A in the vertical direction, the other end is fixed by screws on the three non-adjacent sides of the regular hexagonal prism housing in the center; The aluminum profiles in the highest state are located above the three horizontal aluminum profiles of the sensor installation support frame 2A; the hexagonal base 2C is composed of six aluminum profiles with the same shape connected end to end, and the contact surface is a 60mm aluminum profile processed from one end of the aluminum profile. degree slope, any two adjacent aluminum profiles are fixed by bevel connectors; all vertically connected aluminum profiles in support frame 2 are fixed by corner pieces and T-bolts;

图5表示了本发明整体结构的立体视图,表示了传感测量装置3和流场下界面结构及其位置调节机构5在系统中的位置,以及流场上界面被测流体元器件位姿调节机构1与支撑架2的连接方式;流场下界面结构及其位置调节机构包括流场下界面结构5A和手动精密升降台5B;流场下界面结构5A为透明的有机玻璃板与手动精密升降台5B固定,便于观测缝隙流场6的状态;流场下界面结构5A上表面为缝隙流场6的下界面;手动精密升降台5B可实现对流场下界面结构5A竖直方向位置的较大范围调节,在调节过程中,先调节手动精密升降台5B,使得流场下界面结构5A处于合适的位置,再通过流场上界面被测流体元器件位姿调节机构1对流场上界面被测流体元器件4A的位置进行微调,从而实现了对缝隙流场的厚度以及上下界面的平行度的精确控制 Figure 5 shows a perspective view of the overall structure of the present invention, showing the position of the sensing and measuring device 3, the lower interface structure of the flow field and its position adjustment mechanism 5 in the system, and the adjustment of the position and posture of the measured fluid components on the upper interface of the flow field The connection mode between mechanism 1 and support frame 2; the lower interface structure of the flow field and its position adjustment mechanism include the lower interface structure 5A of the flow field and the manual precision lifting platform 5B; the lower interface structure 5A of the flow field is a transparent plexiglass plate and a manual precision lifting platform The platform 5B is fixed, which is convenient for observing the state of the gap flow field 6; the upper surface of the lower interface structure 5A of the flow field is the lower interface of the gap flow field 6; the manual precision lifting platform 5B can realize the comparison of the vertical position of the lower interface structure 5A of the flow field. Large-scale adjustment, in the adjustment process, first adjust the manual precision lifting platform 5B, so that the lower interface structure 5A of the flow field is in a suitable position, and then through the upper interface of the flow field, the position and posture adjustment mechanism 1 of the measured fluid component is on the upper interface of the flow field The position of the measured fluid component 4A is fine-tuned, so as to realize the precise control of the thickness of the slit flow field and the parallelism of the upper and lower interfaces

所述的T型螺栓1A一端与支撑架2固定,另一端与固定模块1B固定;手动精密升降台5B与隔振平台7固定。 One end of the T-bolt 1A is fixed to the support frame 2 , and the other end is fixed to the fixed module 1B; the manual precision lifting platform 5B is fixed to the vibration isolation platform 7 .

图6表示了传感测量装置3在整体结构中的局部立体视图,三个结构相同的传感测量装置3均包括感测头、手动精密平移台以及固定块;每个感测头分别固定在各自的手动精密平移台3D上表面;通过调节手动精密平移台3D,可以调节感测头3A~3C与流场上界面被测流体元器件及其夹持机构4之间的距离,使其处于良好的测量状态;3个手动精密平移台3D下表面分别固定在各自的固定块3E上表面; Fig. 6 has shown the partial three-dimensional view of sensing measuring device 3 in the overall structure, and three sensing measuring devices 3 with the same structure all include sensing head, manual precision translation table and fixed block; Each sensing head is respectively fixed on The upper surface of the respective manual precision translation stage 3D; by adjusting the manual precision translation stage 3D, the distance between the sensing head 3A~3C and the measured fluid component and its clamping mechanism 4 on the upper interface of the flow field can be adjusted so that it is in the Good measurement status; the 3D lower surfaces of the 3 manual precision translation stages are respectively fixed on the upper surfaces of their respective fixed blocks 3E;

所述的3个固定块3E分别通过T型螺栓与传感器安装支撑架2A固定。 The three fixing blocks 3E are respectively fixed to the sensor installation support frame 2A through T-bolts.

上述具体实施方式用来解释说明本发明,而不是对本发明进行限制,在本发明的精神和权利要求的保护范围内,对本发明作出的任何修改和改变,都落入本发明的保护范围。 The above specific embodiments are used to explain the present invention, rather than to limit the present invention. Within the spirit of the present invention and the protection scope of the claims, any modification and change made to the present invention will fall into the protection scope of the present invention.

Claims (1)

1.一种非接触式流体元器件振动检测装置,其特征在于:包括六个结构相同的流场上界面被测流体元器件位姿调节机构(1)、支撑架(2)、三个结构相同的传感测量装置(3)、流场上界面被测流体元器件及其夹持机构(4)、流场下界面结构及其位置调节机构、隔振平台(7)、运动平台(8)、气液管路以及控制器(10);其中: 1. A non-contact fluid component vibration detection device, characterized in that: it includes six structurally identical flow field upper interface fluid component position and posture adjustment mechanisms (1), support frame (2), three structures The same sensing and measuring device (3), the measured fluid components on the upper interface of the flow field and its clamping mechanism (4), the structure of the lower interface of the flow field and its position adjustment mechanism, the vibration isolation platform (7), and the motion platform (8 ), gas-liquid pipeline and controller (10); wherein: 1) 六个结构相同的流场上界面被测流体元器件位姿调节机构(1): 1) The position and posture adjustment mechanism of the measured fluid components on the upper interface of six flow fields with the same structure (1): 均包括T型螺栓(1A)、固定模块(1B)、第一锁紧螺套、第二锁紧螺套、精密螺杆(1D)、位姿调节弹簧挂钩(1E)以及万向挂钩弹簧(1F);固定模块(1B)的一端与T型螺栓(1A)固定,固定模块(1B)的另一端与第一锁紧螺套固定;精密螺杆(1D)两端分别与第一锁紧螺套、第二锁紧螺套连接;位姿调节弹簧挂钩(1E)的一端与第二锁紧螺套固定,位姿调节弹簧挂钩(1E)的另一端与万向挂钩弹簧(1F)的一端连接; Both include T-bolts (1A), fixing modules (1B), first locking nut, second locking nut, precision screw (1D), posture adjustment spring hook (1E) and universal hook spring (1F ); one end of the fixed module (1B) is fixed with the T-shaped bolt (1A), and the other end of the fixed module (1B) is fixed with the first locking nut; the two ends of the precision screw (1D) are respectively connected with the first locking nut 1. Connect with the second locking nut; one end of the posture adjustment spring hook (1E) is fixed with the second locking nut, and the other end of the posture adjustment spring hook (1E) is connected with one end of the universal hook spring (1F) ; 2)支撑架(2): 2) Support frame (2): 包括传感器安装支撑架(2A)、位姿调节机构安装支撑架(2B)和六边形底座(2C);传感器安装支撑架(2A)的3根竖直状态的铝型材下端分别固定于六边形底座(2C)的3条互不相邻铝型材的上表面,3根竖直状态的铝型材上端的水平状态的铝型材分别固定于各自竖直状态的铝型材的侧面,并且指向六边形底座(2C)的内侧;位姿调节机构安装支撑架(2B) 的3根竖直状态的铝型材下端分别固定于六边形底座(2C)其余3条互不相邻的铝型材的上表面,3根竖直状态的铝型材上端的水平状态的铝型材一端分别固定于各自竖直状态的铝型材的侧面,另一端通过螺钉固定在位于中心的正六棱柱壳体的3个互不相邻的侧面;位姿调节机构安装支撑架(2B)的3根水平状态的铝型材位于传感器安装支撑架(2A)的 3根水平状态的铝型材的上方;六边形底座(2C)由6根外形相同的铝型材首尾相接构成,接触面为铝型材一端加工而成的60度斜面,任意2根相邻的铝型材通过斜角连接件固定;支撑架(2)中所有垂直连接的铝型材均通过角件以及T型螺栓固定; Including the sensor installation support frame (2A), the posture adjustment mechanism installation support frame (2B) and the hexagonal base (2C); the lower ends of the three vertical aluminum profiles of the sensor installation support frame (2A) are respectively fixed on the hexagonal The upper surfaces of the 3 non-adjacent aluminum profiles of the shaped base (2C), the horizontal aluminum profiles at the upper ends of the 3 vertical aluminum profiles are respectively fixed on the sides of the respective vertical aluminum profiles, and point to the six sides The inner side of the hexagonal base (2C); the lower ends of the three vertical aluminum profiles of the posture adjustment mechanism installation support frame (2B) are respectively fixed on the top of the remaining three non-adjacent aluminum profiles of the hexagonal base (2C) On the surface, one end of the upper end of the three vertical aluminum profiles and one end of the horizontal aluminum profile are respectively fixed to the side of the respective vertical aluminum profiles, and the other end is fixed to the three mutually different sides of the regular hexagonal prism shell located in the center by screws. Adjacent side; 3 horizontal aluminum profiles of the posture adjustment mechanism mounting support frame (2B) are located above the 3 horizontal aluminum profiles of the sensor mounting support frame (2A); the hexagonal base (2C) consists of 6 The aluminum profiles with the same shape are connected end to end. The contact surface is a 60-degree inclined plane processed by one end of the aluminum profiles. Any two adjacent aluminum profiles are fixed by bevel connectors; Aluminum profiles are fixed by corner fittings and T-bolts; 3) 三个结构相同的传感测量装置(3): 3) Three sensing and measuring devices (3) with the same structure: 均包括感测头、手动精密平移台以及固定块;每个感测头分别固定在各自的手动精密平移台(3D)上表面;3个手动精密平移台(3D)下表面分别固定在各自的固定块(3E)上表面; Each includes a sensing head, a manual precision translation stage and a fixed block; each sensing head is fixed on the upper surface of its own manual precision translation stage (3D); the lower surfaces of the three manual precision translation stages (3D) are respectively fixed on their respective The upper surface of the fixed block (3E); 4) 流场上界面被测流体元器件的夹持机构(4): 4) The clamping mechanism (4) of the measured fluid component on the interface of the flow field: 包括卡盘(4B)以及6个卡盘弹簧挂钩(4C);流场上界面被测流体元器件(4A)通过卡盘(4B)夹持,流场上界面被测流体元器件(4A)下表面为缝隙流场(6)的上界面;卡盘(4B)与6个卡盘弹簧挂钩(4C)固定; Including chuck (4B) and 6 chuck spring hooks (4C); the measured fluid component (4A) on the upper interface of the flow field is clamped by the chuck (4B), and the measured fluid component (4A) on the upper interface of the flow field The lower surface is the upper interface of the slit flow field (6); the chuck (4B) is fixed with 6 chuck spring hooks (4C);  5) 流场下界面结构及其位置调节机构:包括流场下界面结构(5A)和手动精密升降台(5B);流场下界面结构(5A)为透明的有机玻璃板,所述有机玻璃板与手动精密升降台(5B)固定,流场下界面结构(5A)上表面为缝隙流场(6)的下界面; 5) The lower interface structure of the flow field and its position adjustment mechanism: including the lower interface structure of the flow field (5A) and the manual precision lifting platform (5B); the lower interface structure of the flow field (5A) is a transparent plexiglass plate, and the plexiglass The plate is fixed to the manual precision lifting platform (5B), and the upper surface of the flow field lower interface structure (5A) is the lower interface of the gap flow field (6); 所述的T型螺栓(1A)一端与位姿调节机构安装支撑架(2B)的3根竖直状态的铝型材固定,另一端与固定模块(1B)固定;万向挂钩弹簧(1F)一端与位姿调节弹簧挂钩(1E)连接,另一端与卡盘弹簧挂钩(4C)连接;六边形底座(2C)下表面与隔振平台(7)或运动平台(8)固定;3个固定块(3E)分别通过另一T型螺栓与传感器安装支撑架(2A)固定;手动精密升降台(5B)与隔振平台(7)固定;注液管路(9A)、回收管路(9B)以及气密封管路(9C)均通过管路和快速气动接头与流场上界面被测流体元器件(4A)连接;控制器(10)通过线缆与感测头(3A~3C)连接; One end of the T-shaped bolt (1A) is fixed to the three vertical aluminum profiles of the posture adjustment mechanism installation support frame (2B), and the other end is fixed to the fixed module (1B); one end of the universal hook spring (1F) It is connected with the posture adjustment spring hook (1E), and the other end is connected with the chuck spring hook (4C); the lower surface of the hexagonal base (2C) is fixed with the vibration isolation platform (7) or the motion platform (8); 3 fixed The block (3E) is respectively fixed by another T-shaped bolt and the sensor installation support frame (2A); the manual precision lifting platform (5B) is fixed with the vibration isolation platform (7); the liquid injection pipeline (9A), the recovery pipeline (9B ) and the airtight pipeline (9C) are connected to the measured fluid component (4A) on the upper interface of the flow field through pipelines and quick pneumatic joints; the controller (10) is connected to the sensing head (3A~3C) through cables ; 所述的流场上界面被测流体元器件位姿调节机构(1)在水平和竖直方向各有3个,均呈120度中心对称分布,对称轴为流场上界面被测流体元器件(4A)的轴心;卡盘弹簧挂钩(4C)共有6个,其中3个120度中心对称分布于卡盘(4B)的上表面,对称轴为流场上界面被测流体元器件(4A)的轴心,上端分别与3个竖直方向的万向挂钩弹簧(1F)连接,下端通过螺纹与卡盘(4B)固定,另外3个120度中心对称分布于卡盘(4B)的下表面,对称轴为流场上界面被测流体元器件(4A)的轴心,上端与卡盘(4B)固定,下端分别与3个水平方向的万向挂钩弹簧(1F)连接。 The position and posture adjustment mechanism (1) of the measured fluid component on the upper interface of the flow field has three in the horizontal and vertical directions, all of which are symmetrically distributed at a center of 120 degrees, and the axis of symmetry is the measured fluid component on the upper interface of the flow field (4A); there are 6 chuck spring hooks (4C) in total, 3 of which are symmetrically distributed on the upper surface of the chuck (4B) at 120 degrees, and the axis of symmetry is the upper interface of the flow field and the measured fluid component (4A ), the upper end is respectively connected with three vertical universal hook springs (1F), the lower end is fixed with the chuck (4B) through threads, and the other three 120-degree centers are symmetrically distributed under the chuck (4B). On the surface, the axis of symmetry is the axis of the measured fluid component (4A) on the upper interface of the flow field, the upper end is fixed with the chuck (4B), and the lower end is respectively connected with three universal hook springs (1F) in the horizontal direction.
CN201210547449.0A 2012-12-17 2012-12-17 Vibration detecting device of non-contact type fluid component Active CN103048038B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210547449.0A CN103048038B (en) 2012-12-17 2012-12-17 Vibration detecting device of non-contact type fluid component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210547449.0A CN103048038B (en) 2012-12-17 2012-12-17 Vibration detecting device of non-contact type fluid component

Publications (2)

Publication Number Publication Date
CN103048038A CN103048038A (en) 2013-04-17
CN103048038B true CN103048038B (en) 2015-04-29

Family

ID=48060765

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210547449.0A Active CN103048038B (en) 2012-12-17 2012-12-17 Vibration detecting device of non-contact type fluid component

Country Status (1)

Country Link
CN (1) CN103048038B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103424176B (en) * 2013-08-22 2015-06-17 浙江大学 Bubble flow channel vibration detecting device with controllable flow field state
CN115077692B (en) * 2022-08-22 2022-12-06 山东一唯自动化有限公司 Fluid vibration detection device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1340694A (en) * 2000-08-18 2002-03-20 麦克罗莫申公司 Coriolis mass and flow controller
CN101180521A (en) * 2005-05-16 2008-05-14 坦尼科汽车操作有限公司 Measuring device for disc support table

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750621B2 (en) * 2001-09-10 2004-06-15 Sauer-Danfoss Inc. Method and system for non-contact sensing of motion of a roller drum
CN203024857U (en) * 2012-12-17 2013-06-26 浙江大学 Vibration detection device of non-contact fluid component

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1340694A (en) * 2000-08-18 2002-03-20 麦克罗莫申公司 Coriolis mass and flow controller
CN101180521A (en) * 2005-05-16 2008-05-14 坦尼科汽车操作有限公司 Measuring device for disc support table

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
双钝体涡街流量计流体振动特性研究;张平等;《机电工程》;20011231;第18卷(第5期);63-64,70 *

Also Published As

Publication number Publication date
CN103048038A (en) 2013-04-17

Similar Documents

Publication Publication Date Title
CN103335801B (en) High-precision vibration simulation system based on multi-axis multi-degree of freedom
CN204085427U (en) A kind of measuring for verticality measurer
CN104295862B (en) A kind of power measuring instrument tripod
CN101788257B (en) Device and method for six freedom degrees micro pose measurement based on capacitance sensor
CN103048038B (en) Vibration detecting device of non-contact type fluid component
CN107894332A (en) Shaping machine horizontal work level reliability test system
CN108414170A (en) A kind of large-size axis parts shape part bending synchronizes stiffness measurement device under loading environment
CN202928479U (en) Dimension measuring device
CN104614112B (en) Combined high-accuracy three-axis force sensor
CN104596410B (en) A kind of hexahedron high accuracy morpheme measurement apparatus and method
CN203414164U (en) Vibration detection device for bubble flow passage with controllable state of flow field
CN103273480A (en) Vibration simulation, active compensation and vibration restraining system based on force feedback
CN107702835A (en) Restructural parallel connection three-dimensional force/torque sensor
CN218698994U (en) Mechanical arm calibration and motion precision detection assembly
CN106989723B (en) Ultra-high precision tilt test platform
CN110174206B (en) Device and method for measuring three-dimensional total force for experiment
CN100595541C (en) Air-floating Measuring Method of Force and Displacement
CN103148989B (en) The axial wobble device of joint tighness commissioning device
CN106706212A (en) Aircraft center-of-mass measurement device capable of realizing automatic detection and eliminating yawing force
CN117760298A (en) Device and method for detecting parallelism of spindle box
CN117719004A (en) Positioning accuracy test board and positioning accuracy test board of mechanical arm
CN110530232A (en) A kind of Multifunctional check tool
CN203024857U (en) Vibration detection device of non-contact fluid component
CN113155618B (en) Device for measuring extrusion stress
Cai et al. Design of a vector displacement sensor based on a cross-slot structure

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20200714

Address after: No.99 Lixin Road, Qingshanhu street, Lin'an District, Hangzhou City, Zhejiang Province

Patentee after: ZHEJIANG QIER ELECTROMECHANICAL TECHNOLOGY Co.,Ltd.

Address before: 310027 Hangzhou, Zhejiang Province, Xihu District, Zhejiang Road, No. 38, No.

Patentee before: ZHEJIANG University