CN103137629B - Flexible substrate, display device having same and manufacturing method thereof - Google Patents
Flexible substrate, display device having same and manufacturing method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种软性基板及具有该软性基板的显示装置,且特别是涉及一种可调整软性基板与玻璃载板之间附着力的软性基板、具有其的显示装置及其制造方法。The present invention relates to a flexible substrate and a display device having the flexible substrate, and in particular to a flexible substrate capable of adjusting the adhesive force between the flexible substrate and a glass carrier, a display device having the same and its manufacture method.
背景技术Background technique
传统的显示装置,常选择玻璃基板作为材料。然而,玻璃基板易碎且不具可挠性。因此,使用玻璃基板制成的显示装置对外来的应力的容忍较差,且无法用于可挠性的显示装置的开发。相较之下,软性基板具有可挠曲及较佳的强度与韧性,且相较于玻璃基板又更为轻薄。市场上,使用软性基板取代玻璃基板制作而成的显示装置逐渐成为趋势。Traditional display devices often choose glass substrates as materials. However, glass substrates are fragile and not flexible. Therefore, a display device made of a glass substrate has poor tolerance to external stress, and cannot be used in the development of a flexible display device. In contrast, the flexible substrate has flexibility, better strength and toughness, and is lighter and thinner than the glass substrate. In the market, display devices made of flexible substrates instead of glass substrates are gradually becoming a trend.
由于软性基板本身的刚性及机械强度都不及玻璃基板,在制作软性基板时,常需要以硬式基板或玻璃基板当作载板,作为软性基板的制造过程中的支撑结构,待软性基板形成后,再将软性基板与玻璃载板分离,以将软性基板取下利用,并将玻璃载板回收利用。因此,软性基板与玻璃载板之间的附着力,影响到软性基板的制造品质及生产率,以及玻璃载板的回收的简便性。Since the rigidity and mechanical strength of the flexible substrate itself is not as good as that of the glass substrate, when making a flexible substrate, it is often necessary to use a hard substrate or a glass substrate as a carrier as a supporting structure in the manufacturing process of the flexible substrate. After the substrate is formed, the flexible substrate is separated from the glass carrier, so that the flexible substrate can be removed and utilized, and the glass carrier can be recycled. Therefore, the adhesion between the flexible substrate and the glass carrier affects the manufacturing quality and productivity of the flexible substrate, as well as the ease of recycling the glass carrier.
若软性基板与玻璃载板之间附着力太强,不但不易平整地取下所希望利用的软性基板,而且残留在玻璃载板的软性基材,也会影响到硬式基板的回收使用。若软硬基板与玻璃载板之间的附着力太弱时,软性基板在制造过程中可能会脱落,造成软性基板的制造失败。If the adhesion between the flexible substrate and the glass carrier is too strong, it will not only be difficult to remove the desired flexible substrate smoothly, but also the soft substrate remaining on the glass carrier will also affect the recycling of the rigid substrate . If the adhesion between the flexible and hard substrate and the glass carrier is too weak, the flexible substrate may fall off during the manufacturing process, resulting in failure of the flexible substrate.
发明内容Contents of the invention
本发明的目的在于提供一种软性基板及具有该软性基板的显示装置。利用特殊的第一高分子层调整软性基板与玻璃载板之间的附着力,提高软性基板的制造品质及良率。The object of the present invention is to provide a flexible substrate and a display device having the flexible substrate. The special first polymer layer is used to adjust the adhesive force between the flexible substrate and the glass carrier to improve the manufacturing quality and yield of the flexible substrate.
根据本发明的第一方面,提出一种软性基板,包括第一高分子层及第二高分子层。第一高分子层包括聚酰胺酸(PAA)、聚亚酰胺、环氧化合物及光致抗蚀剂材料至少一者,第一高分子层形成于一玻璃载板上。第二高分子层形成于第一高分子层上,第二高分子层包括聚亚酰胺及透明聚合物薄膜至少一者。According to a first aspect of the present invention, a flexible substrate is provided, including a first polymer layer and a second polymer layer. The first polymer layer includes at least one of polyamic acid (PAA), polyimide, epoxy compound and photoresist material, and the first polymer layer is formed on a glass carrier. The second polymer layer is formed on the first polymer layer, and the second polymer layer includes at least one of polyimide and transparent polymer film.
根据本发明的第二方面,提出一种显示装置,包括一第一基板、一第二基板、一显示介质层及一驱动电路。第一基板包括第一高分子层及第二高分子层。第一高分子层包括聚酰胺酸、聚亚酰胺、环氧化合物及光致抗蚀剂材料至少一者,第一高分子层形成于一玻璃载板上。第二高分子层形成于第一高分子层上,第二高分子层包括聚亚酰胺及透明聚合物薄膜至少一者。第二基板与第一基板相对而设。显示介质层,设置于第一基板与第二基板之间。驱动电路设置于第一基板与第二基板之间,用以驱动显示介质层。According to a second aspect of the present invention, a display device is provided, including a first substrate, a second substrate, a display medium layer and a driving circuit. The first substrate includes a first polymer layer and a second polymer layer. The first polymer layer includes at least one of polyamic acid, polyimide, epoxy compound and photoresist material, and the first polymer layer is formed on a glass carrier. The second polymer layer is formed on the first polymer layer, and the second polymer layer includes at least one of polyimide and transparent polymer film. The second substrate is opposite to the first substrate. The display medium layer is arranged between the first substrate and the second substrate. The driving circuit is arranged between the first substrate and the second substrate, and is used for driving the display medium layer.
根据本发明的第三方面,提出一种制造显示装置的方法。方法包括以下步骤。提供一第一基板,包括形成一第一高分子层于一玻璃载板上,第一高分子层包括聚酰胺酸、聚亚酰胺、环氧化合物及光致抗蚀剂材料至少一者,且第一高分子层与玻璃载板的附着力可调整。形成第二高分子层于第一高分子层上,第二高分子层包括一聚亚酰胺及透明聚合物薄膜至少一者。将第一基板从玻璃载板剥除。提供一第二基板。形成一显示介质层于第一基板与第二基板之间。形成一驱动电路于第一基板与第二基板之间,以驱动显示介质层。According to a third aspect of the present invention, a method of manufacturing a display device is proposed. The method includes the following steps. providing a first substrate, including forming a first polymer layer on a glass carrier, the first polymer layer comprising at least one of polyamic acid, polyimide, epoxy compound and photoresist material, and The adhesion between the first polymer layer and the glass carrier can be adjusted. A second polymer layer is formed on the first polymer layer, and the second polymer layer includes at least one of a polyimide and a transparent polymer film. The first substrate is peeled off from the glass carrier. A second substrate is provided. A display medium layer is formed between the first substrate and the second substrate. A driving circuit is formed between the first substrate and the second substrate to drive the display medium layer.
为了对本发明的上述及其他方面有更佳的了解,下文特举较佳实施例,并配合所附附图,作详细说明如下:In order to have a better understanding of the above-mentioned and other aspects of the present invention, the preferred embodiments are specifically cited below, together with the accompanying drawings, and described in detail as follows:
附图说明Description of drawings
图1A~图1G为本发明第一实施例的软性基板的制造流程图;1A to 1G are the manufacturing flow chart of the flexible substrate according to the first embodiment of the present invention;
图2A~图2D为本发明第二实施例的软性基板的制造流程图;2A to 2D are the manufacturing flow chart of the flexible substrate according to the second embodiment of the present invention;
图3A~图3C为本发明第三实施例的软性基板的制造流程图;3A to 3C are the manufacturing flow chart of the flexible substrate according to the third embodiment of the present invention;
图4A~图4E为本发明第四实施例的软性基板的制造流程图;4A to 4E are the manufacturing flow chart of the flexible substrate according to the fourth embodiment of the present invention;
图5A~图5D为本发明第五实施例的软性基板的制造流程图;5A to 5D are the manufacturing flow chart of the flexible substrate according to the fifth embodiment of the present invention;
图6A~图6D为本发明第六实施例的软性基板的制造流程图;6A to 6D are the manufacturing flow chart of the flexible substrate according to the sixth embodiment of the present invention;
图7A~图7D为本发明第七实施例的软性基板的制造流程图;7A to 7D are the manufacturing flow chart of the flexible substrate according to the seventh embodiment of the present invention;
图8为本发明一实施例的有机发光二极管显示装置的示意图;8 is a schematic diagram of an organic light emitting diode display device according to an embodiment of the present invention;
图9为本发明一实施例的液晶显示装置的示意图;9 is a schematic diagram of a liquid crystal display device according to an embodiment of the present invention;
图10为本发明一实施例的电子纸显示装置的示意图。FIG. 10 is a schematic diagram of an electronic paper display device according to an embodiment of the present invention.
主要元件符号说明Description of main component symbols
8~12:显示装置8~12: Display device
10、20、30、40、50、60、70:软性基板10, 20, 30, 40, 50, 60, 70: flexible substrate
80、90、110:驱动电路80, 90, 110: drive circuit
100、200、300、400、400’、500、600、700:玻璃载板100, 200, 300, 400, 400’, 500, 600, 700: glass carrier
120、120’、120’a、420、420a、520、520a、620、620a、720、720a:第三高分子层120, 120', 120'a, 420, 420a, 520, 520a, 620, 620a, 720, 720a: the third polymer layer
140、140a、240、340、340a、440、440a、540、540a、640、640a:第一高分子层140, 140a, 240, 340, 340a, 440, 440a, 540, 540a, 640, 640a: first polymer layer
160、160a、260、360、360a、460、460a、560、560a、660、660a、760、760a:第二高分子层160, 160a, 260, 360, 360a, 460, 460a, 560, 560a, 660, 660a, 760, 760a: second polymer layer
260、560、760:第二高分子材料260, 560, 760: the second polymer material
262、562、762:胶材262, 562, 762: glue material
800、810、900、910、1000、1010:基板800, 810, 900, 910, 1000, 1010: Substrate
820、830、920、930、1020、1030:导电层820, 830, 920, 930, 1020, 1030: conductive layer
850、950、1050:显示介质层850, 950, 1050: display medium layer
262、562、762、262a、562a、762a:胶材262, 562, 762, 262a, 562a, 762a: glue material
264、564、764、264a、564a、764a:第二高分子材料264, 564, 764, 264a, 564a, 764a: the second polymer material
742、744、742a、744a:缓冲材料742, 744, 742a, 744a: cushioning material
740、740a:缓冲层740, 740a: buffer layer
Ⅰ、Ⅱ:区域Ⅰ, Ⅱ: Area
M:光掩模M: Photomask
S1、S2、T1、T2、V1、V2:切割位置S1, S2, T1, T2, V1, V2: cutting position
X-X:切线X-X: Tangent
具体实施方式detailed description
第一实施例first embodiment
图1A~图1G为绘示依照本案第一实施例的软性基板10的制造流程图。请参考图1A,提供一玻璃载板100。以刷涂或旋涂的方式涂布第三高分子材料(未绘示出)于玻璃载板100上,再以110℃~120℃的温度进行加热,形成一第三高分子层120于玻璃载板100上。第三高分子层120例如是一复合材料,具有聚硅氧烷、聚酰胺酸(Polyamicacid)、聚四氟乙烯及聚亚酰胺其中至少一者,第三高分子层120的材料与玻璃载板100的附着力不佳,使得第三高分子层120与玻璃载板100之间形成一离型面。请参考图1B,使用一光掩模M,对第三高分子层120进行一曝光显影的图案化制作工艺。图案化的第三高分子层120’如图1C所示。FIG. 1A-FIG. 1G are flowcharts showing the manufacturing process of the flexible substrate 10 according to the first embodiment of the present application. Referring to FIG. 1A , a glass carrier 100 is provided. Coating a third polymer material (not shown) on the glass carrier 100 by brush coating or spin coating, and then heating at a temperature of 110° C. to 120° C. to form a third polymer layer 120 on the glass on the carrier board 100. The third polymer layer 120 is, for example, a composite material with at least one of polysiloxane, polyamic acid (Polyamic acid), polytetrafluoroethylene and polyimide, the material of the third polymer layer 120 and the glass substrate The adhesive force of 100 is poor, so that a release surface is formed between the third polymer layer 120 and the glass carrier 100 . Referring to FIG. 1B , using a photomask M, a patterning process of exposure and development is performed on the third polymer layer 120 . The patterned third polymer layer 120' is shown in FIG. 1C.
请参考图1D,以刷涂或旋涂的方式,涂布第一高分子材料(未绘示出)于图案化的第三高分子层120’及部分的玻璃载板100上,再以80℃~450℃的温度进行加热,以形成第一高分子层140于图案化的第三高分子层120’及部分的玻璃载板100上。接着,如图1E所示,以刷涂或旋涂的方式涂布第二高分子材料(未绘示出)于第一高分子层140上,再以150℃~450℃的温度进行加热,以形成第二高分子层160。第二高分子层160包括聚亚酰胺、聚合物薄膜或其他具有透明性质的塑胶材质其中至少一者。Please refer to FIG. 1D, by brush coating or spin coating, coat the first polymer material (not shown) on the patterned third polymer layer 120' and part of the glass carrier 100, and then 80 ° C to 450 ° C to form the first polymer layer 140 on the patterned third polymer layer 120 ′ and part of the glass carrier 100 . Next, as shown in FIG. 1E , coat a second polymer material (not shown) on the first polymer layer 140 by brush coating or spin coating, and then heat at a temperature of 150° C. to 450° C. to form the second polymer layer 160 . The second polymer layer 160 includes at least one of polyimide, polymer film, or other transparent plastic materials.
在此实施例中,第一高分子材料例如包括聚酰胺酸(PolyacrylicAcid,PAA)的类聚亚酰胺(Polyimide,PI)高分子材料及环氧(epoxy)化合物及光致抗蚀剂材料等有机高分子材料至少一者。第一高分子材料的制备方式,是将聚酰胺酸及特定比例的环氧化合物,溶解于N-甲基2-四氢吡各酮(N-Methyl-2-Pyrrolidone,NMP)、二甲基甲酰胺(Dimethylformamide,DMF)、二甲基乙酰胺(Dimethylacetamide,DMAC)或四氢呋喃(Tetrahydrofuran,THF)的溶剂中。环氧化合物例如一环氧树脂,环氧化合物的特定添加比例,例如以重量百分比为0.1%~10%的环氧化合物,添加至重量百分比为99.9%~90%的聚酰胺酸中。经过80℃~450℃的温度加热烘烤过后,第一高分子材料的环氧化合物发生开环反应,并与聚酰胺酸的酰胺酸(AmicAcid)基接枝,以形成环氧化合物与聚酰胺酸的交联结构。In this embodiment, the first polymer material includes, for example, polyimide (PI) polymer materials such as polyamic acid (PolyacrylicAcid, PAA), epoxy (epoxy) compounds, and organic photoresist materials. At least one polymer material. The preparation method of the first polymer material is to dissolve polyamic acid and a specific proportion of epoxy compound in N-methyl 2-tetrahydropyrrolidone (N-Methyl-2-Pyrrolidone, NMP), dimethyl formamide (Dimethylformamide, DMF), dimethylacetamide (Dimethylacetamide, DMAC) or tetrahydrofuran (Tetrahydrofuran, THF) solvent. The epoxy compound is, for example, an epoxy resin, and the specific addition ratio of the epoxy compound is, for example, 0.1%-10% by weight of the epoxy compound to 99.9%-90% by weight of the polyamic acid. After being heated and baked at a temperature of 80°C to 450°C, the epoxy compound of the first polymer material undergoes a ring-opening reaction and grafts with the amic acid (AmicAcid) group of the polyamic acid to form an epoxy compound and polyamide acid cross-linked structure.
在此实施例中,第一高分子层140中的环氧化合物与聚酰胺酸的交联结构,可以与第二高分子层160反应而紧密地结合。并且,环氧化合物与聚酰胺酸的交联结构越多,第一高分子层140与玻璃载板100之间附着力及第一高分子层140与第二高分子层160之间附着力越强,且第一高分子层140的抗化(架桥)程度也越高。举例而言,具有重量百分比为0.1%~10%的环氧化合物的第一高分子层140,与玻璃载板100之间的附着力为附着力测试规范(ASTM-D3359)中的0B~4B。举例而言,于附着力测试规范(ASTM-D3359)中,当测试区的第二基材贴附于第一基材的附着力等级为0B时,表示测试区中有65%以上的第二基材会剥落,亦即等级0B仅附着力较弱,而非完全无附着力。当测试区的第二基材贴附于第一基材的附着力等级为4B时,表示测试区中少于5%的第二基材会剥落,亦即仅指附着力相对较强。当附着力等级为5B时,表示测试区的第二基材完全不会剥落。因此,可随着制作工艺上对附着力要求的需要而调整第一高分子层140中环氧化合物的重量百分比,使其于附着力测试规范(ASTM-D3359)中的等级为0B至4B,也可视制作工艺需要而使用附着力等级为0B的第一高分子层140。In this embodiment, the cross-linked structure of the epoxy compound and the polyamic acid in the first polymer layer 140 can react with the second polymer layer 160 to tightly combine. And, the more the cross-linked structure of the epoxy compound and the polyamic acid is, the better the adhesion between the first polymer layer 140 and the glass carrier 100 and the adhesion between the first polymer layer 140 and the second polymer layer 160 are. stronger, and the degree of chemical resistance (bridging) of the first polymer layer 140 is also higher. For example, the adhesion between the first polymer layer 140 with 0.1%-10% by weight of epoxy compound and the glass substrate 100 is 0B-4B in the adhesion test specification (ASTM-D3359). . For example, in the adhesion test specification (ASTM-D3359), when the adhesion level of the second substrate in the test area attached to the first substrate is 0B, it means that there are more than 65% of the second substrate in the test area. The substrate will flake off, ie grade 0B has only weak adhesion, not no adhesion at all. When the adhesion level of the second substrate attached to the first substrate in the test area is 4B, it means that less than 5% of the second substrate in the test area will be peeled off, which means that the adhesion is relatively strong. When the adhesion rating is 5B, it means that the second substrate in the test area will not peel off at all. Therefore, the percentage by weight of the epoxy compound in the first polymer layer 140 can be adjusted according to the requirement of the adhesion force in the manufacturing process, so that the grade of the epoxy compound in the adhesion test specification (ASTM-D3359) is 0B to 4B, Depending on the requirements of the manufacturing process, the first polymer layer 140 with an adhesion level of OB can also be used.
请参考图1F,以激光、轮刀或冲切等方式,切割第二高分子层160、第一高分子层140及图案化的第三高分子层120’,以形成第二高分子层160a、第一高分子层140a及图案化的第三高分子层120’a。值得注意的是,切割位置S1及切割位置S2实质上对应至图案化的第三高分子层120的边界,且切割后的图案化的第三高分子层120’a的表面积小于图案化的第三高分子层120’的表面积。接着,如图1G所示,在第三高分子层120与玻璃载板100之间离型以形成软性基板10。于此实施例的软性基板10包括第二高分子层160a、第一高分子层140a及图案化的第三高分子层120’a的三层结构。Please refer to FIG. 1F, the second polymer layer 160, the first polymer layer 140 and the patterned third polymer layer 120' are cut by means of laser, wheel cutter or punching to form the second polymer layer 160a , the first polymer layer 140a and the patterned third polymer layer 120'a. It should be noted that the cutting position S1 and the cutting position S2 substantially correspond to the boundary of the patterned third polymer layer 120, and the surface area of the patterned third polymer layer 120'a after cutting is smaller than that of the patterned third polymer layer 120'a. The surface area of the three polymer layers 120'. Next, as shown in FIG. 1G , the flexible substrate 10 is formed by releasing between the third polymer layer 120 and the glass carrier 100 . The flexible substrate 10 in this embodiment includes a three-layer structure of the second polymer layer 160a, the first polymer layer 140a and the patterned third polymer layer 120'a.
在此实施例中,通过改变聚酰胺酸及环氧化合物的重量比例,可以调整第一高分子层140与玻璃载板100间的附着力及第一高分子层140的抗化性。由于第二高分子层160的材料与玻璃载板100之间设置有第一高分子层140,且第一高分子层140与玻璃载板100间的附着力可以调整,使得第二高分子层160的材料的选择性提高。也就是说,不论第二高分子层160的材料与玻璃载板100间的附着力不佳者、第二高分子层160的材料与玻璃载板100间的附着力太强者,或第二高分子层160的材料会腐蚀或破坏第三高分子层120的材料者都可以选用,第二高分子层160的材料的选用率高达90%,亦即可选择的第二高分子层160的材料种类变多。In this embodiment, the adhesion between the first polymer layer 140 and the glass carrier 100 and the chemical resistance of the first polymer layer 140 can be adjusted by changing the weight ratio of the polyamic acid and the epoxy compound. Since the first polymer layer 140 is disposed between the material of the second polymer layer 160 and the glass carrier 100, and the adhesion between the first polymer layer 140 and the glass carrier 100 can be adjusted, the second polymer layer The selectivity of 160 materials has been improved. That is to say, whether the material of the second polymer layer 160 has poor adhesion to the glass carrier 100, the material of the second polymer layer 160 has too strong adhesion to the glass carrier 100, or the second The material of the polymer layer 160 can corrode or destroy the material of the third polymer layer 120 can be selected, the selection rate of the material of the second polymer layer 160 is as high as 90%, that is, the optional second polymer layer 160 There are many types of materials.
第二实施例second embodiment
图2A~图2D为绘示依照本案第二实施例的软性基板20的制造流程图。请参考图2A,提供一玻璃载板200。形成一图案化第三高分子层220于玻璃载板200上。图案化第三高分子层220的材料与玻璃载200的附着力不佳,使得图案化第三高分子层220与玻璃载板200之间形成一离型面。形成第一高分子层240于图案化第三高分子层220及部分的玻璃载板200上。第一高分子层240及图案化第三高分子层220的材料与形成方法可以与第一实施例相同,于此不再赘述。2A to 2D are flowcharts illustrating the manufacturing process of the flexible substrate 20 according to the second embodiment of the present application. Referring to FIG. 2A , a glass carrier 200 is provided. A patterned third polymer layer 220 is formed on the glass carrier 200 . The material of the patterned third polymer layer 220 has poor adhesion to the glass carrier 200 , so that a release surface is formed between the patterned third polymer layer 220 and the glass carrier 200 . The first polymer layer 240 is formed on the patterned third polymer layer 220 and part of the glass carrier 200 . The materials and formation methods of the first polymer layer 240 and the patterned third polymer layer 220 may be the same as those of the first embodiment, and will not be repeated here.
接着,如图2B所示,形成第二高分子层260于第一高分子层240上。第二高分子层260包括胶材262及第二高分子材料264。第二高分子材料264可以通过胶材262,以转印的方式贴附于第一高分子层240上。由于胶材262的特性要求少,因此可以提高选择性。于一实施例中,胶材262可耐高温,以提高之后元件制作工艺的耐高温能力。第二高分子材料264包括聚亚酰胺(Polyimide,PI)、聚合物薄膜及其他具有透明性质的塑胶材料至少一者。Next, as shown in FIG. 2B , a second polymer layer 260 is formed on the first polymer layer 240 . The second polymer layer 260 includes an adhesive material 262 and a second polymer material 264 . The second polymer material 264 can be pasted on the first polymer layer 240 through the adhesive material 262 in a transfer printing manner. Since the characteristics of the adhesive material 262 are less required, the selectivity can be improved. In one embodiment, the adhesive material 262 is resistant to high temperature, so as to improve the high temperature resistance of subsequent component manufacturing processes. The second polymer material 264 includes at least one of polyimide (PI), polymer film and other transparent plastic materials.
请参考图2C~图2D,以激光、轮刀或冲切等方式,切割第二高分子层260、第一高分子层240及图案化第三高分子层220。切割位置N1及切割位置N2实质上对应至图案化第三高分子层220的边界,且切割后的图案化第三高分子层220a的表面积小于切割前的图案化第三高分子层220的表面积。接着,于图案化第三高分子层220与玻璃载板200之间离型以形成软性基板20。如图2D所示,软性基板20包括第二高分子层260a、第一高分子层240a及图案化第三高分子层220a的三层结构,软性基板20耐化且耐高温。Referring to FIGS. 2C to 2D , the second polymer layer 260 , the first polymer layer 240 and the patterned third polymer layer 220 are cut by means of laser, wheel cutter or punching. The cutting position N1 and the cutting position N2 substantially correspond to the boundary of the patterned third polymer layer 220, and the surface area of the patterned third polymer layer 220a after cutting is smaller than the surface area of the patterned third polymer layer 220 before cutting . Next, release the mold between the patterned third polymer layer 220 and the glass carrier 200 to form the flexible substrate 20 . As shown in FIG. 2D , the flexible substrate 20 includes a three-layer structure of a second polymer layer 260 a , a first polymer layer 240 a and a patterned third polymer layer 220 a , and the flexible substrate 20 is resistant to chemical and high temperature.
第三实施例third embodiment
图3A~图3C绘示依照本发明第三实施例的软性基板30的制造流程图。于此实施例的玻璃载板300、第一高分子层340及第二高分子层360的材质,与第一实施例的玻璃载板100、第一高分子层140及第二高分子层160相同,于此不再赘述。如图3A所示,提供一玻璃载板300,以刷涂或旋涂的方式涂布第一高分子材料(未绘示出)于玻璃载板300上,再以80℃~450℃的温度进行加热,形成第一高分子层340于玻璃载板300上。3A to 3C illustrate the manufacturing flow chart of the flexible substrate 30 according to the third embodiment of the present invention. The materials of the glass carrier 300 , the first polymer layer 340 and the second polymer layer 360 in this embodiment are the same as those of the glass carrier 100 , the first polymer layer 140 and the second polymer layer 160 in the first embodiment. The same, and will not be repeated here. As shown in FIG. 3A , a glass carrier 300 is provided, and a first polymer material (not shown) is coated on the glass carrier 300 by brush coating or spin coating, and then at a temperature of 80° C. to 450° C. Heating is performed to form the first polymer layer 340 on the glass carrier 300 .
接着,如图3B所示,以刷涂或旋涂的方式,涂布第二高分子材料(未绘示出)于第一高分子层340上,再以150℃~450℃的温度进行加热,以形成第二高分子层360。最后,在第一高分子层340与玻璃载板300之间离型,以形成如图3C所示的软性基板30。在此实施例的软性基板30,包括第二高分子层360及第一高分子层340的双层结构。Next, as shown in FIG. 3B, a second polymer material (not shown) is coated on the first polymer layer 340 by brush coating or spin coating, and then heated at a temperature of 150° C. to 450° C. , to form the second polymer layer 360 . Finally, release the mold between the first polymer layer 340 and the glass carrier 300 to form the flexible substrate 30 as shown in FIG. 3C . The flexible substrate 30 in this embodiment includes a double layer structure of the second polymer layer 360 and the first polymer layer 340 .
通过改变第一高分子层340的材料中聚酰胺酸及环氧化合物的重量比例,可以调整第一高分子层340与玻璃载板300间的附着力及第一高分子层340的抗化性。在此实施例中,也可以视制作工艺需要而选择重量百分比为0.1%~10%的环氧化合物作为第一高分子层340的材料成份,使得第一高分子层340与玻璃载板300之间的附着力等级为0B至4B(附着力测试规范ASTM-D3359),也可使用附着力等级为0B的第一高分子层340。By changing the weight ratio of polyamic acid and epoxy compound in the material of the first polymer layer 340, the adhesion between the first polymer layer 340 and the glass carrier 300 and the chemical resistance of the first polymer layer 340 can be adjusted. . In this embodiment, an epoxy compound with a weight percentage of 0.1% to 10% can also be selected as the material composition of the first polymer layer 340 according to the requirements of the manufacturing process, so that the first polymer layer 340 and the glass carrier 300 The adhesion level between them is 0B to 4B (adhesion test specification ASTM-D3359), and the first polymer layer 340 with an adhesion level of 0B can also be used.
较佳地,可以添加重量百分比为0.1%~6%的环氧化合物以形成第一高分子层340,此时,第一高分子层340与玻璃载板300之间的附着力为1B~2B。在薄膜晶体管基板及液晶显示装置制作工艺中,当第一高分子层340与玻璃载板300之间的附着力为1B时,可以避免制作工艺中第一高分子层340脱离玻璃载板300。当第一高分子层340与玻璃载板300之间的附着力为2B时,可以于图3B的制作工艺结束后,利用现有的机台离型第一高分子层340与玻璃载板300。Preferably, an epoxy compound with a weight percentage of 0.1%-6% can be added to form the first polymer layer 340. At this time, the adhesion between the first polymer layer 340 and the glass carrier 300 is 1B-2B . In the manufacturing process of the thin film transistor substrate and the liquid crystal display device, when the adhesion between the first polymer layer 340 and the glass carrier 300 is 1B, the first polymer layer 340 can be prevented from detaching from the glass carrier 300 during the manufacturing process. When the adhesion between the first polymer layer 340 and the glass carrier 300 is 2B, after the manufacturing process in FIG. .
由于第一高分子层340与玻璃载板300间的附着力可以调整,使得与玻璃载板300附着力不佳的第二高分子层360的材料,以及与玻璃载板300附着力太强的第二高分子层360的材料,皆可通过第一高分子层340而与玻璃载板300产生一适当的附着力,提高第二高分子层360的材料的选择性,有效地降低生产成本并加快开发速度。Since the adhesion between the first polymer layer 340 and the glass carrier 300 can be adjusted, the material of the second polymer layer 360 with poor adhesion to the glass carrier 300 and the material with too strong adhesion to the glass carrier 300 The material of the second polymer layer 360 can produce an appropriate adhesion force with the glass carrier plate 300 through the first polymer layer 340, improve the selectivity of the material of the second polymer layer 360, effectively reduce the production cost and Speed up development.
第四实施例Fourth embodiment
图4A~图4E为绘示依照本案第四实施例的软性基板40的制造流程图。如图4A所示,提供一玻璃载板400,以一光掩模M遮蔽玻璃载板400的第二区域Ⅱ,并以紫外光照射未受到光掩模M遮蔽的第一区域Ⅰ,紫外光的波长范围例如172~258纳米(nm)的短波长紫外光。请参考图4B,在紫外光照射后,玻璃载板400’的第一区域Ⅰ的氢键降低。此时,玻璃载板400’的第一区域Ⅰ的湿润程度高于第二区域Ⅱ的湿润程度。4A-4E are flowcharts illustrating the manufacturing process of the flexible substrate 40 according to the fourth embodiment of the present application. As shown in FIG. 4A , a glass carrier 400 is provided, a second region II of the glass carrier 400 is shielded with a photomask M, and the first region I not shielded by the photomask M is irradiated with ultraviolet light. The wavelength range is, for example, short-wavelength ultraviolet light of 172-258 nanometers (nm). Please refer to FIG. 4B , after the ultraviolet light is irradiated, the hydrogen bond of the first region I of the glass carrier 400' is reduced. At this time, the wet degree of the first region I of the glass carrier 400' is higher than that of the second region II.
接着,如图4C所示,形成第一高分子层440于玻璃载板400’上,且形成第二高分子层460于第一高分子层440上。第一高分子层440及第二高分子层460的材料及形成方式,与第一及第二实施例相同,于此不再赘述。请接着参考图4D,图4D为绘示图4C的结构沿切线X-X剖开的一剖视图。如图4D所示,以激光、轮刀或冲切等方式,切割第二高分子层460及第一高分子层440,切割位置T1及切割位置T2实质上位于第二高分子层460及第一高分子层440对应至玻璃载板400’的第二区域Ⅱ的范围内,且对应至玻璃载板400’的第一区域Ⅰ及第二区域Ⅱ的边界之处。Next, as shown in FIG. 4C , a first polymer layer 440 is formed on the glass carrier 400 ′, and a second polymer layer 460 is formed on the first polymer layer 440 . The materials and formation methods of the first polymer layer 440 and the second polymer layer 460 are the same as those of the first and second embodiments, and will not be repeated here. Please refer to FIG. 4D next. FIG. 4D is a cross-sectional view of the structure shown in FIG. 4C cut along the line X-X. As shown in FIG. 4D , the second polymer layer 460 and the first polymer layer 440 are cut by means of laser, wheel cutter or punching, and the cutting position T1 and the cutting position T2 are substantially located between the second polymer layer 460 and the first polymer layer 460. A polymer layer 440 corresponds to the range of the second region II of the glass carrier 400 ′, and corresponds to the boundary of the first region I and the second region II of the glass carrier 400 ′.
在此实施例中,由于玻璃载板400’的第一区域Ⅰ的湿润程度高于第二区域Ⅱ的湿润程度,使得第一高分子层440与第一区域Ⅰ的附着力大于第一高分子层440与第二区域Ⅱ的附着力。因此,可以从切割位置T1及切割位置T2将第一高分子层440a与玻璃载板400’离型,形成如图4E所示的软性基板40,软性基板40包括第一高分子层440a及第二高分子层460a的双层结构。软性基板40的表面积实质上小于玻璃载板400’的第二区域Ⅱ的表面积。In this embodiment, since the degree of wetness of the first region I of the glass carrier 400' is higher than that of the second region II, the adhesion of the first polymer layer 440 to the first region I is greater than that of the first polymer layer 440. Adhesion of layer 440 to the second region II. Therefore, the first polymer layer 440a can be released from the glass carrier 400' from the cutting position T1 and the cutting position T2 to form a flexible substrate 40 as shown in FIG. 4E. The flexible substrate 40 includes the first polymer layer 440a. And the double-layer structure of the second polymer layer 460a. The surface area of the flexible substrate 40 is substantially smaller than the surface area of the second region II of the glass carrier 400'.
第五实施例fifth embodiment
图5A~图5D为绘示依照本案第五实施例的软性基板50的制造流程图。如图5A所示,提供一以紫外光照射处理过的玻璃载板500,紫外光的波长范围例如172~258纳米(nm)的短波长紫外光。紫外光照射后的玻璃载板500的第一区域Ⅰ的氢键降低,使得紫外光照射后的第一区域Ⅰ的湿润程度高于未受到紫外光照射的第二区域Ⅱ的湿润程度。接着,依序形成第三高分子层520于玻璃载板500上,且形成第一高分子层540于第三高分子层520上。第三高分子层520例如一表面处理离型材料,例如聚硅氧烷材料、聚酰胺酸(Polyamicacid)、氟系高分子材料(如聚四氟乙烯)或聚亚酰胺等材料。5A to 5D are flowcharts illustrating the manufacturing process of the flexible substrate 50 according to the fifth embodiment of the present application. As shown in FIG. 5A , there is provided a glass carrier 500 irradiated with ultraviolet light, for example, short-wavelength ultraviolet light in a wavelength range of 172-258 nanometers (nm). The hydrogen bond of the first region I of the glass carrier plate 500 irradiated by ultraviolet light is reduced, so that the wet degree of the first region I after ultraviolet light irradiation is higher than that of the second region II not irradiated by ultraviolet light. Next, the third polymer layer 520 is sequentially formed on the glass carrier 500 , and the first polymer layer 540 is formed on the third polymer layer 520 . The third polymer layer 520 is, for example, a surface-treated release material, such as polysiloxane material, polyamic acid, fluorine-based polymer material (such as polytetrafluoroethylene), or polyimide.
请参考图5B~图5C,提供一第二高分子层560,第二高分子层560包括胶材562及第二高分子材料564,以转印的方式形成第二高分子层560于第一高分子层540上。第一高分子层540及第二高分子材料564的形成方式,与第四实施例所对应的第一高分子层440及第二高分子层460相同,于此不再赘述。第一高分子层540及第二高分子材料564的材料,与第二实施例所对应的第一高分子层240及第二高分子层260相同,于此不再赘述。Please refer to FIG. 5B-FIG. 5C, a second polymer layer 560 is provided. The second polymer layer 560 includes an adhesive material 562 and a second polymer material 564. The second polymer layer 560 is formed on the first polymer layer by transfer printing. on the polymer layer 540 . The formation methods of the first polymer layer 540 and the second polymer material 564 are the same as those of the first polymer layer 440 and the second polymer layer 460 corresponding to the fourth embodiment, and will not be repeated here. The materials of the first polymer layer 540 and the second polymer material 564 are the same as those of the first polymer layer 240 and the second polymer layer 260 corresponding to the second embodiment, and will not be repeated here.
请接着参考图5C,以激光、轮刀或冲切等方式,切割第二高分子层560及第一高分子层540,切割位置P1及切割位置P2实质上位于第二高分子层560及第一高分子层540对应至玻璃载板500的第二区域Ⅱ的范围内,且对应至玻璃载板500的第一区域Ⅰ及第二区域Ⅱ的边界之处。Please then refer to FIG. 5C, the second polymer layer 560 and the first polymer layer 540 are cut by means of laser, wheel cutter or punching, etc., and the cutting position P1 and the cutting position P2 are substantially located between the second polymer layer 560 and the first polymer layer. A polymer layer 540 corresponds to the range of the second region II of the glass carrier 500 , and corresponds to the boundary of the first region I and the second region II of the glass carrier 500 .
于此实施例中,由于玻璃载板500的第一区域Ⅰ的湿润程度高于第二区域Ⅱ的湿润程度,使得第三高分子层520与第一区域Ⅰ的附着力大于第三高分子层520与第二区域Ⅱ的附着力。因此,可以从切割位置P1及切割位置P2将第三高分子层520与玻璃载板500离型,形成如图5D所示的软性基板50,软性基板50包括第三高分子层520a、第一高分子层540a及第二高分子层560a的三层结构。软性基板50的表面积实质上小于玻璃载板500的第二区域Ⅱ的表面积。In this embodiment, since the degree of wetness of the first region I of the glass carrier 500 is higher than that of the second region II, the adhesion between the third polymer layer 520 and the first region I is greater than that of the third polymer layer. 520 Adhesion to the second zone II. Therefore, the third polymer layer 520 can be released from the glass carrier 500 from the cutting position P1 and the cutting position P2 to form a flexible substrate 50 as shown in FIG. The three-layer structure of the first polymer layer 540a and the second polymer layer 560a. The surface area of the flexible substrate 50 is substantially smaller than the surface area of the second region II of the glass carrier 500 .
第六实施例Sixth embodiment
图6A~图6D为绘示依照本案第六实施例的软性基板60的制造流程图。如图6A所示,形成一图案化第三高分子层620于玻璃载板600。请参考图6B,形成一第一高分子层640于图案化第三高分子层620及部分的玻璃载板600上。如图6C所示,形成一第二高分子层660于第一高分子层640上,并切割第二高分子层660及第一高分子层640,切割位置V1及切割位置V2实质上对应至图案化第三高分子层620的边界,且切割后的第一高分子层640a及第二高分子层660a的表面积,小于图案化第三高分子层620的表面积。6A-6D are flowcharts illustrating the manufacturing process of the flexible substrate 60 according to the sixth embodiment of the present application. As shown in FIG. 6A , a patterned third polymer layer 620 is formed on the glass carrier 600 . Referring to FIG. 6B , a first polymer layer 640 is formed on the patterned third polymer layer 620 and part of the glass carrier 600 . As shown in FIG. 6C, a second polymer layer 660 is formed on the first polymer layer 640, and the second polymer layer 660 and the first polymer layer 640 are cut. The cutting position V1 and the cutting position V2 substantially correspond to The boundary of the third polymer layer 620 is patterned, and the surface areas of the cut first polymer layer 640 a and the second polymer layer 660 a are smaller than the surface area of the patterned third polymer layer 620 .
在此实施例中,第一高分子层640及第二高分子层660的材料及形成方法,与第一实施例相同,在此不再赘述。值得注意的是,于此实施例的图案化第三高分子层620例如一表面处理离型材料,例如聚硅氧烷材料、聚酰胺酸(Polyamicacid)、氟系高分子材料(如聚四氟乙烯)或聚亚酰胺等材料。聚硅氧烷材料,是以硅氧键为骨架所衍生的聚合物。聚硅氧烷材料及氟系高分子材料共通的特性为材料惰性极高,所以表面性质具有不易粘着的特性。图案化第三高分子层620与第一高分子层640a的附着力不佳,因而形成一离型面于图案化第三高分子层620与第一高分子层640a之间。接着,离型图案化第三高分子层620与第一高分子层640a,形成如图6D所示的软性基板60,软性基板60包括第一高分子层640a及第二高分子层660a。In this embodiment, the materials and forming methods of the first polymer layer 640 and the second polymer layer 660 are the same as those in the first embodiment, and will not be repeated here. It is worth noting that the patterned third polymer layer 620 in this embodiment is, for example, a surface-treated release material, such as polysiloxane material, polyamic acid (Polyamic acid), fluorine-based polymer material (such as polytetrafluoroethylene) Vinyl) or polyimide and other materials. Polysiloxane materials are polymers derived from silicon-oxygen bonds as the backbone. The common feature of polysiloxane materials and fluorine-based polymer materials is that the materials are extremely inert, so the surface properties are not easy to stick. The adhesion between the patterned third polymer layer 620 and the first polymer layer 640a is poor, thus forming a release surface between the patterned third polymer layer 620 and the first polymer layer 640a. Next, the third polymer layer 620 and the first polymer layer 640a are patterned to form a flexible substrate 60 as shown in FIG. 6D. The flexible substrate 60 includes a first polymer layer 640a and a second polymer layer 660a. .
第七实施例Seventh embodiment
图7A~图7D为绘示依照本案第七实施例的软性基板70的制造流程图。如图7A所示,形成一图案化第三高分子层720于玻璃载板700。图案化第三高分子层720经过图案化以形成具有不同粘性的区域A及区域B。请参考图7B,形成一缓冲层740于图案化第三高分子层720上。缓冲层740例如由缓冲材料742及缓冲材料744所组成,缓冲材料742及缓冲材料744例如聚亚酰胺、一般光致抗蚀剂材料、丙烯酸基(Acrylic)材料、硅型(Silicontype)材料或有机高分子材料。7A to 7D are flowcharts illustrating the manufacturing process of the flexible substrate 70 according to the seventh embodiment of the present application. As shown in FIG. 7A , a patterned third polymer layer 720 is formed on the glass carrier 700 . The patterned third polymer layer 720 is patterned to form regions A and B with different viscosities. Referring to FIG. 7B , a buffer layer 740 is formed on the patterned third polymer layer 720 . The buffer layer 740 is, for example, composed of a buffer material 742 and a buffer material 744. The buffer material 742 and the buffer material 744 are such as polyimide, general photoresist material, acrylic-based (Acrylic) material, silicon type (Silicontype) material or organic Polymer Materials.
请参考图7B~图7C,提供一第二高分子层760,第二高分子层760包括胶材762及第二高分子材料764。通过胶材762可以将第二高分子材料764以转印的方式贴附于缓冲层740上。由于胶材762的特性要求少,因此可以提高选择性。缓冲层740可以隔绝胶材762与图案化第三高分子层720,避免损害图案化第三高分子层720的离型能力。Referring to FIGS. 7B-7C , a second polymer layer 760 is provided, and the second polymer layer 760 includes an adhesive material 762 and a second polymer material 764 . The second polymer material 764 can be pasted on the buffer layer 740 by transfer printing through the adhesive material 762 . Since the characteristics of the glue material 762 are less required, the selectivity can be improved. The buffer layer 740 can isolate the adhesive material 762 from the patterned third polymer layer 720 to avoid damage to the release ability of the patterned third polymer layer 720 .
接着,请参考图7C,切割第二高分子层760及缓冲层740,切割位置U1及切割位置U2实质上对应至图案化第三高分子层720的边界。且切割后的缓冲层740a(绘示于图7D)及第二高分子层760a(绘示于图7D)的表面积,小于图案化第三高分子层720的表面积。Next, referring to FIG. 7C , the second polymer layer 760 and the buffer layer 740 are cut, and the cutting positions U1 and U2 substantially correspond to the boundary of the patterned third polymer layer 720 . Moreover, the surface areas of the cut buffer layer 740 a (shown in FIG. 7D ) and the second polymer layer 760 a (shown in FIG. 7D ) are smaller than the surface area of the patterned third polymer layer 720 .
在此实施例中,第二高分子层760的材料及形成方法,与第六实施例相同,在此不再赘述。图案化第三高分子层720例如一表面处理离型材料,包括聚硅氧烷、聚酰胺酸(Polyamicacid)、氟系高分子材料(例如系聚四氟乙烯)或聚亚酰胺材料。聚硅氧烷材料,是以硅氧键为骨架所衍生的聚合物。聚硅氧烷材料及氟系高分子材料共通的特性为材料惰性极高,所以表面性质具有不易粘着的特性。图案化第三高分子层720与缓冲层740a的附着力不佳,因而形成一离型面于图案化第三高分子层720与缓冲层740a之间。接着,离型图案化第三高分子层720与缓冲层740a,形成如图7D所示的软性基板70,软性基板70包括缓冲层740a及第二高分子层760a。In this embodiment, the material and forming method of the second polymer layer 760 are the same as those in the sixth embodiment, and will not be repeated here. The patterned third polymer layer 720 is, for example, a surface-treated release material, including polysiloxane, polyamic acid, fluorine-based polymer material (such as polytetrafluoroethylene) or polyimide material. Polysiloxane materials are polymers derived from silicon-oxygen bonds as the backbone. The common feature of polysiloxane materials and fluorine-based polymer materials is that the materials are extremely inert, so the surface properties are not easy to stick. The adhesion between the patterned third polymer layer 720 and the buffer layer 740a is poor, thus forming a release surface between the patterned third polymer layer 720 and the buffer layer 740a. Next, the third polymer layer 720 and the buffer layer 740a are patterned to form a flexible substrate 70 as shown in FIG. 7D . The flexible substrate 70 includes the buffer layer 740a and the second polymer layer 760a.
应用上述实施例于不同种类的显示装置Apply the above embodiments to different types of display devices
利用上述实施例的方法所制造而成的软性基板,可应用于不同种类的显示装置,例如有机发光二极管(OLED)、液晶显示装置(LCD)和电子纸(E-Paper)显示装置等态样,以下将就此些不同显示装置的态样作说明。The flexible substrate manufactured by the method of the above embodiments can be applied to different types of display devices, such as organic light emitting diodes (OLED), liquid crystal display devices (LCD) and electronic paper (E-Paper) display devices. As such, the aspects of these different display devices will be described below.
请参考图8,其绘示依照本发明一实施例的一有机发光二极管(OLED)显示装置8的结构示意图。如图8所示,有机发光二极管显示装置8包括一上基板800,与上基板800相对而设的一下基板810。一驱动电路80设置于上基板800及下基板810之间,驱动电路80包括第一导电层820设置于上基板800上,第二导电层830设置于下基板810上。一显示介质层850夹设于第一导电层820及第二导电层830之间。于此实施例的显示介质层850包括多个有机发光二极管。值得注意的是,上基板800或下基板810可使用上述任一实施例所制成。Please refer to FIG. 8 , which shows a schematic structural diagram of an organic light emitting diode (OLED) display device 8 according to an embodiment of the present invention. As shown in FIG. 8 , the OLED display device 8 includes an upper substrate 800 and a lower substrate 810 opposite to the upper substrate 800 . A driving circuit 80 is disposed between the upper substrate 800 and the lower substrate 810 . The driving circuit 80 includes a first conductive layer 820 disposed on the upper substrate 800 , and a second conductive layer 830 disposed on the lower substrate 810 . A display medium layer 850 is sandwiched between the first conductive layer 820 and the second conductive layer 830 . The display medium layer 850 in this embodiment includes a plurality of organic light emitting diodes. It should be noted that the upper substrate 800 or the lower substrate 810 can be made by using any of the above-mentioned embodiments.
请参考图9,其绘示依照本发明一实施例的一液晶显示装置(LCD)9的结构示意图。如图9所示,液晶显示装置9包括上基板900及与上基板相对而设的下基板910。一驱动电路90设置于上基板900及下基板910之间,驱动电路90包括第一导电层920设置于上基板900上,第二导电层930设置于下基板910上。一显示介质层950夹设于第一导电层920及第二导电层930之间,于此实施例的显示介质层950包括多个液晶单元。值得注意的是,上基板900或下基板910可使用上述任一实施例所制成。Please refer to FIG. 9 , which shows a schematic structural diagram of a liquid crystal display device (LCD) 9 according to an embodiment of the present invention. As shown in FIG. 9 , the liquid crystal display device 9 includes an upper substrate 900 and a lower substrate 910 opposite to the upper substrate. A driving circuit 90 is disposed between the upper substrate 900 and the lower substrate 910 . The driving circuit 90 includes a first conductive layer 920 disposed on the upper substrate 900 , and a second conductive layer 930 disposed on the lower substrate 910 . A display medium layer 950 is sandwiched between the first conductive layer 920 and the second conductive layer 930 , and the display medium layer 950 in this embodiment includes a plurality of liquid crystal cells. It should be noted that the upper substrate 900 or the lower substrate 910 can be made by using any of the above-mentioned embodiments.
请参考图10,其绘示依照本发明一实施例的一电子纸(E-Paper)显示装置12的结构示意图。如图10所示,电子纸显示装置12包括一上基板1000及与上基板相对而设的一下基板1010。一驱动电路110设置于上基板1000及下基板1010之间,驱动电路110包括第一导电层1020设置于上基板1000上,第二导电层1030设置于下基板1010上。一显示介质层1050夹设于第一导电层1020及第二导电层1030之间,于此实施例的显示介质层1050例如包括多个显示微粒的电子墨水。值得注意的是,上基板1000或下基板1010可使用上述任一实施例所制成。Please refer to FIG. 10 , which shows a schematic structural diagram of an electronic paper (E-Paper) display device 12 according to an embodiment of the present invention. As shown in FIG. 10 , the electronic paper display device 12 includes an upper substrate 1000 and a lower substrate 1010 opposite to the upper substrate. A driving circuit 110 is disposed between the upper substrate 1000 and the lower substrate 1010 . The driving circuit 110 includes a first conductive layer 1020 disposed on the upper substrate 1000 , and a second conductive layer 1030 disposed on the lower substrate 1010 . A display medium layer 1050 is interposed between the first conductive layer 1020 and the second conductive layer 1030 . In this embodiment, the display medium layer 1050 includes electronic ink of a plurality of display particles, for example. It should be noted that the upper substrate 1000 or the lower substrate 1010 can be made by using any of the above-mentioned embodiments.
综上所述,本发明上述实施例通过改变第一高分子层的材料中聚酰胺酸及环氧化合物的重量比例,调整第一高分子层与玻璃载板间的附着力,可以提高第二高分子层的材料的选择性。本发明上述实施例的软性基板的制造方法,不但提供软性基板的边缘与玻璃载板一适当的附着力,使得软性基板的制作工艺中不会脱落于玻璃载板,且于软性基板制造完成后,可以利用激光切割等方式定义出软性基板的边界,并使用现行的机台,轻易且完整地将软性基板与玻璃载板离型,不但可以降低生产成本并加快开发速度,方便载板回收再利用,且提供较佳的软性基板的制作工艺良率及品质。In summary, the above embodiments of the present invention can improve the second polymer layer by changing the weight ratio of polyamic acid and epoxy compound in the material of the first polymer layer and adjusting the adhesion between the first polymer layer and the glass carrier. The selectivity of the material of the polymer layer. The manufacturing method of the flexible substrate according to the above-mentioned embodiments of the present invention not only provides an appropriate adhesive force between the edge of the flexible substrate and the glass carrier, so that the flexible substrate will not fall off from the glass carrier during the manufacturing process, and the flexible After the substrate is manufactured, the boundary of the flexible substrate can be defined by means of laser cutting, and the current machine can be used to easily and completely release the flexible substrate from the glass carrier, which can not only reduce production costs and speed up development , to facilitate the recycling and reuse of the carrier board, and provide a better yield and quality of the manufacturing process of the flexible substrate.
综上所述,虽然结合以上较佳实施例揭露了本发明,然而其并非用以限定本发明。本发明所属技术领域中熟悉此技术者,在不脱离本发明的精神和范围内,可作各种的更动与润饰。因此,本发明的保护范围应以附上的权利要求所界定的为准。In summary, although the present invention has been disclosed in conjunction with the above preferred embodiments, they are not intended to limit the present invention. Those skilled in the art to which the present invention belongs can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be defined by the appended claims.
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| US6884698B1 (en) * | 1994-02-23 | 2005-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device with crystallization of amorphous silicon |
| TW200713521A (en) * | 2005-09-19 | 2007-04-01 | Ind Tech Res Inst | Method of fabricating flexible thin film transistor array substrate |
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| CN101997087A (en) * | 2009-08-17 | 2011-03-30 | 财团法人工业技术研究院 | Substrate applied to flexible electronic devices and manufacturing method thereof |
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| TW200713521A (en) * | 2005-09-19 | 2007-04-01 | Ind Tech Res Inst | Method of fabricating flexible thin film transistor array substrate |
| TW200949353A (en) * | 2008-05-20 | 2009-12-01 | Ind Tech Res Inst | Multi-area electro-optical shutter devices |
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Granted publication date: 20160120 Termination date: 20210420 |