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CN103323098A - Small-sized micro-vibration measurement and control system - Google Patents

Small-sized micro-vibration measurement and control system Download PDF

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CN103323098A
CN103323098A CN2013101958352A CN201310195835A CN103323098A CN 103323098 A CN103323098 A CN 103323098A CN 2013101958352 A CN2013101958352 A CN 2013101958352A CN 201310195835 A CN201310195835 A CN 201310195835A CN 103323098 A CN103323098 A CN 103323098A
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CN103323098B (en
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王云峰
程伟
夏明一
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Beihang University
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Abstract

本发明涉及一种小型微振动测量及控制系统,其包括:底座、负载盘、折叠梁、压电传感器、压电作动器以及数据处理和控制系统;该折叠梁包含有两个横梁,每个横梁上下表面各粘贴一层压电片,外层压电片作为压电作动器,内层压电片作为压电传感器;该折叠梁位于负载盘和底座之间,通过螺栓压紧连接;四个折叠梁在负载盘下表面沿圆周均布,其上分布的八个压电传感器可以测量出负载扰动源的三个动态力和三个动态弯矩;每一个压电传感器测得的信号经数据处理和控制系统处理后,输出特定的控制电压到与其并置的压电作动器,从而实现对负载振动的抑制;本发明可以有效测量负载振动并抑制负载振动的传递,可靠性高。

Figure 201310195835

The invention relates to a small-scale micro-vibration measurement and control system, which includes: a base, a load plate, a folding beam, a piezoelectric sensor, a piezoelectric actuator, and a data processing and control system; the folding beam includes two beams, each A piezoelectric sheet is pasted on the upper and lower surfaces of each beam, the outer piezoelectric sheet is used as a piezoelectric actuator, and the inner layer of piezoelectric sheet is used as a piezoelectric sensor; the folded beam is located between the load plate and the base, and is connected by bolts. ; Four folded beams are evenly distributed along the circumference of the lower surface of the load plate, and the eight piezoelectric sensors distributed on it can measure three dynamic forces and three dynamic bending moments of the load disturbance source; each piezoelectric sensor measures After the signal is processed by the data processing and control system, a specific control voltage is output to the piezoelectric actuator juxtaposed with it, thereby realizing the suppression of load vibration; the invention can effectively measure the load vibration and suppress the transmission of the load vibration, and the reliability high.

Figure 201310195835

Description

一种小型微振动测量及控制系统A small micro-vibration measurement and control system

技术领域technical field

本发明涉及一种小型微振动测量及控制系统,可用于对航天器部件微小扰动载荷在六个自由度上的振动信号进行动态测量并抑制其振动的传递。The invention relates to a small-scale micro-vibration measurement and control system, which can be used for dynamic measurement of the vibration signal of the micro-disturbance load of the spacecraft component on six degrees of freedom and suppress the transmission of the vibration.

背景技术Background technique

目前的航天器大多都属于大型柔性展开式机构,且带有大量的光学元件,它们对指向精度和稳定度均提出了很高的要求。另外,在现代航天器姿态控制系统中,反作用轮、单框架力矩陀螺和太阳翼驱动机构等是其控制系统中的重要元件,它们在提供必要的控制动力的同时,也会引起一些有害振动(为简单起见,下面将上述三种系统统称为扰动源)。这些扰动主要由飞轮不平衡、轴承扰动、电机扰动、电机驱动误差等引起的,其中飞轮不平衡是导致飞轮振动的最主要原因,这些扰动力和扰动力矩会降低体太空中精密性仪器的性能指标,因此测量和分析航天器有效载荷扰动的动态特性并对其振动进行控制,对于提高航天器的姿态控制精度和加强航天器的安全设计有着非常重要的工程意义。Most of the current spacecraft are large-scale flexible deployment mechanisms with a large number of optical elements, which have high requirements for pointing accuracy and stability. In addition, in the attitude control system of modern spacecraft, reaction wheels, single-frame moment gyroscopes and solar wing drive mechanisms are important components in the control system. While they provide the necessary control power, they will also cause some harmful vibrations ( For simplicity, the above three systems are collectively referred to as disturbance sources below). These disturbances are mainly caused by flywheel unbalance, bearing disturbance, motor disturbance, motor drive error, etc. Among them, flywheel unbalance is the main cause of flywheel vibration, and these disturbance forces and disturbance moments will reduce the performance of precision instruments in body space Therefore, measuring and analyzing the dynamic characteristics of the spacecraft payload disturbance and controlling its vibration has very important engineering significance for improving the attitude control accuracy of the spacecraft and strengthening the safety design of the spacecraft.

由于航天器扰动源的扰动很小,个别有效载荷如动量轮在空间三个方向只能产生几十毫牛顿甚至几毫牛顿的微弱扰动,要想在具有相对强烈干扰背景噪音的地面实验室中测量并控制此类扰动十分困难,而其对应传感器\作动器的精度要求非常高。Because the disturbance of the disturbance source of the spacecraft is very small, individual payloads such as momentum wheels can only produce weak disturbances of tens of millinewtons or even several millinewtons in three directions in space. It is very difficult to measure and control such disturbances, and the accuracy requirements of the corresponding sensors\actuators are very high.

目前,国内外尚未见有关此类微小振动测量及控制系统的文献报导。At present, there is no literature report about this kind of micro-vibration measurement and control system at home and abroad.

发明内容Contents of the invention

本发明要解决的技术问题是:克服现有技术的不足,提供一种小型微振动控制系统,在航天器部件运行过程中,抑制其振动在空间的传递,以提高航天器的姿态控制精度和加强航天器的安全设计。The technical problem to be solved by the present invention is: to overcome the deficiencies of the prior art, to provide a small micro-vibration control system, which can suppress the transmission of vibration in space during the operation of spacecraft components, so as to improve the attitude control accuracy and Enhance the safety design of spacecraft.

本发明要解决其技术问题所采用的技术方案是:一种小型微振动测量及控制系统,包括:底座、负载盘、四个折叠梁、八个压电传感器、八个压电作动器、十六个螺栓、八个通孔以及数据处理和控制系统;负载安装在负载盘的上表面;每一个压电折叠梁包含有两个横梁、两个压电传感器和两个压电作动器;压电折叠梁位于底座上表面和负载盘下表面之间,沿负载盘下表面圆周均布,压电折叠梁通过十六个螺栓与负载盘和底座固连;压电折叠梁上横梁与空间Z轴垂直,相邻的两个折叠梁互相垂直;每个压电折叠梁内侧粘贴两个压电传感器,能够测量X、Y和Z方向的力和力矩;每个压电折叠梁外侧粘有两个压电作动器,用来接受数据处理和控制系统的输出信号并产生作动力抑制系统振动。振动源或负载产生振动后,八个压电传感器会测得振动信号并以电压形式输入数据处理和控制系统,数据处理和控制系统以特定增益将输入信号反相放大并输出到相应的压电作动器,最终实现抑制负载振动的传递。The technical solution adopted by the present invention to solve the technical problem is: a small-scale micro-vibration measurement and control system, including: a base, a load plate, four folding beams, eight piezoelectric sensors, eight piezoelectric actuators, Sixteen bolts, eight through holes and data processing and control system; the load is mounted on the upper surface of the load plate; each piezoelectric folding beam contains two beams, two piezoelectric sensors and two piezoelectric actuators ; The piezoelectric folding beam is located between the upper surface of the base and the lower surface of the load plate, and is evenly distributed along the circumference of the lower surface of the load plate. The piezoelectric folding beam is connected to the load plate and the base through sixteen bolts; The Z axis in space is vertical, and two adjacent folded beams are perpendicular to each other; two piezoelectric sensors are pasted on the inside of each piezoelectric folded beam, which can measure the force and moment in the X, Y, and Z directions; each piezoelectric folded beam is glued on the outside There are two piezoelectric actuators, which are used to receive the output signals of the data processing and control system and generate force to suppress system vibration. After the vibration source or load generates vibration, the eight piezoelectric sensors will measure the vibration signal and input it into the data processing and control system in the form of voltage. The data processing and control system will invert and amplify the input signal with a specific gain and output it to the corresponding piezoelectric sensor. Actuator, finally realizing the transmission of suppressed load vibration.

所述的八个压电传感器、八个压电作动器为d31型压电陶瓷元件。The eight piezoelectric sensors and eight piezoelectric actuators are d 31 piezoelectric ceramic elements.

所述的负载盘的形状为圆形,其上有八个沉头孔用以连接压电折叠梁,四个螺栓通孔用以连接负载。The shape of the load plate is circular, and there are eight countersunk holes for connecting piezoelectric folding beams, and four bolt through holes for connecting loads.

所述的八个压电传感器对称分布在压电折叠梁内表面上。The eight piezoelectric sensors are symmetrically distributed on the inner surface of the piezoelectric folding beam.

所述的八个压电作动器对称分布在压电折叠梁外表面上。The eight piezoelectric actuators are symmetrically distributed on the outer surface of the piezoelectric folding beam.

所述的底座为正方形框架,内侧边缘上有四个弧形缺口,框架上有八个沉头孔用来连接压电折叠梁,四个螺栓通孔用来连接固定端。The base is a square frame with four arc-shaped notches on the inner edge, eight countersunk holes on the frame for connecting piezoelectric folding beams, and four bolt through holes for connecting fixed ends.

每一个压电折叠梁中的两对压电传感器及压电作动器对位并置(即每一个压电传感器都与一个压电作动器沿横梁上下表面对称布置),缩短了系统响应时间,提高了控制性能。Two pairs of piezoelectric sensors and piezoelectric actuators in each piezoelectric folding beam are aligned and juxtaposed (that is, each piezoelectric sensor and a piezoelectric actuator are arranged symmetrically along the upper and lower surfaces of the beam), which shortens the system response time, improved control performance.

该系统在不输出控制信号时可以作为传感器使用,实现振动测量;在输出控制信号时作为控制器使用,实现振动抑制。The system can be used as a sensor when not outputting control signals to realize vibration measurement; when outputting control signals, it can be used as a controller to realize vibration suppression.

本发明与现有技术相比具有以下优点:Compared with the prior art, the present invention has the following advantages:

(1)本发明可以有效测量负载振动并抑制负载振动的传递,可靠性高;且本发明在控制系统在不输出控制信号时可以作为传感器使用,实现微振动信号测量;在输出控制信号时作为控制器使用,实现振动抑制。(1) The present invention can effectively measure load vibration and suppress the transmission of load vibration, and has high reliability; and the present invention can be used as a sensor when the control system does not output control signals to realize micro-vibration signal measurement; when outputting control signals, it can be used as a sensor The controller is used to achieve vibration suppression.

(2)本发明中的每一个压电折叠梁中的两对压电传感器与压电作动器分别粘贴于横梁的上下表面,在由于负载扰动导致横梁变形时,用作传感器与作动器的压电陶瓷片上产生的电压信号的相位差保持不变,可直接使用反馈控制率实现振动控制,工程应用上较为简单。(2) Two pairs of piezoelectric sensors and piezoelectric actuators in each piezoelectric folding beam in the present invention are respectively pasted on the upper and lower surfaces of the beam, and are used as sensors and actuators when the beam is deformed due to load disturbance The phase difference of the voltage signal generated on the piezoelectric ceramic sheet remains unchanged, and the feedback control rate can be directly used to realize vibration control, and the engineering application is relatively simple.

(3)本发明中控制装置和负载分离,不需要在负载上安装附加设备和传感器,不影响负载的动态特性,不会损伤负载结构。(3) In the present invention, the control device and the load are separated, no additional equipment and sensors need to be installed on the load, the dynamic characteristics of the load are not affected, and the structure of the load is not damaged.

(4)本发明中每一个压电传感器都与一个压电作动器对位并置,压电传感器信号经反相放大后直接由控制系统输出给压电作动器,简化了控制流程,缩短了系统响应时间,提高了控制性能。(4) In the present invention, each piezoelectric sensor is aligned and juxtaposed with a piezoelectric actuator, and the signal of the piezoelectric sensor is directly output to the piezoelectric actuator by the control system after inverting and amplifying, which simplifies the control process. The system response time is shortened and the control performance is improved.

(5)本发明振动控制装置体积小巧,安装形式灵活,可以方便的应用于多种场合,提高了控制系统的适用性。(5) The vibration control device of the present invention is small in size and flexible in installation form, and can be conveniently applied to various occasions, improving the applicability of the control system.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明中负载盘结构示意图;Fig. 2 is a schematic structural view of the load plate in the present invention;

图3为本发明中底座结构示意图;Fig. 3 is a schematic diagram of the base structure in the present invention;

图4为简谐力激励下系统控制前后一阶模态响应对比。Figure 4 is a comparison of the first-order modal response before and after system control under simple harmonic force excitation.

图中标号:四个负载盘通孔1,四个底座通孔7,紧固螺栓2,负载盘3,四个折叠梁4,压电作动器5,底座6,压电传感器8,横梁9,数据处理和控制系统10。Labels in the figure: four load plate through holes 1, four base through holes 7, fastening bolts 2, load plate 3, four folding beams 4, piezoelectric actuator 5, base 6, piezoelectric sensor 8, beam 9. Data processing and control system 10.

具体实施方式Detailed ways

如图1、2、3所示,本发明一种小型微振动测量及控制系统包括:四个负载盘通孔1,紧固螺栓2,负载盘3,四个折叠梁4,压电作动器5,底座6,四个底座通孔7,压电传感器8,横梁9以及数据处理和控制系统10;压电作动器5和压电传感器8均为d31型压电陶瓷元件,负载盘3为圆形,如附图2所示,其上有八个沉头孔用以连接压电折叠梁4,四个压电折叠梁4位于底座6上表面和负载盘3下表面之间,沿负载盘3的下表面圆周均布,底座6为正方形框架,见附图3所示,其内侧边缘上有四个弧形缺口,框架上有八个沉通孔用来连接压电折叠梁4,四个底座通孔7用来连接固定端;八个压电传感器8的输出和八个压电作动器5的输入通过信号传输线与数据处理和控制系统10相连。As shown in Figures 1, 2, and 3, a small-scale micro-vibration measurement and control system of the present invention includes: four load plate through holes 1, fastening bolts 2, load plate 3, four folding beams 4, piezoelectric actuation Device 5, base 6, four base through holes 7, piezoelectric sensor 8, beam 9 and data processing and control system 10; piezoelectric actuator 5 and piezoelectric sensor 8 are d 31 type piezoelectric ceramic components, load The disk 3 is circular, as shown in Figure 2, there are eight countersunk holes on it for connecting the piezoelectric folding beams 4, and the four piezoelectric folding beams 4 are located between the upper surface of the base 6 and the lower surface of the loading disk 3 , evenly distributed along the circumference of the lower surface of the load plate 3, the base 6 is a square frame, as shown in Figure 3, there are four arc-shaped gaps on its inner edge, and eight sink holes on the frame are used to connect the piezoelectric folding Beam 4 and four base through holes 7 are used to connect fixed ends; outputs of eight piezoelectric sensors 8 and inputs of eight piezoelectric actuators 5 are connected to data processing and control system 10 through signal transmission lines.

在实施中底座6为铝框底座,负载盘3也是铝质材料,底座6和负载盘3与折叠梁4安装处需铣出定位槽以便于安装;负载通过四个负载盘通孔1利用螺栓固定在负载盘3上表面的中心处。四个装有压电传感器8和压电作动器5的折叠梁4均匀分布在负载盘3下表面,且折叠梁4边缘与底座6的边缘对齐;八个压电传感器8用来测量负载的振动信号,八个压电作动器5产生控制力矩抑制负载振动的传递。In the implementation, the base 6 is an aluminum frame base, and the load plate 3 is also made of aluminum material. The base 6, the load plate 3 and the folding beam 4 need to be milled with positioning grooves for easy installation; the load passes through the four load plate through holes 1 using bolts It is fixed at the center of the upper surface of the load plate 3 . Four folded beams 4 equipped with piezoelectric sensors 8 and piezoelectric actuators 5 are evenly distributed on the lower surface of the load plate 3, and the edges of the folded beams 4 are aligned with the edges of the base 6; eight piezoelectric sensors 8 are used to measure the load vibration signal, eight piezoelectric actuators 5 generate control torque to suppress the transmission of load vibration.

底座6上表面与折叠梁4连接,下面通过四个底座通孔7用螺栓与固定端(地基)相连。整个结构要保证其刚度满足动态测试要求。The upper surface of the base 6 is connected with the folded beam 4, and the bottom is connected with the fixed end (foundation) with bolts through four base through holes 7 . The entire structure must ensure that its stiffness meets the requirements of dynamic testing.

将该微振动控制系统安装在地基上,将负载微振动源安装在负载盘3的中心上,检查四个折叠梁4上的压电传感器8的信号是否正常,并检查压电作动器5响应,之后运行负载,使其产生振动,从而使八个压电传感器8产生电压信号,电压信号通过数据处理和控制系统10根据压电材料的力-电转换关系处理后可以转化为三个微小扰动力信号和三个微小扰动力矩信号,压电材料力-电转换关系如下:Install the micro-vibration control system on the foundation, install the load micro-vibration source on the center of the load plate 3, check whether the signals of the piezoelectric sensors 8 on the four folded beams 4 are normal, and check the piezoelectric actuator 5 Response, and then run the load to make it vibrate, so that the eight piezoelectric sensors 8 generate voltage signals, and the voltage signals can be converted into three tiny The disturbance force signal and three small disturbance torque signals, the piezoelectric material force-electric conversion relationship is as follows:

DD. ii == dd ipip σσ pp ++ ee ijij σσ EE. jj ,,

ϵϵ pp == sthe s pqpq EE. σσ qq ++ dd pip EE. ii

其中Di为电位移,σ为应力,ε为应变,Ef是电场,

Figure BDA00003239397700033
是常应力下介电常数,
Figure BDA00003239397700034
为零电场下材料柔度,d是压电常数,i,j=1,2,3和p,q=1,2,...,6表示材料坐标系下不同的方向,本发明实施中取i=3,p=1。用于负载的振动控制时,数据处理和控制系统10根据采集到的扰动力信息通过线性二次最优(LQR)(或其他控制方法)控制率输出控制电压信号给压电作动器5,作动器5会产生相应的作动力作用于负载从而实现了对负载振动的控制。本系统中每一个压电折叠梁4中的两对压电传感器与压电作动器分别位于横梁9的上下表面,在由于负载扰动导致基梁变形时,用作传感器与作动器的压电陶瓷片上产生的电压信号的相位差保持不变,可直接使用反馈控制率实现振动控制,因此缩短了系统反应时间,提高了控制性能。此外,本发明中控制装置和被控试件分离,不需要在被控试件上安装附加设备和传感器,不影响被测试件的动态特性,不会损伤被测试件结构,可以方便的应用于多种场合,具有很强的适用性。where D i is the electric displacement, σ is the stress, ε is the strain, E f is the electric field,
Figure BDA00003239397700033
is the dielectric constant under constant stress,
Figure BDA00003239397700034
is the material compliance under zero electric field, d is the piezoelectric constant, i, j=1, 2, 3 and p, q=1, 2,..., 6 represent different directions under the material coordinate system, in the implementation of the present invention Take i=3, p=1. When used for load vibration control, the data processing and control system 10 outputs a control voltage signal to the piezoelectric actuator 5 through a linear quadratic optimal (LQR) (or other control method) control rate according to the collected disturbance force information, The actuator 5 will generate a corresponding dynamic force to act on the load so as to realize the control of the vibration of the load. The two pairs of piezoelectric sensors and piezoelectric actuators in each piezoelectric folding beam 4 in this system are respectively located on the upper and lower surfaces of the beam 9. When the base beam is deformed due to load disturbance, they are used as pressure sensors and actuators. The phase difference of the voltage signal generated on the electric ceramic chip remains unchanged, and the feedback control rate can be directly used to realize vibration control, thus shortening the system response time and improving the control performance. In addition, in the present invention, the control device and the controlled test piece are separated, no additional equipment and sensors need to be installed on the controlled test piece, the dynamic characteristics of the tested piece are not affected, the structure of the tested piece is not damaged, and it can be conveniently applied to It has strong applicability in many occasions.

如果该系统只用作压电传感器,由于通过数据采集处理系统得到的是压电传感器8的电压信号,要将电压信号转换为力信号,还需要对压电传感器8进行标定,得到相应的灵敏度系数,将其与电压信号相乘后可以得到有效载荷的力信号。If the system is only used as a piezoelectric sensor, since the voltage signal of the piezoelectric sensor 8 is obtained through the data acquisition and processing system, to convert the voltage signal into a force signal, the piezoelectric sensor 8 needs to be calibrated to obtain the corresponding sensitivity coefficient, which can be multiplied by the voltage signal to obtain the force signal of the payload.

数据处理与控制系统10由数据采集箱、计算机和功率放大器组成,数据采集箱将压电传感器8得到的电压信号转化为数字信号,并通过数据线输入到计算机中,计算机将数字信号进行分析和运算,可以得到微小振动力的信号,功率放大器将计算机输出信号放大并输出到压电作动器5。The data processing and control system 10 is composed of a data acquisition box, a computer and a power amplifier. The data acquisition box converts the voltage signal obtained by the piezoelectric sensor 8 into a digital signal, and inputs it into the computer through a data line, and the computer analyzes the digital signal and The signal of the tiny vibration force can be obtained through operation, and the power amplifier amplifies the output signal of the computer and outputs it to the piezoelectric actuator 5 .

图4给出系统控制的仿真图,在负载盘上安装10kg的负载并在竖直方向施加一个简谐扰动力,该扰动力的频率与系统一阶频率相同,由图4所示的系统一阶模态位移在控制前后的响应看出,施加控制后系统能够明显抑制系统共振,控制效果明显。Figure 4 shows the simulation diagram of the system control. A 10kg load is installed on the load plate and a simple harmonic disturbance force is applied in the vertical direction. The frequency of the disturbance force is the same as the first-order frequency of the system. It can be seen from the response of the first-order modal displacement before and after control that the system can obviously suppress the system resonance after the control is applied, and the control effect is obvious.

尽管上面对本发明说明性的具体实施方式进行了描述,以便于本技术领的技术人员理解本发明,但应该清楚,本发明不限于具体实施方式的范围,对本技术领域的普通技术人员来讲,只要各种变化在所附的权利要求限定和确定的本发明的精神和范围内,这些变化是显而易见的,一切利用本发明构思的发明创造均在保护之列。Although the illustrative specific embodiments of the present invention have been described above, so that those skilled in the art can understand the present invention, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, As long as various changes are within the spirit and scope of the present invention defined and determined by the appended claims, these changes are obvious, and all inventions and creations using the concept of the present invention are included in the protection list.

Claims (7)

1. a small-sized microvibration measuring and control system is characterized in that comprising: base (6), loading disk (3), four folded beams (4), data PIAPACS (10); Described folded beam (4) includes two crossbeams (9), and the upper and lower surface of each crossbeam (9) is pasted one deck piezoelectric patches, and outer piezoelectric patches is as piezoelectric actuator (5), and the internal layer piezoelectric patches is as piezoelectric sensor (8); Described folded beam (4) is positioned between loading disk (3) and the base (6), compresses by bolt (2) to connect; Four folded beams (4) are uniformly distributed along the circumference at loading disk (3) lower surface, and load connects firmly by the through hole (1) on the loading disk (3) and loading disk (3), and base (6) connects with stiff end by through hole (7); When the sensor, eight piezoelectric sensors (8) are measured the voltage signal of three dynamic force of load and three dynamic bending moment directions and it are transferred to data and process and control system (10) the treated information that obtains six disturbing forces; During as controller, the signal that each piezoelectric sensor records is after data PIAPACS (10) is processed, based on the disturbing force information that records, data PIAPACS (10) will send voltage signal is used as power its generation to corresponding piezoelectric actuator (5), thereby realizes the inhibition to the load vibration.
2. small-sized microvibration measuring according to claim 1 and control system, it is characterized in that: described eight piezoelectric sensors (8), eight piezoelectric actuators (5) are d 31The type piezo ceramic element.
3. small-sized microvibration measuring according to claim 1 and control system is characterized in that: described loading disk (3) be shaped as circle, eight counter sinks are arranged in order to connect piezoelectricity folded beam (4) on it, four bolt holes (1) are in order to connect load.
4. small-sized microvibration measuring according to claim 1 and control system, it is characterized in that: described eight piezoelectric sensors (8) are symmetrically distributed on piezoelectricity folded beam (4) inside surface.
5. small-sized microvibration measuring according to claim 1 and control system, it is characterized in that: described eight piezoelectric actuators (5) are symmetrically distributed on piezoelectricity folded beam (4) outside surface.
6. small-sized microvibration measuring according to claim 1 and control system, it is characterized in that: described base (6) is square frame, four arc notch are arranged on the inside edge, have eight countersunk head through holes to be used for connecting piezoelectricity folded beam (4) on the framework, four bolt holes (7) are used for being connected and fixed end.
7. small-sized microvibration measuring according to claim 1 and control system, it is characterized in that: the two pairs of piezoelectric sensors (8) in described each piezoelectricity folded beam (4) and piezoelectric actuator (5) contraposition juxtaposition, can shorten system response time, improve control performance.
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CN103499387A (en) * 2013-09-26 2014-01-08 北京空间飞行器总体设计部 Micro-vibration signal processing method
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CN105717931A (en) * 2016-01-28 2016-06-29 中国人民解放军国防科学技术大学 Active and passive integrated micro-vibration isolation device for reaction flywheel
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