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CN103418847B - a cutting device - Google Patents

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CN103418847B
CN103418847B CN201310328450.9A CN201310328450A CN103418847B CN 103418847 B CN103418847 B CN 103418847B CN 201310328450 A CN201310328450 A CN 201310328450A CN 103418847 B CN103418847 B CN 103418847B
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knife
shower nozzle
microjet
jet
micro
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CN103418847A (en
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程晓民
俞友宾
周林
伍鹏
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Ningbo University of Technology
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Priority to JP2015528836A priority patent/JP6078155B2/en
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Abstract

一种切削装置,其特征在于:包括有微粒刀、切削工作台、微射流喷头和液压装置;切削工作台与微射流喷头之间做相对直线移动;微粒刀包括有刀本体和刀头,刀头外凸地设置于刀本体的外表面上,刀头的几何尺寸为10nm~1mm,刀本体内设置有配重块;微射流喷头开设有喷射腔,喷射腔的底部设置有喷射口,该喷射口形成环形流,微粒刀被所述环形流所捕获,微粒刀的外径与环形流的内径相适配。本发明的优点在于:通过水致(微射流)旋转驱动微粒刀或者固定“钳制”微粒刀进行微切削,微流束及时地带走了切削过程中产生的热量,大大减小了热-力耦合作用产生的不均匀变形场,保证了微切削的质量和工作效率,是一种新型的微切削方式。

A cutting device is characterized in that: it includes a particle knife, a cutting table, a micro-jet nozzle and a hydraulic device; the cutting table and the micro-jet nozzle move in a relatively straight line; the particle knife includes a knife body and a knife head, and the knife The head is convexly arranged on the outer surface of the knife body, the geometric size of the knife head is 10nm ~ 1mm, and a counterweight is arranged in the knife body; the micro-jet nozzle is provided with an injection chamber, and the bottom of the injection chamber is provided with an injection port. The injection opening forms an annular flow, the particle knife is captured by the annular flow, and the outer diameter of the particle knife is adapted to the inner diameter of the annular flow. The advantage of the present invention is that micro-cutting is carried out through water-induced (micro-jet) rotary driving particle knife or fixed "clamping" particle knife. The uneven deformation field generated by the action ensures the quality and work efficiency of micro-cutting, and is a new type of micro-cutting method.

Description

一种切削装置a cutting device

技术领域technical field

本发明涉及一种切削装置,特别是一种使用微粒刀进行加工的切削装置。The invention relates to a cutting device, in particular to a cutting device using a particle knife for processing.

背景技术Background technique

随着社会的发展,工业产品的微型化成为高品质的重要特征,而实现产品微型化转变的关键在于微型零件加工技术水平的提高。With the development of society, the miniaturization of industrial products has become an important feature of high quality, and the key to realize the transformation of product miniaturization lies in the improvement of the processing technology level of micro parts.

微切削是一种快速且低成本的微小零件机械加工方式,而且不受加工材料的限制,零件的加工质量(如精度、表面粗糙度等)与其加工机床的性能(如加工精度、动态特性等)密切相关。机床的性能主要与主轴、工作台和控制系统有关,微切削所用刀具的直径非常小,为了提高加工效率,微切削机床主轴的转速非常快。Micro-cutting is a fast and low-cost machining method for tiny parts, and it is not limited by the processing materials. The processing quality of parts (such as precision, surface roughness, etc.) )closely related. The performance of the machine tool is mainly related to the spindle, worktable and control system. The diameter of the tool used in micro-cutting is very small. In order to improve the processing efficiency, the spindle speed of the micro-cutting machine tool is very fast.

为满足扭矩要求,传统的微切削装置通常采用电主轴和混合角接触轴承,这种轴承由于摩擦生热造成热膨胀,最高转速一般不超过6万rPmin。当转速更高时,应采用空气轴承,但空气轴承提供的扭矩较小,目前,空气轴承主轴的最高转速可达20万rPmin。为了获得较高的切削速度,主轴的锥度与高速切削刀柄的锥度一致。微切削精密机床的工作台一般是由直线电机驱动的,与普通驱动如滚珠丝杠相比,直线电机驱动系统没有摩擦和电磁耦合产生的累积误差,也没有由于磨损造成的精度损失,不存在间隙,而且能提供较大的加速度,直线电机驱动系统的精度可达±1μm。微切削精密机床的刚度好、振动小,而且大都带有各种传感器和执行器,对周围环境的控制要求较严格,使得加工微小零件的成本较高。In order to meet the torque requirements, traditional micro-cutting devices usually use electric spindles and hybrid angular contact bearings. This kind of bearings expands due to frictional heat generation, and the maximum speed generally does not exceed 60,000 rPmin. When the speed is higher, air bearings should be used, but the torque provided by air bearings is small. At present, the maximum speed of air bearing spindles can reach 200,000 rPmin. In order to obtain high cutting speed, the taper of the spindle is consistent with the taper of the high-speed cutting tool holder. The worktable of micro-cutting precision machine tools is generally driven by linear motors. Compared with ordinary drives such as ball screws, linear motor drive systems have no cumulative errors caused by friction and electromagnetic coupling, and no loss of accuracy due to wear. Clearance, and can provide greater acceleration, the accuracy of the linear motor drive system can reach ± 1μm. Micro-cutting precision machine tools have good rigidity and low vibration, and most of them are equipped with various sensors and actuators. They have strict requirements on the control of the surrounding environment, which makes the cost of processing tiny parts higher.

综上所述,目前用于微加工的切削装置不是结构过于复杂,就是生产制造成本过高,而且操作时对环境要求较高,使得装配和调节都不太方便,无法满足大规模生产的要求。To sum up, the current cutting devices used for micromachining are either too complex in structure, or the manufacturing cost is too high, and the operation has high environmental requirements, which makes assembly and adjustment inconvenient, and cannot meet the requirements of mass production .

发明内容Contents of the invention

本发明所要解决的技术问题是针对上述现有技术现状而提供一种整体结构简单、制造成本低且容易实现操作的切削装置。The technical problem to be solved by the present invention is to provide a cutting device with simple overall structure, low manufacturing cost and easy operation in view of the above-mentioned prior art.

本发明解决上述技术问题所采用的技术方案为:一种切削装置,其特征在于:该切削装置包括有微粒刀、切削工作台、位于该工作台上方的微射流喷头和为所述微射流喷头提供喷射液体的液压装置;其中,所述切削工作台与所述微射流喷头之间做相对直线移动;所述微粒刀包括有刀本体和刀头,所述刀头外凸地设置于所述刀本体的外表面上,所述刀头的几何尺寸为10nm~1mm,所述刀本体内设置有能使该刀本体上的刀头始终朝下偏转的配重块;所述微射流喷头开设有可与所述液压装置的出液管路相连通的喷射腔,所述喷射腔的底部设置有喷射口,该喷射口形成环形流,所述微粒刀被所述环形流所捕获,并且,所述微粒刀的外径与所述环形流的内径相适配。The technical solution adopted by the present invention to solve the above technical problems is: a cutting device, characterized in that: the cutting device includes a particle knife, a cutting workbench, a micro-jet nozzle located above the workbench, and a micro-jet nozzle for the micro-jet nozzle. A hydraulic device for spraying liquid is provided; wherein, the cutting table and the micro-jet nozzle move relatively linearly; the particle knife includes a knife body and a knife head, and the knife head is convexly arranged on the On the outer surface of the knife body, the geometric dimension of the knife head is 10nm~1mm, and a counterweight that can make the knife head on the knife body deflect downward all the time is arranged in the knife body; There is an injection chamber that can be communicated with the liquid outlet pipeline of the hydraulic device, the bottom of the injection chamber is provided with an injection port, and the injection port forms an annular flow, and the particle knife is captured by the annular flow, and, The outer diameter of the particle knife is adapted to the inner diameter of the annular flow.

作为优选,所述切削工作台可以设置为做直线移动,所述微射流喷头设置为固定不动。Preferably, the cutting table can be set to move linearly, and the micro-jet spray head can be set to be fixed.

作为另一优选,所述切削工作台可以设置为固定不动,所述微射流喷头则设置为做直线移动。As another preference, the cutting table can be set to be fixed, and the micro-jet spray head can be set to move linearly.

作为再一优选,所述切削工作台和微射流喷头还可以设置为同时沿相反的方向做直线移动。As yet another preference, the cutting table and the micro-jet nozzle can also be set to move linearly in opposite directions at the same time.

为了能够形成稳定的环形流,并同时方便加工和安装,作为优选,所述的微射流喷头包括有喷座和喷嘴,所述喷座开设有沿轴向贯穿的通孔,所述喷嘴连接于所述喷座的底部,所述喷嘴在对应所述通孔的位置开设有多个沿周向呈环形分布的喷射小孔,该多个喷射小孔形成了所述的喷射口。In order to be able to form a stable annular flow, and at the same time facilitate processing and installation, preferably, the micro-jet spray head includes a spray seat and a nozzle, and the spray seat is provided with a through hole penetrating in the axial direction, and the nozzle is connected to the On the bottom of the spray seat, the nozzle is provided with a plurality of small injection holes distributed in a ring in the circumferential direction at a position corresponding to the through hole, and the plurality of small injection holes form the injection port.

作为另一种优选方案,本申请的切削装置还可以采用如下结构实现,其特征在于:该切削装置包括有微粒刀、切削工作台、位于该工作台上方的微射流喷头和为所述微射流喷头提供喷射液体的液压装置,其中,所述切削工作台与所述微射流喷头之间做相对直线移动;所述微粒刀包括有刀本体和刀头,所述刀头外凸地设置于所述刀本体的外表面上,所述刀头的几何尺寸为10nm~1mm;所述微射流喷头开设有可与所述液压装置的出液管路相连通的喷射腔,所述喷射腔的底部设置有喷射口,该喷射口形成环形流,所述环形流的内径与所述微粒刀的外径相适配;并且,所述微粒刀的重心线偏离于所述环形流的中心线设置,所述微粒刀和微射流喷头之间满足如下初始条件:As another preferred solution, the cutting device of the present application can also be realized with the following structure, characterized in that: the cutting device includes a particle knife, a cutting workbench, a micro-jet nozzle located above the workbench, and a micro-jet nozzle for the micro-jet The spray head provides a hydraulic device for spraying liquid, wherein the cutting table and the micro-jet spray head move relatively linearly; the particle knife includes a knife body and a knife head, and the knife head is convexly arranged on the On the outer surface of the knife body, the geometric size of the knife head is 10nm to 1mm; the micro-jet spray head is provided with a spray chamber that can communicate with the liquid outlet pipeline of the hydraulic device, and the bottom of the spray chamber An injection port is provided, and the injection port forms an annular flow, and the inner diameter of the annular flow is adapted to the outer diameter of the particle knife; and, the center line of the particle knife is deviated from the center line of the annular flow, The following initial conditions are satisfied between the particle knife and the micro-jet nozzle:

其中,上式中k为作用系数;r为所述微粒刀的重心到微射流在该微粒刀作用点之间的距离;ρ为微射流液体的密度;v0为微射流在所述微射流喷头的喷射口处的速度;g为重力加速度;h为所述微射流喷头的底部到微射流与所述微粒刀接触点的高度;f为静摩擦系数;m为所述微粒刀的质量;θ为微射流对微粒刀垂直分力的作用点到圆心的连线与微粒刀的垂直方向外径之间的夹角。于是,在微粒刀做旋转运动的情况下,可以同时让工作台相对于微射流喷头做直线运动,从而通过微粒刀旋转实现切削加工。Wherein, in the above formula, k is an action coefficient; r is the distance from the center of gravity of the particle knife to the point of action of the microjet; ρ is the density of the microjet liquid; v 0 is the microjet in the microjet The velocity at the injection port place of nozzle; g is the acceleration of gravity; h is the height from the bottom of described microjet nozzle to microjet and described particle knife contact point; f is coefficient of static friction; m is the quality of described particle knife; θ is the angle between the point of action of the microjet on the vertical force component of the particle knife to the center of the circle and the vertical outer diameter of the particle knife. Therefore, when the particle knife rotates, the workbench can move linearly relative to the micro-jet nozzle at the same time, so that the cutting process can be realized through the rotation of the particle knife.

作为优选,所述切削工作台可以做直线移动,所述微射流喷头固定不动。Preferably, the cutting table can move linearly, and the micro-jet nozzle is fixed.

作为另一优选,所述切削工作台可以固定不动,所述微射流喷头做直线移动。As another preference, the cutting table can be fixed, and the micro-jet nozzle can move linearly.

作为再一优选,所述切削工作台和微射流喷头还可以设置为同时沿相反的方向做直线移动。As yet another preference, the cutting table and the micro-jet nozzle can also be set to move linearly in opposite directions at the same time.

作为优选,所述的微射流喷头包括有喷座和喷嘴,所述喷座开设有沿轴向贯穿的通孔,所述喷嘴连接于所述喷座的底部,所述喷嘴在对应所述通孔的位置开设有多个沿周向呈环形分布的喷射小孔,该多个喷射小孔形成了所述的喷射口。微射流喷头的上述结构一方面方便了加工和安装,另一方面能够使得从喷射口出来的喷射液形成稳定的环形流,保证微粒刀的工作稳定性和加工精度。As a preference, the micro-jet spray head includes a spray seat and a nozzle, the spray seat is provided with a through hole penetrating in the axial direction, the nozzle is connected to the bottom of the spray seat, and the nozzle corresponds to the through hole in the through hole. The positions of the holes are provided with a plurality of injection holes distributed in a circular shape along the circumferential direction, and the plurality of injection holes form the injection port. The above-mentioned structure of the micro-jet spray head facilitates processing and installation on the one hand, and on the other hand enables the spray liquid coming out of the spray port to form a stable annular flow, ensuring the working stability and processing accuracy of the particle knife.

与现有技术相比,本发明的优点在于:首先,微粒刀刀头上的切削刃极细,达到微米级或纳米级,可以实现纳米级的切削加工;其次,通过水致(微射流)旋转驱动微粒刀或者固定“钳制”微粒刀进行微切削,微粒刀不需要像传统刀具一样安装在机床上靠主轴的旋转驱动,使得切削装置不需要主轴,整体结构更加简单;另外,微流束及时地带走了切削过程中产生的热量,大大减小了热-力耦合作用产生的不均匀变形场,降低了微切削变形区的尺寸效应、不均匀应变、位错等对剪切变形应力和剪切变形等影响,保证了微切削的质量和工作效率,是一种新型的微切削加工方式。Compared with the prior art, the advantages of the present invention are: firstly, the cutting edge on the particle cutter head is extremely thin, reaching micron or nanoscale, and can realize nanoscale cutting; secondly, through water-induced (micro-jet) The particle knife is driven by rotation or fixed "clamping" particle knife for micro-cutting. The particle knife does not need to be installed on the machine tool like a traditional tool and is driven by the rotation of the spindle, so that the cutting device does not need a spindle and the overall structure is simpler; in addition, the microfluidic beam Timely take away the heat generated in the cutting process, greatly reducing the uneven deformation field caused by thermal-mechanical coupling, and reducing the size effect, uneven strain, dislocation, etc. of the micro-cutting deformation zone on the shear deformation stress and It is a new type of micro-cutting processing method, which ensures the quality and work efficiency of micro-cutting due to the influence of shear deformation.

附图说明Description of drawings

图1为本发明实施例的微粒刀结构示意图。Fig. 1 is a schematic diagram of the structure of a particle knife according to an embodiment of the present invention.

图2为图1所示微粒刀的立体剖视图。FIG. 2 is a perspective cross-sectional view of the particle knife shown in FIG. 1 .

图3为采用如图1所示微粒刀的切削装置。Fig. 3 is a cutting device using the particle knife shown in Fig. 1 .

图4为本发明实施例的微粒刀受力分析图。Fig. 4 is a force analysis diagram of the particle knife according to the embodiment of the present invention.

图5为本发明实施例的微粒刀在射流作用下的有效作用面积计算图。Fig. 5 is a calculation diagram of the effective area of the particle knife under the action of the jet according to the embodiment of the present invention.

图6为本发明实施例的切削装置的喷头剖视图。Fig. 6 is a cross-sectional view of the spray head of the cutting device according to the embodiment of the present invention.

图7为图6所示喷头的仰视图。Fig. 7 is a bottom view of the spray head shown in Fig. 6 .

图8为本发明实施例采用另一种微粒刀结构的切削装置。Fig. 8 is a cutting device using another particle knife structure according to the embodiment of the present invention.

具体实施方式Detailed ways

以下结合附图实施例对本发明作进一步详细描述。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

本实施例涉及一种微切削技术,与普通切削不同,在微切削时,吃刀深度通常为微米级到纳米级,而一般材料的晶粒大小为数微米,这就意味着微切削是在晶粒内部进行的,切削过程是在切削一个一个的晶粒,这势必导致单位面积上的切削应力急剧增大,从而在切削刃的单位面积上产生极大的热量,使刀尖处的温度升高,处于高温、高应力的工作状态。This embodiment relates to a kind of micro-cutting technology, which is different from ordinary cutting. During micro-cutting, the cutting depth is usually from micron to nano-level, while the grain size of general materials is several microns. The cutting process is to cut the grains one by one, which will inevitably lead to a sharp increase in the cutting stress per unit area, thereby generating a great deal of heat on the unit area of the cutting edge, causing the temperature at the tip to rise. High, in high temperature, high stress working condition.

为了解决上述微切削过程中的问题,如图1~图8所示,本实施例提出了一种新型的切削装置,该切削装置包括有微粒刀、切削工作台3、位于该工作台3上方的微射流喷头4和为微射流喷头4提供喷射液体的液压装置,微射流喷头4开设有喷射腔,喷射腔的顶部设置有入液口,入液口连接液压装置的出液管路,喷射腔的底部设置有喷射口,该喷射口形成环形流,微粒刀1的外径与该环形流的内径相适配;微射流喷头4包括有喷座41和喷嘴42,喷座41开设有沿轴向贯穿的通孔411,喷嘴42连接于喷座41的底部,喷嘴42在对应通孔的位置开设有多个沿周向呈环形分布的喷射小孔421。In order to solve the problems in the above-mentioned micro-cutting process, as shown in Figures 1 to 8, this embodiment proposes a new type of cutting device, which includes a particle knife, a cutting workbench 3, and is located above the workbench 3. The micro-jet nozzle 4 and the hydraulic device that provides the injection liquid for the micro-jet nozzle 4, the micro-jet nozzle 4 is provided with an injection chamber, the top of the injection chamber is provided with a liquid inlet, the liquid inlet is connected to the liquid outlet pipeline of the hydraulic device, and the injection The bottom of the cavity is provided with an injection port, which forms an annular flow, and the outer diameter of the particle knife 1 is adapted to the inner diameter of the annular flow; the micro-jet nozzle 4 includes a spray seat 41 and a nozzle 42, and the spray seat 41 is provided with a Axially through the through hole 411 , the nozzle 42 is connected to the bottom of the spray seat 41 , and the nozzle 42 is provided with a plurality of small injection holes 421 distributed in a circular shape along the circumferential direction at positions corresponding to the through hole.

本实施例的切削装置是采用微粒刀为刀具进行切削加工,如图1、图2所示,该微粒刀1包括有刀本体11和刀头12,刀头12呈凸尖形状,刀本体11的外表面上可以设置有一个或多个间隔分布的刀头12;刀本体11的几何尺寸一般设置为毫米级或微米级,作为优选,可以选择尺寸范围在20μm~10mm之间,刀头12外凸地设置于刀本体11的外表面上,刀头12的几何尺寸要小于刀本体11的几何尺寸,刀头12的几何尺寸范围在10nm~1mm的微米级或纳米级。本实施例微粒刀的刀本体可以为规则立体几何形状结构,如球形或椭圆形等;本实施例微粒刀的刀本体也可以为不规则的其他立体几何形状,如图8所示刀本体1’即呈非规则的晶体结构。The cutting device of the present embodiment adopts a particle knife as a tool for cutting, as shown in Figure 1 and Figure 2, the particle knife 1 includes a cutter body 11 and a cutter head 12, the cutter head 12 is in the shape of a convex point, and the cutter body 11 The outer surface of the blade can be provided with one or more cutter heads 12 distributed at intervals; the geometric size of the cutter body 11 is generally set to the millimeter or micron level, as preferably, the size range can be selected between 20 μm and 10 mm, and the cutter head 12 The cutter head 12 is convexly arranged on the outer surface of the cutter body 11 . The geometric size of the cutter head 12 is smaller than that of the cutter body 11 . The knife body of the particle knife in this embodiment can be a regular three-dimensional geometric shape structure, such as spherical or elliptical; the knife body of the particle knife in this embodiment can also be other irregular three-dimensional geometric shapes, as shown in Figure 8. 'That is, an irregular crystal structure.

其中,微粒刀1、微射流喷头4和切削工作台3之间可以有以下几种运动方式:第一种,微射流喷头4为固定设置,微粒刀1固定容置于微射流喷头4内,切削工作台3可相对于微射流喷头4做直线移动;第二种,切削工作台3为固定设置,微粒刀1固定容置于微射流喷头4内,微射流碰头4可相对于切削工作台3做直线移动;第三种,微粒刀1固定容置于微射流喷头4内,微射流喷头4和切削工作台3同时沿相反方向做直线移动;第四种,切削工作台3为固定设置,微粒刀1做旋转运动,微射流喷头4做直线移动;第五种,微粒刀1做旋转运动,微射流喷头4固定设置,切削工作台3可相对于微射流喷头4做直线移动;第六种,微粒刀1做旋转运动,微射流喷头4和切削工作台3同时沿相反方向做直线移动。Among them, the particle knife 1, the micro-jet nozzle 4 and the cutting workbench 3 can have the following movement modes: first, the micro-jet nozzle 4 is fixed, and the particle knife 1 is fixedly placed in the micro-jet nozzle 4, The cutting table 3 can move linearly relative to the micro-jet nozzle 4; in the second type, the cutting table 3 is fixed, the particle knife 1 is fixed and accommodated in the micro-jet nozzle 4, and the micro-jet head 4 can move relative to the cutting table. 3. Linear movement; the third type, the particle knife 1 is fixedly placed in the micro-jet nozzle 4, and the micro-jet nozzle 4 and the cutting table 3 move linearly in the opposite direction at the same time; the fourth type, the cutting table 3 is fixed , the particle knife 1 performs a rotary motion, and the micro-jet nozzle 4 moves linearly; the fifth type, the particle knife 1 performs a rotary motion, the micro-jet nozzle 4 is fixed, and the cutting table 3 can move linearly relative to the micro-jet nozzle 4; Six types, the particle knife 1 performs a rotary motion, and the micro-jet nozzle 4 and the cutting table 3 move linearly in opposite directions at the same time.

当采用上述第一种、第二种和第三种运动方式时,微粒刀的刀本体11内设置有配重块2,该配重块2能使刀本体11上的刀头12始终朝下偏转并与切削加工面相接触,工作时,以液体为介质,微射流喷头的喷嘴形成环形流,该环形流作用于微粒刀的表面,在微粒刀表面产生了向内的水平分力和向下的垂直分力,向内的水平分力对微粒刀具有“钳制”作用,会像镊子一样牢牢地“钳”住位于微射流喷头下方的微粒刀;向下的垂直分力和配重块共同作用于微粒刀,使刀头12始终朝下,当切削工作台与微射流喷头发生相对运动时,可以实现对工件的切削。When adopting the above-mentioned first, second and third movement modes, a counterweight 2 is arranged in the knife body 11 of the particle knife, and the counterweight 2 can make the knife head 12 on the knife body 11 always face down It is deflected and in contact with the cutting surface. When working, the nozzle of the micro-jet nozzle forms an annular flow with liquid as the medium. The annular flow acts on the surface of the particle knife, generating an inward horizontal component force and a downward force on the surface of the particle knife. The vertical component of the force, the inward horizontal component has a "clamp" effect on the particle knife, and will firmly "clamp" the particle knife located under the micro-jet nozzle like tweezers; the downward vertical component and the counterweight Working together on the particle knife, the knife head 12 is always facing down. When the cutting table and the micro-jet spray head move relative to each other, the cutting of the workpiece can be realized.

当采用上述第四种、第五种和第六种运动方式时,要实现微粒刀在水势阱中的旋转,微粒刀必须受到一个转矩的作用,为此,可以将微粒刀置于待加工材料表面,水射流的对称中心线偏离微粒刀的回转中心,始终保持微粒刀的一部分与射流水束接触、另一部分不接触,我们将接触部分称为作用区,作用区受到水束的压力作用,未接触的区域不受压力作用,压力为零,由于压差的存在,便产生了旋转力矩,使微粒刀具有了旋转的可能性;当微粒刀的重心线与射流中心线重叠,并且射流与微粒刀重心线两侧的接触面积相等时,由于压力对称分布,不会对微粒刀产生净力矩,微粒刀不会在水势阱中发生旋转;当微粒刀重心线与射流中心线不重叠时,即微粒刀的重心线偏离微射流喷头的中心线设置,水势阱中的微粒刀两侧存在压力差,压力差在微粒刀上产生旋转力矩,微粒刀便可以绕其轴线旋转。于是,微粒刀受转矩作用旋转,当微射流喷头同时做水平移动时,微粒刀微粒刀便可以一边移动一边旋转,通过工作台和微射流喷头二者之间的相对运动完成对工件的切削。When using the fourth, fifth and sixth motion modes above, to realize the rotation of the particle knife in the water potential well, the particle knife must be subjected to a torque. For this reason, the particle knife can be placed On the surface of the material, the symmetrical centerline of the water jet deviates from the center of rotation of the particle knife, and one part of the particle knife is always in contact with the jet water beam, and the other part is not in contact. We call the contact part the action area, and the action area is affected by the pressure of the water beam , the uncontacted area is not affected by the pressure, and the pressure is zero. Due to the existence of the pressure difference, a rotational moment is generated, which makes the particle cutter possible to rotate; When the contact area on both sides of the center of gravity of the particle knife is equal, due to the symmetrical distribution of pressure, no net torque will be generated on the particle knife, and the particle knife will not rotate in the water potential well; when the center of gravity of the particle knife does not overlap with the center line of the jet , that is, the center of gravity of the particle knife deviates from the center line of the micro-jet nozzle, and there is a pressure difference on both sides of the particle knife in the water potential well, and the pressure difference generates a rotational moment on the particle knife, and the particle knife can rotate around its axis. Therefore, the particle knife is rotated by the torque. When the micro-jet nozzle moves horizontally at the same time, the particle knife can rotate while moving, and the workpiece is cut through the relative movement between the worktable and the micro-jet nozzle. .

具体地,当微粒刀1和切削工作台3采用第四种、第五种和第六种工作方式时,要实现微粒刀的旋转,微粒刀和微射流喷头之间还需要满足如下初始条件:Specifically, when the particle knife 1 and the cutting table 3 adopt the fourth, fifth and sixth working modes, in order to realize the rotation of the particle knife, the following initial conditions need to be satisfied between the particle knife and the micro-jet nozzle:

其中,上式中k为作用系数;r为所述微粒刀的重心到微射流在该微粒刀作用点之间的距离;ρ为微射流液体的密度;v0为微射流在微射流喷头的喷射口处的速度;g为重力加速度;h为微射流喷头的底部到微射流与微粒刀接触点的高度;f为静摩擦系数;m为微粒刀的质量;θ为微射流对微粒刀垂直分力的作用点到圆心的连线与微粒刀的垂直方向外径之间的夹角。Wherein, in the above formula, k is an action coefficient; r is the distance from the center of gravity of the particle knife to the microjet between the point of action of the microjet; ρ is the density of the microjet liquid; v 0 is the microjet at the microjet nozzle The velocity at the injection port; g is the acceleration of gravity; h is the height from the bottom of the micro-jet nozzle to the contact point between the micro-jet and the particle knife; f is the coefficient of static friction; m is the mass of the particle knife; The angle between the line connecting the point of application of the force to the center of the circle and the outer diameter of the particle knife in the vertical direction.

上述初始条件通过以下力学分析推导获得:设定微粒刀形状为类球体,取微粒刀为研究对象,受力分析如图4所示;The above initial conditions are derived through the following mechanical analysis: set the shape of the particle knife as a sphere, and take the particle knife as the research object, and the force analysis is shown in Figure 4;

静止时,微粒刀处于平衡状态,由:At rest, the particle knife is in a state of equilibrium, determined by:

ΣΣ Ff xx == 00 ΣΣ Ff ythe y == 00 -- -- -- (( 11 ))

得:have to:

Ff xx -- Ff ff == 00 Ff ythe y ++ mgmg -- Ff NN == 00 -- -- -- (( 22 ))

e=rsinθ      (3)e=rsinθ (3)

Ff=fFN      (4)F f = fF N (4)

由动量矩定理:By the momentum moment theorem:

Jα=Fye-Ffr-Fxrcosθ      (5)若微粒刀旋转,则需要α>0,即:Jα=F y eF f rF x rcosθ (5) If the particle knife rotates, α>0 is required, namely:

Fye-Ffr-Fxrcosθ>0      (6)将式(2)、式(3)、式(4)代入式(6),解得:F y eF f rF x rcosθ>0 (6) Substituting formula (2), formula (3) and formula (4) into formula (6), the solution is:

Ff ythe y >> Ff xx coscos θθ ++ fmgfmg sinsin θθ -- ff -- -- -- (( 77 ))

若Fy存在,则需sinθ-f>0,即:If F y exists, sinθ-f>0 is required, namely:

f<sinθ         (8)微粒刀旋转初始状态时,Fx=0,式(7)化简为:f<sinθ (8) When the particle knife is in the initial state of rotation, F x =0, formula (7) can be simplified as:

Ff ythe y >> fmgfmg sinsin &theta;&theta; -- ff -- -- -- (( 99 ))

当射流冲击微粒刀时,如图3所示,在微粒刀表面形成的压强为:When the jet impacts the particle knife, as shown in Figure 3, the pressure formed on the surface of the particle knife is:

PP == &rho;g&rho;g (( vv 00 22 22 gg ++ hh )) -- -- -- (( 1010 ))

如图5所示,阴影部分为射流对微粒刀的最大作用面积,即1/4球面,图中体现为半圆,此时,作用效果最好。As shown in Figure 5, the shaded part is the maximum action area of the jet on the particle knife, that is, the 1/4 spherical surface, which is shown as a semicircle in the figure. At this time, the action effect is the best.

假设射流对微粒刀的作用面积为S,则:Assuming that the action area of the jet on the particle knife is S, then:

S=kπr2         (11)S=kπr 2 (11)

Ff ythe y == PSP.S. == k&pi;k&pi; rr 22 &rho;g&rho;g (( vv 00 22 22 gg ++ hh )) -- -- -- (( 1212 ))

将式(12)代入式(9):Substitute formula (12) into formula (9):

k&pi;k&pi; rr 22 &rho;&rho; (( vv 00 22 22 gg ++ hh )) >> fmfm sinsin &theta;&theta; -- ff -- -- -- (( 1313 ))

式(13)为微粒刀旋转并进行切削加工的初始条件。Equation (13) is the initial condition for the particle knife to rotate and perform cutting.

其中:π、r、ρ、g、f、m为已知,k、v0、h、θ为变化的参数。Among them: π, r, ρ, g, f, m are known, k, v 0 , h, θ are changing parameters.

以下确定k和θ的关系。The relationship between k and θ is determined as follows.

当射流冲击微粒刀时,其作用面积(即相互接触面积)的投影为弓形。根据理论力学教材查得其面积S为:When the jet impacts the particle knife, the projection of its action area (that is, the mutual contact area) is bow-shaped. According to the textbook of theoretical mechanics, its area S is found to be:

将式(11)和式(14)合并:Combine formula (11) and formula (14):

整理得:Organized:

k和θ是相互关联的变量,与射流、微粒的尺寸、二者之间的相对位置等有关。根据图4,θ的取值范围为:k and θ are interrelated variables, which are related to the jet flow, the size of the particles, the relative position between the two, and so on. According to Figure 4, the value range of θ is:

0≤θ<90°           (17)将式(17)代入式(16),得k的取值范围为:0≤θ<90° (17) Substituting formula (17) into formula (16), the value range of k is:

0<k≤0.5          (18)综上所述,微粒刀旋转并进行切削的初始条件为:0<k≤0.5 (18) To sum up, the initial conditions for the particle knife to rotate and cut are:

以上(1)~(19)式中的符号意义如下:The meanings of the symbols in the above formulas (1) to (19) are as follows:

Fx为液体对微粒刀的水平合力;F x is the horizontal resultant force of the liquid on the particle knife;

Fy为液体对微粒刀的垂直合力;F y is the vertical resultant force of the liquid on the particle knife;

Ff为微粒刀与待加工表面的摩擦力;F f is the friction force between the particle knife and the surface to be processed;

FN为待加工表面对微粒刀的支持力;F N is the support force of the particle knife on the surface to be processed;

f为静摩擦系数;f is the coefficient of static friction;

r为微粒刀半径;r is the particle knife radius;

m为微粒刀质量;m is the mass of the particle knife;

g为重力加速度;g is the acceleration due to gravity;

e为Fy作用点到微粒刀圆心的水平距离;e is the horizontal distance from the action point of F y to the center of the particle knife circle;

J为微粒刀相对质心的转动惯量;J is the moment of inertia of the particle knife relative to the center of mass;

P为射流对微粒刀表面的压强;P is the pressure of the jet on the surface of the particle knife;

h为喷头底部到射流与微粒刀接触点的高度;h is the height from the bottom of the nozzle to the point of contact between the jet and the particle knife;

k为作用系数;k is the action coefficient;

S为射流对微粒刀的作用面积;S is the action area of the jet on the particle knife;

ρ为射流液体的密度;ρ is the density of the jet liquid;

θ为Fy作用点与圆心连线与垂直方向的夹角;θ is the angle between the F y action point and the center of the circle and the vertical direction;

α为角加速度;α is angular acceleration;

v0为射流在喷头出口处的速度。v 0 is the velocity of the jet at the outlet of the nozzle.

因此,只要保持旋转力矩的存在,微粒刀便不停地旋转,这样就实现了微粒刀的水致旋转,换句话说,微粒刀的旋转就像风吹动风车转动一样,射流的压力作用在微粒刀上,会产生旋转力矩,从而使微粒刀旋转,类似于现实中风力对风车的作用,微粒刀这个“风车”就可以在水射流产生的“风”的作用下旋转起来了;另外,微粒刀的旋转方向取决于其在水势阱中的初始位置和微粒刀本身的形状(“初始位置”指水势阱成功捕获到微粒刀的瞬间,微粒刀在水势阱中的位置)。Therefore, as long as the existence of the rotational torque is maintained, the particle knife will continue to rotate, thus realizing the water-induced rotation of the particle knife. On the particle knife, there will be a rotational moment, so that the particle knife will rotate, similar to the effect of wind on the windmill in reality, the "windmill" of the particle knife can rotate under the action of the "wind" generated by the water jet; in addition, The rotation direction of the particle knife depends on its initial position in the water potential well and the shape of the particle knife itself ("initial position" refers to the moment when the water potential well successfully captures the particle knife, and the position of the particle knife in the water potential well).

采用水致旋转驱动微粒刀或者水致钳制住微粒刀进行微切削,微流束及时地带走了切削过程中产生的热量,大大减小了热-力耦合作用产生的不均匀变形场,降低了微切削变形区的尺寸效应、不均匀应变、位错等对剪切变形应力和剪切变形能的影响,提高了切削效率和质量。The water-induced rotation drives the particle knife or the water-induced clamping of the particle knife for micro-cutting. The micro-fluid jets take away the heat generated during the cutting process in a timely manner, greatly reducing the uneven deformation field caused by the thermal-mechanical coupling effect, and reducing the The effect of size effect, uneven strain, dislocation, etc. on the shear deformation stress and shear deformation energy of the micro-cutting deformation zone improves the cutting efficiency and quality.

在实际工作过程中(微粒刀为旋转方式),我们可以选用单晶硅为实验材料,采用如图1、图2所示的呈球形结构的微粒刀1分别进行微米切削和纳米切削实验。由于单晶硅属于脆性材料,根据断裂力学的原理,加工脆性材料时存在着脆塑转变。由于刀尖的切入,待加工表面刀尖处原子的势能被改变,并导致硅原子的动能突然增加,打破了原子的排列,引起局域晶格结构向无序状态的相变,这种无序状态位于刀尖前部的下面,随着切削方向发展,之后在前部形成气穴,这一过程是靠刀尖处高应变能提供的能量驱动的。当应变能转变为动能时,空穴扩展,最后发展成清晰的裂纹。空气与晶体的化学反应能又增加了原子的动能,原子运动加剧,拉长了原子间的距离,使裂纹扩展,材料发生剥离,形成切屑,完成切削加工。In the actual working process (the particle knife is rotating), we can choose single crystal silicon as the experimental material, and use the particle knife 1 with a spherical structure as shown in Figure 1 and Figure 2 to conduct micro-cutting and nano-cutting experiments respectively. Since single crystal silicon is a brittle material, according to the principle of fracture mechanics, there is a brittle-plastic transition when processing brittle materials. Due to the cutting of the tool tip, the potential energy of the atoms at the tool tip of the surface to be processed is changed, and the kinetic energy of the silicon atoms increases suddenly, which breaks the arrangement of the atoms and causes a phase transition from the local lattice structure to a disordered state. The sequence state is located under the front of the tool tip. As the cutting direction develops, air pockets are formed at the front. This process is driven by the energy provided by the high strain energy at the tool tip. When the strain energy is converted into kinetic energy, the voids expand and eventually develop into clear cracks. The chemical reaction energy between the air and the crystal increases the kinetic energy of the atoms, the atomic motion intensifies, the distance between the atoms is elongated, the crack expands, the material is peeled off, and chips are formed to complete the cutting process.

Claims (10)

1. a topping machanism, is characterized in that: this topping machanism includes particulate knife, skiver's station, be positioned at microjet shower nozzle above this workbench and provide the hydraulic means of atomizing of liquids for described microjet shower nozzle; Wherein, do relative rectilinear between described skiver's station and described microjet shower nozzle to move; Described particulate knife includes cutter body and cutter head, be arranged on the outer surface of described cutter body described cutter head evagination, the physical dimension of described cutter head is 10nm ~ 1mm, is provided with the balancing weight that the cutter head on this cutter body can be made to deflect all the time in described cutter body down; Described microjet shower nozzle offers the spray chamber that can be connected with the fluid pipeline of described hydraulic means, the bottom of described spray chamber is provided with jet, this jet forms annular stream, described particulate knife by described annular stream catch, further, the internal diameter that flows of the external diameter of described particulate knife and described annular is suitable.
2. topping machanism according to claim 1, is characterized in that: described skiver's station moves linearly, and described microjet shower nozzle maintains static.
3. topping machanism according to claim 1, is characterized in that: described skiver's station maintains static, and described microjet shower nozzle moves linearly.
4. topping machanism according to claim 1, is characterized in that: described skiver's station and microjet shower nozzle move linearly simultaneously in opposite direction.
5. the topping machanism according to claim 1 or 2 or 3 or 4, it is characterized in that: described microjet shower nozzle includes spray seat and nozzle, described spray seat offers the through hole run through vertically, described nozzle is connected to the bottom of described spray seat, described nozzle offers multiple jet apertures circumferentially distributed ringwise in the position of the described through hole of correspondence, and the plurality of jet apertures defines described jet.
6. a topping machanism, it is characterized in that: this topping machanism includes particulate knife, skiver's station, be positioned at microjet shower nozzle above this workbench and provide the hydraulic means of atomizing of liquids for described microjet shower nozzle, wherein, do relative rectilinear between described skiver's station and described microjet shower nozzle to move; Described particulate knife includes cutter body and cutter head, is arranged on the outer surface of described cutter body described cutter head evagination, and the physical dimension of described cutter head is 10nm ~ 1mm; Described microjet shower nozzle offers the spray chamber that can be connected with the fluid pipeline of described hydraulic means, and the bottom of described spray chamber is provided with jet, and this jet forms annular stream, and the external diameter of the internal diameter that described annular flows and described particulate knife is suitable; Further, the center of gravity line of described particulate knife deviates from the center line setting of described annular stream, meets following primary condition between described particulate knife and microjet shower nozzle:
wherein, in above formula, k is function coefficient; R is that the center of gravity of described particulate knife is to the distance of microjet between this particulate knife application point; ρ is the density of microjet liquid; v 0for microjet is in the speed at the jet place of described microjet shower nozzle; G is acceleration of gravity; H is the height of bottom to microjet and described particulate knife contact point of described microjet shower nozzle; F is confficient of static friction; M is the quality of described particulate knife; θ is that microjet is to the angle between the application point of particulate knife vertical stress component to the line and the vertical direction external diameter of particulate knife in the center of circle.
7. topping machanism according to claim 6, is characterized in that: described skiver's station moves linearly, and described microjet shower nozzle maintains static.
8. topping machanism according to claim 6, is characterized in that: described skiver's station maintains static, and described microjet shower nozzle moves linearly.
9. topping machanism according to claim 6, is characterized in that: described skiver's station and described microjet shower nozzle move linearly simultaneously in opposite direction.
10. the topping machanism according to claim 6 or 7 or 8 or 9, it is characterized in that: described microjet shower nozzle includes spray seat and nozzle, described spray seat offers the through hole run through vertically, described nozzle is connected to the bottom of described spray seat, described nozzle offers multiple jet apertures circumferentially distributed ringwise in the position of the described through hole of correspondence, and the plurality of jet apertures defines described jet.
CN201310328450.9A 2013-07-31 2013-07-31 a cutting device Active CN103418847B (en)

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CN201310328450.9A CN103418847B (en) 2013-07-31 2013-07-31 a cutting device
PCT/CN2013/001321 WO2015013842A1 (en) 2013-07-31 2013-11-01 Particulate knife and cutting device using the particulate knife
JP2015528836A JP6078155B2 (en) 2013-07-31 2013-11-01 Fine particle knife and cutting apparatus using the fine particle knife

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CN107009199B (en) * 2017-05-03 2019-09-06 宁波工程学院 A method for forming inner surface micro-weave
CN107127683B (en) * 2017-05-03 2019-03-22 宁波工程学院 A kind of micro- texture manufacturing process of inner surface self-centering based on jet stream
CN106985082B (en) * 2017-05-03 2019-04-30 宁波工程学院 A jet-based method for forming microtextures on inner surfaces

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