CN103528684B - Micro area variable angle spectrum test system - Google Patents

Abstract

The invention provides a micro-area spectrum testing system. The test system comprises an incident light path, a sample stage and a receiving light path, wherein the incident light path comprises an incident microobjective positioned in the incident light path, a first spectrum test unit and a first real-time observation system; the receiving optical path comprises a receiving micro objective lens positioned in the emergent optical path, a second spectrum testing unit and a second real-time observation system, and the testing system further comprises: the sample table rotating device is used for adjusting the sample table to rotate around a rotating shaft perpendicular to the sample table, and the first light path rotating device is used for adjusting the incident light path or the receiving light path to rotate around the rotating shaft. The micro-area spectrum test system can provide a plurality of spectrum test modes such as transmission, reflection or fluorescence and the like with changeable incident angles and receiving angles for micro-area samples.

Description

Micro area variable angle spectrum test system

technical field

The invention relates to the field of spectral characteristic testing of micro-nano photonic devices. More specifically, the present invention relates to a micro-zone variable-angle spectroscopic testing system.

Background technique

With the rapid development of nanotechnology, the research on various micro-nano materials and structures is becoming more and more diversified, especially the nano-photonic devices represented by photonic crystals, negative refraction materials, plasmonic photonic devices, etc. Functionality and miniaturization. With the reduction of the scale of materials and structures, the development of micro-nano photonics devices is facing testing problems, that is, how to accurately and comprehensively detect the optical properties of various photonic devices at the micro-nano scale, and explore the new phenomena and new phenomena contained in them. mechanism, which has become a bottleneck for the further development of micro-nano photonics devices. The rapid development and in-depth research of new micro-nano photonics devices requires comprehensive and accurate measurement and evaluation of their optical properties at the micro-nano scale.

The currently commercialized optical characteristic measurement instruments cannot meet the requirements of optical characteristic evaluation at the micro-nano scale. Most instruments are mainly aimed at the measurement of macroscopic samples, and only a few instruments can measure microscopic samples. However, in micro-area measurement, these instruments generally have the disadvantages of only measuring in one direction and having a small applicable wavelength range. With the in-depth study of micro-nanophotonic devices, the research on the spectral characteristics of micro-nanophotonic devices under the incident light conditions of different incident angles has become more and more important. At present, there are mainly the following schemes for evaluating the spectral properties of micro-nano-scale materials and structures such as transmission, reflection, and absorption:

(1) Infrared Fourier spectrometers used to measure the transmission, reflection, and absorption spectra of materials, such as Nicolet 6700 from Thermo Scientific in the United States and VERTEX 70 from Bruker in Germany. This instrument can measure near-infrared to mid-infrared spectra, but The measurable scale is generally above 10 μm.

(2) Commercialized microspectrophotometers, such as the MSP500 of J&M in Germany and the QDI2020 of CRAIC in the United States, can measure transmission, reflection, and absorption spectra from visible light to near-infrared bands, and the measurement scale can be as small as 1 μm. The measurement resolution is relatively low, for example, the visible light band is 1nm, and the near-infrared light band is 3.5nm, which is far from meeting the ever-growing testing requirements of micro-nano photonics devices.

(3) In order to obtain higher spectral resolution and micro-region spectral measurement functions, solve the required testing methods through combination, such as using high-end spectrometers from Princeton Instrument in the United States and Zeiss, Nikon, Leica, Olympus, etc. Combined with a microscope, a higher resolution micro-region spectrum test can be achieved.

Although the above instruments or systems can measure the spectral characteristics of micro-domain materials and structures with a size smaller than, for example, 100 μm, they generally have a common disadvantage, that is, they can only measure the spectrum of the sample in a certain direction, and the light source is relatively large. The angle of incidence to the sample cannot be adjusted, nor can the angle of acceptance of the detector relative to the sample. Any attempt to perform spectral testing by changing the incident angle and receiving angle is faced with the problem of how to precisely adjust the position of the micro-region in the test light path after changing the incident angle and receiving angle, and how to obtain effective test results.

Therefore, there is a need for a measurement system that can measure the transmission, reflection, absorption spectra and fluorescence spectra of micro-region samples at different incident angles and different receiving angles.

Contents of the invention

The object of the present invention is to provide a micro-area spectrum testing system with variable incident angle and variable receiving angle.

A micro-area spectrum testing system of the present invention includes an incident light path, a sample stage and a receiving light path, wherein,

The incident light path includes an optical element located in the incident light path, an incident microscope objective lens, a first spectral testing unit and a first real-time observation system;

The receiving light path includes an optical element located in the outgoing light path, a receiving microscope objective lens, a second spectral testing unit and a second real-time observation system,

The test system further includes:

a sample stage rotating device for adjusting the rotation of the sample stage around a rotation axis perpendicular to the sample stage, and

The first optical path rotating device is used to adjust the rotation of the incident optical path or the receiving optical path around the rotation axis.

Preferably, the test system further includes:

The second optical path rotation device is used to adjust the rotation of the receiving optical path or the incident optical path around the rotation axis.

Preferably, the testing system further includes a three-dimensional moving device for the sample stage for precisely adjusting the three-dimensional position of the sample stage, and the rotating device for the sample stage simultaneously rotates the three-dimensional moving device and the sample stage.

Preferably, the sample stage rotation device and the first optical path rotation device are independently adjustable

Preferably, the sample stage rotating device, the first optical path rotating device and the second optical path rotating device are independently adjustable.

Preferably, the incident microscopic objective and the receiving microscopic objective can be adjusted by three-dimensional movement and pitch.

Preferably, the testing system further includes adjustable diaphragms located at the focusing positions of the light beams in the incident light path and the receiving light path, respectively.

Preferably, the test wavelengths of the first spectrum testing unit and the second spectrum testing unit include visible light and near-infrared light.

Preferably, the first real-time observation system and the second real-time observation system respectively include an illumination source, an imaging CCD, a monitor and an optical path element.

Preferably, the first real-time observation system and the second real-time observation system further include mirrors located in front of the imaging CCD, respectively, for separating the light from the microscope objective lens, one way enters the imaging CCD, and the other way enters the spectrum testing unit .

The micro-area spectrum testing system of the present invention can change the incident angle or the receiving angle by adjusting the incident optical path, the sample stage and/or the receiving optical path to rotate coaxially around the rotation axis perpendicular to the sample stage according to the spectral test purpose of the sample, so as to realize variable angle Spectral measurement. By using a microscope objective lens to focus the incident light beam and collect the outgoing light beam, the spectrum measurement of the micro-area sample can be realized. The two-way real-time observation system established in the optical path can observe and adjust the position of the sample, the position of the microscope objective lens and the pitch angle in real time after changing the incident angle and receiving angle, so as to accurately locate the position and size of the focal point of the incident beam and the outgoing beam. It makes it possible to measure micro-region variable-angle spectroscopy. By separately providing spectrum testing units in the incident light path and the receiving light path, the spectrum testing system of the present invention can perform various transmission, reflection and fluorescence spectrum tests.

Description of drawings

For further illustrating content of the present invention, below in conjunction with accompanying drawing and embodiment the present invention will be further described, wherein:

FIG. 1A is a schematic top view of a spectroscopic testing system according to the present invention.

Fig. 1B is a schematic side view of the rotating part of the spectroscopic testing system according to the present invention.

2A-2D are schematic diagrams of transmission or fluorescence spectrum test modes of the spectrum test system according to the present invention, respectively.

3A-3C are respectively schematic diagrams of reflection or fluorescence spectrum test modes of the spectrum test system according to the present invention.

Fig. 4 is a sample transmission spectrum obtained according to the test mode of Example 1 of the present invention.

Fig. 5 is a sample reflectance spectrum obtained according to the test mode of Example 2 of the present invention.

Fig. 6 is the reflectance spectrum of the sample obtained according to the test mode of Example 3 of the present invention.

Specific implementation method

The present invention will be described in detail below with reference to the accompanying drawings and in combination with preferred embodiments of the present invention, wherein the same or similar reference numerals represent the same or similar components.

1A and 1B show schematic diagrams of a variable-angle micro-area spectroscopy testing system according to the present invention, wherein FIG. 1A is a schematic top view of the testing system, and FIG. 1B is a schematic side view of the rotating part of the testing system.

The micro-area variable-angle spectrum testing system of the present invention includes an incident optical path 101 , a sample stage 301 and a receiving optical path 201 . The spectrum testing system further includes a sample stage rotating device 302 for adjusting the sample stage 301 to rotate around a rotating shaft 304 perpendicular to the sample stage, an incident light path adjusting device 102 for rotating the incident light path 101 around the rotating shaft, and a The receiving optical path 201 is a receiving optical path adjusting device 202 that rotates around the rotation axis. The incident optical path adjusting device 102, the sample stage rotating device 302 and the receiving optical path adjusting device 202 enable the incident optical path, the sample stage and the receiving optical path to rotate coaxially around the rotation axis 304 respectively without affecting each other, which makes the incident angle and The receiving angles are independently adjustable. The test system can change the angle of incidence and angle of reception respectively and thus can provide various test modes, which will be described in detail below. The spectrum testing system further includes a sample stage three-dimensional moving device 303 for precisely adjusting the three-dimensional position of the sample stage. The sample stage three-dimensional moving device 303 is located above the sample stage rotating device 302 , and is controlled to rotate together with the sample stage 301 by the sample stage rotating device 302 . By adjusting the rotating device 302 and the moving device 303, the micro-region of the sample to be measured on the sample stage can be accurately positioned at the axis of the rotating shaft.

The incident light path 101 may include an incident microscope objective lens 103 located in the incident light path for focusing the incident light beam, a real-time observation system 104 for selecting and focusing the micro-area to be tested, and a multi-test mode for providing reflection and fluorescence spectra, etc. A spectrum testing unit 105, and various optical elements 106 for forming an incident path. Preferably, in order to improve the signal-to-noise ratio, the incident light path 101 may include an adjustable diaphragm (not shown in the figure) located at the focusing position of the incident light beam, which is used to limit the size of the light spot incident on the sample to be measured. The receiving light path 201 may include a receiving microscope objective lens 203 for focusing the outgoing light beam located in the outgoing light path, a real-time observation system 204 for selecting and focusing the micro-region to be measured, and a multi-test mode for providing transmission and fluorescence spectra, etc. A spectrum testing unit 205, and various optical elements 206 for forming an outgoing path. The incident microscopic objective lens 103 and the receiving microscopic objective lens 203 respectively have a certain magnification and numerical aperture, and can be adjusted by three-dimensional movement and tilting to accurately focus the incident beam or the outgoing beam. The real-time observation system 104, 204 includes an illumination source, an imaging CCD, a monitor, and optical path components. Preferably, the optical path elements of the real-time observation system can be shared with the optical path elements used for spectrum testing. Before the imaging CCD, the optical path is separated by a mirror, one path enters the imaging CCD, and the other path enters the spectrum testing unit. For example, when the sample deviates from the rotation center when the incident angle or receiving angle is changed, the three-dimensional moving device 303 of the sample stage can be adjusted by observing the micro-region imaging of the sample on the monitor, and adjusting the micro-region of the sample to be measured to the axis of the rotation axis to realize Coaxial alignment adjustment. A two-way real-time observation system is provided in the incident optical path 101 and the receiving optical path 201 respectively, which can realize the observation of tiny samples and the coaxial alignment adjustment of the optical path and the sample. The test units 105, 106 preferably have a broad spectral range, eg including the visible spectrum and the near infrared spectrum. Preferably, in order to improve the signal-to-noise ratio, the receiving optical path 201 may include an adjustable diaphragm (not shown in the figure) located at the focusing position of the outgoing beam, which is used to limit the size of the information collection area of the sample to be tested.

When using the spectrum testing system of the present invention to perform micro-area spectrum testing, firstly select an appropriate testing mode according to the testing purpose. Then according to the test mode, use the optical path adjusting device 102, 202, and/or the sample stage rotating device 302 to independently adjust the incident optical path 101, and the receiving optical path 201 and/or the sample stage 301 rotate coaxially around the rotation axis 304 to change the incident angle and receiving angle respectively. angle. Subsequently, the two-way real-time observation systems 104 and 204 in the incident light path 101 and the receiving light path 201 can be used to select and focus the position of the sample to be measured by adjusting the position of the three-dimensional moving device 303 of the sample stage and the positions and pitch angles of the microscopic objective lenses 103 and 203. The microarea to be tested. Then use the spectral test unit for testing. As mentioned above, because the incident optical path 101 , the sample stage 301 and the receiving optical path 201 can rotate coaxially in the micro-area spectroscopic testing system of the present invention, it is possible to test the samples in various modes on the sample stage.

When it is necessary to test the transmission or fluorescence spectrum of the sample, the incident optical path and the receiving optical path are located on both sides of the sample, and the following test modes are provided by adjusting the optical path adjustment devices 102, 202, or the sample stage rotating device 302 and the sample stage three-dimensional moving device 303 :

- After adjusting the incident light path 101 to the selected incident angle and receiving angle, keep the incident angle and receiving angle constant, and use the spectrum testing unit 205 in the receiving light path 201 to perform transmission or fluorescence spectra at certain fixed angles for the micrometric area to be measured Test, as shown in Figure 2A, by changing the position of the micro-area of the sample to be tested, the spectrum test can be performed on different areas of the same sample;

-After adjusting the receiving light path to the selected receiving angle, change the incident angle by turning the incident light path adjustment device, and use the spectrum test unit in the receiving light path to perform transmission or fluorescence spectrum testing with the incident angle changed and the receiving angle fixed for the sample in the micrometer area to be tested , as shown in Figure 2B;

- After adjusting the incident light path to the selected incident angle, change the receiving angle by rotating the receiving light path adjustment device, and use the spectrum test unit in the receiving light path to perform transmission or fluorescence spectra of the samples in the micrometer area with the incident angle unchanged and the receiving angle changed Test, as shown in Figure 2C;

- By rotating the rotating device of the sample stage, changing the incident angle and the receiving angle, using the spectrum testing unit in the receiving light path to perform transmission or fluorescence spectrum testing of the micrometer area to be measured by changing the incident angle and the receiving angle, as shown in Figure 2D.

When it is necessary to perform reflectance or fluorescence spectrum testing on the sample, the following test modes are provided by adjusting the optical path adjustment devices 102, 202, or the sample stage rotating device 302 and the sample stage three-dimensional moving device 303 respectively:

-Use only the incident light path, adjust the incident light path to the incident angle perpendicular to the sample surface by rotating the incident light path adjustment device, keep the incident angle constant, use the spectral test unit in the incident light path to measure the reflected light emitted by the micro-area sample along the incident angle Perform spectral testing, as shown in Figure 3A, by changing the position of the micro-area of the sample to be tested, the scattering spectral test can be performed on different areas of the same sample;

-Only use the incident light path, change the incident angle by rotating the sample stage rotating device, and use the spectrum test unit in the reflected light path to perform spectral testing on the scattered light emitted by the micro-area sample along the incident angle, as shown in Figure 3B;

- Utilize the incident light path and receiving light path on the same side of the sample, change the incident angle and receiving light path by adjusting the sample stage rotation device, and further adjust the receiving light path adjustment device to adjust the receiving light path to the receiving angle corresponding to the reflection angle, using the receiving light path The spectrum testing unit of the micro-area sample is subjected to a reflectance spectrum test in which the incident angle is changed and the receiving angle is equal to the incident angle, as shown in FIG. 3C.

The specific test method of the variable-angle micro-region spectrum test system of the present invention will be introduced below through specific examples.

Example 1

Taking the transmission spectrum test mode in which the incident angle is constant and the receiving angle is changed as shown in FIG. 2C as an example, the variable-angle micro-area spectrum test system of the present invention will be described in conjunction with the accompanying drawings.

Select a polymer photonic crystal structure, for example, 40 μm×40 μm in size as a sample, and fix it on the sample stage 301 , which is located on the three-dimensional moving device 303 and can move accordingly. The three-dimensional moving device 303 is located on the sample stage rotating device 302 , and the sample stage and the sample stage three-dimensional moving device can rotate with the sample stage rotating device 302 . In the measurement of the transmission spectrum of the sample, the incident light beam is kept perpendicular to the surface of the sample, the receiving angle is changed by rotating the receiving optical path adjustment device, and the transmission spectrum of the sample under different receiving angles is detected by the spectrum testing unit 203 of the receiving optical path. In this example, the receiving optical path adjustment device 202 provides the rotation of the receiving optical path 201 around a rotation axis perpendicular to the sample stage. The movement and rotation of the sample are realized by the sample stage rotating device 302 and the sample stage three-dimensional moving device 303 . The receiving optical path adjusting device 202 , the sample stage rotating device 302 and the sample stage three-dimensional moving device 303 are controlled and adjusted independently without affecting each other. The rotation and movement of each device can be realized manually or driven by a motor, but the specific method does not constitute a limitation to the present invention.

In the incident light path 101 , the incident microscopic objective lens 102 is used to focus the incident light beam, and in the receiving light path 201 , the receiving microscopic objective lens 202 is used to collect the outgoing light beam. At the same time, the observation of micro-region samples can also be carried out by using the microscope objective lenses 102 and 202 . In this example, the microscopic objectives 102 and 202 can be moved and tilted three-dimensionally in order to precisely adjust the position of the focal point. For a micro-area sample, even if its position is already precisely at the axis position of the optical path adjustment device and the sample stage rotation device 302, when the receiving optical path 201 rotates with the receiving optical path adjustment device, due to the inherent horizontal and vertical runout of the rotating device exceeding, for example, 10 μm , the micro-region sample will deviate from the original axis position, and further sample position correction is required. To reposition the sample in focus for excitation and detection. Through the two-way microscopic real-time observation of the observation system 104 in the incident light path and the observation system 204 in the receiving light path, and by adjusting the three-dimensional moving device of the sample stage, the sample is returned to the axial center position, and the coaxial alignment adjustment of the micro-area sample is realized.

In the incident light path 101, the spot area of the incident light beam directly focused by the microscope objective lens 102 may be larger than the sample area, so that the sample information is submerged in noise and difficult to distinguish. In order to improve the signal-to-noise ratio, in this example, an adjustable diaphragm is placed at the focus position in the incident light path 101 to limit the area of the incident light beam from the light source 401 and improve the signal-to-noise ratio of spectral measurement. In this example, an adjustable diaphragm located in the receiving light path 201 is also included, which is used to limit the size of the receiving light beam to improve the signal-to-noise ratio. Due to the adjustable aperture size, samples of different sizes can obtain the best transmission spectrum signal-to-noise ratio.

Under different acceptance angles, the measured transmission spectra are shown in Figure 4. In the case of keeping the incident angle constant, changing the acceptance angle to measure the transmission spectrum or fluorescence spectrum of the sample can understand the spectral distribution characteristics of the sample in different orientations and directions, which is conducive to obtaining the spectrum of new micro-nano optical devices, sensors and other devices characteristic.

Example 2

Taking the reflectance spectrum test mode measured when changing the sample stage angle, incident angle and receiving angle as shown in FIG. 3C as an example, the variable-angle micro-area spectrum test system of the present invention will be described in conjunction with the accompanying drawings.

Select a two-dimensional metal array structure, for example, a size of 30 μm×30 μm as a sample, and fix it on the sample stage 301, which is located on the three-dimensional moving device 303 and can move accordingly. The three-dimensional moving device 303 is placed on the sample stage rotating device 302 , and the sample stage and the sample stage three-dimensional moving device can rotate with the sample stage rotating device 302 . In the reflectance spectrum measurement of the sample, the sample stage rotating device 302 is adjusted to change the incident angle and the receiving angle, and the reflectance spectrum of the sample under different incident angles and receiving angles is detected by the spectrum testing unit in the receiving light path.

In the incident light path 101 , the incident microscopic objective lens 102 is used to focus the incident light beam, and in the receiving light path 201 , the receiving microscopic objective lens 202 is used to collect the outgoing light beam. At the same time, the micro-objective lenses 102 and 202 are also used to observe the micro-region samples and adjust the focus position. For a micro-area sample, even if its position is already precisely at the axis position of the optical path adjustment device and the sample stage rotation device 302, when the receiving optical path 201 rotates with the receiving optical path adjustment device, due to the inherent horizontal and vertical runout of the rotating device exceeding, for example, 10 μm , the micro-region sample will deviate from the original axis position, and further sample position correction is required. To reposition the sample in focus for excitation and detection. Through the two-way microscopic real-time observation of the observation system 104 in the incident light path and the observation system 204 in the receiving light path, and by adjusting the three-dimensional moving device of the sample stage, the sample is returned to the axial center position to realize the coaxial alignment adjustment of the micro-area sample .

In the incident light path 101 , the spot area of the incident light beam may be larger than the sample area after being directly focused by the incident microscope objective lens 102 , so that the sample information will be submerged in the noise and difficult to distinguish. An adjustable aperture is placed in the receiving light path 201 to limit the size of the receiving light beam and improve the signal-to-noise ratio. Due to the adjustable aperture size, samples of different sizes can obtain the best transmission spectrum signal-to-noise ratio.

Under different incident angles and receiving angles, the measured reflectance spectra are shown in Figure 5. In the case of changing the incident angle and receiving angle, measuring the reflection spectrum or fluorescence spectrum of the sample can understand the distribution characteristics of the reflection spectrum of the sample for incident light at different angles, which is conducive to obtaining the reflection spectrum characteristics of new micro-nano optical devices, sensors and other devices .

Example 3

Taking the rotating sample stage as shown in FIG. 3B as an example, the reflectance spectrum test measured when the incident angle is changed, the variable-angle micro-area spectrum test system of the present invention will be described in conjunction with the accompanying drawings.

Select a two-dimensional metal array structure with a size such as 30 μm×30 μm as a sample, and fix it on the sample stage 301, which is located on the three-dimensional moving device 303 and can move accordingly. The three-dimensional moving device 303 is located on the sample stage rotating device 302 , and the sample stage and the sample stage three-dimensional moving device can rotate with the sample stage rotating device 302 . In the reflectance spectrum measurement of the sample, the light beam from the light source is incident at a certain angle. By maintaining the incident light path 101 and rotating the sample stage rotation device 303, the incident angle is changed, and the spectral test unit in the incident light path is used to detect samples under different incident angles. the scattering properties.

In the incident light path 101 , the incident microscopic objective lens 102 is used to focus the incident light beam, and in the receiving light path 201 , the receiving microscopic objective lens 202 is used to collect the outgoing light beam. At the same time, the micro-objective lenses 102 and 202 are also used to observe micro-region samples and adjust focus displacement. For the micro-area sample, even if its position is precisely in the axis position of the optical path adjustment device and the sample stage rotating device, when the sample stage 301 rotates with the rotating device 302, due to the inherent lateral and longitudinal runout of more than 10 μm in the rotating device, it will cause If the sample in the micro-area deviates from the original axis position, further sample position correction is still required. To reposition the sample in focus for excitation and detection. Through the two-way microscopic real-time observation of the observation system 104 in the incident light path and the observation system 204 in the receiving light path, and by adjusting the three-dimensional moving device of the sample stage, the sample is returned to the axial center position to realize the coaxial alignment adjustment of the micro-area.

In the incident light path 101, the spot area of the incident light beam directly focused by the microscope objective lens 102 is larger than the sample area, so that the sample information will be submerged in the noise and difficult to distinguish. An adjustable diaphragm is placed in the incident light path 101 to limit the spot size of the incident light beam and improve the signal-to-noise ratio. Due to the adjustable aperture size, samples of different sizes can obtain the best transmission spectrum signal-to-noise ratio.

Under different sample stage rotation angles, the measured spectrum of the sample surface scattered light beam along the incident angle is shown in Figure 6.

The invention has been described in detail above with the aid of preferred exemplary embodiments, but the invention is not limited thereto. Various modifications can be made by those skilled in the art based on the principles of the present invention. Therefore, any modifications made according to the principles of the present invention should be understood as falling within the protection scope of the present invention.

Claims (10)

1. A micro-area spectrum testing system, comprising an incident light path, a sample stage and a receiving light path, is characterized in that, The incident light path includes an optical element located in the incident light path, an incident microscope objective lens, a first spectral testing unit and a first real-time observation system; The receiving light path includes an optical element located in the outgoing light path, a receiving microscope objective lens, a second spectral testing unit and a second real-time observation system, The test system further includes: a sample stage rotating device for adjusting the rotation of the sample stage around a rotation axis perpendicular to the sample stage, and The first optical path rotating device is used to adjust the rotation of the incident optical path or the receiving optical path around the rotation axis. 2. micro-region spectrum test system as claimed in claim 1, is characterized in that, described test system further comprises: The second optical path rotation device is used to adjust the rotation of the receiving optical path or the incident optical path around the rotation axis. 3. micro-region spectrum testing system as claimed in claim 1, is characterized in that, test system further comprises the sample stage three-dimensional moving device for accurately adjusting the three-dimensional position of sample stage, and described sample stage rotating device rotates three-dimensional moving device and sample stage. 4. The micro-area spectroscopic testing system according to claim 1, characterized in that, the rotating device for the sample stage and the rotating device for the first optical path are independently adjustable. 5. The micro-area spectrum testing system according to claim 2, characterized in that, the sample stage rotating device, the first optical path rotating device and the second optical path rotating device are independently adjustable. 6. The micro-area spectrum testing system according to claim 1, wherein the incident microscopic objective lens and the receiving microscopic objective lens can be adjusted by three-dimensional movement and pitch respectively. 7 . The micro-area spectrum testing system according to claim 1 , wherein the testing system further comprises adjustable apertures respectively located at beam focusing positions in the incident light path and the receiving light path. 8 . 8. The micro-area spectrum testing system according to claim 1, wherein the test wavelengths of the first spectrum testing unit and the second spectrum testing unit include visible light and near-infrared light. 9. The micro-area spectrum testing system according to claim 1, wherein the first real-time observation system and the second real-time observation system respectively comprise an illumination source, an imaging CCD, a monitor and an optical path element. 10. micro-region spectrum testing system as claimed in claim 9, is characterized in that, described first real-time observation system and the second real-time observation system further comprise the lens mirror that is positioned at imaging CCD front respectively, are used for will come from microscope The light from the objective lens is separated, one way enters the imaging CCD, and the other way enters the spectrum testing unit.