CN103646377B - Coordinate conversion method and device - Google Patents
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Abstract
本发明提供一种坐标转换方法及装置，涉及划片机领域，解决映射关系不准确，影响图像处理算法的质量与效率，影响机器的精度的问题，其中，所述坐标转换方法包括：以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量；根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵；根据所述坐标转换矩阵，进行所述工作台的坐标与所述加工物的图像的坐标之间的转换。通过划片机工作台非单向移动来确定像素，解决了图像像素坐标与工作台坐标之间映射的问题，提高映射的精准度。
The present invention provides a coordinate conversion method and device, which relate to the field of dicing machines and solve the problems of inaccurate mapping relationships, affecting the quality and efficiency of image processing algorithms, and affecting the accuracy of machines. The coordinate conversion method includes: is the origin of the coordinate system, and the first worktable coordinate difference vector of the worktable moving from the origin to the first target position and the image of the workpiece loaded on the workbench moving from the origin to the first target position are obtained. The first image coordinate difference vector of the target position; according to the first workbench coordinate difference vector and the first image coordinate difference vector, obtain a coordinate transformation matrix; according to the coordinate transformation matrix, perform the coordinate conversion of the workbench Conversion between the coordinates of the image of the workpiece. The pixels are determined by non-unidirectional movement of the table of the dicing machine, which solves the problem of mapping between image pixel coordinates and table coordinates, and improves the accuracy of mapping.
Description
技术领域technical field
本发明涉及划片机领域，特别是涉及一种坐标转换方法及装置。The invention relates to the field of dicing machines, in particular to a coordinate conversion method and device.
背景技术Background technique
划片机的视觉识别系统是以计算机为主的实时图像处理系统，操作人员或电脑对显示在屏幕上的晶圆图像进行识别分析，然后进行相应操作，通过对图像的处理实现工作台对实际晶圆的准确操作，这要求通过图像中的某个点能准确定位到实际晶圆片的相应位置，即实现图像像素坐标系统与工作台坐标系统之间的精准映射，对机器精度的影响至关重要。现有技术中存在如下技术问题，映射关系不准确，影响到图像处理算法的质量与效率，影响机器的精度。The visual recognition system of the dicing machine is a computer-based real-time image processing system. The operator or computer recognizes and analyzes the wafer image displayed on the screen, and then performs corresponding operations. The accurate operation of the wafer requires that the corresponding position of the actual wafer can be accurately located through a certain point in the image, that is, the precise mapping between the image pixel coordinate system and the workbench coordinate system is realized. important. The following technical problems exist in the prior art. The mapping relationship is inaccurate, which affects the quality and efficiency of the image processing algorithm and affects the accuracy of the machine.
发明内容Contents of the invention
本发明要解决的技术问题是提供一种坐标转换方法及装置，解决映射关系不准确，影响到图像处理算法的质量与效率，影响机器的精度的问题。The technical problem to be solved by the present invention is to provide a coordinate conversion method and device to solve the problem that the mapping relationship is inaccurate, affects the quality and efficiency of the image processing algorithm, and affects the accuracy of the machine.
为了解决上述技术问题，本发明实施例提供的一种坐标转换方法，其中，包括：In order to solve the above technical problems, an embodiment of the present invention provides a coordinate transformation method, which includes:
以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量；Taking one point as the origin of the coordinate system, obtaining the first worktable coordinate difference vector of the worktable moving from the origin to the first target position and the image of the workpiece loaded on the workbench moving from the origin to the The first image coordinate difference vector of the first target position;
根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵；Obtain a coordinate transformation matrix according to the first workbench coordinate difference vector and the first image coordinate difference vector;
根据所述坐标转换矩阵，进行所述工作台的坐标与所述加工物的图像的坐标之间的转换。Conversion between the coordinates of the table and the coordinates of the image of the workpiece is performed based on the coordinate conversion matrix.
其中，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量的步骤包括：Wherein, the step of obtaining the first worktable coordinate difference vector of the workbench moving from the origin to the first target position includes:
获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；Obtaining the coordinates of the first target position after the workbench moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
根据所述工作台在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一工作台坐标差向量。A coordinate difference vector of the first workbench is obtained according to the coordinates of the workbench at the origin and the coordinates of the first target position.
进一步地，根据所述工作台在所述原点的坐标以及所述第一目标位置的坐标，获得所述第一工作台坐标差向量的步骤具体为：Further, according to the coordinates of the workbench at the origin and the coordinates of the first target position, the step of obtaining the coordinate difference vector of the first workbench is specifically:
通过公式：b1＝(Δx',Δy')＝(x'1-x'0,y'1-y'0)获得所述工作台第一工作台坐标差向量；Obtain the coordinate difference vector of the first workbench of the workbench by the formula: b 1 =(Δx', Δy')=(x' 1 -x' 0 , y' 1 -y' 0 );
其中，b1为第一工作台坐标差向量；Among them, b1 is the coordinate difference vector of the first workbench;
Δx'为第一目标位置与原点的x轴方向的坐标差值；Δx' is the coordinate difference between the first target position and the origin in the x-axis direction;
Δy'为第一目标位置与原点的y轴方向的坐标差值；Δy' is the coordinate difference between the first target position and the origin in the y-axis direction;
x1'为第一目标位置的工作台的x轴方向的坐标，y1'为第一目标位置的工作台的y轴方向的坐标；x 1 ' is the coordinate in the x-axis direction of the workbench at the first target position, and y 1 ' is the coordinate in the y-axis direction of the workbench at the first target position;
x'0为工作台在原点x轴方向的坐标，y'0为工作台在原点y轴方向的坐标。x' 0 is the coordinate of the workbench in the x-axis direction of the origin, and y' 0 is the coordinate of the workbench in the y-axis direction of the origin.
其中，装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量的步骤包括：Wherein, the step of moving the image of the workpiece loaded on the workbench from the origin to the first image coordinate difference vector of the first target position includes:
获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；Obtaining the coordinates of the first target position after the workbench moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
根据所述加工物的图像在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一图像坐标差向量。The first image coordinate difference vector is obtained according to the coordinates of the image of the workpiece at the origin and the coordinates at the first target position.
进一步地，根据所述加工物的图像在所述原点的坐标以及所述第一目标位置的坐标，获得所述第一图像坐标差向量的步骤具体为：Further, according to the coordinates of the image of the workpiece at the origin and the coordinates of the first target position, the step of obtaining the first image coordinate difference vector is specifically:
通过公式：a1＝(Δx,Δy)＝(x1-x0,y1-y0)获得所述第一图像坐标差向量；Obtain the first image coordinate difference vector by the formula: a 1 =(Δx,Δy)=(x 1 -x 0 , y 1 -y 0 );
其中，a1为第一图像坐标差向量；Wherein, a 1 is the first image coordinate difference vector;
Δx为第一目标位置与原点的x轴方向的坐标差值；Δx is the coordinate difference between the first target position and the origin in the x-axis direction;
Δy为第一目标位置与原点的y轴方向的坐标差值；Δy is the coordinate difference between the first target position and the origin in the y-axis direction;
x1为加工物的图像的坐标的x轴方向的坐标，y1为加工物的图像的坐标的y轴方向的坐标；x 1 is the coordinate in the x-axis direction of the coordinates of the image of the workpiece, and y 1 is the coordinate in the y-axis direction of the coordinates of the image of the workpiece;
x0为工作台在原点的x轴方向的坐标，y0为工作台在原点的y轴方向的坐标。x 0 is the coordinate of the workbench in the x-axis direction of the origin, and y 0 is the coordinate of the workbench in the y-axis direction of the origin.
其中，以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量之后，还包括：Wherein, with one point as the origin of the coordinate system, the first worktable coordinate difference vector of the worktable moving from the origin to the first target position and the image of the workpiece loaded on the workbench moving from the origin to the first target position are obtained. After the first image coordinate difference vector of the first target position, it also includes:
获取工作台坐标差向量集，包括所述第一工作台坐标差向量、第二工作台坐标差向量…第n工作台坐标差向量；以及Acquire a set of workbench coordinate difference vectors, including the first workbench coordinate difference vector, the second workbench coordinate difference vector...the nth workbench coordinate difference vector; and
获取图像坐标差向量集，包括所述第一图像坐标差向量、第二图像坐标差向量…第n图像坐标差向量。A set of image coordinate difference vectors is acquired, including the first image coordinate difference vector, the second image coordinate difference vector...the nth image coordinate difference vector.
优选地，根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵获得坐标转换矩阵的步骤包括：Preferably, according to the first workbench coordinate difference vector and the first image coordinate difference vector, the step of obtaining a coordinate transformation matrix and obtaining a coordinate transformation matrix includes:
根据Y＝X·A获得坐标转换矩阵；Obtain the coordinate transformation matrix according to Y=X·A;
其中， in,
且，Y为工作台坐标差向量矩阵，X为图像坐标差向量矩阵；And, Y is the workbench coordinate difference vector matrix, X is the image coordinate difference vector matrix;
a1，a2，a3…an分别为所述第一工作台坐标差向量、所述第二工作台坐标差向量…所述第n工作台坐标差向量；a 1 , a 2 , a 3 ...a n are respectively the coordinate difference vector of the first workbench, the coordinate difference vector of the second workbench ... the coordinate difference vector of the nth workbench;
b1，b2，b3…bn分别为所述第一图像坐标差向量、所述第二图像坐标差向量…所述第n图像坐标差向量；b 1 , b 2 , b 3 ... b n are respectively the first image coordinate difference vector, the second image coordinate difference vector ... the nth image coordinate difference vector;
A为所述坐标转换矩阵。A is the coordinate transformation matrix.
相应的本发明实施例还提供了一种坐标转换装置，应用于划片机，其中，所述坐标转换装置包括：Corresponding embodiments of the present invention also provide a coordinate conversion device applied to a dicing machine, wherein the coordinate conversion device includes:
运动控制模块，用于以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量；The motion control module is used to take one point as the origin of the coordinate system, and obtain the first worktable coordinate difference vector when the worktable moves from the origin to the first target position and the image of the workpiece loaded on the workbench from the The origin moves to the first image coordinate difference vector of the first target position;
第一处理模块，用于根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵；A first processing module, configured to obtain a coordinate transformation matrix according to the first workbench coordinate difference vector and the first image coordinate difference vector;
第二处理模块，用于根据所述坐标转换矩阵，进行所述工作台的坐标与所述加工物的图像的坐标之间的转换。The second processing module is configured to perform conversion between the coordinates of the worktable and the coordinates of the image of the workpiece according to the coordinate transformation matrix.
进一步地，所述运动控制模块包括：Further, the motion control module includes:
运动控制单元，用于获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；A motion control unit, configured to obtain the coordinates of the first target position after the worktable moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
第一获取单元，用于根据所述工作台在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一工作台坐标差向量。The first obtaining unit is configured to obtain the coordinate difference vector of the first workbench according to the coordinates of the workbench at the origin and the coordinates at the first target position.
进一步地，所述运动控制模块还包括：第二获取单元，用于根据所述加工物的图像在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一图像坐标差向量。Further, the motion control module further includes: a second acquisition unit, configured to obtain the first image coordinate difference according to the coordinates of the image of the workpiece at the origin and the coordinates at the first target position vector.
本发明的上述技术方案的有益效果如下：The beneficial effects of above-mentioned technical scheme of the present invention are as follows:
本发明的方案中，在坐标系中找一点为原点，将工作台从原点移动到第一目标位置处，从而得到工作台的第一工作台坐标差向量以及加工物的图像的第一图像坐标差向量，通过第一工作台坐标差向量和第一图像坐标差向量，获得坐标转换矩阵后，进行工作台的坐标与加工物的图像的坐标的转换，这样工作台的坐标与加工物的图像的坐标具有准确的映射关系，提高图像处理算法的质量与效率，同时提高机器的精度。In the solution of the present invention, find a point in the coordinate system as the origin, and move the workbench from the origin to the first target position, thereby obtaining the first workbench coordinate difference vector of the workbench and the first image coordinate of the image of the processed object The difference vector, after obtaining the coordinate transformation matrix through the first workbench coordinate difference vector and the first image coordinate difference vector, performs the conversion between the coordinates of the workbench and the coordinates of the image of the processed object, so that the coordinates of the workbench and the image of the processed object The coordinates have an accurate mapping relationship, which improves the quality and efficiency of the image processing algorithm, and at the same time improves the accuracy of the machine.
附图说明Description of drawings
图1为本发明的转换算法的基本步骤；Fig. 1 is the basic steps of conversion algorithm of the present invention;
图2为本发明的坐标系1示意图；Fig. 2 is a schematic diagram of a coordinate system 1 of the present invention;
图3为本发明的坐标系2示意图；Fig. 3 is a schematic diagram of coordinate system 2 of the present invention;
图4为本发明的坐标系3示意图；Fig. 4 is a schematic diagram of coordinate system 3 of the present invention;
图5为本发明的像素尺寸测量图案示例图；Fig. 5 is an example diagram of a pixel size measurement pattern of the present invention;
图6为本发明的转换装置的基本结构图。Fig. 6 is a basic structural diagram of the conversion device of the present invention.
具体实施方式detailed description
为使本发明要解决的技术问题、技术方案和优点更加清楚，下面将结合附图及具体实施例进行详细描述。In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.
本发明提供一种坐标转换方法及装置，通过划片机工作台非单向移动来确定像素，解决了图像像素坐标与工作台坐标之间映射的问题，提高映射的精准度。The invention provides a coordinate conversion method and device, which determines pixels by non-unidirectional movement of a dicing machine workbench, solves the problem of mapping between image pixel coordinates and workbench coordinates, and improves the accuracy of mapping.
如图1所示，本发明实施例提供的坐标转换方法，其中，包括：As shown in Figure 1, the coordinate transformation method provided by the embodiment of the present invention includes:
步骤1，以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量；Step 1, taking one point as the origin of the coordinate system, obtaining the first worktable coordinate difference vector of the worktable moving from the origin to the first target position and the image of the workpiece loaded on the workbench moving from the origin a first image coordinate difference vector to the first target position;
其中，所述坐标系具有x轴和y轴，所述一点是坐标系中任意一点，取任意一点向预设的位置移动，即第一目标位置；所述图像是通过屏幕显示获取的。在工作台处于所取的原点时，通过屏幕中心十字与原点对齐，得到原点图像坐标和原点工作台坐标，然后工作台移动到第一目标位置，通过屏幕中心十字与第一目标位置对齐，得到目标位置图像坐标和目标位置工作台坐标，对应的坐标的x、y分量各自的作差，则目标位置工作台坐标与原点工作台坐标产生第一工作台坐标差向量，目标图像坐标与原点图像坐标产生第一图像坐标差向量。Wherein, the coordinate system has an x-axis and a y-axis, and the point is any point in the coordinate system, and any point is taken to move to a preset position, that is, the first target position; the image is acquired through screen display. When the workbench is at the selected origin, align the screen center cross with the origin to obtain the origin image coordinates and origin workbench coordinates, then move the workbench to the first target position, align the screen center cross with the first target position, and obtain The image coordinates of the target position and the coordinates of the workbench of the target position, and the respective x and y components of the corresponding coordinates make a difference, then the coordinates of the workbench of the target position and the coordinates of the workbench of the origin generate the first workbench coordinate difference vector, and the coordinates of the target image and the image of the origin coordinates yields the first image coordinate difference vector.
步骤2，根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵；Step 2, obtaining a coordinate transformation matrix according to the first workbench coordinate difference vector and the first image coordinate difference vector;
其中，所述第一工作台坐标差向量转换为第一矩阵，对于所述第二图像坐标差向量转换为第二矩阵，然后通过第一矩阵和第二矩阵，获取坐标转换矩阵。Wherein, the coordinate difference vector of the first workbench is converted into a first matrix, and the coordinate difference vector of the second image is converted into a second matrix, and then a coordinate transformation matrix is obtained through the first matrix and the second matrix.
步骤3，根据所述坐标转换矩阵，进行所述工作台的坐标与所述加工物的图像的坐标之间的转换。Step 3: Perform conversion between the coordinates of the workbench and the coordinates of the image of the workpiece according to the coordinate transformation matrix.
其中，通过将第一矩阵、第二矩阵和坐标转换矩阵建立关系，将转换矩阵进行逆运算，得到工作台的坐标与加工物的图像的坐标之间的映射关系。Wherein, by establishing a relationship between the first matrix, the second matrix and the coordinate transformation matrix, and performing an inverse operation on the transformation matrix, the mapping relationship between the coordinates of the workbench and the coordinates of the image of the processed object is obtained.
在坐标系中找一点为原点，将工作台从原点移动到第一目标位置处，通过屏幕中心十字采集相应的图像坐标和工作台坐标，得到工作台的第一工作台坐标差向量以及加工物的图像的第一图像坐标差向量，通过所述第一工作台坐标差向量和第一图像坐标差向量，获得坐标转换矩阵后，进行工作台的坐标与加工物的图像的坐标的转换，这样工作台的坐标与加工物的图像的坐标具有准确的映射关系，提高图像处理算法的质量与效率，对于机器的精度也有大幅度提高。Find a point in the coordinate system as the origin, move the workbench from the origin to the first target position, collect the corresponding image coordinates and workbench coordinates through the cross in the center of the screen, and obtain the first workbench coordinate difference vector of the workbench and the processed object The first image coordinate difference vector of the image, after obtaining the coordinate transformation matrix through the first workbench coordinate difference vector and the first image coordinate difference vector, carry out the conversion of the coordinates of the workbench and the image of the processed object, like this The coordinates of the workbench and the coordinates of the image of the processed object have an accurate mapping relationship, which improves the quality and efficiency of the image processing algorithm and greatly improves the accuracy of the machine.
对于本发明的对于映射关系的具体实施例如下。The specific implementation of the mapping relationship in the present invention is as follows.
平面内两个直角坐标系的三种分布情况分析。Analysis of three distributions of two Cartesian coordinate systems in the plane.
假设两个直角坐标系分别是工作台坐标系与加工物的图像坐标系，图像的x轴和y轴坐标分别用x，y表示，工作台的x轴和y轴坐标分别用x'，y'表示，A为所述坐标转换矩阵，k为两个坐标系的比例系数。Assume that the two rectangular coordinate systems are the workbench coordinate system and the image coordinate system of the workpiece, the x-axis and y-axis coordinates of the image are represented by x, y respectively, and the x-axis and y-axis coordinates of the workbench are respectively represented by x', y ' indicates that A is the coordinate transformation matrix, and k is the proportional coefficient of the two coordinate systems.
如图2所示，两个坐标系原点重合，X轴重合，Y轴重合。As shown in Figure 2, the origins of the two coordinate systems coincide, the X axis coincides, and the Y axis coincides.
图像→工作台：Image → Workbench:
工作台→图像：Workbench → Image:
如图3所示，两个坐标系原点重合，X轴、Y轴不重合，存在角度θ偏转。As shown in Figure 3, the origins of the two coordinate systems coincide, the X axis and the Y axis do not coincide, and there is an angle θ deflection.
图像→工作台：Image → Workbench:
工作台→图像：Workbench → Image:
如图4所示，两个坐标系原点不重合，X轴、Y轴不重合，存在角度θ偏转。As shown in Figure 4, the origins of the two coordinate systems do not coincide, the X axis and the Y axis do not coincide, and there is an angle θ deflection.
图像→工作台：Image → Workbench:
工作台→图像：Workbench → Image:
应当了解的是，需要移动工作台的具体操作，因此本发明实施例的坐标转换方法中，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量的步骤包括：It should be understood that the specific operation of moving the workbench is required, so in the coordinate transformation method of the embodiment of the present invention, the step of obtaining the first workbench coordinate difference vector for the workbench moving from the origin to the first target position includes:
步骤11，获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；Step 11, obtaining the coordinates of the first target position after the worktable moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
其中，所述第一预定距离与所述第二预定距离可以是相同的长度，也可以是不同的长度，具体的长度根据工艺需要自行设定，由机器完成移动。Wherein, the first predetermined distance and the second predetermined distance can be the same length or different lengths, and the specific length can be set according to the requirements of the process, and the movement is completed by the machine.
步骤12，根据所述工作台在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一工作台坐标差向量。Step 12: Obtain the coordinate difference vector of the first workbench according to the coordinates of the workbench at the origin and the coordinates at the first target position.
通过移动x轴方向和移动y轴方向，收集图像坐标与工作台坐标的坐标数据，这样可以得到图像坐标对应的工作台坐标的x值，y值以及相应的角度，提高映射关系的准确度，增强划切机的实用性。By moving the x-axis direction and the y-axis direction, the coordinate data of the image coordinates and the workbench coordinates are collected, so that the x value, y value and corresponding angle of the workbench coordinates corresponding to the image coordinates can be obtained to improve the accuracy of the mapping relationship. Enhance the practicability of the cutting machine.
优选地，本发明的又一实施例的坐标转换方法中，根据所述工作台在所述原点的坐标以及所述第一目标位置的坐标，获得所述第一工作台坐标差向量的步骤具体为：Preferably, in the coordinate conversion method according to another embodiment of the present invention, the step of obtaining the coordinate difference vector of the first workbench according to the coordinates of the workbench at the origin and the coordinates of the first target position is specifically for:
步骤121，通过公式：b1＝(Δx',Δy')＝(x'1-x'0,y'1-y'0)获得所述工作台第一工作台坐标差向量；Step 121, by the formula: b 1 =(Δx',Δy')=(x' 1 -x' 0 ,y' 1 -y' 0 ) to obtain the coordinate difference vector of the first workbench of the workbench;
其中，b1为第一工作台坐标差向量；Among them, b1 is the coordinate difference vector of the first workbench;
Δx'为第一目标位置与原点的x轴方向的坐标差值；Δx' is the coordinate difference between the first target position and the origin in the x-axis direction;
Δy'为第一目标位置与原点的y轴方向的坐标差值；Δy' is the coordinate difference between the first target position and the origin in the y-axis direction;
x1'为第一目标位置的工作台的x轴方向的坐标，y1'为第一目标位置的工作台的y轴方向的坐标；x 1 ' is the coordinate in the x-axis direction of the workbench at the first target position, and y 1 ' is the coordinate in the y-axis direction of the workbench at the first target position;
x'0为工作台在原点x轴方向的坐标，y'0为工作台在原点y轴方向的坐标。x' 0 is the coordinate of the workbench in the x-axis direction of the origin, and y' 0 is the coordinate of the workbench in the y-axis direction of the origin.
应当了解的是，为了建立准确的图像坐标与工作台坐标的映射关系，因此本发明实施例的坐标转换方法中，装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量的步骤包括：It should be understood that, in order to establish an accurate mapping relationship between image coordinates and workbench coordinates, in the coordinate transformation method of the embodiment of the present invention, the image of the workpiece loaded on the workbench is moved from the origin to the The step of the first image coordinate difference vector of the first target position comprises:
步骤13，获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；Step 13, obtaining the coordinates of the first target position after the worktable moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
其中，所述第一预定距离与所述第二预定距离可以是相同的长度，也可以是不同的长度，具体的长度根据工艺需要自行设定，由机器完成移动。Wherein, the first predetermined distance and the second predetermined distance can be the same length or different lengths, and the specific length can be set according to the requirements of the process, and the movement is completed by the machine.
步骤14，根据所述加工物的图像在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一图像坐标差向量。Step 14: Obtain the first image coordinate difference vector according to the coordinates of the image of the workpiece at the origin and the coordinates at the first target position.
优选地，本发明的又一实施例的坐标转换方法中，根据所述加工物的图像在所述原点的坐标以及所述第一目标位置的坐标，获得所述第一图像坐标差向量的步骤具体为：Preferably, in the coordinate transformation method according to another embodiment of the present invention, the step of obtaining the coordinate difference vector of the first image according to the coordinates of the image of the workpiece at the origin and the coordinates of the first target position Specifically:
步骤141，通过公式：a1＝(Δx,Δy)＝(x1-x0,y1-y0)获得所述第一图像坐标差向量；Step 141, obtain the first image coordinate difference vector by the formula: a 1 =(Δx,Δy)=(x 1 -x 0 , y 1 -y 0 );
其中，a1为第一图像坐标差向量；Wherein, a 1 is the first image coordinate difference vector;
Δx为第一目标位置与原点的x轴方向的坐标差值；Δx is the coordinate difference between the first target position and the origin in the x-axis direction;
Δy为第一目标位置与原点的y轴方向的坐标差值；Δy is the coordinate difference between the first target position and the origin in the y-axis direction;
x1为加工物的图像的坐标的x轴方向的坐标，y1为加工物的图像的坐标的y轴方向的坐标；x 1 is the coordinate in the x-axis direction of the coordinates of the image of the workpiece, and y 1 is the coordinate in the y-axis direction of the coordinates of the image of the workpiece;
x0为工作台在原点的x轴方向的坐标，y0为工作台在原点的y轴方向的坐标。x 0 is the coordinate of the workbench in the x-axis direction of the origin, and y 0 is the coordinate of the workbench in the y-axis direction of the origin.
为了提高图像坐标与工作台坐标的映射的精确度，因此本发明实施例的坐标转换方法中，以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量之后，还包括：步骤15，获取工作台坐标差向量集，包括所述第一工作台坐标差向量、第二工作台坐标差向量…第n工作台坐标差向量；以及In order to improve the accuracy of the mapping between the image coordinates and the workbench coordinates, in the coordinate conversion method of the embodiment of the present invention, a point is used as the origin of the coordinate system to obtain the first workbench moving from the origin to the first target position. After the stage coordinate difference vector and the first image coordinate difference vector of the image of the workpiece loaded on the workbench moved from the origin to the first target position, it also includes: Step 15, obtaining the workbench coordinate difference vector Set, including the coordinate difference vector of the first workbench, the coordinate difference vector of the second workbench ... the nth workbench coordinate difference vector; and
获取图像坐标差向量集，包括所述第一图像坐标差向量、第二图像坐标差向量…第n图像坐标差向量。A set of image coordinate difference vectors is acquired, including the first image coordinate difference vector, the second image coordinate difference vector...the nth image coordinate difference vector.
其中，获取所述工作台坐标差集及所述图像坐标差集的方法是，在坐标系中多取几个点分别称为第二目标位置，第三目标位置…第n目标位置，从第一目标移动到第二目标位置得到第二工作坐标差向量以及第二图像坐标差向量，从第二目标位置继续移动到第三目标位置得到第三坐标差向量以及第三图像坐标差向量…从第n-1目标位置移动到第n目标位置得到第n坐标差向量以及第n图像坐标差向量。Wherein, the method for obtaining the coordinate difference set of the workbench and the image coordinate difference set is to take several more points in the coordinate system and call them the second target position, the third target position...the nth target position, starting from the A target moves to the second target position to obtain the second working coordinate difference vector and the second image coordinate difference vector, and continues to move from the second target position to the third target position to obtain the third coordinate difference vector and the third image coordinate difference vector... from The n-1th target position is moved to the nth target position to obtain the nth coordinate difference vector and the nth image coordinate difference vector.
对于在多取几个目标位置，通过使工作台分别在x轴方向移动n次，在y轴方向移动n次，获取工作台坐标差向量集以及图像坐标差向量集，当移动的次数越多，精度越准确，但还要满足工艺实现，n可以取至少10次。这样提高图像坐标与工作台坐标的映射的精确度。For taking several more target positions, by moving the worktable n times in the x-axis direction and n times in the y-axis direction, the workbench coordinate difference vector set and the image coordinate difference vector set are obtained. When the number of movements increases , the more accurate the precision is, but it still needs to satisfy the process realization, n can be taken at least 10 times. This improves the accuracy of the mapping of image coordinates to table coordinates.
本发明的又一实施例的坐标转换方法中，根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵的步骤包括：In the coordinate conversion method according to another embodiment of the present invention, the step of obtaining a coordinate conversion matrix according to the first workbench coordinate difference vector and the first image coordinate difference vector includes:
步骤16，根据Y＝X·A获得坐标转换矩阵；Step 16, obtain coordinate transformation matrix according to Y=X·A;
其中， in,
且，Y为工作台坐标差向量矩阵，X为图像坐标差向量矩阵；And, Y is the workbench coordinate difference vector matrix, X is the image coordinate difference vector matrix;
a1，a2，a3…an分别为所述第一工作台坐标差向量、所述第二工作台坐标差向量…所述第n工作台坐标差向量；a 1 , a 2 , a 3 ...a n are respectively the coordinate difference vector of the first workbench, the coordinate difference vector of the second workbench ... the coordinate difference vector of the nth workbench;
b1，b2，b3…bn分别为所述第一图像坐标差向量、所述第二图像坐标差向量…所述第n图像坐标差向量；b 1 , b 2 , b 3 ... b n are respectively the first image coordinate difference vector, the second image coordinate difference vector ... the nth image coordinate difference vector;
A为所述坐标转换矩阵。A is the coordinate transformation matrix.
通过建立工作台坐标差向量矩阵Y、图像坐标差向量矩阵X以及坐标转换矩阵A的关系，这样通过数学算法更容易运算编程，通过求得一个矩阵A的逆、X矩阵与Y矩阵的乘积进行编程，根据公式[x',y']＝[x,y]A，求得矩阵A即可，这样使得工作台坐标与图像像素坐标的映射关系更精确。By establishing the relationship between the workbench coordinate difference vector matrix Y, the image coordinate difference vector matrix X, and the coordinate transformation matrix A, it is easier to program through mathematical algorithms, and the process is performed by obtaining the inverse of a matrix A, the product of the X matrix and the Y matrix. For programming, according to the formula [x', y']=[x, y]A, the matrix A can be obtained, so that the mapping relationship between the coordinates of the workbench and the coordinates of the image pixels is more accurate.
本发明的具体实施例的举例如下。Examples of specific embodiments of the present invention are as follows.
将具有唯一目标的虚拟加工物装载到工作台，假如目标图案如图5所示，将屏幕中心十字与B点对齐，读取B点对应的图像坐标（x0,y0）和工作台坐标（x'0,y'0），然后X轴走AB个距离，Y轴走BD个距离，即工作台运动到C点，将屏幕上的十字与C点对准，读取C点对应的图像坐标（x1,y1）和工作台坐标（x1',y1'），然后计算图像坐标下B和C两点的x、y分量各自的差值，组成新的向量a＝(Δx,Δy)＝(x1-x0,y1-y0)，同样工作台坐标系下b＝(Δx',Δy')＝(x'1-x'0,y1'-y'0)，不断重复该过程，直到收集满足要求的数据集Load the virtual workpiece with a unique target on the workbench. If the target pattern is shown in Figure 5, align the cross at the center of the screen with point B, and read the image coordinates (x 0 , y 0 ) and workbench coordinates corresponding to point B (x' 0 , y' 0 ), then the X-axis travels the distance of AB, and the Y-axis travels the distance of BD, that is, the workbench moves to point C, aligns the cross on the screen with point C, and reads the corresponding Image coordinates (x 1 , y 1 ) and workbench coordinates (x 1 ', y 1 '), and then calculate the difference between the x and y components of the two points B and C under the image coordinates to form a new vector a=( Δx,Δy)=(x 1 -x 0 ,y 1 -y 0 ), in the same workbench coordinate system b=(Δx',Δy')=(x' 1 -x' 0 ,y 1 '-y' 0 ), repeat the process until a data set that meets the requirements is collected
即x、y满足Y＝X·A。That is, x and y satisfy Y=X·A.
相应的，如图6所示，本发明实施例还提供一种坐标转换装置，应用于划片机，其中，所述坐标转换装置包括：Correspondingly, as shown in FIG. 6 , an embodiment of the present invention also provides a coordinate conversion device applied to a dicing machine, wherein the coordinate conversion device includes:
运动控制模块61，用于以一点为坐标系的原点，获得工作台从所述原点移动到第一目标位置的第一工作台坐标差向量以及装载在所述工作台上的加工物的图像从所述原点移动到所述第一目标位置的第一图像坐标差向量；The motion control module 61 is configured to use a point as the origin of the coordinate system to obtain a first worktable coordinate difference vector when the worktable moves from the origin to a first target position and an image of the workpiece loaded on the workbench from The origin moves to the first image coordinate difference vector of the first target position;
第一处理模块62，用于根据所述第一工作台坐标差向量和所述第一图像坐标差向量，获得坐标转换矩阵；The first processing module 62 is configured to obtain a coordinate transformation matrix according to the first workbench coordinate difference vector and the first image coordinate difference vector;
第二处理模块63，用于根据所述坐标转换矩阵，进行所述工作台的坐标与所述加工物的图像的坐标之间的转换。The second processing module 63 is configured to perform conversion between the coordinates of the worktable and the coordinates of the image of the workpiece according to the coordinate transformation matrix.
通过运动控制模块61控制工作台的移动，得到第一工作台坐标差向量以及装载在所述工作台上的加工物的图像的第一图像坐标差向量，然后第一处理模块62根据第一工作台坐标差向量以及第一图像坐标差向量获得坐标转换矩阵，第二处理模块63，通过以上坐标转换矩阵，得出工作台的坐标与加工物的图像的坐标之间的转换的关系，这样可以实现工作台与加工物的图像准确的映射关系，提高映射的精准度，提高机器的精度。The movement of the workbench is controlled by the motion control module 61 to obtain the first workbench coordinate difference vector and the first image coordinate difference vector of the image of the workpiece loaded on the workbench, and then the first processing module 62 according to the first work The table coordinate difference vector and the first image coordinate difference vector obtain the coordinate transformation matrix, and the second processing module 63, through the above coordinate transformation matrix, obtains the transformation relationship between the coordinates of the workbench and the coordinates of the image of the processed object, so that Realize the accurate mapping relationship between the image of the workbench and the processed object, improve the accuracy of the mapping, and improve the precision of the machine.
进一步地，本发明的又一实施例的坐标转换装置中，所述运动控制模块61包括：Further, in the coordinate conversion device of another embodiment of the present invention, the motion control module 61 includes:
运动控制单元，用于获得工作台以所述原点为起点，在x轴方向上移动第一预定距离以及在y轴方向上移动第二预定距离后到达所述第一目标位置的坐标；A motion control unit, configured to obtain the coordinates of the first target position after the worktable moves a first predetermined distance in the x-axis direction and a second predetermined distance in the y-axis direction with the origin as the starting point;
第一获取单元，用于根据所述工作台在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一工作台坐标差向量。The first obtaining unit is configured to obtain the coordinate difference vector of the first workbench according to the coordinates of the workbench at the origin and the coordinates at the first target position.
进一步地，本发明的又一实施例的坐标转换装置中，所述运动控制模块61还包括：第二获取单元，用于根据所述加工物的图像在所述原点的坐标以及在所述第一目标位置的坐标，获得所述第一图像坐标差向量。Further, in the coordinate conversion device according to another embodiment of the present invention, the motion control module 61 further includes: a second acquisition unit, configured to use the coordinates of the image of the workpiece at the origin and the coordinates at the first The coordinates of a target position are obtained to obtain the first image coordinate difference vector.
以上所述是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明所述原理的前提下，还可以作出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above description is a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.
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