CN103913902A - Mask assembly device and mask assembly method - Google Patents

Abstract

The invention relates to the technical field of display production equipment, in particular to a mask board assembly device and assembly method. The mask plate assembly device is used for fixedly connecting the support bar with the mask plate, wherein the machine base is used for installing the mask plate, and the machine table is used for absorbing and driving the support bar to move to the mask plate; the assembly method is based on the Mask plate assembly device, which includes: S1: place the mask plate on the machine base, S2: the machine drives the support bar to move, and place the support bar on the mask plate correspondingly, S3: the support bar is fixed by the auxiliary unit Connected to the mask board, S4: The machine table is separated from the support bar. The mask plate assembly device changes the mask plate assembly process from manual production to automatic assembly. It has the characteristics of low cost and high assembly efficiency, which can ensure the assembly quality of the mask plate. It is convenient, and its bonding strength is effectively guaranteed by the setting of auxiliary units.

Description

Mask plate assembly device and assembly method

technical field

The present invention relates to the technical field of display production equipment, in particular to a mask plate assembly device and an assembly method, in particular to an automatic mask plate assembly device used in the ultraviolet curing link of the liquid crystal display production process and the device based on the mask plate assembly device. assembly method.

Background technique

Thin Film Transistor-Liquid Crystal Display (English name is Thin Film Transistor-Liquid Crystal Display, referred to as TFT-LCD) is a type of liquid crystal display, which uses thin film transistor technology to improve image quality. TFT-LCDs are collectively referred to as LCDs, which are used in televisions, flat panel displays and projectors. Its production technology has been developed in recent decades, and its technology and process have become increasingly mature. It has replaced cold cathode diode (English name is Cold Cathode Fluorescent Lamp, CCFL for short) display and has become the mainstream product in the display field.

In the production process of the LCD panel, in order to make the liquid crystal molecules align normally, it is necessary to coat a layer of polyimide (English name is Polyimide, PI for short) film on the surface of the array substrate and the color filter substrate, and then coat the polyimide The rubbing process is performed on the imine film to realize the orientation of the liquid crystal molecules. At present, the specific steps of the liquid crystal panel forming process are as follows: first, use a sealant coating device to coat the frame sealant around one glass substrate; then, drop liquid crystal into the center of another glass substrate by drop injection method ; Afterwards, the two glass substrates are vacuum bonded, that is, the bonding process is carried out; finally, the sealing glue is cured, that is, put it into the ultraviolet light (English name is ultraviolet, referred to as UV) curing room to cure the sealing glue. The photosensitive component of the box is partially cured by ultraviolet light irradiation for a short time; finally, the uncured frame sealant is completely cured in a high-temperature furnace to complete the box forming process.

UV curing is the primary curing stage of frame sealant, and its curing efficiency and effect have an important impact on the entire joining process. In the UV curing process, a mask (English name is Mask) is needed to cover the effective display area of the LCD screen (English name is Panel AA area). Among them, the high-efficiency and high-quality production and assembly of the mask board have an important impact on the effect of the UV curing stage. Once the mask board fails to effectively block the AA area, it will have an important impact on the display effect of the LCD screen.

In the prior art, the entire assembly process of the mask board is mainly made by hand. The main problems are: first, the manual assembly is not only costly and inefficient, but also increases the labor intensity of front-line employees. The board assembly process requires about 4-6 engineers, who work continuously for more than 1 hour; second, the entire manual assembly process has few monitoring methods and human factors are large, so the quality of the mask board produced cannot be effectively guaranteed. The problem will cause huge losses; the third is that steel screwdrivers need to be used to fix many places during the installation process, and once the fixing process accidentally touches the mask board, it will inevitably lead to the scrapping of the entire mask board—this is also the current situation. On the production line, when preparing the mask board, at least seven spare sheets will be prepared in case of accidents; Fourth, due to the large size of the mask board used in the LCD production process, in order to prevent it from being affected by its own gravity during use In order to ensure the uniformity of the irradiation process, it is necessary to set up multiple support strips to support it. In the prior art, the support strips are fixed by tape bonding, so a large number of tapes need to be manually operated on each part of the support strips. Fixing, such initial fixing and disassembly after use are very time-consuming processes, and the bonding strength cannot be effectively monitored and guaranteed.

In view of the above-mentioned defects in the prior art, it is necessary to provide a mask assembly device and an assembly method.

Contents of the invention

(1) Technical problems to be solved

The technical problem to be solved by the present invention is to solve the problem of high cost and low efficiency when manual assembly of the existing mask board, easy operation errors in the assembly process, which lead to quality problems of the mask board, and even cause the mask board to be scrapped, and the original In some assembly methods, during the UV curing process, the support bar and the mask plate are fixed by adhesive tape, which makes it inconvenient to fix and disassemble the support bar, and its bonding strength is not guaranteed.

(2) Technical solution

In order to solve the above technical problems, the present invention provides a mask plate assembly device, which includes a machine base and a machine table corresponding to the machine base, a mask plate is installed on the machine base, and the machine table is used for Absorb and drive the support bar to move to the mask plate.

Wherein, the machine table includes an air extraction pipe and a plurality of adsorption grooves arranged at intervals, the adsorption grooves are used for absorbing the support bars, and are all communicated with the air extraction pipe.

Wherein, several air holes are uniformly arranged on each adsorption groove, and the adsorption groove communicates with the air extraction pipe through the air holes.

Wherein, a heating plate is detachably arranged between the base and the mask plate.

Wherein, a fixing plate is also included, the fixing plate is arranged around the mask plate, and the two ends of the support strips are fixedly connected to the fixing plate.

Wherein, the fixed plate is provided with a channel for inserting the manipulator of the mechanical auxiliary device.

The present invention also provides a method for assembling a mask, comprising the following steps:

S1: Place the mask on the base;

S2: The machine absorbs and drives the support bars to move, and places the support bars on the mask plate correspondingly;

S3: the support bar is fixedly connected to the mask plate through an auxiliary unit;

S4: The machine platform is separated from the support bar.

Wherein, in the step S3, the auxiliary unit includes an adhesive and a heating plate, the heating plate is detachably arranged between the base and the mask plate, and the heating plate is used for heating and curing the The adhesive is used to fix the support bar to the mask plate through the adhesive.

Wherein, the adhesive is polyurethane adhesive.

Wherein, the adhesive is an epoxy resin adhesive.

Wherein, the mask plate is provided with a masking area, and the masking area is coated with glue corresponding to the adhesive.

Wherein, in the step S3, the auxiliary unit is to pass through the support bar and the mask plate to generate opposite electric charges or magnetic currents respectively, and the support bar and the mask plate are fixed by electromagnetic adsorption. connect.

(3) Beneficial effects

The above-mentioned technical solution of the present invention has the following beneficial effects: the mask plate assembly device of the present invention is used for fixedly connecting the support bar with the mask plate, the machine base is used for installing the mask plate, and the machine table is used for absorbing and driving the support bar to move to the mask plate; the mask plate assembly method of the present invention is based on the mask plate assembly device, which includes S1: placing the mask plate on the machine base, S2: the machine platform drives the support bar to move, and the support bar corresponds to Placed on the mask plate, S3: the support bar is fixedly connected to the mask plate through the auxiliary unit, S4: the machine table is separated from the support bar. The mask plate assembly device of the present invention changes the mask plate assembly process from manual production to automatic assembly, and forms an assembly line batch assembly production mode, which has the characteristics of low cost and high assembly efficiency, and can ensure the assembly of the mask plate Quality, when assembling, the fixing and dismounting of the support bar is very convenient, and its bonding strength is effectively guaranteed by the setting of the auxiliary unit.

Description of drawings

FIG. 1 is a schematic structural view of a mask assembly device according to an embodiment of the present invention;

Fig. 2 is a partial enlarged view of A direction in Fig. 1;

Fig. 3 is the structural representation of the machine platform of the embodiment of the present invention;

4 is a schematic structural diagram of a mask plate according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of the principle of Embodiment 3 of the method for assembling a mask plate of the present invention.

Among them, 1. machine platform; 2. machine base; 3: mask plate; 4: masking area; 5: heating plate; 6: support bar; 7: fixed plate; 8: channel; trachea.

Detailed ways

Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.

In the description of the present invention, unless otherwise specified, "plurality" means two or more. The orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" etc. is Based on the orientation or positional relationship shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood To limit the present invention.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

As shown in Figure 1, the mask plate assembly device provided by the present invention is used to fix the support bar 6 on the mask plate 3, the mask plate 3 is installed on the machine base 2 of the device, and the machine table 1 is used for adsorption And drive the support bar 6 to move to the mask plate 3, the machine platform 1 and the machine base 2 are set correspondingly, so as to ensure that the machine platform 1 moves between the storage place of the support bar 6 and the machine base 2, and the support bar 6 can be correctly Place and fix on the mask plate 3. When the machine 1 absorbs and drives the support bar 6 to move to the top of the machine base 2, in order to ensure the uniformity and stability of the support effect of the fixed support bar 6 on the mask plate 3, it is necessary to make the machine 1 and the machine base 2 Correspondingly arranged between them, so that the support bars 6 can be evenly arranged and placed on the mask plate 3 at a certain interval, so as to facilitate the fixing work between the support bars 6 and the mask plate 3 . After the support bar 6 is fixed on the mask plate 3, the support bar 6 is separated from the machine table 1, and the machine table 1 returns to the initial position, so as to carry out the work of transporting the support bar 6 next time.

The machine table 1 is provided with a suction pipe 10 and a plurality of adsorption grooves 9 arranged at intervals, which can absorb and move a whole set of support bars 6 that need to be fixedly connected with a mask plate 3 at one time. Wherein, each adsorption groove 9 is arranged on the lower surface of the machine table 1 for absorbing the support bar 6 , and is communicated with the exhaust pipe 10 . The suction pipe 10 is connected with an air pump, and the air pump pumps the space between the adsorption tank 9 and the support bar 6 into a vacuum state through the suction tube 10, so that the support bar 6 can be vacuum adsorbed in the adsorption tank 9, and the support bar 6 is vacuumed on the machine platform 1. 6 During the process of transporting to the position fixedly connected with the mask plate 3, ensure that the support bar 6 does not fall, etc., so as to avoid affecting the continuity of the assembly process; when the support bar 6 is placed and fixed on the mask plate 3 After reaching the corresponding position above, the air pump can refill the gas between the support bar 6 and the adsorption tank 9 through the exhaust pipe 10, so that the space between the support bar 6 and the adsorption tank 9 is out of the vacuum state, so that the support bar 6 can be released from the adsorption tank. 9, so that the machine 1 leaves the support bar 6, returns to the initial position, and waits for the next conveying work.

The setting of suction groove 9 is as shown in Figure 2 and Figure 3, in order to support bar 6 intervals and be fixed on the mask plate 3, the spacing between a plurality of adsorption grooves 9 is equal to being respectively fixed on the mask plate 3 The distance between the plurality of support bars 6 can effectively ensure the assembly quality between each mask plate 3 and the support bars 6 when the mask plates 3 are assembled in batches on a large scale.

In order to ensure the stability and smoothness of the adsorption effect of the adsorption tank 9 on the support bar 6, it is preferable that several air holes are evenly arranged on the groove bottom of each adsorption tank 9, and each air hole is passed through a plurality of small pipes in the inside of the machine 1. It communicates with the suction pipe 10, so that the adsorption tank 9 communicates with the suction pipe 10 through the air hole, so that the suction pipe 10 can control the vacuum adsorption and exhaust desorption between the adsorption tank 9 and the support bar 6 through the air pump.

The structure of the mask plate 3 is shown in Figure 4. The assembled mask plate 3 can be used in the subsequent UV curing process to effectively shield the Panel AA area and prevent the impact of ultraviolet light on the liquid crystal; Therefore, in order to effectively shield the Panel AA area of the LCD and prevent the impact of ultraviolet light on the liquid crystal, several shielding areas 4 arranged in arrays are arranged on the mask plate 3, and these shielding areas 4 correspond to the Panel AA area of the LCD. Set so that each shielding area 4 can effectively cover the Panel AA area of each LCD, completely cover the Panel AA area, and prevent ultraviolet light leakage from affecting the quality of the liquid crystal during the UV curing process.

The function of the support bar 6 is mainly to fix and support the mask plate 3. Due to the large size of the mask plate 3, in order to prevent the mask plate 3 from being bent due to its own gravity during use, it is necessary to pass the support bar 6 To support and fix the mask plate 3, so as to ensure the uniformity of the irradiation process, at the same time, because the support bar 6 cannot affect the irradiation of ultraviolet light in the subsequent UV curing process, it is required that the support bar 6 has good light transmittance, preferably The material of the support bar 6 is quartz, which can meet the requirement of supporting the mask plate 3 while ensuring its excellent light transmission performance.

In order to ensure the stability of the assembly process of the mask plate 3 and the support bar 6, a fixed plate 7 is also provided on the base 2, and the fixed plate 7 is preferably arranged around the mask plate 3 to position the mask plate 3 and prevent the mask from The plate 3 is shifted during the assembly process, thereby affecting the fixed position of the support bar 6 and further affecting the assembly quality of the mask plate 3 . During the assembly process, when the support bar 6 is fixed on the mask plate 3, its two ends are also fixed on the fixed plate 7 at the same time, and the fixed plate 7 can be moved by mechanical auxiliary equipment, which can drive the support bar 6 to move together , thereby driving the mask plate 3 to move together. In order to facilitate the moving of the assembled mask plate 3 with the support bar 6, it is preferable to be provided with a channel 8 for a manipulator capable of inserting mechanical auxiliary equipment in the fixed plate 7, and the manipulator can be inserted into the channel 8 to place the assembled mask The board 3 is lifted and moved together with the support bar 6, and enters the next process, so as to realize a complete assembly process of assembly line.

In order to facilitate the assembly and fixing of the mask plate 3 and the support bar 6, preferably a heating plate 5 is arranged between the machine base 2 and the mask plate 3, and the support bar 6 can be quickly fixed on the mask plate 3 through heating and curing. It is beneficial for the support bar 6 to be quickly fixed on the mask plate 3; the heating plate 5 is detachable, and can be installed and disassembled according to the needs of the specific mask plate assembly method.

The present invention also provides a method for assembling a mask, the assembling process of which is realized based on the above-mentioned mask assembling device, and the method for assembling the mask will be specifically described below in conjunction with three implementation modes.

Embodiment one

The method for assembling a mask plate provided in Embodiment 1 includes the following steps:

S1: Place the mask plate 3 on the machine base 2; in order to realize an automated assembly line, preferably, the mask plate 3 can be moved from the previous process and placed on the machine base 2 through mechanical transmission equipment, such as a conveyor belt and other mechanisms , and the mask plate 3 can be positioned by the fixing plate 7 of the device, so as to ensure the subsequent assembly quality.

S2: The machine 1 absorbs and drives the support bar 6 to move, and places the support bar 6 on the mask plate 3 correspondingly. In order to make the machine 1 more stable and drive the support bar 6 to move, it is preferable to use the above-mentioned mask plate The machine table 1 with vacuum adsorption function is provided on the assembly device. This machine table 1 with vacuum adsorption function can pump the adsorption grooves 9 arranged at intervals on it to a vacuum state through an air pump, so that the whole group The support bar 6 is stably adsorbed in the adsorption groove 9 at one time, and is driven by the machine 1 as a whole to move from the storage place to the position on the mask plate 3 that needs to be fixedly connected; and since the plurality of adsorption grooves 9 are fixed The arrangement at intervals makes the installation intervals of the support bars 6 on the mask boards 3 assembled in batches also fixed, which can effectively ensure the assembly quality.

S3: The support bar 6 is fixedly connected to the mask plate 3 through the auxiliary unit; the auxiliary unit in the first embodiment is an adhesive and a heating plate 5, and the heating plate 5 is detachably arranged between the base 2 and the mask plate 3 In between, the heating plate 5 is used to heat and cure the adhesive, and the support strip 6 is fixedly connected to the mask plate 3 through the adhesive.

When the support strip 6 is placed on the designated corresponding position of the mask plate 3, the adhesive will quickly wet the corresponding position area, and the adhesive can be quickly cured by heating the adhesive through the heating plate 5, so that the support strip 6 is quickly fixed on the designated position of the mask plate 3, and then realizes the fixed support of the support bar 6 to the mask plate 3; the adhesive is preferably coated on the side of the support bar 6 connected to the mask plate 3, wherein the adhesive requires At least the following two characteristics: 1. The adhesive is required to have strong bonding ability, especially for related substances such as glass substrates and quartz; 2. The thermal curing efficiency of the adhesive is required to be high, and it can pass through the Heating realizes high-efficiency curing, so as to improve the assembly efficiency of the mask plate 3 .

In the first embodiment, the adhesive is preferably a polyurethane adhesive, more preferably a translucent or transparent polyurethane adhesive, so as to avoid affecting the ultraviolet light transmittance and ensure the quality of the subsequent UV curing process.

S4: Separate the machine 1 from the support bar 6. Specifically in the first embodiment, after the assembly work is completed, the machine 1 with the vacuum adsorption function can fill the suction groove 9 with air, so that the machine The stage 1 and the support bar 6 can be easily disengaged, so that the assembly process of the mask plate 3 is complete and smooth, and then the assembled mask plate 3 is moved to the next process with the support bar 6 together, so as to repeat the new process from step S1 afterwards. Prepare for the assembly process of the mask plate 3, so as to realize the overall assembly line of the mask plate 3, which is suitable for assembling the mask plate 3 in large quantities.

Embodiment two

In the method for assembling the mask plate provided in the second embodiment, the contents of steps S1 , S2 and S4 are basically the same as those in the first embodiment, and the similarities will not be repeated here.

The auxiliary units in step S3 of the second embodiment are the adhesive and the heating plate 5 , wherein the structure of the heating plate 5 and the selection requirements of the adhesive are basically the same as those of the first embodiment, and the similarities will not be repeated here. The difference is that in the second embodiment, the adhesive is preferably an epoxy resin adhesive. Compared with other types of adhesives, the epoxy adhesive has the following advantages: (1) The epoxy resin contains a variety of Polar groups and highly active epoxy groups, so it has strong adhesion to various polar materials such as metals, glass, cement, wood, plastics, especially materials with high surface activity, and epoxy curing at the same time The cohesive strength of the material is also very large, so its bonding strength is very high; (2) When the epoxy resin is cured, there is basically no low-molecular volatile matter, and it is one of the varieties with the smallest curing shrinkage rate among thermosetting resins, and its adhesive layer (3) There are many varieties, and the adhesive can be quickly cured through reasonable and ingenious formula design, and has the required performance (such as high temperature resistance, low temperature resistance, high strength, high (flexibility, aging resistance, electrical conductivity, magnetic conductivity, thermal conductivity, etc.); (4) It has good compatibility and reactivity with various organic substances (monomers, resins, rubbers) and inorganic substances (such as fillers, etc.), and is easy to carry out Copolymerization, crosslinking, blending, filling and other modifications to improve the performance of the adhesive layer; (5) good corrosion resistance and dielectric properties, and can resist corrosion by acids, alkalis, salts, solvents and other media; (6) It has many origins, large output, simple preparation, and can be applied on a large scale.

However, the epoxy resin adhesive has color, in order to avoid the influence of the adhesive on the light transmission of ultraviolet light in the subsequent UV curing process, it is preferable to coat the glue on the shielding area 4 of the mask plate 3 to match Epoxy resin-based adhesives to avoid affecting the light transmittance of ultraviolet light.

Embodiment Three

In the mask assembly method provided in the second embodiment, the contents of steps S1, S2 and S4 are basically the same as those in the first embodiment, and the similarities will not be repeated here.

The difference lies in that the auxiliary unit in S3 of the third embodiment is: the support bars 6 and the mask plate 3 are respectively fed with currents for generating opposite charges or magnetism. The support bar 6 and the mask plate 3 are fixedly connected by electromagnetic adsorption. The connection principle is shown in FIG. It can be fixed and connected together very well. This kind of fixed connection is fast and simple. After the mask plate 3 is used, the support bar 6 can be easily disassembled from the mask plate 3, and the disassembly process is harmful to the mask plate. 3 has almost no loss, which greatly improves the reusability of the mask plate 3 .

In summary, the mask assembly device of the present invention is used to fixedly connect the support bar 6 to the mask plate 3, the machine base 2 is used to install the mask plate 3, and the machine table 1 is used to absorb and drive the support bar 6 to move to the mask plate 3; the mask plate assembly method of the present invention is based on the mask plate assembly device, which includes S1: placing the mask plate 3 on the machine base 2, S2: the machine table 1 drives the support bar 6 to move, And the support bar 6 is placed on the mask plate 3 correspondingly, S3: the support bar 6 is fixedly connected to the mask plate 3 through the auxiliary unit, S4: the machine 1 is separated from the support bar 6 . The mask plate assembly device of the present invention changes the assembly process of the mask plate 3 from manual production to automatic assembly, and forms an assembly line batch assembly production mode, which has the characteristics of low cost and high assembly efficiency, and can ensure that the mask plate 3 The assembly quality is very good, the fixing and dismounting of the support bar 6 is very convenient during assembly, and its bonding strength is effectively guaranteed by the setting of the auxiliary unit.

The embodiments of the present invention have been presented for purposes of illustration and description, but are not intended to be exhaustive or to limit the invention to the form disclosed. Many modifications and changes will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to better explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention and design various embodiments with various modifications as are suited to the particular use.

Claims (12)

1. a mask plate apparatus for assembling, it is characterized in that, comprise support (2) and the board (1) with the corresponding setting of described support (2), described support (2) is for mask plate (3) is installed, and described board (1) is for adsorbing and driving support bar (6) to move to described mask plate (3).

2. mask plate apparatus for assembling according to claim 1, it is characterized in that, described board (1) comprises exhaust tube (10) and spaced multiple adsorption tank (9), described adsorption tank (9) is for adsorbing described support bar (6), and described adsorption tank (9) is all communicated with described exhaust tube (10).

3. mask plate apparatus for assembling according to claim 2, is characterized in that, on described each adsorption tank (9), is evenly provided with several pores, and described adsorption tank (9) is communicated with described exhaust tube (10) by described pore.

4. mask plate apparatus for assembling according to claim 1, is characterized in that, dismountable heating plate (5) that is provided with also between described support (2) and mask plate (3).

5. mask plate apparatus for assembling according to claim 1, is characterized in that, also comprises fixed head (7), and described fixed head (7) is arranged on described mask plate (3) around, and the two ends of described support bar (6) are fixedly connected on described fixed head (7).

6. mask plate apparatus for assembling according to claim 5, is characterized in that, is provided with the passage (8) of the mechanical arm plug-in mounting for making assist in described fixed head (7).

7. a mask plate assemble method, is characterized in that, comprises the following steps:

S1: mask plate (3) is placed on support (2);

S2: board (1) adsorbs and drives support bar (6) mobile, and described support bar (6) correspondence is placed on described mask plate (3);

S3: described support bar (6) is fixedly connected on described mask plate (2) by auxiliary unit;

S4: described board (1) separates with described support bar (6).

8. mask plate assemble method according to claim 7, it is characterized in that, in described step S3, described auxiliary unit comprises adhesive and heating plate (5), described heating plate (5) is dismountable to be arranged between described support (2) and mask plate (3), described heating plate (5), for the described adhesive that is heating and curing, is fixedly connected with described support bar (6) by described adhesive with described mask plate (3).

9. mask plate assemble method according to claim 8, is characterized in that, described adhesive is polyurethanes adhesive.

10. mask plate assemble method according to claim 8, is characterized in that, described adhesive is epoxy resin adhesive.

11. mask plate assemble methods according to claim 10, is characterized in that, described mask plate (3) is provided with occlusion regions (4), scribble the glue that covers of setting corresponding to described adhesive on described occlusion regions (4).

12. mask plate assemble methods according to claim 8, it is characterized in that, in described step S3, described auxiliary unit, for to pass into respectively the electric current for generation of opposite charges or magnetic to described support bar (6) and mask plate (3), is adsorbed and is fixedly connected with by electromagnetism between described support bar (6) and mask plate (3).