CN103962347B - A kind of cleaning systems and method - Google Patents

Abstract

The invention discloses a cleaning system and method. The system includes: a first cleaning device, an optical detection device and a second cleaning device, wherein the first cleaning device is used to clean a mother board by means of gas cleaning; the optical detection device It is used to optically detect the mother board after gas cleaning, judge whether there is dust on the mother board and determine the position coordinates of the dust; the second cleaning device is used to clean the mother board according to the position coordinates of the dust determined by the optical detection device. Dust at the coordinates of the corresponding position on the board. By adopting the invention, the dust on the motherboard can be effectively removed, the occurrence of defective substrates can be reduced, and the yield rate of products can be improved.

Description

A cleaning system and method

technical field

The invention relates to dust cleaning technology, in particular to a cleaning system and method.

Background technique

In the field of liquid crystal display panel or flat panel manufacturing, the pattern on the master board is usually irradiated on the substrate coated with uniform photosensitive material by means of instant exposure of the pre-engraved master board under the exposure lamp, so that the light irradiated The properties of the photosensitive material change, and then the photosensitive material irradiated by light is washed away by chemicals, and finally the photosensitive material pattern is obtained on the substrate.

In practical applications, when the motherboard is moved to the exposure lamp, dust usually falls on the motherboard, resulting in a pattern of the dust on the substrate after exposure, resulting in defective substrates.

Contents of the invention

In view of this, the main purpose of the present invention is to provide a cleaning system and method to remove the dust on the motherboard, reduce the occurrence of defective substrates, and improve the yield of products.

In order to achieve the above object, technical solution of the present invention is achieved in that way:

The present invention provides a cleaning system, which includes: a first cleaning device, an optical detection device and a second cleaning device, wherein,

The first cleaning device is used to clean the motherboard by means of gas cleaning;

The optical detection device is used to optically detect the motherboard after gas cleaning, judge whether there is dust on the motherboard and determine the position coordinates of the dust;

The second cleaning device is configured to remove dust at corresponding position coordinates on the motherboard according to the position coordinates of dust determined by the optical detection device.

Preferably, the gas cleaning method is positive pressure air shower and/or negative pressure inhalation.

Preferably, the second cleaning device includes a second rail module, a first moving module, a second moving module and a cleaning module,

The second track module is fixed on the first track module of the transmission motherboard, the track transmission direction of the second track module is the same as that of the first track module, and the first mobile module is arranged on the second track On the module, the second mobile module is arranged on the first mobile module, and the cleaning module is arranged on the second mobile module.

Preferably, the cleaning module includes: a rotating motor, a lead screw, a pressure sensor, a rotating motor and a cleaning head,

The rotating motor drives the lead screw to rotate and lift, the pressure sensor is arranged at the lower end of the lead screw, the rotating motor is arranged at the lower end of the pressure sensor, and the rotating motor drives the cleaning head to rotate.

Preferably, the cleaning head is provided with a negative pressure cleaning hole.

Preferably, the shape of the cleaning head is a cone or a triangle.

The present invention also provides a cleaning method, the method comprising:

The first cleaning device cleans the motherboard by means of gas cleaning;

The optical detection device performs optical detection on the motherboard after gas cleaning, judges whether there is dust on the motherboard and determines the position coordinates of the dust;

The second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust.

Preferably, the gas cleaning method is positive pressure air shower and/or negative pressure inhalation.

Preferably, the optical detection of the motherboard after gas cleaning, judging whether there is dust on the motherboard and determining the position coordinates of the dust include:

uniformly optically scan the gas-cleaned motherboard, and receive reflected light irradiated on the motherboard;

Analyzing the received reflected light, and judging whether there is dust on the motherboard according to a preset judgment standard, and calculating the position of the dust on the motherboard by scanning when it is judged that there is dust on the motherboard coordinate.

Preferably, the second cleaning device includes a second rail module, a first moving module, a second moving module and a cleaning module;

The second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust, including:

The second cleaning device controls the second rail module, the first moving module, and the second moving module according to the position coordinates provided by the optical detection device, so that the cleaning module is aligned with the dust on the motherboard;

The rotating motor in the cleaning module drives the lead screw to rotate up and down, so that the cleaning head contacts the dust on the motherboard, and the pressure sensor detects the pressure between the cleaning head and the motherboard, and according to The preset pressure value controls the descending degree of the cleaning head;

When the pressure between the cleaning head and the motherboard reaches a preset pressure value, the rotating motor drives the cleaning head to rotate to adhere the dust on the motherboard to the cleaning head.

Preferably, the cleaning head is provided with a negative pressure cleaning hole, and the method further includes:

When the cleaning head rotates to clean the motherboard, the negative pressure cleaning hole on the cleaning head sucks the dust on the motherboard into the negative pressure pipeline through negative pressure suction.

In the cleaning system and method provided by the present invention, the first cleaning device cleans the motherboard by means of gas cleaning; the optical detection device performs optical detection on the motherboard after gas cleaning to determine whether there is Dust and determining the position coordinates of the dust; the second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust. Through the invention, the dust on the motherboard can be effectively removed, thereby reducing the occurrence of defective substrates and improving the yield rate of products.

Description of drawings

FIG. 1 is a schematic top view of a cleaning system according to an embodiment of the present invention;

Fig. 2 is the main structure schematic diagram of the cleaning module of the embodiment of the present invention;

Fig. 3 is a front structural schematic view of a cleaning system according to an embodiment of the present invention;

Fig. 4 is the structural representation of the cleaning head of the embodiment of the present invention;

Fig. 5 is a schematic flowchart of a cleaning method according to an embodiment of the present invention.

Explanation of reference signs:

110, 120 first track module; 210, 220 second track module; 1 motherboard; 2 motherboard frame; 3 cylinder; 4 first cleaning device; 5 fixed module; 6 gas input end; 7 optical detection device; 1. Mobile module; 9. Second mobile module; 10. First position sensor; 11. Second position sensor; 12. Electromagnetic control valve; 13. Negative pressure gas input end; 14. Rotary motor; Motor; 18 cleaning head; 19 dust; 20 second cleaning device; 21 air knife; 22 negative pressure cleaning hole.

detailed description

The technical solutions of the present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.

A schematic structural diagram of a cleaning system provided by an embodiment of the present invention. As shown in FIG. Moving at a constant speed along the first rail modules 110 and 120, 110 and 120 form a group of rail modules, the first rail modules 110 and 110 provide moving rails and supports for the motherboard frame 2; the electromagnetic control valve 12 controls the on-off of the gas, when the electromagnetic When the control valve 12 is opened, it is negative pressure gas input, which controls the motherboard frame 2 to move in one direction along the first track modules 110 and 120; when the electromagnetic control valve 12 is closed, it is positive pressure gas input, and controls the motherboard frame 2 to move along The first rail modules 110 and 120 move in opposite directions, that is, when the electromagnetic control valve 12 is opened, the motherboard frame 2 moves along the first rail module 110 and 120, and when the electromagnetic control valve 12 is closed, the motherboard frame 2 moves along the first rail module. 110 and 120 move in opposite directions. The motherboard 1 in the embodiment of the present invention can be a Mask plate for mask (Mask) process. Of course, the embodiment of the present invention is not limited to the cleaning of the Mask plate. In practical applications, any cleaning that can be applied to the embodiment of the present invention The motherboard 1 of the system should all belong to the protection scope of the embodiment of the present invention.

The first cleaning device 4 is provided on the first track modules 110 and 120, the purpose of which is to remove the slight floating dust on the motherboard 1, the first cleaning device 4 can clean the motherboard 1 by means of gas cleaning, The gas cleaning method can be a positive pressure air shower or a negative pressure suction method, and of course, these two methods can also be used in combination; the first cleaning device 4 is provided with a fixed module 5, and the fixed module 5 is used for the second cleaning device 4. A cleaning device 4 is fixedly installed on the first track modules 110 and 120. In addition, the first cleaning device 4 is provided with a gas input port 6 for inputting gas.

A first position sensor 10 is also provided on the first track modules 110 and 120. When the motherboard frame 2 moves to the first position sensor 10, the motherboard frame 2 is controlled to stop moving under the action of the cylinder 3, and the first The cleaning device 4 can perform gas cleaning on the motherboard 1 ; the position of the first position sensor 10 can be set according to actual needs, so as to control the best cleaning position of the first cleaning device 4 relative to the motherboard frame 2 .

An optical detection device 7 is also provided on the first track modules 110 and 120. The optical detection device 7 is used for optical detection of the motherboard 1 after gas cleaning, to determine whether there is dust on the motherboard 1 and to determine the position coordinates of the dust.

A second cleaning device is also provided on the first track modules 110 and 120, for removing the dust at the corresponding position coordinates on the motherboard 1 according to the position coordinates of the dust determined by the optical detection device 7; the second cleaning device includes The second rail modules 210 and 220, the first mobile module 8, the second mobile module 9 and the cleaning module, the second rail modules 210 and 220 are correspondingly fixed on the first rail modules 110 and 120 of the transmission motherboard 1, forming a second The horizontal coordinate system (or vertical coordinate system) of the cleaning device, the second track modules 210 and 220 are in the same track transport direction as the first track modules 110 and 120, and the first mobile module 8 is arranged on the second track modules 210 and 220, The longitudinal coordinate system (or transverse coordinate system) constituting the second cleaning device, the first moving module 8 can move 210 and 220 along the second track module driven by the servo motor, and the second moving module 9 is arranged on the first moving module 8 Above, the second moving module 9 can move along the slideway on the first moving module 8 driven by the servo motor, and the cleaning module is arranged on the second moving module 9 and can move together with the second moving module 9 . Of course, the movement of the first moving module 8 and the second moving module 9 is not limited to being driven by a servo motor, and they can also share the same device as the motherboard moving method or other driving methods. The position information of the horizontal and vertical movement of the second cleaning device can be provided by the optical detection device 7, which is calculated by the optical detection device 7 according to the position coordinates of the dust; The position coordinates of the provided dust can be calculated by itself to obtain the position information that needs to be moved horizontally and vertically.

Wherein, the structural diagram of cleaning module is shown in Figure 2, and cleaning module mainly comprises: rotating motor 14, lead screw 15, pressure sensor 16, rotating motor 17 and cleaning head 18, and rotating motor 14 drives lead screw 15 to rotate up and down, and screw The lower end of the bar 15 is provided with a pressure sensor 16, and the lower end of the pressure sensor 16 is provided with a rotary motor 17, and the rotary motor 17 drives the cleaning head 18 to rotate. The second cleaning device can control the second track modules 210 and 220, the first moving module 8, and the second moving module 9 according to the position coordinates provided by the optical detection device 7, so that the cleaning module is aimed at the dust 19 on the motherboard 1; cleaning The rotating motor 14 in the module drives the screw 15 to rotate, so that the cleaning head 18 approaches and moves away from the motherboard 1. When the cleaning head 18 touches the dust 19 on the motherboard 1, the pressure sensor 16 detects the distance between the cleaning head 18 and the motherboard 1. and control the descending degree of the cleaning head 18 according to the preset pressure value; Dust 19 on the board 1 adheres to the cleaning head 18 . Subsequently, the rotating motor 17 reverses and resets to complete the removal of the dust 19 .

A second position sensor 11 is also provided on the first track modules 110 and 120. When the motherboard frame 2 moves to the second position sensor 11, under the action of the cylinder 3, the motherboard frame 2 is controlled to stop moving. The second cleaning device can remove the dust on the motherboard 1; the position of the second position sensor 11 can be set according to actual needs, so as to control the best cleaning position of the second cleaning device relative to the motherboard frame 2 .

In addition, the shape and size of the cleaning head 18 can be set according to actual needs. In the liquid crystal display industry, because the dust particles are small, it is better to use a cone or a triangle for the cleaning head 18, which is convenient for better removal of dust particles.

As shown in Fig. 3 again, Fig. 3 is a front structural schematic view of a cleaning system according to an embodiment of the present invention. From Fig. 3, it can be seen that the first cleaning device 4, the optical detection device 7 and the second cleaning device 20 The relative positional relationship, wherein, the first cleaning device 4 can be installed on the first track module 110 and 120 at the same time, from the upper and lower sides of the motherboard 1 to clean the motherboard 1, of course, it can also be used according to actual needs Using the single-top installation method or the single-bottom installation method, only one side of the motherboard 1 is cleaned. Correspondingly, the second cleaning device 20 can also be installed on the top and bottom of the first track modules 110 and 120 at the same time, from the motherboard 1 The upper and lower sides of 1 clean the motherboard 1, of course, the single-up installation or the single-bottom installation can also be adopted according to actual needs; the angle between the air knife 21 of the first cleaning device 4 and the motherboard 1 can be adjusted according to actual needs. It needs to be set, and an angle of 30 degrees is better in practical applications.

Preferably, as shown in Figure 4, Figure 4 is a schematic structural view of a preferred cleaning head of the embodiment of the present invention, the cleaning head 18 can also be provided with a negative pressure cleaning hole 22, and the cleaning head 18 rotates the cleaning mother When cleaning the motherboard 1, the negative pressure cleaning hole 22 on the cleaning head 18 sucks the dust on the motherboard 1 into the negative pressure pipeline through negative pressure suction. In this way, a better cleaning effect can be achieved.

Based on the cleaning system of the above-mentioned embodiment of the present invention, the embodiment of the present invention also provides a cleaning method, as shown in FIG. 5, the method mainly includes:

Step 501 , the first cleaning device cleans the motherboard by means of gas cleaning.

The way of gas cleaning is positive pressure air shower and/or negative pressure inhalation.

Step 502 , the optical detection device performs optical detection on the motherboard after gas cleaning, judges whether there is dust on the motherboard and determines the position coordinates of the dust.

Specifically, uniform optical scanning is performed on the motherboard after gas cleaning, and the reflected light irradiated on the motherboard is received through an internal optical receiver; the received reflected light is analyzed, and according to the preset judgment standard (with Dust reflected light standard, dust-free reflected light standard) to judge whether there is dust on the motherboard, and when it is judged that there is dust on the motherboard, calculate the position coordinates of the dust on the motherboard by scanning.

Step 503, the second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust.

The second cleaning device can calculate the moving position of its horizontal coordinate and longitudinal coordinate according to the position coordinates provided by the optical detection device, and move accordingly according to the calculated moving position; After the position information of the horizontal and vertical movement of the second cleaning device is calculated, the position information is provided to the second cleaning device, and the second cleaning device moves accordingly according to the position information.

The second cleaning device comprises a second track module, a first mobile module, a second mobile module and a cleaning module, the second track module is fixed on the first track module of the transfer motherboard, the second track module is connected to the first track module The transmission direction of the track is the same, the first moving module is arranged on the second track module, the second moving module is arranged on the first moving module, and the cleaning module is arranged on the second moving module; the cleaning module includes: a rotating motor, a lead screw, A pressure sensor, a rotating motor and a cleaning head, the rotating motor is connected to the lead screw, the pressure sensor is arranged at the lower end of the lead screw, the rotating motor is arranged at the lower end of the pressure sensor, and the rotating motor is connected to the cleaning head;

Specifically, the second cleaning device controls the second track module, the first moving module, and the second moving module according to the position coordinates provided by the optical detection device, so that the cleaning module is aligned with the dust on the motherboard;

The rotating motor in the cleaning module drives the lead screw to rotate, so that the cleaning head contacts the dust on the motherboard, and the pressure sensor detects the pressure between the cleaning head and the motherboard, and controls the descending degree of the cleaning head according to the preset pressure value;

When the pressure between the cleaning head and the motherboard reaches the preset pressure value, the rotating motor drives the cleaning head to rotate, and the dust on the motherboard is adhered to the cleaning head.

Preferably, the cleaning head is provided with a negative pressure cleaning hole, and the method further includes: when the cleaning head rotates to clean the motherboard, the negative pressure cleaning hole on the cleaning head sucks the dust on the motherboard into negative pressure through negative pressure suction. in the pressure pipe.

In addition, as another preferred embodiment of the present invention, after the optical detection device detects dust and the cleaning by the second cleaning device is completed, the motherboard can be returned to the initial position to perform the above step 501 again. ~503 operation until the optical detection device detects that there is no dust on the motherboard.

To sum up, in the embodiment of the present invention, the first cleaning device first cleans the motherboard by using gas cleaning; the optical detection device performs optical detection on the motherboard after gas cleaning to determine whether there is dust on the motherboard and determine whether there is dust on the motherboard. The position coordinates of the dust; the second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust. Through the embodiments of the present invention, the dust on the motherboard can be effectively removed, thereby reducing the occurrence of defective substrates and improving the yield rate of products. In addition, the embodiments of the present invention are not only applicable to the cleaning of Mask boards in the liquid crystal display field, and any motherboards that can be applied to the cleaning system of the embodiments of the present invention in practical applications should fall within the scope of protection of the embodiments of the present invention.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (8)

1. A cleaning system, characterized in that the system comprises: a first cleaning device, an optical detection device and a second cleaning device, wherein, The first cleaning device is used to clean the motherboard by means of gas cleaning; The optical detection device is used to optically detect the motherboard after gas cleaning, judge whether there is dust on the motherboard and determine the position coordinates of the dust; The second cleaning device is used to remove the dust at the corresponding position coordinates on the motherboard according to the position coordinates of the dust determined by the optical detection device; The second cleaning device includes a cleaning module, wherein the cleaning module includes: a rotating motor, a lead screw, a pressure sensor, a rotating motor and a cleaning head, The rotating motor drives the lead screw to rotate and lift, the lower end of the lead screw is provided with the pressure sensor, the lower end of the pressure sensor is provided with the rotating motor, and the rotating motor drives the cleaning head to rotate; The second cleaning device also includes a second track module, a first moving module, and a second moving module, The second track module is fixed on the first track module of the transmission motherboard, the track transmission direction of the second track module is the same as that of the first track module, and the first mobile module is arranged on the second track On the module, the second mobile module is arranged on the first mobile module, and the cleaning module is arranged on the second mobile module. 2. The cleaning system according to claim 1, wherein the gas cleaning method is a positive pressure air shower method and/or a negative pressure suction method. 3. The cleaning system according to claim 1, wherein a negative pressure cleaning hole is provided on the cleaning head. 4. The cleaning system according to claim 1, wherein the shape of the cleaning head is a cone or a triangle. 5. A cleaning method, characterized in that the method comprises: The first cleaning device cleans the motherboard by means of gas cleaning; The optical detection device performs optical detection on the motherboard after gas cleaning, judges whether there is dust on the motherboard and determines the position coordinates of the dust; The second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust; The second cleaning device includes a cleaning module, wherein the cleaning module includes: a rotating motor, a lead screw, a pressure sensor, a rotating motor and a cleaning head, The rotating motor drives the lead screw to rotate and lift, the lower end of the lead screw is provided with the pressure sensor, the lower end of the pressure sensor is provided with the rotating motor, and the rotating motor drives the cleaning head to rotate; The second cleaning device also includes a second track module, a first moving module, and a second moving module; The second cleaning device removes the dust at the corresponding position coordinates on the motherboard according to the determined position coordinates of the dust, including: The second cleaning device controls the second rail module, the first moving module, and the second moving module according to the position coordinates provided by the optical detection device, so that the cleaning module is aligned with the dust on the motherboard; The rotating motor in the cleaning module drives the lead screw to rotate up and down, so that the cleaning head contacts the dust on the motherboard, and the pressure sensor detects the pressure between the cleaning head and the motherboard, and according to The preset pressure value controls the descending degree of the cleaning head; When the pressure between the cleaning head and the motherboard reaches a preset pressure value, the rotating motor drives the cleaning head to rotate to adhere the dust on the motherboard to the cleaning head. 6 . The cleaning method according to claim 5 , wherein the gas cleaning method is a positive pressure air shower method and/or a negative pressure suction method. 7. The cleaning method according to claim 5, wherein the optical detection of the motherboard after gas cleaning, judging whether there is dust on the motherboard and determining the position coordinates of the dust include: performing uniform optical scanning on the gas-cleaned motherboard, and receiving reflected light irradiated on the motherboard; Analyzing the received reflected light, and judging whether there is dust on the motherboard according to a preset judgment standard, and calculating the position of the dust on the motherboard by scanning when it is judged that there is dust on the motherboard coordinate. 8. The cleaning method according to claim 5, wherein the cleaning head is provided with a negative pressure cleaning hole, and the method further comprises: When the cleaning head rotates to clean the motherboard, the negative pressure cleaning hole on the cleaning head sucks the dust on the motherboard into the negative pressure pipeline through negative pressure suction.