CN114001645B - Three-wavelength optical fiber point differential confocal microscopic detection method and device - Google Patents
Three-wavelength optical fiber point differential confocal microscopic detection method and device Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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- G—PHYSICS
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Abstract
The invention belongs to the technical field of optical imaging and detection, and discloses a three-wavelength optical fiber point differential confocal microscopic detection method and device, wherein the device comprises a three-wavelength light source, an optical fiber coupler, a dispersion objective lens and a detection module; the three-wavelength light source emits three illumination light beams with different wavelengths, and the illumination light beams are incident to the dispersion objective lens after passing through the optical fiber coupler; the dispersion objective lens is used for focusing the light of each wavelength at different positions on the optical axis of the dispersion objective lens to form a measuring beam to irradiate on the surface of a measured sample; the measuring light beam reflected from the surface of the measured sample returns to the optical fiber coupler along the original light path after passing through the dispersion objective lens, and is incident to the detection module after passing through the optical fiber coupler, so as to obtain confocal response intensity values of the illuminating light beam under three different wavelengths, wherein the confocal response intensity values are used for calculating and obtaining displacement information of the surface of the measured sample. The invention has the advantages of high signal-to-noise ratio, high measuring speed, simple structure, simple assembly and adjustment, and the like.
Description
Technical Field
The invention belongs to the technical field of optical imaging and detection, and particularly relates to a three-wavelength optical fiber point differential confocal microscopic detection method and device, which can be used for high-speed and high-precision measurement of the surface morphology of various micro-nano precise samples such as integrated circuits, MEMS devices, micro-mirror arrays, micro-fluidic devices and the like.
Background
The confocal microscope is invented by American Marvin Minsky in 1957, and the basic principle is that a point light source, an object and a point detector are arranged at the conjugate positions of each other, and the conjugate design ensures that the confocal microscope has axial chromatography capability and can meet the surface topography measurement of various micro-nano structures. However, in the process of realizing axial chromatography measurement by using a traditional confocal microscope, a motion device such as a motor or piezoelectric ceramic is required to be controlled to accurately move a microscope objective or a measured sample along the optical axis direction of the objective, confocal response intensities of the motion device at different displacement positions are acquired by a detector, so that a confocal response intensity curve of the confocal microscope is obtained, and the acquired confocal response intensity curve data is subjected to operation treatments such as peak extraction and the like to obtain the morphology information of the surface of the measured sample. However, the axial scanning speed and the accuracy of the mechanical device are low, so that the confocal microscope is slow in measurement speed and limited in measurement accuracy.
In order to improve the measurement speed and measurement precision of the traditional confocal microscope, the invention patent CN 109307481A discloses a high-speed sensing confocal microscopic measurement method, wherein a motion device is precisely controlled to move at larger sampling intervals, the confocal response intensities of the motion device at different displacement positions are obtained by a detector, and the surface morphology of a measured sample is rapidly and accurately obtained by carrying out differential treatment on intensity values at two sides of the maximum intensity. Although the above method can significantly reduce the number of axial scans of the moving device, several axial scans are still required, limiting further improvements in measurement speed and measurement accuracy. The document Locally adaptive thresholding centroid localization in confocal microscopy published on Optics Letters proposes a variable threshold peak extraction algorithm, which can perform high-precision processing on confocal response intensity curve data at a large sampling interval, and remarkably improves confocal microscopic measurement speed and precision. However, the above method is similar to the problem of CN 109307481A that a precise running device scan is still required, and the confocal microscopy measurement speed and accuracy cannot be further improved. The document Real-time laser differential confocal microscopy without sample reflectivity effects published on Optics Express discloses that the surface morphology of a sample to be measured is obtained rapidly and accurately by using two point detectors, wherein one point detector is placed at a tiny interval before the conjugation position of a point light source, and the other point detector is placed at a tiny interval equal to the conjugation position of the point light source, and by performing differential operation on confocal response curve intensity values acquired by the two point detectors. However, when constructing a confocal microscopy system, the above method suffers from the following drawbacks: the first, the single point detector and the light path of the point light source conjugate are more complex, and the design of the double point detector in the method can make the light path adjustment more complex; the displacement bias of the two point detectors along the optical axis direction of the measuring beam needs to be controlled at the micron level, and extremely high requirements are set for the machining precision of the mechanical assembly; thirdly, the measuring range of the method is limited by the depth of field of the microscope objective, and can only be maintained at about micrometers to tens of micrometers, so that the morphology measuring requirement of the longitudinal wide-range complex curved micro-nano structure cannot be met.
Disclosure of Invention
The invention overcomes the defects existing in the prior art, and solves the technical problems that: the three-wavelength optical fiber point differential confocal microscopic detection method and device are provided, so that the adjustment and assembly difficulty of the device is reduced, and the measurement speed and the measurement precision are improved.
In order to solve the technical problems, the invention adopts the following technical scheme: the three-wavelength optical fiber point differential confocal microscopic detection device comprises: the device comprises a three-wavelength light source, an optical fiber coupler, a dispersion objective lens and a detection module;
the three-wavelength light source is used for emitting illumination light beams with three different wavelengths, the output end of the three-wavelength light source is connected with the input end of the optical fiber coupler through an illumination end optical fiber, and the illumination light beams emitted by the three-wavelength light source are incident to the dispersion objective lens after passing through the optical fiber coupler; the dispersion objective lens has different focal lengths for light with different wavelengths, and is used for focusing the light with different wavelengths at different positions on the optical axis of the dispersion objective lens to form a measuring beam to irradiate on the surface of a sample to be measured; the measuring beam reflected from the surface of the measured sample returns to the optical fiber coupler along the original optical path after passing through the dispersion objective lens, and is output by the optical fiber coupler and then enters the detection module, the detection module is used for measuring and obtaining single-fiber confocal response intensity values of the illuminating beam under three different wavelengths, and the single-fiber confocal response intensity values are obtainedI 1 、I 2 、I 3 And the displacement information of the surface of the measured sample is obtained through calculation.
The detection module comprises a wavelength light splitting device and a detector;
the wavelength splitting device is used for transmitting different wavelengths in the measuring beam to different detection areas of the detector, and the light intensity values obtained through the different detection areas of the detector are single optical fiber sharing of the illuminating beam under three different wavelengthsIntensity value of focal responseI 1 、I 2 、I 3 。
The wavelength splitting device includes: the device comprises a spherical reflector, a grating and a spherical focusing mirror, wherein the grating and the spherical focusing mirror are respectively arranged on two sides of the spherical reflector, a measuring light beam reflected from the surface of a measured sample sequentially passes through a dispersion objective lens, an optical fiber coupler and a detection end optical fiber and then enters the spherical reflector, then enters the grating after being reflected by the spherical reflector, illumination light beams with various wavelengths are separated after being reflected by the grating, and then enters different detection areas of a detector after being reflected by the spherical focusing mirror.
The detection module comprises a collimating mirror, a first dichroic spectroscope, a second dichroic spectroscope and three detection units; the collimating lens is used for collimating the measuring light beams output from the optical fiber at the detection end, the collimated light beams sequentially pass through the first dichroic spectroscope and the second dichroic spectroscope and then divide the measuring light beams with three wavelengths, and the three detection units are respectively used for detecting the measuring light beams with one wavelength;
or the detection module comprises a collimating mirror, a first light splitting unit, a second light splitting unit, three narrow-band filters and three detection units; the collimating lens is used for collimating the measuring light beams output from the optical fibers at the detection end, the collimated light beams sequentially pass through the first light splitting unit and the second light splitting unit and then are split into three light beams, each light beam is changed into a single-wavelength light beam after passing through a narrow-band filter, the three single-wavelength light beams are respectively incident to one of the detection units, and the three detection units are respectively used for detecting the measuring light beams with one wavelength;
or the detection module comprises a wavelength division multiplexer and three detection units;
alternatively, the detection module is a spectrometer.
The three-wavelength optical fiber point differential confocal microscopic detection device also comprises a microprocessor and a time division driving circuit, wherein the microprocessor is used for controlling the time division driving circuit to generate periodic pulse signals, the rising edge of the pulse signals excites the driving circuit to sequentially supply power to sub-light source modules with different wavelengths in the three-wavelength light source, and three single-wavelength illumination light beams with different wavelengths are sequentially generated at different moments;
the detection module is a single detector.
The dispersion objective lens comprises an achromatic lens, a concave lens, a first convex lens, a second convex lens and a third convex lens which are coaxially arranged in sequence;
the three-wavelength light source comprises a first single-wavelength optical fiber light source, a second single-wavelength optical fiber light source, a third single-wavelength optical fiber light source and an optical fiber beam combiner, and the output ends of the first single-wavelength optical fiber light source, the second single-wavelength optical fiber light source and the third single-wavelength optical fiber light source are connected with the optical fiber beam combiner.
The three-wavelength optical fiber point differential confocal microscopic detection device also comprises a pushing structure, wherein the pushing structure is used for moving the tested sample along the direction perpendicular to the optical axis of the measuring beam;
alternatively, the propulsion mechanism is used to move the detection device.
The invention also provides a three-wavelength optical fiber point differential confocal microscopic detection method, which is realized by adopting the three-wavelength optical fiber point differential confocal microscopic detection device and comprises the following steps:
s1, calibrating: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis direction of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis direction of the measuring beam, and calibrating the sample at the wavelength under each displacement valueλ 1 、λ 2 、λ 3 The confocal response intensity value under the condition is subjected to differential processing to obtain a first differential confocal response value and a second differential confocal response value; constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and realizing the calibration of the relation between the first and second differential confocal response values and the displacement;
s2, measuring: the sample to be measured is arranged on the optical axis of the measuring beam, and the wavelength of the sample to be measured is measured and recordedλ 1 、λ 2 、λ 3 The confocal response intensity values below, then the arbitrary phasePerforming differential processing on confocal response intensity values under adjacent wavelengths to obtain first and second differential confocal response values; obtaining the displacement of the measured sample according to the calibration relation between the first and second differential confocal response values and the displacement;
s3, moving the measured sample along the direction perpendicular to the optical axis of the measuring beam, and repeating the step S2 to obtain displacement information of the measured sample at different positions on the surface of the measured sample along the optical axis of the measuring beam, so as to obtain the morphology information of the measured sample.
The calculation formula of the first and second differential confocal response values is as follows:
dI 21 =(I 2 –I 1 )/(I 2 +I 1 )，dI 32 =(I 3 –I 2 )/(I 3 +I 2 )；
or dI 21 =(I 2 –I 1 )，dI 32 =(I 3 –I 2 )；
Wherein dI 21 And dI 32 Representing a first differential response value and a second differential response value respectively,I 1 、I 2 、I 3 respectively represent the wavelength of the measuring deviceλ 1 、λ 2 、λ 3 The following single fiber confocal response intensity values.
The specific steps of the step S3 are as follows:
moving the measured sample in one dimension along the direction perpendicular to the optical axis of the measuring beam, and repeating the step S2 to obtain displacement information of the measured sample at different positions on the surface of the measured sample along the direction of the optical axis of the measuring beam, thereby obtaining the profile and roughness information of the measured sample;
or is:
and (2) two-dimensionally moving the measured sample along the direction perpendicular to the optical axis of the measuring beam, and repeating the step (S2) to obtain displacement information of different positions on the surface of the measured sample along the optical axis direction of the measuring beam, thereby obtaining the three-dimensional morphology information of the measured sample.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention provides a three-wavelength optical fiber point differential confocal microscopic detection device and a method, which can realize the measurement of a sample without axial mechanical scanning and have the advantages of simple structure and the like
2. According to the three-wavelength optical fiber point differential confocal microscopic measurement technology, a linear region with a larger slope in a confocal response curve is used for replacing a vertex region with a zero slope in the traditional confocal to detect displacement information, so that the sensitivity and the measurement precision are improved obviously;
3. the invention only needs a common photoelectric detector to measure the illumination wavelengthλ 1 、λ 2 、λ 3 The single optical fiber confocal response intensity value signal has the advantages of high signal-to-noise ratio, high measurement speed and the like;
4. the invention uses the fiber end of the fiber device as the fiber illumination pinhole and the fiber detection pinhole to respectively emit illumination light beams and collect the measuring light beams reflected by the sample, can directly realize self-alignment confocal, does not need optical path adjustment, and has the advantages of simple structure and the like.
Drawings
FIG. 1 is a schematic diagram of a three-wavelength optical fiber point differential confocal microscopic detection device provided in embodiment 1 of the present invention;
FIG. 2 is a view showing the construction of an optical path of a dispersion objective lens in embodiment 1 of the present invention;
FIG. 3 is a schematic view of a wavelength division multiplexing device and a detector in embodiment 2 of the present invention;
FIG. 4 is a schematic diagram of a wavelength division multiplexing device and a detector in embodiment 3 of the present invention;
FIG. 5 is a schematic diagram of a three-wavelength optical fiber point differential confocal microscopic detection device according to embodiment 4 of the present invention;
FIG. 6 is a schematic diagram of a three-wavelength optical fiber point differential confocal microscopic detection device according to embodiment 5 of the present invention;
FIG. 7 is a graph showing the relationship between the confocal response intensity value of single fiber and the displacement of the sample at different wavelengths in the three-wavelength optical fiber point differential confocal microscopic detection method according to the embodiment 6 of the present invention;
FIG. 8 is a plot of the adjacent wavelength differential confocal response versus sample displacement for inventive example 6;
wherein: 1-three wavelength light source, 101-first single wavelength optical fiber light source, 102-second single wavelength optical fiber light source, 103-third single wavelength optical fiber light source, 104-optical fiber combiner, 2-optical fiber coupler, 201-illumination end optical fiber, 202-coupling unit, 203-public end optical fiber, 204-detection end optical fiber, 3-dispersion objective lens, 301-achromatic lens, 302-concave lens, 303 first convex lens, 304-second convex lens, 305-third convex lens, 4-sample to be measured, 5-wavelength spectroscopic device, 501-spherical mirror, 502-grating, 503-spherical focusing mirror, 504-collimating mirror, 505-first dichroic spectroscope, 506-second dichroic spectroscope, 507-first spectroscope, 508-second dichroic mirror, 509-narrowband filter, 512-wavelength multiplexer, 513-time division driving circuit, 6-detector, 601-detection unit, 604-optical fiber detection unit, 7-microprocessor.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments; all other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
As shown in fig. 1, embodiment 1 of the present invention provides a three-wavelength optical fiber point differential confocal microscopic detection device, which includes: a three-wavelength light source 1, an optical fiber coupler 2, a dispersion objective lens 3 and a detection module. Specifically, in the present embodiment, the optical fiber coupler 2 includes an illumination-side optical fiber 201, a coupling unit 202, a common-side optical fiber 203, and a detection-side optical fiber 204.
The three-wavelength light source 1 is configured to emit illumination light beams having three different wavelengths, an output end of the three-wavelength light source 1 is connected to an input end of the coupling unit 202 through an illumination-end optical fiber 201,the three wavelengths about 1 emit illumination light beams to enter the dispersion objective 3 after passing through the illumination end optical fiber 201, the coupling unit 202 and the public end optical fiber 203; the dispersion objective lens 3 has different focal lengths for light with different wavelengths, and is used for focusing the light with different wavelengths at different positions on the optical axis of the dispersion objective lens 3 to form a measuring beam to irradiate on the surface of the measured sample 4; the measuring beam reflected from the surface of the measured sample 4 returns to the common end optical fiber 203 and the coupling unit 202 along the original optical path after passing through the dispersion objective 3, enters the detecting end optical fiber 204 after passing through the coupling unit 202, enters the detecting module after being output by the detecting end optical fiber 204, and the detecting module measures and obtains the single-fiber confocal response intensity value of the illuminating beam under three different wavelengths, wherein the single-fiber confocal response intensity valueI 1 、I 2 、I 3 For calculating displacement information of the surface of the sample 4 to be measured.
Specifically, in this embodiment, the detection module includes a wavelength splitting device 5 and a detector 6. The measuring light beams output by the optical fiber 204 at the detection end are incident to the wavelength splitting device 5, after passing through the wavelength splitting device 5, the measuring light beams with three wavelengths are respectively incident to different detection areas of the detector 6, and the measuring light beams are measured by the detector 6 to obtain single-fiber confocal response intensity values of the measuring device under three different wavelengths. That is, in this embodiment, the wavelength-splitting device 5 is configured to send light with different wavelengths in the measuring beam to different detection areas of the detector 6, and the light intensity values obtained by the different detection areas of the detector 6 are the light intensity values of the measured sample at the wavelengths respectivelyλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 。
Further, in this embodiment, as shown in fig. 1, the wavelength splitting device 5 includes: the device comprises a spherical reflecting mirror 501, a grating 502 and a spherical focusing mirror 503, wherein the grating 502 and the spherical focusing mirror 503 are respectively arranged at two sides of the spherical reflecting mirror 701, and measuring light beams reflected from the surface of a measured sample 4 sequentially pass through a dispersion objective lens 3, an optical fiber coupler 2 and a detection end optical fiber 204 and then are output and are incident on the spherical reflecting mirror 501, then are reflected by the spherical reflecting mirror 501 and are incident on the grating 502, illumination light beams with various wavelengths are separated after being reflected by the grating 502, and then are reflected by the spherical focusing mirror 503 and are incident on different detection areas of a detector 6.
Further, as shown in fig. 1, the three-wavelength optical fiber point differential confocal microscopic detection device of the present embodiment further includes a microprocessor 7, where in the present embodiment, the microprocessor 7 is configured to receive detection signals of the detector, that is, the detected samples are respectively at wavelengthsλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 And according to the confocal response intensity value of the single optical fiberI 1 、I 2 、I 3 And calculating to obtain displacement information of the surface of the measured sample 4.
Further, as shown in fig. 2, in this embodiment, the dispersive objective 3 includes an achromatic lens 301 (focal length 23mm, clear aperture 5.2 mm), a concave lens 302 (focal length-14 mm, clear aperture 15 mm), a first convex lens 303 (focal length 23.8mm, clear aperture 25.4 mm), a second convex lens 304 (focal length 34mm, clear aperture 25.4 mm) and a third convex lens 305 (focal length 34mm, clear aperture 22 mm) coaxially arranged in this order, and the basic operation principle of the dispersive objective 3 is as follows: the achromatic lens 301 collimates the three-wavelength illumination beam into the concave lens 302 for divergence, and then sequentially passes through the first convex lens 303, the second convex lens 304, and the third convex lens 305 for focusing at different positions, such as wavelengths, on the optical axis OA1λ 1 =450nm、λ 2 =455nm、λ 3 The beam of =460 nm is focused at 16.5mm, 16.505mm, 16.510mm of the optical axis of the dispersive objective.
Further, in the present embodiment, the detector 6 includes a detectable wavelengthλ 1 、λ 2 、λ 3 Detection area of intensity.
Further, in the present embodiment, the wavelength division device 5 and the detector 6 may be replaced with a spectrometer.
Further, as shown in FIG. 1, in the present embodiment, the three-wavelength light source 1 includes a first wavelengthA single wavelength optical fiber light source 101, a second single wavelength optical fiber light source 102, a third single wavelength optical fiber light source 103 and an optical fiber combiner 104, wherein the first single wavelength optical fiber light source 101, the second single wavelength optical fiber light source 102 and the third single wavelength optical fiber light source 103 respectively emit wavelengthsλ 1 =450nm、λ 2 =455nm、λ 3 The illumination beam of 460nm, the three wavelength beams are combined into one beam by the optical fiber combiner 104, and output to the optical fiber coupler 2 through the illumination end optical fiber 201.
The working principle of this embodiment is as follows: the three-wavelength light source 1 emits a wavelengthλ 1 =450nm、λ 2 =455nm、λ 3 An illumination beam of 460nm is output to the optical fiber coupler 2 through the illumination end optical fiber 201, and then is incident to the dispersion objective lens 3 through the common end optical fiber 203; the dispersive objective lens 3 transmits the wavelengthλ 1 =450nm、λ 2 =455nm、λ 3 =460 nm focusing at 16.5mm, 16.505mm, 16.510mm of the optical axis of the dispersive objective; the illumination beam passing through the dispersion objective 3 is focused to form a measuring beam, which irradiates the surface of the sample 4 to be measured; the measured sample 4 reflects the measuring light beam focused on the measuring light beam, the reflected light beam is collected by the dispersion objective lens 3, and then sequentially passes through the public end optical fiber 203 and the optical fiber coupler 2, is output from the detection end optical fiber 204, and is incident to the wavelength splitting device 5; the wavelength-splitting means 5 focuses the light passing through different wavelengths in the measuring beam at different areas of the detector 6; the detector 6 thus obtains the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 ；Differential processing is carried out on single-fiber confocal response intensity data under two adjacent illumination wavelengths to obtain two differential confocal response values of the two adjacent wavelengthsdI 21 、dI 32 And further obtaining displacement information of the measured sample along the optical axis direction of the measuring beam. When the motion platform is used for moving the three-wavelength optical fiber point differential confocal microscopic detection device or the measured sample along the direction perpendicular to the measuring beam, the displacement information of different positions on the surface of the measured sample is obtained, and then the surface profile or morphology of the sample is reconstructed。
Example 2
Embodiment 2 of the present invention provides a three-wavelength optical fiber point differential confocal microscopic detection device, which is different from embodiment 1 in that the structure of the detection module in this embodiment is different, and the separation of three-wavelength measurement beams is realized based on a dichroic spectroscope.
As shown in fig. 3, in the present embodiment, the detection module includes a collimator lens 504, a first dichroic beam splitter 505, a second dichroic beam splitter 506, and three detection units 601; the collimating lens 504 is configured to collimate the measuring beam output by the optical fiber 204 at the detection end, and the collimated beam sequentially passes through the first dichroic beam splitter 505 and the second dichroic beam splitter 506 to separate the measuring beams with three wavelengths, and the three detection units 601 are respectively configured to detect the measuring beam with one of the wavelengths, thereby finally obtaining the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 。
Example 3
Embodiment 3 of the present invention provides a three-wavelength optical fiber point differential confocal microscopic detection device, which is different from embodiment 1 in that the structure of the detection module in this embodiment is different, and the separation of three-wavelength measuring beams is realized based on a narrow-band filter.
As shown in fig. 4, in this embodiment, the detection module includes a collimator lens 504, a first beam splitting unit 507, a second beam splitting unit 508, three narrow-band filters 509, and three detection units 801; the collimating lens 504 is configured to collimate the measuring beam output by the optical fiber 204 at the detection end, where the collimated beam sequentially passes through the first beam splitting unit 507 and the second beam splitting unit 508 and is split into three beams, and then each beam of light is incident to one of the detection units after passing through one narrow-band filter 509, where each narrow-band filter 509 is used to filter out one of the wavelengths, and the three detection units 801 are used to detect the measuring beam at one of the wavelengths, so as to obtain the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 。
Example 4
Embodiment 4 of the present invention provides a three-wavelength optical fiber point differential confocal microscopic detection device, which is different from embodiment 1 in that the detection module in this embodiment has a different structure, and implements separation of three-wavelength measuring beams based on a wavelength division multiplexer.
As shown in fig. 5, in the present embodiment, the three-wavelength light source 1 includes a first single-wavelength optical fiber light source 101, a second single-wavelength optical fiber light source 102, a third single-wavelength optical fiber light source 103, and an optical fiber combiner 104, the optical fiber coupler 2 includes an illumination-side optical fiber 201, a coupling unit 202, a common-side optical fiber 203, and a detection-side optical fiber 204, and the detector 6 includes three optical fiber detectors 604. The detection module includes a wavelength division multiplexer 512 and three fiber detection units 604. In this embodiment, the wavelength division multiplexer 512 is configured to output three wavelength components in the measurement beam output by the detection end optical fiber 204 to one of the optical fiber detection units 604, and detect the three wavelength components by the optical fiber detection unit 604 to finally obtain the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 . The micro-processor 7 is used for controlling the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 Differential processing is carried out to obtain two adjacent wavelength differential confocal response valuesdI 21 、dI 32 And further obtains displacement information of the surface of the sample to be measured along the direction of the optical axis OA1 of the measuring beam.
Example 5
The embodiment 5 of the invention provides a three-wavelength optical fiber point differential confocal microscopic detection device, which is different from the embodiment 1 in that the separation of three-wavelength single-optical fiber confocal response intensity values is realized based on a time division driving circuit.
As shown in fig. 6, a three-wavelength optical fiber point differential confocal microscopic detection device provided in the present embodiment includes a three-wavelength light source 1, an optical fiber coupler 2, a dispersion objective lens 3, a time-division driving circuit 513, a detector 6, and a microprocessor 7.
The working principle of this embodiment is as follows: the three-wavelength light source 1 emits a wavelengthλ 1 、λ 2 、λ 3 Is provided for the illumination beam; the microprocessor 7 controls the time division driving circuit 513 to send out periodic pulse signals, and the rising edge of the pulse signals excites the driving circuit to sequentially give the three-wavelength light source 1 with the wavelength ofλ 1 、λ 2 、λ 3 Sub-modules such as single wavelength fiber optic light sources 101, 102, 103, etc. are powered on int 1 、t 2 、t 3 At the moment, the wavelengths are sequentially generated asλ 1 、λ 2 、λ 3 An illumination beam enters the optical fiber coupler 2 through the optical fiber combiner 104 via the illumination end optical fiber 201; the optical fiber coupler 2 sends three-wavelength illumination light beams to the public end optical fiber 203 through the coupling unit 202 to be emitted, and the emitted light beams enter the dispersion objective lens 3; the dispersive objective 3 focuses light of different wavelengths in the three-wavelength illumination beam emitted from the common-end optical fiber 203 at different positions on the optical axis OA1 of the dispersive objective; the illumination beam passing through the dispersion objective 3 is focused to form a measuring beam, and irradiates the surface of the measuring sample 4; the measured sample 4 reflects the measuring beam, the reflected beam returns along the original light path, is collected by the dispersion objective 3, and is filtered by the public end optical fiber 203 to enter the optical fiber coupler 2; the fiber coupler 2 sends the reflected measuring beam to the detection end fiber 204 into the fiber detector 604; at the position oft 1 、t 2 、t 3 At this time, the optical fiber detector 604 sequentially detects the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 The method comprises the steps of carrying out a first treatment on the surface of the The micro-processor 7 is used for controlling the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 Differential processing is carried out to obtain two adjacent wavelength differential confocal response valuesdI 21 、dI 32 Thereby obtaining the direction of the surface of the sample to be measured along the optical axis OA1 of the measuring beamAnd (5) displacement information.
Example 6
The embodiment provides a three-wavelength optical fiber point differential confocal microscopic detection method, which is realized based on the detection device in any one of embodiments 1-5, wherein in the embodiment, the acquisition of displacement information of the measuring beam direction depends on the construction of two adjacent wavelength differential confocal response valuesdI 21 、dI 32 And the calibration relation between the displacement of the sample to be measured. In the detection device, the dispersion objective 3, the wavelength splitting device 5, the detector 6 and other devices have non-uniform spectral response characteristics, so that the relationship between the differential confocal response values of two adjacent wavelengths and the displacement of the sample to be detected deviates from the theoretical design, and therefore, the differential confocal response values of two adjacent wavelengths need to be accurately constructed through actual testingdI 21 、dI 32 And the calibration relation between the displacement of the sample to be measured. Specifically, the present embodiment includes the steps of:
s1, calibrating: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis direction of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis direction of the measuring beam, and calibrating the sample at the wavelength under each displacement valueλ 1 、λ 2 、λ 3 The single optical fiber confocal response intensity value is obtained, and then differential processing is carried out on two adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; and constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and calibrating the relation between the first and second differential confocal response values and the displacement.
In particular, in this embodiment, the movement of the calibration sample in the measuring direction of the measuring beam is precisely controlled, e.gz 1 =0、z 2 =0.1 μm、z 3 =0.3 μm、…、z M =10μm, and at the same time different displacements are acquired by the detector 6 at the illumination wavelengthλ 1 、λ 2 、λ 3 Single fiber confocal response intensity valuesI 1 、I 2 、I 3 ，I.e. the illumination wavelengthλ 1 、λ 2 、λ 3 The lower single fiber confocal response intensity curve is shown in fig. 7; the differential confocal response values of two adjacent wavelengths are obtained by carrying out differential processing on the single-fiber confocal response intensity values under any adjacent wavelength during the same displacementdI 21 、dI 32 The relation curve between the displacement of the measured sample and the displacement of the measured sample is shown in FIG. 8, and two adjacent wavelength differential confocal response values are realizeddI 21 、dI 32 And (5) calibrating the relation between the sample displacement and the calibration.
S2, measuring: the sample 4 to be measured is arranged on the optical axis of the measuring beam, and the wavelength of the sample to be measured is measured and recordedλ 1 、λ 2 、λ 3 The single optical fiber confocal response intensity value is obtained, and then differential processing is carried out on two adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; obtaining the position of the sample to be measured according to the calibration relation between the first and second differential confocal response values and the displacement;
s3, moving the measured sample 4 along the direction perpendicular to the optical axis of the measuring beam, and repeating the step S2 to obtain displacement information of the measured sample surface 5 at different positions along the optical axis of the measuring beam, so as to obtain the morphology information of the measured sample.
Specifically, in this embodiment, the calculation formula of the differential confocal response values of the first and second adjacent wavelengths is:
dI 21 =(I 2 –I 1 )/(I 2 +I 1 )，dI 32 =(I 3 –I 2 )/(I 3 +I 2 )；（1）
alternatively, the calculation formula of the first and second adjacent wavelength differential confocal response values may be:
dI 21 =(I 2 –I 1 )，dI 32 =(I 3 –I 2 )；（2）
wherein,dI 21 anddI 32 respectively representA first adjacent wavelength differential confocal response value and a second adjacent wavelength differential confocal response value,I 1 、I 2 、I 3 respectively represent the wavelength of the sampleλ 1 、λ 2 、λ 3 The following single fiber confocal response intensity values.
Further, in this embodiment, the specific steps of step S3 are: one-dimensional moving the measured sample 4 along the direction perpendicular to the optical axis of the measuring beam, repeating the step S2 to obtain displacement information along the optical axis direction of the measuring beam at different positions on the surface of the measured sample 4 along a straight line, thereby obtaining the contour and roughness information of the measured sample;
further, in this embodiment, the specific steps of the step S3 may be: and (2) two-dimensionally moving the measured sample 4 along the direction perpendicular to the optical axis of the measuring beam, and repeating the step (S2) to obtain displacement information of different positions of the surface of the measured sample 4 along the direction of the optical axis of the measuring beam, thereby obtaining the three-dimensional morphology information of the measured sample.
Specifically, in this embodiment, a series of 2 differential confocal response values can be obtained under different calibration displacements; in the implementation process, the mapping relation between the displacement and the 2 differential confocal response values can be constructed first; and obtaining a displacement value according to the mapping relation and the measured 2 differential confocal response values during measurement.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (8)
1. The three-wavelength optical fiber point differential confocal microscopic detection device is characterized by comprising: the three-wavelength optical fiber device comprises a three-wavelength light source (1), an optical fiber coupler (2), a dispersion objective lens (3) and a detection module;
the three-wavelength light source (1) is used for emitting illumination light beams with three different wavelengths, the output end of the three-wavelength light source (1) is connected with the input end of the optical fiber coupler (2) through an illumination end optical fiber (201), and the illumination light beams emitted by the three-wavelength light source (1) are incident to the dispersion objective lens (3) after passing through the optical fiber coupler (2); the dispersion objective lens (3) has different focal lengths for light with different wavelengths, and is used for focusing the light with different wavelengths at different positions on the optical axis of the dispersion objective lens (3) to form a measuring beam to irradiate on the surface of a sample (4) to be measured; the measuring beam reflected from the surface of the measured sample (4) returns to the optical fiber coupler (2) along the original light path after passing through the dispersion objective lens (3), and is output by the optical fiber coupler (2) and then enters the detection module, the detection module is used for measuring and obtaining single-fiber confocal response intensity values of the illuminating beam under three different wavelengths, and the single-fiber confocal response intensity value I is 1 、I 2 、I 3 The method is used for calculating displacement information of the surface of the measured sample (4), and comprises the following steps:
performing differential processing on confocal response intensity values at any adjacent wavelength to obtain first and second differential confocal response values; obtaining the displacement of the measured sample (4) according to the calibration relation between the first and second differential confocal response values and the displacement; the detection module comprises a wavelength splitting device (5) and a detector (6);
the wavelength splitting device (5) is used for transmitting different wavelengths in the measuring beam to different detection areas of the detector (6), and the light intensity values obtained by the different detection areas of the detector (6) are single-fiber confocal response intensity values I of the illumination beam under three different wavelengths 1 、I 2 、I 3 The method comprises the steps of carrying out a first treatment on the surface of the Or,
the detection module comprises a collimating mirror (504), a first dichroic spectroscope (505), a second dichroic spectroscope (506) and three detection units; the collimating mirror (504) is used for collimating the measuring light beams output from the optical fiber (204) at the detection end, the collimated light beams sequentially pass through the first dichroic spectroscope (505) and the second dichroic spectroscope (506) and then divide the measuring light beams with three wavelengths, and the three detection units are respectively used for detecting the measuring light beams with one wavelength;
or the detection module comprises a collimating mirror (504), a first light splitting unit (507), a second light splitting unit (508), three narrow-band filters and three detection units; the collimating mirror (504) is used for collimating the measuring light beams output from the optical fiber (204) at the detection end, the collimated light beams sequentially pass through the first light splitting unit (507) and the second light splitting unit (508) and are split into three light beams, each light beam is changed into a single-wavelength light beam after passing through a narrow-band filter respectively, the three single-wavelength light beams are respectively incident to one of the detection units, and the three detection units are respectively used for detecting the measuring light beams with one wavelength;
alternatively, the detection module comprises a wavelength division multiplexer (512) and three detection units;
alternatively, the detection module is a spectrometer.
2. The three-wavelength optical fiber point differential confocal microscopy device according to claim 1, wherein said wavelength splitting means (5) comprises: the device comprises a spherical reflecting mirror (501), a grating (502) and a spherical focusing mirror (503), wherein the grating (502) and the spherical focusing mirror (503) are respectively arranged on two sides of the spherical reflecting mirror (501), a measuring beam reflected from the surface of a measured sample (4) sequentially passes through a dispersion objective lens (3), an optical fiber coupler (2) and a detection end optical fiber (204) and then enters the spherical reflecting mirror (501), then enters the grating (502) after being reflected by the spherical reflecting mirror (501), and after being reflected by the grating (502), illumination beams with various wavelengths are separated and then enter different detection areas of a detector (6) after being reflected by the spherical focusing mirror (503).
3. The three-wavelength optical fiber point differential confocal microscopic detection device according to claim 1, further comprising a microprocessor (7) and a time division driving circuit (513), wherein the microprocessor (7) is used for controlling the time division driving circuit (513) to generate periodic pulse signals, and rising edges of the pulse signals excite the driving circuit to sequentially supply power to sub-light source modules with different wavelengths in the three-wavelength light source (1), and sequentially generate three single-wavelength illumination light beams with different wavelengths at different moments;
the detection module is a single detector.
4. The three-wavelength optical fiber point differential confocal microscopy device according to claim 1, wherein the dispersive objective lens (3) comprises an achromatic lens (301), a concave lens (302), a first convex lens (303), a second convex lens (304) and a third convex lens (305) which are coaxially arranged in sequence;
the three-wavelength light source (1) comprises a first single-wavelength optical fiber light source (101), a second single-wavelength optical fiber light source (102), a third single-wavelength optical fiber light source (103) and an optical fiber combiner (104), and the output ends of the first single-wavelength optical fiber light source (101), the second single-wavelength optical fiber light source (102) and the third single-wavelength optical fiber light source (103) are connected with the optical fiber combiner (104).
5. The three-wavelength optical fiber point differential confocal microscopy device according to claim 1, further comprising a pushing structure for moving the sample (4) under test in a direction perpendicular to the optical axis of the measuring beam;
alternatively, the pushing structure is used to move the detection device.
6. The three-wavelength optical fiber point differential confocal microscopic detection method is characterized by comprising the following steps of:
s1, calibrating: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis direction of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis direction of the measuring beam, and calibrating the sample at the wavelength lambda under each displacement value 1 、λ 2 、λ 3 The confocal response intensity value under the condition is subjected to differential processing to obtain a first differential confocal response value and a second differential confocal response value; constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and realizing the calibration of the relation between the first and second differential confocal response values and the displacement;
s2, measuring: the sample (4) to be measured is arranged on the optical axis of the measuring beam, and the wavelength lambda of the sample to be measured is measured and recorded 1 、λ 2 、λ 3 The confocal response intensity value under the condition is subjected to differential processing to obtain a first differential confocal response value and a second differential confocal response value; obtaining the displacement of the measured sample (4) according to the calibration relation between the first and second differential confocal response values and the displacement;
s3, moving the measured sample (4) along the direction perpendicular to the optical axis of the measuring beam, and repeating the step S2 to obtain displacement information of different positions of the surface of the measured sample (4) along the direction of the optical axis of the measuring beam, so as to obtain the morphology information of the measured sample (4).
7. The method of three-wavelength optical fiber point differential confocal microscopy according to claim 6, wherein the first and second differential confocal response values are calculated according to the formula:
dI 21 ＝(I 2 –I 1 )/(I 2 +I 1 )，dI 32 ＝(I 3 –I 2 )/(I 3 +I 2 )；
or dI 21 ＝(I 2 –I 1 )，dI 32 ＝(I 3 –I 2 )；
Wherein dI 21 And dI 32 Respectively representing a first differential response value and a second differential response value, I 1 、I 2 、I 3 Respectively represent the wavelength lambda of the measuring device 1 、λ 2 、λ 3 The following single fiber confocal response intensity values.
8. The three-wavelength optical fiber point differential confocal microscopic detection method according to claim 6, wherein the specific steps of the step S3 are as follows:
moving the measured sample (4) in one dimension along the direction perpendicular to the optical axis of the measuring beam, and repeating the step S2 to obtain displacement information along the optical axis direction of the measuring beam at different positions on the surface of the measured sample (4), thereby obtaining the contour and roughness information of the measured sample (4);
or is:
and (2) two-dimensionally moving the measured sample (4) along the direction perpendicular to the optical axis of the measuring beam, and repeating the step (S2) to obtain displacement information of different positions on the surface of the measured sample (4) along the direction of the optical axis of the measuring beam, thereby obtaining the three-dimensional morphology information of the measured sample (4).
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