CN114054925A - Manufacturing method of mask plate - Google Patents
Manufacturing method of mask plate Download PDFInfo
- Publication number
- CN114054925A CN114054925A CN202111328561.0A CN202111328561A CN114054925A CN 114054925 A CN114054925 A CN 114054925A CN 202111328561 A CN202111328561 A CN 202111328561A CN 114054925 A CN114054925 A CN 114054925A
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- CN
- China
- Prior art keywords
- mask
- stripes
- frame
- strip
- mask frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000003466 welding Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000009792 diffusion process Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 229910001374 Invar Inorganic materials 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 229920000426 Microplastic Polymers 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The embodiment of the invention provides a manufacturing method of a mask plate, which comprises the following steps: arranging a mask strip on the mask frame; and fixedly connecting the mask strips with the mask frame by adopting a diffusion welding process. The manufacturing method of the mask plate provided by the embodiment of the invention can avoid the problem that the evaporated glass substrate is scratched due to the raised welding spots.
Description
Technical Field
The embodiment of the invention relates to the field of display, in particular to a manufacturing method of a mask plate.
Background
At present, the mask strip is usually fixed on the mask frame by laser welding when the mask is manufactured. However, the existing laser welding has the following problems:
the solder joint is circular hole form generally after the laser welding, and circular hole form solder joint can make mask strip surface protruding, and during the coating by vaporization, the bellied surface of mask strip can cause the risk of coating by vaporization glass substrate fish tail.
Disclosure of Invention
The manufacturing method of the mask plate provided by the embodiment of the invention can avoid the problem that the evaporated glass substrate is scratched due to the raised welding spots.
The embodiment of the invention provides a manufacturing method of a mask plate, which comprises the following steps:
arranging a mask strip on the mask frame;
and fixedly connecting the mask strips with the mask frame by adopting a diffusion welding process.
Optionally, the fixedly connecting the mask strips and the mask frame by using a diffusion welding process specifically includes:
and heating the contact surfaces of the mask strips and the mask frame at a set temperature by adopting a heating unit, and applying set pressure to the mask strips and the mask frame by adopting a pressurizing unit to fixedly connect the mask strips and the mask frame.
Optionally, the heating unit is used to heat the contact surface of the mask strip and the mask frame at a set temperature, and the pressurizing unit is used to apply a set pressure to the mask strip and the mask frame, including:
the heating unit is arranged on the surface of the mask strip, which is far away from the mask frame, so that the contact surface of the mask strip and the mask frame is heated, and the pressurizing unit is arranged on one side, which is far away from the mask strip, of the heating unit so as to pressurize the heating unit.
Optionally, each of the mask stripes comprises a first end portion and a second end portion; the first end portion is in contact with a first edge of the mask frame, and the second end portion is in contact with a second edge of the mask frame;
and simultaneously heating the first end part and the second end part of the same mask strip by using a heating unit, and simultaneously pressing the first end part and the second end part of the same mask strip by using a pressing unit.
Optionally, the mask stripes include a first mask stripe, and the first mask stripe includes a plurality of evaporation through holes.
Optionally, the mask stripes further include second mask stripes and third mask stripes;
the second mask stripes are used for supporting the first mask stripes, the extending direction of the second mask stripes is crossed with the extending direction of the first mask stripes, and the second mask stripes are arranged on one side of the first mask stripes, which is adjacent to the mask frame;
the mask frame comprises a first groove, and the second mask strip is arranged in the first groove;
the third mask stripes and the first mask stripes extend in the same direction, the third mask stripes are arranged on one side, adjacent to the mask frame, of the first mask stripes, and the third mask stripes are arranged between two adjacent first mask stripes;
the mask frame comprises a second groove, and the third mask strip is arranged in the second groove.
Optionally, the set temperature is 0.6-0.8 times of the melting point of the material of the mask strip.
Optionally, the set pressure is 0.5-50 Mpa.
Optionally, the material of the mask stripes and the mask frame comprises invar.
Optionally, the set temperature is 850-1150 ℃.
According to the manufacturing method of the mask plate, the mask strips and the mask frame are fixedly connected through the diffusion welding process, so that the mask plate is manufactured. The manufacturing method of the mask plate provided by the embodiment of the invention can avoid the problem that the evaporated glass substrate is scratched due to the raised welding spots.
Drawings
Fig. 1 is a schematic flow chart of a manufacturing method of a mask according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a mask according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another mask provided in an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another mask provided in an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another mask provided in an embodiment of the present invention;
FIG. 6 is a cross-sectional view taken along line A1A2 in FIG. 5;
fig. 7 is a schematic structural diagram of a mask frame according to an embodiment of the present invention.
Detailed Description
The embodiments of the present invention will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad invention. It should be further noted that, for convenience of description, only some structures, not all structures, relating to the embodiments of the present invention are shown in the drawings.
As with the problems described in the background, the spot of a laser weld is typically a circular pit, with the spot being above the plane of the weld. In the coating by vaporization process, coating by vaporization glass substrate and accurate Metal Mask board (Fine Metal Mask, FMM) are close-packed to be in the same place, and the counterpoint in-process can have the friction of small amplitude under the laminating state, if the solder joint is protruding, and bellying department can fish tail coating by vaporization glass substrate.
In order to solve the above problems, embodiments of the present invention provide a method for manufacturing a mask plate, which can avoid the problem of scratching an evaporation glass substrate due to a raised welding spot.
Fig. 1 is a schematic flow chart of a manufacturing method of a mask plate according to an embodiment of the present invention, and referring to fig. 1, the manufacturing method includes the following steps:
and S110, arranging the mask strip on the mask frame.
Specifically, the mask strips are arranged on the mask frame, and after the mask strips are aligned with the mask frame, the mask strips are in seamless contact with the mask frame.
And S120, fixedly connecting the mask strips with the mask frame by adopting a diffusion welding process.
Specifically, in the diffusion welding process in this embodiment, at a certain temperature and under a certain pressure, two surfaces of the mask strip, which are in contact with the mask frame, are subjected to microscopic plastic deformation to achieve tight contact, and the process is continued for a certain time, so that atoms in the mask strip and the mask frame are diffused mutually, and finally, the mask strip and the mask frame are fixedly connected. The mask plate can comprise a plurality of mask strips, and the mask plate is formed by fixedly connecting the mask strips with the mask frame in sequence.
According to the manufacturing method of the mask plate, the mask strips and the mask frame are fixedly connected through the diffusion welding process, so that the mask plate is manufactured. The manufacturing method of the mask plate provided by the embodiment of the invention can avoid the problem that the evaporated glass substrate is scratched due to the raised welding spots.
Optionally, the fixedly connecting the mask strips and the mask frame by using the diffusion welding process specifically includes: and the heating unit is adopted to heat the contact surface of the mask strip and the mask frame at a set temperature, and the pressurizing unit is adopted to apply a set pressure to the mask strip and the mask frame so as to fixedly connect the mask strip and the mask frame.
Specifically, the set temperature can be set according to actual needs, so that the mask strips and the mask frame are prevented from being deformed due to overhigh received temperature by heating the set temperature, and the situation that the mask strips and the mask frame cannot realize mutual diffusion of atoms between the mask strips and the mask frame due to insufficient received temperature can also be avoided. In addition, the heating unit heats the contact surface of the mask strip and the mask frame, rather than heating the entire mask strip and the entire mask frame, and the area of the output heat source of the heating unit can be reduced. The pressurizing unit can enable the mask strip and the mask frame to be in close contact in the heating process and not to be displaced. The set pressure can also be set according to actual requirements, and the set pressure is used for pressing to enable the surface of the mask strip, which is in contact with the mask frame, to generate micro plastic deformation, but the mask strip and the mask frame cannot generate macro deformation due to overlarge pressure.
Optionally, the heating unit is used to heat the contact surface of the mask strip and the mask frame at a set temperature, and the pressurizing unit is used to apply a set pressure to the mask strip and the mask frame, including: the heating unit is arranged on the surface of the mask strip, which is far away from the mask frame, so that the contact surface of the mask strip and the mask frame is heated, and the pressurizing unit is arranged on one side of the heating unit, which is far away from the mask strip, so that the pressurizing unit applies pressure to the heating unit.
Specifically, the thickness of the mask strip is smaller than that of the mask frame, the heating unit is in contact with the mask strip, and rapid heat transfer can be achieved, so that the time of diffusion welding is shortened, and in addition, heat loss can be reduced. The pressurizing unit pressurizes the heating unit, so that atoms between the mask strips and the mask frame can be diffused mutually under the action of set pressure and set temperature, and the mask strips and the mask frame are fixedly connected with the mask frame.
It should be noted that, the heating unit includes metal blocks such as iron blocks, can heat the iron blocks continuously, keeps the iron blocks position at the set temperature, sets up the iron blocks on the surface that the mask strip is kept away from the mask frame, then adopts the pressure unit to exert the power that points to the mask frame direction to the iron blocks, realizes the fixed connection to mask strip and mask frame.
Optionally, fig. 2 is a schematic structural diagram of a mask plate according to an embodiment of the present invention, and referring to fig. 2, each mask strip 120 includes a first end portion 10 and a second end portion 20; the first end portion 10 contacts a first side of the mask frame 110, and the second end portion 20 contacts a second side of the mask frame 110; the first and second ends 10 and 20 of the same mask stripes 120 are simultaneously heated using the heating unit 130, and the first and second ends 10 and 20 of the same mask stripes 120 are simultaneously pressed using the pressing unit 140.
Specifically, if the first end portion 10 of the mask strip 120 is heated first, and then the second end portion 20 of the mask strip 120 is heated, the first end portion 10 may have a misalignment problem in the heating process of the heating unit 130, in this embodiment, the heating unit 130 is adopted to simultaneously heat the first end portion 10 and the second end portion 20 of the same mask strip 120, and the pressurizing unit 140 simultaneously pressurizes the first end portion 10 and the second end portion 20 of the same mask strip 1120, so that the first end portion 10 and the second end portion 20 of the same mask strip 120 can be simultaneously and fixedly connected to the mask frame 110, thereby preventing the mask strip 120 from being shifted in the diffusion welding process and affecting the manufacturing accuracy of the mask plate.
The heating unit 130 may include a first heating subunit and a second heating subunit, and the pressurizing unit 140 may include a first pressurizing subunit and a second pressurizing subunit, wherein the first heating subunit is connected to the first pressurizing subunit, the second heating subunit is connected to the second pressurizing subunit, the first heating subunit and the second heating subunit may be the same, and the first pressurizing subunit and the second pressurizing subunit may be the same. The second heating subunit heats the second end 20 while the first heating subunit heats the first end 10, and the second pressurizing subunit pressurizes the second end 20 while the first pressurizing subunit pressurizes the first end 10.
Optionally, fig. 3 is a schematic structural diagram of another mask provided in an embodiment of the present invention, and referring to fig. 3, the mask stripes include first mask stripes 121, and the first mask stripes 121 include a plurality of evaporation through holes 30.
Specifically, the evaporation through-hole 30 is used to pass an evaporation material.
Optionally, fig. 4 is a schematic structural diagram of another mask provided in an embodiment of the present invention, fig. 5 is a schematic structural diagram of another mask provided in an embodiment of the present invention, fig. 6 is a schematic structural diagram of a cross section of fig. 5 along a section line A1a2, fig. 7 is a schematic structural diagram of a mask frame provided in an embodiment of the present invention, and referring to fig. 4 to fig. 7, the mask strip further includes a second mask strip 122 and a third mask strip 123; the second mask stripes 122 are used for supporting the first mask stripes 121, the extending direction of the second mask stripes 122 is crossed with the extending direction of the first mask stripes 121, and the second mask stripes 122 are arranged on the side of the first mask stripes 121 adjacent to the mask frame 110; the mask frame 110 includes a first groove 111, and the second mask stripes 122 are disposed in the first groove 111; the third mask stripes 123 extend in the same direction as the first mask stripes 121, the third mask stripes 123 are disposed on one side of the first mask stripes 121 adjacent to the mask frame 110, and the third mask stripes 123 are disposed between two adjacent first mask stripes 121; the mask frame 110 includes a second groove 112, and the third mask stripes 123 are disposed in the second groove 112.
Specifically, since the first mask stripes 121 have a large length, the first mask stripes 121 are easily deformed in the length direction, and in order to prevent the middle portions of the first mask stripes 121 from being deformed, the second mask stripes 122 are disposed to support the first mask stripes 121. Since there is a gap between two adjacent first mask stripes 121, the third mask stripe 123 is disposed between two adjacent first mask stripes 121, and the width of the third mask stripe 123 is greater than that of the gap between two adjacent first mask stripes 121, so that the third mask stripe 123 blocks the gap between two adjacent first mask stripes 121. In addition, in order to better enable the first mask stripes 121 to make zero-gap contact with the mask frame 110 and to realize the fixed connection of the first mask stripes 121 and the mask frame 110, the mask frame 110 is configured to include a first groove 111 and a second groove 112, and the second mask stripes 122 and the third mask stripes 123 are respectively configured in the first groove 111 and the second groove 112.
Referring to fig. 7, the mask frame 110 includes a first edge and a second edge, the first edge includes a first sub-edge 113 and a second sub-edge 114, the second edge includes a third sub-edge 115 and a fourth sub-edge 116, the first sub-edge 113 is disposed opposite to the third sub-edge 115, the second sub-edge 114 is disposed opposite to the fourth sub-edge 116, the first sub-edge 113 and the third sub-edge 115 each include a second groove 112, and the second sub-edge 114 and the fourth sub-edge 116 each include a first groove 111, if the second mask stripe is disposed closer to the first mask stripe than to the third mask stripe, the depth of the first groove 111 is set smaller than the depth of the second groove 112, and if the third mask stripe is disposed closer to the first mask stripe than to the second mask stripe, the depth of the first groove 111 is set larger than the depth of the second groove 112. To better enable the second mask stripes to support the first mask stripes, the second mask stripes may be disposed closer to the first mask stripes.
Optionally, the set temperature includes 0.6-0.8 times of the melting point of the material of the mask strip.
Specifically, in the diffusion welding process, the heating temperature of the heating unit is set within 0.6-0.8 times of the melting point of the material of the mask strip, so that on one hand, deformation of the manufactured mask plate due to overhigh temperature can be avoided, on the other hand, the mutual diffusion rate of atoms between the mask strip and the mask frame can be improved, the diffusion welding rate is improved, and the mask strip and the mask frame are quickly and fixedly connected.
Optionally, the set pressure comprises 0.5-50 Mpa.
Specifically, the set pressure comprises 0.5-50 Mpa, so that atoms between the mask strips and the mask frame can diffuse mutually, air between the mask strips and the mask frame can be discharged, in addition, the set pressure comprises 0.5-50 Mpa, macroscopic deformation of the mask strips and the mask frame cannot be caused, and the mask strips and the mask frame can be better fixed.
Optionally, the material of the mask stripes and the mask frame comprises invar.
Specifically, the invar has a low coefficient of thermal expansion and is not easily deformed in a wide temperature range.
Optionally, the set temperature includes 850-1150 ℃.
Specifically, when the mask strips are made of invar, the set temperature is in the range of 850-1150 ℃, and the set temperature meets the temperature in the diffusion welding process. In addition, the set temperature comprises 850-1150 ℃, so that atoms between the mask strips and the mask frame can be diffused mutually quickly, the diffusion welding rate is improved, and the mask strips and the mask frame can be fixedly connected quickly.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. Those skilled in the art will appreciate that the embodiments of the present invention are not limited to the specific embodiments described herein, and that various obvious changes, adaptations, and substitutions are possible, without departing from the scope of the embodiments of the present invention. Therefore, although the embodiments of the present invention have been described in more detail through the above embodiments, the embodiments of the present invention are not limited to the above embodiments, and many other equivalent embodiments may be included without departing from the concept of the embodiments of the present invention, and the scope of the embodiments of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A manufacturing method of a mask plate is characterized by comprising the following steps:
arranging a mask strip on the mask frame;
and fixedly connecting the mask strips with the mask frame by adopting a diffusion welding process.
2. The manufacturing method according to claim 1, wherein the fixedly connecting the mask stripes and the mask frame by using the diffusion welding process specifically comprises:
and heating the contact surfaces of the mask strips and the mask frame at a set temperature by adopting a heating unit, and applying set pressure to the mask strips and the mask frame by adopting a pressurizing unit to fixedly connect the mask strips and the mask frame.
3. The manufacturing method according to claim 2, wherein the heating of the contact surface of the mask strip and the mask frame with a heating unit at a set temperature while applying a set pressure to the mask strip and the mask frame with a pressing unit comprises:
the heating unit is arranged on the surface of the mask strip, which is far away from the mask frame, so that the contact surface of the mask strip and the mask frame is heated, and the pressurizing unit is arranged on one side, which is far away from the mask strip, of the heating unit so as to pressurize the heating unit.
4. The method of manufacturing according to claim 2,
each of the mask stripes comprises a first end portion and a second end portion; the first end portion is in contact with a first edge of the mask frame, and the second end portion is in contact with a second edge of the mask frame;
and simultaneously heating the first end part and the second end part of the same mask strip by using the heating unit, and simultaneously pressing the first end part and the second end part of the same mask strip by using the pressing unit.
5. The method of manufacturing according to claim 1,
the mask stripes comprise first mask stripes, and the first mask stripes comprise a plurality of evaporation through holes.
6. The method of manufacturing according to claim 5,
the mask stripes further comprise second mask stripes and third mask stripes;
the second mask stripes are used for supporting the first mask stripes, the extending direction of the second mask stripes is crossed with the extending direction of the first mask stripes, and the second mask stripes are arranged on one side of the first mask stripes, which is adjacent to the mask frame;
the mask frame comprises a first groove, and the second mask strip is arranged in the first groove;
the third mask stripes and the first mask stripes extend in the same direction, the third mask stripes are arranged on one side, adjacent to the mask frame, of the first mask stripes, and the third mask stripes are arranged between two adjacent first mask stripes;
the mask frame comprises a second groove, and the third mask strip is arranged in the second groove.
7. The method according to claim 2, wherein the set temperature is 0.6 to 0.8 times the melting point of the material of the mask stripes.
8. The method according to claim 2, wherein the predetermined pressure is 0.5 to 50 MPa.
9. The method of claim 3, wherein the material of the mask strips and the mask frame comprises invar.
10. The method according to claim 7, wherein the set temperature is 850 to 1150 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111328561.0A CN114054925A (en) | 2021-11-10 | 2021-11-10 | Manufacturing method of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111328561.0A CN114054925A (en) | 2021-11-10 | 2021-11-10 | Manufacturing method of mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114054925A true CN114054925A (en) | 2022-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111328561.0A Pending CN114054925A (en) | 2021-11-10 | 2021-11-10 | Manufacturing method of mask plate |
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| Country | Link |
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| CN (1) | CN114054925A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5235541A (en) * | 1989-12-14 | 1993-08-10 | Sgs-Thomson Microelectronics, S.A. | Integrated circuit entirely protected against ultraviolet rays |
| CN1694777A (en) * | 2002-10-28 | 2005-11-09 | 三星电子株式会社 | compression bonding method |
| CN105951042A (en) * | 2016-07-01 | 2016-09-21 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN107904554A (en) * | 2018-01-02 | 2018-04-13 | 京东方科技集团股份有限公司 | Mask plate and its manufacture method, mask assembly and evaporation coating device |
| CN207746585U (en) * | 2017-12-15 | 2018-08-21 | 信利（惠州）智能显示有限公司 | A kind of welding pressure head structure |
| CN108441814A (en) * | 2018-03-22 | 2018-08-24 | 京东方科技集团股份有限公司 | Mask device and preparation method thereof, deposition system |
| WO2019172557A1 (en) * | 2018-03-07 | 2019-09-12 | 주식회사 티지오테크 | Method for manufacturing frame-integrated mask |
| CN211005577U (en) * | 2019-11-28 | 2020-07-14 | 云谷（固安）科技有限公司 | A kind of mask opening equipment |
-
2021
- 2021-11-10 CN CN202111328561.0A patent/CN114054925A/en active Pending
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|---|---|---|---|---|
| US5235541A (en) * | 1989-12-14 | 1993-08-10 | Sgs-Thomson Microelectronics, S.A. | Integrated circuit entirely protected against ultraviolet rays |
| CN1694777A (en) * | 2002-10-28 | 2005-11-09 | 三星电子株式会社 | compression bonding method |
| CN105951042A (en) * | 2016-07-01 | 2016-09-21 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN207746585U (en) * | 2017-12-15 | 2018-08-21 | 信利（惠州）智能显示有限公司 | A kind of welding pressure head structure |
| CN107904554A (en) * | 2018-01-02 | 2018-04-13 | 京东方科技集团股份有限公司 | Mask plate and its manufacture method, mask assembly and evaporation coating device |
| WO2019172557A1 (en) * | 2018-03-07 | 2019-09-12 | 주식회사 티지오테크 | Method for manufacturing frame-integrated mask |
| CN108441814A (en) * | 2018-03-22 | 2018-08-24 | 京东方科技集团股份有限公司 | Mask device and preparation method thereof, deposition system |
| CN211005577U (en) * | 2019-11-28 | 2020-07-14 | 云谷（固安）科技有限公司 | A kind of mask opening equipment |
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| Title |
|---|
| 李天无: "简明机械工程师手册", 云南科技出版社, pages: 1193 - 1196 * |
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