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CN114114532A - Method for implementing spectrum shape transformation of arrayed waveguide grating - Google Patents

Method for implementing spectrum shape transformation of arrayed waveguide grating Download PDF

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Publication number
CN114114532A
CN114114532A CN202111304859.8A CN202111304859A CN114114532A CN 114114532 A CN114114532 A CN 114114532A CN 202111304859 A CN202111304859 A CN 202111304859A CN 114114532 A CN114114532 A CN 114114532A
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CN
China
Prior art keywords
waveguide
section
input
arrayed
waveguide section
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Pending
Application number
CN202111304859.8A
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Chinese (zh)
Inventor
徐来
徐居一
郭明
严蒙
张�成
王来
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Wuhan Etern Optoelectronics Technology Co ltd
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Wuhan Etern Optoelectronics Technology Co ltd
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Priority to CN202111304859.8A priority Critical patent/CN114114532A/en
Publication of CN114114532A publication Critical patent/CN114114532A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2808Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
    • G02B6/2813Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention discloses an implementation method for spectrum shape transformation of an arrayed waveguide grating, relates to the technical field of arrayed waveguide gratings, and aims to solve the problems that in the prior art, the spectrum shape is fixed and cannot be replaced, chips with various spectrum shapes are required to be manufactured to meet the requirements of different scenes, and the method cannot be flexibly and efficiently applied in the production and stock links. The input slab waveguide comprises a first waveguide section and a second waveguide section, the first waveguide section is connected with the second waveguide section in a fitting mode, a first waveguide interface is arranged between the first waveguide section and the input waveguide, a second waveguide interface is arranged between the first waveguide section and the input waveguide, the peak value between the first waveguide interface and the second waveguide interface can change along with multimode interference, the arrayed waveguide grating chip is divided into two parts to be prepared independently, and the first waveguide section comprises the input waveguide and one part of the input slab waveguide.

Description

Method for implementing spectrum shape transformation of arrayed waveguide grating
Technical Field
The invention relates to the technical field of arrayed waveguide gratings, in particular to an implementation method for spectrum shape transformation of an arrayed waveguide grating.
Background
The array waveguide grating is a wavelength division device commonly used in the field of optical communication, is generally manufactured by adopting a silicon-based silica waveguide process, is coupled and butted with an optical fiber, can multiplex multiple signals with different wavelengths to the same channel for transmission, and can reversely separate the signals with different wavelengths in one optical fiber, thereby greatly saving optical fiber resources.
However, the existing array waveguide grating chip is fixed in spectrum shape and cannot be replaced, and chips with various spectrum shapes are often required to be manufactured to meet the requirements of different scenes, so that the array waveguide grating chip cannot be flexibly and efficiently applied in the production and stock links; therefore, the existing requirements are not met, and an implementation method for the spectral shape transformation of the arrayed waveguide grating is provided for the requirements.
Disclosure of Invention
The invention aims to provide an implementation method for spectrum shape conversion of an arrayed waveguide grating, which aims to solve the problems that the existing arrayed waveguide grating chip proposed in the background technology is fixed in spectrum shape and cannot be replaced, chips with various spectrum shapes are required to be manufactured to meet the requirements of different scenes, and the method cannot be flexibly and efficiently applied in the production and stock links.
In order to achieve the purpose, the invention provides the following technical scheme: the array waveguide grating comprises an input waveguide, an input slab waveguide, an array waveguide, an output slab waveguide and an output waveguide, wherein the input slab waveguide comprises a first waveguide section and a second waveguide section, and the first waveguide section is attached and connected with the second waveguide section.
Preferably, the first waveguide section is provided with a first waveguide interface with the input waveguide.
Preferably, the first waveguide section is provided with a second waveguide interface with the input waveguide.
Preferably, the peak between the first waveguide interface and the second waveguide interface may be varied with multi-mode interference.
An implementation method for spectrum shape transformation of an arrayed waveguide grating comprises the following steps:
the method comprises the following steps: the array waveguide grating chip is divided into two parts to be independently prepared, and the first waveguide section comprises an input waveguide and one part of an input slab waveguide;
step two: the second waveguide section comprises the other part of the input slab waveguide, the array waveguide, the output slab waveguide and the output waveguide;
step three: when the array waveguide grating chip is applied, the first waveguide section and the second waveguide section of the array waveguide grating chip are arranged on the same substrate and are aligned in position;
step four: the contact surface of the first waveguide section and the second waveguide section can be filled with colloid or liquid to match the refractive index of the waveguide, so that the possibility of spectral shape deformation is reduced;
step five: in the first waveguide section of the arrayed waveguide grating chip, the joint of the input waveguide and the input slab waveguide can be designed by adopting various waveguide structures according to requirements, the multimode interference degree is adjusted, and various spectrum shapes are formed
Preferably, in the third step, the substrate may be made of the same material as the chip substrate or a material with a similar expansion coefficient to reduce stress, and the heating sheet may be directly used as the substrate for the heating and packaging manner.
Preferably, in the fourth step, the lateral relative position of the first waveguide section and the second waveguide section can be precisely adjusted on the premise of close contact, so as to achieve the function of tuning the channel wavelength.
Preferably, in the fifth step, the chips are classified according to the output spectrum shapes and can be classified into a gaussian type and a flat type.
Compared with the prior art, the invention has the beneficial effects that:
1. the array waveguide grating chip is divided into two parts to be independently prepared, when the array waveguide grating chip is applied, a first waveguide section and a second waveguide section of the array waveguide grating chip are arranged on the same substrate and aligned in position, the substrate can be made of a material which is the same as the substrate of the chip or has a similar expansion coefficient to the substrate of the chip so as to reduce stress, a heating sheet can be directly used as the substrate in a heating and packaging mode, the contact surfaces of the first waveguide section and the second waveguide section can be filled with colloid or liquid so as to match the refractive index of the waveguide, the possibility of spectral deformation is reduced, the transverse relative positions of the first waveguide section and the second waveguide section can be precisely adjusted on the premise of close contact, the effect of channel wavelength tuning is achieved, the first part and the general second part which are designed in different modes are integrally adopted for flexible pairing, and the stocking cost and the risk of the whole chip are reduced;
2. in the first part of the array waveguide grating chip, the joint of the input waveguide and the input slab waveguide can adopt various waveguide structure designs according to requirements, adjust the multi-mode interference degree and form various spectrum shapes, so that the wavelength of an output channel can be tuned according to requirements in the assembling process of the two parts, and the flexibility of configuration is increased for both heating type packaging and mechanical movable type packaging.
Drawings
FIG. 1 is a schematic diagram of an arrayed waveguide grating structure according to the present invention;
FIG. 2 is a schematic view of a first waveguide interface structure according to the present invention;
fig. 3 is a schematic diagram of a second waveguide interface structure according to the present invention.
In the figure: 1. an input waveguide; 2. an input slab waveguide; 3. an array waveguide; 4. an output slab waveguide; 5. an output waveguide; 6. a first waveguide section; 7. a second waveguide section; 8. a first waveguide interface; 9. a second waveguide interface; 10. a substrate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
Referring to fig. 1 and 2, an embodiment of the present invention is shown: the array waveguide grating comprises an input waveguide 1, an input slab waveguide 2, an array waveguide 3, an output slab waveguide 4 and an output waveguide 5, wherein the input slab waveguide 2 comprises a first waveguide section 6 and a second waveguide section 7, the first waveguide section 6 is attached to the second waveguide section 7, and a first waveguide interface 8 is arranged between the first waveguide section 6 and the input waveguide 1.
Example 2
Referring to fig. 1 and 3, an embodiment of the present invention: the array waveguide grating comprises an input waveguide 1, an input slab waveguide 2, an array waveguide 3, an output slab waveguide 4 and an output waveguide 5, wherein the input slab waveguide 2 comprises a first waveguide section 6 and a second waveguide section 7, the first waveguide section 6 is attached to the second waveguide section 7, and a second waveguide interface 9 is arranged between the first waveguide section 6 and the input waveguide 1.
An implementation method for spectrum shape transformation of an arrayed waveguide grating comprises the following steps:
the method comprises the following steps: the array waveguide grating chip is divided into two parts to be prepared independently, and the first waveguide section 6 comprises the input waveguide 1 and one part of the input slab waveguide 2;
step two: the second waveguide section 7 comprises another portion of the input slab waveguide 2, and also comprises the arrayed waveguide 3, the output slab waveguide 4 and the output waveguide 5;
step three: when in application, the first waveguide section 6 and the second waveguide section 7 of the arrayed waveguide grating chip are arranged on the same substrate 10 and are aligned;
step four: the contact surface of the first waveguide section 6 and the second waveguide section 7 can be filled with colloid or liquid to match the refractive index of the waveguide, so that the possibility of spectral shape deformation is reduced;
step five: in the first waveguide section 6 of the arrayed waveguide grating chip, the joint of the input waveguide 1 and the input slab waveguide 2 can adopt various waveguide structure designs according to requirements, and the multimode interference degree is adjusted to form various spectrum shapes.
Further, in the third step, the substrate 10 may be made of the same material as the chip substrate or a material with a similar expansion coefficient to reduce stress, and the heating sheet may be directly used as the substrate for the heating and packaging method.
Further, in the fourth step, the lateral relative position of the first waveguide section 6 and the second waveguide section 7 can be precisely adjusted on the premise of close contact, so as to achieve the tuning effect of the channel wavelength.
Further, in the fifth step, the chips are classified according to the output spectrum shapes and can be divided into a Gaussian type and a flat type.
The working principle is as follows: when in use, the arrayed waveguide grating chip is divided into two parts to be independently prepared, the first waveguide section 6 comprises one part of the input waveguide 1 and the input slab waveguide 2, the second waveguide section 7 comprises the other part of the input slab waveguide 2, and simultaneously comprises the arrayed waveguide 3, the output slab waveguide 4 and the output waveguide 5, when in use, the first waveguide section 6 and the second waveguide section 7 of the arrayed waveguide grating chip are arranged on the same substrate 10 and aligned in position, the substrate 10 can adopt a material which is the same as the substrate of the chip or has a similar expansion coefficient to reduce stress, a heating sheet can be directly used as the substrate for a heating and packaging mode, the contact surface of the first waveguide section 6 and the second waveguide section 7 can be filled with colloid or liquid to match the refractive index of the waveguide, the spectrum deformation possibility is reduced, and the transverse relative position of the first waveguide section 6 and the second waveguide section 7 can also be precisely adjusted on the premise of close contact, in order to achieve the tuning effect of channel wavelength, in the first waveguide section 6 of the arrayed waveguide grating chip, the joint of the input waveguide 1 and the input slab waveguide 2 can adopt various waveguide structure designs according to requirements, and the multimode interference degree is adjusted to form various spectrum shapes.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (8)

1. An arrayed waveguide grating comprising an input waveguide (1), an input slab waveguide (2), an arrayed waveguide (3), an output slab waveguide (4) and an output waveguide (5), characterized in that: the input flat waveguide (2) comprises a first waveguide section (6) and a second waveguide section (7), and the first waveguide section (6) is in fit connection with the second waveguide section (7).
2. An arrayed waveguide grating according to claim 1, wherein: the first waveguide section (6) is provided with a first waveguide interface (8) with the input waveguide (1).
3. An arrayed waveguide grating according to claim 2, wherein: the first waveguide section (6) is provided with a second waveguide interface (9) with the input waveguide (1).
4. An arrayed waveguide grating according to claim 3, wherein: the peak (spectral shape) between the first waveguide interface (8) and the second waveguide interface (9) may vary with multi-mode interference.
5. An implementation method for spectrum shape transformation of an arrayed waveguide grating is realized based on the arrayed waveguide grating of any one of claims 1 to 4, and is characterized by comprising the following steps:
the method comprises the following steps: the array waveguide grating chip is divided into two parts to be prepared independently, and the first waveguide section (6) comprises a part of the input waveguide (1) and the input slab waveguide (2);
step two: the second waveguide section (7) comprises another part of the input slab waveguide (2), and also comprises an array waveguide (3), an output slab waveguide (4) and an output waveguide (5);
step three: when in application, the first waveguide section (6) and the second waveguide section (7) of the arrayed waveguide grating chip are arranged on the same substrate (10) and are aligned;
step four: the contact surface of the first waveguide section (6) and the second waveguide section (7) can be filled with colloid or liquid to match the refractive index of the waveguide, so that the possibility of spectral shape deformation is reduced;
step five: in the first waveguide section (6) of the arrayed waveguide grating chip, the joint of the input waveguide (1) and the input slab waveguide (2) can adopt various waveguide structure designs according to requirements, and the multimode interference degree is adjusted to form various spectrum shapes.
6. The method of claim 5, wherein: in the third step, the substrate (10) can be made of the same material as the chip substrate or a material with a similar expansion coefficient so as to reduce stress, and the heating sheet can be directly used as the substrate for a heating packaging mode.
7. The method of claim 5, wherein: in the fourth step, the transverse relative position of the first waveguide section (6) and the second waveguide section (7) can be precisely adjusted on the premise of close contact, so that the function of tuning the channel wavelength is achieved.
8. The method of claim 5, wherein: in the fifth step, the chips are classified according to the output spectrum shapes and can be divided into a Gaussian type and a flat type.
CN202111304859.8A 2021-11-05 2021-11-05 Method for implementing spectrum shape transformation of arrayed waveguide grating Pending CN114114532A (en)

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Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6222963B1 (en) * 1997-10-27 2001-04-24 Commissariat A L'energie Atomique Phased array device or phasar and process for manufacturing this device
CN1302130A (en) * 1999-12-27 2001-07-04 古河电气工业株式会社 Array wiveguide grating optic signal multiple way multiplex/multi-way separator and optic waveguide circuit
CN1416235A (en) * 2001-10-29 2003-05-07 富士通株式会社 Wave separator
JP2004206152A (en) * 2004-04-12 2004-07-22 Nec Corp Method of manufacturing array waveguide diffraction grating element and array waveguide diffraction grating element
CN1732398A (en) * 2002-12-26 2006-02-08 日本电信电话株式会社 Wave transmission media and waveguide lines
CN101106434A (en) * 2007-08-10 2008-01-16 浙江大学 A Spectrum Flattened Single Fiber Triple Wavelength Division Multiplexer
JP2010204696A (en) * 2010-06-25 2010-09-16 Furukawa Electric Co Ltd:The Method of manufacturing array waveguide diffraction grating
CN102388329A (en) * 2009-02-26 2012-03-21 艾迪株式会社 Arrayed waveguide grating (AWG) with different radii in the input and output slab regions
CN103018825A (en) * 2013-01-11 2013-04-03 武汉光迅科技股份有限公司 Heatless arrayed waveguide grating capable of realizing sectional temperature compensation
JP2015114378A (en) * 2013-12-09 2015-06-22 日本電信電話株式会社 Optical wavelength multiplexing/demultiplexing circuit
CN105137538A (en) * 2015-10-15 2015-12-09 中国科学院半导体研究所 Arrayed waveguide grating spectrum planarization method
US20170010415A1 (en) * 2015-07-09 2017-01-12 Electronics And Telecommunications Research Institute Optical signal processing apparatus using planar lightwave circuit with waveguide-array structure
CN107817553A (en) * 2017-11-08 2018-03-20 深圳新飞通光电子技术有限公司 There are the method for packing and its encapsulating structure of hot AWG chips
CN110515155A (en) * 2019-08-29 2019-11-29 易锐光电科技(安徽)有限公司 A kind of controllable array waveguide grating of wavelength

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6222963B1 (en) * 1997-10-27 2001-04-24 Commissariat A L'energie Atomique Phased array device or phasar and process for manufacturing this device
CN1302130A (en) * 1999-12-27 2001-07-04 古河电气工业株式会社 Array wiveguide grating optic signal multiple way multiplex/multi-way separator and optic waveguide circuit
CN1416235A (en) * 2001-10-29 2003-05-07 富士通株式会社 Wave separator
CN1732398A (en) * 2002-12-26 2006-02-08 日本电信电话株式会社 Wave transmission media and waveguide lines
JP2004206152A (en) * 2004-04-12 2004-07-22 Nec Corp Method of manufacturing array waveguide diffraction grating element and array waveguide diffraction grating element
CN101106434A (en) * 2007-08-10 2008-01-16 浙江大学 A Spectrum Flattened Single Fiber Triple Wavelength Division Multiplexer
CN102388329A (en) * 2009-02-26 2012-03-21 艾迪株式会社 Arrayed waveguide grating (AWG) with different radii in the input and output slab regions
JP2010204696A (en) * 2010-06-25 2010-09-16 Furukawa Electric Co Ltd:The Method of manufacturing array waveguide diffraction grating
CN103018825A (en) * 2013-01-11 2013-04-03 武汉光迅科技股份有限公司 Heatless arrayed waveguide grating capable of realizing sectional temperature compensation
JP2015114378A (en) * 2013-12-09 2015-06-22 日本電信電話株式会社 Optical wavelength multiplexing/demultiplexing circuit
US20170010415A1 (en) * 2015-07-09 2017-01-12 Electronics And Telecommunications Research Institute Optical signal processing apparatus using planar lightwave circuit with waveguide-array structure
CN105137538A (en) * 2015-10-15 2015-12-09 中国科学院半导体研究所 Arrayed waveguide grating spectrum planarization method
CN107817553A (en) * 2017-11-08 2018-03-20 深圳新飞通光电子技术有限公司 There are the method for packing and its encapsulating structure of hot AWG chips
CN110515155A (en) * 2019-08-29 2019-11-29 易锐光电科技(安徽)有限公司 A kind of controllable array waveguide grating of wavelength

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Application publication date: 20220301