Asymmetric flexible hinge
Technical Field
The invention relates to the technical field of ultra-precise micromotion, in particular to an asymmetric flexible hinge.
Background
The mechanical hinge realizes deflection and movement between two rigid bodies through the contact of rolling bodies, has the problems of complex structure, larger size, low precision, poor sensitivity, friction heating and the like, and is not beneficial to ultra-precise motion control. The flexible hinge has the advantages of simple structure, quick response, high sensitivity, near-zero friction and the like, and is widely applied to the manufacturing fields of microelectronic manufacturing equipment, optical detection and the like.
Disclosure of Invention
Aiming at the defects and the improvement requirements in the prior art, the invention overcomes the defects of complex structure, poor precision, easy friction, heating and the like of the traditional mechanical hinge and designs the flexible hinge which has the advantages of simple structure, convenient manufacture, high precision, quick response, no friction and the like.
In order to achieve the purpose, the invention is realized by the following technical means: an asymmetric flexible hinge is designed, comprising a flexible hinge body, wherein: the main body of the flexible hinge is a rectangular cube, the main body of the flexible hinge is provided with a pair of grooves which are symmetrical about an x axis, and the curve lines of the grooves are conical curves and are asymmetrical about a y axis.
The distance between two conical curve vertexes (CD) of the flexible hinge is the minimum thickness t of the flexible hinge.
The size of the curve is determined by the height H of the flexible hinge body, and H is far larger than t, which is a basic unit of the flexible hinge.
The flexible hinge is an integral body formed by a plurality of basic units, and the axial directions of the plurality of basic units of the flexible hinge can be parallel or vertical. The flexible hinge composed of a plurality of basic units can complete multi-degree-of-freedom micro-amplitude rotation and movement.
The flexible hinge realizes rotation and movement through the action of actuators such as a piezoelectric ceramic structure or a voice coil motor and the like, and high-precision control is completed.
Drawings
The invention is further illustrated with reference to the following figures and examples.
Fig. 1 shows the basic unit of an asymmetric flexible hinge 1.
Fig. 2 is a single axis single degree of freedom asymmetric flexible hinge.
Fig. 3 is a 2-axis 2-degree-of-freedom asymmetric flexible hinge.
Fig. 4 is a 3-axis 3-degree-of-freedom asymmetric flexible hinge.
Fig. 5 is a single degree of freedom asymmetric flexible hinge based on piezoelectric actuation.
Detailed Description
In order to explain the objects, aspects and advantages of the invention in more detail, the invention is explained in more detail below with the aid of exemplary embodiments and the accompanying drawings.
The embodiments described herein are merely illustrative, not restrictive, and the scope of the invention is not limited to these embodiments.
FIG. 1 shows 1 basic unit of the flexible hinge, the flexible hinge body is provided with a pair of grooves which are symmetrical about an x-axis, and the curve line of the grooves is a conical curve and is asymmetrical about a y-axis.
FIG. 2(a) is a single-axis single-degree-of-freedom flexible hinge composed of 2 basic units; fig. 2(b) is a uniaxial single degree of freedom flexible hinge (L-shape) composed of 2 basic units.
FIG. 3(a) is a 2-axis 2-degree-of-freedom flexible hinge (linear type) composed of 2 basic units; fig. 3(b) is a 2-axis 2-degree-of-freedom flexible hinge (L-shaped) composed of 2 basic units.
FIG. 4(a) is a 3-axis 3-degree-of-freedom flexible hinge (T-shaped) composed of 3 basic units; fig. 4(b) is a 3-axis 3-degree-of-freedom flexible hinge (Z-type) composed of 3 basic units.
Fig. 5 is a single piezoelectric drive based single degree of freedom asymmetric flexible hinge. Actuators such as a piezoelectric ceramic structure or a voice coil motor and the like are connected with the hinge at two ends, and the actuators such as the piezoelectric ceramic structure or the voice coil motor and the like control the micro-amplitude rotation and movement of the flexible hinge.
According to the structure of the attached drawings, more multi-axis multi-degree-of-freedom flexible hinges can be combined.
The above description is a preferred embodiment of the present invention, but the present invention should not be limited to the disclosure of the embodiment and the drawings. Therefore, it is intended that all equivalents and modifications which do not depart from the spirit of the invention disclosed herein are deemed to be within the scope of the invention.