CN114260039B - Rotating heating stage and two-dimensional material transfer device - Google Patents

Abstract

The present application provides a rotating heating table and a two-dimensional material transfer device, which belong to the field of two-dimensional material preparation. The rotating heating table includes a mounting base, a rotating table and a heating table. A mounting cavity is provided in the mounting base, and a conductive slip ring is fixed in the mounting cavity; a mounting channel connected to the mounting cavity is provided through the top of the mounting base. The rotating table is fixed to the top of the mounting base; a rotating channel connected to the mounting channel is provided through the rotation center of the rotating table. The heating table is fixed to the rotating table surface of the rotating table; a negative pressure cavity is provided in the heating table; a heating component is provided on the top of the heating table, and a negative pressure channel is provided in the heating component; an air duct connected to the negative pressure cavity is provided at the bottom of the heating table, and the air duct is rotatably passed through the rotating channel and rotatably connected to the mounting channel; the wires of the heating component pass through the air duct and are electrically connected to the conductive slip ring. It can solve the problem that the rotation is constrained by the wiring harness and the vacuum tube and alleviate the damage to the wiring harness and the vacuum tube caused by the rotation of the heating table.

Description

Rotary heating table and two-dimensional material transfer device

Technical Field

The application relates to the field of two-dimensional material preparation, in particular to a rotary heating table and a two-dimensional material transfer device.

Background

The heating stage is a common component for preparing two-dimensional materials, which is provided with an electrical heating structure for heating the sample. The sample needs to be fixed on top of the electrically heated structure before the bottom is heated. In some cases, the sample is fixed in a vacuum adsorption mode, a small hole capable of being communicated with the air extraction structure is formed in the top of the electric heating structure, after the sample is placed at the top of the electric heating structure, the air extraction structure is used for extracting air from the small hole, and the sample can be fixed at the top of the electric heating structure through negative pressure.

At present, when the heating table in the negative pressure adsorption mode is used, on one hand, the heating table is restrained by a wire harness and a vacuum tube, the rotation range is smaller, a sample is required to be manually stirred to a proper angle by using tweezers or other tools, so that the operation workload is increased, the sample is possibly damaged carelessly when the glove is operated inwards, and on the other hand, the wire harness and the vacuum tube are twisted back and forth along with the rotation of the heating table, so that the service life of the heating table is reduced.

Disclosure of Invention

The application aims to provide a rotary heating table and a two-dimensional material transfer device, which can solve the problem that rotation is constrained by a wire harness and a vacuum tube, enable the heating table to rotate to any angle without manually adjusting the angle of a sample, relieve damage to the wire harness and the vacuum tube caused by rotation of the heating table and prolong the service life of the heating table.

Embodiments of the present application are implemented as follows:

In a first aspect, an embodiment of the present application provides a rotary heating table, including a mounting base, a rotary table, and a heating table. The installation base is internally provided with an installation cavity, an electric conduction slip ring is fixed in the installation cavity, the installation base is provided with a plug electrically connected with the electric conduction slip ring and a vacuum pipe joint communicated with the installation cavity, and the top of the installation base is provided with an installation channel communicated with the installation cavity in a penetrating manner. The rotary table is fixed at the top of the mounting base, and a rotary channel communicated with the mounting channel is arranged in the rotary center of the rotary table in a penetrating manner. The heating table is fixed on a rotating table surface of the rotating table, a negative pressure cavity is arranged in the heating table, a heating component is arranged at the top of the heating table, a negative pressure channel communicated with the negative pressure cavity is arranged in the heating component, a negative pressure adsorption hole formed in the end face of the top of the heating component is formed in the negative pressure channel, an air duct communicated with the negative pressure cavity is arranged at the bottom of the heating table, the air duct is rotatably arranged in the rotating channel in a penetrating mode and is rotatably connected with the mounting channel, and a conducting wire of the heating component is electrically connected with the conducting slip ring through the air duct.

According to the technical scheme, the air duct is arranged at the bottom of the heating table and is communicated between the negative pressure cavity and the mounting cavity, so that negative pressure equipment is conveniently connected to the vacuum pipe joint of the mounting base for exhausting air, wherein the air duct is rotatably arranged in the rotating channel at the rotating center of the rotating table in a penetrating manner, and when the rotating table drives the heating table to rotate, the air duct rotates around the rotating center of the rotating table. Therefore, the whole air extraction pipeline of the rotary heating table can not restrict the rotation of the heating table, and the rotation of the heating table can not damage the air extraction pipeline.

The conducting wire passes through the air duct to be electrically connected with the conductive slip ring, and then is communicated with an external circuit through a plug electrically connected with the conductive slip ring. When the heating table rotates, the conducting wire slides around the conductive slip ring, the conducting wire can not restrict the rotation of the heating table, and the rotation of the heating table can not damage the conducting wire.

In some alternative embodiments, the conductive slip ring is disposed coaxially with the mounting channel.

In the technical scheme, the conductive slip ring is coaxial with the installation channel, and at the moment, the conductive slip ring is coaxial with the air duct, so that the guide extending out of the air duct can be matched with the conductive slip ring better.

In some alternative embodiments, the rotary table is provided with a rotation angle measuring assembly for measuring the rotation angle of the rotary table.

Among the above-mentioned technical scheme, rotation angle measurement subassembly can measure rotary table's rotation angle, compares in manual reading, can acquire comparatively accurate rotation angle, makes things convenient for the sample that the preparation phase angle precision requirement is high.

In some alternative embodiments, the turntable comprises a turntable base and a turntable top, the turntable base is fixed at the top of the mounting base, the turntable top is rotatably connected to the turntable base, the turntable top is positioned at the top of the turntable top, the rotation angle measuring assembly comprises a code wheel and a position sensor probe which are oppositely arranged, the code wheel is fixed at one of the turntable base and the turntable top, and the position sensor probe is fixed at the other of the turntable base and the turntable top.

According to the technical scheme, the code disc and the position sensor probe are respectively arranged on the rotary table base and the rotary table top, the rotation angle is determined through the relative positions of the code disc and the position sensor probe, and compared with the single encoder, the influence of a return gap on a measurement result can be eliminated, and the measuring device has higher measuring precision. The measurement accuracy of the rotation angle can even reach 0.01 degrees, and the method can be used for preparing magic angle graphene samples, which are samples with high requirements on phase angles.

In some alternative embodiments, the turntable tabletop is rotatably disposed on top of the turntable base, the code wheel is secured to the bottom of the turntable tabletop, and the position sensor probe is located at the bottom of the code wheel and is secured to the top of the turntable base.

According to the technical scheme, the coded disc and the position sensor probe are respectively fixed at the bottom of the table top of the rotary table and the top of the base of the rotary table, so that the coded disc and the position sensor probe are conveniently fixed and oppositely arranged.

In some alternative embodiments, the negative pressure adsorption pores are filled with a porous thermally conductive material.

According to the technical scheme, the porous heat conducting material is filled in the negative pressure adsorption hole, so that the negative pressure adsorption hole has a good heat conducting effect while air can be pumped, the temperature difference inside and outside the negative pressure adsorption hole can be reduced, the sample is heated more uniformly, and meanwhile temperature measurement and temperature control are more accurately carried out.

In some alternative embodiments, the negative pressure channel is provided with at least one negative pressure suction section communicated with the negative pressure cavity, and the negative pressure suction section is arranged on the side wall of the heating component and communicated with the bottom of the negative pressure adsorption hole.

In the technical scheme, the negative pressure air suction section is arranged on the side wall of the heating component and is connected to the bottom of the negative pressure adsorption hole, so that the negative pressure air suction section is communicated with the side surface of the bottom of the negative pressure adsorption hole, and the porous heat conducting material can be conveniently filled and fixed in the negative pressure adsorption hole.

In some alternative embodiments, the porous thermally conductive material is copper foam.

In the technical scheme, the foam copper has higher heat conduction effect, and can reliably reduce the temperature difference inside and outside the negative pressure adsorption hole.

In some alternative embodiments, the inner wall of the heating stage is provided with a light reflective layer, which is arranged around the negative pressure cavity.

According to the technical scheme, the reflective layer surrounding the negative pressure cavity is arranged, so that heat radiated outwards from the negative pressure cavity can be reflected, and the heating efficiency is improved.

In a second aspect, an embodiment of the present application provides a two-dimensional material transfer apparatus, including a rotary heating stage and a slide adsorption holder as provided in the embodiment of the first aspect, where the slide adsorption holder is disposed side by side with the heating stage.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a cross-sectional view of a rotary heating table according to an embodiment of the present application;

FIG. 2 is a schematic diagram of a two-dimensional material transfer apparatus according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of a slide adsorption holder according to an embodiment of the present application;

Fig. 4 is a schematic structural diagram of an equipment installation platform according to an embodiment of the present application;

FIG. 5 is a schematic view of a partial structure of a two-dimensional material transfer apparatus according to an embodiment of the present application;

fig. 6 is a schematic structural diagram of an electric focusing microscope according to an embodiment of the present application;

Fig. 7 is a schematic structural diagram of a controller according to an embodiment of the present application.

Icon 10-two-dimensional material transfer device; 100-rotary heating table, 110-mounting base, 111-mounting cavity, 112-conductive slip ring, 113-plug, 114-vacuum pipe joint, 115-mounting channel, 116-conductive ring base, 117-base sealing plate, 120-rotary table, 121-rotary table base, 122-rotary table top, 123-worm seat, 124-worm, 125-scroll seat, 126-turbine, 127-rotary bearing, 128-rotation angle measuring assembly, 1281-code disc, 1282-position sensor probe, 130-heating table, 131-heat conducting block fixing seat, 132-heat insulation base, 133-negative pressure cavity, 134-heating assembly, 1341-heat conducting block, 1341 a-heat conducting silica gel, 1341 b-negative pressure channel, 1341 c-porous heat conducting material, 1342-heating element, 1343-temperature probe, 135-air duct, 136-PCB wiring board, 200-slide adsorption seat, 210-slide adsorption base, 220-slide sealing ring, 230-slide, 240-slide limit bracket, 250-slide adsorption seat, 1282-position sensor probe, 130-heat conducting block fixing seat, 132-heat insulation base, 133-negative pressure cavity, 134-porous heat conducting silica gel, 1341-c-porous heat conducting material, 1341-heat conducting silica gel, 1343-heat conducting material, 135-heat conducting tube, 136-negative pressure channel, 200-heat conducting material, 200-heat conducting slide adsorption seat, vacuum slide, 320-glass, 320-slide, electric slide, 320-glass, and, electric glass, 320-slide, and, electric crystal, and, 320-glass, displacement mechanism, and, electric window, and, displacement, and, etc. Function switching keys, 640 display screen, 650 function keys, 660 electronic pulse generator, 670 LED lamp set.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

It should be noted that like reference numerals and letters refer to like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or those that are conventionally put in use of the product of the application, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "vertical," "parallel," and the like are not intended to require that the component be absolutely vertical or parallel, but rather may be slightly inclined.

In the description of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, or may be directly connected, or may be indirectly connected through an intermediate medium, or may be in communication with the inside of two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1, in a first aspect, an embodiment of the present application provides a rotary heating stage 100, including a mounting base 110, a rotary stage 120, and a heating stage 130.

The installation base 110 is internally provided with an installation cavity 111, an electric conduction slip ring 112 is fixed in the installation cavity 111, the installation base 110 is provided with a plug 113 electrically connected with the electric conduction slip ring 112 and a vacuum tube joint 114 communicated with the installation cavity 111, and the top of the installation base 110 is provided with an installation channel 115 communicated with the installation cavity 111 in a penetrating manner.

Wherein the mounting base 110 has a housing structure enclosing a mounting cavity 111. By way of example, the housing structure of the mounting base 110 includes a conductive ring base 116 and a base seal plate 117. The mounting cavity 111 is formed in the conducting ring base 116, the mounting cavity 111 is provided with an opening positioned on the end face of the bottom of the conducting ring base 116, and the base sealing plate 117 is positioned on the bottom of the conducting ring base 116 and seals the opening of the mounting cavity 111. A mounting channel 115 extends through the top of the conductive ring mount 116, which is illustratively disposed coaxially with the mounting cavity 111.

Optionally, an annular groove is formed on the bottom end surface of the conducting ring base 116, and a sealing ring is arranged in the annular groove and abuts against the upper end edge of the base sealing plate 117.

Optionally, the plug 113 and the vacuum tube connector 114 are disposed on the conductive ring base 116, for example, on the bottom end of the sidewall of the conductive ring base 116. Wherein the mounting of the plug 113 and the vacuum tube connector 114 may be sealed by means of epoxy glue.

Optionally, the mounting cavity 111 includes a first cavity and a second cavity that are mutually communicated, where the first cavity is located at the top of the second cavity, and an inner diameter of the first cavity is smaller than an inner diameter of the second cavity, so that the mounting cavity 111 is a stepped cavity. The second cavity is close to the one end diapire of first cavity and has been seted up the conducting ring mounting hole, and the lateral wall of conducting slip ring 112 is provided with the engaging lug, and the engaging lug of conducting slip ring 112 passes through the fastener to be fixed in conducting ring mounting hole department.

The conducting slip ring 112 is provided with 4-6 wires in an embodiment, the wires at the upper end of the slip ring can rotate around the central shaft in an infinite angle, and the wires at the lower end of the slip ring are connected with the plug 113 in an electric connection mode.

The rotary table 120 is fixed on the top of the mounting base 110, and a rotation channel communicating with the mounting channel is provided at the rotation center of the rotary table 120.

The rotary table 120 includes a rotary table base 121 and a rotary table top 122, the rotary table top 122 is rotatably connected to the rotary table base 121, and the rotary table 120 is located at the top of the rotary table top 122. As an example, the turntable base 121 is fixed to the top of the mounting base 110, the turntable table 122 and the turntable base 121 are each provided in a ring-shaped structure, and the rotation passage penetrates the turntable table 122 and the turntable base 121 of the turntable 120 in order.

The rotary table 120 is not limited in driving manner, and may be alternatively in the form of worm 124 drive of the worm wheel 126, and may be alternatively in the form of a stepping motor. As an example, the rotary table 120 further includes a worm mount 123, a worm 124, a worm wheel mount 125, a worm wheel 126, and a rotation bearing 127. The worm mount 123 is connected to the turntable mount 121, and is provided with fittings such as bearings, couplings, motors, and the like required for the worm 124. The worm 124 is rotatably mounted to the worm seat 123. The worm wheel seat 125 is located inside the worm wheel seat 123, and the rotation axis line thereof is the rotation axis line of the rotary table 120. The worm wheel 126 is fixed to the bottom end surface of the worm wheel housing 125 by bolts or the like, and the worm wheel 126 is in driving connection with the worm 124. The rotary bearing 127 is illustratively a crossed roller bearing, the inner ring of the rotary bearing 127 is clamped between the top of the turbine seat 125 and the turntable table 122, and the inner ring of the rotary bearing 127 is locked between the top of the turbine seat 125 and the turntable table 122 by bolts, so that the turntable table 122 is not easy to shake and has better parallelism in the moving process, the outer ring of the rotary bearing 127 is clamped between the turntable table 122 and the turntable base 121, and the outer ring of the rotary bearing 127 is fixed on the turntable base 121 by epoxy resin glue.

The heating table 130 is fixed on the surface of the rotary table 120, a negative pressure cavity 133 is arranged in the heating table 130, a heating component 134 is arranged at the top of the heating table 130, a negative pressure channel 1341b communicated with the negative pressure cavity 133 is arranged in the heating component 134, a negative pressure adsorption hole formed in the end face of the top of the heating component 134 is arranged in the negative pressure channel 1341b, an air duct 135 communicated with the negative pressure cavity 133 is arranged at the bottom of the heating table 130, the air duct 135 is rotatably arranged in the rotary channel in a penetrating mode and is rotatably connected with the mounting channel 115, and a conducting wire of the heating component 134 passes through the air duct 135 to be electrically connected with the conducting slip ring 112.

Wherein the heating stage 130 has a housing structure enclosing a negative pressure chamber 133. As an example, the housing structure of the heating stage 130 includes a heat-conducting block holder 131 and a heat-insulating base 132, the heat-conducting block holder 131 is disposed on top of the heat-insulating base 132, and the heat-conducting block holder 131 and the heat-insulating base 132 are detachably connected. The bottom of heat conduction piece fixing base 131 has seted up first recess, and the second recess has been seted up at the top of thermal-insulated base 132, and when heat conduction piece fixing base 131 and thermal-insulated base 132 were connected, first recess and second recess intercommunication and constitution negative pressure cavity 133.

The top of the heat conducting block fixing base 131 is provided with a mounting hole communicated with the negative pressure cavity 133 for mounting the heating component 134, and the mounting hole is optionally a round hole and is positioned at the center of the top of the heat conducting block fixing base 131. The bottom of the heat insulation base 132 is left with a bottom of a certain thickness enough to resist the pressure of one atmosphere without significant deformation, the bottom of the heat insulation base 132 is provided with an air guide through hole communicated with the negative pressure cavity 133 for installing the air guide pipe 135, and the air guide through hole is optionally a round hole and is positioned at the bottom center of the heat insulation base 132.

Optionally, a protruding edge is provided on the outer side of the bottom of the heat conducting block fixing base 131, a plurality of threaded through holes are provided on the protruding edge, a threaded hole corresponding to the threaded through holes is provided on the top of the heat insulating base 132, and the heat conducting block fixing base 131 and the heat insulating base 132 are sequentially threaded through the threaded through holes and the threaded holes by mounting screws.

Optionally, the bottom end surface of the heat conducting block fixing base 131 is concavely provided with a wiring board mounting groove, and the inner diameter of the wiring board mounting groove is larger than that of the first groove, so that the wiring board mounting groove and the first groove are distributed in a stepped form. Correspondingly, a PCB wiring board 136 is provided in the heating stage 130, and the PCB wiring board 136 is mounted in the wiring board mounting groove and is clamped by both the heat conducting block fixing base 131 and the heat insulating base 132. Further, annular grooves are formed in the bottom end face of the heat conducting block fixing base 131 and the top end face of the heat insulating base 132, the annular grooves are formed in the bottom of the wiring board mounting groove in the heat conducting block fixing base 131 so that sealing rings arranged in the annular grooves are abutted against the top edge of the PCB wiring board 136, and the annular grooves correspond to the wiring board mounting groove in the heat insulating base 132 so that sealing rings arranged in the annular grooves are abutted against the bottom edge of the PCB wiring board 136.

The PCB wiring board 136 is disposed between the first groove and the second groove, and at least one through hole is formed therethrough so that the first groove and the second groove are communicated. The PCB wiring board 136 is illustratively provided with 4-6 sets of wiring posts, each set of wiring posts are mutually conducted, one end of each wiring post is connected with a wire of the heating component 134, and the other end of each wiring post is connected with the upper end of the conductive slip ring 112 through a wire penetrating through the air guide tube 135.

The heating assembly 134 illustratively includes a thermally conductive block 1341, a heating element 1342, and a temperature probe 1343.

The heat conducting block 1341 is installed in the installation hole at the top of the heat conducting block fixing base 131, the outer side of the top is provided with a convex edge so that the top of the heat conducting block 1341 is similar to a mushroom shape, the side wall of the heat conducting block 1341 is concavely provided with at least one annular groove, a sealing ring which is propped against the inner wall of the installation hole is arranged in the annular groove, and the bottom of the annular groove extends into the negative pressure cavity 133.

The negative pressure channel 1341b is arranged in the heat conducting block 1341 and is provided with an opening communicated with the negative pressure cavity 133 to realize the communication between the negative pressure channel 1341b and the negative pressure cavity 133, and the negative pressure adsorption hole of the negative pressure channel 1341b is arranged on the top end surface of the heat conducting block 1341 to realize the communication between the negative pressure channel 1341b and the outside. A heating member 1342 is provided in the negative pressure chamber 133 and is connected to the heat-conducting block 1341 for transferring heat to the heat-conducting block 1341. As an example, the heating member 1342 is a ring-shaped ceramic heating plate, which is attached to the end face of the heat conduction block 1341 at the bottom. The temperature probe 1343 is a screw type thermal resistor or thermocouple, a threaded hole matched with the temperature probe 1343 is formed in the bottom of the heat conduction block 1341, and the temperature probe 1343 penetrates through the annular ceramic heating plate and then is connected with the threaded hole, so that the temperature probe 1343 is installed and fixed on the annular ceramic heating plate.

The air duct 135 is illustratively a pipe with a flange at the top, and a flange mounting groove for accommodating the flange is formed in the bottom of the heat insulation base 132, and the air duct 135 is fixed in the flange mounting groove through the flange. Optionally, an annular groove is formed in the bottom wall of the flange mounting groove, and a sealing ring abutting against the bottom of the flange is mounted in the annular groove.

The air duct 135 is provided with at least one annular groove, for example, on the outer wall of the bottom, which is arranged in a plurality of annular grooves, which are arranged side by side in the axial direction. A sealing ring is provided in each annular groove for sealing between the bottom of the air duct 135 and the mounting channel 115, and optionally the contact surface of the sealing ring with the mounting channel 115 is coated with a vacuum grease.

The rotary heating table 100 provided by the application has the following working principle that a sample is placed above a negative pressure adsorption hole of a heating component 134, and because a negative pressure channel 1341b, a negative pressure cavity 133, an air duct 135 and a mounting cavity 111 are sequentially communicated, air suction is directly performed at a vacuum tube joint 114 of a mounting base 110, so that the sample can be fixed above the negative pressure adsorption hole of the heating component 134 under the action of negative pressure. The turntable 120 is started to rotate, the heating table 130 rotates along with the turntable 120 surface of the turntable 120, and at this time, the air duct 135 rotates around the rotation center of the turntable 120, and the wire slides around the conductive slip ring 112.

The rotary heating table 100 provided by the application is characterized in that an air duct 135 is arranged at the bottom of a heating table 130, the air duct 135 is communicated between a negative pressure cavity 133 and a mounting cavity 111, and is convenient for connecting negative pressure equipment at a vacuum tube joint 114 of a mounting base 110 to exhaust air, wherein the air duct 135 is rotatably arranged in a rotary channel at the rotary center of a rotary table 120 in a penetrating manner, and when the rotary table 120 drives the heating table 130 to rotate, the air duct 135 performs autorotation motion around the rotary center of the rotary table 120. Therefore, the air extraction pipeline of the whole rotary heating table 100 does not restrict the rotation of the heating table 130, and the rotation of the heating table 130 does not damage the air extraction pipeline.

Wires are electrically connected to the conductive slip ring 112 through the gas-guide tube 135 and then connected to an external circuit through the plug 113 electrically connected to the conductive slip ring 112. When the heating table 130 rotates, the conductive wire slides around the conductive slip ring 112, the conductive wire does not restrict the rotation of the heating table 130, and the rotation of the heating table 130 does not damage the conductive wire.

Regarding the mounting base 110, in some exemplary embodiments, the conductive slip ring 112 is disposed coaxially with the mounting channel 115.

In this design, conductive slip ring 112 is coaxial with mounting channel 115, where conductive slip ring 112 is coaxial with air duct 135, so that the guide extending from air duct 135 can better mate with conductive slip ring 112. Of course, in other embodiments, the central axis of the conductive slip ring 112 and the mounting channel 115 may be at an angle, or may be parallel to each other but at a distance.

Regarding the rotary table 120, in some exemplary embodiments, the rotary table 120 is provided with a rotation angle measuring assembly 128 for measuring the rotation angle of the face of the rotary table 120.

The rotational angle measuring device 128 is not limited in its installation position, and may be connected to either or both of the turntable base 121 and the turntable table top 122. In addition, the form of the rotation angle measuring assembly 128 is not limited, and a single rotation angle sensor may be provided, or a plurality of and/or a plurality of sensors may be provided to cooperate.

In this design, rotation angle measurement assembly 128 can measure the rotation angle of revolving stage 120 face, compares in manual reading, can acquire comparatively accurate rotation angle, conveniently prepares the sample that the phase angle precision requirement is high.

As one example, the rotation angle measuring assembly 128 includes a code wheel 1281 and a position sensor probe 1282 disposed opposite one another, the code wheel 1281 being secured to one of the turntable base 121 and the turntable tabletop 122, the position sensor probe 1282 being secured to the other of the turntable base 121 and the turntable tabletop 122.

In this design, set up code wheel 1281 and position sensor probe 1282 respectively at revolving stage base 121 and revolving stage mesa 122, confirm rotation angle through the relative position of code wheel 1281 and position sensor probe 1282, compare in singly setting up the encoder, can eliminate the influence of passback clearance to measuring result, have higher measurement accuracy.

The position sensor probe 1282 is, for example, a sensor grid, the resolution of which may be selected to be 0.004 °. The code disc 1281 and the position sensor probe 1282 can be selected from products with the model number Posic-TPCD07-180, the measurement accuracy of the rotation angle can even reach 0.01 degrees, and the method can be used for preparing magic angle graphene samples, which have high requirements on phase angles.

Further, the turntable top 122 is rotatably disposed on top of the turntable base 121, the code wheel 1281 is fixed on the bottom of the turntable top 122, and the position sensor probe 1282 is disposed on the bottom of the code wheel 1281 and fixed on top of the turntable base 121.

In this design, the code wheel 1281 and the position sensor probe 1282 are fixed to the bottom of the turntable table 122 and the top of the turntable base 121, respectively, so that the code wheel 1281 and the position sensor probe 1282 can be conveniently fixed and arranged relatively.

Regarding the heating stage 130, in some exemplary embodiments, the negative pressure adsorption holes are filled with a porous heat conductive material 1341c.

The porous heat conductive material 1341c is made of a material having heat conductivity, such as, but not limited to, copper, aluminum, silicon carbide ceramic, and the like. The porous heat conductive material 1341c has a porous structure as a whole and a plurality of air-permeable micropores therein, and may have a plurality of air-permeable micropores in the form of a sheet, a block, a rod, or the like, and the shape and size of the porous heat conductive material in cross section are illustratively consistent with those of the negative pressure adsorption holes.

In this design, pack porous heat conduction material 1341c in the negative pressure absorption hole for have better heat conduction effect in the negative pressure absorption hole when can bleed, can reduce the inside and outside temperature difference of negative pressure absorption hole, guarantee to heat the sample more evenly, be favorable to carrying out temperature measurement and temperature control more accurately simultaneously.

As one example, the porous thermally conductive material 1341c is copper foam.

The foam copper is formed by sintering copper powder, the whole foam copper is of a porous structure, and a large number of breathable micropores are formed in the foam copper.

In the design, the foam copper has higher heat conduction effect, and can reliably reduce the temperature difference inside and outside the negative pressure adsorption hole.

Further, the negative pressure channel 1341b has at least one negative pressure pumping section communicated with the negative pressure cavity 133, and the negative pressure pumping section is opened at the side wall of the heating component 134 and is communicated with the bottom of the negative pressure adsorption hole.

As an example, the negative pressure adsorption hole extends in the axial direction of the heat conduction block 1341. The negative pressure air suction sections are arranged on the side wall of the heat conduction block 1341, each negative pressure air suction section extends along the radial direction of the heat conduction block 1341, and when a plurality of negative pressure channels 1341b are arranged, the plurality of negative pressure channels 1341b are distributed around the circumferential direction of the heat conduction block 1341.

It should be noted that, in other embodiments of the present application, the negative pressure adsorption hole and the negative pressure suction section may be coaxially disposed. The extending paths of the negative pressure suction holes and the negative pressure suction sections are not limited to a straight line form, and may be curved or multi-section lines, wherein when the extending paths are straight line forms, the extending paths of the negative pressure suction holes may form a certain included angle different from 0 ° with the axial direction of the heat conducting block 1341, and the extending paths of the negative pressure suction sections may also form a certain included angle different from 0 ° with the radial direction of the heat conducting block 1341.

In this design, offer the negative pressure section of bleeding in the lateral wall of heating element 134 and connect in the bottom of negative pressure absorption hole for negative pressure section of bleeding and the bottom side intercommunication of negative pressure absorption hole can conveniently fill and fix porous heat conduction material 1341c in the negative pressure absorption hole.

In order to better improve the heating uniformity and the temperature measurement accuracy, further, an annular groove is concavely arranged on the top end surface of the heat conducting block 1341, and the annular groove is surrounded on the periphery of the negative pressure adsorption hole. The annular groove is filled with heat conducting silica gel 1341a, and the top of the heat conducting silica gel 1341a is flush with the top end face of the heat conducting block 1341.

Considering that the heat in the negative pressure chamber 133 is radiated outward during the operation of the heating stage 130, the time for the heating stage 130 to reach the budget temperature is prolonged under the limited power, and if the power of the heating stage 130 is increased, the temperature overshoot of the heating stage 130 is serious.

Alternatively, the housing structure of the heating stage 130 is made of a material having low thermal conductivity and good heat resistance and being easily formed, and in an exemplary embodiment, the heat conducting block holder 131 and the heat insulating base 132 are made of a material having low thermal conductivity and good heat resistance and being easily formed, such as PEEK or polytetrafluoroethylene.

Further, the inner wall of the heating stage 130 is provided with a light reflecting layer, which is disposed around the negative pressure chamber 133.

Wherein the light-reflecting layer is for example provided as a light-reflecting aluminium foil. In the embodiment in which the housing structure of the heating stage 130 includes the heat-conducting block holder 131 and the heat-insulating base 132, as an example, the inner walls of the heat-conducting block holder 131 and the heat-insulating base 132 are each provided with a light-reflecting layer.

In this design, the reflective layer surrounding the negative pressure cavity 133 is provided, and heat radiated outward from the negative pressure cavity 133 can be reflected, which is advantageous for improving heating efficiency.

Referring to fig. 2, in a second aspect, an embodiment of the present application provides a two-dimensional material transfer apparatus 10, including a rotary heating stage 100 and a slide mount 200 as provided in the embodiment of the first aspect, the slide mount 200 being disposed side by side with the heating stage 130.

Referring to fig. 3, as an example, slide mount 200 includes a slide mount 210, a slide seal 220, a slide stop 230, a stop 240, a slide mount vacuum tube connector 250, and a purge valve 260.

The front end of the slide adsorption base 210 is provided with a notch, a square groove is arranged in the notch, an annular groove is arranged on the outer ring of the square groove, a standard slide can be placed at the position of the notch, and a slide sealing ring 220 can be installed at the position of the annular groove. The slide sealing ring 220 has a diameter about 0.1mm greater than the depth of the annular groove, and is installed in the annular groove for sealing the sealing surface of the slide and the slide adsorption base 210.

The rear end of the slide adsorption base 210 has a square groove communicating with the front end through a through hole, and the rear end of the through hole may be provided with a release valve 260. The side of the slide adsorption base 210 has a hole communicating with the square groove at the front end, and the hole at the side can be provided with a slide adsorption base vacuum tube connector 250.

The slide block 230 includes a slide and a baffle plate, the baffle plate is convexly arranged at the top of the slide plate, so that the front end of the baffle plate and the slide plate form a step structure. The baffle limiting frame 240 is fixed on the slide adsorption base 210, for example, by bolts, and the upper and lower surfaces of the baffle limiting frame 240 are respectively provided with a groove, and the two grooves are mutually perpendicular. The groove on the lower surface and the slide adsorption base 210 enclose a sliding channel, the depth of the sliding channel is slightly greater than the thickness of the slide sheet and the width of the sliding channel is slightly greater than the width of the slide sheet, and the slide sheet of the slide sheet 230 is slidably accommodated in the sliding channel, so that the front end of the slide sheet can be close to and far away from the square groove on the front end of the slide adsorption base 210. The contact surface between the slide sheet of the slide sheet 230 and the slide adsorption base 210 is smeared with a lipid lubricant, so that the abrasion of the slide sheet and the slide adsorption base can be reduced by the lipid lubricant, and certain adhesion effect can be caused to the slide sheet and the slide adsorption base, so that the slide sheet of the slide sheet 230 cannot shake in the sliding process. The baffle of the slide baffle 230 extends out from the groove on the upper surface of the baffle limiting frame 240, and the sliding travel of the slide in the sliding channel is limited by the stop action of the groove on the upper surface of the baffle limiting frame 240 on the baffle of the slide baffle 230.

After the slide is placed, the slide stop 230 is pushed forward so that the front end of the slide is above the slide. After the vacuum pump is turned off and the air release valve 260 is turned on, the slide glass losing the action of the atmospheric pressure is easily dropped, and at this time, the slide glass is not dropped due to the stopping action of the slide piece of the slide glass blocking piece 230. Optionally, a layer of rubber sheet is stuck on the surface of the front end of the sliding sheet facing the glass slide, so that the sliding sheet has a better anti-sliding effect.

In the present application, the two-dimensional material transfer apparatus 10 may be provided with other structures as needed.

Referring to fig. 2 and 4, as an example, the two-dimensional material transfer apparatus 10 further includes an equipment mounting platform 300, and the mounting base 110 and the slide mount 200 are both coupled to the equipment mounting platform 300.

Optionally, the device mounting platform 300 is an air-floating vibration isolation platform, which includes a honeycomb panel 310 and an air-floating support 320 supported at the bottom of the honeycomb panel 310.

Referring to fig. 2 and 5, as one example, two-dimensional material transfer apparatus 10 further includes a displacement stage 400, where displacement stage 400 optionally includes one or more of a first displacement mechanism 410, a second displacement mechanism 420, a lift mechanism 430, and a pitch mechanism 440.

The first displacement mechanism 410 is coupled between the device mounting platform 300 and the mounting base 110 for driving the mounting base 110 to move in a first direction relative to the device mounting platform 300. The second displacement mechanism 420 is connected between the apparatus mounting platform 300 and the mounting base 110, and is used for driving the mounting base 110 to move along a second direction relative to the apparatus mounting platform 300, and the slide adsorption seat 200 and the heating table 130 are arranged side by side along a first direction, and the first direction is perpendicular to the second direction.

Alternatively, the first displacement mechanism 410 and the second displacement mechanism 420 are driven by stepping motor actuators, the lead of the screw of the actuators is 0.25mm, and the stroke is +/-12.5 mm.

A lifting mechanism 430 and/or a pitching mechanism 440 are connected between the device mounting platform 300 and the slide adsorption seat 200;

The lifting mechanism 430 is connected between the apparatus mounting platform 300 and the slide adsorption base 210 of the slide adsorption base 200 for driving the slide adsorption base 200 to lift relative to the apparatus mounting platform 300, and the pitching mechanism 440 is connected between the apparatus mounting platform 300 and the slide adsorption base 210 of the slide adsorption base 200 for driving the slide table top of the slide adsorption base 200 to pitch relative to the apparatus mounting platform 300.

Alternatively, the lifting mechanism 430 is driven by a stepper motor actuator with an actuator lead of 0.25mm and a travel of + -5 mm. The pitch mechanism 440 is a pitch stage, driven by a stepper motor actuator, with an actuator lead of 0.25mm and a stroke of + -6 deg..

Referring to fig. 2 and 6, as an example, the two-dimensional material transfer apparatus 10 further includes an electric focusing microscope 500, and the electric focusing microscope 500 includes an electric straight line module 510 and a CCD-equipped coaxial light microscope 520. The bottom of the electric linear module 510 is mounted on the device mounting platform 300, and the coaxial light microscope 520 with the CCD is mounted on the slider of the electric linear module 510. The microscope with the coaxial light of the CCD is optionally equipped with 5-fold, 10-fold, 20-fold and 50-fold tele objectives.

Referring to fig. 2 and 7, as an example, the two-dimensional material transfer apparatus 10 further includes a controller 600, the controller 600 including a spindle knob 610, a speed knob 620, a function switching key 630, a display screen 640, a function key 650, an electronic pulse generator 660, and an LED light group 670.

The number of stepper motors in the two-dimensional material transferring device 10 is n, and the shaft selecting knob 610 has n+1 gear positions, which respectively corresponds to n stepper motors and suspension.

The governor knob 620 has a plurality of gears, one for each speed.

The function switching button 630 may switch the function of the function button 650, and may clear the rotation angle of the rotary table 120 displayed. Short-press function switching key 630 may clear the display angle, and long-press function switching key 630 may switch the function of function key 650.

The display 640 may display the operation state of the function key 650, the temperature of the heating stage 130, and the rotation angle of the rotation stage 120. The function of the function button 650 is determined by the function switching button 630, and can be switched to control the forward and reverse rotation of the stepper motor, and control the temperature rise and temperature drop of the heating table 130.

The electronic pulse generator 660 can be rotated in the forward and reverse directions to control the forward and reverse rotation of the stepper motor for gating, and the angle ratio of the two is controlled by the speed adjusting knob 620.

The text mark is arranged under the LED lamp group 670, n LED lamps above the shaft selecting knob 610 correspond to n stepping motors respectively, and the quantity of the LED lamps indicates the gating of the corresponding stepping motors. The LED lights above the speed knob 620 correspond to the speed status of the stepper motor, respectively.

The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A rotary heating table, comprising:

The installation base is internally provided with an installation cavity, and an electric conduction slip ring is fixed in the installation cavity; the installation base is provided with a plug electrically connected with the conductive slip ring and a vacuum pipe joint communicated with the installation cavity, the top of the installation base is provided with an installation channel communicated with the installation cavity in a penetrating way, the installation cavity comprises a first cavity and a second cavity which are communicated with each other, the first cavity is positioned at the top of the second cavity, and the inner diameter of the first cavity is smaller than the inner diameter of the second cavity, so that the installation cavity is a stepped cavity;

A rotary table fixed on the top of the mounting base, a rotary channel penetrating the rotary center of the rotary table and communicated with the mounting channel, and

The heating device comprises a rotary table, a heating table, a negative pressure cavity, a heating assembly, a negative pressure channel, an air duct and a conducting slip ring, wherein the heating table is fixed on the rotary table surface of the rotary table, the negative pressure cavity is arranged in the heating table, the heating assembly is arranged at the top of the heating table, the negative pressure channel communicated with the negative pressure cavity is arranged in the heating assembly and provided with a negative pressure adsorption hole formed in the end face of the top of the heating assembly, the air duct communicated with the negative pressure cavity is arranged at the bottom of the heating table and rotatably penetrates through the rotary channel and is rotatably connected with the installation channel, and a conducting wire of the heating assembly penetrates through the air duct and is electrically connected with the conducting slip ring.

2. The rotary heating table of claim 1, wherein the conductive slip ring is disposed coaxially with the mounting channel.

3. The rotary heating table according to claim 1, wherein the rotary table is provided with a rotation angle measuring assembly for measuring a rotation angle of the rotary table top.

4. A rotary heating table according to claim 3, wherein the rotary table comprises a rotary table base and a rotary table top, the rotary table base being fixed to the top of the mounting base, the rotary table top being rotatably connected to the rotary table base, the rotary table top being located on top of the rotary table top;

the rotation angle measuring assembly comprises a code disc and a position sensor probe which are oppositely arranged, wherein the code disc is fixed on one of the rotary table base and the rotary table top, and the position sensor probe is fixed on the other of the rotary table base and the rotary table top.

5. The rotary heating table of claim 4, wherein the turntable tabletop is rotatably disposed on top of the turntable base;

The code wheel is fixed at the bottom of the table top of the rotary table, and the position sensor probe is positioned at the bottom of the code wheel and fixed at the top of the base of the rotary table.

6. The rotary heating table of claim 1, wherein the negative pressure adsorption holes are filled with a porous heat conductive material.

7. The rotary heating table of claim 6, wherein the negative pressure channel has at least one negative pressure pumping section in communication with the negative pressure chamber, the negative pressure pumping section being open at a side wall of the heating assembly and in communication with a bottom of the negative pressure suction hole.

8. The rotary heating table of claim 6, wherein the porous thermally conductive material is copper foam.

9. The rotary heating table according to any one of claims 1 to 8, wherein a reflective layer is provided on an inner wall of the heating table, the reflective layer being disposed around the negative pressure chamber.

10. A two-dimensional material transfer apparatus, comprising:

The rotary heating table according to any one of claims 1 to 9, and

The glass slide adsorption seat is arranged side by side with the heating table.