CN114323268B - Energy detection device and method for photoetching machine - Google Patents
Energy detection device and method for photoetching machine Download PDFInfo
- Publication number
- CN114323268B CN114323268B CN202111554580.5A CN202111554580A CN114323268B CN 114323268 B CN114323268 B CN 114323268B CN 202111554580 A CN202111554580 A CN 202111554580A CN 114323268 B CN114323268 B CN 114323268B
- Authority
- CN
- China
- Prior art keywords
- energy
- photoetching machine
- ccd
- value
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001259 photo etching Methods 0.000 title claims abstract description 54
- 238000001514 detection method Methods 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims description 10
- 239000000523 sample Substances 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 230000001360 synchronised effect Effects 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000012935 Averaging Methods 0.000 claims description 6
- 238000004364 calculation method Methods 0.000 claims description 6
- 238000001459 lithography Methods 0.000 claims description 5
- 238000005266 casting Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 5
- 230000032683 aging Effects 0.000 abstract description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention belongs to the field of energy detection, and discloses a photoetching machine energy detection device and a detection method. According to the invention, through the cooperation of the CCD and the energy probe, the light emitted by the photoetching machine is accurately detected to the energy of the pixel point, so that the light emitting energy uniformity of the photoetching machine is conveniently and accurately detected, the exposure precision of the photoetching machine is effectively improved, and the measurement error caused by the aging of the attenuation sheet is prevented; through the use of the attenuation sheet, the detectable energy range of CCD is effectively improved, and through the use of the synchronous belt, the weight of the energy detection device is effectively reduced, and the deformation of the movement mechanism is effectively reduced.
Description
Technical Field
The invention belongs to the technical field of energy detection, and particularly relates to a photoetching energy detection device and a detection method.
Background
The photoetching machine is also called an exposure machine, an exposure system, a photoetching system and the like, is a core device for manufacturing a chip, patterns are drawn on a substrate by controlling light rays, the light intensity uniformity of the light rays can influence the etching effect in the later process in the process of drawing the patterns, the photoetching precision of the photoetching machine is further influenced, the substrate is relatively expensive, and the scrapping of the substrate can cause relatively large property loss, so that the light emitting uniformity of the photoetching machine needs to be detected.
The existing photoetching energy detection device mainly detects uniformity through an energy probe, the detection resolution is low, the error is large, the light-emitting uniformity of the photoetching machine cannot be finely detected, regional substandard light-emitting of the photoetching machine possibly exists, the exposure effect of the photoetching machine is affected, and the substrate rejection probability is further improved; the maximum value of the gray value of the light spot of the CCD is 255, and when the light spot is too bright, the gray value of the CCD is more than 255, and the CCD can generate supersaturation cut-off phenomenon; the existing driving mechanism of the photoetching machine energy detection device is mainly in a mode of directly driving a screw rod with a servo motor or a linear motor, the weight of the two modes is large, and the energy detection device in the motion mechanism can be deformed greatly, so that the precision of the photoetching machine is affected, and the attenuation sheet can be attenuated by the passing rate under the irradiation of strong light.
Disclosure of Invention
In view of this, the lithographic apparatus according to the first aspect of the present invention comprises a mounting plate 1, wherein the mounting plate 1 is fixedly mounted in a movement mechanism of a lithographic apparatus, two guide rails 9 are transversely and fixedly disposed on a front end surface of the mounting plate 1, a servo motor 2 is fixedly disposed on one side of the mounting plate, the servo motor 2 drives a mounting seat 4 through a synchronizing wheel 5 and a synchronous belt 11, and the mounting seat is slidably disposed between the two guide rails through a sliding block 13.
Further, a CCD 8 is fixedly arranged on one side of the mounting seat 4, and an energy probe 6 is fixedly arranged on the other side of the mounting seat.
Further, a grating ruler 10 is transversely arranged at the top of the rear end face of the mounting plate 1, and a reading head 12 is fixedly arranged on the mounting seat 4 in cooperation with the grating ruler 10.
Further, an attenuation sheet 7 is cooperatively arranged at the top end of the CCD 8, and the passing rate of the attenuation sheet is 0.2.
Further, the energy probe 6 is a heat-sensitive energy detection probe, the energy probe 6 is electrically connected with the upper computer through a wire, and the detection area of the energy probe is larger than the CCD field of view.
Further, the servo motor is electrically connected with the servo driver through a wire, and the encoder and the servo driver are respectively electrically connected with the driving controller through wires.
Further, the CCD is electrically connected with the upper computer through a lead.
Further, a drag chain 3 for placing cables is arranged between the mounting seat and the mounting plate in a matched mode.
The method for detecting the energy of the photoetching machine provided by the second aspect of the invention comprises the following steps:
dividing the light emergent region of the photoetching machine into N parts according to the field of view of the CCD, wherein the number of the CCD photosensitive pixels is M when the light emergent region of each photoetching machine is singly mapped;
step two, a CCD is moved into a light emergent area of the photoetching machine by controlling a moving mechanism of the photoetching machine and a servo motor for driving a mounting seat to slide, gray values of pixel points in each area are respectively measured, and an ambient light gray value B is obtained by averaging;
step three, the light emergent areas of the photoetching machine after equally dividing are subjected to independent image casting in sequence, gray values of all pixel points in the areas are respectively measured by using a CCD, and gray value average value A in all the light emergent areas of the photoetching machine is obtained through calculation;
step four, sequentially projecting light spots to each region by controlling the photoetching machine, sequentially moving an energy probe into each projection range of the photoetching machine, sequentially measuring power values in each region, and averaging to obtain an energy average value J;
fifthly, the coefficient between the gray value and the energy is K, and the coefficient is obtained through calculation: k=j/M (a-B);
step six, measuring the gray value of the pixel point as C and the photosensitive energy value of the pixel point as E, and calculating E=K (C-B) =J (C-B)/M (A-B);
step seven, respectively calculating the energy value E of each pixel point;
and step eight, analyzing the uniformity of the light emitted by the photoetching machine by comparing the energy value E of each pixel point, and judging whether the energy value E of each pixel point meets the production requirement.
Further, when the integral gray value in the area is lower, the integral gray value in the area is adjusted to be within a production required range by adjusting the light source current of the area, namely the energy value of the pixel point meets the production use requirement; when the gray value of part of the pixels in the area does not reach the standard, the light path is required to be overhauled and debugged; sequentially carrying out energy detection on each region until the gray value of each pixel point in each region reaches the standard, and continuing to start production and use; when the passing rate of the attenuation sheet is lower than 0.15, the attenuation sheet needs to be replaced in order to ensure the accuracy of energy detection.
Compared with the prior art, the invention has the beneficial effects that:
1. the CCD and the energy probe are matched for use, so that the energy detection of the pixel point can be accurately carried out on the light emitted by the photoetching machine, the light emitting energy uniformity of the photoetching machine can be detected more accurately, the exposure precision of the photoetching machine can be improved effectively, and the measurement error caused by the aging of the attenuation sheet can be prevented;
2. through the use of attenuator, be convenient for effectively improve CCD detectable energy range, through the use of hold-in range, be convenient for effectively reduce energy detection device's weight, be convenient for effectively reduce movement mechanism's deflection.
Drawings
FIG. 1 is a front view of a lithographic apparatus according to the invention;
FIG. 2 is a side view of the lithographic apparatus of the present invention.
In the figure, 1-mounting plate, 2-servo motor, 3-drag chain, 4-mount pad, 5-synchronizing wheel, 6-energy probe, 7-attenuation piece, 8-CCD, 9-guide rail, 10-grating ruler, 11-hold-in range, 12-reading head, 13-slider.
Detailed Description
The invention is further described below with reference to the accompanying drawings, without limiting the invention in any way, and any alterations or substitutions based on the teachings of the invention are intended to fall within the scope of the invention.
The invention aims to provide a more accurate detection method for the uniformity of the light-emitting energy of a photoetching machine, so that the exposure precision of the photoetching machine is improved, and the measurement error caused by the aging of an attenuation sheet is prevented; the energy range detectable by the CCD is improved, the weight of the energy detection device is reduced, and the deformation of the movement mechanism is effectively reduced.
Example 1
Referring to fig. 1 and 2, the lithographic energy detection device provided by the invention comprises a mounting plate 1, wherein the mounting plate 1 is fixedly arranged in a movement mechanism of a lithographic apparatus, two guide rails 9 are transversely and fixedly arranged on the front end surface of the mounting plate 1, a servo motor 2 is fixedly arranged on one side of the mounting plate, the servo motor 2 drives a mounting seat 4 through a synchronous wheel 5 and a synchronous belt 11, and the mounting seat is slidably arranged between the two guide rails through a sliding block 13. The servo motor 2 is an engine for controlling mechanical elements to run in a servo system, is an indirect speed change device for assisting the motor, can control the speed, has very accurate position precision, and can convert voltage signals into torque and rotating speed to drive the mounting seat 4.
One side of the mounting seat 4 is fixedly provided with a CCD 8, and the other side of the mounting seat is fixedly provided with an energy probe 6. The CCD is a charge coupled device, the magnitude of a signal is represented by an electric charge amount, and a detection element for transmitting the signal in a coupling mode is used.
The rear end face top of mounting panel 1 transversely is provided with grating chi 10, and mount pad 4 is provided with reading head 12 in coordination with grating chi 10 is fixed. The grating ruler is a measuring feedback device working by utilizing the optical principle of a grating, is commonly used in a closed-loop servo system of a numerical control machine tool and is used for detecting linear displacement or angular displacement, and a signal output by measurement is a digital pulse. The method has the characteristics of large detection range, high detection precision and high response speed. The grating ruler consists of a scale grating and a reading head, wherein the key part of the detection device is the reading head, and the reading head consists of a light source, a converging lens, an indicating grating, a photoelectric element, an adjusting mechanism and the like.
The top of the CCD 8 is provided with an attenuation sheet 7 in a matching way, and the attenuation sheet 7 is made into a sheet shape by utilizing the absorption characteristic of substances to light and is placed on a light path to attenuate the light intensity. In this embodiment, the passing rate of the attenuation sheet is 0.2, that is, only twenty percent of the original light intensity is transmitted through the attenuation sheet.
The energy probe 6 is a heat-sensitive energy detection probe, the energy probe 6 is electrically connected with an upper computer (not shown) through a lead, and the detection area of the energy probe is larger than the CCD field of view.
The servo motor is electrically connected with the servo driver through a wire, and the encoder (not shown) and the servo driver are electrically connected with the driving controller through wires respectively. The encoder is a digital sensor integrating optical, electromechanical and electric technologies, and can measure the rotation angle or the linear displacement with high precision.
The CCD is electrically connected with the upper computer through a lead. The upper computer can set parameters of the photoetching energy detection device, receive a state report sent by the photoetching energy detection device, alarm and the like.
A drag chain 3 for placing cables is arranged between the mounting seat and the mounting plate in a matched mode. The drag chain 3 can reciprocate, and plays roles of traction and protection on the built-in cable. Each section of the drag chain can be opened, and the drag chain is convenient to install and maintain. The noise is low, the wear resistance is realized during the movement, and the high-speed movement can be realized.
Example 2
In this embodiment, the present invention further provides a method for detecting energy of a lithography machine, including the following steps:
dividing the light emergent region of the photoetching machine into N parts according to the field of view of the CCD, wherein the number of the CCD photosensitive pixels is M when the light emergent region of each photoetching machine is singly mapped;
step two, a CCD is moved into a light emergent area of the photoetching machine by controlling a moving mechanism of the photoetching machine and a servo motor for driving a mounting seat to slide, gray values of pixel points in each area are respectively measured, and an ambient light gray value B is obtained by averaging;
step three, the light emergent areas of the N lithography machines after equally dividing are subjected to independent image casting in sequence, gray values of all pixel points in the areas are respectively measured by using a CCD, and gray value average value A in all the light emergent areas of the lithography machines is obtained through calculation;
step four, sequentially projecting light spots to each region by controlling the photoetching machine, sequentially moving an energy probe into each projection range of the photoetching machine, sequentially measuring power values in each region, and averaging to obtain an energy zero mean value J;
fifthly, the coefficient between the gray value and the energy is K, and the coefficient is obtained through calculation: k=j/M (a-B);
step six, measuring the gray value of the pixel point as C and the photosensitive energy value of the pixel point as E, and calculating E=K (C-B) =J (C-B)/M (A-B);
step seven, respectively calculating the energy value E of each pixel point;
and step eight, analyzing the uniformity of the light emitted by the photoetching machine by comparing the energy value E of each pixel point, and judging whether the energy value E of each pixel point meets the production requirement.
When the integral gray value in the area is lower (judging whether the gray value is lower or not is determined according to a specific experimental value and a threshold value is set), adjusting the integral gray value in the area to be within a range required by production by adjusting the light source current of the area, namely, the energy value of the pixel point meets the production use requirement; when the gray value of part of the pixels in the area does not reach the standard, the light path is required to be overhauled and debugged; sequentially carrying out energy detection on each region until the gray value of each pixel point in each region reaches the standard, and continuing to start production and use; when the passing rate of the attenuation sheet is lower than 0.15, the attenuation sheet needs to be replaced in order to ensure the accuracy of energy detection.
The beneficial effects of the invention are as follows:
1. the CCD and the energy probe are matched for use, so that the energy detection of the pixel point can be accurately carried out on the light emitted by the photoetching machine, the light emitting energy uniformity of the photoetching machine can be detected more accurately, the exposure precision of the photoetching machine can be improved effectively, and the measurement error caused by the aging of the attenuation sheet can be prevented;
2. through the use of attenuator, be convenient for effectively improve CCD detectable energy range, through the use of hold-in range, be convenient for effectively reduce energy detection device's weight, be convenient for effectively reduce movement mechanism's deflection.
The word "preferred" is used herein to mean serving as an example, instance, or illustration. Any aspect or design described herein as "preferred" is not necessarily to be construed as advantageous over other aspects or designs. Rather, use of the word "preferred" is intended to present concepts in a concrete fashion. The term "or" as used in this application is intended to mean an inclusive "or" rather than an exclusive "or". That is, unless specified otherwise or clear from the context, "X uses a or B" is intended to naturally include any of the permutations. That is, if X uses A; x is B; or X uses both A and B, then "X uses A or B" is satisfied in any of the foregoing examples.
Moreover, although the disclosure has been shown and described with respect to one or more implementations, equivalent alterations and modifications will occur to others skilled in the art based upon a reading and understanding of this specification and the annexed drawings. The present disclosure includes all such modifications and alterations and is limited only by the scope of the following claims. In particular regard to the various functions performed by the above described components (e.g., elements, etc.), the terms used to describe such components are intended to correspond, unless otherwise indicated, to any component which performs the specified function of the described component (e.g., that is functionally equivalent), even though not structurally equivalent to the disclosed structure which performs the function in the herein illustrated exemplary implementations of the disclosure. Furthermore, while a particular feature of the disclosure may have been disclosed with respect to only one of several implementations, such feature may be combined with one or other features of the other implementations as may be desired and advantageous for a given or particular application. Moreover, to the extent that the terms "includes," has, "" contains, "or variants thereof are used in either the detailed description or the claims, such terms are intended to be inclusive in a manner similar to the term" comprising.
The functional units in the embodiment of the invention can be integrated in one processing module, or each unit can exist alone physically, or a plurality of or more than one unit can be integrated in one module. The integrated modules may be implemented in hardware or in software functional modules. The integrated modules may also be stored in a computer readable storage medium if implemented in the form of software functional modules and sold or used as a stand-alone product. The above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, or the like. The above-mentioned devices or systems may perform the storage methods in the corresponding method embodiments.
In summary, the foregoing embodiment is an implementation of the present invention, but the implementation of the present invention is not limited to the embodiment, and any other changes, modifications, substitutions, combinations, and simplifications made by the spirit and principles of the present invention should be equivalent to the substitution manner, and all the changes, modifications, substitutions, combinations, and simplifications are included in the protection scope of the present invention.
Claims (2)
1. The energy detection method of the lithography machine is based on detection devices and is characterized in that the detection devices comprise a mounting plate (1), wherein the mounting plate (1) is fixedly arranged in a motion mechanism of the lithography machine, two guide rails (9) are transversely and fixedly arranged on the front end surface of the mounting plate (1), a servo motor (2) is fixedly arranged on one side of the mounting plate, the servo motor (2) drives a mounting seat (4) through a synchronous wheel (5) and a synchronous belt (11), and the mounting seat is slidably arranged between the two guide rails through a sliding block (13);
one side of the mounting seat (4) is fixedly provided with a CCD (8), and the top surface of the mounting seat is fixedly provided with an energy probe (6);
a grating ruler (10) is transversely arranged at the top of the rear end surface of the mounting plate (1), and a reading head (12) is fixedly arranged on the mounting seat (4) in cooperation with the grating ruler (10);
an attenuation sheet (7) is arranged at the top end of the CCD (8) in a matched mode, and the passing rate of the attenuation sheet is 0.2;
the energy probe (6) is a thermosensitive energy detection probe, the energy probe (6) is electrically connected with the upper computer through a lead, and the detection area of the energy probe is larger than the CCD visual field; the servo motor is electrically connected with the servo driver through a wire, and the encoder and the servo driver are respectively electrically connected with the driving controller through wires;
the CCD is electrically connected with the upper computer through a lead;
a drag chain (3) for placing cables is arranged between the mounting seat and the mounting plate in a matched mode;
the detection method comprises the following steps:
dividing the light emergent region of the photoetching machine into N parts according to the field of view of the CCD, wherein the number of the CCD photosensitive pixels is M when the light emergent region of each photoetching machine is singly mapped;
step two, a CCD is moved into a light emergent area of the photoetching machine by controlling a moving mechanism of the photoetching machine and a servo motor for driving a mounting seat to slide, gray values of pixel points in each area are respectively measured, and an ambient light gray value B is obtained by averaging;
step three, the light emergent areas of the photoetching machine after equally dividing are subjected to independent image casting in sequence, gray values of all pixel points in the areas are respectively measured by using a CCD, and gray value average value A in all the light emergent areas of the photoetching machine is obtained through calculation;
step four, sequentially projecting light spots to each region by controlling the photoetching machine, sequentially moving an energy probe into each projection range of the photoetching machine, sequentially measuring power values in each region, and averaging to obtain an energy average value J;
fifthly, the coefficient between the gray value and the energy is K, and the coefficient is obtained through calculation: k=j/M (a-B);
step six, measuring the gray value of the pixel point as C and the photosensitive energy value of the pixel point as E, and calculating E=K (C-B) =J (C-B)/M (A-B);
step seven, respectively calculating the energy value E of each pixel point;
and step eight, analyzing the uniformity of the light emitted by the photoetching machine by comparing the energy value E of each pixel point, and judging whether the energy value E of each pixel point meets the production requirement.
2. The method according to claim 1, wherein determining whether the energy value E of each pixel satisfies the production requirement comprises: when the integral gray value in the area is lower than a preset threshold value, adjusting the light source current of the area to adjust the integral gray value in the area to be within a range required by production; when the gray values of partial pixels in the areas are not up to the standard, the light path is required to be overhauled and debugged, and energy detection is sequentially carried out on each area until the gray values of all pixels in each area are up to the standard, and the production and the use are continuously started; when the passing rate of the attenuation sheet is lower than 0.15, the attenuation sheet is replaced to ensure the accuracy of energy detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111554580.5A CN114323268B (en) | 2021-12-17 | 2021-12-17 | Energy detection device and method for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111554580.5A CN114323268B (en) | 2021-12-17 | 2021-12-17 | Energy detection device and method for photoetching machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114323268A CN114323268A (en) | 2022-04-12 |
| CN114323268B true CN114323268B (en) | 2024-03-29 |
Family
ID=81052565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111554580.5A Active CN114323268B (en) | 2021-12-17 | 2021-12-17 | Energy detection device and method for photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114323268B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1621787A (en) * | 2003-11-27 | 2005-06-01 | 北京光电技术研究所 | Measuring system and method for wave zone laser energy/power |
| CN111025859A (en) * | 2019-12-30 | 2020-04-17 | 苏州源卓光电科技有限公司 | Exposure machine and energy detection method and device thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6774578B2 (en) * | 2000-09-19 | 2004-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Self light emitting device and method of driving thereof |
-
2021
- 2021-12-17 CN CN202111554580.5A patent/CN114323268B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1621787A (en) * | 2003-11-27 | 2005-06-01 | 北京光电技术研究所 | Measuring system and method for wave zone laser energy/power |
| CN111025859A (en) * | 2019-12-30 | 2020-04-17 | 苏州源卓光电科技有限公司 | Exposure machine and energy detection method and device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114323268A (en) | 2022-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11796303B2 (en) | Sheet thickness measurement device | |
| CN105466355B (en) | Portable train wheel tread contour detecting device | |
| CN1081326C (en) | Laser on-line testing and checking apparatus for rubber element outline | |
| CN213121133U (en) | Automobile body wheel arch height detection device | |
| CN111037106A (en) | Z-axis motion control system and method of laser processing equipment | |
| CN114323268B (en) | Energy detection device and method for photoetching machine | |
| CN111458338A (en) | Comprehensive platform positioning system | |
| CN108709509B (en) | Contour camera, matched oversized-diameter revolving body workpiece non-contact caliper and non-contact revolving body measuring method | |
| CN205280000U (en) | Portable train tire tread profile detection device | |
| CN108459543A (en) | A crane multi-point positioning control equipment | |
| US4777610A (en) | Thickness monitor | |
| KR100726494B1 (en) | Vehicle headlamp amer | |
| JP2001004320A (en) | Method and device for measuring backlash of drive array | |
| KR20040081946A (en) | Apparatus for measuring roughness and flatness | |
| CN104870935B (en) | Machines with movable machine parts, especially coordinate measuring machines or machine tools | |
| CN115615336A (en) | Grating type self-positioning distance measuring device | |
| CN107449375A (en) | A kind of increment type Circular gratings chi grating Angular Displacement Detecting System and method | |
| US20140067090A1 (en) | Movable device allowing instantaneous correction of error in moving state and error correction method thereof | |
| CN207147430U (en) | A kind of increment type Circular gratings chi grating Angular Displacement Detecting System | |
| CN210089611U (en) | Flatness out-of-tolerance continuous measuring device | |
| CN210100765U (en) | Automatic scanning, measuring and analyzing device for shape of engineering tire wound tread | |
| CN117781879A (en) | Crystal bar length and diameter detection method | |
| CN222353483U (en) | An energy detection mechanism | |
| CN222881930U (en) | Calibration device for coplanarity measuring instrument of elevator guide rail | |
| WO2014017163A1 (en) | Position detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |