CN114381730A - High-wear-resistance component, preparation method thereof, structural component and terminal - Google Patents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
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Abstract
Description
技术领域technical field
本申请涉及复合材料技术领域,具体涉及一种高耐磨构件及其制备方法、结构件和终端。The present application relates to the technical field of composite materials, in particular to a highly wear-resistant component and a preparation method thereof, a structural component and a terminal.
背景技术Background technique
目前手机、平板电脑等终端产品正朝着小体积的方向发展。为提高小体积的终端产品的用户使用体验及使用寿命,对终端产品中的转轴等结构件的耐磨性能提出了更高要求。然而,现有的转轴通常为不锈钢等钢基材,难以满足日益严格的耐磨要求,因此有必要开发一种耐磨性较好的耐磨涂层。At present, terminal products such as mobile phones and tablet computers are developing in the direction of small size. In order to improve the user experience and service life of small-volume terminal products, higher requirements are placed on the wear resistance of structural parts such as rotating shafts in the terminal products. However, the existing rotating shaft is usually made of stainless steel and other steel base materials, which is difficult to meet the increasingly strict wear resistance requirements. Therefore, it is necessary to develop a wear-resistant coating with better wear resistance.
发明内容SUMMARY OF THE INVENTION
鉴于此,本申请实施例提供了一种高耐磨构件,其具有渗层及厚而硬的耐磨复合涂层,可在不影响构件的空间占比的情况下,显著提升其耐磨性能及使用寿命,该构件可用于制备终端产品结构件,实现终端产品小体积的同时兼顾可靠性。In view of this, the embodiments of the present application provide a highly wear-resistant component, which has a permeable layer and a thick and hard wear-resistant composite coating, which can significantly improve its wear resistance without affecting the space ratio of the component and service life, the component can be used to prepare the structural parts of the end product, so as to realize the small size of the end product while taking into account the reliability.
具体地,本申请实施例第一方面提供了一种高耐磨构件,包括构件基体和依次设置在所述构件基体上的渗层和耐磨复合涂层,所述耐磨复合涂层沿厚度方向包括至少两个堆叠的夹层结构,每一所述夹层结构均包括金属打底层、类金刚石层和夹设于所述金属打底层和所述类金刚石层之间的中间层,每一所述夹层结构中的所述金属打底层靠近所述渗层;其中,所述中间层为包括金属和所述金属的碳化物的混合层;所述构件基体的材质包括钢基材。Specifically, the first aspect of the embodiments of the present application provides a highly wear-resistant component, comprising a component base, a permeation layer and a wear-resistant composite coating sequentially arranged on the component base, and the wear-resistant composite coating is along the thickness of the component. The orientation includes at least two stacked sandwich structures, each of the sandwich structures including a metal primer, a diamond-like layer, and an intermediate layer sandwiched between the metal primer and the diamond-like layer, each of the The metal base layer in the sandwich structure is close to the infiltration layer; wherein, the intermediate layer is a mixed layer including metal and carbide of the metal; the material of the component base includes a steel base material.
本申请实施方式中,所述中间层中,所述金属的碳化物的质量浓度为5%-60%,所述金属的质量浓度为40%-95%。同时包含有合适含量的金属碳化物和金属的中间层,能够较好地在金属打底层和类金刚石层之间提供良好应力缓冲,使每个夹层结构均具有较小的内应力及较高的膜基强合强度。In the embodiment of the present application, in the intermediate layer, the mass concentration of the carbide of the metal is 5%-60%, and the mass concentration of the metal is 40%-95%. At the same time, it contains a suitable content of metal carbide and a metal intermediate layer, which can better provide a good stress buffer between the metal base layer and the diamond-like carbon layer, so that each sandwich structure has a small internal stress and a high Film base bond strength.
本申请一些实施方式中,自所述构件基体向所述渗层的方向,所述中间层中所述金属的质量百分含量逐渐减少,所述金属的碳化物的质量百分含量逐渐增加。此时,从所述金属打底层至所述类金刚石层就能逐渐形成韧性由“软”及“硬”的梯度过渡,更有利于夹层结构内应力的降低。In some embodiments of the present application, from the component base to the infiltration layer, the mass percentage content of the metal in the intermediate layer gradually decreases, and the mass percentage content of the carbide of the metal gradually increases. At this time, a gradient transition of toughness from "soft" to "hard" can be gradually formed from the metal bottom layer to the diamond-like layer, which is more conducive to reducing the internal stress of the sandwich structure.
本申请一些实施方式中,所述中间层还可以包括类金刚石。此时,中间层可以更好地在所述打底层与所述类金刚石层之间提供应力缓冲。In some embodiments of the present application, the intermediate layer may further include diamond-like carbon. At this time, the intermediate layer can better provide stress buffering between the primer layer and the diamond-like layer.
本申请实施方式中,自所述构件基体向所述渗层的方向,所述中间层中所述类金刚石的质量百分含量逐渐增加。In the embodiment of the present application, the mass percentage content of the diamond-like carbon in the intermediate layer gradually increases from the component base to the infiltrating layer.
本申请实施方式中,每个所述中间层的厚度独立地在0.05μm-1μm的范围。In the embodiment of the present application, the thickness of each of the intermediate layers is independently in the range of 0.05 μm-1 μm.
本申请实施方式中,每个所述类金刚石层的厚度独立地在0.05μm-5μm的范围。In the embodiments of the present application, the thickness of each of the diamond-like layers is independently in the range of 0.05 μm-5 μm.
本申请实施方式中,自所述构件基体向所述渗层的方向,所述耐磨复合涂层中,距所述渗层最远的类金刚石层的厚度大于其他所述类金刚石层的厚度。此时,构件的最外侧为厚度最厚的类金刚石层,可使该构件的耐磨性能得到明显提升,使其能更好地应用于高硬度、高耐磨要求的场景。In the embodiment of the present application, in the direction from the component substrate to the infiltration layer, in the wear-resistant composite coating, the thickness of the diamond-like layer farthest from the infiltration layer is greater than the thickness of the other diamond-like layers. . At this time, the outermost part of the component is the diamond-like carbon layer with the thickest thickness, which can significantly improve the wear resistance of the component, making it suitable for use in scenarios with high hardness and high wear resistance requirements.
本申请实施方式中,任意相邻的两个所述夹层结构中的两个所述类金刚石层中,远离所述渗层的类金刚石层的厚度大于靠近所述渗层的类金刚石层的厚度。In the embodiment of the present application, in the two diamond-like layers in any two adjacent sandwich structures, the thickness of the diamond-like layer far from the seepage layer is greater than the thickness of the diamond-like layer near the seepage layer. .
本申请实施方式中,每个所述金属打底层的厚度独立地在0.05μm-3μm的范围。In the embodiment of the present application, the thickness of each of the metal primer layers is independently in the range of 0.05 μm-3 μm.
本申请实施方式中,所述夹层结构的数目为3-40。In the embodiment of the present application, the number of the sandwich structures is 3-40.
本申请实施方式中,所述耐磨复合涂层的厚度为4.5μm-60μm。较厚的耐磨复合涂层可显著提升构件的耐磨性能和使用寿命。In the embodiment of the present application, the thickness of the wear-resistant composite coating is 4.5 μm-60 μm. Thicker wear-resistant composite coatings can significantly improve the wear resistance and service life of components.
本申请实施方式中,所述耐磨复合涂层的维氏硬度大于或等于1200HV。In the embodiment of the present application, the Vickers hardness of the wear-resistant composite coating is greater than or equal to 1200HV.
本申请实施方式中,所述渗层包括渗碳层、渗氮层、碳氮共渗层、渗硼层、渗硅层或硼硅共渗层。In the embodiments of the present application, the infiltrated layer includes a carburized layer, a nitrided layer, a carbonitrided layer, a boronized layer, a siliconized layer or a borosilicated layer.
本申请实施方式中,所述渗层靠近所述耐磨复合涂层一侧的表面粗糙度小于或等于1μm。此时的渗层去除了表面含有的较多渗层元素,粗糙度低,致密度高,硬度也相应较高,在其上能形成结合力高、平整度好的涂层。In the embodiment of the present application, the surface roughness of the side of the infiltration layer close to the wear-resistant composite coating is less than or equal to 1 μm. At this time, the infiltration layer removes many infiltration layer elements contained on the surface, with low roughness, high density, and correspondingly high hardness, and a coating with high bonding force and good flatness can be formed on it.
本申请实施方式中,所述渗层的厚度为4μm-150μm,所述渗层的维氏硬度大于或等于900HV。较高硬度的渗层更有利于构件整体硬度的提升。In the embodiment of the present application, the thickness of the infiltration layer is 4 μm-150 μm, and the Vickers hardness of the infiltration layer is greater than or equal to 900HV. The infiltration layer with higher hardness is more conducive to the improvement of the overall hardness of the component.
本申请实施方式中,所述金属打底层的材质包括钛、铬、钨、锆、钼、镍、铌、铜、铝、镁、锌、钒及其合金中的一种或多种。In the embodiment of the present application, the material of the metal primer layer includes one or more of titanium, chromium, tungsten, zirconium, molybdenum, nickel, niobium, copper, aluminum, magnesium, zinc, vanadium, and alloys thereof.
本申请一些实施方式中,所述中间层含有与所述金属打底层中相同的金属元素。In some embodiments of the present application, the intermediate layer contains the same metal element as that in the metal primer layer.
本申请实施方式中,所述钢基材包括碳钢和合金钢中的一种或多种。In the embodiments of the present application, the steel base material includes one or more of carbon steel and alloy steel.
本申请实施方式中,所述构件基体包括转轴零部件、模具、刀具或其他零部件。In the embodiments of the present application, the component base includes a rotating shaft component, a mold, a tool, or other components.
本申请实施例第一方面提供的高耐磨构件,通过在构件基体上依次设置渗层和耐磨复合涂层,且耐磨复合涂层包括至少两个组成为金属打底层-中间层-类金刚石层的夹层结构,该耐磨复合涂层的内应力极低,膜基结合力大,能赋予该构件较高的硬度和优异的耐磨性能,增加使用寿命,将该构件用于制备终端产品结构件,可实现终端产品小体积的同时兼顾可靠性,提升产品竞争力。In the highly wear-resistant component provided by the first aspect of the embodiment of the present application, a permeation layer and a wear-resistant composite coating are sequentially arranged on the component substrate, and the wear-resistant composite coating includes at least two components consisting of a metal base layer-intermediate layer-type Sandwich structure of diamond layer, the wear-resistant composite coating has extremely low internal stress and large film-base bonding force, which can endow the component with high hardness and excellent wear resistance, increase service life, and use the component to prepare terminals The product structure can realize the small size of the end product while taking into account the reliability and enhance the competitiveness of the product.
本申请实施例第二方面还提供了一种高耐磨构件的制备方法,包括:A second aspect of the embodiments of the present application also provides a method for preparing a highly wear-resistant component, including:
(1)在构件基体的表面形成渗层,并对所述渗层表面进行光洁化处理;其中,所述构件基体的材质包括钢基材;(1) forming a permeation layer on the surface of the component base, and smoothing the surface of the permeation layer; wherein, the material of the component base includes a steel base material;
(2)在所述渗层上依次沉积形成金属打底层、中间层和类金刚石层,得到一夹层结构,其中,所述中间层为包括金属和所述金属的碳化物的混合层;(2) sequentially depositing a metal primer layer, an intermediate layer and a diamond-like carbon layer on the infiltrating layer to obtain a sandwich structure, wherein the intermediate layer is a mixed layer comprising a metal and a carbide of the metal;
(3)根据所述步骤(2)再沉积制备至少一个所述夹层结构,形成包括至少两个堆叠的所述夹层结构的耐磨复合涂层,得到高耐磨构件。(3) Redepositing and preparing at least one of the sandwich structures according to the step (2), forming a wear-resistant composite coating comprising at least two stacked sandwich structures, to obtain a highly wear-resistant component.
本申请实施方式中,所述中间层的形成过程包括:开启金属靶材,向镀膜设备的真空室内通入气态碳源,并逐渐增大所述气态碳源的气流量,形成所述中间层;其中,沿所述中间层的厚度增长方向,所述金属的质量百分含量逐渐减少,所述金属碳化物的质量百分含量逐渐增加。In the embodiment of the present application, the formation process of the intermediate layer includes: turning on the metal target, introducing a gaseous carbon source into the vacuum chamber of the coating equipment, and gradually increasing the gas flow of the gaseous carbon source to form the intermediate layer ; Wherein, along the thickness growth direction of the intermediate layer, the mass percentage content of the metal gradually decreases, and the mass percentage content of the metal carbide gradually increases.
本申请实施例第二方面提供的高耐磨构件的制备方法,工艺简单、成本低廉、生产效率高,适合工业化批量制备。所得高耐磨构件的涂层厚度、硬度、耐磨性均较好。The method for preparing a highly wear-resistant component provided by the second aspect of the embodiment of the present application has the advantages of simple process, low cost and high production efficiency, and is suitable for industrialized batch preparation. The obtained high wear-resistant component has better coating thickness, hardness and wear resistance.
本申请实施例第三方面还提供了一种结构件,所述结构件包括本申请实施例第一方面所述的高耐磨构件。例如,所述结构件可以是转轴等有较高耐磨要求的终端产品结构件。A third aspect of the embodiments of the present application further provides a structural member, and the structural member includes the highly wear-resistant member described in the first aspect of the embodiments of the present application. For example, the structural member may be a final product structural member such as a rotating shaft that has high wear resistance requirements.
本申请实施例第四方面还提供了一种终端,所述终端包括本申请实施例第三方面所述的结构件。A fourth aspect of the embodiments of the present application further provides a terminal, where the terminal includes the structural member described in the third aspect of the embodiments of the present application.
附图说明Description of drawings
图1为本申请一实施方式中提供的高耐磨构件的结构示意图;FIG. 1 is a schematic structural diagram of a highly wear-resistant component provided in an embodiment of the application;
图2为本申请一实施方式中提供的折叠手机转轴的结构示意图;2 is a schematic structural diagram of a rotating shaft of a folding mobile phone provided in an embodiment of the application;
图3为本申请一实施方式中提供的终端的结构示意图。FIG. 3 is a schematic structural diagram of a terminal provided in an embodiment of the present application.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请技术方案进行说明。The technical solutions of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application.
参见图1,本申请实施例提供了一种高耐磨构件,包括构件基体10,构件基体10的材质包括钢基材,该高耐磨构件还包括依次设置在构件基体10上的渗层20和耐磨复合涂层,该耐磨复合涂层沿厚度方向包括至少两个堆叠的夹层结构,每一所述夹层结构均包括金属打底层301、类金刚石层303和夹设于金属打底层301和类金刚石层303之间的中间层302,每一个夹层结构中的金属打底层301靠近渗层;其中,中间层302为包括金属和金属的碳化物的混合层。Referring to FIG. 1 , an embodiment of the present application provides a highly wear-resistant component, including a
本申请中,可以将金属打底层记作A,中间层记作B,类金刚石层记作C,耐磨复合涂层沿厚度方向自构件基体10向渗层20的排布形式为(ABC)n;其中A靠近渗层20。自构件基体10向渗层20的方向,可将耐磨复合涂层的每个夹层结构依次记作31、32…3n。这样自构件基体10表面向上,其上的涂层依次包括渗层20、第一夹层结构31(A-B-C)、第二夹层结构32(A-B-C)、…第n夹层结构3n(A-B-C)。In this application, the metal bottom layer can be denoted as A, the intermediate layer can be denoted as B, the diamond-like layer can be denoted as C, and the arrangement of the wear-resistant composite coating from the
本申请实施例中,高耐磨构件中,其同时具有渗层20及厚而硬的耐磨复合涂层,其中的渗层20可以提供致密度高、硬度高的基底,渗层20与构件基体10之间的结合较牢固,并便于后续在其上形成结合力高且厚而硬的耐磨复合涂层,该耐磨复合涂层可在不影响构件的空间占比的情况下,显著提升构件的耐磨性能及使用寿命。该构件可用于制备终端产品结构件,实现终端产品小体积的同时兼顾可靠性。In the embodiment of the present application, the highly wear-resistant component has both a
本申请实施方式中,构件基体10的材质包括钢基材,其成型方法包括机械加工、3D打印、压制成型、注射成型等中的一种或多种。构件基体10可以全部或部分采用钢基材制备而成。当构件基体10全部采用钢基材形成时,可以是单一组成的钢基材,也可以是成分不同的钢基材的叠加结构。当构件基体10部分采用钢基材制备而成时,例如,构件基体10为铝合金层与钢基材层的叠层,后续可以在钢基材层上依次设置渗层、耐磨复合涂层等。即,此时,渗层20设置在构件基体的钢基材侧。In the embodiment of the present application, the material of the
本申请实施方式中,钢基材可以包括碳钢和合金钢中的一种或多种。其中,碳钢是含碳量在0.0218%~2.11%的铁碳合金。合金钢是在碳钢基础上加入一些合金元素而炼成的钢。按合金元素的种类,合金钢可以分为铬钢、锰钢、铬锰钢、铬镍钢等,按特性和用途,合金钢可以分为合金结构钢(用作工程构件等)、合金工具钢(用作模具、刀具等)、特殊功能钢(如不锈钢、耐酸钢、耐热钢等)。In the embodiments of the present application, the steel base material may include one or more of carbon steel and alloy steel. Among them, carbon steel is an iron-carbon alloy with a carbon content of 0.0218% to 2.11%. Alloy steel is a steel made by adding some alloying elements on the basis of carbon steel. According to the types of alloying elements, alloy steel can be divided into chromium steel, manganese steel, chromium-manganese steel, chromium-nickel steel, etc. According to characteristics and uses, alloy steel can be divided into alloy structural steel (used as engineering components, etc.), alloy tool steel, etc. (used as molds, knives, etc.), special functional steel (such as stainless steel, acid-resistant steel, heat-resistant steel, etc.).
本申请实施方式中,渗层20可以包括渗碳层、渗氮层、碳氮共渗层、渗硼层、渗硅层或硼硅共渗层,但不限于此。基于渗层20是在钢基材上形成,在渗层20的生长过程中,渗层可能会受到钢基材的影响,因此,渗层20中可能还含有钢基材元素。In the embodiment of the present application, the
本申请中的渗层20为经过光洁化处理的去表面渗层,其粗糙度低、致密度高,硬度较高,并有利于在其上形成结合力高、平整度好的涂层。本申请一些实施方式中,渗层20靠近所述耐磨复合涂层一侧(即,表层)的表面粗糙度Ra可以小于或等于1μm。本申请一些实施方式中,渗层20的表层渗层元素含量不超过70wt%。The
本申请实施方式中,渗层20的厚度可以为4μm-150μm。合适的渗层厚度可有助于提供耐受力高的基底,便于在其上形成厚而硬的耐磨复合涂层。在一些实施方式中,渗层20的厚度可以为4-30μm。例如可以为10μm-30μm、15μm-30μm或者16μm-30μm。In the embodiment of the present application, the thickness of the
本申请实施方式中,具有渗层的钢基材的维氏硬度远高于不具有渗层的钢基材,例如,不具有渗层的钢基材的维氏硬度一般小于500HV,而具有渗层的钢基材的维氏硬度可达900HV以上。在一些实施方式中,渗层的维氏硬度可以大于或等于1000HV。但仅具有渗层20的构件基体的耐磨性能已不能匹配日益严格的耐磨要求,以经渗碳处理后的不锈钢MIM17-4制成的折叠手机转轴为例,其在经历开闭合5000次以后,磨损量显著变大,渗碳层会被磨掉。因此,本申请实施例,在渗层20的基础上设置厚而硬的耐磨复合涂层,以赋予构件更优异的耐磨性能。In the embodiment of the present application, the Vickers hardness of the steel substrate with the infiltration layer is much higher than that of the steel substrate without the infiltration layer. For example, the Vickers hardness of the steel substrate without the infiltration layer is generally less than 500HV, while the steel substrate with the infiltration layer The Vickers hardness of the steel substrate of the layer can reach more than 900HV. In some embodiments, the Vickers hardness of the infiltration layer may be greater than or equal to 1000HV. However, the wear resistance of the component base with only the infiltrated
本申请实施方式中,金属打底层301为韧性较高的“软层”,能在渗层20与中间层302之间提供应力缓冲,提高中间层302的附着强度。金属打底层301可以为金属单质层、合金层、或者为金属单质和合金的复合层。本申请实施方式中,金属打底层301的材质可以包括钛(Ti)、铬(Cr)、钨(W)、锆(Zr)、钼(Mo)、镍(Ni)、铌(Nb)、铜(Cu)、铝(Al)、镁(Mg)、锌(Zn)、钒(V)及其合金中的一种或多种。在本申请一些实施例中,金属打底层301的材质为钛、铬、钨、锆及其合金中的一种或多种。In the embodiment of the present application, the
金属打底层301可以为一层或多层结构。例如,金属打底层可以是金属钛的单层,也可以是金属钛层与金属铬层的叠层,还可以是钛与铬的合金层,也可以是金属钛层与铝合金的叠层等。其中,当金属打底层301为合金层时,该合金层可以是某一固定组成的合金构成的单层结构,或者为两种以上不同组成的合金构成的双层结构或多层结构。在本申请一些实施方式中,金属打底层301为能较好提供应力缓冲的Ti层、Cr层、Zr层、TiCr合金层等。The
本申请中,中间层302为包括金属和金属碳化物的混合层。具有该成分组成的中间层302可以在金属打底层301和类金刚石层303之间提供良好应力缓冲,使每个夹层结构均具有较小的内应力及较高的膜基强合强度,利于各膜层的稳定。本申请一些实施方式中,中间层302的金属元素可以与金属打底层301中的金属元素完全不同。本申请另一些实施方式中,中间层302可以含有与金属打底层301中相同的金属元素。即,中间层302中的金属元素可以与金属打底层301中的金属元素完全相同(此时中间层302可以称为包括金属打底层材料以及金属打底层材料的碳化物的混合层),也可以部分相同(此时的金属打底层301是含有多种金属元素)。In this application, the intermediate layer 302 is a mixed layer including metal and metal carbide. The intermediate layer 302 with this composition can provide a good stress buffer between the
本申请实施方式中,中间层302中,金属碳化物的质量浓度为5%-60%,金属的质量浓度为40%-95%。同时包含有合适含量的金属碳化物和金属的中间层,能够较好地在金属打底层301和类金刚石层303之间提供良好应力缓冲,使每个夹层结构均具有较小的内应力及较高的膜基强合强度。In the embodiment of the present application, in the intermediate layer 302, the mass concentration of metal carbide is 5%-60%, and the mass concentration of metal is 40%-95%. At the same time, the intermediate layer containing suitable content of metal carbide and metal can better provide a good stress buffer between the
本申请一些实施方式中,自构件基体10向渗层20的方向,中间层302中金属的质量百分含量逐渐减少而金属碳化物的质量百分含量逐渐增加。这样,从金属打底层301至类金刚石层302就能逐渐形成韧性由“软”及“硬”的梯度过渡,更有利于夹层结构的内应力的降低及与渗层的结合力提高,还利于中间层302分别与金属打底层301、类金刚石层302之间的高强度结合。本申请一些实施例中,金属碳化物的质量百分含量从0%逐渐增加至60%以内,金属的质量百分含量从100%逐渐减少至40%以内。In some embodiments of the present application, from the
在本申请另一些实施方式中,中间层302还可以包括类金刚石(diamond-likecarbon,DLC)。即,此时的中间层302为包括金属材料与其碳化物、类金刚石的混合层。DLC是一种非晶亚稳态碳材料,兼有高硬度、低摩擦、高热导率、高透光性。此时的中间层302可以更好地在打底层301与类金刚石层303之间提供应力缓冲。其中,类金刚石可以在中间层302的整个厚度方向都有分布,也可以仅在中间层302的某些厚度范围有分布。在某些实施例中,自构件基体10向上,该中间层302可以先是金属与金属碳化物二者的混合层,再是金属与金属碳化物和类金刚石三者的混合层。In other embodiments of the present application, the intermediate layer 302 may further include diamond-like carbon (DLC). That is, the intermediate layer 302 at this time is a mixed layer including a metal material, its carbide, and diamond-like carbon. DLC is an amorphous metastable carbon material with high hardness, low friction, high thermal conductivity and high light transmittance. The intermediate layer 302 at this time can better provide a stress buffer between the
本申请一些实施方式中,自构件基体10向渗层20的方向,中间层302中类金刚石的质量百分含量也是逐渐增加的。这样中间层302中成分、弹性模量、硬度和热膨胀系数等均可自上而下呈梯度分布,无成分突变的界面,从而可大大降低耐磨复合涂层的每个夹层结构的内应力,并有助于提高耐磨复合涂层的膜基结合强度。In some embodiments of the present application, the mass percentage of diamond-like carbon in the intermediate layer 302 also increases gradually in the direction from the
本申请实施方式中,每个金属打底层301、每个中间层302的材质组成、厚度、形成方式等可以相同,也可以不同。每个类金刚石层303的厚度、形成方式等可以相同,也可以不同。其中,每个打底层301的厚度可以独立地在0.05μm-3μm的范围。每个中间层302的厚度独立地在0.05μm-1μm的范围。每个类金刚石层303的厚度独立地在0.05μm-5μm的范围。In the embodiments of the present application, the material composition, thickness, and formation method of each
本申请一些实施方式中,自构件基体10向渗层20的方向,上述耐磨复合涂层中,距渗层20最远的类金刚石层的厚度可以大于其他类金刚石层的厚度。此时,上述构件的最外侧为厚度最厚的类金刚石层,可使该构件的耐磨性能得到明显提升,使其能更好地应用于高硬度、高耐磨要求的场景。在一些实施例中,距渗层20最远的类金刚石层的厚度为0.05μm-5μm,其他类金刚石层的厚度为0.05μm-1.5μm。In some embodiments of the present application, in the direction from the
本申请一些实施方式中,任意相邻的两个夹层结构中的两个类金刚石层中,远离渗层20的类金刚石层的厚度大于靠近渗层20的类金刚石层的厚度。换句话说,自构件基体10向渗层20的方向,耐磨复合涂层依次包括第一夹层结构31、第二第一夹层结构32…至第n夹层结构3n(n代表夹层结构的数目),其中,第m夹层结构中的类金刚石层的厚度大于第m-1夹层结构中的类金刚石层的厚度,m为2至n中的任意值。该实施方式中,多个类金刚石层中,单个类金刚石层303的厚度自下而上是依次增加的,这样,即使在最顶层的最厚的类金刚石层被磨掉后,再被磨损的将是厚度次之的类金刚石层,具有这样DLC厚度特性的耐磨复合涂层,可以在对构件的空间占比造成最小增加的情况下,显著提升其耐磨性能及使用寿命。In some embodiments of the present application, among the two diamond-like carbon layers in any two adjacent sandwich structures, the thickness of the diamond-like carbon layer far from the
本申请实施方式中,上述n(即,夹层结构的数目)可以为3-40之间的整数。例如,n可以为4、5、6、8、10、15、20、25、30、35或38等。较大的n可使得耐磨复合涂层的厚度较厚,耐磨性能更优异,有利于构件使用寿命的提升。In the embodiments of the present application, the above n (ie, the number of interlayer structures) may be an integer between 3 and 40. For example, n can be 4, 5, 6, 8, 10, 15, 20, 25, 30, 35, or 38, etc. A larger n can make the thickness of the wear-resistant composite coating thicker and the wear resistance more excellent, which is beneficial to the improvement of the service life of the components.
本申请实施方式中,上述耐磨复合涂层的厚度可以为4.5μm-60μm。较厚的耐磨复合涂层可显著提升构件的耐磨性能和使用寿命。在一些实施例中,耐磨复合涂层的厚度可以为10μm-60μm。本申请实施方式中,耐磨复合涂层的维氏硬度可以大于或等于1200HV。在一些实施方式中,耐磨复合涂层的维氏硬度可以大于或等于1500HV,或者大于或等于1800HV。In the embodiment of the present application, the thickness of the above-mentioned wear-resistant composite coating may be 4.5 μm-60 μm. Thicker wear-resistant composite coatings can significantly improve the wear resistance and service life of components. In some embodiments, the thickness of the wear resistant composite coating may be 10 μm-60 μm. In the embodiment of the present application, the Vickers hardness of the wear-resistant composite coating may be greater than or equal to 1200HV. In some embodiments, the Vickers hardness of the wear resistant composite coating may be greater than or equal to 1500 HV, or greater than or equal to 1800 HV.
本申请实施方式中,上述构件基体10包括模具、刀具、转轴零部件或其他零部件(如滑道等)。其中,对于转轴零部件可以列举转轴凸轮、转轴齿轮等。上述模具可以是冲压模具、压铸模具等。对于压铸模具,根据其待压铸的材料类型,可以将压铸模具分为压铸铝合金模具、压铸镁合金模具、压铸锌合金模具、压铸高熵合金模具、压铸锆基非晶模具等。In the embodiment of the present application, the above-mentioned
本申请实施例提供的上述高耐磨构件,其在构件基体上依次设置渗层及厚而硬的耐磨复合涂层,该耐磨复合涂层包括至少两个组成为金属打底层-中间层-类金刚石层的夹层结构,该耐磨复合涂层的内应力极低,膜基结合力大,可在不影响该构件空间占比的情况下,赋予该构件优异的耐磨性能及较长的使用寿命。将该构件用于制备终端产品结构件,可实现终端产品小体积的同时兼顾可靠性,提升产品竞争力。In the above-mentioned high wear-resistant component provided by the embodiment of the present application, an infiltration layer and a thick and hard wear-resistant composite coating are sequentially arranged on the component substrate. The wear-resistant composite coating includes at least two layers consisting of a metal base layer and an intermediate layer. - Sandwich structure of diamond-like layer, the wear-resistant composite coating has extremely low internal stress and large film-base bonding force, which can endow the component with excellent wear resistance and long life without affecting the space ratio of the component. service life. The component is used to prepare the structural parts of the terminal product, which can realize the small volume of the terminal product while taking into account the reliability and improve the competitiveness of the product.
相应地,本申请实施例还提供了上述高耐磨构件的一种制备方法,包括:Correspondingly, the embodiment of the present application also provides a preparation method of the above-mentioned high wear-resistant component, including:
S01、在构件基体的表面形成渗层,之后对所述渗层表面进行光洁化处理;其中,所述构件基体的材质包括钢基材;S01, forming an infiltration layer on the surface of the component base, and then performing a smoothing treatment on the surface of the infiltration layer; wherein, the material of the component base includes a steel base material;
S02、在所述渗层上依次沉积形成金属打底层、中间层和类金刚石层,得到一夹层结构,其中,所述中间层为包括金属和金属碳化物的混合层;S02, sequentially depositing a metal primer layer, an intermediate layer and a diamond-like carbon layer on the infiltrating layer to obtain a sandwich structure, wherein the intermediate layer is a mixed layer comprising metal and metal carbide;
S03、根据上述步骤S02再沉积制备至少一个所述夹层结构,形成包括至少两个堆叠的所述夹层结构的耐磨复合涂层,得到高耐磨构件。S03. Prepare at least one sandwich structure by redepositing according to the above step S02 to form a wear-resistant composite coating including at least two stacked sandwich structures to obtain a highly wear-resistant component.
本申请实施方式中,步骤S01中,在构件基体的表面形成渗层之前,还包括对构件基体进行光洁化预处理,以去除其表面的油渍、脏污、氧化层等。其中,所述光洁化预处理可以包括抛光处理、喷砂处理、溶剂清洗处理、辉光清洗处理和离子刻蚀清洗处理等中的一种或多种。可选地,经光洁化预处理后的构件基体的表面粗糙度小于或等于1μm。在本申请一实施方式中,先对构件基体进行抛光处理,再进行溶剂清洗处理。In the embodiment of the present application, in step S01 , before forming the infiltration layer on the surface of the component substrate, the component substrate further includes smoothing pretreatment to remove oil stains, dirt, oxide layers, etc. on its surface. Wherein, the polishing pretreatment may include one or more of polishing treatment, sandblasting treatment, solvent cleaning treatment, glow cleaning treatment, and ion etching cleaning treatment. Optionally, the surface roughness of the component base body after smoothing pretreatment is less than or equal to 1 μm. In an embodiment of the present application, the component substrate is first subjected to polishing treatment, and then to solvent cleaning treatment.
步骤S01中,构件基体的表面形成的渗层的初始厚度可以为10μm以上。例如,可以在15μm以上。渗层的形成方式可以为等离子渗工艺,处理温度较低,基本在钢基材的回火温度以下(例如在420℃以下)。渗层的形成时间可以控制在20h以内,例如在10-16h。其中,渗碳时所采用的碳源可以为乙炔、甲烷等,渗氮时采用的含氮渗剂可以是氮气等,渗硼时采用的含硼渗剂可以是硼粉、硼铁合金粉等,渗硅时采用的含硅渗剂可以是气态的四氯化硅、或固态的硅铁合金粉等。硼硅共渗时可以采用含硼铁合金粉和硅铁合金粉的混合粉。In step S01 , the initial thickness of the infiltration layer formed on the surface of the component substrate may be 10 μm or more. For example, it may be 15 μm or more. The formation method of the infiltration layer can be a plasma infiltration process, and the treatment temperature is relatively low, which is basically below the tempering temperature of the steel substrate (for example, below 420° C.). The formation time of the infiltration layer can be controlled within 20h, for example, 10-16h. Among them, the carbon source used in carburizing can be acetylene, methane, etc., the nitrogen-containing infiltrating agent used in nitriding can be nitrogen, etc., and the boron-containing infiltrating agent used in boronizing can be boron powder, boron-iron alloy powder, etc., The silicon-containing infiltration agent used in the infiltration of silicon can be gaseous silicon tetrachloride, or solid ferrosilicon alloy powder. The mixed powder of boron-containing ferroalloy powder and ferrosilicon alloy powder can be used for boron-silicon infiltration.
对渗层表面进行光洁化处理后,可以使构件基体上仅保留致密渗层(也可称为“去表面渗层”)。以渗层为渗碳层为例,进行光洁化处理后,可以去除表面原本含有的较多碳,包括在渗碳过程中形成的浮碳及疏松的表面碳固溶层及碳化合物层。这里的光洁化处理方式可以包括抛光和喷砂中的一种或两种。其中,相较于辉光清洗和离子刻蚀清洗,该光洁化处理的去除深度更大,以确保处理后的渗层硬度较大。可选地,渗层的表面去除厚度可以为0.5μm-3μm。After the surface of the infiltration layer is smoothed, only the dense infiltration layer (also referred to as "de-surface infiltration layer") can be left on the component substrate. Taking the carburized layer as an example, after smoothing treatment, a lot of carbon originally contained on the surface can be removed, including the floating carbon formed during the carburizing process, the loose surface carbon solid solution layer and the carbon compound layer. The polishing treatment here can include one or both of polishing and sandblasting. Among them, compared with the glow cleaning and the ion etching cleaning, the removal depth of the smoothing treatment is larger, so as to ensure that the hardness of the infiltrated layer after the treatment is larger. Optionally, the surface removal thickness of the infiltration layer may be 0.5 μm-3 μm.
本申请实施方式中,步骤S02中,金属打底层、中间层和类金刚石层的形式方式可以独立地选自物理气相沉积(PVD)和化学气相沉积(CVD)中的至少一种。其中,PVD可以包括磁控溅射、过滤式电弧离子镀、非过滤型电弧离子镀、射频离子镀等中的一种或多种,CVD可以包括热丝化学气相沉积(HFCVD)、等离子体增强化学气相沉积(PECVD)等中的一种或多种。其中,金属打底层通常采用PVD的方式形成,例如是磁控溅射工艺形成,以形成外观较均匀致密的膜层。本申请中可以采用PVD+PECVD的结合方式形成中间层。其中,在形成中间层时所采用的金属靶材与形成金属打底层时所用的金属靶材可以相同,或者不同。In the embodiment of the present application, in step S02, the form of the metal primer layer, the intermediate layer and the diamond-like layer can be independently selected from at least one of physical vapor deposition (PVD) and chemical vapor deposition (CVD). Wherein, PVD may include one or more of magnetron sputtering, filtered arc ion plating, non-filtered arc ion plating, radio frequency ion plating, etc., and CVD may include hot wire chemical vapor deposition (HFCVD), plasma enhanced One or more of Chemical Vapor Deposition (PECVD) etc. Among them, the metal base layer is usually formed by PVD, such as magnetron sputtering, so as to form a film layer with a more uniform and dense appearance. In this application, a combination of PVD+PECVD can be used to form the intermediate layer. Wherein, the metal target used in forming the intermediate layer and the metal target used in forming the metal primer may be the same or different.
在本申请一实施方式中,可以采用磁控溅射工艺形成类金刚石层,具体过程可以是:向镀膜设备的真空室中通入氩气,使真空室内的压强为0.5~1.0Pa,开启碳靶(例如石墨靶)进行DLC层的沉积,使碳靶的靶功率为1kW~5kW,基底负偏压为50~600V。在本申请其他实施方式中,也可以采用PECVD工艺形成类金刚石层,In an embodiment of the present application, a magnetron sputtering process can be used to form the diamond-like carbon layer. The specific process can be as follows: passing argon gas into the vacuum chamber of the coating equipment, so that the pressure in the vacuum chamber is 0.5-1.0Pa, and the carbon is turned on. The target (eg, graphite target) is used to deposit the DLC layer, and the target power of the carbon target is 1kW-5kW, and the negative bias voltage of the substrate is 50-600V. In other embodiments of the present application, the PECVD process can also be used to form the diamond-like layer,
具体地,本申请一实施方式中,步骤S02中,在渗层上依次沉积形成金属打底层、中间层和类金刚石层包括:Specifically, in an embodiment of the present application, in step S02, sequentially depositing and forming a metal primer layer, an intermediate layer and a diamond-like layer on the infiltration layer includes:
开启金属材料靶材,开启偏压源,在致密渗层上沉积形成金属打底层;之后向镀膜设备的真空室内通入气态碳源,并逐渐增大气态碳源的气流量,形成中间层,沿所述中间层的厚度增长方向,中间层中金属的含量逐渐减少,金属碳化物的含量逐渐增加;Turn on the metal material target, turn on the bias source, and deposit a metal base layer on the dense infiltration layer; then pass the gaseous carbon source into the vacuum chamber of the coating equipment, and gradually increase the gas flow of the gaseous carbon source to form an intermediate layer, Along the thickness growth direction of the intermediate layer, the content of metal in the intermediate layer gradually decreases, and the content of metal carbide gradually increases;
之后关闭所述金属材料靶材,继续增大所述气态碳源的气流量至一恒定值,增大偏压至一恒定值,在中间层上沉积形成类金刚石层。通过该实施方式形成的中间层可以称为包括金属打底层材料以及金属打底层材料的碳化物的混合层。该实施方式中,所得中间层含有与金属打底层相同的金属元素。Then, the metal material target is turned off, the gas flow rate of the gaseous carbon source is continuously increased to a constant value, the bias voltage is increased to a constant value, and a diamond-like carbon layer is deposited on the intermediate layer. The intermediate layer formed by this embodiment may be referred to as a mixed layer including a metal primer material and a carbide of the metal primer material. In this embodiment, the resulting intermediate layer contains the same metal element as the metal primer.
本申请实施例提供的上述高耐磨构件的制备方法,工艺简单、成本低廉、生产效率高,适合工业化批量制备。所得高耐磨构件的涂层厚度、硬度、耐磨性均较好。The preparation method of the above-mentioned high wear-resistant component provided by the embodiment of the present application has the advantages of simple process, low cost and high production efficiency, and is suitable for industrialized batch preparation. The obtained high wear-resistant component has better coating thickness, hardness and wear resistance.
本申请实施例还提供了一种结构件,该结构件包括由本申请实施例上述的高耐磨构件,即结构件可以部分或全部采用上述高耐磨构件制备。The embodiment of the present application also provides a structural member, which includes the high wear-resistant member described above in the embodiment of the present application, that is, the structural member may be partially or fully prepared by using the above-mentioned high wear-resistant member.
本申请实施方式中,该结构件可以是但不限于终端产品中的转轴等,还可以是模具、刀具,以及汽车等领域有高耐磨需求和高硬度需求的其他结构件。其中,模具可以是冲压模具、压铸模具等。其中压铸模具可用于制作手机中框、手机中板、手机前壳、手机后盖等。In the embodiments of the present application, the structural member may be, but is not limited to, a rotating shaft in the end product, and may also be a mold, a tool, and other structural members that require high wear resistance and high hardness in the fields of automobiles and the like. The mold may be a stamping mold, a die-casting mold, or the like. Among them, the die-casting mold can be used to make the middle frame of the mobile phone, the middle plate of the mobile phone, the front shell of the mobile phone, the back cover of the mobile phone, etc.
上述转轴可以是折叠式或翻盖式终端产品中的转轴,具体可以是折叠手机、平板电脑、PC等中的转轴。本申请一实施方式中,转轴100可以具体包括主轴101,套设在主轴101上的转轴齿轮102、转轴凸轮103、弹性元件104(如弹簧)等零部件(参见图2)。其中,转轴100的两端还可以分别设有限位元件、支撑元件等。The above-mentioned rotating shaft may be a rotating shaft in a foldable or clamshell terminal product, and may specifically be a rotating shaft in a foldable mobile phone, a tablet computer, a PC, and the like. In an embodiment of the present application, the
本申请实施例的结构件包括上述高耐磨构件,可赋予结构件优异的耐磨性能和较长使用寿命,制备得到具有优异产品竞争力的终产品。The structural parts of the embodiments of the present application include the above-mentioned high wear-resistant components, which can endow the structural parts with excellent wear resistance and long service life, and prepare final products with excellent product competitiveness.
例如,采用本申请上述高耐磨构件的转轴的折叠手机,在经历15万个回合的开闭合实验后,转轴的开合力和闭合力的减小程度可以均控制在20%以内,基本可以保持一定的开闭合角度,而不会出现随意摆动的情况。For example, after 150,000 rounds of opening and closing experiments for a folding mobile phone using the rotating shaft of the above-mentioned highly wear-resistant member of the present application, the opening and closing force of the rotating shaft and the reduction degree of the closing force can be controlled within 20%, which can be basically maintained. A certain opening and closing angle, without random swinging.
例如,具有上述渗层和耐磨复合涂层的压铸铝合金模具,其使用寿命可以从8万次提升至10万次以上,例如在10万-12万次,提升了交付效率、减少了产品成本。For example, the service life of a die-casting aluminum alloy mold with the above-mentioned infiltration layer and wear-resistant composite coating can be increased from 80,000 times to more than 100,000 times, such as 100,000-120,000 times, which improves the delivery efficiency and reduces the number of products. cost.
再例如,普通的压铸锆基非晶合金模具,其单次模具寿命在1.5万次以内,经过模仁整体降面重置后的模具寿命在3万次以内;而具有上述渗层和耐磨复合涂层的压铸锆基非晶合金模具,其单次模具寿命可达到2-3万次,经过模仁整体降面重置后的模具寿命可以达到4-6万次;大大提升了交付产量和效率,减少了产品成本。其中,模仁整体降面是指,模具经压铸后(如被冲蚀等)导致模具不能再进行使用,重新对模具面进行整体机械加工去除原表面,然后再进行模具加工的过程。For another example, the ordinary die-casting zirconium-based amorphous alloy mold has a single mold life of less than 15,000 times, and the mold life after the overall face reduction of the mold core is within 30,000 times; The die-casting zirconium-based amorphous alloy mold with composite coating can have a single mold life of 20,000 to 30,000 times, and the mold life after the overall face reduction and reset of the mold core can reach 40,000 to 60,000 times; greatly improving the delivery output and efficiency, reducing product costs. Among them, the overall surface reduction of the mold core refers to the process that the mold can no longer be used after the mold is die-cast (such as being eroded, etc.), and the mold surface is re-machined to remove the original surface, and then the mold is processed.
本申请实施例还提供一种终端,该终端包括本申请实施例上述的结构件,可获得一定减重收益。An embodiment of the present application further provides a terminal, where the terminal includes the above-mentioned structural member in the embodiment of the present application, and a certain weight reduction benefit can be obtained.
具体地,所述终端可以包括各种具有无线通信功能的手持设备(如各类手机、ipad)、车载设备(如行车记录仪)、可穿戴设备(如智能手表)、计算设备(如笔记本电脑)或连接到无线调制解调器的其他处理设备,以及各种形式的用户设备(user equipment,UE),移动台(mobile station,MS),终端设备(terminal device)等等。Specifically, the terminal may include various handheld devices with wireless communication functions (such as various mobile phones, ipads), vehicle-mounted devices (such as driving recorders), wearable devices (such as smart watches), computing devices (such as notebook computers) ) or other processing equipment connected to a wireless modem, as well as various forms of user equipment (UE), mobile station (MS), terminal device, and the like.
参见图3,图3为本申请一实施方式提供的折叠式终端200在某一使用状态下的结构示意图。该折叠式终端200包括第一主体201和第二主体202,其中,第一主体201与第二主体202通过转轴100活动连接。第一主体201的一面具有第一显示屏,第二主体202的一面具有第二显示屏。转轴100可以部分或全部采用上述高耐磨组件构成,对该折叠式终端200进行10万次以上的开闭合测试后(即,转轴100经历的耐磨次数),转轴的开合力和闭合力的磨损减小量(表现为力值)仍能保持在业界可接受的20%以内。Referring to FIG. 3 , FIG. 3 is a schematic structural diagram of the
下面分多个具体实施例对本申请实施例进行进一步的说明。其中,本申请实施例不限定于以下的具体实施例。The embodiments of the present application will be further described below in terms of multiple specific embodiments. The embodiments of the present application are not limited to the following specific embodiments.
实施例1Example 1
一种高耐磨压铸模具,其制备方法包括以下步骤:A high wear-resistant die-casting mold, the preparation method of which comprises the following steps:
(1)压铸模具型腔基体:以8407模具钢为原材料,通过压铸工艺成型,得到压铸模具型腔基体,其化学成分及其重量百分比如下:C0.38%、Mn0.4%、Cr 5.3%、Si1%、Mo1.3%、V 0.9%,余量为Fe及不可避免的杂质;(1) Die-casting mold cavity matrix: Using 8407 mold steel as raw material, it is formed by die-casting process to obtain die-casting mold cavity matrix. Its chemical composition and its weight percentage are as follows: C0.38%, Mn0.4%, Cr 5.3% , Si1%, Mo1.3%, V 0.9%, the balance is Fe and inevitable impurities;
(2)将上述模具型腔基体进行抛光、洗去油污等后,置于等离子真空炉中,通入氮气,将炉腔温度加热至400℃,施加600V的电压,形成炉腔内辉光放电,在此条件下进行渗氮6小时,之后冷却至室温,形成厚度为6μm的渗氮层,此渗氮层的维氏硬度从基体表面向上逐步升高,从200HV提升至1150HV;(2) After polishing the above-mentioned mold cavity substrate, washing off oil stains, etc., put it in a plasma vacuum furnace, pass nitrogen gas, heat the furnace cavity temperature to 400°C, and apply a voltage of 600V to form a glow discharge in the furnace cavity. , Nitriding was carried out under these conditions for 6 hours, and then cooled to room temperature to form a nitriding layer with a thickness of 6 μm. The Vickers hardness of this nitriding layer gradually increased from the surface of the substrate upwards, from 200HV to 1150HV;
之后对形成的渗氮层进行抛光处理,抛光深度为0.5-1μm,以去除表层含量较多的氮,得到致密渗氮层,该致密渗氮层的表面粗糙度Ra≤1μm;Then, the formed nitriding layer is polished to a depth of 0.5-1 μm, so as to remove nitrogen with a large content in the surface layer to obtain a dense nitriding layer, and the surface roughness of the dense nitriding layer Ra≤1 μm;
(3)将上述得到的带有致密渗氮层的构件基体置于PVD和PECVD复合炉的炉腔内,首先向炉中首先通入氩气,打开负偏压至600V,采用氩离子轰击基体表面30分钟,进一步去除渗氮层表面的杂质和疏松结构,为接下来的镀膜提供较好的基底;之后关闭负偏压;(3) The above-obtained component substrate with a dense nitriding layer is placed in the furnace cavity of the PVD and PECVD composite furnace, and argon gas is first introduced into the furnace, the negative bias is turned on to 600V, and the substrate is bombarded with argon ions Surface for 30 minutes to further remove impurities and loose structures on the surface of the nitriding layer to provide a better substrate for the next coating; then turn off the negative bias;
(4)打开Cr靶,打开负偏压至200V,进入纯Cr的沉积,得到厚度为200nm的Cr层;(4) Turn on the Cr target, turn on the negative bias voltage to 200V, and enter into the deposition of pure Cr to obtain a Cr layer with a thickness of 200 nm;
(5)向炉内通入乙炔,以2sccm/min的速率将乙炔的气流量从30sccm逐步加大到300sccm,得到厚度为0.75μm的中间层;其中,自基体向上,该中间层中Cr的质量百分含量从100%逐渐减少至50%,CrC的质量百分含量从0逐渐增加至50%;该中间层中CrC的总质量浓度为20%,Cr的总质量浓度为80%;(5) Pour acetylene into the furnace, and gradually increase the gas flow of acetylene from 30 sccm to 300 sccm at a rate of 2 sccm/min to obtain an intermediate layer with a thickness of 0.75 μm; wherein, from the substrate upward, the Cr in the intermediate layer is The mass percentage content is gradually decreased from 100% to 50%, and the mass percentage content of CrC is gradually increased from 0 to 50%; the total mass concentration of CrC in the intermediate layer is 20%, and the total mass concentration of Cr is 80%;
(6)关闭Cr靶,并逐步加大乙炔的气流量,加大负偏压至600V,进入DLC膜层的沉积,DLC的厚度为0.25μm,此时,Cr层+中间层+DLC层构成的夹层结构的总厚度为1.2μm;(6) Turn off the Cr target, gradually increase the gas flow of acetylene, increase the negative bias voltage to 600V, and enter the deposition of the DLC film layer. The thickness of the DLC is 0.25 μm. The total thickness of the sandwich structure is 1.2 μm;
(7)将上述步骤(4)(5)(6)依次重复多次,循环次数n为12次,形成排布形式为(Cr层-中间层-DLC层)n的耐磨复合涂层,得到高耐磨压铸模具型腔,其中,耐磨复合涂层的总厚度在14.4μm,维氏硬度在1200HV以上。本申请实施例1的高耐磨压铸模具型腔可用于制备手机中框、手机中板等。(7) repeating the above steps (4) (5) and (6) multiple times in turn, and the number of cycles n is 12 times to form a wear-resistant composite coating with an arrangement form of (Cr layer-intermediate layer-DLC layer) n , A high wear-resistant die-casting mold cavity is obtained, wherein the total thickness of the wear-resistant composite coating is 14.4 μm, and the Vickers hardness is above 1200HV. The high wear-resistant die-casting mold cavity of Example 1 of the present application can be used to prepare a middle frame of a mobile phone, a middle plate of a mobile phone, and the like.
实施例2Example 2
一种高耐磨转轴凸轮构件,其制备方法包括以下步骤:A highly wear-resistant rotating shaft cam member, the preparation method of which comprises the following steps:
(1)转轴凸轮构件基体:以420不锈钢为原材料,以MIM金属注射工艺成型,形成MIM420不锈钢凸轮零部件,其化学成分及其重量百分比如下:C0.16-0.25%、Mn≤1%、Cr12-14%、Si≤1%、Ni≤0.75%、S≤0.03%、P≤0.04%,余量为Fe及不可避免的杂质;(1) Rotary shaft cam component base: 420 stainless steel is used as raw material, and MIM metal injection process is used to form MIM420 stainless steel cam components. Its chemical composition and its weight percentage are as follows: C0.16-0.25%, Mn≤1%, Cr12 -14%, Si≤1%, Ni≤0.75%, S≤0.03%, P≤0.04%, the balance is Fe and inevitable impurities;
(2)将上述构件基体进行抛光、洗去油污等后,置于等离子真空炉中,通入乙炔气体,将炉腔温度加热至410℃,施加600V的电压,形成炉腔内辉光放电,在此条件下进行渗碳16小时,之后冷却至室温,形成厚度为18μm的渗碳层,此渗碳层的维氏硬度从基体表面向上逐步升高,从350HV提升至1100HV;(2) After the above-mentioned component base is polished, washed off oil, etc., placed in a plasma vacuum furnace, acetylene gas is introduced, the temperature of the furnace cavity is heated to 410 ° C, and a voltage of 600 V is applied to form a glow discharge in the furnace cavity, Carburizing was carried out under this condition for 16 hours, and then cooled to room temperature to form a carburized layer with a thickness of 18 μm. The Vickers hardness of the carburized layer gradually increased from the surface of the substrate upward, from 350HV to 1100HV;
之后对形成的渗碳层进行抛光处理,抛光深度为2.5μm,以去除表层含量较多的碳,得到致密渗层,该致密渗碳层的表面粗糙度Ra≤1μm;Then, the formed carburized layer is polished, and the polishing depth is 2.5 μm, so as to remove the carbon with a large content in the surface layer to obtain a dense carburized layer, and the surface roughness of the dense carburized layer Ra≤1 μm;
(3)将上述得到的带有致密渗碳层的构件基体置于物理气相沉积(PVD)设备的炉腔内,首先向PVD炉中首先通入氩气,打开负偏压至600V,采用氩离子轰击基体表面30分钟,进一步去除渗碳层表面的杂质和疏松结构,为接下来的镀膜提供较好的基底;之后关闭负偏压;(3) The above-obtained component substrate with a dense carburized layer is placed in the furnace chamber of the physical vapor deposition (PVD) equipment, first, argon gas is first introduced into the PVD furnace, the negative bias is turned on to 600V, and argon is used. Ions bombard the surface of the substrate for 30 minutes to further remove impurities and loose structures on the surface of the carburized layer, providing a better substrate for the next coating; then turn off the negative bias;
(4)打开Ti靶,打开负偏压至150V,进入纯Ti的沉积,得到厚度为280nm的Ti层;(4) Turn on the Ti target, turn on the negative bias voltage to 150V, and enter the deposition of pure Ti to obtain a Ti layer with a thickness of 280nm;
(5)向PVD炉内通入乙炔,以2sccm/min的速率将乙炔的气流量从30sccm逐步加大到300sccm,得到厚度约为0.92μm的中间层;其中,自基体向上,该中间层中Ti的质量百分含量从100%逐渐减少至60%,TiC的质量百分含量从0逐渐增加至40%;该中间层中,TiC的总质量浓度约为16%,Ti的总质量浓度约为84%;(5) Pour acetylene into the PVD furnace, and gradually increase the gas flow of acetylene from 30 sccm to 300 sccm at a rate of 2 sccm/min to obtain an intermediate layer with a thickness of about 0.92 μm; wherein, from the substrate upward, in the intermediate layer The mass percentage of Ti gradually decreases from 100% to 60%, and the mass percentage of TiC gradually increases from 0 to 40%; in the intermediate layer, the total mass concentration of TiC is about 16%, and the total mass concentration of Ti is about is 84%;
(6)关闭Ti靶,并逐步加大乙炔的气流量,加大负偏压至600V,进入DLC膜层的沉积,DLC的厚度为0.3μm,此时,Ti层+中间层+DLC层构成的夹层结构的总厚度为1.5μm;(6) Turn off the Ti target, gradually increase the air flow of acetylene, increase the negative bias to 600V, and enter the deposition of the DLC film layer. The thickness of the DLC is 0.3 μm. At this time, the Ti layer + the intermediate layer + the DLC layer is formed The total thickness of the sandwich structure is 1.5 μm;
(7)将上述步骤(4)(5)(6)依次重复多次,循环次数n为40次,形成排布形式为(Ti层-中间层-DLC层)n的耐磨复合涂层,得到高耐磨转轴凸轮构件,其中,耐磨复合涂层的总厚度为60μm,维氏硬度在1500HV以上。(7) repeating the above steps (4) (5) and (6) multiple times in turn, and the number of cycles n is 40 times to form a wear-resistant composite coating with an arrangement form of (Ti layer-intermediate layer-DLC layer) n , A highly wear-resistant rotating shaft cam member is obtained, wherein the total thickness of the wear-resistant composite coating is 60 μm, and the Vickers hardness is above 1500HV.
实施例3Example 3
一种高耐磨转轴齿轮构件,其制备方法包括以下步骤:A highly wear-resistant rotating shaft gear member, the preparation method of which comprises the following steps:
(1)折叠手机的转轴齿轮构件基体:以17-4不锈钢为原材料,以MIM金属注射工艺成型,形成MIM 17-4不锈钢齿轮零部件,其化学成分及其重量百分比如下:C≤0.07%、Mn≤1%、Cr 15.5-17.5%、Si≤1%、Ni3-5%、S≤0.03%、P≤0.04%,Cu 3-5%,Nb+Ta:0.15%-0.45%,余量为Fe及不可避免的杂质;(1) The base of the rotating shaft gear component of the folding mobile phone: using 17-4 stainless steel as the raw material, it is formed by MIM metal injection process to form the MIM 17-4 stainless steel gear components. Its chemical composition and its weight percentage are as follows: C≤0.07%, Mn≤1%, Cr 15.5-17.5%, Si≤1%, Ni3-5%, S≤0.03%, P≤0.04%, Cu 3-5%, Nb+Ta: 0.15%-0.45%, the balance is Fe and inevitable impurities;
(2)将上述构件基体进行抛光、洗去油污等后,置于等离子真空炉中,通入乙炔气体和氮气,将炉腔温度加热至390℃,施加600V的电压,形成炉腔内辉光放电,在此条件下进行渗氮和渗碳10小时,之后冷却至室温,形成厚度为10μm的碳氮共渗层,该碳氮共渗层的维氏硬度从基体表面向上逐步升高,从350HV提升至1100HV;(2) After polishing the above-mentioned component substrate, washing off oil stains, etc., place it in a plasma vacuum furnace, pass acetylene gas and nitrogen gas, heat the furnace chamber temperature to 390°C, and apply a voltage of 600V to form a glow in the furnace chamber. Discharge, nitriding and carburizing were carried out under these conditions for 10 hours, and then cooled to room temperature to form a carbonitriding layer with a thickness of 10 μm. The Vickers hardness of the carbonitriding layer gradually increased from the surface of the substrate upward, from 350HV to 1100HV;
之后对形成的碳氮共渗层进行抛光处理,抛光深度为1.5μm,以去除表层含量较多的碳和氮,得到致密碳氮共渗层,该致密碳氮共渗层的表面粗糙度Ra≤1μm;Then, the formed carbonitriding layer is polished, and the polishing depth is 1.5 μm, so as to remove carbon and nitrogen with a large content in the surface layer to obtain a dense carbonitriding layer. The surface roughness Ra of the dense carbonitriding layer is Ra. ≤1μm;
(3)将上述得到的带有致密碳氮共渗层的构件基体置于物理气相沉积(PVD)设备的炉腔内,首先向PVD炉中首先通入氩气,打开负偏压至600V,采用氩离子轰击基体表面30分钟,进一步去除碳氮共渗层表面的杂质和疏松结构,为接下来的镀膜提供较好的基底;之后关闭负偏压;(3) placing the above-obtained component substrate with the dense carbonitriding layer in the furnace chamber of the physical vapor deposition (PVD) equipment, first feeding argon into the PVD furnace, and turning on the negative bias to 600V, Argon ions were used to bombard the surface of the substrate for 30 minutes to further remove impurities and loose structures on the surface of the carbonitriding layer to provide a better substrate for the next coating; then turn off the negative bias;
(4)打开W靶,打开负偏压至150V,进入纯W的沉积,得到厚度为300nm的W层;(4) Turn on the W target, turn on the negative bias voltage to 150V, and enter the deposition of pure W to obtain a W layer with a thickness of 300 nm;
(5)向PVD炉内通入乙炔,以2sccm/min的速率将乙炔的气流量从30sccm逐步加大到300sccm,得到厚度约为0.94μm的中间层;其中,自基体向上,该中间层中W的质量百分含量从100%逐渐减少至55%,WC的质量百分含量从0逐渐增加至45%;该中间层中,WC的质量浓度为22%,W的总质量浓度为78%;(5) Pour acetylene into the PVD furnace, and gradually increase the gas flow of acetylene from 30 sccm to 300 sccm at a rate of 2 sccm/min to obtain an intermediate layer with a thickness of about 0.94 μm; wherein, from the substrate upward, in the intermediate layer The mass percentage of W is gradually decreased from 100% to 55%, and the mass percentage of WC is gradually increased from 0 to 45%; in the intermediate layer, the mass concentration of WC is 22%, and the total mass concentration of W is 78% ;
(6)关闭W靶,并逐步加大乙炔的气流量,加大负偏压至600V,进入DLC膜层的沉积,DLC的厚度为0.26μm,此时,W层+中间层+DLC层构成的夹层结构的总厚度为1.5μm;(6) Turn off the W target, gradually increase the gas flow of acetylene, increase the negative bias voltage to 600V, and enter the deposition of the DLC film layer. The thickness of the DLC is 0.26 μm. At this time, the W layer + the intermediate layer + the DLC layer constitutes The total thickness of the sandwich structure is 1.5 μm;
(7)将上述步骤(4)(5)(6)依次重复多次,循环次数n为3-40次,形成排布形式为(W层-中间层-DLC层)n的耐磨复合涂层,得到高耐磨转轴齿轮构件,其中,耐磨复合涂层的总厚度在4.5μm-60μm,维氏硬度在1500HV以上。(7) Repeat the above steps (4) (5) (6) for several times in turn, and the number of cycles n is 3-40 times to form a wear-resistant composite coating with an arrangement of (W layer-intermediate layer-DLC layer) n layer to obtain a highly wear-resistant rotating shaft gear component, wherein the total thickness of the wear-resistant composite coating is 4.5 μm-60 μm, and the Vickers hardness is above 1500HV.
实施例4Example 4
一种高耐磨转轴凸轮构件,其制备方法包括以下步骤:A highly wear-resistant rotating shaft cam member, the preparation method of which comprises the following steps:
(1)转轴凸轮构件基体:以420不锈钢为原材料,以MIM金属注射工艺成型,形成MIM420不锈钢凸轮零部件,其化学成分及其重量百分比同实施例2;(1) Rotary shaft cam member base: take 420 stainless steel as raw material, and use MIM metal injection process to form MIM420 stainless steel cam parts, and its chemical composition and its weight percentage are the same as in Example 2;
(2)将上述构件基体进行抛光、洗去油污等后,置于等离子真空炉中,通入乙炔气体,将炉腔温度加热至410℃,施加600V的电压,形成炉腔内辉光放电,在此条件下进行渗碳16小时,之后冷却至室温,形成厚度为18μm的渗碳层,此渗碳层的维氏硬度从基体表面向上逐步升高,从350HV提升至1100HV;(2) After the above-mentioned component base is polished, washed off oil, etc., placed in a plasma vacuum furnace, acetylene gas is introduced, the temperature of the furnace cavity is heated to 410 ° C, and a voltage of 600 V is applied to form a glow discharge in the furnace cavity, Carburizing was carried out under this condition for 16 hours, and then cooled to room temperature to form a carburized layer with a thickness of 18 μm. The Vickers hardness of the carburized layer gradually increased from the surface of the substrate upward, from 350HV to 1100HV;
之后对形成的渗碳层进行抛光处理,抛光深度为2.5μm,以去除表层含量较多的碳,得到致密渗层,该致密渗碳层的表面粗糙度Ra≤1μm;Then, the formed carburized layer is polished, and the polishing depth is 2.5 μm, so as to remove the carbon with a large content in the surface layer to obtain a dense carburized layer, and the surface roughness of the dense carburized layer Ra≤1 μm;
(3)将上述得到的带有致密渗碳层的构件基体置于物理气相沉积(PVD)设备的炉腔内,首先向PVD炉中首先通入氩气,打开负偏压至600V,采用氩离子轰击基体表面30分钟,进一步去除渗碳层表面的杂质和疏松结构,为接下来的镀膜提供较好的基材;之后关闭负偏压;(3) The above-obtained component substrate with a dense carburized layer is placed in the furnace chamber of the physical vapor deposition (PVD) equipment, first, argon gas is first introduced into the PVD furnace, the negative bias is turned on to 600V, and argon is used. Ions bombard the surface of the substrate for 30 minutes to further remove impurities and loose structures on the surface of the carburized layer, providing a better substrate for the next coating; then turn off the negative bias;
(4)打开Cr靶,打开负偏压至150V,之后再打开Ti靶,然后再关闭Cr靶,进入纯Ti的沉积,依次得到Cr层、CrTi复合层、纯Ti层的打底叠层,该打底叠层的厚度为300nm;(4) Turn on the Cr target, turn on the negative bias voltage to 150V, then turn on the Ti target, then turn off the Cr target, enter the deposition of pure Ti, and obtain the bottoming stack of the Cr layer, the CrTi composite layer, and the pure Ti layer in turn, The primer stack has a thickness of 300 nm;
(5)向PVD炉内通入乙炔,以2sccm/min的速率将乙炔的气流量从30sccm逐步加大到300sccm,得到厚度约为0.9μm的中间层;其中,自基体向上,该中间层中Ti的质量百分含量从100%逐渐减少至60%,TiC的质量百分含量从0逐渐增加至40%;该中间层中,TiC的质量浓度为16%,Ti的总质量浓度为84%;(5) Pour acetylene into the PVD furnace, and gradually increase the gas flow of acetylene from 30 sccm to 300 sccm at a rate of 2 sccm/min to obtain an intermediate layer with a thickness of about 0.9 μm; wherein, from the substrate upward, in the intermediate layer The mass percentage of Ti is gradually decreased from 100% to 60%, and the mass percentage of TiC is gradually increased from 0 to 40%; in the intermediate layer, the mass concentration of TiC is 16%, and the total mass concentration of Ti is 84% ;
(6)关闭Ti靶,并逐步加大乙炔的气流量,加大乙炔偏压至600V,进入DLC膜层的沉积,DLC的厚度为0.3μm,此时,Ti层+中间层+DLC层构成的夹层结构的总厚度为1.5μm;(6) Turn off the Ti target, gradually increase the gas flow of acetylene, increase the acetylene bias to 600V, and enter the deposition of the DLC film layer. The thickness of the DLC is 0.3 μm. At this time, the Ti layer + the intermediate layer + the DLC layer is formed The total thickness of the sandwich structure is 1.5 μm;
(7)将上述步骤(4)(5)(6)依次重复多次,循环次数n为3-40次,形成排布形式为(Ti层-中间层-DLC层)n的耐磨复合涂层,得到高耐磨转轴凸轮构件,其中,耐磨复合涂层的总厚度在4.5μm-60μm,维氏硬度在1500HV以上。(7) Repeat the above steps (4) (5) (6) for several times in turn, and the number of cycles n is 3-40 times to form a wear-resistant composite coating with an arrangement of (Ti layer-intermediate layer-DLC layer) n layer to obtain a highly wear-resistant rotating shaft cam member, wherein the total thickness of the wear-resistant composite coating is 4.5 μm-60 μm, and the Vickers hardness is above 1500HV.
实施例5Example 5
一种高耐磨转轴凸轮构件,其与实施例2的在于:耐磨复合涂层中,最顶层的DLC层的厚度比其他DLC层的厚度都要大。A highly wear-resistant rotating shaft cam member, which is similar to Embodiment 2 in that: in the wear-resistant composite coating, the thickness of the topmost DLC layer is larger than that of other DLC layers.
具体地,该高耐磨转轴凸轮构件的制备方法包括:Specifically, the preparation method of the highly wear-resistant rotating shaft cam member includes:
(1)-(6)步骤同实施例2,形成的第一夹层结构的厚度为1.5μm;Steps (1)-(6) are the same as those in Example 2, and the thickness of the formed first sandwich structure is 1.5 μm;
(7)根据上述形成第一夹层结构的方式,再依次沉积制备39个夹层结构,得到包括40个堆叠的夹层结构的耐磨复合涂层,得到高耐磨转轴凸轮构件;其中,第40个夹层结构中的DLC层厚度为2μm,第一至第39夹层结构中DLC层的厚度均为0.3μm。(7) According to the above-mentioned method of forming the first interlayer structure, 39 interlayer structures are deposited and prepared in sequence to obtain a wear-resistant composite coating comprising 40 stacked interlayer structures, and a highly wear-resistant rotating shaft cam member is obtained; wherein, the 40th The thickness of the DLC layer in the sandwich structure is 2 μm, and the thickness of the DLC layer in the first to the 39th sandwich structure is all 0.3 μm.
实施例6Example 6
一种高耐磨转轴凸轮构件,其制备方法包括以下步骤:A highly wear-resistant rotating shaft cam member, the preparation method of which comprises the following steps:
(1)-(3)步骤同实施例2;(1)-(3) step is with embodiment 2;
(4)打开Ti靶,打开负偏压至150V,进入纯Ti的沉积,得到厚度为250nm的Ti层;(4) Turn on the Ti target, turn on the negative bias voltage to 150V, enter the deposition of pure Ti, and obtain a Ti layer with a thickness of 250nm;
(5)向PVD炉内通入乙炔,以2sccm/min的速率将乙炔的气流量从30sccm逐步加大到300sccm,得到第一中间层,其为Ti+TiC的梯度层,自下而上的方向Ti含量逐渐减少而TiC的含量逐渐增加;之后逐渐加大负偏压至500V,沉积形成DLC,得到第二中间层,其为Ti+TiC+DLC的梯度层,自基体向上Ti含量逐渐减少而TiC和DLC的含量均逐渐增加;其中,中间层的总厚度约为0.95μm,总的中间层中,TiC的总质量浓度约为30%,Ti的总质量浓度约为62%,DLC的总质量浓度约为8%;(5) Pour acetylene into the PVD furnace, gradually increase the gas flow of acetylene from 30 sccm to 300 sccm at a rate of 2 sccm/min, and obtain the first intermediate layer, which is a gradient layer of Ti+TiC, which is a bottom-up layer. The Ti content gradually decreases in the direction and the TiC content gradually increases; then the negative bias voltage is gradually increased to 500V, and DLC is deposited to form a second intermediate layer, which is a gradient layer of Ti+TiC+DLC, and the Ti content gradually decreases from the substrate upwards. The contents of TiC and DLC both gradually increased; among them, the total thickness of the intermediate layer was about 0.95 μm. In the total intermediate layer, the total mass concentration of TiC was about 30%, and the total mass concentration of Ti was about 62%. The total mass concentration is about 8%;
(6)关闭Ti靶,并逐步加大乙炔的气流量,加大负偏压至600V,进入DLC膜层的沉积,得到厚度为0.3μm的DLC层,此时,Ti层+中间层+DLC层构成的第一夹层结构的厚度为1.5μm;(6) Turn off the Ti target, gradually increase the air flow of acetylene, increase the negative bias voltage to 600V, enter the deposition of the DLC film layer, and obtain a DLC layer with a thickness of 0.3 μm. At this time, the Ti layer + intermediate layer + DLC The thickness of the first sandwich structure composed of layers is 1.5 μm;
(7)将上述步骤(4)(5)(6)依次重复多次,形成包括40个上述夹层结构的耐磨复合涂层,得到高耐磨转轴凸轮构件,其中,耐磨复合涂层的总厚度为60μm,维氏硬度在1500HV以上。(7) Repeating the above steps (4) (5) and (6) several times in order to form a wear-resistant composite coating including 40 above-mentioned sandwich structures to obtain a highly wear-resistant rotating shaft cam member, wherein the wear-resistant composite coating is The total thickness is 60μm, and the Vickers hardness is above 1500HV.
为对本申请实施例技术方案带来的有益效果进行有力支持,将实施例1得到的模具型腔用于压铸铝合金,或者压铸锆基非晶合金,分别测试模具的使用寿命。将实施例2-6的高耐磨构件分别制成折叠手机的转轴(其中,转轴的各部件均具有渗层和对应的高耐磨涂层),并将各转轴分别组装成折叠手机。对各折叠手机分别进行15万个回合的开闭合测试(一开一关为一个回合),测试转轴开合力和闭合力的磨损减小量(表现为力值)。In order to strongly support the beneficial effects brought by the technical solutions of the embodiments of the present application, the mold cavity obtained in Example 1 is used for die casting aluminum alloys or die casting zirconium-based amorphous alloys to test the service life of the molds respectively. The highly wear-resistant components of Examples 2-6 were respectively made into rotating shafts of a folding mobile phone (wherein, each part of the rotating shaft had a permeable layer and a corresponding high-wear-resistant coating), and each rotating shaft was assembled into a folding mobile phone. 150,000 rounds of opening and closing tests were performed on each folding mobile phone (one opening and one closing is one round), and the opening and closing force of the rotating shaft and the wear reduction of the closing force (expressed as force value) were tested.
结果发现:相较于仅经过渗氮处理的模具基体,本申请实施例1提供的高耐磨压铸模具,在压铸铝合金时,其模具寿命可以从8万次提升至10万次;在压铸锆基非晶合金时,其模具寿命可以从1.5万次提升至2.5万次。It was found that, compared with the mold base only after nitriding treatment, the high wear-resistant die-casting mold provided in Example 1 of the present application can increase the mold life from 80,000 times to 100,000 times when die-casting aluminum alloys; When using zirconium-based amorphous alloys, its die life can be increased from 15,000 times to 25,000 times.
采用本申请实施例2的高耐磨构件的转轴的折叠手机,在经历10万个回合的开闭合实验后,转轴的开合力和闭合力的减小程度还均控制在15%以内,基本可以保持一定的开闭合角度,而不会出现随意摆动的情况。而采用实施例5的高耐磨构件制成的折叠手机,在经历15万个回合的开闭合测试后,转轴的开合力和闭合力的减小程度还可以均控制在20%以内。采用实施例6的高耐磨构件制成的折叠手机,在经历15万个回合的开闭合测试后,转轴的开合力和闭合力的减小程度还可以均控制在15%以内。For the folding mobile phone using the rotating shaft of the highly wear-resistant member of Example 2 of the present application, after 100,000 rounds of opening and closing experiments, the opening and closing force of the rotating shaft and the degree of reduction of the closing force are both controlled within 15%, which is basically acceptable. Keep a certain opening and closing angle without swinging at will. On the other hand, for the folding mobile phone made of the highly wear-resistant member of Example 5, after 150,000 rounds of opening and closing tests, the opening and closing force of the rotating shaft and the reduction of the closing force can be controlled within 20%. After 150,000 rounds of opening and closing tests for the folding mobile phone made of the highly wear-resistant member of Example 6, the opening and closing force of the rotating shaft and the reduction degree of the closing force can both be controlled within 15%.
此外,采用实施例3的高耐磨构件制成的折叠手机,在经历10万个回合的开闭合测试后,转轴的开合力和闭合力的减小程度还均控制在18%以内。采用实施例4的高耐磨构件制成的折叠手机,在经历12万个回合的开闭合测试后,转轴的开合力和闭合力的减小程度还可以均控制在16%以内。In addition, for the folding mobile phone made of the highly wear-resistant member of Example 3, after 100,000 rounds of opening and closing tests, the opening and closing force of the rotating shaft and the reduction degree of the closing force are both controlled within 18%. After 120,000 rounds of opening and closing tests for the folding mobile phone made of the highly wear-resistant component of Example 4, both the opening and closing force of the rotating shaft and the reduction degree of the closing force can be controlled within 16%.
以上结果表明,本申请实施例提供的渗层+耐磨复合涂层的涂层结构,可以显著提高构件的耐磨性能,提升产品竞争力。The above results show that the coating structure of the infiltration layer + wear-resistant composite coating provided by the embodiment of the present application can significantly improve the wear resistance of the component and enhance the competitiveness of the product.
Claims (24)
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