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CN114510897A - A Physical Verification Method of Standard Cell Library - Google Patents

A Physical Verification Method of Standard Cell Library Download PDF

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CN114510897A
CN114510897A CN202011278481.4A CN202011278481A CN114510897A CN 114510897 A CN114510897 A CN 114510897A CN 202011278481 A CN202011278481 A CN 202011278481A CN 114510897 A CN114510897 A CN 114510897A
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unit
splicing
standard
units
mirror image
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郭响妮
陈志强
鱼江华
侯开华
古力
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Tianjin Corp
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Tianjin Corp
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    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
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    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level
    • G06F30/392Floor-planning or layout, e.g. partitioning or placement
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level
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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level
    • G06F30/398Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]

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Abstract

The application provides a physical verification method of a standard cell library, which comprises the following steps: randomly selecting a first unit, a second unit, a third unit, a fourth unit and a fifth unit which are arranged according to the width; splicing each unit with the self and other units left and right respectively, and marking the spliced units as a standard unit I, a standard unit II, a standard unit III, a standard unit IV and a standard unit V; each unit is spliced left and right with the left and right mirror images of the unit, and then the unit is spliced left and right, and the unit is marked as a mirror image unit I, a mirror image unit II, a mirror image unit III, a mirror image unit IV and a mirror image unit V; respectively splicing each unit and the corresponding mirror image unit up and down, and marking as a splicing unit I, a splicing unit II, a splicing unit III, a splicing unit IV and a splicing unit V; splicing the standard units I to five and the splicing units I to five into a test layout; and checking the design rule of the test layout.

Description

一种标准单元库的物理验证方法A Physical Verification Method of Standard Cell Library

技术领域technical field

本申请涉及集成电路设计领域,尤其涉及一种标准单元库的物理验证方法。The present application relates to the field of integrated circuit design, and in particular, to a physical verification method of a standard cell library.

背景技术Background technique

标准单元库是基于成熟稳定的工艺而开发的基本逻辑单元集合。每套标准单元库有几百个到几千个单元不等,单元类型非常丰富,包括基础单元、组合逻辑单元、时序逻辑单元、特殊单元。标准单元库是超大规模集成电路(VLSI,Very Large Scale Integration)自动化设计的基础数据库,其数据库模型丰富,包含单元仿真库、单元符号、单元版图、逻辑功能模型、时序综合库模型、单元网表、布局布线库等数据。The standard cell library is a collection of basic logic cells developed based on mature and stable processes. Each standard cell library has hundreds to thousands of cells, and the cell types are very rich, including basic cells, combinational logic cells, sequential logic cells, and special cells. The standard cell library is the basic database for the automatic design of very large scale integrated circuits (VLSI, Very Large Scale Integration). , place and route library and other data.

随着单片集成电路集成度和工作速度的提高,设计并开发出符合工艺设计规则、逻辑功能正确、模型数据完整、电学特性准确的标准单元库已成为VLSI芯片设计必要的条件。标准单元库开发后必须进行系统充分的测试验证,保证标准单元库的完整性和准确性至关重要,是保证芯片设计和流片成功的关键。With the improvement of the integration and working speed of monolithic integrated circuits, it has become a necessary condition for VLSI chip design to design and develop a standard cell library that complies with process design rules, has correct logic functions, complete model data and accurate electrical characteristics. After the standard cell library is developed, the system must be fully tested and verified. It is very important to ensure the integrity and accuracy of the standard cell library, which is the key to ensuring the success of chip design and tape-out.

随着集成电路技术的飞速发展,特别是迈入40nm、28nm、14nm FinFET等等以后的工艺节点时,标准单元库的设计也变得越来越复杂,单个单元的版图设计也变得很复杂,单元库的物理验证就变得尤为重要。With the rapid development of integrated circuit technology, especially when entering the process nodes of 40nm, 28nm, 14nm FinFET, etc., the design of the standard cell library has become more and more complicated, and the layout design of a single cell has also become very complicated. , the physical verification of the cell library becomes particularly important.

然而,目前对标准单元库的物理验证仍然存在问题。因此,有必要开发更有效、更可靠的技术方案。However, the current physical verification of standard cell libraries remains problematic. Therefore, it is necessary to develop more efficient and reliable technical solutions.

发明内容SUMMARY OF THE INVENTION

本申请提供一种标准单元库的物理验证方法,可以准确呈现标准单元库的设计规则验证错误,能够全方面覆盖各种情况,方法简单速度快,避免浪费。The present application provides a physical verification method for a standard cell library, which can accurately present the design rule verification errors of the standard cell library, and can cover various situations in an all-round way. The method is simple and fast, and waste is avoided.

本申请提供一种标准单元库的物理验证方法,包括:随机选取按宽度排列的五种待测试单元作为一个标准单元库,分别标记为单元一、单元二、单元三、单元四和单元五;分别将每种单元与自己以及其他单元进行左右拼接,将拼接后的单元标记为标准单元一、标准单元二、标准单元三、标准单元四和标准单元五;分别将每种单元与自己的左右镜像进行左右拼接后再进行左右拼接,将拼接后的单元标记为镜像单元一、镜像单元二、镜像单元三、镜像单元四和镜像单元五;分别将每种单元与对应的镜像单元进行上下拼接,将拼接后的单元标记为拼接单元一、拼接单元二、拼接单元三、拼接单元四和拼接单元五;将所述标准单元一至标准单元五和所述拼接单元一至拼接单元五拼接成测试版图;对所述测试版图进行设计规则检查。The present application provides a physical verification method for a standard cell library, comprising: randomly selecting five types of cells to be tested arranged by width as a standard cell library, which are respectively marked as cell one, cell two, cell three, cell four and cell five; Splicing each unit with itself and other units on the left and right respectively, and label the spliced units as standard unit 1, standard unit 2, standard unit 3, standard unit 4 and standard unit 5; The mirror image is spliced left and right, and then left and right splicing is performed, and the spliced units are marked as mirror unit 1, mirror unit 2, mirror unit 3, mirror unit 4 and mirror unit 5; each unit and the corresponding mirror unit are spliced up and down respectively. , mark the spliced units as splicing unit 1, splicing unit 2, splicing unit 3, splicing unit 4 and splicing unit 5; splicing the standard unit 1 to standard unit 5 and the splicing unit 1 to splicing unit 5 into a test layout ; perform a design rule check on the test layout.

在本申请的一些实施例中,所述五种待测试单元的宽度大小顺序为:单元一>单元二>单元三>单元四>单元五。In some embodiments of the present application, the order of the width of the five units to be tested is: unit 1 > unit 2 > unit 3 > unit 4 > unit 5.

在本申请的一些实施例中,所述宽度为所述左右方向上的尺寸。In some embodiments of the present application, the width is the dimension in the left-right direction.

在本申请的一些实施例中,分别将每种单元与自己以及其他单元进行左右拼接,将拼接后的单元标记为标准单元一、标准单元二、标准单元三、标准单元四和标准单元五包括:将单元一分别与单元一至单元五进行左右拼接,并标记为标准单元一;将单元二分别与单元二至单元五进行左右拼接,并标记为标准单元二;将单元三分别与单元三至单元五进行左右拼接,并标记为标准单元三;将单元四分别与单元四和单元五进行左右拼接,并标记为标准单元四;将单元五与单元五进行左右拼接,并标记为标准单元五。In some embodiments of the present application, each unit is spliced left and right with itself and other units, and the spliced units are marked as standard unit 1, standard unit 2, standard unit 3, standard unit 4 and standard unit 5, including : Unit 1 is spliced left and right with unit 1 to unit 5, and marked as standard unit 1; unit 2 is spliced left and right with unit 2 to unit 5, and marked as standard unit 2; unit 3 is respectively connected with unit 3 to Unit 5 is spliced left and right, and marked as standard unit 3; unit 4 is spliced left and right with unit 4 and unit 5, and marked as standard unit 4; unit 5 and unit 5 are spliced left and right, and marked as standard unit 5 .

在本申请的一些实施例中,分别将每种单元与自己的左右镜像进行左右拼接后再进行左右拼接,将拼接后的单元标记为镜像单元一、镜像单元二、镜像单元三、镜像单元四和镜像单元五包括:分别将单元一至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元一;分别将单元二至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元二;分别将单元三至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元三;分别将单元四和单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元四;将单元五与单元五的左右镜像进行左右拼接,并标记为镜像单元五。In some embodiments of the present application, each unit is spliced left and right with its own left and right mirror images, and then left and right splicing is performed, and the spliced units are marked as mirror unit 1, mirror unit 2, mirror unit 3, and mirror unit 4. And the mirror image unit 5 includes: respectively splicing units 1 to 5 with their respective left and right mirror images, and then splicing them left and right, and marking it as mirror unit 1; respectively splicing units 2 to 5 with their respective left and right mirror images Perform left and right splicing, and mark it as mirror unit 2; respectively splicing units 3 to 5 with their respective left and right mirror images, and then perform left and right splicing, and mark it as mirror unit 3; The mirror image is spliced left and right, and then left and right spliced, and marked as mirror image unit four; the left and right mirror images of unit five and unit five are left and right spliced, and marked as mirror image unit five.

在本申请的一些实施例中,分别将每种单元与对应的镜像单元进行上下拼接,将拼接后的单元标记为拼接单元一、拼接单元二、拼接单元三、拼接单元四和拼接单元五包括:将若干单元一拼接于镜像单元一的上下两侧,所述若干单元一的总宽度大于等于所述镜像单元一的宽度,其中,当所述镜像单元一比所述若干单元一的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元一;将若干单元二拼接于镜像单元二的上下两侧,所述若干单元二的总宽度大于等于所述镜像单元二的宽度,其中,当所述镜像单元二比所述若干单元二的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元二;将若干单元三拼接于镜像单元三的上下两侧,所述若干单元三的总宽度大于等于所述镜像单元三的宽度,其中,当所述镜像单元三比所述若干单元三的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元三;将若干单元四拼接于镜像单元四的上下两侧,所述若干单元四的总宽度大于等于所述镜像单元四的宽度,其中,当所述镜像单元四比所述若干单元四的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元四;将若干单元五拼接于镜像单元五的上下两侧,所述若干单元五的总宽度等于所述镜像单元五的宽度,拼接后的单元标记为拼接单元五。In some embodiments of the present application, each unit and the corresponding mirror image unit are spliced up and down respectively, and the spliced units are marked as splicing unit 1, splicing unit 2, splicing unit 3, splicing unit 4 and splicing unit 5 include: : splicing several units one on the upper and lower sides of the mirror unit one, the total width of the several units one is greater than or equal to the width of the mirror image unit one, wherein, when the mirror image unit one is smaller than the width of the several units one , the insufficient part is filled with unit five, and the unit after splicing is marked as splicing unit one; several units two are spliced on the upper and lower sides of mirror unit two, and the total width of said several units two is greater than or equal to the width of said mirror unit two , wherein, when the mirror image unit two is smaller than the width of the several units two, the insufficient part is filled with the unit five, and the spliced unit is marked as the splicing unit two; several units three are spliced on the upper and lower sides of the mirror image unit three , the total width of the plurality of units 3 is greater than or equal to the width of the mirror unit 3, wherein, when the mirror unit 3 is smaller than the width of the plurality of units 3, the insufficient part is filled with unit 5, and the spliced unit marks It is the splicing unit 3; several units 4 are spliced on the upper and lower sides of the mirror image unit 4, and the total width of the several units 4 is greater than or equal to the width of the mirror image unit 4, wherein, when the mirror image unit 4 is larger than the several units When the width of four is small, the insufficient part is filled with unit five, and the unit after splicing is marked as unit four; several units five are spliced on the upper and lower sides of the mirror unit five, and the total width of the several units five is equal to the mirror unit. The width of five, the spliced unit is marked as spliced unit five.

在本申请的一些实施例中,将所述标准单元一至标准单元五和所述拼接单元一至拼接单元五拼接成测试版图包括:将标准单元一至标准单元五各自上下排列三排,按顺序纵向排列在版图左下角;将拼接单元一至拼接单元五分别各自拼接于对应的标准单元一至标准单元五右侧,并且依次向右移动一个步数,直到完成拼接;在移动后的空隙填充单元五完成测试版图。In some embodiments of the present application, splicing the standard unit 1 to the standard unit 5 and the splicing unit 1 to the splicing unit 5 into a test layout includes: arranging the standard unit 1 to the standard unit 5 in three rows up and down respectively, and arranging longitudinally in sequence In the lower left corner of the layout; splicing splicing unit 1 to splicing unit 5 on the right side of the corresponding standard unit 1 to standard unit 5 respectively, and move one step to the right in turn until the splicing is completed; complete the test in the moved gap filling unit 5 territory.

在本申请的一些实施例中,计算所述步数的方法为:对应单元的宽度除以单元五的宽度。In some embodiments of the present application, the method for calculating the number of steps is: dividing the width of the corresponding unit by the width of unit five.

在本申请的一些实施例中,将标准单元一至标准单元五各自上下排列三排,按顺序纵向排列在版图左下角时,若相邻标准单元的电源类型不同,则需要将其中一个标准单元进行上下镜像。In some embodiments of the present application, when standard cells 1 to 5 are arranged in three rows up and down, and are vertically arranged in the lower left corner of the layout in order, if the power types of adjacent standard cells are different, one of the standard cells needs to be installed Mirror up and down.

在本申请的一些实施例中,所述测试版图为矩形。In some embodiments of the present application, the test layout is rectangular.

本申请所述的标准单元库的物理验证方法,随机按尺寸大小选择五种待测试单元,将所述五种待测试单元实现全方位的随机拼接,然后进行物理验证,可以准确呈现标准单元库的设计规则验证错误,能够全方面覆盖各种情况,方法简单速度快,避免浪费。In the physical verification method of the standard cell library described in this application, five kinds of cells to be tested are randomly selected according to the size, and the five kinds of cells to be tested are randomly spliced in all directions, and then physical verification is carried out, so that the standard cell library can be accurately presented The design rule verification error can cover all kinds of situations in all aspects, the method is simple and fast, and waste is avoided.

附图说明Description of drawings

以下附图详细描述了本申请中披露的示例性实施例。其中相同的附图标记在附图的若干视图中表示类似的结构。本领域的一般技术人员将理解这些实施例是非限制性的、示例性的实施例,附图仅用于说明和描述的目的,并不旨在限制本申请的范围,其他方式的实施例也可能同样的完成本申请中的发明意图。应当理解,附图未按比例绘制。其中:The following drawings describe in detail exemplary embodiments disclosed in this application. Where like reference numbers refer to similar structures throughout the several views of the drawings. Those of ordinary skill in the art will understand that these embodiments are non-limiting, exemplary embodiments, the accompanying drawings are for illustration and description purposes only, and are not intended to limit the scope of the application, and other embodiments are also possible The same accomplishes the inventive intent in this application. It should be understood that the figures are not drawn to scale. in:

图1为本申请实施例所述的标准单元库的物理验证方法的流程图;Fig. 1 is the flow chart of the physical verification method of the standard cell library described in the embodiment of the application;

图2为本申请实施例所述的标准单元库的物理验证方法中的测试版图的结构示意图。FIG. 2 is a schematic structural diagram of a test layout in the physical verification method of a standard cell library according to an embodiment of the present application.

具体实施方式Detailed ways

以下描述提供了本申请的特定应用场景和要求,目的是使本领域技术人员能够制造和使用本申请中的内容。对于本领域技术人员来说,对所公开的实施例的各种局部修改是显而易见的,并且在不脱离本申请的精神和范围的情况下,可以将这里定义的一般原理应用于其他实施例和应用。因此,本申请不限于所示的实施例,而是与权利要求一致的最宽范围。The following description provides specific application scenarios and requirements of the present application, and is intended to enable those skilled in the art to make and use the contents of the present application. Various partial modifications to the disclosed embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments and without departing from the spirit and scope of the application. application. Therefore, the present application is not to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the claims.

下面结合实施例和附图对本发明技术方案进行详细说明。The technical solutions of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.

半导体集成电路标准单元设计完成后的验证不仅仅需要设计规则检查(DesignRule Check,DRC)、版图与电路原理图一致性检查(Layout Versus Schematic test,LVS)、电学规则检查(Electrical Rule Check, ERC)的验证,还需要对整个标准单元库进行验证。在一些验证方法中,对整个单元库的物理验证是通过Cadence的EDI和Synopsys的ICCAPR tool进行验证的,但这种验证方法有以下几个不足:设计比较小;不能全覆盖、不能各种情况都考虑进去;在工艺层面去验证会浪费太多资源。The verification after the completion of the standard cell design of a semiconductor integrated circuit requires not only Design Rule Check (DRC), Layout Versus Schematic test (LVS), and Electrical Rule Check (ERC) The verification of the entire standard cell library also needs to be verified. In some verification methods, the physical verification of the entire cell library is verified by Cadence's EDI and Synopsys' ICCAPR tool, but this verification method has the following shortcomings: the design is relatively small; All are taken into account; too many resources would be wasted to verify at the process level.

针对上述问题,本申请提供一种标准单元库的物理验证方法,随机按尺寸大小选择五种待测试单元,将所述五种待测试单元实现全方位的随机拼接,然后进行物理验证,可以准确呈现标准单元库的设计规则验证错误,能够全方面覆盖各种情况,方法简单速度快,避免浪费。In view of the above problems, the present application provides a method for physical verification of a standard cell library. Five types of cells to be tested are randomly selected according to their size, and the five types of cells to be tested are randomly spliced in all directions, and then physical verification is carried out, which can accurately The design rule verification errors of the standard cell library are presented, which can cover various situations in all aspects, and the method is simple and fast, avoiding waste.

图1为本申请实施例所述的标准单元库的物理验证方法的流程图。参考图1所示,本申请的实施例提供一种标准单元库的物理验证方法,包括:FIG. 1 is a flowchart of a physical verification method for a standard cell library according to an embodiment of the present application. Referring to FIG. 1 , an embodiment of the present application provides a physical verification method for a standard cell library, including:

步骤S110:随机选取按宽度排列的五种待测试单元作为一个标准单元库,分别标记为单元一、单元二、单元三、单元四和单元五;Step S110: randomly select five types of cells to be tested arranged by width as a standard cell library, which are respectively marked as cell one, cell two, cell three, cell four and cell five;

步骤S120:分别将每种单元与自己以及其他单元进行左右拼接,将拼接后的单元标记为标准单元一、标准单元二、标准单元三、标准单元四和标准单元五;Step S120: splicing each kind of unit with itself and other units left and right respectively, marking the spliced units as standard unit one, standard unit two, standard unit three, standard unit four and standard unit five;

步骤S130分别将每种单元与自己的左右镜像进行左右拼接后再进行左右拼接,将拼接后的单元标记为镜像单元一、镜像单元二、镜像单元三、镜像单元四和镜像单元五;Step S130 respectively performs left-right splicing of each unit with its own left and right mirror images, and then performs left-right splicing, and marks the spliced units as mirror unit 1, mirror unit 2, mirror unit 3, mirror unit 4, and mirror unit 5;

步骤S140:分别将每种单元与对应的镜像单元进行上下拼接,将拼接后的单元标记为拼接单元一、拼接单元二、拼接单元三、拼接单元四和拼接单元五;Step S140: splicing each unit and the corresponding mirror image unit up and down respectively, and marking the spliced units as splicing unit 1, splicing unit 2, splicing unit 3, splicing unit 4 and splicing unit 5;

步骤S150:将所述标准单元一至标准单元五和所述拼接单元一至拼接单元五拼接成测试版图;Step S150: splicing the standard unit 1 to the standard unit 5 and the splicing unit 1 to the splicing unit 5 into a test layout;

步骤S160:对所述测试版图进行设计规则检查。Step S160: Perform design rule checking on the test layout.

下面结合附图对本申请实施例所述的标准单元库的物理验证方法进行详细说明。The physical verification method of the standard cell library described in the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

参考图1所示,步骤S110,随机选取按宽度排列的五种待测试单元作为一个标准单元库,分别标记为单元一、单元二、单元三、单元四和单元五。Referring to FIG. 1 , in step S110 , five types of cells to be tested arranged by width are randomly selected as a standard cell library, which are respectively marked as cell one, cell two, cell three, cell four and cell five.

表1Table 1

Figure BDA0002779934190000061
Figure BDA0002779934190000061

表1示出了所述五个待测试单元的名称和结构。Table 1 shows the names and structures of the five units to be tested.

参考表1所示,在本申请的一些实施例中,所述五种待测试单元的宽度大小顺序为:单元一>单元二>单元三>单元四>单元五。在本申请的一些实施例中,所述宽度为所述左右方向上的尺寸。Referring to Table 1, in some embodiments of the present application, the order of the width of the five units to be tested is: unit 1 > unit 2 > unit 3 > unit 4 > unit 5. In some embodiments of the present application, the width is the dimension in the left-right direction.

其中,所述单元一、单元二、单元三、单元四为功能性单元,单元五可以是填充单元或功能性单元,所述单元五的宽度为最小的基本单元宽度,即单元一、单元二、单元三、单元四的宽度都是单元五的宽度的整数倍。Wherein, the unit 1, unit 2, unit 3 and unit 4 are functional units, unit 5 may be a filling unit or a functional unit, and the width of unit 5 is the smallest basic unit width, namely unit 1 and unit 2 The widths of unit 3 and unit 4 are all integer multiples of the width of unit 5.

此外,需要说明的是,表1中按照尺寸比例示出了五种待测试单元之间的大小关系,但是在后文中,会将不同待测试单元进行随机拼接,为了方便展示,需要将不同的待测试单元的尺寸画成相同大小(以相同单元格的形状来表示不同的待测试单元,仅用不同填充图案来进行区分),仅用来说明不同的待测试单元是如何拼接的。In addition, it should be noted that the size relationship between the five units to be tested is shown in Table 1 according to the size ratio, but in the following, different units to be tested will be randomly spliced. The size of the unit to be tested is drawn as the same size (different units to be tested are represented by the shape of the same cell, and are distinguished only by different filling patterns), which is only used to illustrate how different units to be tested are spliced together.

表2Table 2

Figure BDA0002779934190000071
Figure BDA0002779934190000071

表2示出了所述五个待测试单元的示意结构。Table 2 shows the schematic structures of the five units to be tested.

参考表2所示,出于简洁的目的,利用相同大小不同图案的单元格来表示不同的待测试单元,其中,A和B分表表示每个待测试单元的左侧和右侧。在后文中需要对待测试单元进行随机拼接,而不同侧的拼接也是不同的,因此需要使用不同的符号来区分左侧和右侧。Referring to Table 2, for the sake of simplicity, cells with the same size and different patterns are used to represent different units to be tested, wherein sub-tables A and B represent the left and right sides of each unit to be tested. In the following text, the unit to be tested needs to be randomly spliced, and the splicing of different sides is also different, so it is necessary to use different symbols to distinguish the left side and the right side.

继续参考图1所示,步骤S120,分别将每种单元与自己以及其他单元进行左右拼接,将拼接后的单元标记为标准单元一、标准单元二、标准单元三、标准单元四和标准单元五。Continue to refer to as shown in FIG. 1, step S120, splicing each kind of unit with itself and other units left and right respectively, marking the spliced units as standard unit one, standard unit two, standard unit three, standard unit four and standard unit five .

表3table 3

Figure BDA0002779934190000072
Figure BDA0002779934190000072

表3示出了不同的标准单元的示意结构。Table 3 shows the schematic structures of different standard cells.

参考表3所示,在本申请的一些实施例中,分别将每种单元与自己以及其他单元进行左右拼接,将拼接后的单元标记为标准单元一、标准单元二、标准单元三、标准单元四和标准单元五,所执行的拼接包括:将单元一分别与单元一至单元五进行左右拼接,并标记为标准单元一;将单元二分别与单元二至单元五进行左右拼接,并标记为标准单元二;将单元三分别与单元三至单元五进行左右拼接,并标记为标准单元三;将单元四分别与单元四和单元五进行左右拼接,并标记为标准单元四;将单元五与单元五进行左右拼接,并标记为标准单元五。Referring to Table 3, in some embodiments of the present application, each unit is spliced left and right with itself and other units, and the spliced units are marked as standard unit one, standard unit two, standard unit three, and standard unit. 4 and standard unit 5, the performed splicing includes: splicing unit 1 to unit 1 to unit 5 left and right respectively, and marking it as standard unit 1; splicing unit 2 to unit 2 to unit 5 respectively left and right, and marking it as standard Unit 2; splicing unit 3 with unit 3 to unit 5 left and right respectively, and mark it as standard unit 3; splicing unit 4 with unit 4 and unit 5 respectively left and right, and label it as standard unit 4; unit 5 and unit Five are spliced left and right and marked as standard unit five.

步骤S120的目的是实现任意两个单元(包括相同单元)之间的左右拼接,具体地,参考表3所示,标准单元一中包含了单元一和单元一的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元一和单元二的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元一和单元三的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元一和单元四的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元一和单元五的拼接(包括不同侧的拼接,即A接A、B接B和A接B)。The purpose of step S120 is to realize the left and right splicing between any two units (including the same unit). Specifically, referring to Table 3, the standard unit one includes the splicing of unit one and unit one (including the splicing of different sides, That is, A is connected to A, B is connected to B, and A is connected to B); the splicing of unit one and unit two (including the splicing of different sides, that is, A is connected to A, B is connected to B, and A is connected to B); the splicing of unit one and unit three ( Including the splicing of different sides, that is, A is connected to A, B is connected to B, and A is connected to B); the splicing of unit one and unit four (including the splicing of different sides, that is, A is connected to A, B is connected to B, and A is connected to B); unit one Splicing with unit five (including splicing on different sides, that is, A to A, B to B, and A to B).

同样地,参考表3所示,标准单元二中包含了单元二和单元二的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元二和单元三的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元二和单元四的拼接(包括不同侧的拼接,即A接A、B接B和A接B);单元二和单元五的拼接(包括不同侧的拼接,即A接A、B接B和A接B)。Similarly, referring to Table 3, the standard unit 2 includes the splicing of unit 2 and unit 2 (including splicing on different sides, that is, A connects to A, B connects to B, and A connects to B); the splicing of unit 2 and unit 3 (including the splicing of different sides, that is, A is connected to A, B is connected to B, and A is connected to B); the splicing of unit two and unit four (including the splicing of different sides, that is, A is connected to A, B is connected to B, and A is connected to B); unit The splicing of the second and the fifth unit (including the splicing of different sides, that is, A to A, B to B, and A to B).

同样地,以此类推,标准单元三中包含了单元三和单元三至单元五的拼接;标准单元四包含了单元四和单元四以及单元四和单元五的拼接;标准单元五实现了单元五和单元五的拼接。Similarly, by analogy, the standard unit 3 includes the splicing of unit 3 and unit 3 to unit 5; the standard unit 4 includes the splicing of unit 4 and unit 4 and the splicing of unit 4 and unit 5; the standard unit 5 realizes the splicing of unit 5 And the splicing of unit five.

由上述可知,步骤S120可以实现任意两个单元之间的全部左右拼接。As can be seen from the above, step S120 can realize all left and right splicing between any two units.

在本申请的一些实施例中,所述五种标准单元的宽度大小顺序为:标准单元一>标准单元二>标准单元三>标准单元四>标准单元五。在本申请的一些实施例中,所述宽度为所述左右方向上的尺寸。In some embodiments of the present application, the order of the width of the five standard cells is: standard cell one > standard cell two > standard cell three > standard cell four > standard cell five. In some embodiments of the present application, the width is the dimension in the left-right direction.

继续参考图1,步骤S130,分别将每种单元与自己的左右镜像进行左右拼接后再进行左右拼接,将拼接后的单元标记为镜像单元一、镜像单元二、镜像单元三、镜像单元四和镜像单元五。Continue to refer to Fig. 1, step S130, carry out left and right splicing of each kind of unit and its mirror image on the left and right respectively, then carry out left and right splicing, mark the unit after splicing as mirror unit one, mirror unit two, mirror unit three, mirror unit four and Mirror unit five.

表4Table 4

Figure BDA0002779934190000091
Figure BDA0002779934190000091

表4示出了不同的镜像单元的示意结构。Table 4 shows the schematic structures of different mirror units.

参考表4所示,在本申请的一些实施例中,分别将每种单元与自己的左右镜像进行左右拼接后再进行左右拼接,将拼接后的单元标记为镜像单元一、镜像单元二、镜像单元三、镜像单元四和镜像单元五包括:分别将单元一至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元一;分别将单元二至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元二;分别将单元三至单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元三;分别将单元四和单元五与各自的左右镜像进行左右拼接后再进行左右拼接,并标记为镜像单元四;将单元五与单元五的左右镜像进行左右拼接,并标记为镜像单元五。Referring to Table 4, in some embodiments of the present application, each unit is spliced left and right with its own left and right mirror images, and then left and right splicing is performed, and the spliced units are marked as mirror unit one, mirror unit two, and mirror images. Unit 3, mirror unit 4 and mirror unit 5 include: unit 1 to unit 5 are respectively spliced left and right with their respective left and right mirror images, and then left and right spliced, and marked as mirror unit 1; The mirror image is spliced left and right, and then left and right spliced, and marked as mirror unit 2; unit 3 to unit 5 are respectively spliced left and right with their respective left and right mirrors, and then left and right spliced, and marked as mirror unit 3; unit 4 and unit 4 and Unit 5 is spliced left and right with the respective left and right mirror images, and then left and right splicing is performed, and is marked as mirror image unit 4; Unit 5 and the left and right mirror images of unit 5 are spliced left and right, and marked as mirror image unit 5.

步骤S130的目的是实现不同单元的镜像拼接以及镜像拼接之后的再拼接,为下一步实现上下拼接做准备。The purpose of step S130 is to realize mirror splicing of different units and re-splicing after mirror splicing, so as to prepare for the next step to realize top-bottom splicing.

在本申请的一些实施例中,所述五种镜像单元的宽度大小顺序为:镜像单元一>镜像单元二>镜像单元三>镜像单元四>镜像单元五。在本申请的一些实施例中,所述宽度为所述左右方向上的尺寸。In some embodiments of the present application, the order of the width of the five mirroring units is: mirroring unit 1 > mirroring unit 2 > mirroring unit 3 > mirroring unit 4 > mirroring unit 5. In some embodiments of the present application, the width is the dimension in the left-right direction.

继续参考图1所示,步骤S140,分别将每种单元与对应的镜像单元进行上下拼接,将拼接后的单元标记为拼接单元一、拼接单元二、拼接单元三、拼接单元四和拼接单元五。Continue to refer to as shown in Figure 1, step S140, each kind of unit and the corresponding mirror image unit are respectively spliced up and down, and the spliced units are marked as splicing unit 1, splicing unit 2, splicing unit 3, splicing unit 4 and splicing unit 5 .

表5table 5

Figure BDA0002779934190000101
Figure BDA0002779934190000101

表5示出了不同的拼接单元的示意结构。Table 5 shows the schematic structures of different splicing units.

参考表5所示,在本申请的一些实施例中,分别将每种单元与对应的镜像单元进行上下拼接,将拼接后的单元标记为拼接单元一、拼接单元二、拼接单元三、拼接单元四和拼接单元五,所执行的拼接包括:将若干单元一拼接于镜像单元一的上下两侧,所述若干单元一的总宽度大于等于所述镜像单元一的宽度,其中,当所述镜像单元一比所述若干单元一的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元一;将若干单元二拼接于镜像单元二的上下两侧,所述若干单元二的总宽度大于等于所述镜像单元二的宽度,其中,当所述镜像单元二比所述若干单元二的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元二;将若干单元三拼接于镜像单元三的上下两侧,所述若干单元三的总宽度大于等于所述镜像单元三的宽度,其中,当所述镜像单元三比所述若干单元三的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元三;将若干单元四拼接于镜像单元四的上下两侧,所述若干单元四的总宽度大于等于所述镜像单元四的宽度,其中,当所述镜像单元四比所述若干单元四的宽度小时,不足的部分使用单元五填充,拼接后的单元标记为拼接单元四;将若干单元五拼接于镜像单元五的上下两侧,所述若干单元五的总宽度等于所述镜像单元五的宽度,拼接后的单元标记为拼接单元五。Referring to Table 5, in some embodiments of the present application, each kind of unit and the corresponding mirror image unit are respectively spliced up and down, and the spliced units are marked as splicing unit 1, splicing unit 2, splicing unit 3, splicing unit. Fourth and the splicing unit 5, the splicing performed includes: splicing several units one on the upper and lower sides of the mirror image unit one, the total width of the several units one is greater than or equal to the width of the mirror image unit one, wherein, when the mirror image unit one Unit one is smaller than the width of several units one, the insufficient part is filled with unit five, and the unit after splicing is marked as unit one; several units two are spliced on the upper and lower sides of mirror unit two, and the two units are The total width is greater than or equal to the width of the mirror image unit 2, wherein, when the mirror image unit 2 is smaller than the width of the several units 2, the insufficient part is filled with the unit 5, and the spliced unit is marked as the splicing unit 2; Unit 3 is spliced on the upper and lower sides of mirror unit 3, and the total width of the plurality of units 3 is greater than or equal to the width of the mirror unit 3. Wherein, when the mirror unit 3 is smaller than the width of the plurality of units 3, insufficient Parts are filled with unit 5, and the unit after splicing is marked as splicing unit 3; several units 4 are spliced on the upper and lower sides of the mirror image unit 4, and the total width of the several units 4 is greater than or equal to the width of the mirror image unit 4, wherein, When the width of the mirror image unit 4 is smaller than the width of the several units 4, the insufficient part is filled with the unit 5, and the spliced unit is marked as the splicing unit 4; The total width of several units five is equal to the width of the mirror image unit five, and the unit after splicing is marked as splicing unit five.

需要说明的是,表5只是示意性地示出不同拼接单元是如何拼接组成的,当镜像单元比对应的若干单元的宽度小时,不足的部分使用单元五填充,表5中省略了用作填充的单元五。It should be noted that Table 5 only schematically shows how different splicing units are formed by splicing. When the width of the mirror image unit is smaller than that of the corresponding units, the insufficient part is filled with unit 5, which is omitted in Table 5 for filling. unit five.

在本申请的一些实施例中,所述五种拼接单元的宽度大小顺序为:拼接单元一>拼接单元二>拼接单元三>拼接单元四>拼接单元五。在本申请的一些实施例中,所述宽度为所述左右方向上的尺寸。In some embodiments of the present application, the order of the width of the five splicing units is: splicing unit 1 > splicing unit 2 > splicing unit 3 > splicing unit 4 > splicing unit 5. In some embodiments of the present application, the width is the dimension in the left-right direction.

步骤S140的目的是实现每种单元与任意单元的上下拼接,包括不同侧(A 和A、A和B、B和B)的上下拼接。具体地,与步骤S120实现任意两个单元的左右拼接类似,参考表5所示,拼接单元一中包含了单元一和单元一的上下拼接;单元一和单元二的上下拼接;单元一和单元三的上下拼接;单元一和单元四的上下拼接;单元一和单元五的上下拼接。The purpose of step S140 is to realize the top-bottom splicing of each unit and any unit, including the top-bottom splicing of different sides (A and A, A and B, B and B). Specifically, similar to step S120 to realize the left and right splicing of any two units, as shown in Table 5, the splicing unit 1 includes the upper and lower splicing of the unit 1 and the unit 1; the upper and lower splicing of the unit 1 and the unit 2; the unit 1 and the unit The upper and lower splicing of unit 3; the upper and lower splicing of unit 1 and unit 4; the upper and lower splicing of unit 1 and unit 5.

同样地,以此类推,拼接单元二中包含了单元二和单元二至单元五的上下拼接;拼接单元三中包含了单元三和单元三至单元五的上下拼接;拼接单元四包含了单元四和单元四以及单元四和单元五的上下拼接;拼接单元五实现了单元五和单元五的上下拼接。Similarly, by analogy, the splicing unit 2 includes the upper and lower splicing of the unit 2 and the unit 2 to the unit 5; the splicing unit 3 includes the upper and lower splicing of the unit 3 and the unit 3 to the unit 5; the splicing unit 4 includes the unit 4. The upper and lower splicing of unit 4 and unit 4 and unit 5; the splicing unit 5 realizes the upper and lower splicing of unit 5 and unit 5.

继续参考图1所示,步骤S150,将所述标准单元一至标准单元五和所述拼接单元一至拼接单元五拼接成测试版图。Continuing to refer to FIG. 1, in step S150, the standard unit 1 to the standard unit 5 and the splicing unit 1 to the splicing unit 5 are spliced into a test layout.

图2为本申请实施例所述的标准单元库的物理验证方法中的测试版图的结构示意图。FIG. 2 is a schematic structural diagram of a test layout in the physical verification method of a standard cell library according to an embodiment of the present application.

参考图2所示,在本申请的一些实施例中,将所述标准单元一至标准单元五和所述拼接单元一至拼接单元五拼接成测试版图,包括:将标准单元一至标准单元五各自上下排列三排,按顺序纵向排列在版图左下角;将拼接单元一至拼接单元五分别各自拼接于对应的标准单元一至标准单元五右侧,并且依次向右移动一个步数,直到完成拼接;在移动后的空隙填充单元五完成测试版图。Referring to FIG. 2 , in some embodiments of the present application, splicing the standard unit 1 to the standard unit 5 and the splicing unit 1 to the splicing unit 5 into a test layout includes: arranging the standard unit 1 to the standard unit 5 up and down respectively. Three rows are arranged vertically in the lower left corner of the layout in sequence; splicing unit 1 to splicing unit 5 are respectively spliced to the right side of the corresponding standard unit 1 to standard unit 5, and move one step to the right in turn until the splicing is completed; after moving The void-filling unit five completes the beta layout.

在本申请的一些实施例中,计算所述步数的方法为:对应单元的宽度除以单元五的宽度。例如,单元一的宽度为12.04微米,单元五的宽度为0.28 微米,则拼接单元一向右移动12.04/0.28个步数,即43步。每个步数的距离可以等于最小距离(单元五的宽度)0.28微米,也可以是单元五宽度的整数倍,即0.28微米的整数倍。In some embodiments of the present application, the method for calculating the number of steps is: dividing the width of the corresponding unit by the width of unit five. For example, the width of unit one is 12.04 microns, and the width of unit five is 0.28 microns, then the splicing unit one moves to the right by 12.04/0.28 steps, that is, 43 steps. The distance of each step can be equal to the minimum distance (width of unit five) 0.28 microns, or it can be an integer multiple of the width of unit five, that is, an integer multiple of 0.28 microns.

在本申请的一些实施例中,将标准单元一至标准单元五各自上下排列三排,按顺序纵向排列在版图左下角时,若相邻标准单元的电源类型不同,则需要将其中一个标准单元进行上下镜像。In some embodiments of the present application, when standard cells 1 to 5 are arranged in three rows up and down, and are vertically arranged in the lower left corner of the layout in order, if the power types of adjacent standard cells are different, one of the standard cells needs to be installed Mirror up and down.

在本申请的一些实施例中,所述测试版图为矩形。参考图2所示,为了将整个版图做成矩形,可以使用若干单元五来填充所有空余的地方,将整个版图补充成为矩形,避免产生不必要的假错。In some embodiments of the present application, the test layout is rectangular. Referring to Figure 2, in order to make the entire layout into a rectangle, several units five can be used to fill all the empty places, and the entire layout can be supplemented into a rectangle to avoid unnecessary falsehoods.

在本申请的一些实施例中,整个版图的拼接过程中注意各个单元在水平方向和竖直方向的边界平齐,避免错误。In some embodiments of the present application, during the splicing process of the entire layout, it is noted that the boundaries of each unit in the horizontal direction and the vertical direction are flush to avoid errors.

在本申请的一些实施例中,步骤110、步骤120、步骤130、步骤140、步骤150并不代表先后顺序。In some embodiments of the present application, step 110 , step 120 , step 130 , step 140 , and step 150 do not represent a sequence.

图2所示的版图能够保证所有单元无论是任何方向的上下拼接和左右拼接以及镜像拼接都能涉及到,保证验证全方面覆盖。The layout shown in Figure 2 can ensure that all units can be involved in any direction of up and down splicing, left and right splicing, and mirror splicing, ensuring full coverage of verification.

继续参考图1所示,步骤S160,对所述测试版图进行设计规则检查。可以利用任意合适的工具或软件等对所述测试版图进行设计规则检查。Continuing to refer to FIG. 1 , in step S160, a design rule check is performed on the test layout. The test layout can be checked for design rules using any suitable tool or software or the like.

在本申请的一些实施例中,可以根据进行设计规则检查后产生的检查报告对标准单元库进行调整。In some embodiments of the present application, the standard cell library may be adjusted according to the inspection report generated after the design rule inspection is performed.

本申请所述的标准单元库的物理验证方法,随机按尺寸大小选择五种待测试单元,将所述五种待测试单元实现全方位的随机拼接,然后进行物理验证,可以准确呈现标准单元库的设计规则验证错误,能够全方面覆盖各种情况,方法简单速度快,避免浪费。In the physical verification method of the standard cell library described in this application, five kinds of cells to be tested are randomly selected according to the size, and the five kinds of cells to be tested are randomly spliced in all directions, and then physical verification is carried out, so that the standard cell library can be accurately presented The design rule verification error can cover all kinds of situations in all aspects, the method is simple and fast, and waste is avoided.

综上所述,在阅读本申请内容之后,本领域技术人员可以明白,前述申请内容可以仅以示例的方式呈现,并且可以不是限制性的。尽管这里没有明确说明,本领域技术人员可以理解本申请意图囊括对实施例的各种合理改变,改进和修改。这些改变,改进和修改都在本申请的示例性实施例的精神和范围内。In conclusion, after reading the contents of this application, those skilled in the art can understand that the foregoing contents of the application may be presented by way of example only, and may not be limiting. Although not explicitly described herein, it will be understood by those skilled in the art that this application is intended to cover various reasonable changes, improvements and modifications to the embodiments. Such changes, improvements and modifications are within the spirit and scope of the exemplary embodiments of the present application.

应当理解,本实施例使用的术语″和/或″包括相关联的列出项目中的一个或多个的任意或全部组合。应当理解,当一个元件被称作″连接″或″耦接″至另一个元件时,其可以直接地连接或耦接至另一个元件,或者也可以存在中间元件。It should be understood that the term "and/or" as used in this embodiment includes any and all combinations of one or more of the associated listed items. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present.

应当理解,术语″包含″、″包含着″、″包括″或者″包括着″,在本申请文件中使用时,指明存在所记载的特征、整体、步骤、操作、元件和/或组件,但并不排除存在或附加一个或多个其他特征、整体、步骤、操作、元件、组件和/或它们的组。It should be understood that the terms "comprising", "including", "including" or "including", when used in this application document, indicate the presence of the recited features, integers, steps, operations, elements and/or components, but The presence or addition of one or more other features, integers, steps, operations, elements, components and/or groups thereof is not excluded.

还应当理解,尽管术语第一、第二、第三等可以在此用于描述各种元件,但是这些元件不应当被这些术语所限制。这些术语仅用于将一个元件与另一个元件区分开。因此,在没有脱离本申请的教导的情况下,在一些实施例中的第一元件在其他实施例中可以被称为第二元件。相同的参考标号或相同的参考标记符在整个说明书中表示相同的元件。It will also be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element in some embodiments could be termed a second element in other embodiments without departing from the teachings of the present application. The same reference numerals or the same reference signs refer to the same elements throughout the specification.

此外,本申请说明书通过参考理想化的示例性截面图和/或平面图和/ 或立体图来描述示例性实施例。因此,由于例如制造技术和/或容差导致的与图示的形状的不同是可预见的。因此,不应当将示例性实施例解释为限于在此所示出的区域的形状,而是应当包括由例如制造所导致的形状中的偏差。例如,被示出为矩形的蚀刻区域通常会具有圆形的或弯曲的特征。因此,在图中示出的区域实质上是示意性的,其形状不是为了示出器件的区域的实际形状也不是为了限制示例性实施例的范围。Furthermore, this specification describes exemplary embodiments with reference to idealized exemplary cross-sectional and/or plan and/or perspective views. Accordingly, variations from the shapes illustrated are foreseeable due to, for example, manufacturing techniques and/or tolerances. Thus, example embodiments should not be construed as limited to the shapes of regions shown herein, but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched area shown as a rectangle will typically have rounded or curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device nor to limit the scope of example embodiments.

Claims (10)

1. A physical verification method for a standard cell library, comprising:
randomly selecting five units to be tested which are arranged according to the width as a standard unit library, and respectively marking the units as a unit I, a unit II, a unit III, a unit IV and a unit V;
each unit is spliced with the self unit and other units left and right respectively, and the spliced units are marked as a standard unit I, a standard unit II, a standard unit III, a standard unit IV and a standard unit V;
each unit is spliced left and right with the left and right mirror image of the unit, and then the unit after splicing is marked as a mirror image unit I, a mirror image unit II, a mirror image unit III, a mirror image unit IV and a mirror image unit V;
respectively splicing each unit with the corresponding mirror image unit up and down, and marking the spliced units as a splicing unit I, a splicing unit II, a splicing unit III, a splicing unit IV and a splicing unit V;
splicing the standard units I to five and the splicing units I to five into a test layout;
and checking the design rule of the test layout.
2. The physical verification method of a standard cell library of claim 1, wherein the width of the five units under test are in the order of: unit one > unit two > unit three > unit four > unit five.
3. The physical verification method of a standard cell library of claim 1, wherein the width is a dimension in the left-right direction.
4. The physical verification method of the standard cell library of claim 1, wherein each cell is left-right spliced with itself and other cells, and the spliced cells are labeled as standard cell one, standard cell two, standard cell three, standard cell four and standard cell five, comprising:
splicing the first unit with the first unit to the fifth unit left and right respectively, and marking the first unit as a standard unit I;
splicing the unit two with the units two to five left and right respectively, and marking as a standard unit two;
splicing the unit III with the units III to V left and right respectively, and marking as a standard unit III;
splicing the unit four with the unit four and the unit five respectively left and right, and marking as a standard unit four;
and splicing the unit five and the unit five left and right, and marking as a standard unit five.
5. The physical verification method of the standard cell library of claim 1, wherein the step of splicing each cell with its own left and right mirror image left and right respectively and then left and right, and the step of marking the spliced cells as mirror image cell one, mirror image cell two, mirror image cell three, mirror image cell four and mirror image cell five comprises the steps of:
splicing the units I to V with the respective left and right mirror images left and right, then splicing left and right, and marking as mirror image unit I;
splicing the units two to five with the respective left and right mirror images left and right, then splicing left and right, and marking as a mirror image unit two;
splicing the units three to five with the respective left and right mirror images left and right, then splicing left and right, and marking as a mirror image unit three;
respectively splicing the unit four and the unit five with respective left and right mirror images, then splicing left and right, and marking as a mirror image unit four;
and splicing the unit five and the left and right mirror images of the unit five left and right, and marking as a mirror image unit five.
6. The physical verification method of the standard cell library of claim 1, wherein each cell is vertically spliced with the corresponding mirror image cell, and the spliced cells are marked as splicing cell one, splicing cell two, splicing cell three, splicing cell four and splicing cell five, comprising:
splicing a plurality of units I on the upper side and the lower side of a mirror image unit I, wherein the total width of the units I is more than or equal to that of the mirror image unit I, when the mirror image unit is smaller than the width of the units I, the insufficient parts are filled with a unit V, and the spliced units are marked as splicing units I;
splicing a plurality of second units on the upper side and the lower side of the second mirror image unit, wherein the total width of the second units is larger than or equal to that of the second mirror image unit, when the second mirror image unit is smaller than the width of the second units, the insufficient parts are filled with fifth units, and the spliced units are marked as second splicing units;
splicing a plurality of units III on the upper side and the lower side of a mirror image unit III, wherein the total width of the unit III is more than or equal to that of the mirror image unit III, when the mirror image unit III is smaller than the width of the unit III, the insufficient part is filled with a unit V, and the spliced unit is marked as a spliced unit III;
splicing a plurality of units IV on the upper side and the lower side of a mirror image unit IV, wherein the total width of the unit IV is more than or equal to the width of the mirror image unit IV, when the mirror image unit IV is smaller than the width of the unit IV, the insufficient part is filled with a unit V, and the spliced unit is marked as a spliced unit IV;
splicing the five units on the upper side and the lower side of the mirror image unit five, wherein the total width of the five units is equal to that of the mirror image unit five, and the spliced unit is marked as a spliced unit five.
7. The physical verification method of the standard cell library according to claim 1, wherein the splicing of the standard cells one to five and the splicing of the splicing cells one to five into a test layout comprises:
respectively arranging three rows of standard units from one standard unit to five standard units from top to bottom, and longitudinally arranging the standard units at the lower left corner of the layout in sequence;
splicing the first splicing unit to the fifth splicing unit to the right sides of the corresponding first standard unit to the fifth standard unit respectively, and moving the first splicing unit to the right side of the corresponding fifth standard unit by one step number in a rightward mode until the splicing is finished;
and completing the test layout in the moved gap filling unit V.
8. The physical verification method of a standard cell library of claim 7, wherein the step count is calculated by: the width of the corresponding cell is divided by the width of cell five.
9. The physical verification method of the standard cell library according to claim 7, wherein three rows of the first standard cell to the fifth standard cell are arranged up and down respectively, and when the standard cells are longitudinally arranged at the lower left corner of the layout in sequence, if the power types of the adjacent standard cells are different, one of the standard cells needs to be mirrored up and down.
10. The method of physical verification of a library of standard cells of claim 1 wherein the test layout is rectangular.
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