CN114558764A - A kind of efficient superhydrophobic surface preparation method - Google Patents
A kind of efficient superhydrophobic surface preparation method Download PDFInfo
- Publication number
- CN114558764A CN114558764A CN202210131605.9A CN202210131605A CN114558764A CN 114558764 A CN114558764 A CN 114558764A CN 202210131605 A CN202210131605 A CN 202210131605A CN 114558764 A CN114558764 A CN 114558764A
- Authority
- CN
- China
- Prior art keywords
- laser
- metal substrate
- isopropanol
- micro
- nano
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/14—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/002—Pretreatement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
本发明涉及一种高效超疏水表面制备方法,包括以下步骤:步骤10)清洗基底:对金属基底进行清洗;步骤20)激光微纳加工处理:将清洗过的基底放置于紫外纳秒激光加工系统的样品台上,利用激光束在金属基底表面加工出微纳结构,然后在异丙醇中超声清洗5~10分钟;步骤30)硅油处理:在步骤20)处理后的金属基底上滴入15~25μL的二甲基硅油与异丙醇的混合溶液;步骤40)低温热处理:将步骤30)处理后的金属基底在加热板上加热5~10分钟,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。本发明方法提高了制备效率,降低了制备成本同时保证对生物体和环境无毒害。
The invention relates to a method for preparing an efficient super-hydrophobic surface, comprising the following steps: step 10) cleaning the substrate: cleaning the metal substrate; step 20) laser micro-nano processing: placing the cleaned substrate in an ultraviolet nanosecond laser processing system On the sample stage, use a laser beam to process the micro-nano structure on the surface of the metal substrate, and then ultrasonically clean it in isopropanol for 5 to 10 minutes; step 30) Silicone oil treatment: drop 15 ~25 μL of a mixed solution of dimethyl silicone oil and isopropanol; step 40) low temperature heat treatment: heating the metal substrate treated in step 30) on a heating plate for 5 to 10 minutes, then taking it out and using isopropanol for ultrasonic cleaning, Finally, it was dried in a nitrogen stream to obtain a superhydrophobic surface. The method of the invention improves the preparation efficiency, reduces the preparation cost and ensures no toxicity to the organism and the environment.
Description
技术领域technical field
本发明涉及材料加工工程技术领域,尤其是一种高效超疏水表面制备方法。The invention relates to the technical field of material processing engineering, in particular to a method for preparing an efficient super-hydrophobic surface.
背景技术Background technique
基于超疏水表面展现出的自清洁、抗菌、耐腐蚀、减阻、防结冰等优异特性,其已在轨道交通、石油装备、航空航天和医疗卫生等领域得到广泛应用。Based on the excellent properties of self-cleaning, antibacterial, corrosion resistance, drag reduction, and anti-icing exhibited by superhydrophobic surfaces, they have been widely used in rail transit, petroleum equipment, aerospace, and medical and health fields.
现有技术中,制备超疏水表面的主要方法包括低表面能物质涂覆、自组装、聚合物压印、静电纺丝、蚀刻和激光加工等。其中,激光加工方法因其高过程灵活性、高自动化程度、低环境污染和高制备精度等优势,得到广泛使用。然而,制备效率依然是激光加工方法在实际工业生产中面临的一个主要问题,这主要有以下几方面原因:1、大部分激光表面处理工艺需要使用小光斑和多次重复扫描,使激光加工本身的制备效率偏低;2、激光处理后的表面展现出超亲水特性。为了实现表面由超亲水向超疏水特性的转变,需要将表面在空气中放置3-7天。使空气中的疏水基团在表面沉积实现超疏水特性,大大增加超疏水表面的制备周期。3、通过一些后处理工艺可以加速激光处理表面由超亲水向超疏水特性的转变,然而这些后处理工艺也需花费数小时的时间。同时,某些方法如化学浸润方法需要使用含氟化学试剂,其较高的化学毒性也限制了其在生物医学等领域的应用。In the prior art, the main methods for preparing superhydrophobic surfaces include low surface energy material coating, self-assembly, polymer imprinting, electrospinning, etching, and laser processing. Among them, the laser processing method is widely used due to its advantages of high process flexibility, high degree of automation, low environmental pollution and high preparation precision. However, preparation efficiency is still a major problem faced by laser processing methods in actual industrial production, which is mainly due to the following reasons: 1. Most laser surface treatment processes require the use of small spots and repeated scans, so that the laser processing itself The preparation efficiency is low; 2. The surface after laser treatment shows super-hydrophilic properties. In order to realize the transformation of the surface from superhydrophilic to superhydrophobic properties, the surface needs to be placed in air for 3-7 days. The superhydrophobicity can be achieved by depositing the hydrophobic groups in the air on the surface, which greatly increases the preparation cycle of the superhydrophobic surface. 3. The transformation of the laser-treated surface from superhydrophilic to superhydrophobic can be accelerated by some post-processing processes, but these post-processing processes also take several hours. At the same time, some methods such as chemical infiltration methods require the use of fluorine-containing chemical reagents, and their high chemical toxicity also limits their application in biomedicine and other fields.
综上所述,研发一种高效率、低成本且无毒害超疏水表面制备工艺成为当务之亟。In conclusion, it is urgent to develop a high-efficiency, low-cost and non-toxic superhydrophobic surface preparation process.
发明内容SUMMARY OF THE INVENTION
针对现有技术的不足,本发明提供一种高效超疏水表面制备方法,以提高制备效率。Aiming at the deficiencies of the prior art, the present invention provides a method for preparing an efficient superhydrophobic surface, so as to improve the preparation efficiency.
本发明采用的技术方案如下:The technical scheme adopted in the present invention is as follows:
一种高效超疏水表面制备方法,包括:An efficient superhydrophobic surface preparation method, comprising:
步骤10)清洗基底:对金属基底进行清洗;Step 10) cleaning the substrate: cleaning the metal substrate;
步骤20)激光微纳加工处理:将清洗过的金属基底放置于紫外纳秒激光加工系统的样品台上,利用激光束在金属基底表面加工出微纳结构,然后在异丙醇中超声清洗5~10分钟;Step 20) Laser micro-nano processing: place the cleaned metal substrate on the sample stage of the ultraviolet nanosecond laser processing system, use the laser beam to process the micro-nano structure on the surface of the metal substrate, and then ultrasonically clean it in isopropyl alcohol 5 ~10 minutes;
步骤30)硅油处理:在步骤20)处理后的金属基底上滴入二甲基硅油与异丙醇的混合溶液;Step 30) Silicone oil treatment: drop a mixed solution of dimethyl silicone oil and isopropanol on the treated metal substrate in step 20);
步骤40)低温热处理:将步骤30)处理后的金属基底在加热板上加热,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。Step 40) low temperature heat treatment: the metal substrate treated in step 30) is heated on a heating plate, then taken out and ultrasonically cleaned with isopropanol, and finally dried in a nitrogen stream to obtain a superhydrophobic surface.
进一步技术方案为:Further technical solutions are:
所述金属基底为AISI 304不锈钢、紫铜、黄铜或者Ti-6Al-4V钛合金。The metal substrate is AISI 304 stainless steel, red copper, brass or Ti-6Al-4V titanium alloy.
所述步骤10)中:将金属基底依次置于丙酮、无水乙醇、去离子水中超声清洗,然后置于氮气流中吹干。In the step 10): the metal substrate is sequentially placed in acetone, absolute ethanol, and deionized water for ultrasonic cleaning, and then placed in a nitrogen stream to dry.
所述步骤10)中:金属基底分别在丙酮、无水乙醇、去离子水中超声清洗10~15分钟。In the step 10), the metal substrate is ultrasonically cleaned in acetone, absolute ethanol and deionized water for 10-15 minutes respectively.
所述步骤20)中:紫外纳秒激光加工系统采用紫外纳秒脉冲激光器,激光器波长为355nm,脉冲宽度为10ns,脉冲重复频率为40~60kHz,激光功率为5.8~6.5W,脉冲能量为0.1~0.16mJ,激光功率密度为0.23~0.57GW/cm2,聚焦后的有效光斑直径约为60m,激光扫描速率为5~50mm/s,激光束扫描区域为10mm×10mm。In the step 20): the ultraviolet nanosecond laser processing system adopts an ultraviolet nanosecond pulse laser, the laser wavelength is 355nm, the pulse width is 10ns, the pulse repetition frequency is 40~60kHz, the laser power is 5.8~6.5W, and the pulse energy is 0.1 ~0.16mJ, the laser power density is 0.23~0.57GW/cm 2 , the effective spot diameter after focusing is about 60m, the laser scanning rate is 5~50mm/s, and the laser beam scanning area is 10mm×10mm.
所述步骤20)中:所述微纳结构的表面结构为单向、环形或交叉状的微米级沟槽结构,在微米级沟槽结构上覆盖着亚微米级或纳米级的溅射颗粒;沟槽间距为100~300μm,沟槽深度为15~25μm。In the step 20): the surface structure of the micro-nano structure is a unidirectional, annular or cross-shaped micro-scale groove structure, and the micro-scale groove structure is covered with sub-micron or nano-scale sputtering particles; The groove pitch is 100-300 μm, and the groove depth is 15-25 μm.
所述步骤30)中,滴入的混合溶液体积为15~25μL,混合溶液中二甲基硅油体积分数为0.2%~0.4%,异丙醇溶液的体积分数为99.6%~99.8%。In the step 30), the volume of the mixed solution dropped in is 15-25 μL, the volume fraction of dimethicone in the mixed solution is 0.2%-0.4%, and the volume fraction of the isopropanol solution is 99.6%-99.8%.
所述步骤40)中,加热板的温度为100~150℃,加热时间5~10分钟。In the step 40), the temperature of the heating plate is 100-150° C., and the heating time is 5-10 minutes.
本发明的有益效果如下:The beneficial effects of the present invention are as follows:
本发明极大地缩短了制备周期,提高了制备效率,降低了制备成本。同时确保了对生物体和环境无毒害性。The invention greatly shortens the preparation period, improves the preparation efficiency and reduces the preparation cost. It also ensures non-toxicity to organisms and the environment.
本发明的其它特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本发明而了解。Other features and advantages of the present invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the invention.
附图说明Description of drawings
图1为本发明的工艺流程示意图。其中:1、激光器;2、衰减器;3、光束放大器;4、振镜;5、冷却系统;6、控制器;7、电脑;8、样品台;9、样品;10、加热板;a为硅油处理;b为低温热处理;c为超声清洗。Fig. 1 is the process flow schematic diagram of the present invention. Among them: 1, laser; 2, attenuator; 3, beam amplifier; 4, galvanometer; 5, cooling system; 6, controller; 7, computer; 8, sample stage; 9, sample; 10, heating plate; a For silicone oil treatment; b for low temperature heat treatment; c for ultrasonic cleaning.
图2为本发明激光微纳加工处理后表面的三维轮廓测试结果。FIG. 2 is the test result of the three-dimensional profile of the surface after the laser micro-nano processing of the present invention.
图3为本发明激光微纳加工处理后表面的SEM图。FIG. 3 is a SEM image of the surface after the laser micro-nano processing of the present invention.
图4为不同处理方式制备表面的EDS谱图。其中:(a)为未处理表面;(b)为激光微纳加工处理表面;(c)为本发明采用激光-硅油-热处理的表面。Figure 4 shows the EDS spectra of surfaces prepared by different treatments. Wherein: (a) is the untreated surface; (b) is the surface treated by laser micro-nano processing; (c) is the surface which adopts laser-silicon oil-heat treatment in the present invention.
图5为使用不同处理方式制备表面对水滴的接触角测量结果。其中:(a)为未处理表面;(b)为激光微纳加工处理表面;(c)为激光微纳加工处理后外加硅油处理表面;(d)为热处理表面;(e)为热处理后外加硅油处理表面;(f)为本发明采用激光-硅油-热处理的表面。Figure 5 shows the measurement results of the contact angle of water droplets on surfaces prepared with different treatments. Among them: (a) is the untreated surface; (b) is the surface treated by laser micro-nano processing; (c) is the surface treated with silicone oil after laser micro-nano processing; (d) is the heat-treated surface; The surface treated with silicone oil; (f) is the surface treated by laser-silicon oil-heat treatment in the present invention.
具体实施方式Detailed ways
以下结合附图说明本发明的具体实施方式。The specific embodiments of the present invention will be described below with reference to the accompanying drawings.
请参考图1,本申请的高效超疏水表面制备方法,包括以下步骤:Please refer to FIG. 1, the preparation method of the high-efficiency superhydrophobic surface of the present application includes the following steps:
步骤10)对金属基底进行清洗:将金属基底依次置于丙酮、无水乙醇、去离子水中超声清洗,然后置于氮气流中吹干。Step 10) Cleaning the metal substrate: the metal substrate is placed in acetone, absolute ethanol, and deionized water for ultrasonic cleaning in sequence, and then placed in a nitrogen stream to dry.
步骤20)激光微纳加工处理:将清洗过的金属基底放置于紫外纳秒激光加工系统的样品台上,利用激光束在金属基底表面加工出微纳结构,然后在异丙醇中超声清洗5~10分钟;Step 20) Laser micro-nano processing: place the cleaned metal substrate on the sample stage of the ultraviolet nanosecond laser processing system, use the laser beam to process the micro-nano structure on the surface of the metal substrate, and then ultrasonically clean it in isopropyl alcohol 5 ~10 minutes;
步骤30)硅油处理:在步骤20)处理后的金属基底上滴入二甲基硅油与异丙醇的混合溶液;Step 30) Silicone oil treatment: drop a mixed solution of dimethyl silicone oil and isopropanol on the treated metal substrate in step 20);
步骤40)低温热处理:将步骤30)处理后的金属基底在加热板上加热,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。Step 40) low temperature heat treatment: the metal substrate treated in step 30) is heated on a heating plate, then taken out and ultrasonically cleaned with isopropanol, and finally dried in a nitrogen stream to obtain a superhydrophobic surface.
金属基底为AISI 304不锈钢、紫铜、黄铜或者Ti-6Al-4V钛合金等。The metal base is AISI 304 stainless steel, copper, brass or Ti-6Al-4V titanium alloy, etc.
本申请制备方法主要包括两个工艺步骤:激光微纳加工处理和后处理。The preparation method of the present application mainly includes two process steps: laser micro-nano processing and post-processing.
激光加工设备采用苏州天弘激光公司生产的TH-UV200A紫外纳秒激光加工平台,激光器为Advanced Optowave公司生产的紫外纳秒脉冲激光器AWAVE 355-15W-30K。如图1所示,将样品9放在样品台8上,激光光束由激光器1发出,经由衰减器2和光束放大器3,进入振镜4后由电脑7软件连接控制器6实现对激光光束扫描图案的控制。振镜4与冷却系统5连接。The laser processing equipment adopts the TH-UV200A ultraviolet nanosecond laser processing platform produced by Suzhou Tianhong Laser Company, and the laser is the ultraviolet nanosecond pulse laser AWAVE 355-15W-30K produced by Advanced Optowave Company. As shown in Figure 1, put the sample 9 on the
其中,激光器波长为355nm,脉冲宽度为10ns,脉冲重复频率为40~60kHz,激光功率为5.8~6.5W,脉冲能量为0.1~0.16mJ,激光功率密度为0.23~0.57GW/cm2,聚焦后的有效光斑直径约为60μm,激光扫描速率为5~50mm/s,激光束扫描区域为10mm×10mm。Among them, the laser wavelength is 355nm, the pulse width is 10ns, the pulse repetition frequency is 40~60kHz, the laser power is 5.8~6.5W, the pulse energy is 0.1~0.16mJ, and the laser power density is 0.23~0.57GW/cm 2 . The effective spot diameter is about 60 μm, the laser scanning rate is 5-50 mm/s, and the laser beam scanning area is 10 mm × 10 mm.
具体的,硅油后处理中,混合溶液滴入15~25μL,混合溶液中二甲基硅油体积分数为0.2%~0.4%,异丙醇溶液的体积分数为99.6%~99.8%。低温热处理采用的加热板10的温度为100~150℃,加热时间为5~10分钟。Specifically, in the post-treatment of the silicone oil, 15-25 μL of the mixed solution is dropped, and the volume fraction of the dimethicone oil in the mixed solution is 0.2%-0.4%, and the volume fraction of the isopropanol solution is 99.6%-99.8%. The temperature of the
以下通过具体实施例对本申请的高效超疏水表面制备方法做进一步说明。The method for preparing a high-efficiency superhydrophobic surface of the present application will be further described below through specific examples.
实施例1:Example 1:
步骤10)将紫铜基底裁剪出10mm×10mm大小,然后依次用丙酮、无水乙醇、去离子水超声清洗10分钟,以去除基底表面的污染物,随后置于氮气流中吹干。Step 10) Cut the copper substrate to a size of 10mm×10mm, then ultrasonically clean it with acetone, anhydrous ethanol, and deionized water for 10 minutes in turn to remove contaminants on the surface of the substrate, and then place it in a nitrogen stream to dry.
步骤20)对表面进行激光微纳加工处理,所选用的激光参数如下:脉冲宽度为10ns,激光器波长为355nm,脉冲重复频率为40kHz,激光功率为6.5W,脉冲能量为0.16mJ,激光功率密度为0.57GW/cm2,聚焦后的有效光斑直径约为60μm,激光扫描速率为50mm/s,激光束扫描区域为8mm×8mm。将激光制备基底放入异丙醇中进行超声清洗5分钟。Step 20) Perform laser micro-nano processing on the surface, and the selected laser parameters are as follows: the pulse width is 10ns, the laser wavelength is 355nm, the pulse repetition frequency is 40kHz, the laser power is 6.5W, the pulse energy is 0.16mJ, and the laser power density is is 0.57GW/cm 2 , the effective spot diameter after focusing is about 60 μm, the laser scanning rate is 50 mm/s, and the laser beam scanning area is 8 mm×8 mm. The laser-prepared substrates were placed in isopropanol for ultrasonic cleaning for 5 min.
步骤30)在步骤20)处理后的金属基底上滴入15μL体积分数为0.2%的二甲基硅油和体积分数为99.8%的异丙醇的混合溶液。Step 30) Drop 15 μL of a mixed solution of 0.2% dimethyl silicone oil and 99.8% isopropanol by volume on the metal substrate treated in step 20).
步骤40)将步骤30)处理后的金属基底在加热板上加热10分钟,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。Step 40) The metal substrate treated in step 30) is heated on a heating plate for 10 minutes, then taken out and ultrasonically cleaned with isopropanol, and finally dried in a nitrogen stream to obtain a superhydrophobic surface.
将5μL的去离子水静止于步骤20)后的表面上,水滴接触角为0°,展现出超亲水特性;将5μL的去离子水静止于步骤40)后的表面上,水滴接触角高达156.3°,展现出了优良的超疏水性能。Put 5 μL of deionized water on the surface after step 20), the contact angle of water droplets is 0°, showing super-hydrophilic properties; 156.3°, showing excellent superhydrophobicity.
实施例2:Example 2:
步骤10)将304不锈钢基底裁剪出15mm×15mm大小,然后依次用丙酮、无水乙醇、去离子水超声清洗12分钟,以去除基底表面的污染物,随后置于氮气流中吹干。Step 10) Cut the 304 stainless steel substrate to a size of 15mm×15mm, then use acetone, anhydrous ethanol, and deionized water for ultrasonic cleaning for 12 minutes in sequence to remove contaminants on the surface of the substrate, and then place it in a nitrogen stream to dry.
步骤20)对表面进行激光微纳加工处理,所选用的激光参数如下:脉冲宽度为10ns,激光器波长为355nm,脉冲重复频率为60kHz,激光功率为5.8W,脉冲能量为0.1mJ,激光功率密度为0.23GW/cm2,聚焦后的有效光斑直径约为60μm,激光扫描速率为20mm/s,激光束扫描区域为12mm×12mm。将激光制备基底放入异丙醇中进行超声清洗10分钟。Step 20) Perform laser micro-nano processing on the surface, and the selected laser parameters are as follows: the pulse width is 10ns, the laser wavelength is 355nm, the pulse repetition frequency is 60kHz, the laser power is 5.8W, the pulse energy is 0.1mJ, and the laser power density is is 0.23GW/cm 2 , the effective spot diameter after focusing is about 60 μm, the laser scanning rate is 20 mm/s, and the laser beam scanning area is 12 mm×12 mm. The laser-prepared substrates were placed in isopropanol for ultrasonic cleaning for 10 min.
步骤30)在步骤20)处理后的金属基底上滴入20μL体积分数为0.4%的二甲基硅油和体积分数为99.6%的异丙醇的混合溶液。Step 30)
步骤40)将步骤30)处理后的金属基底在加热板上加热5分钟,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。Step 40) The metal substrate treated in step 30) is heated on a heating plate for 5 minutes, then taken out and ultrasonically cleaned with isopropanol, and finally placed in a nitrogen stream to dry to obtain a superhydrophobic surface.
将5gL的去离子水静止于步骤20)后的表面上,水滴接触角为0°,展现出超亲水特性;将5μL的去离子水静止于步骤40)后的表面上,水滴接触角高达159.2°,展现出了优良的超疏水性能。5gL of deionized water was still on the surface after step 20), and the contact angle of the water droplet was 0°, showing super-hydrophilic properties; 5 μL of deionized water was still on the surface after step 40), and the water droplet contact angle was as high as 159.2°, showing excellent superhydrophobicity.
实施例3:Example 3:
步骤10)将Ti-6Al-4V基底裁剪出20mm×20mm大小,然后依次用丙酮、无水乙醇、去离子水超声清洗15分钟,以去除基底表面的污染物,随后置于氮气流中吹干。Step 10) The Ti-6Al-4V substrate was cut out to a size of 20mm×20mm, and then ultrasonically cleaned with acetone, absolute ethanol, and deionized water for 15 minutes to remove the pollutants on the surface of the substrate, and then placed in a nitrogen stream to dry. .
步骤20)对表面进行激光微纳加工处理,所选用的激光参数如下:脉冲宽度为10ns,激光器波长为355nm,脉冲重复频率为50kHz,激光功率为6.1W,脉冲能量为0.12mJ,激光功率密度为0.43GW/cm2,聚焦后的有效光斑直径约为60μm,激光扫描速率为10mm/s,激光束扫描区域为15mm×15mm。将激光制备基底放入异丙醇中进行超声清洗8分钟。Step 20) Perform laser micro-nano processing on the surface. The selected laser parameters are as follows: the pulse width is 10ns, the laser wavelength is 355nm, the pulse repetition frequency is 50kHz, the laser power is 6.1W, the pulse energy is 0.12mJ, and the laser power density is is 0.43GW/cm 2 , the effective spot diameter after focusing is about 60 μm, the laser scanning rate is 10 mm/s, and the laser beam scanning area is 15 mm×15 mm. The laser-prepared substrates were placed in isopropanol for ultrasonic cleaning for 8 min.
步骤30)在步骤20)处理后的金属基底上滴入25μL体积分数为0.3%的二甲基硅油和体积分数为99.7%的异丙醇的混合溶液。Step 30) Drop 25 μL of a mixed solution of 0.3% dimethyl silicone oil and 99.7% isopropanol by volume on the metal substrate treated in step 20).
步骤40)将步骤30)处理后的金属基底在加热板上加热8分钟,然后取出并使用异丙醇超声清洗,最后置于氮气流中吹干,制得超疏水表面。Step 40) The metal substrate treated in step 30) is heated on a heating plate for 8 minutes, then taken out and ultrasonically cleaned with isopropanol, and finally dried in a nitrogen stream to obtain a superhydrophobic surface.
将5μL的去离子水静止于步骤20)后的表面上,水滴接触角为0°,展现出超亲水特性;将5μL的去离子水静止于步骤40)后的表面上,水滴接触角高达154.6°,展现出了优良的超疏水性能。Put 5 μL of deionized water on the surface after step 20), the contact angle of water droplets is 0°, showing super-hydrophilic properties; 154.6°, showing excellent superhydrophobicity.
以下分析本申请制备方法达到的技术效果。The technical effects achieved by the preparation method of the present application are analyzed below.
一、在表面结构方面,如图2所示,为本申请激光微纳加工处理后表面的三维轮廓。从图2中可以看出,通过激光微纳加工处理,表面展现出了规则排列的交叉微米级沟槽结构。通过三维表面形貌的扫描可以发现,沟槽的间距约为150μm,深度约为20μm。1. In terms of surface structure, as shown in FIG. 2 , it is the three-dimensional contour of the surface after the laser micro-nano processing of the present application. As can be seen from Figure 2, through the laser micro-nano processing, the surface exhibits a regularly arranged intersecting micron-scale groove structure. By scanning the three-dimensional surface topography, it can be found that the pitch of the grooves is about 150 μm and the depth is about 20 μm.
如图3所示,为本申请中激光微纳加工处理后表面的SEM测试结果。通过观察不同倍数的SEM图片可以发现,每条激光诱导微沟槽的边界上还分布了一些亚微米和纳米级的颗粒。这些颗粒主要是在激光与材料相互作用的过程中,材料表面局部升温、汽化、离化,产生高压力的等离子体膨胀,通过材料烧蚀及等离子喷射作用沉积形成的。As shown in FIG. 3 , it is the SEM test result of the surface after laser micro-nano processing in the application. By observing the SEM images of different magnifications, it can be found that some submicron and nanoscale particles are also distributed on the boundary of each laser-induced microgroove. These particles are mainly formed by the local heating, vaporization and ionization of the material surface during the interaction between the laser and the material, resulting in high-pressure plasma expansion and deposition through material ablation and plasma spraying.
这表明本申请激光微纳加工处理工艺可以诱导多级(微米-亚微米-纳米)微纳结构的产生。相比于波长1064nm的近红外纳秒激光器,本申请使用了波长为355nm的紫外激光器,除了保证对于金属表面结构的精确控制,还可以降低激光加工过程中的热效应,减小热影响区,制备高质量的表面多级微纳结构,从而为实现金属表面的超疏水特性奠定基础。This shows that the laser micro-nano processing technology of the present application can induce the generation of multi-level (micron-submicron-nano) micro-nano structures. Compared with the near-infrared nanosecond laser with a wavelength of 1064nm, this application uses an ultraviolet laser with a wavelength of 355nm. In addition to ensuring the precise control of the metal surface structure, it can also reduce the thermal effect in the laser processing process, reduce the heat-affected zone, and prepare High-quality surface multi-level micro-nano structure, thus laying the foundation for the realization of superhydrophobic properties of metal surfaces.
二、在表面化学特性方面,如图4所示,为通过EDS能谱分析法测得的不同表面的化学成分结果。2. In terms of surface chemical properties, as shown in Figure 4, it is the chemical composition results of different surfaces measured by EDS energy spectrometry.
图4(a)为未经处理表面的结果。由图4a可知,在未处理表面上可以检测到Cu、C和O元素。其中,Cu元素来源于基底材料,O元素来源于基底材料表面层的氧化,C元素是源自于基底材料表面的轻微污染。然而,激光微纳加工处理表面的化学元素组成(图4(b)所示)与未处理表面相比展现出了一定的变化。除了基体材料元素的含量有一定的改变之外,最大的变化来自于C元素和O元素。Figure 4(a) shows the results for the untreated surface. As can be seen from Figure 4a, Cu, C and O elements can be detected on the untreated surface. Among them, the Cu element comes from the base material, the O element comes from the oxidation of the surface layer of the base material, and the C element comes from the slight pollution on the surface of the base material. However, the chemical element composition of the laser micro-nano-machined surface (shown in Fig. 4(b)) exhibits a certain change compared to the untreated surface. Except for some changes in the content of elements in the matrix material, the biggest changes come from C and O elements.
图4(b)为激光微纳加工处理表面的结果。由图4b可看出,激光微纳加工处理后表面C元素含量明显下降,同时O元素含量显著上升,说明激光微纳加工处理不仅在金属表面上诱导生成了周期性微纳结构,还使表面明显氧化,表面上因此生成了大量的羟基(-OH)和羧基(-COOH)。对于激光微纳加工处理后外加硅油处理和热处理的表面(图4(c)所示激光-硅油-热处理表面),其化学成分相比于激光微纳加工处理表面则又发生了显著变化。Figure 4(b) is the result of laser micro-nano processing of the surface. It can be seen from Figure 4b that the content of C element on the surface decreased significantly after laser micro-nano processing, while the content of O element increased significantly, indicating that laser micro-nano processing not only induces periodic micro-nano structures on the metal surface, but also makes the surface Significant oxidation, resulting in the formation of a large number of hydroxyl (-OH) and carboxyl (-COOH) groups on the surface. For the surface treated with silicon oil and heat treatment after laser micro-nano processing (the laser-silicon oil-heat-treated surface shown in Fig. 4(c)), the chemical composition of the surface has changed significantly compared with the surface treated by laser micro-nano processing.
图4(c)为本申请采用的激光-硅油-热处理表面的结果。由图4c可以看出,化学变化主要有以下两方面:一是激光-硅油-热处理表面的C元素含量显著上升,二是在激光-硅油-热处理表面上探测到了Si元素的存在。C元素含量的上升主要是由于低温热处理加速了空气中的非极性含碳疏水基团(如-CH2-,-CH3,C=C等功能基团)在金属表面的沉积。Si元素则来源于滴入表面的硅油与异丙醇混合溶液。在低温热处理过程中,混合溶液中的硅原子充分沉积到了金属表面,形成了一层含硅薄膜。借助具有疏水特性的含碳疏水基团和含硅薄膜共同沉积在激光-硅油-热处理表面上,促使表面产生超疏水特性。Figure 4(c) is the result of the laser-silicon oil-heat-treated surface used in this application. It can be seen from Figure 4c that the chemical changes mainly have the following two aspects: one is that the content of C element on the surface of laser-silicon oil-heat treatment increases significantly, and the other is that the existence of Si element is detected on the surface of laser-silicon oil-heat treatment. The increase of C element content is mainly due to the accelerated deposition of non-polar carbon-containing hydrophobic groups (such as -CH2-, -CH3, C=C and other functional groups) in the air on the metal surface by low temperature heat treatment. The Si element comes from the mixed solution of silicone oil and isopropanol dropped on the surface. During the low-temperature heat treatment, the silicon atoms in the mixed solution are fully deposited on the metal surface, forming a silicon-containing film. With the help of carbon-containing hydrophobic groups with hydrophobic properties and silicon-containing films co-deposited on the surface of laser-silicon oil-heat treatment, the superhydrophobicity of the surface is promoted.
三、在表面润湿性方面,如图5所示,为使用不同处理方式制备表面对水滴的接触角测量结果。3. In terms of surface wettability, as shown in Figure 5, the measurement results of the contact angle of water droplets on the surface prepared by different treatment methods.
图5(a)是未处理表面的水滴接触角图像,测量出其水滴接触角为82.1±2.5°,证明表面具有亲水特性。Figure 5(a) is an image of the water droplet contact angle of the untreated surface. The measured water droplet contact angle is 82.1±2.5°, which proves that the surface has hydrophilic properties.
图5(b)是经激光微纳加工处理后表面的水滴接触角图像,测量出其表面接触角降至0°,说明激光处理后的金属表面处于饱和的Wenzel状态,使得表面展现出显著的超亲水特性。分析其原因主要包括以下两点:(1)激光微纳加工处理显著增加了金属表面的微观粗糙度,使得水滴在激光诱导微结构复合界面上由不稳定的Cassie状态转变为了饱和的Wenzel状态;(2)表面上生成的大量的羟基(-OH)和羧基(-COOH)都是极性基团,具有极强的亲水特性,其含量的上升也导致了表面亲水性的增强。Figure 5(b) is an image of the contact angle of water droplets on the surface after laser micro-nano processing. It is measured that the surface contact angle drops to 0°, indicating that the metal surface after laser processing is in a saturated Wenzel state, which makes the surface exhibit significant Super hydrophilic properties. The reasons mainly include the following two points: (1) The laser micro-nano processing significantly increases the micro-roughness of the metal surface, which makes the water droplets change from the unstable Cassie state to the saturated Wenzel state at the laser-induced microstructure composite interface; (2) A large number of hydroxyl groups (-OH) and carboxyl groups (-COOH) generated on the surface are both polar groups and have extremely strong hydrophilic properties, and the increase in their content also leads to the enhancement of surface hydrophilicity.
此外,分析经激光微纳加工处理+硅油处理(图5(c))、热处理(图5(d))以及硅油+热处理(图5(e))这三种工艺,表面接触角分别增至76.8±1.8°、87.2±1.5°和96.5±1.6°。这说明硅油处理和热处理均可以在一定程度上提升表面的接触角,然后却不足以使表面实现超疏水特性。In addition, the surface contact angles were increased to 76.8±1.8°, 87.2±1.5° and 96.5±1.6°. This shows that both silicone oil treatment and heat treatment can improve the contact angle of the surface to a certain extent, but not enough to make the surface superhydrophobic.
对于本申请采用的激光-硅油-热处理工艺(图5(f)),表面接触角达到159.2±2.1°。这说明激光微纳加工处理、热处理和硅油处理对于实现超疏水特性具有同等的重要性。激光微纳加工处理在表面诱导出多级微纳结构,热处理和硅油处理可以改变表面化学,降低表面能。多级表面微纳结构和较低的表面能的共同作用可以保证表面实现超疏水特性。For the laser-silicon oil-heat treatment process used in this application (Fig. 5(f)), the surface contact angle reaches 159.2±2.1°. This shows that laser micro-nano processing, heat treatment and silicone oil treatment are equally important to achieve superhydrophobic properties. Laser micro-nano processing induces multi-level micro-nano structures on the surface, and heat treatment and silicone oil treatment can change the surface chemistry and reduce the surface energy. The combined effect of multi-level surface micro-nano structure and lower surface energy can ensure the superhydrophobicity of the surface.
四、在制备效率方面,本申请相比于与其他超疏水表面制备方法,制备效率有大幅提升。Fourth, in terms of preparation efficiency, compared with other superhydrophobic surface preparation methods, the preparation efficiency of the present application is greatly improved.
这主要体现在:(1)低表面能物质涂覆、自组装、聚合物压印、静电纺丝、蚀刻等加工方法耗时长,设备昂贵;(2)激光处理后的表面展现出超亲水特性。为了实现表面由超亲水向超疏水特性的转变,其他激光加工方法需要将表面在空气中放置3-7天使空气中的疏水基团在表面沉积实现超疏水特性,或通过一些数小时的后处理工艺可以加速激光处理表面由超亲水向超疏水特性的转变。(3)在保证激光表面处理效率(扫描速率最高可达1.89cm2/min)的同时,使用硅油处理的后处理工艺,仅需5~10分钟便可完成激光处理表面由超亲水向超疏水特性的转变,因此大大提升了超疏水表面的制备效率。同时,本申请使用的硅油和异丙醇混合溶液对生物体和环境无毒害,有望在诸多领域得到广泛应用。This is mainly reflected in: (1) low surface energy material coating, self-assembly, polymer imprinting, electrospinning, etching and other processing methods are time-consuming and expensive; (2) the laser-treated surface exhibits super-hydrophilicity characteristic. In order to realize the transformation of the surface from superhydrophilic to superhydrophobic, other laser processing methods need to place the surface in the air for 3-7 days to deposit the hydrophobic groups in the air on the surface to realize the superhydrophobicity, or after some hours The treatment process can accelerate the transformation of laser-treated surfaces from superhydrophilic to superhydrophobic properties. (3) While ensuring the efficiency of laser surface treatment (scanning rate up to 1.89cm 2 /min), using the post-treatment process of silicone oil treatment, it only takes 5 to 10 minutes to complete the laser treatment surface from super-hydrophilic to super-hydrophilic The transformation of the hydrophobic properties thus greatly improves the preparation efficiency of superhydrophobic surfaces. Meanwhile, the mixed solution of silicone oil and isopropanol used in the present application is non-toxic to organisms and the environment, and is expected to be widely used in many fields.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210131605.9A CN114558764A (en) | 2022-02-11 | 2022-02-11 | A kind of efficient superhydrophobic surface preparation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210131605.9A CN114558764A (en) | 2022-02-11 | 2022-02-11 | A kind of efficient superhydrophobic surface preparation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114558764A true CN114558764A (en) | 2022-05-31 |
Family
ID=81714179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210131605.9A Pending CN114558764A (en) | 2022-02-11 | 2022-02-11 | A kind of efficient superhydrophobic surface preparation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114558764A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115595579A (en) * | 2022-10-31 | 2023-01-13 | 中国地质大学(北京)(Cn) | Hydrophobic anti-icing coating on the surface of engine front compression blade and its preparation method and application |
| CN117086569A (en) * | 2023-08-30 | 2023-11-21 | 江苏大学 | Method for preparing super-hydrophobic surface by rolling nano particles by ultrasonic |
| CN119681442A (en) * | 2024-11-07 | 2025-03-25 | 苏州大学 | A method and application of atomized silicone oil assisted laser construction of high-viscosity super-hydrophobic surface |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100279084A1 (en) * | 2009-04-03 | 2010-11-04 | Board Of Trustees Of The University Of Arkansas | Superhydrophobic Surface and Method of Forming Same |
| WO2018050449A1 (en) * | 2016-09-15 | 2018-03-22 | Philip Morris Products S.A. | Electronic aerosol-generating smoking device |
| US20190054571A1 (en) * | 2017-08-21 | 2019-02-21 | University Of Iowa Research Foundation | Nanosecond laser-based high-throughput surface nano-structuring (nhsn) process |
| CN110468415A (en) * | 2019-08-19 | 2019-11-19 | 山东大学 | A kind of metal super-hydrophobic surface preparation method and applications |
| CN111318053A (en) * | 2020-02-28 | 2020-06-23 | 广州大学 | Super-hydrophobic aluminum alloy filter screen and preparation method and application thereof |
| CN111330829A (en) * | 2020-03-09 | 2020-06-26 | 广州大学 | A kind of silicon substrate superhydrophobic surface and its preparation method and application |
| CN112358812A (en) * | 2020-11-15 | 2021-02-12 | 吉林大学 | Magnesium alloy super-hydrophobic coating and preparation method and application thereof |
| CN113275223A (en) * | 2021-04-26 | 2021-08-20 | 东南大学 | Preparation method of high-adhesion super-hydrophobic surface based on laser chemical composite process |
-
2022
- 2022-02-11 CN CN202210131605.9A patent/CN114558764A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100279084A1 (en) * | 2009-04-03 | 2010-11-04 | Board Of Trustees Of The University Of Arkansas | Superhydrophobic Surface and Method of Forming Same |
| WO2018050449A1 (en) * | 2016-09-15 | 2018-03-22 | Philip Morris Products S.A. | Electronic aerosol-generating smoking device |
| US20190054571A1 (en) * | 2017-08-21 | 2019-02-21 | University Of Iowa Research Foundation | Nanosecond laser-based high-throughput surface nano-structuring (nhsn) process |
| CN110468415A (en) * | 2019-08-19 | 2019-11-19 | 山东大学 | A kind of metal super-hydrophobic surface preparation method and applications |
| CN111318053A (en) * | 2020-02-28 | 2020-06-23 | 广州大学 | Super-hydrophobic aluminum alloy filter screen and preparation method and application thereof |
| CN111330829A (en) * | 2020-03-09 | 2020-06-26 | 广州大学 | A kind of silicon substrate superhydrophobic surface and its preparation method and application |
| CN112358812A (en) * | 2020-11-15 | 2021-02-12 | 吉林大学 | Magnesium alloy super-hydrophobic coating and preparation method and application thereof |
| CN113275223A (en) * | 2021-04-26 | 2021-08-20 | 东南大学 | Preparation method of high-adhesion super-hydrophobic surface based on laser chemical composite process |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115595579A (en) * | 2022-10-31 | 2023-01-13 | 中国地质大学(北京)(Cn) | Hydrophobic anti-icing coating on the surface of engine front compression blade and its preparation method and application |
| CN117086569A (en) * | 2023-08-30 | 2023-11-21 | 江苏大学 | Method for preparing super-hydrophobic surface by rolling nano particles by ultrasonic |
| CN119681442A (en) * | 2024-11-07 | 2025-03-25 | 苏州大学 | A method and application of atomized silicone oil assisted laser construction of high-viscosity super-hydrophobic surface |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114558764A (en) | A kind of efficient superhydrophobic surface preparation method | |
| CN114535813B (en) | Reversible regulation and control method for surface wettability | |
| CN110653493B (en) | Preparation method of super-hydrophobic micro-nano structure on surface of stainless steel | |
| CN113798679B (en) | Amorphous alloy functionalized surface preparation method based on laser microtexture | |
| CN111069001B (en) | Material with bionic hydrophobic-hydrophilic surface and preparation method and application thereof | |
| Yang et al. | Modification of wetting property of Inconel 718 surface by nanosecond laser texturing | |
| Wu et al. | Superhydrophobic surfaces fabricated by microstructuring of stainless steel using a femtosecond laser | |
| CN104646833B (en) | A laser preparation method for gradient wetting surface of metal substrate | |
| CN106392332B (en) | A kind of laser-graining method for improving medical implant surfaces cell adhesion | |
| CN107522161A (en) | Controllable copper substrate superhydrophobic surface of a kind of micro nano structure and preparation method thereof, application | |
| CN112605531B (en) | A method for preparing anti-icing polytetrafluoroethylene superhydrophobic surfaces with adjustable structure and wettability using femtosecond laser | |
| Samanta et al. | Large-area surface wettability patterning of metal alloys via a maskless laser-assisted functionalization method | |
| CN105935837A (en) | Laser texturing method for improving adhesive force of surface of weathering resistant steel | |
| CN112207010A (en) | Self-cleaning metal surface and preparation method and preparation device thereof | |
| CN111254433A (en) | Microstructure-nano copper oxide synergistic antibacterial surface of stainless steel surface and laser-chemical composite preparation method and application thereof | |
| Raja et al. | Influence of laser parameters on superhydrophobicity-A review | |
| CN110408934A (en) | A superhydrophilic-superhydrophobic surface with enhanced condensation effect and its preparation method | |
| CN112588540A (en) | Hydrophilic-hydrophobic heterogeneous patterned surface for enhancing dropwise condensation and preparation method thereof | |
| CN116814908A (en) | Laser micro-texture-based iron-based amorphous alloy coating with superhydrophobicity and corrosion resistance and preparation method thereof | |
| Sun et al. | Enhanced superhydrophobicity of acrylic polyurethane coatings by femtosecond laser ablation | |
| CN116352286A (en) | Oil-water separation surface preparation method based on laser-heat treatment composite technology | |
| CN114799217B (en) | Method for realizing super-hydrophobicity of surface of NiTi alloy by additive manufacturing based on femtosecond laser processing | |
| CN116833578A (en) | Laser processing method for metal surface electrolytic oxide layer super-hydrophobic corrosion prevention | |
| CN117182317A (en) | A mechanical durability-enhanced superhydrophobic mist collection surface and its preparation method | |
| Chokshi et al. | Wettability patterning of titanium surfaces through pulsed laser melting for enhanced condensation heat transfer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |