CN114646276B - Three-dimensional optical detection device - Google Patents
Three-dimensional optical detection device Download PDFInfo
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- CN114646276B CN114646276B CN202011493102.3A CN202011493102A CN114646276B CN 114646276 B CN114646276 B CN 114646276B CN 202011493102 A CN202011493102 A CN 202011493102A CN 114646276 B CN114646276 B CN 114646276B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a three-dimensional optical detection device, comprising: the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module; the image transmitting module transmits a light beam with a preset pattern to the light splitting module; the beam splitting module splits the beam with the preset pattern into at least two sub-beams, and the at least two sub-beams respectively irradiate to the corresponding reflecting module; the reflecting modules and the projection modules are in one-to-one correspondence; the image acquisition module is used for acquiring the image of the object to be detected. The invention skillfully sets the beam splitting module, emits the light beam with the preset pattern through one image emitting module, divides the light beam with the preset pattern into a plurality of sub-light beams by the beam splitting module, finally projects the plurality of sub-light beams with the preset pattern onto the object to be detected, reduces the use quantity of the image emitting module, greatly reduces the equipment cost, has good imaging effect and is convenient to use.
Description
Technical Field
The invention relates to the field of three-dimensional detection, in particular to a three-dimensional optical detection device.
Background
The three-dimensional optical detection device adopting surface structured light at present mainly comprises an image emission module, a projection module and an image acquisition module. The image emission module emits a light beam with a preset pattern (such as a stripe pattern) to the projection module, the projection module projects the light beam with the preset pattern onto an object to be tested (such as a PCB circuit board), and then an image modulated by the object to be tested is collected through the image collection module.
The main scheme is multi-path projection single-path imaging, and a plurality of image transmitting modules and a plurality of projection modules are needed at the moment to transmit a plurality of light beams with preset patterns to be transmitted into the object to be measured. The most direct consequence of this is that the equipment costs are high. And there may be a difference in projection effect between each image emitting module and the projection module, and it is often difficult to have an ideal imaging effect.
Disclosure of Invention
The invention aims to provide a three-dimensional optical detection device so as to solve the defect of high equipment cost in the prior art.
The three-dimensional optical detection device of the present invention comprises: the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module;
The image emission module is used for emitting a light beam with a preset pattern, and the light beam with the preset pattern is emitted to the light splitting module; the image emission module comprises an illumination unit, a TIR prism and a projection chip, wherein the illumination unit is used for emitting light beams, and the projection chip is used for generating a preset pattern; the light beam emitted by the lighting unit is emitted to the TIR prism, the TIR prism totally reflects the light beam emitted by the lighting unit to the projection chip, and the light beam with the preset pattern formed after being reflected by the projection chip is emitted;
The beam splitting module is used for splitting the light beam with the preset pattern into at least two sub-beams, each sub-beam corresponds to one reflecting module, and the at least two sub-beams respectively irradiate to the corresponding reflecting module; the beam splitting module divides the light beam with the preset pattern into four sub-beams, wherein the four sub-beams are respectively a first sub-beam, a second sub-beam, a third sub-beam and a fourth sub-beam; the beam splitting module comprises a first beam splitting element, a second beam splitting element and a third beam splitting element;
The first beam splitting element is used for splitting the light beam with the preset pattern into a first main light beam and a second main light beam which are orthogonal in direction, wherein the first main light beam is emitted to the second beam splitting element, and the second main light beam is emitted to the third beam splitting element;
The second beam splitting element is used for splitting the first main beam into the first sub-beam and the second sub-beam which are orthogonal in direction;
the third beam splitting element is used for splitting the second main beam into the third sub-beam and the fourth sub-beam which are orthogonal in direction;
The directions of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam respectively correspond to four axial directions of a plane rectangular coordinate system;
The reflection modules are in one-to-one correspondence with the projection modules, and the reflection modules are used for reflecting the corresponding sub-beams to the corresponding projection modules; the four reflection modules respectively reflect the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to four corresponding projection modules;
The projection module is used for transmitting and projecting the corresponding sub-beams to an object to be measured; the four projection modules respectively transmit and project the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to the object to be measured;
the image acquisition module is used for acquiring the image of the object to be detected.
Compared with the prior art, the three-dimensional optical detection device provided by the invention is skillfully provided with the light splitting module, only the light beam with the preset pattern is sent out through one image transmission module, the light beam with the preset pattern is divided into a plurality of sub-light beams by the light splitting module, and finally the plurality of sub-light beams with the preset pattern are projected onto an object to be detected, so that the number of the image transmission modules is reduced, the equipment cost is greatly reduced, and the plurality of sub-light beams with the preset pattern are equivalent to all sent out from one image transmission module, so that the imaging effect is good and the use is convenient.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional optical detection device according to the present invention;
FIG. 2 is a schematic diagram of an image transmitting module according to the present invention;
FIG. 3 is a schematic diagram of a spectroscopic module according to the present invention;
FIG. 4 is a schematic structural view of a three-dimensional optical inspection device according to the present invention;
fig. 5 is a schematic structural diagram of another optical splitting module according to the present invention.
Fig. 6 is a schematic structural diagram of a projection module according to the present invention.
Fig. 7 is a schematic structural diagram of the collimation module of the present invention.
Detailed Description
Referring to fig. 1, the three-dimensional optical detection device of the present embodiment includes an image emitting module 10, a beam splitting module 20, a reflecting module 30, a projection module 40 and an image collecting module 50.
The following describes each module of the three-dimensional optical detection device:
1. image emission module 10:
Referring to fig. 2, the image emission module 10 is configured to emit a light beam 70 with a predetermined pattern, and the light beam 70 with the predetermined pattern is directed to the spectroscopic module 20.
The image emitting module 10 of the present embodiment includes an illumination unit 11, a TIR prism 12, and a projection chip 13.
The illumination unit 11 is configured to emit a light beam, and the emitted light beam plays a role of illumination. The illumination unit 11 of the present embodiment includes an LED light source 111, a collimator lens group 112, a fly-eye lens 113, and a relay lens group 114 that are sequentially arranged along an optical path, and a light beam emitted from the LED light source 111 is emitted after sequentially passing through the collimator lens group 112, the fly-eye lens 113, and the relay lens group 114, and the emitted light beam is a light beam emitted from the illumination unit 11.
The collimating lens group 112 is used for collimating the light beam, and reducing the divergence angle of the light beam of the LED light source 111, so as to avoid that the light entering the fly-eye lens 113 cannot be focused by the fly-eye lens 113 due to the overlarge divergence angle of the light beam of the LED light source 111, and further cause the stray light to cause the decrease of illumination uniformity. The collimating lens group 112 includes at least one lens, and the collimating lens group 112 of this embodiment includes three spherical lenses, each of which is sequentially disposed along the optical path, so that the collimating effect is good.
The fly-eye lens 113 is used for dodging and spot shaping, namely, correcting the shape of a spot projected by a light beam, and the spot projected by a three-dimensional detection device on the market currently presents a trapezoid, so that the detection precision is not high. The aspect ratio of each small fly eye in the fly-eye lens 113 determines the final spot aspect ratio, and in this embodiment, by setting the fly-eye lens 113 and adjusting the aspect ratio of the small fly-eye, the spot of the light beam passing through the fly-eye lens 113 is rectangular, so that the spot of the light beam emitted by the lighting unit 11 is rectangular, and the rectangular spot is convenient for the image acquisition module 50 to detect, thereby improving the system detection precision of the three-dimensional optical detection device.
The relay lens group 114 is used to form Ke Leshi an illumination mode to cooperate with the fly-eye lens 113 to better homogenize light, and the relay lens group 114 includes at least two lenses. The illumination unit 11 of this embodiment has a good quality and a high brightness of the light beam emitted by the LED light source 111, the collimator lens group 112, the fly-eye lens 113, and the relay lens group 114.
In addition, the three-dimensional optical detection devices on the market at present are designed according to orthographic projection or oblique projection, and the correction is incomplete, so that the light spot of the light beam projected onto the object to be detected (such as a PCB) is trapezoidal. Therefore, preferably, the light beam spot emitted by the illumination unit 11 in this embodiment is rectangular, so that the light beam spot finally projected to the object to be detected is also rectangular, and the rectangular light spot can improve the detection accuracy of the three-dimensional optical detection device. Specifically, since the illumination unit 11 of the present embodiment is provided with the fly-eye lens 113, the spot of the light beam transmitted through the fly-eye lens 113 can be made rectangular by adjusting the aspect ratio of each small fly-eye of the fly-eye lens 113.
The projection chip 13 is used to generate a preset pattern, which includes, but is not limited to, DMD (digital micromirror device ) or LCOS (Liquid Crystal On Silicon, liquid crystal on silicon or liquid crystal on chip), and the preset pattern may be set according to design requirements, and in this embodiment, the preset pattern is a stripe pattern.
The light beam emitted by the lighting unit 11 of this embodiment is directed to the TIR prism 12, and the TIR prism 12 totally reflects the light beam emitted by the lighting unit 11 to the projection chip 13, and emits the light beam 70 with the preset pattern formed after being reflected by the projection chip 13.
2. The spectroscopic module 20:
The beam splitting module 20 is configured to split the light beam 70 with the preset pattern into at least two sub-beams, each sub-beam corresponds to a reflecting module 30, the at least two sub-beams are respectively directed to the corresponding reflecting modules 30, the reflecting modules 30 and the projecting modules 40 are in one-to-one correspondence, and the reflecting modules 30 are configured to reflect the corresponding sub-beams to the corresponding projecting modules 40. The sub-beam illumination (light energy) is the same or substantially the same.
In this embodiment, the beam splitting module 20 can split the beam 70 with the predetermined pattern, for example, in fig. 3, the beam splitting module 20 may be a beam splitter 21, and the beam 70 with the predetermined pattern is split into two sub-beams 71 after being directed to the beam splitter 21, and the two sub-beams 71 have the predetermined pattern and are directed to the corresponding reflection modules 30 respectively.
Referring to fig. 4, fig. 4 includes a light beam propagation process. Preferably, the beam splitting module 20 of the present embodiment splits the beam 70 with the preset pattern into four sub-beams, which are respectively a first sub-beam 75, a second sub-beam 76, a third sub-beam 77 and a fourth sub-beam 78, which are respectively directed to the corresponding reflecting module 30 with the same or substantially the same illuminance (light energy) with the preset pattern.
The four reflection modules 30 reflect the first sub-beam 75, the second sub-beam 76, the third sub-beam 77, and the fourth sub-beam 78, respectively, to the four corresponding projection modules 40, respectively.
The four projection modules 40 transmit and project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77, and the fourth sub-beam 78, respectively, to the object under test. The projection quality can be improved and the acquisition effect of the image acquisition module 50 can be better by projecting sub-beams with preset patterns to the object to be measured through four belts.
Referring to fig. 5, fig. 5 includes a propagation process of the light beam. As one embodiment, the light splitting module 20 of the present embodiment includes a first beam splitting element 22, a second beam splitting element 23, and a third beam splitting element 24; the first beam splitting element 22 is configured to split the light beam 70 with the preset pattern into a first main beam 72 and a second main beam 73 orthogonal to each other, where the first main beam 72 is directed to the second beam splitting element 23, and the second main beam 73 is directed to the third beam splitting element 24.
The second beam splitting element 23 is configured to split the first main beam 72 into a first sub-beam 75 and a second sub-beam 76 that are orthogonal in direction; the third beam splitting element 24 is configured to split the second main beam 73 into a third sub-beam 77 and a fourth sub-beam 78 that are orthogonal in direction. With this arrangement, the light beam 70 with the predetermined pattern is divided into four sub-beams, and the light beam property is unchanged and the light energy utilization ratio is high.
Preferably, in this embodiment, the illuminance of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam are the same, and are 8000-12000 lux, and the light beams in the illuminance range can make the measured object present a better image effect, which is beneficial for the image acquisition module 50 to acquire the image of the measured object, and the illuminance of the sub-beams can be controlled by the LED light source. Specifically, the illuminance of each of the first sub-beam, the second sub-beam, the third sub-beam, and the fourth sub-beam is about 10000 Lux.
Preferably, the beam splitting module 20 of the present embodiment further includes a reflecting element 25, the reflecting element 25 is used for adjusting the propagation direction of the first main beam 72 or the second main beam 73, and the reflecting element 25 may be a reflecting prism. The reflecting element 25 may be disposed on the optical path of the first main beam 72 or the second main beam 73, and specifically, in this embodiment, the reflecting element 25 is disposed on the optical path of the second main beam 73, and the second main beam 73 is reflected by the reflecting element 25 and then directed to the third beam splitting element 24, so as to adjust the propagation directions of the third sub-beam 77 and the fourth sub-beam 78. It will be appreciated that the reflective element 25 may be disposed in the optical path of the first main beam 72 in other embodiments, depending on design requirements.
In the present embodiment, the first beam splitting element 22 and the second beam splitting element 23 are located on the same plane; the reflecting element 25 is disposed below the first beam splitting element 22 and is located on the same plane as the third beam splitting element 24, and the reflecting element 25 is used for adjusting the propagation direction of the second main beam 73, so that the beam splitting module 20 is convenient to debug and has a good beam splitting effect. Further, the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 are directed to correspond to four axial directions of a planar rectangular coordinate system, respectively, as viewed in the propagation direction of the light beam 70 with the predetermined pattern. For example, the first sub-beam 75 is directed in the east direction (e.g., positive X-axis), the second sub-beam 76 is directed in the south direction (e.g., negative Y-axis), the third sub-beam 77 is directed in the west direction (e.g., negative X-axis), and the fourth sub-beam 78 is directed in the north direction (e.g., positive Y-axis). It will be appreciated that, as shown in fig. 5, the directions of the sub-beams may be implemented by setting the beam splitting directions of the first beam splitting element 22, the second beam splitting element 23 and the third beam splitting element 24 and the reflecting directions of the reflecting elements 25, and this design is advantageous for the algorithm solution after the image acquisition module 50 acquires the image.
The first beam splitting element 22, the second beam splitting element 23 and the third beam splitting element 24 are all preferably beam splitting cubes, so that the installation and debugging are convenient, and the beam splitting effect is good. Specifically, in this embodiment, a neutral beam splitting film layer may be plated on the inclined plane of a rectangular prism with an angle of 45 °, and then a rectangular prism with the same shape may be glued to form a beam splitting cube. In other embodiments, the beam splitting cubes may also be made by plating neutral beam splitting films on mirrors.
3. Reflection module 30:
The angle of the light beam can be adjusted by the reflecting module 30, the light beam reflected by the reflecting module 30 can be incident into the projection module 40 at a proper angle, and the reflecting module 30 can be a reflecting mirror which is only arranged on the corresponding light beam path. The number of reflection modules 30 and the number of light beams correspond to each other, and since the present embodiment splits four sub-beams of the light splitting module 20, the number of reflection modules 30 is set to four accordingly. In other embodiments, if the beam splitting module 20 splits the two sub-beams 71, the number of the reflection modules 30 is two.
4. Projection module 40:
The projection modules 40 of the present embodiment are configured to transmit and project the corresponding light beams to the measured object, and the number of the projection modules 40 corresponds to the number of the reflection modules 30. In the present embodiment, the four projection modules 40 transmit and project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77, and the fourth sub-beam 78, respectively, to the object under test. Referring to fig. 6, the projection module 40 of the present embodiment includes three meniscus lenses 41, a biconvex lens 42, a biconcave lens 43 and a meniscus lens 44 sequentially arranged along the optical path, and the projection module 40 thus arranged has good projection effect and can project images with good image quality.
5. Image acquisition module 50:
The image acquisition module 50 is used for acquiring an image on the object to be measured, and may include a common photographic objective lens and a telecentric lens. The image on the object to be measured enters the common photographic objective after passing through the telecentric lens.
6. Collimation module 60:
Preferably, the three-dimensional optical detection device of the present embodiment further includes a collimation module 60, and the light beam 70 with the preset pattern emitted by the image emission module 10 passes through the collimation module 60 before being emitted to the beam splitting module 20. The collimation module 60 may further reduce the divergence angle of the light beam. Referring to fig. 7, the collimating module 60 of the present embodiment includes a meniscus spherical lens 61, a biconic lens 62, a meniscus spherical lens 63 and a plano-convex lens 64, which are sequentially disposed along the optical path, and the collimating module 60 has good collimating effect and can effectively reduce the divergence angle of the light beam.
It should be understood that, according to design requirements, the image emitting module 10 of the present embodiment can emit the light beam 70 with the preset pattern in multiple directions, and can adjust the angle of the corresponding light beam entering the projection module 40 by adjusting the reflection angle of each reflection module 30.
The specific propagation process of the light beam (the light beam 70 with the preset pattern propagates vertically downwards) of the three-dimensional optical detection device provided by the present application is described below with reference to fig. 4 to 5:
The light beam 70 with the preset pattern emitted from the image emitting module 10 propagates along the vertical direction, and is transmitted through the collimating module 60 and enters the spectroscopic module 20. In the spectroscopic module 20, the light beam 70 with the preset pattern is split by the first beam splitting element 22 into a first main light beam 72 propagating in the horizontal direction and a second main light beam 73 propagating in the vertical direction;
the first main beam 72 propagating in the horizontal direction is split by the second beam splitting element 23 into a first sub-beam 75 and a second sub-beam 76 propagating in the horizontal direction and orthogonal in direction;
The second main beam 73 traveling in the vertical direction is reflected by the reflecting element 25 as the second main beam 73 traveling in the horizontal direction, and the second main beam 73 traveling in the horizontal direction is split into a third sub-beam 77 and a fourth sub-beam 78 traveling in the horizontal direction and orthogonal to each other by the third beam splitting element 24.
The first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 are respectively directed to the four corresponding reflection modules 30 and reflected to the four corresponding projection modules 40, the four corresponding projection modules 40 respectively project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 onto the object to be measured, so that the object to be measured presents a specific image, and finally the image acquisition module 50 acquires the image of the object to be measured.
The three-dimensional optical detection device of the invention is skillfully provided with the light splitting module 20, only the light beam 70 with the preset pattern is sent out through one image emission module 10, the light beam 70 with the preset pattern is split into a plurality of sub-light beams by utilizing the light splitting module 20, and finally the plurality of sub-light beams with the preset pattern are projected onto an object to be detected, so that the number of the image emission modules 10 is reduced, the equipment cost is greatly reduced, and the plurality of sub-light beams with the preset pattern are equivalent to all sent out from one image emission module 10, thereby having good imaging effect and convenient use.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention.
Claims (8)
1. A three-dimensional optical inspection device, comprising:
the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module;
The image emission module is used for emitting a light beam with a preset pattern, and the light beam with the preset pattern is emitted to the light splitting module; the image emission module comprises an illumination unit, a TIR prism and a projection chip, wherein the illumination unit is used for emitting light beams, and the projection chip is used for generating a preset pattern; the light beam emitted by the lighting unit is emitted to the TIR prism, the TIR prism totally reflects the light beam emitted by the lighting unit to the projection chip, and the light beam with the preset pattern formed after being reflected by the projection chip is emitted;
The beam splitting module is used for splitting the light beam with the preset pattern into at least two sub-beams, each sub-beam corresponds to one reflecting module, and the at least two sub-beams respectively irradiate to the corresponding reflecting module; the beam splitting module divides the light beam with the preset pattern into four sub-beams, wherein the four sub-beams are respectively a first sub-beam, a second sub-beam, a third sub-beam and a fourth sub-beam; the beam splitting module comprises a first beam splitting element, a second beam splitting element and a third beam splitting element;
The first beam splitting element is used for splitting the light beam with the preset pattern into a first main light beam and a second main light beam which are orthogonal in direction, wherein the first main light beam is emitted to the second beam splitting element, and the second main light beam is emitted to the third beam splitting element;
The second beam splitting element is used for splitting the first main beam into the first sub-beam and the second sub-beam which are orthogonal in direction;
the third beam splitting element is used for splitting the second main beam into the third sub-beam and the fourth sub-beam which are orthogonal in direction;
The directions of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam respectively correspond to four axial directions of a plane rectangular coordinate system;
The reflection modules are in one-to-one correspondence with the projection modules, and the reflection modules are used for reflecting the corresponding sub-beams to the corresponding projection modules; the four reflection modules respectively reflect the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to four corresponding projection modules;
The projection module is used for transmitting and projecting the corresponding sub-beams to an object to be measured; the four projection modules respectively transmit and project the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to the object to be measured;
the image acquisition module is used for acquiring the image of the object to be detected.
2. The three-dimensional optical inspection device of claim 1, wherein:
The first beam splitting element, the second beam splitting element and the third beam splitting element are all beam splitting cubes.
3. The three-dimensional optical inspection device of claim 1, wherein:
The beam splitting module further comprises a reflecting element, and the reflecting element is used for adjusting the propagation direction of the first main beam or the second main beam.
4. A three-dimensional optical inspection device according to claim 3, characterized in that:
The first beam splitting element and the second beam splitting element are positioned on the same plane; the reflecting element is arranged below the first beam splitting element and is positioned on the same plane with the third beam splitting element, and the reflecting element is used for adjusting the propagation direction of the second main beam.
5. The three-dimensional optical inspection device of claim 1, wherein: the illumination unit comprises an LED light source, a collimating lens group, a fly eye lens and a relay lens group which are sequentially arranged along a light path, wherein light beams emitted by the LED light source sequentially pass through the collimating lens group, the fly eye lens and the relay lens group and then are emitted.
6. The three-dimensional optical inspection device of claim 5, wherein: the light spot of the light beam emitted by the illumination unit is rectangular.
7. The three-dimensional optical inspection device of claim 6, wherein: the device also comprises a collimation module, wherein the light beam with the preset pattern emitted by the image emission module passes through the collimation module and then is emitted to the light splitting module.
8. The three-dimensional optical inspection device of claim 1, wherein: the illumination of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam is the same, and the illumination is 8000-12000 Lux.
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| JP2009169385A (en) * | 2007-12-19 | 2009-07-30 | Victor Co Of Japan Ltd | Projection display device |
| TWI647430B (en) * | 2017-10-12 | 2019-01-11 | 致茂電子股份有限公司 | Optical measuring device |
| CN109211142B (en) * | 2018-09-19 | 2020-10-20 | 苏州佳世达光电有限公司 | Three-dimensional scanning system |
| CN209764029U (en) * | 2019-04-11 | 2019-12-10 | 东莞市神州视觉科技有限公司 | Detection device for detecting three-dimensional shape of object |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103913940A (en) * | 2012-12-28 | 2014-07-09 | 台达电子工业股份有限公司 | Stereoscopic projection device and display method using same |
| CN107167996A (en) * | 2017-06-05 | 2017-09-15 | 深圳奥比中光科技有限公司 | The laser projection module and depth camera adaptively adjusted |
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