CN114714156A - Processing method of silicon wafer, control system, silicon wafer, solar cell and assembly of solar cell - Google Patents
Processing method of silicon wafer, control system, silicon wafer, solar cell and assembly of solar cell Download PDFInfo
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Abstract
Description
技术领域technical field
本发明一般涉及太阳能光伏发电技术领域,具体涉及一种硅片的加工方法、控制系统、硅片、太阳能电池及其组件。The present invention generally relates to the technical field of solar photovoltaic power generation, and in particular relates to a processing method of a silicon wafer, a control system, a silicon wafer, a solar cell and components thereof.
背景技术Background technique
随着化石能源存量的日渐降低,以及其消耗所导致的环境污染的加剧;清洁可再生能源的利用,越来越受到重视。With the decreasing stock of fossil energy and the aggravation of environmental pollution caused by its consumption, the utilization of clean and renewable energy has been paid more and more attention.
太阳能是一种取之不尽、用之不竭的清洁可再生能源,可以通过太阳能电池将太阳能转化为电能予以利用。Solar energy is an inexhaustible clean and renewable energy that can be used by converting solar energy into electrical energy through solar cells.
硅片是制作晶硅太阳能电池的重要部件,现有硅片的加工流程,通过线切割或圆片锯等方式,对硅晶圆棒进行切割,形成端面为正方形的长方体硅锭,然后分别对长方体硅锭的四个侧面及四条侧棱进行磨削,得到正方形硅片,如果需要长宽不同的矩形硅片,一般需要调整硅晶圆棒切割加工的尺寸,该方法对切割加工的工艺要求很高,调整加工尺寸设备所需的时间较长,且硅料损耗较大。Silicon wafers are an important component in the production of crystalline silicon solar cells. In the existing processing flow of silicon wafers, silicon wafer rods are cut by wire cutting or circular saw to form rectangular silicon ingots with square end faces. The four sides and four side edges of the cuboid silicon ingot are ground to obtain a square silicon wafer. If rectangular silicon wafers with different lengths and widths are required, it is generally necessary to adjust the size of the silicon wafer bar cutting process. This method requires the cutting process. It is very high, it takes a long time to adjust the processing size equipment, and the loss of silicon material is large.
发明内容SUMMARY OF THE INVENTION
鉴于现有技术中的上述缺陷或不足,期望提供一种硅片的加工方法、控制系统、硅片、太阳能电池及其组件,用以来降低硅片的加工难度、缩短了加工时间,以及硅料损耗。In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a silicon wafer processing method, a control system, a silicon wafer, a solar cell and components thereof, so as to reduce the processing difficulty of the silicon wafer, shorten the processing time, and the silicon material loss.
第一方面,本发明提供一种硅片的加工方法,包括以下步骤:In a first aspect, the present invention provides a method for processing a silicon wafer, comprising the following steps:
对硅晶圆棒进行加工,形成两端面为正方形、四个侧面为长方形的第一长方体硅锭;The silicon wafer rod is processed to form a first cuboid silicon ingot with square end faces and rectangular four sides;
对其中一组相对的两个所述侧面进行整体磨削,使所述端面磨削为长方形,以形成第二长方体硅锭;Carrying out integral grinding on one set of the two opposite side faces, so that the end faces are ground into a rectangle, so as to form a second cuboid silicon ingot;
沿垂直于所述侧面的方向对所述第二长方体硅锭进行切割,获得所述硅片。The second cuboid silicon ingot is cut in a direction perpendicular to the side surface to obtain the silicon wafer.
作为可实现方式,所述长方形的长宽比为1:(0.9-1)。As an implementable manner, the aspect ratio of the rectangle is 1:(0.9-1).
作为可实现方式,该硅片的加工方法还包括:As an achievable manner, the processing method of the silicon wafer further includes:
对另外一组相对的两所述侧面进行磨削,且,两组所述侧面的磨削量不同。Grinding is performed on two opposite sides of the other group, and the grinding amounts of the two sides are different.
作为可实现方式,两组所述侧面的磨削量相差1mm-10mm。As an achievable manner, the grinding amount of the two sets of side surfaces differs by 1mm-10mm.
作为可实现方式,同一组中,相对的两所述侧面的磨削量相同。As an achievable manner, in the same group, the grinding amounts of the two opposite side surfaces are the same.
作为可实现方式,对所述第一长方体硅锭或所述第二长方体硅锭的四条侧棱进行磨削,所述侧棱为平行于所述硅晶圆棒的轴芯线的棱。As an achievable manner, the four side edges of the first cuboid silicon ingot or the second cuboid silicon ingot are ground, and the side edges are edges parallel to the axis line of the silicon wafer rod.
第二方面,本发明提供一种实现上述加工方法的控制系统,包括:In a second aspect, the present invention provides a control system for realizing the above processing method, comprising:
第一相对侧面距离设定单元,用于设定两个相对的第一加工目标侧面之间的第一目标距离;a first opposite side distance setting unit, used for setting a first target distance between two opposite first processing target sides;
第二相对侧面距离设定单元,用于设定两个相对的第二加工目标侧面之间的第二目标距离;The second opposite side distance setting unit is used to set a second target distance between two opposite second processing target sides;
控制单元,用于根据所述第一目标距离或所述第二目标距离,控制磨削机构对所述第一长方体硅锭的其中一组相对的两个所述侧面进行磨削,使所述端面磨削为长方形,以形成所述第二长方体硅锭。The control unit is configured to control the grinding mechanism to grind two opposite sides of one group of the first cuboid silicon ingot according to the first target distance or the second target distance, so that the The end face is ground into a rectangle to form the second cuboid silicon ingot.
第三方面,本发明提供一种硅片,由上述加工方法制备而成,且所述硅片的长宽比为1:(0.9-1)。In a third aspect, the present invention provides a silicon wafer prepared by the above processing method, and the aspect ratio of the silicon wafer is 1:(0.9-1).
第四方面,本发明提供一种太阳能电池,包括上述的硅片。In a fourth aspect, the present invention provides a solar cell comprising the above-mentioned silicon wafer.
第五方面,本发明提供一种太阳能电池组件,包括多个上述的太阳能电池,多个所述太阳能电池阵列排布固定于矩形外框内。In a fifth aspect, the present invention provides a solar cell assembly, comprising a plurality of the above-mentioned solar cells, and a plurality of the solar cell arrays are arranged and fixed in a rectangular outer frame.
上述技术方案,其只需通过磨削工艺的控制,如只对第一长方体硅锭的一组相对的两个所述侧面进行磨削,或者调整两组对面的磨削量来以此形成矩形硅棒,并切割形成矩形的硅片,采用上述方法制备的硅片,降低了加工难度,缩短了硅片的加工时间、降低了硅料损耗。The above technical solution only needs to be controlled by the grinding process, such as grinding only one set of two opposite sides of the first cuboid silicon ingot, or adjusting the grinding amount of the two sets of opposite sides to form a rectangle. The silicon rod is cut to form a rectangular silicon wafer, and the silicon wafer prepared by the above method reduces the processing difficulty, shortens the processing time of the silicon wafer, and reduces the loss of silicon material.
附图说明Description of drawings
通过阅读参照以下附图所作的对非限制性实施例所作的详细描述,本申请的其它特征、目的和优点将会变得更明显:Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:
图1为本发明实施例提供的硅片的加工方法的流程图;1 is a flowchart of a method for processing a silicon wafer provided by an embodiment of the present invention;
图2为本发明实施例提供的第一长方体硅锭的立体图;2 is a perspective view of a first cuboid silicon ingot according to an embodiment of the present invention;
图3为图2的主视图;Fig. 3 is the front view of Fig. 2;
图4为发明实施例提供的对第一长方体硅锭的侧棱磨削后的立体图;4 is a perspective view of a side edge of a first cuboid silicon ingot after grinding according to an embodiment of the invention;
图5为图4的主视图;Fig. 5 is the front view of Fig. 4;
图6为本发明另一实施例提供的太阳能电池组件的主视图。FIG. 6 is a front view of a solar cell assembly provided by another embodiment of the present invention.
具体实施方式Detailed ways
下面结合附图和实施例对本申请作进一步的详细说明。可以理解的是,此处所描述的具体实施例仅仅用于解释相关发明,而非对该发明的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与发明相关的部分。The present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the related invention, but not to limit the invention. In addition, it should be noted that, for the convenience of description, only the parts related to the invention are shown in the drawings.
需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
如图1-图3所示,本发明实施例提供的硅片的加工方法,包括以下步骤:As shown in FIG. 1 to FIG. 3 , the method for processing a silicon wafer provided by an embodiment of the present invention includes the following steps:
S1:对硅晶圆棒进行加工,形成两端面为正方形、四个侧面为长方形的第一长方体硅锭5;S1: Process the silicon wafer rod to form a first
例如,但不限于,通过拉晶工艺,将熔融状态的单晶硅进行引晶、缩颈、放肩和转肩等操作,形成硅晶圆棒。在加工前,可以将拉晶形成的硅晶圆棒,沿垂直于其轴芯线的方向,分割为多根较短的硅晶圆棒,以便后续进行加工作业,当然,也可以不分割为多根较短的硅晶圆棒,只切除掉其两端的头尾部分即可;在其他的实现方式中,也可以在侧面加工后,再切除掉其两端的部分。For example, but not limited to, through a crystal pulling process, the single crystal silicon in the molten state is subjected to operations such as seeding, necking, shouldering, and shouldering to form a silicon wafer rod. Before processing, the silicon wafer rod formed by crystal pulling can be divided into a plurality of shorter silicon wafer rods along the direction perpendicular to its core line for subsequent processing operations. Of course, it can also not be divided into For a plurality of short silicon wafer rods, only the head and tail parts at both ends can be cut off; in other implementations, the two ends can also be cut off after side processing.
可以通过线切割加工设备,首先沿平行于硅晶圆棒轴芯线的方向对硅晶圆棒进行切削,然后再切除掉其两端的头尾部分,以形成端面为正方形、四个侧面为长方形的第一长方体硅锭5。其中,四个侧面依次为一号侧面、二号侧面、三号侧面、四号侧面,一号侧面和三号侧面为一组相对的两侧面A1、A2,二号侧面和四号侧面为另一组相对的两侧面B1、B2。The silicon wafer rod can be cut in the direction parallel to the core line of the silicon wafer rod by wire cutting processing equipment, and then the head and tail parts at both ends are cut off to form a square end face and a rectangle on the four sides. The first
S2:对其中一组相对的两侧面A1、A2(或者B1、B2)进行整体磨削,这里所指的整体磨削是,对对应的侧面整个面进行磨削,也即,被磨削的侧面的形状及面积不变,而未被磨削的侧面的宽度及面积均变小,使所述端面磨削为长方形,以形成第二长方体硅锭;S2: Perform overall grinding on one set of opposite sides A1, A2 (or B1, B2). The overall grinding here refers to grinding the entire surface of the corresponding side, that is, the ground The shape and area of the side surface remain unchanged, while the width and area of the unground side surface are reduced, so that the end surface is ground into a rectangle to form a second cuboid silicon ingot;
通过磨削设备对第一长方体硅锭5的侧面进行磨削,可以是仅磨削其中一组相对的两侧面A1、A2(或者B1、B2)。The side surfaces of the first rectangular
对任意一组相对的两侧面A1、A2(或者B1、B2)进行磨削时,可以同时对该两侧面A1、A2(或者B1、B2)进行磨削,也可以先磨削一个侧面A1(或者B1)后再磨削另一个侧面A2(或者B2)。When grinding any set of opposite sides A1, A2 (or B1, B2), the two sides A1, A2 (or B1, B2) can be ground at the same time, or one side A1 (or one side A1) Or B1) and then grind the other side A2 (or B2).
该示例中,以同时对一组相对的两侧面A1、A2(或者B1、B2)进行磨削为例,以提高工作效率。在加工过程中,将加工获得的第一长方体硅锭5放置在磨削设备的工作台上,磨削设备具有两套磨具,分别位于第一长方体硅锭5的两侧,并且调整第一长方体硅锭5在工作台上的位置,使第一长方体硅锭5长度方向的中心轴线位于两套磨具的对称面中,磨具例如可以为轴线竖直设置的砂轮,磨具和工作台可以发生相对的平动,如工作台可以在水平方向上往复运动,而磨具在水平方向上位置可以不动,在某些情况下,磨具可以在竖直方向上上下运动,以使磨削位置覆盖整个侧面,当然,在其他的情况下,也可以是工作台除了可以水平往复运动外,还可以进行上下运动。通过预先设定的两侧面之间的目标距离,控制工作台往复运动,以及两个转动的砂轮相向平动,以同时对第一长方体硅锭5一组相对的两侧面A1、A2(或者B1、B2)进行磨削。In this example, it is taken as an example to grind a group of opposite two side surfaces A1, A2 (or B1, B2) at the same time, so as to improve the work efficiency. During the processing, the first
当然,在其他示例中,还可以在磨削设备的控制系统内,预先设定两个相对的第一加工目标侧面之间的第一目标距离,以及两个相对的第二加工目标侧面之间的第二目标距离。首先以第一目标距离或第二目标距离对第一长方体硅锭5的其中一组侧面进行磨削加工,然后,将第一长方体硅锭5沿其长度方向的中心轴线转动90°,然后以另一目标距离对另一组侧面进行磨削加工,以形成第二长方体硅锭。Of course, in other examples, the first target distance between the two opposite first machining target side surfaces and the distance between the two opposite second machining target side surfaces can also be preset in the control system of the grinding device. the second target distance. First, grind one set of side surfaces of the first
S3:沿垂直于所述侧面A1、A2、B1、B2的方向对所述第二长方体硅锭进行切割,获得所述硅片。S3: Cut the second rectangular parallelepiped silicon ingot along a direction perpendicular to the side surfaces A1, A2, B1, and B2 to obtain the silicon wafer.
例如单不限于,利用多线切割切片机,沿垂直于第二长方体硅锭侧面的方向,对第二长方体硅锭进行切割,获得预定厚度的硅片。For example, but not limited to, use a multi-wire cutting slicer to cut the second cuboid silicon ingot in a direction perpendicular to the side surface of the second cuboid silicon ingot to obtain a silicon wafer with a predetermined thickness.
上述方案,其只需通过磨削工艺的控制,如只对第一长方体硅锭的一组相对的两个所述侧面进行磨削,或者调整两组对面的磨削量来以此形成矩形硅棒,并切割形成矩形的硅片,采用上述方法制备的硅片,降低了加工难度、缩短了硅片的加工时间、降低了硅料损耗。The above solution only needs to be controlled by the grinding process, such as grinding only one set of two opposite sides of the first cuboid silicon ingot, or adjusting the grinding amount of the two sets of opposite sides to form a rectangular silicon ingot. The silicon wafer is cut to form a rectangular silicon wafer, and the silicon wafer prepared by the above method reduces the processing difficulty, shortens the processing time of the silicon wafer, and reduces the loss of silicon material.
作为可实现方式,所述长方形的长宽比为1:(0.9-1),即硅片的长宽比为1:(0.9-1);如,1:0.91;1:0.92;1:0.95;1:0.98等。其中,(0.9-1)为0.9至1的开区间。As an achievable manner, the aspect ratio of the rectangle is 1:(0.9-1), that is, the aspect ratio of the silicon wafer is 1:(0.9-1); for example, 1:0.91; 1:0.92; 1:0.95 ; 1:0.98 etc. Among them, (0.9-1) is an open interval from 0.9 to 1.
作为可实现方式,硅片的加工方法还包括:As an achievable manner, the processing method of the silicon wafer further includes:
对另外一组相对的两所述侧面进行磨削,且,两组所述侧面的磨削量不同。即,对所述第一长方体硅锭5的两组相对侧面A1、A2、B1、B2均进行磨削,且,所述两组相对侧面A1、A2、B1、B2的磨削量不同。例如,但不限于,先对其中一组相对的两所述侧面A1、A2进行磨削,然后将第一长方体硅锭5沿硅晶圆棒的轴心线旋转90°,再对另外一组相对的两所述侧面B1、B2进行磨削,对其中一组相对侧面A1、A2的磨削量为1mm,对另外一组相对侧面B1、B2的磨削量为3mm等,这里仅为了说明两组相对侧面的磨削量不同,并非是对其各自磨削量的唯一性限定。Grinding is performed on two opposite sides of the other group, and the grinding amounts of the two sides are different. That is, the two sets of opposing side surfaces A1 , A2 , B1 , and B2 of the first rectangular
对第一长方体硅锭5的其中一组相对的两侧面A1、A2(或者B1、B2)进行磨削后,将第一长方体硅锭5转动90°,再磨削另外一组相对的两侧面B1、B2(或者A1、A2)。After grinding one set of opposite sides A1, A2 (or B1, B2) of the first
作为可实现方式,为保证加工效率以及降低加工过程中的硅料损耗,两组相对所述侧面A1、A2、B1、B2的磨削量相差1mm-10mm。As an achievable manner, in order to ensure the processing efficiency and reduce the loss of silicon material during the processing, the grinding amount of the two groups relative to the side surfaces A1, A2, B1, and B2 differs by 1mm-10mm.
作为可实现方式,通过控制磨削设备的两套磨具同步运动,以使同一组中,相对的两侧面A1、A2(或者B1、B2)的磨削量相同。As an achievable manner, the two sets of grinding tools of the grinding equipment are controlled to move synchronously, so that in the same group, the grinding amounts of the two opposite sides A1, A2 (or B1, B2) are the same.
作为可实现方式,另参见图4、图5所示,为了防止出现应力集中,避免后续形成的硅片隐裂、破片等问题发生,对所述第一长方体硅锭5或所述第二长方体硅锭的四条侧棱1进行磨削,以达到倒角2的目的,来克服对应的硅锭边缘过于锐利而存在应力集中的问题。所述侧棱1为平行于所述硅晶圆棒轴芯线的棱。As an achievable manner, referring to FIG. 4 and FIG. 5 , in order to prevent stress concentration and avoid subsequent problems such as cracking and fragmentation of silicon wafers, the first
对侧棱1进行磨削可以在进行各侧面A1、A2、B1、B2磨削前,也可以在各侧面A1、A2、B1、B2磨削后,还可以穿插于两组相对侧面A1、A2、B1、B2磨削之间进行。The side edge 1 can be ground before each side A1, A2, B1, B2 is ground, or after each side A1, A2, B1, B2 is ground, and it can also be interspersed in two sets of opposite sides A1, A2 , B1, B2 grinding between.
作为可实现方式,所述磨削包括顺次进行的第一磨削工艺和第二磨削工艺,所述第二磨削工艺的加工粗糙度小于第一磨削工艺的加工粗糙度。通过两个磨削工艺,首先进行粗磨,然后在进行精磨,一般精磨至镜面效果。As an achievable manner, the grinding includes a first grinding process and a second grinding process performed in sequence, and the machining roughness of the second grinding process is smaller than that of the first grinding process. Through two grinding processes, first rough grinding, and then fine grinding, generally fine grinding to a mirror effect.
第二方面,本发明提供一种实现上述加工方法的控制系统,包括:In a second aspect, the present invention provides a control system for realizing the above processing method, comprising:
第一相对侧面距离设定单元,用于设定两个相对的第一加工目标侧面之间的第一目标距离;a first opposite side distance setting unit, used for setting a first target distance between two opposite first processing target sides;
第二相对侧面距离设定单元,用于设定两个相对的第二加工目标侧面之间的第二目标距离;The second opposite side distance setting unit is used to set a second target distance between two opposite second processing target sides;
其中,第一目标距离、第二目标距离分别表征在进行硅片切割前的硅锭,其磨削加工后对应的相对侧面之间的距离。例如,若只对第一长方体硅锭5的一组相对侧面进行磨削,而另一组侧面不磨削,则经过磨削的那一组相对侧面之间的距离可以采用第一目标距离,也可以采用第二目标距离;若对第一长方体硅锭5的两组相对侧面均进行磨削,则经过磨削的其中一组相对侧面之间的距离可以采用第一目标距离,另一组对侧面之间的距离可以采用第二目标距离。Wherein, the first target distance and the second target distance respectively represent the distances between the corresponding opposite sides of the silicon ingot before the silicon wafer is cut after grinding. For example, if only one set of opposite sides of the first
控制单元,用于根据所述第一目标距离或所述第二目标距离,控制磨削机构对所述第一长方体硅锭的其中一组相对的两个所述侧面进行磨削,使所述端面磨削为长方形,以形成所述第二长方体硅锭。The control unit is configured to control the grinding mechanism to grind two opposite sides of one group of the first cuboid silicon ingot according to the first target distance or the second target distance, so that the The end face is ground into a rectangle to form the second cuboid silicon ingot.
由于该控制系统具有第一相对侧面距离设定单元和第二相对侧面距离设定单元,可以分别单独设定第一目标距离、第二目标距离,可以采用第一目标距离和第二目标距离二者之一对第一长方体硅锭5的一组相对侧面进行磨削,而另一组侧面不磨削;或者,采用第一目标距离对第一长方体硅锭5的其中一组相对侧面进行磨削,采用第二目标距离对第一长方体硅锭5的另一组相对侧面进行磨削;以获得第二长方体硅锭,并对第二长方体硅锭进行切割,获得所需的硅片。Since the control system has a first opposite side distance setting unit and a second opposite side distance setting unit, the first target distance and the second target distance can be separately set respectively, and the first target distance and the second target distance can be set as two One of the set of opposite sides of the first
第三方面,本发明提供一种硅片,由上述加工方法制备而成,且所述硅片的长宽比为1:(0.9-1)。In a third aspect, the present invention provides a silicon wafer prepared by the above processing method, and the aspect ratio of the silicon wafer is 1:(0.9-1).
该硅片大体呈长方形,或者呈长方形四角进行倒角/倒圆后的形貌(可以称其为倒角长方形或倒圆长方形)。The silicon wafer is generally rectangular, or a shape after chamfering/rounding the four corners of the rectangle (it may be called a chamfered rectangle or a rounded rectangle).
该硅片可以为单晶硅硅片、多晶硅硅片。The silicon wafer may be a monocrystalline silicon wafer or a polycrystalline silicon wafer.
第四方面,本发明提供一种太阳能电池,包括上述的硅片。In a fourth aspect, the present invention provides a solar cell comprising the above-mentioned silicon wafer.
第五方面,如图6所示,本发明提供一种太阳能电池组件,包括多个如上述的太阳能电池4,多个所述太阳能电池4阵列排布固定于矩形外框3内。In a fifth aspect, as shown in FIG. 6 , the present invention provides a solar cell module, comprising a plurality of the above-mentioned solar cells 4 , and the plurality of the solar cells 4 are arranged and fixed in the rectangular
该示例中,阵列排布了5行10列太阳能电池4。In this example, the array is arranged with 5 rows and 10 columns of solar cells 4 .
上述方案,由矩形的硅片制作形成的太阳能电池4制备太阳能电池组件,可以充分的利用太阳能电池组件的矩形外框内部空间,降低、甚至是消除现有技术中采用正方形硅片制作太阳能电池组件时,太阳能电池4与太阳能电池组件的矩形外框之间的留白区域,因此,提高了太阳能电池组件中太阳能电池4总面积的占比,以提高组件的光电转换率。In the above scheme, the solar cell 4 made of rectangular silicon wafers can make full use of the inner space of the rectangular outer frame of the solar cell module to reduce or even eliminate the use of square silicon wafers to make solar cell modules in the prior art. When the solar cell 4 and the rectangular outer frame of the solar cell module are left blank, the proportion of the total area of the solar cell 4 in the solar cell module is increased, so as to improve the photoelectric conversion rate of the module.
需要理解的是,上文如有涉及术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。It should be understood that the terms "center", "portrait", "horizontal", "top", "bottom", "front", "rear", "left", "right", "vertical" "," "horizontal", "top", "bottom", "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description , rather than indicating or implying that the indicated device or element must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first" or "second" may expressly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "plurality" means two or more.
以上描述仅为本申请的较佳实施例以及对所运用技术原理的说明。本领域技术人员应当理解,本申请中所涉及的发明范围,并不限于上述技术特征的特定组合而成的技术方案,同时也应涵盖在不脱离发明构思的情况下,由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。The above description is only a preferred embodiment of the present application and an illustration of the applied technical principles. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to the technical solution formed by the specific combination of the above-mentioned technical features, and should also cover, without departing from the inventive concept, the above-mentioned technical features or their Other technical solutions formed by any combination of equivalent features. For example, a technical solution is formed by replacing the above-mentioned features with the technical features disclosed in this application (but not limited to) with similar functions.
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