CN114779568B - Enhancement type wide-view-field high-resolution soft X-ray imager - Google Patents
Enhancement type wide-view-field high-resolution soft X-ray imagerInfo
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- CN114779568B CN114779568B CN202110074613.XA CN202110074613A CN114779568B CN 114779568 B CN114779568 B CN 114779568B CN 202110074613 A CN202110074613 A CN 202110074613A CN 114779568 B CN114779568 B CN 114779568B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B42/00—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
- G03B42/02—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays
- G03B42/021—Apparatus for direct X-ray cinematography
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Abstract
本发明属于空间环境探测设备技术领域，具体地说，涉及一种增强型宽视场高分辨率软X射线成像仪，其包括：龙虾眼光学镜头(1)、第一方锥形外壳(2)、广角透镜组件(3)、第二方形外壳(4)和背照式CMOS图像传感器(5)；第一方锥形外壳(2)的两端分别设有第一入射口和第一出射口；第二方形外壳(4)的两端分别设有第二入射口和第二出射口；第一方锥形外壳(2)与第二方形外壳(4)对接，且第一方锥形外壳(2)的第一出射口与第二方形外壳(4)的第二入射口相互重叠；第一方锥形外壳(2)的第一入射口固定设置龙虾眼光学镜头(1)，第二方形外壳(4)内固定设置广角透镜组件(3)，第二方形外壳(4)的第二出射口固定设置CMOS图像传感器(5)。
The present invention belongs to the technical field of space environment detection equipment, and in particular, relates to an enhanced wide-field-of-view high-resolution soft X-ray imager, comprising: a lobster-eye optical lens (1), a first square-conical housing (2), a wide-angle lens assembly (3), a second square housing (4) and a back-illuminated CMOS image sensor (5); the first square-conical housing (2) is provided with a first entrance port and a first exit port at two ends respectively; the second square housing (4) is provided with a second entrance port and a second exit port at two ends respectively; the first square-conical housing (2) is butt-jointed with the second square housing (4), and the first exit port of the first square-conical housing (2) overlaps with the second entrance port of the second square housing (4); the lobster-eye optical lens (1) is fixedly arranged at the first entrance port of the first square-conical housing (2), the wide-angle lens assembly (3) is fixedly arranged in the second square housing (4), and the CMOS image sensor (5) is fixedly arranged at the second exit port of the second square housing (4).
Description
Technical Field
The invention belongs to the technical field of space environment detection equipment, and particularly relates to an enhanced wide-view-field high-resolution soft X-ray imager.
Background
The soft X-ray imaging instrument with wide field of view and high resolution is an important device applied to the research of deep physical mechanism of interaction between solar wind and an earth magnetic layer, and can realize soft X-ray panoramic images radiated by the earth magnetic layer and monitor the space weather. When the Solar wind blows to the earth, a large amount of high-valence heavy ions, such as O 7+, are wrapped, and collide with neutral atoms (such as H atoms) in the magnetic layer exotic layer to generate electronic transition, and soft X-rays are radiated outwards, which is called Solar WIND CHARGE eXchange (SWCX). The greater the soft X-ray light intensity radiated as the interaction of solar wind with the magnetic layer intensifies. Therefore, the macroscopic structure and the evolution rule of the earth magnetic layer can be obtained by dynamically describing the soft X-ray intensity graph radiated in the interaction process of solar wind and the earth magnetic layer, and the method has important significance for researching scientific problems such as internal driving force of space weather and the like.
The earth's magnetic layer spans several tens of earth radii, and to achieve panoramic imaging of the magnetic layer, soft X-ray imagers must have performance characteristics of wide field of view, high spatial resolution, and high sensitivity. At present, the wide-field soft X-ray imaging is mainly realized based on a lobster eye optical system, but the ideal lobster eye optical system requires an imaging focal plane with an area of 1/4 of the area of a lens and a spherical structure, the curvature radius is half of the curvature radius of the lens, and a conventional soft X-ray sensor is of a small size (2.2 cm multiplied by 2.2 cm) and is of a planar structure, so that theoretical requirements cannot be met. At present, in order to meet the theoretical requirement, the area of an imaging focal plane is increased by splicing a plurality of small-size soft X-ray sensors, so that the cost is greatly increased, and the problems of discontinuous field of view, steep decline of off-axis resolution and electromagnetic compatibility of the system caused by splicing can also exist.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides an enhanced wide-field high-resolution soft X-ray imager, which comprises a lobster eye optical lens, a first square conical shell, a wide-angle lens assembly, a second square shell and a back-illuminated CMOS image sensor;
the two ends of the second square shell are respectively provided with a second entrance port and a second exit port;
the first square conical shell is in butt joint with the second square shell, and the first outlet of the first square conical shell is overlapped with the second outlet of the second square shell;
the first entrance of the first square conical shell is fixedly provided with a lobster eye optical lens, the second square shell is internally fixedly provided with a wide-angle lens component, and the second exit of the second square shell is fixedly provided with a CMOS image sensor.
As one of the improvements of the above technical solutions, the wide-angle lens assembly includes a tapered capillary array wide-angle lens and a fixed mounting barrel;
The fixed mounting cylinder is arranged in the second square shell, and the conical capillary array type wide-angle lens is fixedly sleeved in the fixed mounting cylinder;
The conical capillary array type wide-angle lens is of a conical structure, two ends of the conical capillary array type wide-angle lens are respectively provided with a large inlet end and a small outlet end, the large inlet end of the conical capillary array type wide-angle lens is arranged to be a spherical surface, the small outlet end of the conical capillary array type wide-angle lens is arranged to be a plane, the large inlet end of the conical capillary array type wide-angle lens is located at a second entrance opening of the second square shell, and the small outlet end of the conical capillary array type wide-angle lens is located at a second exit opening of the second square shell.
As one of the improvements of the technical scheme, the conical capillary array type wide-angle lens comprises a plurality of conical capillary wide-angle lenses, the conical capillary wide-angle lenses form a conical structure, two ends of each conical capillary wide-angle lens are respectively a large inlet end and a small inlet end, the large inlet end is arranged to be a spherical surface and is positioned at a second entrance of the second square shell, and the small outlet end is arranged to be a plane and is positioned at a second exit of the second square shell.
As one of the improvement of the technical scheme, the distance between the conical capillary array type wide-angle lens and the back-illuminated CMOS image sensor is 0-1 mm, the distance between the conical capillary array type wide-angle lens and the lobster eye optical lens is 375mm, and the curvature of the conical capillary array type wide-angle lens is one half of that of the lobster eye optical lens.
As one of the improvement of the technical scheme, the first entrance port is a square cone port, the first exit port is a square port, and the second entrance port and the second exit port are square ports.
As one of the improvements of the technical scheme, the lobster eye optical lens comprises a spherical metal support frame, a plurality of lobster eye optical lenses and a spherical metal pressing plate;
The spherical metal support frame is fixedly arranged at a first incidence port of the first square conical shell to form a spherical large-area light collecting surface, the curvature radius of the spherical metal support frame is consistent with the concave curvature radius of the lobster eye lens, the curvature radius of the spherical metal pressing plate is consistent with the convex curvature radius of the lobster eye lens, a plurality of lobster eye optical lenses are arranged on the spherical metal support frame in an M-N array mode and are fixed on the spherical metal support frame in a stress-free high-precision assembly mode through a fixing device, and the spherical metal pressing plate is fixed on the plurality of lobster eye optical lenses, wherein M and N are positive integers larger than 0.
As one of the improvements of the technical scheme, the lobster eye optical lens is of a square structure, the spherical curvature radius of the lobster eye optical lens is 750mm plus or minus 1mm including but not limited to R, the depth of a micro-channel of the lobster eye optical lens is 1.25mm plus or minus 0.1mm including but not limited to R, the width of an opening of the micro-channel of the lobster eye optical lens is 40 mu m plus or minus 1 mu m including but not limited to R, the wall thickness of the micro-channel of the lobster eye optical lens is 8 mu m plus or minus 1 mu m including but not limited to R, the inner wall coating material of the micro-channel of the lobster eye optical lens is a metal iridium film including 20nm plus or minus 2nm including but not limited to R, and the surface roughness of the micro-channel is <1nm.
As one of the improvements of the above technical scheme, the lobster eye optical lens is internally provided with a micro-channel, and the ratio of the depth to the width of the micro-channel is 31.25:1.
As one of the improvement of the technical scheme, the surface of the lobster eye optical lens is plated with a 100nm +/-10 nm aluminum film filter.
As one of the improvements of the above technical solutions, the pixels of the back-illuminated CMOS image sensor include, but are not limited to, 2048×2048, the pixel size includes, but is not limited to, 11 μm×11 μm, and the imaging area includes, but is not limited to, 2.2cm×2.2cm.
Compared with the prior art, the invention has the beneficial effects that:
The imaging instrument can cover 0.2 keV-5 keV energy wave bands, can work in a cube satellite platform or a ground calibration system, can realize high resolution better than 6 degrees in spatial angle resolution in a full observation view field of 9 degrees multiplied by 9 degrees, basically has no spatial resolution loss on an off-axis view field except the advantage of keeping wide view field imaging, greatly reduces the imaging requirement on a large-area spherical focal plane by introducing a conical capillary array type wide-angle lens, greatly reduces the cost, and simultaneously realizes high-performance soft X-ray imaging with wide view field, high spatial resolution and high sensitivity.
Drawings
FIG. 1 is a schematic diagram of the structure of an enhanced wide field high resolution soft X-ray imager of the present invention;
FIG. 2 is a schematic view of the optical path of soft X-rays of an enhanced wide field high resolution soft X-ray imager of the present invention;
FIG. 3 is a schematic view of the lobster eye optical lens of the enhanced wide field high resolution soft X-ray imager of FIG. 1;
Fig. 4 is a schematic view of the wide angle lens assembly of the enhanced wide field high resolution soft X-ray imager of fig. 1.
Reference numerals:
1. lobster eye optical lens 2 and first pyramid-shaped shell
3. Wide angle lens assembly 4, second square housing
5. CMOS image sensor 6, spherical metal support frame
7. Lobster eye optical lens 8 and metal pressing plate
9. Conical capillary array type wide-angle lens 10 and fixed mounting cylinder
11. Mounting position
Detailed Description
The invention will now be further described with reference to the accompanying drawings.
As shown in figure 1, the invention provides an enhanced wide-field high-resolution soft X-ray imager, which comprises the working process that soft X-ray photons are incident through a front-end lobster eye optical lens, visible light, ultraviolet and other stray light are absorbed by an aluminum film filter, the soft X-ray is focused on a theoretical focal plane through repeated reflection in a micro-channel hole in the lobster eye optical lens to form focused light, the focused light is incident from the head of a conical capillary array type wide-angle lens, passes through the lens through 1 or more times of grazing incidence total reflection inside a capillary, and is converged on a conventional CMOS image sensor
The invention provides an enhanced wide-field high-resolution soft X-ray imager, which improves a lobster eye light path by introducing an improved wide-angle lens (namely a conical capillary array type wide-angle lens), realizes transfer and compression of a large-area spherical focusing focal plane area so as to match an actual detector, can be based on a conventional single-chip soft X-ray sensor, simultaneously realizes performance requirements of wide field, high spatial resolution and high sensitivity, and effectively solves the problem that the large-area spherical imaging focal plane of the soft X-ray imager is difficult to match. The imaging instrument is an enhanced wide-field high-spatial resolution soft X-ray imaging instrument based on a single-chip conventional small-size sensor, can work in a wide field of 0.2 keV-5 keV and 9 degrees multiplied by 9 degrees, has spatial resolution better than 6 degrees in the whole field of view, and has an effective area reaching 10.5cm <2> @0.5keV. The main structure comprises 3X 3 lobster eye optical elements, a high-precision supporting frame, a set of high-transmission-efficiency wide-angle lenses based on an optimally designed capillary array, a high-performance back-illuminated CMOS image sensor and other positioning and supporting structures.
The device comprises a lobster eye optical lens 1, a first conical shell 2, a wide-angle lens component 3, a second square shell 4 and a back-illuminated CMOS image sensor 5;
the two ends of the first conical shell 2 are respectively provided with a first entrance opening and a first exit opening, and the two ends of the second conical shell 4 are respectively provided with a second entrance opening and a second exit opening;
the first square conical shell 2 is in butt joint with the second square shell 4, and a first outlet of the first square conical shell 2 and a second inlet of the second square shell 4 are overlapped with each other;
The first entrance of the first square conical shell 2 is fixedly provided with a lobster eye optical lens 1, the second square shell 4 is internally fixedly provided with a wide-angle lens component 3, and the second exit of the second square shell 4 is fixedly provided with a back-illuminated CMOS image sensor 5. In this embodiment, the CMOS image sensor is a high-performance backside illuminated CMOS image sensor.
The first conical shell 2 is abutted with the lobster eye optical lens 1, and the first conical shell 2 is a conical square shell. The first entrance port is a square cone port, the first exit port is a square port, and the second entrance port and the second exit port are square ports.
The lobster eye optical lens 1 comprises a spherical metal support frame 6, a plurality of lobster eye optical lenses 7 and a spherical metal pressing plate 8, as shown in fig. 3;
The spherical metal support frame 6 is fixedly arranged at a first entrance of the first square conical shell 2 to form a spherical large-area light collecting surface, the curvature radius of the spherical metal support frame 6 is consistent with the concave curvature radius of the lobster eye lens 7, the curvature radius of the spherical metal pressing plate 8 is consistent with the convex curvature radius of the lobster eye lens 7, the requirement of a large observation field of view is met, the spherical metal support frame 6 is provided with a plurality of lobster eye optical lenses 7, the plurality of lobster eye optical lenses 7 are arranged in an M-N array mode, the spherical metal support frame 6 is fixed in a stress-free high-precision assembly mode through a fixing device, and the spherical metal pressing plate 8 is fixed on the plurality of lobster eye optical lenses 7. The frame of the spherical metal support frame 6 is reserved with a plurality of glue dispensing positions and positioning holes, so that the mounting position of the support frame can be finely adjusted. Wherein M and N are positive integers greater than 0.
Wherein the optional earthworm shrimp eye optical lens 7 has a square structure of 42.5mm multiplied by 42.5mm (+ -0.1 mm), the spherical curvature radius of the lobster eye optical lens 7 is R750mm (+ -1 mm, the microchannel depth of the lobster eye optical lens 7 is 1.25 mm+/-0.1 mm, the square hole size (opening width) of the microchannel of the lobster eye optical lens 7 is 40 mu m+/-1 mu m, the wall thickness of the microchannel of the lobster eye optical lens 7 is 8 mu m+/-1 mu m, the surface roughness of the metallic iridium film which is made of a film coating material on the inner wall of the microchannel of the lobster eye optical lens 7 is less than 1nm, the film coating layer thickness of the metallic iridium film is 20 nm+/-2 nm, and the spatial resolution of the lobster eye optical lens 7 is better than 5 DEG@1keV, namely the resolution of the lobster eye optical lens itself.
In this embodiment, optionally, the lobster eye optical lens 1 includes 9 lobster eye optical lenses 7, and is integrally assembled in a3×3 array form, ensuring that a large observation field of view of 9×9 ° is achieved.
The lobster eye optical lens 7 is internally provided with a micro-channel, and the ratio of the depth to the width of the micro-channel is 31.25:1 so as to ensure that the spatial resolution superior to 6 degrees can be realized.
The surface of the lobster eye optical lens 7 is plated with 100nm + -10 nm aluminum film filter so as to eliminate stray light interference such as visible light, ultraviolet light and the like in an observation view field of 9 degrees multiplied by 9 degrees. Wherein the organic film thickness of the aluminum film is 50nm + -10 nm.
The lobster eye optical lenses 1 are arranged in a3×3 form, the distance between adjacent lobster eye optical lenses is 1mm, wherein the frame curvature of the spherical metal frame is 750mm plus or minus 1mm and is consistent with the curvature radius of the concave surface of the lobster eye optical lenses, the distance from the vertex of the incidence surface of the lobster eye optical lenses to the vertex of the incidence surface of the conical capillary array type wide-angle lens 9 at the middle position is 375mm and is half of the curvature radius of the lobster eye lenses, the curvature radius of the incidence surface of the conical capillary array type wide-angle lens 9 is 375mm and is half of the curvature radius of the lobster eye lenses, and the distance (tube length) between the incidence surface and the emergence surface is 235mm plus or minus 1mm. Therefore, when the radius of curvature of the lobster eye lens is changed, the radius of curvature of the incident surface of the tapered capillary array type wide-angle lens 9 is also changed, and the distance from the vertex of the incident surface of the lobster eye lens at the intermediate position to the vertex of the incident surface of the tapered capillary array type wide-angle lens 9 is also changed accordingly.
As shown in fig. 2, in the right-hand coordinate system in which the incident direction of soft X-rays to the lobster-eye optical lens is the positive Z-axis direction, the Z-axis direction is vertical, and the X-axis positive X-axis direction is vertical to the paper surface, the whole imager is located on the half axis of the negative Z-axis direction, and the origin of coordinates is the center of curvature of the lobster-eye optical lens and the center of curvature of the spherical entrance face of the capillary array type wide-angle lens in the second square housing.
The method comprises the steps of arranging lobster eye optical lenses at the central position of a 3X 3 array type lobster eye optical lens, arranging and assembling conical capillary array type wide-angle lenses 9 at a position which is 375mm away from the central position of the lobster eye optical lenses, arranging and assembling conical capillary array type wide-angle lenses 9 in an array type manner, arranging conical capillary array single tubes in a conical-like shape, wherein the length of each conical capillary tube is 235 mm+/-1 mm, the area ratio of an incident surface to an emergent surface is about 7:1, arranging a plurality of layers of fixing clamping grooves in the fixing sleeve for calibrating a capillary array, arranging upper, middle and lower layers of square mounting positions on the outer side of the fixing sleeve for being connected with a second square shell 4, and arranging a CMOS array type image sensor at a position which is 0mm away from the wide-angle opening of the conical capillary array type wide-angle lenses 9, wherein the area ratio of the incident surface to the emergent surface is about 7:1. The central axes of the lobster eye optical lens, the conical capillary array type wide-angle lens 9 and the CMOS image sensor are all coincident with the Z axis, and are structurally symmetrical about the X axis and the Y axis.
As shown in fig. 4, the wide-angle lens assembly 3 includes a tapered capillary array wide-angle lens 9 and a fixed mount barrel 10;
The fixed mounting cylinder 10 is arranged in the second square shell 4, the conical capillary array type wide-angle lens 9 is fixedly sleeved in the fixed mounting cylinder 10,
The conical capillary array type wide-angle lens 9 is in a conical structure, and two ends of the conical capillary array type wide-angle lens 9 are respectively provided with a large inlet end and a small outlet end, the large inlet end of the conical capillary array type wide-angle lens 9 is provided with a spherical surface, and the small outlet end of the conical capillary array type wide-angle lens 9 is provided with a plane;
The tapered capillary array type wide-angle lens 9 comprises a plurality of tapered capillary wide-angle lenses, the tapered capillary wide-angle lenses form a conical structure, two ends of each tapered capillary wide-angle lens are respectively a large inlet end and a small inlet end, the large inlet end is arranged as a spherical surface and is positioned at the second entrance of the second square shell 4, and the small outlet end is arranged as a plane and is positioned at the second exit of the second square shell 4.
The large inlet end of the conical capillary array type wide-angle lens 9 is a spherical surface, the curvature radius of the spherical surface is 375mm, the size of the spherical surface (namely the effective incident surface caliber) is 7.46mm multiplied by 7.46mm, the small outlet end of the conical capillary array type wide-angle lens 9 is a plane, the size of the plane (namely the effective emergent surface caliber) is 2.8mm multiplied by 2.8mm, the planeness of the emergent surface is less than or equal to 100 mu m/cm, the surface shape deviation is less than or equal to 100 mu m, the transverse length of the conical structure is 235mm plus or minus 1mm, the diameter of the incident end of the capillary is 10 mu m-80 mu m, and the efficiency uniformity is better than 80%. Wherein, the curvature radius of the inlet sphere is half of that of the lobster eye optical lens, and the outlet plane is matched with the plane of the CMOS image sensor. The distance between the spherical vertex on the large entrance end of the conical capillary array type wide-angle lens 9 and the lobster eye optical lens arranged on the spherical metal support frame is 375mm (half of the curvature radius of the lobster eye lens), the observation field is covered, and the soft X-ray photons are transmitted with high efficiency.
The back-illuminated CMOS image sensor has a size of 2.2cm×2.2cm, a pixel count of 2048×2048, and a pixel size of 11 μm×11 μm.
The distance between the conical capillary array type wide-angle lens 9 and the lobster-eye optical lens 7 is 375mm, the distance between the conical capillary array type wide-angle lens 9 and the CMOS image sensor 5 is 0-1 mm, the curvature radius of the conical capillary array type wide-angle lens 9 is one half of that of the lobster-eye optical lens 7, the imaging quality reduction caused by defocusing can be reduced, and the center of the lobster-eye optical lens 7, the central axis of the conical capillary array type wide-angle lens 9 and the central axis of the back-illuminated CMOS image sensor 5 are in the same straight line.
The theoretically required large-area spherical focal plane is transferred and compressed to the imaging focal plane of the single-chip conventional back-illuminated CMOS image sensor 5 by the added wide-angle lens assembly 3. The invention discloses an imaging instrument, which is characterized in that a 3X 3 array-type arranged lobster eye optical lens 7 is fixedly arranged on a spherical metal frame 6 at a first entrance, an observation field of 9 degrees X9 degrees can be guaranteed to be realized, allowance is reserved at the edge of the field of view, partial vignetting compensation can be realized, a conical capillary array-type wide-angle lens 9 is additionally arranged in the imaging instrument, the main objective of the conical capillary array-type wide-angle lens 9 is to realize high-efficiency transmission of soft X-ray photons focused and collected by the lobster eye optical lens 7, the large entrance end of the conical capillary array-type wide-angle lens 9 is spherical and matched with a theoretically required spherical large-area focal plane, the small exit end of the conical capillary array-type wide-angle lens 9 is planar and matched with the size and the shape of an actual conventional CMOS image sensor, the conical capillary array-type wide-angle lens 9 can cover the whole observation field, and is connected with the CMOS image sensor, and the light sensing surface of the CMOS image sensor is close to the outlet of the conical capillary array-type wide-angle lens 9 in order to avoid image quality reduction caused by defocusing, so that the wide field of the CMOS image sensor is realized.
The imaging instrument transfers and compresses a spherical large-area focal plane which is theoretically required by introducing a conical capillary array type wide-angle lens into a lobster eye light path, specifically, each lobster eye optical lens collects soft X-ray photons, so that soft X-ray photon collection of a large field of view is realized, high-efficiency soft X-ray transmission and spherical large-area focal plane transfer and area compression are realized by the aid of the conical capillary array type wide-angle lens at the middle part, and a CMOS image sensor is used as an imaging focal plane at the rear end so as to realize photoelectric information conversion and data processing of soft X-rays.
The imaging instrument can be widely applied to the scientific research fields of manned moon base, planetary resource exploration, pulsar navigation, magnetic layer forecast satellites and the like, and particularly relates to the research of the dynamic evolution process of solar wind and earth magnetic layer interaction in the space of the sun and the earth. In addition, the method can be applied to the social fields of modern life medicine science, advanced material research, next generation advanced photoetching equipment and the like.
The invention provides an improvement method of a lobster eye light path, which can simultaneously realize the characteristics of wide view field, high spatial resolution and high sensitivity, and specifically comprises the following steps:
(1) Wide field of view
The soft X-ray imaging instrument collects soft X-rays through the lobster eye optical lenses, the soft X-rays are focused through multiple total reflections of micro channels arranged in the lobster eye optical lenses, the incidence surface of the lobster eye optical lenses is spherical, the observation field of view of the imaging instrument is related to the number of the lobster eye optical lenses, and for example, the imaging instrument is applied to soft X-ray panoramic imaging in a pole tip area, and the observation field of view needs to be larger than 9 degrees multiplied by 9 degrees. Since the observation field of view corresponding to the single lobster eye optical lens (42.5 mm×42.5mm, curvature radius 750 mm) is 3.25×3.25 °,9 lobster eye optical lenses are required to be mounted in a 3×3 array, as in mounting position 10 of fig. 2, in order to achieve an index of an observation field of view of more than 9×9 °.
(2) High spatial resolution and high sensitivity
The spatial resolution of the enhanced wide-field high-resolution soft X-ray imager is mainly determined by the ratio of the depth to the width of the micro-channel arranged in the lobster eye optical lens 7, different spatial resolutions can be realized by different aspect ratios of the micro-channel in theory, and the larger the aspect ratio is in theory, the higher the spatial resolution is, and the limit spatial resolution is equal to the opening size of the micro-channel. While the use of a tapered capillary array type wide angle lens 9 is required to achieve the same spatial resolution for all directions within the field of view.
The depth-to-width ratio of the micro-channel is set to be 31.25:1, half of the micro-channel describes the size of an imaging focal spot in terms of full WIDTH AT HALF maximum (FWHM), the table is the focal spot width corresponding to the half height of the peak, and through simulation, the full width at half maximum of the imaging focal spot is theoretically 0.04mm, the corresponding spatial resolution is 22', the spatial resolution corresponding to the full width of the focal spot is 3.67', and the high spatial resolution superior to 6 degrees can still be satisfied.
If the image plane is spliced by a plurality of plane sensors, the maximum spatial resolution can be realized only in the direction of the central optical axis, and the resolution can be reduced in other view field directions, so that the image is blurred. The invention introduces the conical capillary array wide-angle lens 9 in the imaging light path, and guides the large-area spherical theoretical focal plane to a single-chip conventional CMOS image sensor, and the spatial resolution is basically unchanged in the image plane of the CMOS image sensor, so that the high spatial resolution performance in the whole field of view can be realized.
The enhanced wide-view-field high-resolution soft X-ray imager is simple and convenient to operate when in use, the light source is positioned within the range of 9 degrees and 9 degrees of the view field of the lobster eye optical lens, and after the incident soft X-rays enter the soft X-ray imager, the collected soft X-rays are focused through the conical capillary array type wide-angle lens 9, and an imaging diagram of the soft X-rays can be obtained on a CMOS image sensor at the outlet of the conical capillary array type wide-angle lens 9.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present invention and are not limiting. Although the present invention has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the present invention, which is intended to be covered by the appended claims.
Claims (9)
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| US7376314B2 (en) * | 2006-03-22 | 2008-05-20 | Spectral Imaging Laboratory | Fiber coupled artificial compound eye |
| CN101738729B (en) * | 2009-12-11 | 2011-08-17 | 长春理工大学 | Lightwave-based lobster eye lens |
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