CN114906531A - Clamping method for photomask plate - Google Patents
Clamping method for photomask plate Download PDFInfo
- Publication number
- CN114906531A CN114906531A CN202210568338.1A CN202210568338A CN114906531A CN 114906531 A CN114906531 A CN 114906531A CN 202210568338 A CN202210568338 A CN 202210568338A CN 114906531 A CN114906531 A CN 114906531A
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- Prior art keywords
- clamping
- plate
- photomask
- photomask plate
- clamping block
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000003780 insertion Methods 0.000 claims description 21
- 230000037431 insertion Effects 0.000 claims description 21
- 239000011521 glass Substances 0.000 abstract description 13
- 230000000712 assembly Effects 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- -1 etc. Polymers 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G7/00—Devices for assisting manual moving or tilting heavy loads
- B65G7/12—Load carriers, e.g. hooks, slings, harness, gloves, modified for load carrying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a clamping method of a photomask plate, which is used for clamping the photomask plate and comprises the following steps: s10: clamping a clamping block of a light shield plate clamping device to one side edge of the light shield plate; s20: fixing the clamping block to the photomask plate by using a locking piece of a photomask plate clamping device; s30: and moving the photomask plate through the photomask plate clamping device. The clamping blocks are firstly utilized to clamp the photomask plate, and then the locking parts are utilized to act on the clamping blocks, so that the clamping blocks clamp and move the photomask plate, the photomask plate can be prevented from accidentally sliding off, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Description
Technical Field
The invention relates to the field of electronic equipment manufacturing, in particular to a light shield clamping method.
Background
Flat Panel Displays (FPDs) and Touch Screens (TPs) are important electronic components. In the manufacture of flat panel displays and touch screens, there is typically an exposure station. The exposure station is provided with a photomask plate. Reticle plates are often subject to replacement, turnaround, or movement. The operator can directly grasp both ends of the reticle glass with both hands and then operate the reticle. During the operation, the operator is very likely to hurt hands. Meanwhile, the hands of the operator are easy to leave fingerprints at the two ends of the photomask plate, and the fingerprints can cause pollution of the glass plate of the photomask plate. In addition, the light shield plate is directly taken away by both hands of an operator, so that the light shield plate is easy to slide, and the light shield plate has the risk of being broken and scrapped.
Disclosure of Invention
The invention aims to overcome the defect that an operator directly grasps a photomask plate by two hands in the prior art and the photomask plate is easy to slip, and provides a clamping method for the photomask plate.
The invention solves the technical problems through the following technical scheme:
a clamping method of a photomask is used for clamping the photomask, and comprises the following steps:
s10: clamping a clamping block of a light shield plate clamping device to one side edge of the light shield plate;
s20: fixing the clamping block to the photomask plate by using a locking piece of a photomask plate clamping device;
s30: and moving the photomask plate through the photomask plate clamping device.
In the scheme, by adopting the method, the clamping block is firstly utilized to clamp the photomask plate, and then the locking piece is utilized to act on the clamping block, so that the clamping block clamps and moves the photomask plate, the accidental falling of the photomask plate can be avoided, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Preferably, the clamping block includes two clamping pieces disposed at an interval, a receiving groove is formed between the two clamping pieces, the side edge of the mask plate is inserted into the receiving groove, and step S10 is preceded by: and adjusting the locking piece to enable the width of the accommodating groove of the clamping block to be larger than the thickness of the photomask plate.
In the scheme, by adopting the method, the width of the accommodating groove is larger than the thickness of the photomask plate, so that the clamping block can be conveniently and better installed on the photomask plate.
Preferably, the light cover clamping device further includes an anti-slip member, the anti-slip member is disposed between the clamping piece and the clamping block, the anti-slip member is attached to an inner side surface of the clamping piece, and the step S10 further includes: the side edges of the light shield plate are aligned with the edges of the anti-slip pieces.
Preferably, step S10 further includes: the photomask plate clamping device comprises a plurality of clamping blocks, and the clamping blocks are sequentially clamped to one side edge of the photomask plate at intervals.
In the scheme, by adopting the method, the light shield plate can be clamped by the clamping blocks at intervals, so that the stability and the reliability of clamping the light shield plate can be further improved, and the light shield plate is prevented from falling off accidentally.
Preferably, step S20 further includes: the device is got to light cover version clamp include a plurality ofly with the corresponding setting of clamp splice the retaining member, it is a plurality of the retaining member will be corresponding the clamp splice is fixed to light cover version.
In the scheme, by adopting the method, the clamping blocks can be fixed by the plurality of locking pieces, so that the stability and the reliability of clamping the photomask plate can be further improved, and the photomask plate is prevented from falling off accidentally.
Preferably, the light shield plate clipping and taking device further includes a holding member, the holding member is disposed through the clipping block, and the step S30 further includes: moving the clamp blocks by the gripping members.
In the scheme, by adopting the method, the clamping block is moved through the holding piece, so that the operation is convenient.
Preferably, step S10 further includes: the holding piece penetrates through the insertion hole of the clamping block.
In the scheme, by adopting the method, the integrity of the clamping blocks is convenient to improve, each clamping block can clamp the photomask version more uniformly, the clamping position of each clamping block is prevented from being uneven, and the local stress of the photomask version is prevented from being overlarge.
Preferably, step S30 further includes: the holding piece penetrates through the insertion hole of the clamping block.
In the scheme, the position of a single clamping block can be more flexibly set by adopting the method.
Preferably, after the holding piece penetrates into the insertion hole of the clamping block, the holding piece and the clamping block are fixed by a fixing piece.
In the scheme, the holding piece can be prevented from loosening by adopting the method.
Preferably, the mask plate includes a short side and a long side, and in step S10, the clamping block of the mask plate clamping device is clamped to the long side of the mask plate.
In this scheme, through adopting above method, light shield version presss from both sides gets device and clamps to the long side of light shield version, can reduce the light shield version and press from both sides the device and produce the arm of force for getting to reduce corresponding moment, avoid light shield version destruction.
On the basis of the common knowledge in the field, the above preferred conditions can be combined randomly to obtain the preferred embodiments of the invention.
The positive progress effects of the invention are as follows:
the light shield plate is clamped by the clamping blocks, and then the clamping blocks are acted by the locking pieces, so that the light shield plate is clamped and moved by the clamping blocks, the light shield plate can be prevented from accidentally sliding off, and the light shield plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Drawings
FIG. 1 is a flowchart illustrating a method for clamping a reticle mask according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of the method for clamping the photomask plate in fig. 1, wherein the photomask plate is clamped by the photomask plate clamping device.
Fig. 3 is a schematic side view of a part of the reticle clamping device of fig. 2.
Fig. 4 is a schematic side view of a clamping block assembly in the reticle clamping apparatus of fig. 2.
Description of reference numerals:
Clamping block 20
Clamping piece 21
Jack 24
Fixing hole 25
Retaining member 30
Photomask plate 90
Detailed Description
The present invention will be more clearly and completely described below by way of examples in conjunction with the accompanying drawings, but the present invention is not limited thereto.
As shown in fig. 1 to 4, the present embodiment is a method for clamping a reticle plate 90, and the method for clamping the reticle plate includes:
s10: clamping the clamping block 20 of the photomask plate clamping device 100 to one side edge of the photomask plate 90;
s20: fixing the clamp block 20 to the reticle plate 90 using the locker 30 of the reticle plate clamp apparatus 100;
s30: the mask plate 90 is moved by the mask plate gripper 100.
The clamping blocks 20 are used for clamping the photomask plate 90, and then the locking pieces 30 are used for acting on the clamping blocks 20, so that the photomask plate 90 is clamped and moved by the clamping blocks 20, the photomask plate 90 can be prevented from accidentally falling, and the photomask plate 90 is prevented from being broken and scrapped. The operating personnel can avoid both hands direct contact light shield version 90 through light shield version clamping device 100 operation light shield version 90, and then avoids light shield version 90 to leave the finger print, avoids causing light shield version 90 glass to pollute, also can avoid light shield version 90 glass to hinder to operating personnel's hand.
As an embodiment, the structure of the holding device for mask plate 90 can be as shown in fig. 2-4, and in other embodiments, the holding device for mask plate 90 can also be a common fixture such as a clamp.
As shown in fig. 2, the clamping block 20 includes two clamping pieces 21 disposed at an interval, a receiving slot 22 is formed between the two clamping pieces 21, a side of the mask plate 90 is inserted into the receiving slot 22, and the step S10 further includes: the locking member 30 is adjusted to make the width of the accommodating groove of the clamping block 20 larger than the thickness of the mask plate 90. The width of the receiving groove is larger than the thickness of the mask plate 90, which facilitates the better mounting of the clamping block 20 to the mask plate 90.
In fig. 3, the light cover clamping device 100 further includes an anti-slip member 11, the anti-slip member 11 is disposed between the clamping piece 21 and the clamping block 20, the anti-slip member 11 is attached to an inner side surface of the clamping piece 21, and the step S10 further includes: the sides of reticle plate 90 are aligned with the edges of skid-resistant members 11.
In fig. 3, step S10 further includes: the reticle plate clamping device 100 includes a plurality of clamping blocks 20, and the clamping blocks 20 are sequentially clamped to one side of the reticle plate 90 at intervals. The clamping blocks 20 can clamp the photomask plate 90 at intervals, so that the stability and the reliability of clamping the photomask plate 90 can be further improved, and the photomask plate 90 is prevented from falling off accidentally.
Step S20 further includes: reticle plate clamping apparatus 100 includes a plurality of retaining members 30 disposed in correspondence with clamping blocks 20, the plurality of retaining members 30 securing the corresponding clamping blocks 20 to reticle plate 90. The retaining members 30 can fix the clamping blocks 20, so that the stability and reliability of clamping the photomask plate 90 can be further improved, and the photomask plate 90 is prevented from falling off accidentally.
The light cover clamping device 100 further includes a holding member 12, the holding member 12 is disposed through the clamping block 20, and the step S30 further includes: the clamping block 20 is moved by the grip 12. The clamping block 20 is moved by the holding part 12, and the operation is convenient.
Step S10 further includes: the grip 12 penetrates the insertion hole 24 of the clamp block 20. The integrity of the clamping blocks 20 is improved, so that each clamping block 20 can clamp the photomask plate 90 more uniformly, the clamping positions of the clamping blocks 20 are prevented from being uneven, and the photomask plate 90 is prevented from being partially stressed too much.
Step S30 further includes: the grip 12 penetrates the insertion hole 24 of the clamp block 20. The position of the individual clamping blocks 20 can be set more flexibly.
After the holding member 12 is inserted into the insertion hole 24 of the clamping block 20, the holding member 12 is fixed to the clamping block 20 by a fixing member, so that the holding member 12 is prevented from being loosened.
In one embodiment, the mask plate 90 includes a short side and a long side, and in step S10, the clamping blocks 20 of the mask plate clamping device 100 are clamped to the long side of the mask plate 90. The clamping device 100 for the photomask plate is clamped to the long side of the photomask plate 90, so that the force arm of the photomask plate 90 relative to the clamping device can be reduced, corresponding torque is reduced, and the damage to the photomask plate 90 is avoided.
The mask clamping device 100 according to the present embodiment will be described in detail below.
The reticle stage clamping device 100 includes: the clamping block 20 and the locking member 30, wherein the clamping block 20 is used for clamping the side edge of the photomask plate 90; retaining member 30 acts on clamp blocks 20 to cause clamp blocks 20 to clamp reticle plate 90. The clamping blocks 20 are used for clamping the photomask plate, and the locking pieces 30 are used for acting on the clamping blocks 20, so that the clamping blocks 20 are used for clamping the photomask plate, the photomask plate is prevented from accidentally sliding down, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device 100 through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
In other embodiments, reticle 90 may also be other components, such as plates, sheets, strips, and the like, and specifically may be glass plates, steel plates, and the like.
As an embodiment, the weight of the reticle plate 90 that can be stably clamped by the reticle plate clamping device 100 may reach 13kg, the size of the reticle plate 90 may reach 700mm by 800mm, and the thickness may reach 7.8 to 8.0 mm. The mask plate 90 may also have dimensions of 455mm 550mm and a thickness in the range of 4.8mm to 5 mm. The mask plate 90 is heavy and large in size, and the common clamping method is difficult to apply.
As shown in fig. 2, the clamping block 20 includes two clamping pieces 21 disposed at an interval, a receiving groove 22 is formed between the two clamping pieces 21, a side of the mask plate 90 is inserted into the receiving groove 22, and the locking member 30 acts on the clamping pieces 21 to enable the two clamping pieces 21 to clamp the mask plate 90. The two clamping pieces 21 are used for clamping the photomask plate 90 and are fixed by the locking piece 30, the structure is simple, and the use is convenient.
The locking member 30 is disposed through the two clamping pieces 21, and the locking member 30 is used for adjusting the distance between the two clamping pieces 21 so that the clamping pieces 21 can clamp or release the mask plate 90. The locking member 30 changes the acting force applied by the clamping pieces 21 to the photomask plate 90 by adjusting the distance between the two clamping pieces 21, so that the photomask plate 90 can be clamped or loosened, and the photomask plate clamping device 100 can be operated conveniently.
The distance between the inserting position of the locking member 30 and the end of the clamping piece 21 is L, the depth of the accommodating groove 22 is H, and the ratio of L to H ranges from 1/3 to 3/5. The range of the ratio of L to H is set to 1/3-3/5, so that the distance between the clamping pieces 21 can be flexibly and rapidly adjusted by the locking pieces 30, the sufficient contact area between the clamping pieces 21 and the photomask plate 90 can be ensured, and the stability of the photomask plate 90 can be improved.
As an embodiment, the cross-section of the receiving groove 22 may be shaped as a U-shaped groove. In other embodiments, the shape of the receiving groove 22 may be other shapes.
In this embodiment, the locking member 30 may be a bolt, one clamping piece 21 is provided with a through hole, the other clamping piece 21 is provided with a threaded hole, the bolt penetrates through the two clamping pieces 21 through the through hole and the threaded hole, and the distance between the clamping pieces 21 can be adjusted by turning the bolt. The end part of the bolt can be further provided with a nut, and the nut can further avoid the accidental falling of the bolt.
In other embodiments, the locking member 30 may be a tension spring, a clamp, or the like, and the tension spring and the clamp can adjust the distance between the two clamping pieces 21 by applying force to the clamping pieces 21.
The clamping piece 21 is provided with a groove 23, and the groove 23 is inwards sunken from the outer side surface of the clamping piece 21; the clamping pieces 21 can swing relative to the grooves 23, so that the distance between the two clamping pieces 21 can be flexibly adjusted.
The ratio of the depth of the groove 23 to the thickness of the clip 21 ranges from 1/2 to 4/5; the ratio of the depth of the groove 23 to the thickness of the clamping piece 21 is set to be 1/2-4/5, so that the clamping piece 21 can be prevented from being broken at the groove 23, and the power for driving the clamping piece 21 to swing can be reduced.
The distance between the groove 23 and the bottom of the accommodating groove 22 is A, the depth of the accommodating groove 22 is H, and the ratio of A to H ranges from 1/6 to 1/4. The ratio of a to H is set in the range of 1/6-1/4 so that the distance between the jaws 21 is not too large or too small during the swinging of the jaws 21. In other words, clip 21 can be made to have an appropriate swing range.
In this embodiment, a groove 23 is formed on the outer side surface of one clip 21. In other embodiments, a plurality of grooves 23 may be further disposed on the outer side surface of one clip 21, and the depth of the plurality of grooves 23 may be different. Along the direction of inserting the mask plate 90 into the receiving groove 22, the depth of the plurality of grooves 23 may gradually increase, may also gradually decrease, or may first increase and then decrease.
In a specific embodiment, the clamping block 20 may be a rectangular block as a whole, and the clamping piece 21 may be a rectangular block. The material of the clamping block 20 may be a soft metal, such as copper and copper alloy. The clamp block 20 may also be made of hard metal, such as spring steel 65Mn, and the surface of the clamp block 20 may be heat treated, and the treated surface hardness may be HRC 35-45.
The light cover clamping device 100 further comprises an anti-slip member 11, the anti-slip member 11 is arranged between the clamping piece 21 and the clamping block 20, and the anti-slip member 11 is attached to the inner side surface of the clamping piece 21. The anti-slip piece 11 can improve the stability and reliability of the clamping block 20 for clamping the photomask plate 90, can prevent the photomask plate 90 from accidentally slipping, and can also prevent the photomask plate 90 from being cracked due to overlarge acting force applied to the photomask plate 90 by the clamping piece 21.
The length of the anti-skid piece 11 along the depth direction of the accommodating groove 22 is B, the depth of the accommodating groove 22 is H, and the ratio of B to H ranges from 1/5 to 1/4; the range of the ratio of B to H is set to be 1/5-1/4, so that the phenomenon that the anti-skidding piece 11 is too large and the excessively large anti-skidding piece 11 is easy to press the engraving pattern part in the photomask plate can be avoided; the situation that the anti-slip piece 11 is too small and the anti-slip piece 11 with the too small size is difficult to provide enough friction force, so that the photomask plate is easy to fall off accidentally can be avoided.
The length of the anti-skid member 11 along the depth direction of the accommodating groove 22 is not more than 40 mm. The length of the anti-slip piece 11 along the depth direction of the accommodating groove 22 is not more than 40mm, and the anti-slip piece 11 cannot press the engraving pattern part in the photomask plate.
As an embodiment, the anti-slip means 11 may be embodied as a rectangular plate. The material of the anti-slip member 11 may be rubber, silica gel, etc., or Polyoxymethylene (POM).
The device 100 for clamping and taking the photomask plate further comprises a holding part 12, wherein the holding part 12 penetrates through the clamping block 20, and the clamping block 20 is moved through the holding part 12. The clamping block 20 is moved by the holding part 12, and the operation is convenient.
The clamping block 20 is provided with an insertion hole 24, and the holding piece 12 penetrates through the clamping block 20 through the insertion hole 24; the holding member 12 is inserted through the insertion hole 24 of the clamping block 20 to facilitate installation of the holding member 12.
The cross section of the insertion hole 24 is triangular, quadrangular or pentagonal, and the outer side surface of the holding piece 12 is attached to the inner side surface of the insertion hole 24; the cross section of the insertion hole 24 is triangular, quadrangular or pentagonal, the outer side surface of the holding piece 12 is attached to the inner side surface of the insertion hole 24, and the holding piece 12 can be prevented from rotating relative to the clamping block 20.
The center of the insertion hole 24 is equidistant from the inner side surfaces of the two clamping pieces 21 of the clamping block 20. The distance between the center of the insertion hole 24 and the inner side surfaces of the two clamping pieces 21 of the clamping block 20 is equal, so that the mask plates 90 are symmetrically distributed relative to the center of the insertion hole 24, and the mask plates 90 can be more stable in movement.
After the holding member 12 is inserted into the insertion hole 24 of the clamping block 20, the holding member 12 can be further fixed by screws through the fixing holes 25, so as to prevent the clamping block 20 from sliding on the holding member 12.
As an embodiment, the holding member 12 may be a holding rod, and the holding rod is disposed through the insertion hole 24. The two ends of the holding rod can be provided with grains which can improve the holding friction. The material of the holding rod can be aluminum alloy or stainless steel. In other embodiments, the grip 12 may have other configurations, such as a chain, a cord, etc. connected to the clamp block 20.
The clamping assembly 13 is composed of a clamping block 20 and a locking member 30, the optical mask clamp taking device 100 comprises a plurality of clamping assemblies 13, the holding member 12 penetrates through the clamping assemblies 13, and the plurality of clamping assemblies 13 are arranged at intervals. The plurality of clamping components 13 of the optical mask plate clamping device 100 can clamp the optical mask plate 90 at intervals, so that the stability and reliability of clamping the optical mask plate 90 can be further improved, and the optical mask plate 90 is prevented from falling off accidentally. In this embodiment, one reticle plate clamping device 100 may include 4 clamping assemblies 13, and the 4 clamping assemblies 13 are spaced apart from each other on one side of the reticle plate 90.
As an embodiment, the mask plate 90 is specifically a mask plate, and the clamping blocks 20 may be first clamped on the side edges of the mask plate, and the depth of the mask plate penetrating into the accommodating groove 22 does not exceed the length B of the anti-slip member 11 along the depth direction of the accommodating groove 22. The plurality of blocks 20 are arranged at intervals. The locking member 30 may be a bolt, and the bolt is inserted through the two opposite clamping pieces 21 and tightened to reduce the distance between the two clamping pieces 21, so that the clamping pieces 21 press the mask plate through the anti-slip member 11. The holding member 12 may be a holding rod, and the movement of the mask plate is realized by holding both ends of the holding rod.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.
Claims (10)
1. A method for clamping a photomask plate is used for clamping the photomask plate, and the method for clamping the photomask plate comprises the following steps:
s10: clamping a clamping block of a light shield plate clamping device to one side edge of the light shield plate;
s20: fixing the clamping block to the photomask plate by using a locking piece of a photomask plate clamping device;
s30: and moving the photomask plate through the photomask plate clamping device.
2. The method of claim 1, wherein the clamping block comprises two clamping pieces spaced apart from each other, a receiving groove is formed between the two clamping pieces, and a side of the reticle plate is inserted into the receiving groove, and the method further comprises, before the step S10: and adjusting the locking piece to enable the width of the accommodating groove of the clamping block to be larger than the thickness of the photomask plate.
3. The method of claim 2, wherein the reticle stage clamping device further comprises an anti-slip member disposed between the clip and the clamping block, the anti-slip member being attached to an inner side surface of the clip, and the step S10 further comprises: the side edge of the photomask plate is aligned with the edge of the anti-slip piece.
4. The method of claim 1, wherein the step S10 further comprises: the photomask plate clamping device comprises a plurality of clamping blocks, and the clamping blocks are sequentially clamped to one side edge of the photomask plate at intervals.
5. The method of claim 1, wherein the step S20 further comprises: the device is got to light cover version clamp include a plurality ofly with the corresponding setting of clamp splice the retaining member, it is a plurality of the retaining member will be corresponding the clamp splice is fixed to light cover version.
6. The method for clamping and taking the photomask as set forth in claim 1, wherein the device for clamping and taking the photomask further comprises a holding member, the holding member is disposed through the clamping block, and the step S30 further comprises: moving the clamping block through the gripping member.
7. The method of claim 6, wherein the step S10 further comprises: the holding piece penetrates through the insertion hole of the clamping block.
8. The method of claim 6, wherein the step S30 further comprises: the holding piece penetrates through the insertion hole of the clamping block.
9. The method of claim 6, wherein the holder is inserted into the insertion hole of the clamp block and then fixed to the clamp block by a fixing member.
10. The method of any of claims 1-9, wherein the reticle plate includes a short side and a long side, and in step S10, the clamping blocks of the reticle plate clamping device are clamped to the long side of the reticle plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210568338.1A CN114906531A (en) | 2022-05-23 | 2022-05-23 | Clamping method for photomask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210568338.1A CN114906531A (en) | 2022-05-23 | 2022-05-23 | Clamping method for photomask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114906531A true CN114906531A (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210568338.1A Pending CN114906531A (en) | 2022-05-23 | 2022-05-23 | Clamping method for photomask plate |
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| CN (1) | CN114906531A (en) |
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| US20060197350A1 (en) * | 2005-03-07 | 2006-09-07 | Abaco Machines (Australasia) Pty Ltd | Clamping device for lifting slab, panel, or sheet material |
| JP2006282291A (en) * | 2005-03-31 | 2006-10-19 | Ig Tech Res Inc | Construction panel hanger |
| CN2866405Y (en) * | 2005-03-11 | 2007-02-07 | 阿巴科机器(大洋州)有限公司 | Holding device for lifting and transporting sheet material |
| CN102825606A (en) * | 2011-06-16 | 2012-12-19 | 鸿富锦精密工业（深圳）有限公司 | Clamping device |
| CN202988570U (en) * | 2012-12-06 | 2013-06-12 | 王英 | Positioning hanger |
| US20160311619A1 (en) * | 2012-09-11 | 2016-10-27 | Gerald Gieseke, SR. | Apparatus for grasping, lifting and moving a large panel |
| CN206528903U (en) * | 2017-01-05 | 2017-09-29 | 昆山龙腾光电有限公司 | A kind of light shield transporting device |
| CN211687065U (en) * | 2019-12-02 | 2020-10-16 | 群翊工业股份有限公司 | Clamping device |
| CN212198169U (en) * | 2020-03-17 | 2020-12-22 | 群翊工业股份有限公司 | Hanging type clamping device and its clamping parts |
| CN214217062U (en) * | 2020-12-29 | 2021-09-17 | 中国建筑第二工程局有限公司 | Manual template carrying device |
| US20210347612A1 (en) * | 2020-05-11 | 2021-11-11 | Nhon Hoa Nguyen | Clamping device for lifting and transfer objects |
| CN215797974U (en) * | 2021-08-02 | 2022-02-11 | 嘉沁农业科技有限公司 | A frock clamp that punches is exempted from for various steel tile handling |
-
2022
- 2022-05-23 CN CN202210568338.1A patent/CN114906531A/en active Pending
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| US5893595A (en) * | 1995-03-21 | 1999-04-13 | Herdgraph Pty Ltd | Lifting device for slab, panel or sheet materials |
| JP2006056610A (en) * | 2004-08-17 | 2006-03-02 | Kyokuhei Glass Kako Kk | Holder for transferring glass substrate, and storage method in box for conveying glass substrate using the same |
| US20060197350A1 (en) * | 2005-03-07 | 2006-09-07 | Abaco Machines (Australasia) Pty Ltd | Clamping device for lifting slab, panel, or sheet material |
| CN2866405Y (en) * | 2005-03-11 | 2007-02-07 | 阿巴科机器(大洋州)有限公司 | Holding device for lifting and transporting sheet material |
| JP2006282291A (en) * | 2005-03-31 | 2006-10-19 | Ig Tech Res Inc | Construction panel hanger |
| CN102825606A (en) * | 2011-06-16 | 2012-12-19 | 鸿富锦精密工业（深圳）有限公司 | Clamping device |
| US20160311619A1 (en) * | 2012-09-11 | 2016-10-27 | Gerald Gieseke, SR. | Apparatus for grasping, lifting and moving a large panel |
| CN202988570U (en) * | 2012-12-06 | 2013-06-12 | 王英 | Positioning hanger |
| CN206528903U (en) * | 2017-01-05 | 2017-09-29 | 昆山龙腾光电有限公司 | A kind of light shield transporting device |
| CN211687065U (en) * | 2019-12-02 | 2020-10-16 | 群翊工业股份有限公司 | Clamping device |
| CN212198169U (en) * | 2020-03-17 | 2020-12-22 | 群翊工业股份有限公司 | Hanging type clamping device and its clamping parts |
| US20210347612A1 (en) * | 2020-05-11 | 2021-11-11 | Nhon Hoa Nguyen | Clamping device for lifting and transfer objects |
| CN214217062U (en) * | 2020-12-29 | 2021-09-17 | 中国建筑第二工程局有限公司 | Manual template carrying device |
| CN215797974U (en) * | 2021-08-02 | 2022-02-11 | 嘉沁农业科技有限公司 | A frock clamp that punches is exempted from for various steel tile handling |
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