CN114934251A - Laser gas alloying method and laser gas alloying device for metal surface - Google Patents
Laser gas alloying method and laser gas alloying device for metal surface Download PDFInfo
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- 238000005275 alloying Methods 0.000 title claims abstract description 60
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 50
- 239000002184 metal Substances 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims abstract description 21
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 22
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 22
- 239000012298 atmosphere Substances 0.000 claims abstract description 19
- 239000007789 gas Substances 0.000 claims description 49
- 239000003574 free electron Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000012495 reaction gas Substances 0.000 claims description 4
- 230000035515 penetration Effects 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 47
- 239000010410 layer Substances 0.000 description 42
- 150000004767 nitrides Chemical class 0.000 description 22
- 229910001069 Ti alloy Inorganic materials 0.000 description 21
- 229910052757 nitrogen Inorganic materials 0.000 description 21
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 238000005728 strengthening Methods 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007712 rapid solidification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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Abstract
本发明涉及一种金属表面激光气体合金化方法及激光气体合金化装置。该方法采用二氧化碳激光器发射的激光束和短波长激光器发射的激光束同时照射在金属表面的待合金化区域,并提供合金化气体作为反应气氛围,短波长激光器发射的激光束的波长小于10640nm。将二氧化碳激光器和短波长激光器复合,对金属表面激光气体合金化,可发挥二者的优势,即二氧化碳激光器发射的激光束能够致合金化气体电离,增加熔池中合金化气体元素含量,短波长激光器发射的激光束更容易被金属高效吸收,增加熔池熔深和合金化层深度。可以同时兼顾合金化层厚度和合金化气体含量。
The invention relates to a metal surface laser gas alloying method and a laser gas alloying device. The method adopts the laser beam emitted by the carbon dioxide laser and the laser beam emitted by the short-wavelength laser to simultaneously irradiate the area to be alloyed on the metal surface, and provides alloying gas as a reactive gas atmosphere, and the wavelength of the laser beam emitted by the short-wavelength laser is less than 10640nm. Combining a carbon dioxide laser and a short-wavelength laser can give full play to the advantages of both, that is, the laser beam emitted by the carbon dioxide laser can ionize the alloying gas and increase the content of alloying gas elements in the molten pool. The laser beam emitted by the laser is more easily absorbed by the metal efficiently, increasing the penetration depth of the molten pool and the depth of the alloying layer. The thickness of the alloying layer and the content of the alloying gas can be taken into account at the same time.
Description
技术领域technical field
本发明涉及金属表面合金化技术领域,具体涉及一种金属表面激光气体合金化方法及激光气体合金化装置。The invention relates to the technical field of metal surface alloying, in particular to a metal surface laser gas alloying method and a laser gas alloying device.
背景技术Background technique
激光表面合金化是利用高能激光束加热并熔化基体表层与添加元素,使其混合后迅速凝固,从而形成以原材料为基的新的表面合金层的方法。而激光气体合金化是其中的一种,是将能与基材金属反应形成强化相的气体(如氮气、氧气、渗碳气氛等)注入金属熔池中,并与基材元素反应,形成化合物合金层。Laser surface alloying is a method in which a high-energy laser beam is used to heat and melt the surface layer of the substrate and add elements, so that it solidifies rapidly after mixing, thereby forming a new surface alloy layer based on raw materials. Laser gas alloying is one of them, in which a gas (such as nitrogen, oxygen, carburizing atmosphere, etc.) that can react with the base metal to form a strengthening phase is injected into the metal molten pool, and reacts with the base element to form a compound alloy layer.
以钛合金为例,钛合金的应用环境和服役条件对耐磨性往往也具有较高要求,钛合金基材耐磨性较差的问题导致结构服役寿命较短或干脆无法满足实际生产应用的要求,使钛合金的应用受到较大限制。当钛合金用作阀、导杆、活塞销及连杆轴等滑动部件时,易与材料粘着,产生磨损。航空发动机、燃气轮机压气机的部分中温叶片基体、汽轮机末级大型叶片等各类高性能叶片已经大量采用钛合金,但钛合金基体无法满足耐磨耐蚀的服役环境。因此如何在钛合金表面制备结合良好的深层高性能耐磨层并承受更恶劣的服役环境,是扩大钛合金应用范围的重要技术难题。Taking titanium alloys as an example, the application environment and service conditions of titanium alloys often have high requirements on wear resistance. The problem of poor wear resistance of titanium alloy substrates leads to short service life of structures or simply cannot meet actual production applications. requirements, so that the application of titanium alloys is greatly restricted. When titanium alloy is used as sliding parts such as valve, guide rod, piston pin and connecting rod shaft, it is easy to stick to the material and cause wear. Titanium alloys have been widely used in various high-performance blades such as aero-engines, some medium-temperature blade substrates of gas turbine compressors, and large-scale blades at the final stage of steam turbines, but titanium alloy substrates cannot meet the service environment of wear resistance and corrosion resistance. Therefore, how to prepare a well-bonded deep high-performance wear-resistant layer on the surface of titanium alloy and withstand harsher service environment is an important technical problem to expand the application scope of titanium alloy.
激光气体氮化是目前一种常用的对钛合金表明强化的方法,该方法实际上是利用高能激光束在高纯氮气气氛中对钛合金进行表面熔化,氮气在高能激光束辐照作用下与熔池中高温钛合金金属液发生强烈的化学/冶金交互作用,从而显著改变熔池中金属液的化学成分及组成,最终快速凝固后获得以硬质氮化钛为增强相的氮化层。Laser gas nitriding is a commonly used method for strengthening titanium alloys. This method actually uses a high-energy laser beam to melt the surface of titanium alloys in a high-purity nitrogen atmosphere, and nitrogen is irradiated with high-energy laser beams. The high-temperature titanium alloy molten metal in the molten pool undergoes a strong chemical/metallurgical interaction, which significantly changes the chemical composition and composition of the molten metal in the molten pool, and finally obtains a nitride layer with hard titanium nitride as the reinforcing phase after rapid solidification.
但是目前渗氮层厚度均是在0.5mm以内,但是为了适应更多的使用环境,有必要增加金属表面的渗氮层即合金化层的深度,现有方法均是通过提高激光的功率来增加熔深,但是该方法导致热输入增大造成基体性能恶化,而且得到的渗氮层中氮含量较低,导致渗氮层强度差,二者很难兼得,导致该技术的使用范围大大受限。However, the thickness of the nitrided layer is currently within 0.5mm. However, in order to adapt to more use environments, it is necessary to increase the depth of the nitrided layer on the metal surface, that is, the depth of the alloyed layer. The existing methods are to increase the power of the laser. However, this method leads to the increase of heat input, which leads to the deterioration of the performance of the matrix, and the nitrogen content in the obtained nitrided layer is low, which leads to the poor strength of the nitrided layer. limit.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种金属表面激光气体合金化方法,以解决现有技术中存在的金属表面得到的合金化层厚度和合金化元素含量无法同时兼得的问题;同时,本发明的目的还在于提供一种用于实施上述方法的激光气体合金化装置。The purpose of the present invention is to provide a kind of laser gas alloying method of metal surface, in order to solve the problem that the thickness of the alloyed layer and the content of alloying elements obtained from the metal surface existing in the prior art cannot be obtained simultaneously; meanwhile, the purpose of the present invention is It is also to provide a laser gas alloying apparatus for implementing the above method.
为实现上述目的,本发明的一种金属表面气体合金化方法采用如下技术方案:一种金属表面激光气体合金化方法,采用二氧化碳激光器发射的激光束和短波长激光器发射的激光束同时照射在金属表面的待合金化区域,并提供合金化气体作为反应气氛围,短波长激光器发射的激光束的波长小于10640nm。In order to achieve the above-mentioned purpose, a metal surface gas alloying method of the present invention adopts the following technical scheme: a metal surface laser gas alloying method adopts a laser beam emitted by a carbon dioxide laser and a laser beam emitted by a short-wavelength laser to irradiate the metal surface simultaneously. The area to be alloyed on the surface, and the alloying gas is provided as a reactive gas atmosphere, and the wavelength of the laser beam emitted by the short-wavelength laser is less than 10640 nm.
所述短波长激光器选用Nd:YAG激光器、半导体激光器和自由电子激光器中的其中一种。The short-wavelength laser is selected from Nd:YAG laser, semiconductor laser and free electron laser.
所述短波长激光器选用Nd:YAG激光器,且Nd:YAG激光器发射的激光束的波长为1064nm。The short-wavelength laser is an Nd:YAG laser, and the wavelength of the laser beam emitted by the Nd:YAG laser is 1064 nm.
本发明的一种用于实施上述金属表面气体合金化方法的激光气体合金化装置采用如下技术方案:激光气体合金化装置,包括二氧化碳激光器和短波长激光器,二氧化碳激光器的激光加工头和短波长激光器的激光加工头均朝向金属表面的待合金化区域,使得两个激光器发射的激光束能够同时照射到金属表面的待合金化区域;短波长激光器发射的激光束的波长小于10640nm;各激光器均具有气氛罩,各气氛罩的出气口均朝向金属表面的待合金化区域提供合金化气体作为反应气氛围。A laser gas alloying device for implementing the above-mentioned metal surface gas alloying method of the present invention adopts the following technical scheme: the laser gas alloying device includes a carbon dioxide laser and a short-wavelength laser, a laser processing head of the carbon dioxide laser and a short-wavelength laser The laser processing heads are all facing the area to be alloyed on the metal surface, so that the laser beams emitted by the two lasers can simultaneously irradiate the area to be alloyed on the metal surface; the wavelength of the laser beam emitted by the short-wavelength laser is less than 10640nm; each laser has Atmosphere cover, the gas outlet of each atmosphere cover is directed to the area to be alloyed on the metal surface to provide alloying gas as a reaction gas atmosphere.
所述短波长激光器选用Nd:YAG激光器、半导体激光器和自由电子激光器中的其中一种。The short-wavelength laser is selected from Nd:YAG laser, semiconductor laser and free electron laser.
所述波长激光器选用Nd:YAG激光器,且Nd:YAG激光器发射的激光束的波长为1064nm。The wavelength laser is an Nd:YAG laser, and the wavelength of the laser beam emitted by the Nd:YAG laser is 1064 nm.
本发明的有益效果:二氧化碳激光器发射的激光束波长为10640nm,该激光束的能量容易被氮气吸收,并通过逆韧致辐射作用,导致合金化气体电离,形成等离子体,等离子体能量更高,更容易和熔池发生反应,增加熔池中合金化气体元素的含量,增加合金化层中合金化气体元素的含量,但是该激光束不容易被金属吸收,金属吸收率低,因此熔池比较浅,合金化层也比较浅。而短波长激光器发射的激光束更容易被金属吸收,可以增加熔池深度和合金化层深度,但是短波激光不容易被合金化气体吸收,合金化气体不易电离形成等离子体不容易和熔池发生反应,熔池中气体元素的含量低,合金化层中气体元素的含量低。将二氧化碳激光器和短波长激光器复合,对金属表面激光气体合金化,可发挥二者的优势,即二氧化碳激光器发射的激光束能够致合金化气体电离,增加合金化层中气体元素含量,短波长激光器发射的激光束更容易被金属高效吸收,增加熔池熔深和合金化层深度,可以同时兼顾合金化层厚度和合金化元素含量。Beneficial effects of the invention: the wavelength of the laser beam emitted by the carbon dioxide laser is 10640nm, the energy of the laser beam is easily absorbed by nitrogen, and through the reverse bremsstrahlung effect, the alloying gas is ionized to form plasma, and the plasma energy is higher, It is easier to react with the molten pool, increase the content of alloying gas elements in the molten pool, and increase the content of alloying gas elements in the alloying layer, but the laser beam is not easily absorbed by the metal, and the metal absorption rate is low, so the molten pool compares Shallow, the alloying layer is also relatively shallow. The laser beam emitted by the short-wavelength laser is more easily absorbed by the metal, which can increase the depth of the molten pool and the depth of the alloying layer. However, the short-wavelength laser is not easily absorbed by the alloying gas, and the alloying gas is not easily ionized to form a plasma. It is not easy to occur with the molten pool. In the reaction, the content of gas elements in the molten pool is low, and the content of gas elements in the alloyed layer is low. Combining a carbon dioxide laser and a short-wavelength laser can give full play to the advantages of both, that is, the laser beam emitted by the carbon dioxide laser can ionize the alloying gas and increase the content of gas elements in the alloying layer. The short-wavelength laser The emitted laser beam is more easily absorbed by the metal and increases the penetration depth of the molten pool and the depth of the alloying layer, which can take into account the thickness of the alloying layer and the content of alloying elements at the same time.
附图说明Description of drawings
图1是本发明中对比例一和对比例二中采用单一激光器进行金属表面激光气体合金化时的结构示意图;Fig. 1 is the structural representation when adopting single laser to carry out laser gas alloying of metal surface in Comparative Example 1 and Comparative Example 2 of the present invention;
图2是本发明中实验例中激光气体合金化装置的结构示意图;2 is a schematic structural diagram of a laser gas alloying device in an experimental example of the present invention;
图3是对比例一中得到的金属表面氮化层中氮含量变化示意图;3 is a schematic diagram of the variation of nitrogen content in the metal surface nitride layer obtained in Comparative Example 1;
图4是对比例一中得到的金属表面氮化层的图样;Fig. 4 is the pattern of the metal surface nitride layer obtained in the comparative example 1;
图5是对比例二中得到的金属表面氮化层中氮含量变化示意图;5 is a schematic diagram of the variation of nitrogen content in the metal surface nitride layer obtained in Comparative Example 2;
图6是对比例二中得到的金属表面氮化层的图样;Fig. 6 is the pattern of the metal surface nitride layer obtained in comparative example two;
图7是实验例中得到的金属表面氮化层中氮含量变化示意图;Fig. 7 is the schematic diagram of nitrogen content variation in the metal surface nitride layer obtained in the experimental example;
图8是实验例中得到的金属表面氮化层的图样。FIG. 8 is a pattern of the metal surface nitride layer obtained in the experimental example.
具体实施方式Detailed ways
本发明的一种金属表面激光气体合金化方法的实施例,采用二氧化碳激光器发射的激光束和短波长激光器发射的激光束同时照射在金属表面的待合金化区域,并提供合金化气体作为反应气氛围,短波长激光器发射的激光束的波长小于10640nm。本实施例中,二氧化碳激光器发射的激光束的波长为10640nm,将发射的激光束波长小于10640nm的激光发射器统称为短波长激光器。具体地,短波长激光器选用Nd:YAG激光器(Neodymium-dopedYttriumAluminiumGarnet;Nd:Y3Al5O12),且Nd:YAG激光器发射的激光束的波长为1064nm。In an embodiment of the method for metal surface laser gas alloying of the present invention, a laser beam emitted by a carbon dioxide laser and a laser beam emitted by a short-wavelength laser are used to simultaneously irradiate the area to be alloyed on the metal surface, and an alloying gas is provided as a reaction gas Atmosphere, the wavelength of the laser beam emitted by the short wavelength laser is less than 10640nm. In this embodiment, the wavelength of the laser beam emitted by the carbon dioxide laser is 10640 nm, and the laser transmitters whose emitted laser beam wavelength is less than 10640 nm are collectively referred to as short-wavelength lasers. Specifically, a Nd:YAG laser (Neodymium-doped Yttrium Aluminium Garnet; Nd: Y3Al5O12) is selected as the short-wavelength laser, and the wavelength of the laser beam emitted by the Nd:YAG laser is 1064 nm.
本发明的用于实施上述金属表面激光气体合金化方法的激光气体合金化装置,如图2所示,包括二氧化碳激光器5和短波长激光器6,二氧化碳激光器的激光加工头9和短波长激光器的激光加工头均朝向金属表面7的待合金化区域8,使得两个激光器发射的激光束(10、11)能够同时照射到金属表面的待合金化区域。要求短波长激光器发射的激光束的波长小于10640nm。各激光器均具有气氛罩12,各气氛罩均具有进气口13,各气氛罩的出气口均朝向金属表面的待合金化区域,各气氛罩由进气口供入合金化气体以提供氮气作为反应气氛围。The laser gas alloying device for implementing the above-mentioned metal surface laser gas alloying method of the present invention, as shown in FIG. 2, includes a
对比例一Comparative Example 1
工件采用TC4钛合金,采用单一的二氧化碳激光器,发射的激光束1的波长为10640nm,所用装置如图1所示,采用二氧化碳激光器照射钛合金工件表面的待合金化区域,钛合金表面熔化形成熔池,同时气氛罩喷出氮气作为合金化气体,氮气将熔池附近空气排开,并包围熔池。氮气与高温熔池反应并进入熔池,熔池冷却凝固形成氮化层。氮元素在氮化层中起到第二相强化或固溶强化的作用,提高钛合金表面硬度和耐磨性。实验参数如表1所示,得到的金属表面氮化层中氮含量变化如图3所示,得到的金属表面氮化层的图样如图4所示,氮化层最大氮含量为50%,但是氮化层深度最大只有0.5mm。The workpiece is made of TC4 titanium alloy, and a single carbon dioxide laser is used. The wavelength of the emitted
表1Table 1
对比例二Comparative Example 2
工件采用TC4钛合金,采用单一的Nd:YAG激光器,发射的激光束1的波长为1064nm,所用装置也如图1所示,采用Nd:YAG激光器照射钛合金工件表面的待合金化区域,钛合金表面熔化形成熔池,同时气氛罩喷出氮气作为合金化气体,氮气将熔池附近空气排开,并包围熔池。氮气与高温熔池反应并进入熔池,熔池冷却凝固形成氮化层。氮元素在氮化层中起到第二相强化或固溶强化的作用,提高钛合金表面硬度和耐磨性。实验参数如表2所示,得到的金属表面氮化层中氮含量变化如图5所示,得到的金属表面氮化层的图样如图6所示,氮化层最大氮含量只有35%,但是氮化层深度最大可达1mm。The workpiece is made of TC4 titanium alloy, and a single Nd:YAG laser is used. The wavelength of the emitted
表2Table 2
实验例Experimental example
工件采用TC4钛合金,采用二氧化碳激光器和短波长激光器复合使用,其中二氧化碳激光器发射的激光束的波长为10640nm,短波长激光器采用Nd:YAG激光器,其发射的激光束的波长为1064nm,所用装置如图2所示。采用二氧化碳激光器和Nd:YAG激光器同时照射钛合金工件表面的待合金化区域,钛合金表面熔化形成熔池,同时各气氛罩喷出氮气作为合金化气体,氮气将熔池附近空气排开,并包围熔池。氮气与高温熔池反应并进入熔池,熔池冷却凝固形成氮化层。氮元素在氮化层中起到第二相强化或固溶强化的作用,提高钛合金表面硬度和耐磨性。实验参数如表3所示,得到的金属表面氮化层中氮含量变化如图7所示,得到的金属表面氮化层的图样如图8所示,氮化层最大氮含量为45.5%,但是氮化层深度最大深度为0.91mm。The workpiece is made of TC4 titanium alloy, and a carbon dioxide laser and a short-wavelength laser are used in combination. The wavelength of the laser beam emitted by the carbon dioxide laser is 10640nm, and the short-wavelength laser is an Nd:YAG laser. The wavelength of the laser beam emitted is 1064nm. The device used is such as shown in Figure 2. Carbon dioxide laser and Nd:YAG laser are used to irradiate the area to be alloyed on the surface of the titanium alloy workpiece at the same time, and the surface of the titanium alloy is melted to form a molten pool. At the same time, nitrogen gas is sprayed from each atmosphere hood as an alloying gas. surrounding the molten pool. The nitrogen reacts with the high temperature molten pool and enters the molten pool, and the molten pool cools and solidifies to form a nitride layer. Nitrogen plays the role of second phase strengthening or solid solution strengthening in the nitrided layer, and improves the surface hardness and wear resistance of titanium alloys. The experimental parameters are shown in Table 3, the variation of nitrogen content in the obtained metal surface nitride layer is shown in Figure 7, the pattern of the obtained metal surface nitride layer is shown in Figure 8, the maximum nitrogen content of the nitride layer is 45.5%, However, the maximum depth of the nitride layer is 0.91mm.
表3table 3
通过上述实验例和对比例一以及对比例二可以得知:采样二氧化碳激光器和短波长激光器复合,可以在两个激光器均位于小功率的条件下即可以得到气体元素含量高,并且深度较大的合金化层。From the above experimental example and comparative example 1 and comparative example 2, it can be known that the sampling carbon dioxide laser and the short-wavelength laser are compounded, and the high content of gas elements and the depth of the two lasers can be obtained under the condition that both lasers are located at low power. Alloy layer.
在本发明的其他实施例中,短波长激光器也可以采用半导体激光器,半导体激光器发射的激光束的波长为976nm;短波长激光器也可以采用自由电子激光器,自由电子激光器发射的激光束的波长为3000nm;短波长激光器也可以采用其他类型的激光器,但是该类型的激光器发射的激光束的波长要小于10640nm;合金化气体也可以不选用氮气,根据需要选用其他合金化气体。In other embodiments of the present invention, the short-wavelength laser can also use a semiconductor laser, and the wavelength of the laser beam emitted by the semiconductor laser is 976 nm; the short-wavelength laser can also use a free electron laser, and the wavelength of the laser beam emitted by the free electron laser is 3000nm ; Short-wavelength lasers can also use other types of lasers, but the wavelength of the laser beam emitted by this type of laser is less than 10640nm; the alloying gas can also not use nitrogen, and other alloying gases can be selected according to needs.
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