CN115031896A - Detection device, vacuum gauge and detection method for capacitive thin film vacuum gauge - Google Patents
Detection device, vacuum gauge and detection method for capacitive thin film vacuum gauge Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 81
- 239000010409 thin film Substances 0.000 title claims abstract description 37
- 238000012545 processing Methods 0.000 claims abstract description 99
- 238000006243 chemical reaction Methods 0.000 claims abstract description 91
- 238000001914 filtration Methods 0.000 claims description 27
- 238000005070 sampling Methods 0.000 claims description 22
- 238000003672 processing method Methods 0.000 claims description 6
- 238000012935 Averaging Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 9
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- 239000010408 film Substances 0.000 description 11
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- 230000001960 triggered effect Effects 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000013112 stability test Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention provides a detection device, a vacuum gauge and a detection method for a capacitance type thin film vacuum gauge, wherein the device comprises: the device comprises a carrier generation unit, a signal acquisition unit, a first timer and a processing unit; the carrier generation unit is used for generating a carrier signal according to the configured digital signal and transmitting the carrier signal to an electrode of the vacuum gauge; the signal acquisition unit is used for acquiring a modulation signal of the vacuum gauge, performing analog-to-digital conversion on the modulation signal and transmitting the modulation signal to the processing unit; the modulation signal is obtained by modulating an output signal of an electrode of the vacuum gauge to a carrier signal; the first timer is used for triggering the carrier generation unit and the signal acquisition unit to synchronously transmit signals; the processing unit is used for carrying out signal processing on the modulation signal after the analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge. The invention adopts a digital driving mode to obtain the air pressure detection result of the vacuum gauge, effectively ensures the linearity of the detection device, has simpler signal processing process and does not need complex circuits.
Description
Technical Field
The invention relates to the technical field of vacuum measurement, in particular to a detection device, a vacuum gauge and a detection method for a capacitive film vacuum gauge.
Background
The vacuum gauge is mainly used for measuring the absolute gas pressure. Depending on the measurement principle, the types of the gauges are various, such as a hot cathode ionization gauge using a charged particle effect, a thermocouple gauge using a gas dynamic effect, a bolden gauge using mechanical properties, a thin film gauge, and the like. With the rapid development of economy, the requirements of different fields on the performance, the volume and the intelligent level of the vacuum gauge are higher and higher. The capacitance type film vacuum gauge has good stability and sensitivity, high measurement precision and wide application in the fields of military industry, semiconductors and nuclear industry in recent years.
The working principle of the capacitance film vacuum gauge is that an elastic film deflects due to pressure change so as to reflect the pressure change of capacitance, most of the existing air pressure detection modes are realized in an analog mode, including capacitance detection, calibration and compensation, and then analog voltage is output, and the magnitude of the voltage represents the magnitude of gas pressure in a measuring range. In the existing detection device of the capacitance type film vacuum gauge, an analog driving mode, such as a driving mode based on an LC or RC oscillating circuit, is generally adopted, although the sensitivity is high, the linearity of the detection device is poor, the complexity of signal processing is high, and the circuit design is complex.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a detection device, a vacuum gauge and a detection method for a capacitive film vacuum gauge.
The invention provides a detection device of a capacitance type thin film vacuum gauge, comprising:
the device comprises a carrier generation unit, a signal acquisition unit, a first timer and a processing unit;
the carrier generation unit is used for generating a carrier signal according to the configured digital signal and transmitting the carrier signal to an electrode of the vacuum gauge;
the signal acquisition unit is used for acquiring a modulation signal of the vacuum gauge, performing analog-to-digital conversion on the modulation signal and transmitting the modulation signal to the processing unit; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
the first timer is used for triggering the carrier generation unit and the signal acquisition unit to synchronously transmit signals;
the processing unit is used for carrying out signal processing on the modulation signal after analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge.
According to the detection device of the capacitive thin film vacuum gauge, the carrier generation unit comprises a second timer, a third timer, a first register, a first DMA (direct memory access) and a digital-to-analog conversion device;
the first register is used for storing the digital signal;
the second timer is used for outputting a first timing signal to the digital-to-analog conversion device under the triggering of the first timer;
the third timer is used for generating a first updating event under the triggering of the first timer;
the first DMA is used for transmitting the digital signal stored in the first register to the digital-to-analog conversion device under the triggering of the first updating event;
the digital-to-analog conversion device is used for performing digital-to-analog conversion on the digital signal to generate the carrier signal, and transmitting the carrier signal to the electrode of the vacuum gauge according to the first time sequence signal.
According to the detection device of the capacitive thin film vacuum gauge provided by the invention, the carrier generation unit further comprises a second register and a sampling unit;
the second register is used for storing source data with preset length;
the sampling unit is used for sampling the source data according to a preset step length to obtain a sampling signal; and is further configured to determine the digital signal based on the sampling signal and store the digital signal to the first register.
According to the detection device of the capacitive thin film vacuum gauge provided by the invention, the digital signal is configured to the first register based on the half interrupt period of the first DMA.
According to the detection device of the capacitive thin film vacuum gauge, the signal acquisition unit comprises a fourth timer, a fifth timer, a second DMA (direct memory access) and an analog-to-digital conversion device;
the fourth timer is used for outputting a second time sequence signal to the analog-to-digital conversion device under the triggering of the first timer;
the fifth timer is used for generating a second updating event under the triggering of the first timer;
the analog-to-digital conversion device is used for acquiring a modulation signal of the vacuum gauge according to the second time sequence signal and carrying out analog-to-digital conversion on the modulation signal;
the second DMA is configured to transmit the analog-to-digital converted modulation signal to the processing unit under the trigger of the second update event.
According to the detection device of the capacitance type thin film vacuum gauge, the modulation signal after analog-to-digital conversion is transmitted to the processing unit based on the half interrupt cycle of the second DMA.
According to the detection device of the capacitive thin film vacuum gauge provided by the invention, the processing unit is specifically used for:
and processing the modulation signal after the analog-to-digital conversion by adopting a batch processing method based on the half interrupt period of the second DMA.
According to the detection device of the capacitive thin film vacuum gauge provided by the invention, the processing unit comprises a high-pass filter, a demodulator, a first low-pass filter, an arithmetic unit and at least one second low-pass filter which are sequentially connected;
the high-pass filter is used for carrying out high-pass filtering on the modulation signals after analog-to-digital conversion to obtain a first processing result corresponding to each modulation signal after analog-to-digital conversion;
the demodulator is used for demodulating each first processing result to obtain a second processing result corresponding to each modulation signal after analog-to-digital conversion;
the first low-pass filter is used for performing low-pass filtering on each second processing result based on a first preset frequency to obtain a third processing result corresponding to each modulation signal after analog-to-digital conversion;
the arithmetic unit is used for averaging all the third processing results;
the second low-pass filter is used for performing low-pass filtering on the average value based on a second preset frequency to obtain an air pressure detection result of the vacuum gauge; wherein the first preset frequency is greater than the second preset frequency.
The invention also provides a vacuum gauge comprising the detection device of the capacitance type thin film vacuum gauge.
The invention also provides a detection method of the capacitance type film vacuum gauge, which comprises the following steps:
generating a carrier signal according to the configured digital signal, and transmitting the carrier signal to an electrode of the vacuum gauge; meanwhile, a modulation signal of the vacuum gauge is collected, and analog-to-digital conversion is carried out on the modulation signal; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
and carrying out signal processing on the modulated signal after analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge.
According to the detection device, the vacuum gauge and the detection method of the capacitive film vacuum gauge, the first timer is used for carrying out hardware synchronization on the carrier generation unit and the signal acquisition unit, the carrier generation unit is used for generating a carrier signal according to the configured digital signal, the signal acquisition unit is used for acquiring the modulation signal of the vacuum gauge and carrying out analog-to-digital conversion on the modulation signal, and the processing unit is used for carrying out signal processing on the modulation signal after the analog-to-digital conversion, so that the air pressure detection result of the vacuum gauge is obtained in a digital driving mode, the linearity of the detection device is effectively guaranteed, the signal processing process is simpler, and a complex circuit is not needed.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a detection device of a capacitive thin film vacuum gauge provided by the present invention;
fig. 2 is a schematic structural diagram of a carrier generation unit provided in the present invention;
fig. 3 is a second schematic structural diagram of a carrier generation unit provided in the present invention;
FIG. 4 is a schematic structural diagram of a signal acquisition unit provided by the present invention;
FIG. 5 is a schematic diagram of a processing unit according to the present invention;
FIG. 6 is a schematic diagram of the driving logic of the detection device of the capacitive thin film vacuum gauge provided by the present invention;
FIG. 7 is a graph showing the results of the vacuum gauge stability test provided by the present invention;
FIG. 8 is a schematic diagram comparing the scale factors of a test gauge and a standard gauge provided by the present invention;
FIG. 9 is a graphical illustration of linearity error of a test gauge provided by the present invention;
FIG. 10 is a schematic view of the corresponding pressure output of the vacuum gauge in the extreme vacuum state provided by the present invention;
FIG. 11 is a schematic view of the corresponding pressure output of the vacuum gauge of the present invention at 0.02 Torr;
FIG. 12 is a schematic flow chart of a detection method of the capacitance type thin film vacuum gauge provided by the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The detection apparatus of the capacitance type thin film gauge of the present invention will be described with reference to fig. 1to 9. As shown in fig. 1, the detection apparatus of the capacitive thin film gauge of the present invention comprises:
a carrier generation unit 110, a signal acquisition unit 120, a first timer 130 and a processing unit 140;
the carrier generation unit 110 is configured to generate a carrier signal according to the configured digital signal and transmit the carrier signal to an electrode of the vacuum gauge;
the signal collecting unit 120 is configured to collect a modulation signal of the vacuum gauge, perform analog-to-digital conversion on the modulation signal, and transmit the modulation signal to the processing unit 140; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
the first timer 130 is configured to trigger the carrier generation unit 110 and the signal acquisition unit 120 to synchronously transmit signals;
the processing unit 140 is configured to perform signal processing on the analog-to-digital converted modulation signal to obtain an air pressure detection result of the vacuum gauge.
Specifically, the detection device of the capacitive thin film gauge can be realized by adopting a controller for processing digital signals, such as an ARM controller, and other devices can be hung on the controller for processing digital signals according to the precision requirement, so as to obtain the detection device of the capacitive thin film gauge.
The detection apparatus of the capacitance type thin film gauge includes a carrier generation unit 110, a signal acquisition unit 120, a first timer 130, and a processing unit 140.
The carrier generation unit 110 is configured to generate a carrier signal according to the configured digital signal, and transmit the carrier signal to the electrodes of the vacuum gauge, where the electrodes of the vacuum gauge include an inner ring electrode and an outer ring electrode, and are used to output a capacitance value, so that the capacitance values output by the inner ring electrode and the outer ring electrode of the vacuum gauge can be modulated by the carrier signal. The specific type of the carrier signal may be set according to actual requirements, and for example, the carrier signal may be a sine wave signal. The configuration mode of the digital signal may be set according to actual requirements, for example, the configuration may be directly performed according to the required frequency and the required amplitude of the carrier signal, or data sampling may be performed from a pre-stored array to meet the required frequency of the carrier signal, and gain processing is performed on the sampled data to meet the required amplitude of the carrier signal, thereby completing the configuration of the digital signal.
The signal acquisition unit 120 is configured to acquire a modulation signal of the vacuum gauge, and since the modulation signal is an analog signal, the signal acquisition unit 120 further performs analog-to-digital conversion on the modulation signal. The modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to a carrier signal, for example, the electrode of the vacuum gauge may be sequentially connected to the operational amplifier and the difference module to modulate the output signal of the electrode of the vacuum gauge to the carrier signal in a differential modulation manner, and the signal acquisition unit 120 is connected to the output end of the difference module to acquire the modulation signal output by the difference module.
The first timer 130 is connected to the carrier generation unit 110 and the signal acquisition unit 120, and is configured to trigger the carrier generation unit 110 and the signal acquisition unit 120 to transmit signals synchronously, so as to ensure that the hardware of the carrier generation unit 110 and the hardware of the signal acquisition unit 120 are synchronized.
The processing unit 140 is configured to perform signal processing on the analog-to-digital converted modulation signal, so as to obtain an air pressure detection result of the vacuum gauge. The specific manner of performing the signal processing may be set according to actual requirements, for example, filtering processing and demodulation processing may be performed. The relationship between the digital quantity, the digital air pressure value and the digital quantity and the analog voltage output value can be obtained by carrying out filtering processing and demodulation processing on the modulation signal after analog-to-digital conversion to obtain the equivalent digital quantity change of the air pressure and then carrying out calibration test on a standard gauge and a test system, and the signal processing process is simple. The Digital air pressure value can be output through a serial port or a Digital display device, the Analog voltage can be output through a high-precision DAC (Digital to Analog Converter), conventional Analog output can be achieved, Digital output can be achieved, display is more visual, and requirements of different customers can be met. In addition, the air pressure detection result of the vacuum gauge is obtained in a digital driving mode, so that the control process and zero setting are simpler and more convenient.
According to the embodiment of the invention, the first timer is used for carrying out hardware synchronization on the carrier generation unit and the signal acquisition unit, the carrier generation unit is used for generating the carrier signal according to the configured digital signal, the signal acquisition unit is used for acquiring the modulation signal of the vacuum gauge and carrying out analog-to-digital conversion on the modulation signal, and the processing unit is used for carrying out signal processing on the modulation signal after the analog-to-digital conversion, so that the air pressure detection result of the vacuum gauge is obtained in a digital driving mode, the linearity of the detection device is effectively ensured, the signal processing process is simpler, and no complex circuit is needed.
Based on any of the above embodiments, the carrier generation unit 110 includes the second timer 210, the third timer 220, the first register 230, the first DMA240, and the digital-to-analog conversion device 250, as shown in fig. 2;
the first register 230 is used for storing the digital signal;
the second timer 210 is configured to output a first timing signal to the digital-to-analog conversion apparatus 250 under the trigger of the first timer 130;
the third timer 220 is used for generating a first update event under the trigger of the first timer 130;
the first DMA240 is configured to transmit the digital signal stored in the first register 230 to the digital-to-analog conversion device 250 under the trigger of the first update event;
the digital-to-analog conversion device 250 is configured to perform digital-to-analog conversion on the digital signal, generate the carrier signal, and transmit the carrier signal to the electrode of the vacuum gauge according to the first timing signal.
Specifically, the first register 230 is used to store digital signals, that is, configured digital signals are stored in the first register 230, and after the configuration of the digital signals is completed, the configured digital signals are transferred to the digital-to-analog conversion device 250 through a first DMA (Direct Memory Access) 240.
The second timer 210 and the third timer 220 are both connected to the first timer 130, and the first timer 130 triggers the second timer 210 and the third timer 220 at the same time, for example, an ITR0(Internal Trigger) in an ARM controller may be used to synchronously Trigger the second timer 210 and the third timer 220. The second timer 210 is configured to output a first timing signal to the digital-to-analog conversion device 250 under the trigger of the first timer 130, where the first timing signal is a chip select signal of the digital-to-analog conversion device 250. The first timing signal may be a PWM (Pulse Width Modulation) wave.
The third timer 220 is used for generating a first update event under the trigger of the first timer 130, and the first DMA240 carries the digital signal stored in the first register 230 to the digital-to-analog conversion device 250 under the trigger of the first update event. The first DMA240 may implement the output of the carrier signal of the digital-to-analog conversion apparatus 250 in a continuous mode to ensure a higher update rate.
The digital-to-analog conversion device 250 may be a DAC inside the ARM controller, or may be an external DAC, and may be specifically set according to the precision requirement. When the digital-to-analog conversion device 250 employs the add-on DAC, the add-on DAC may perform data transmission with the ARM controller in a Serial Peripheral Interface (SPI) communication manner. The digital signal stored in the first register 230 is carried to the first SPI interface of the ARM controller through the first DMA240, and is transmitted to the external DAC through the first SPI interface. In addition, to ensure the manual requirement of the plug-in DAC, parameters of the first SPI interface may be set, for example, the following settings may be performed on the first SPI interface: main mode, full duplex, 8Bit word length, and 10MHz clock frequency. The period of the first timing signal PWM wave may be set to 312.5KHz, and thus, the digital-to-analog conversion apparatus 250 may transmit 4Byte data in one period. Since the first update event generated by the third timer 220 triggers the first DMA240 to carry the digital signal to the digital-to-analog conversion device 250, the update interruption period of the third timer 220 may be set to 800 ns. To meet the timing requirement of the digital-to-analog conversion device 250, the duty ratio of the PWM wave of the first timing signal may be adjusted, for example, the duty ratio may be adjusted to 81.1% to ensure reliable transmission of data.
Based on any of the above embodiments, the carrier generation unit 110 further includes a second register 310 and a sampling unit 320, as shown in fig. 3;
the second register 310 is used for storing source data with a preset length;
the sampling unit 320 is configured to sample the source data according to a preset step length to obtain a sampling signal; and also for determining the digital signal based on the sampling signal and storing the digital signal to the first register 230.
Specifically, the carrier generation unit 110 further includes a second register 310 and a sampling unit 320, where the second register 310 is configured to store source data with a preset length, and the source data may be set according to a type of the carrier signal, for example, the source data may be a sine wave with a preset length, and the preset length may also be set according to a precision requirement, for example, the preset length may be 3600, that is, the sine wave is divided into 3600 points. The sampling unit 320 samples the source data according to a preset step length to obtain a sampling signal; the preset step length may be set according to a required frequency of the carrier signal, and the higher the required frequency is, the larger the preset step length is, for example, when a sine wave carrier signal with a frequency of 12KHz is generated, the preset step length may be set to 13.824 °, that is, one sine wave cycle is 360 °, and one data is taken at intervals of 13.824 °, and stored in the first register 230.
After the sampling signal is obtained, the sampling signal may be subjected to gain processing according to the required amplitude of the carrier signal, and the carrier signal after the gain processing is stored as a digital signal in the first register 230.
According to the embodiment of the invention, the source data with the preset length is stored through the second register, the source data is sampled through the sampling unit according to the preset step length, and the digital signal is determined based on the sampling signal, so that carrier signals with different frequencies and different amplitudes can be generated, the use flexibility of the detection device of the capacitive film vacuum gauge is improved, and the detection device is simple in structure.
Based on any of the above embodiments, the digital signal is configured to the first register 230 based on a half interrupt cycle of the first DMA 240.
Specifically, the interrupt period of the first DMA240 is related to the size of the data to be transferred each time triggered by the first update event of the third timer 220, i.e. half the interrupt period, i.e. half the duration of the interrupt period. For example, the first DMA240 needs to transfer 100 data each time it is triggered, and if the interrupt period is 2ms, the half interrupt period is 1ms, and an interrupt is entered every 50 data transfers.
The specific manner of configuring the digital signals to the first register 230 based on the half interrupt period of the first DMA240 can be set according to actual requirements, for example, the digital signals in the first register 230 are configured and transported alternately based on the half interrupt period of the first DMA 240. For example, a flag may be set, and the flag performs an inverting operation between "0" and "1" every time an interrupt is entered, and when the flag is "0", the first DMA240 transfers the digital signal of the first half cycle and configures the digital signal of the second half cycle; when the flag bit is "1", the digital signal of the next half cycle is carried by the first DMA240, and the digital signal of the first half cycle is arranged.
In addition, the configuration of other parameters in the carrier generation unit 110 is also completed in the interrupt cycle of the first DMA240, and therefore, it is necessary to increase the preemption priority of the interrupt of the first DMA240 to prevent the interrupt from being interrupted by other interrupt events.
According to the embodiment of the invention, the digital signal is configured to the first register based on the half interrupt period of the first DMA, so that the conflict of the transmitted digital signal can be effectively avoided, namely, the digital signal can be prevented from being transmitted when the configuration of the digital signal is not completed, and the reliability of the generated carrier signal is ensured.
Based on any of the above embodiments, the signal acquisition unit 120 includes a fourth timer 410, a fifth timer 420, a second DMA430, and an analog-to-digital conversion device 440, as shown in fig. 4;
the fourth timer 410 is configured to output a second timing signal to the analog-to-digital conversion apparatus 440 under the triggering of the first timer 130;
the fifth timer 420 is configured to generate a second update event triggered by the first timer 130;
the analog-to-digital conversion device 440 is configured to acquire a modulation signal of the vacuum gauge according to the second timing signal, and perform analog-to-digital conversion on the modulation signal;
the second DMA430 is configured to transmit the analog-to-digital converted modulation signal to the processing unit 140 under the trigger of the second update event.
Specifically, the fourth timer 410 and the fifth timer 420 are both connected to the first timer 130, and the fourth timer 410 and the fifth timer 420 are triggered by the first timer 130 at the same time, for example, the ITR0 in the ARM controller may be used to synchronously trigger the fourth timer 410 and the fifth timer 420. The fourth timer 410 is configured to output a second timing signal to the analog-to-digital conversion device 440 under the trigger of the first timer 130, where the second timing signal is a chip selection signal of the analog-to-digital conversion device 440, and the second timing signal may be a PWM wave.
The fifth timer 420 is configured to generate a second update event under the trigger of the first timer 130, and the second DMA430 carries the analog-to-digital converted modulation signal to the analog-to-digital conversion device 440 under the trigger of the second update event. The second DMA430 may read the analog-to-digital converted modulated signal in a continuous mode to improve data reading efficiency.
The Analog-to-Digital Converter 440 may be an ADC (Analog-to-Digital Converter) inside the ARM controller, or may be an external ADC, and may be specifically set according to the precision requirement. When the analog-to-digital conversion device 440 adopts the plug-in ADC, the plug-in ADC may perform data transmission with the ARM controller in the SPI communication manner. A third register and a fourth register may be provided, the modulated signal after the analog-to-digital conversion is buffered in the third register, the data stored in the third register is transferred to the fourth register through the second DMA430, and the processing unit 140 reads and processes the data in the fourth register. When the external ADC transmits the modulation signal after the analog-to-digital conversion to the ARM controller in an SPI communication mode, the modulation signal after the analog-to-digital conversion of the external ADC is transmitted to the third register through a second SPI interface of the ARM controller, and data stored in the third register is transported to the fourth register through the second DMA 430.
In addition, to ensure the manual requirement of the plug-in ADC, parameters of the second SPI interface may be set, for example, the following settings may be performed on the second SPI interface: main mode, full duplex, word length 8Bit, clock frequency 10 MHz. The parameters of the second timing signal PWM wave may be set according to actual requirements, for example, it may be set to mode 1, the clock division to 4, the clock period (i.e., the count period) to 128, and the duty ratio to 41%. The array storing data in the third register may be set as a two-dimensional array, a first dimension of the two-dimensional array is the length of the array, and the length of the array determines the interrupt period of the second DMA430, for example, the array may be set as 100, that is, the second DMA430 carries 100 data per interrupt period; the value of the second dimension of the two-dimensional array can be set according to the word length of the analog-to-digital conversion device 440 and the data processing capability of the processing unit 140, for example, when the word length of the analog-to-digital conversion device 440 is 18 bits, the value of the second dimension of the two-dimensional array can be set to 4 bytes, which can ensure that the data acquisition frequency of the analog-to-digital conversion device 440 is 312.5KHz, realize high-speed signal acquisition, and simultaneously ensure that the processing unit 140 can process the modulated signal after analog-to-digital conversion in time. In addition, in the embodiment of the invention, the updating frequency of the carrier signal and the data acquisition frequency of the analog-to-digital conversion device 440 are both 312.5KHz, so that the requirement of air pressure detection on the unit resolution is greatly met.
According to any of the above embodiments, the analog-to-digital converted modulation signal is transmitted to the processing unit 140 based on a half interrupt period of the second DMA 430.
Specifically, the interrupt period of the second DMA430 is related to the size of the data to be transferred each time the second update event generated by the fifth timer 420 is triggered, and a half interrupt period is half the duration of the interrupt period. For example, if the second DMA430 needs to transfer 100 data each time it is triggered, then the half-interrupt cycle is 50 data per transfer, i.e. the half-interrupt frequency is 6.25 KHz.
The specific manner of transmitting the analog-to-digital converted modulation signal to the processing unit 140 based on the half interrupt period of the second DMA430 may be set according to actual requirements, for example, alternatively buffering the analog-to-digital converted modulation signal to the third register and transferring the data stored in the third register to the fourth register based on the half interrupt period of the second DMA 430. For example, a flag bit may be set, and when an interrupt is entered once, the flag bit performs an inversion operation between "0" and "1", and when the flag bit is "0", the second DMA430 transfers data of the first half cycle to the fourth register, and buffers data of the second half cycle to the third register; when the flag bit is "1", the second DMA430 is used to transfer the data of the next half period to the fourth register, and buffer the data of the first half period to the third register, so that the conflict in the data transmission process can be effectively avoided, the reliability of the data transmitted to the processing unit 140 is ensured, and the accuracy of the air pressure detection result of the vacuum gauge is further improved.
Based on any of the above embodiments, the processing unit 140 is specifically configured to:
and processing the modulation signal after the analog-to-digital conversion by adopting a batch processing method based on the half interrupt period of the second DMA 430.
Specifically, based on the half interrupt period of the second DMA430, the specific manner of performing signal processing on the analog-to-digital converted modulation signal by using the batch processing method may be set according to actual requirements, for example, based on the half interrupt period of the second DMA430, the data stored in the third register is alternately transferred to the fourth register and the data in the fourth register is subjected to signal processing. For example, a flag bit may be set, and the flag bit performs an inverting operation between "0" and "1" every time an interrupt is entered, and when the flag bit is "0", the second DMA430 transfers data of the first half cycle to the fourth register, and the processing unit 140 performs signal processing on data of the second half cycle in the fourth register; when the flag bit is "1", the data of the next half period is transferred to the fourth register through the second DMA430, and the data of the last half period in the fourth register is subjected to signal processing through the processing unit 140, so that collision in the signal processing process can be effectively avoided, the reliability of the signal processing result of the processing unit 140 is ensured, and the accuracy of the air pressure detection result of the vacuum gauge is further improved.
And performing signal processing on the modulation signal after the analog-to-digital conversion by adopting a batch processing method, namely performing batch processing on the data transmitted to the fourth register in each half interrupt period, thereby effectively improving the data processing efficiency.
Because the value of the second dimension of the two-dimensional array is set to 4Byte, the modulated signal after analog-to-digital conversion needs to be separated and extracted before the signal processing is performed on the modulated signal after analog-to-digital conversion by adopting a batch processing method, so as to extract the required 18-bit data for signal processing.
In addition, the configuration of other parameters in the signal acquisition unit 120 and the processing unit 140 is also completed in the interrupt period of the second DMA430, and therefore, the preemption priority of the interrupt of the second DMA430 needs to be increased to prevent other interrupt events from interrupting the interrupt.
Based on any of the above embodiments, the processing unit 140 includes a high-pass filter 510, a demodulator 520, a first low-pass filter 530, an operator 540 and at least one second low-pass filter 550, which are connected in sequence, as shown in fig. 5;
the high-pass filter 510 is configured to perform high-pass filtering on the modulation signals after analog-to-digital conversion to obtain first processing results corresponding to each modulation signal after analog-to-digital conversion;
the demodulator 520 is configured to demodulate each of the first processing results to obtain a second processing result corresponding to each of the modulated signals after analog-to-digital conversion;
the first low-pass filter 530 is configured to perform low-pass filtering on each second processing result based on a first preset frequency to obtain a third processing result corresponding to each modulation signal after analog-to-digital conversion;
the arithmetic unit 540 is configured to average each of the third processing results;
the second low-pass filter 550 is configured to perform low-pass filtering on the average value based on a second preset frequency to obtain an air pressure detection result of the vacuum gauge; wherein the first preset frequency is greater than the second preset frequency.
Specifically, the high-pass filter 510 is configured to perform high-pass filtering on each data in the batch (i.e., the analog-to-digital converted modulation signal carried to the fourth register in the half interrupt period of the second DMA 430) according to the data acquisition frequency (i.e., 312.5KHz) of the analog-to-digital conversion device 440, so as to remove the acquired dc component.
The demodulator 520 is configured to demodulate the high-pass filtering result of each data in the batch; the demodulator 520 may demodulate the high-pass filtering result by using a multiplication demodulation method.
The first low-pass filter 530 is configured to perform a first second-order low-pass filtering on the demodulation result of each data in the batch based on a first preset frequency; the first preset frequency may be set to a data acquisition frequency of the analog-to-digital conversion device 440, i.e., 312.5KHz, and the cutoff frequency may be set to 2 KHz.
The arithmetic unit 540 is configured to accumulate the first second-order low-pass filtering results of the data in the batch and calculate an average value, so as to reduce the interference of the abnormal data.
The second low-pass filter 550 is configured to perform second-order low-pass filtering on the average value of each data in the batch based on a second preset frequency; after the first second-order low-pass filtering, the frequency of the data is reduced to the half-interrupt frequency of the second DMA430 by averaging the first second-order low-pass filtering result of each data in the batch, so that the second preset frequency may be set to the half-interrupt frequency of the second DMA430, i.e. 6.25KHz, and the cutoff frequency may be set to 120 Hz. The number of the second low-pass filters 550 may be one, or may be multiple, and may be specifically set according to the precision requirement. For example, two second low pass filters 550 may be provided, and after low pass filtering is performed by the two second low pass filters 550, the cut-off frequency of data may be reduced to 60Hz, so as to further improve the accuracy of the air pressure detection result of the vacuum gauge, and ensure the linearity of the detection device, thereby improving the stability of the capacitive thin film vacuum gauge.
According to the embodiment of the invention, the modulation signal after analog-to-digital conversion is subjected to high-pass filtering, demodulation processing and multiple times of low-pass filtering, so that the noise interference in the air pressure detection result can be effectively reduced, the reliability of the air pressure detection result is ensured, and the linearity of the detection device is improved.
The driving logic of the detection device of the capacitive gauge according to the invention is described in detail below by means of an alternative embodiment. As shown in fig. 6, the method specifically includes:
configuring DAC carrier data in a half-interrupt of the first DMA240, where the configuration process includes controlling the amplitude, for example, controlling the amplitude by means of Automatic Gain Control (AGC);
performing digital-to-analog conversion on the configured carrier data through the externally-connected DAC to obtain carrier signals, loading the carrier signals to inner and outer ring electrodes of the vacuum gauge, amplifying and modulating signals output by the inner and outer ring electrodes, and performing high-frequency acquisition through the externally-connected ADC;
extracting data in the half interrupt of the second DMA430 through a processing unit, and performing high-pass filtering, multiplication demodulation, first second-order low-pass filtering processing and accumulation averaging on the first second-order low-pass filtering result; after accumulation and averaging, second-order low-pass filtering and third-order low-pass filtering are carried out to obtain the air pressure digital quantity;
and carrying out calibration test on the air pressure digital quantity to obtain digital output and/or analog output of an air pressure detection result.
The embodiment of the invention realizes the measurement of the capacitance variation of the capacitance film vacuum gauge through a digital driving scheme, and finally converts the capacitance variation into the output of air pressure after calibration. The air pressure detection result can be output in an analog mode, and the magnitude of the output voltage reflects the magnitude of the air pressure intensity. Taking a product with a 0.1Torr range as an example, when the gas pressure is in a limit vacuum state, the voltage output is 0V, when the gas pressure is 0.1Torr, the voltage output is 10V, and similarly, if the range of the vacuum gauge is 10Torr, the voltage output is 0V in the limit vacuum state, and when the gas pressure to be measured is 10Torr, the output voltage is 10V. The detection device of the embodiment of the invention finishes the acquisition of analog quantity through the high-precision ADC and adopts the labview upper computer to perform graphic display and data storage. The results of the 19-hour stability test using a vacuum gauge with a range of 0.1Torr are shown in FIG. 7, and it is understood from FIG. 7 that the stability test results are 0.099mtorr, and the stability is good. In addition, the air pressure of the vacuum gauge with the range of 0.1Torr was measured by the detection device of the embodiment of the present invention, and the scale factors of the test gauge and the standard gauge (a high-precision vacuum gauge measured by the national measurement institute) were measured as the test gauge, and the measurement results are shown in FIG. 8, and it can be seen from FIG. 8 that the scale factors of the test gauge and the standard gauge are overlapped, thereby showing that the detection device of the embodiment of the present invention has good linearity. In addition, the linearity error of the test gauge is also tested, and the test result is shown in fig. 9, and as can be seen from fig. 9, the detection device of the embodiment of the invention has good linearity.
The invention also provides a vacuum gauge which comprises the detection device of the capacitance type thin film vacuum gauge.
In the embodiment of the invention, the vacuum gauge can be applied to vacuum coating, the vacuum coating is a big branch in vacuum application, and the vacuum gauge is widely applied to the aspects of optics, electronics, physicochemical instruments, packaging, machinery, surface treatment technology and the like. Vacuum coating is used for coating metal, glass, ceramics, semiconductors, plastic parts and other objects with a metal film or a covering layer by using evaporation, sputtering and subsequent condensation methods in a vacuum environment. Compared with the traditional coating mode, the application of vacuum coating belongs to dry coating. One key test condition in vacuum coating is to maintain a good vacuum environment, and a vacuum gauge can be applied to the vacuum environment for detecting the vacuum degree. Taking a designed vacuum with 0.1Torr range as an example, the vacuum of the vacuum environment is usually maintained at a preset pressure, such as about 0.02Torr, by means of "one-key zero" and "fine tuning" functions.
The test conditions were set as follows: the power supply mode adopts plus 24VDC plus or minus 5 percent, the temperature control temperature is 45 ℃, the working temperature is 15-40 ℃, and the measuring range of the vacuum gauge is absolute vacuum-0.1 Torr.
Taking the preset air pressure as 0.02Torr as an example, firstly, installing a vacuum gauge according to the requirements of a handbook of the vacuum gauge, electrifying the vacuum gauge for more than 4 hours, after an indicator lamp works normally, adjusting the vacuum gauge by a one-key zero-setting key and a fine-tuning key in a vacuum state to ensure that the output voltage of the vacuum gauge is 200mV, and the air pressure corresponding to the output voltage of 200mV is 0.02Torr because the measuring range of the vacuum gauge is 0.1 Torr. The pressure output of the gauge in the extreme vacuum state is shown in FIG. 10, and the value of the pressure output of the gauge at that time is shown in FIG. 11 when the pressure output of the gauge is increased by 0.001Torr each time by the fine adjustment button (increment). As can be seen from fig. 10 and 11, in the embodiment of the present invention, the vacuum gauge has better stability.
The detection method of the capacitance type thin film vacuum gauge provided by the invention is described below, and the detection method of the capacitance type thin film vacuum gauge described below and the detection device of the capacitance type thin film vacuum gauge described above can be referred to correspondingly. As shown in fig. 12, the detection method of the capacitive thin film gauge of the present invention includes:
s1201, generating a carrier signal according to the configured digital signal, and transmitting the carrier signal to an electrode of a vacuum gauge; meanwhile, a modulation signal of the vacuum gauge is collected, and analog-to-digital conversion is carried out on the modulation signal; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
and S1202, performing signal processing on the modulation signal after analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware. Based on the understanding, the above technical solutions substantially or otherwise contributing to the prior art may be embodied in the form of a software product, which may be stored in a computer-readable storage medium, such as ROM/RAM, magnetic disk, optical disk, etc., and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method according to the various embodiments or some parts of the embodiments.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A capacitive thin film gauge detection apparatus, comprising: the device comprises a carrier generation unit, a signal acquisition unit, a first timer and a processing unit;
the carrier generation unit is used for generating a carrier signal according to the configured digital signal and transmitting the carrier signal to an electrode of the vacuum gauge;
the signal acquisition unit is used for acquiring a modulation signal of the vacuum gauge, performing analog-to-digital conversion on the modulation signal and transmitting the modulation signal to the processing unit; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
the first timer is used for triggering the carrier generation unit and the signal acquisition unit to synchronously transmit signals;
the processing unit is used for carrying out signal processing on the modulation signal after analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge.
2. The capacitive thin film gauge detecting device according to claim 1, wherein the carrier generating unit includes a second timer, a third timer, a first register, a first DMA, and a digital-to-analog converting device;
the first register is used for storing the digital signal;
the second timer is used for outputting a first timing signal to the digital-to-analog conversion device under the triggering of the first timer;
the third timer is used for generating a first updating event under the triggering of the first timer;
the first DMA is used for transmitting the digital signal stored in the first register to the digital-to-analog conversion device under the triggering of the first updating event;
the digital-to-analog conversion device is used for performing digital-to-analog conversion on the digital signal to generate the carrier signal, and transmitting the carrier signal to the electrode of the vacuum gauge according to the first time sequence signal.
3. The capacitance type thin film gauge detecting device according to claim 2, wherein the carrier generating unit further comprises a second register and a sampling unit;
the second register is used for storing source data with preset length;
the sampling unit is used for sampling the source data according to a preset step length to obtain a sampling signal; and is further configured to determine the digital signal based on the sampling signal and store the digital signal to the first register.
4. The capacitive thin film gauge detecting device of claim 2, wherein the digital signal is configured to the first register based on a half interrupt period of the first DMA.
5. The detection device of the capacitive thin film gauge according to claim 1, wherein the signal acquisition unit comprises a fourth timer, a fifth timer, a second DMA and an analog-to-digital conversion device;
the fourth timer is used for outputting a second time sequence signal to the analog-to-digital conversion device under the triggering of the first timer;
the fifth timer is used for generating a second updating event under the triggering of the first timer;
the analog-to-digital conversion device is used for acquiring a modulation signal of the vacuum gauge according to the second time sequence signal and performing analog-to-digital conversion on the modulation signal;
the second DMA is configured to transmit the analog-to-digital converted modulation signal to the processing unit under the trigger of the second update event.
6. The capacitive thin film gauge detection device of claim 5, wherein the modulated signal after analog-to-digital conversion is transmitted to the processing unit based on a half interrupt period of the second DMA.
7. The capacitive thin film gauge detection device of claim 5, wherein the processing unit is specifically configured to:
and processing the modulation signal after the analog-to-digital conversion by adopting a batch processing method based on the half interrupt period of the second DMA.
8. The detection device of the capacitive thin film gauge according to claim 7, wherein the processing unit comprises a high pass filter, a demodulator, a first low pass filter, an operator and at least one second low pass filter connected in sequence;
the high-pass filter is used for carrying out high-pass filtering on the modulation signals after analog-to-digital conversion to obtain a first processing result corresponding to each modulation signal after analog-to-digital conversion;
the demodulator is used for demodulating each first processing result to obtain a second processing result corresponding to each modulation signal after analog-to-digital conversion;
the first low-pass filter is used for performing low-pass filtering on each second processing result based on a first preset frequency to obtain a third processing result corresponding to each modulation signal after analog-to-digital conversion;
the arithmetic unit is used for averaging all the third processing results;
the second low-pass filter is used for performing low-pass filtering on the average value based on a second preset frequency to obtain an air pressure detection result of the vacuum gauge; wherein the first preset frequency is greater than the second preset frequency.
9. A vacuum gauge comprising a capacitive thin film gauge detection device as claimed in any of claims 1to 8.
10. A detection method of a capacitance type thin film vacuum gauge is characterized by comprising the following steps:
generating a carrier signal according to the configured digital signal, and transmitting the carrier signal to an electrode of the vacuum gauge; meanwhile, a modulation signal of the vacuum gauge is collected, and analog-to-digital conversion is carried out on the modulation signal; wherein the modulation signal is obtained by modulating the output signal of the electrode of the vacuum gauge to the carrier signal;
and carrying out signal processing on the modulated signal after analog-to-digital conversion to obtain an air pressure detection result of the vacuum gauge.
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