CN115070968B - Precision compensation method and slicer - Google Patents
Precision compensation method and slicer Download PDFInfo
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- CN115070968B CN115070968B CN202210605934.2A CN202210605934A CN115070968B CN 115070968 B CN115070968 B CN 115070968B CN 202210605934 A CN202210605934 A CN 202210605934A CN 115070968 B CN115070968 B CN 115070968B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/005—Devices for the automatic drive or the program control of the machines
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The application relates to a precision compensation method and a slicing machine, wherein the precision compensation method comprises the following steps: acquiring a track of an original feeding assembly when cutting a silicon rod, and acquiring a corresponding relationship between a feeding amount delta Y of the feeding assembly along a preset direction and an axial offset delta Z of the feeding assembly along a fixed shaft assembly according to a track line of a track point. When the feeding component is positioned at different feeding positions along the preset direction, the temperature of the fixed shaft component positioned between the fixed connection part and the axial positioning point is correspondingly adjusted, so that the fixed shaft component drives the rotary cutting component to shift along the axial direction of the fixed shaft component through axial thermal deformation, and the axial shift delta X of the rotary cutting component along the fixed shaft component is equal to the axial shift delta Z of the feeding component along the fixed shaft component in size and in the same direction. The precision compensation method and the slicing machine provided by the application have the advantages that the moving straightness of the feed assembly along the axis direction of the silicon rod is improved, and the warping degree of the silicon wafer is reduced.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a precision compensation method and a slicing machine.
Background
Microtomes are devices for cutting semiconductor material (typically silicon rods) into thin slices of silicon wafers. In addition, in order to ensure that the silicon wafer cannot fall off or even break in the subsequent adsorption and transfer process, the cut silicon wafer needs to be ensured to have smaller warping degree. The warp is also referred to as bow, and specifically, the warp of the silicon wafer refers to the degree of bow of the silicon wafer.
Generally, the slicing machine completes the slicing process of the silicon rod through the feed assembly, and the straightness of the movement of the feed assembly along the axis direction of the silicon rod directly affects the warping degree of the silicon wafer cut by the feed assembly.
Disclosure of Invention
Based on the above, it is necessary to provide a precision compensation method and a microtome, which can improve the moving straightness of the feed assembly along the axis direction of the silicon rod and reduce the warpage of the silicon wafer.
The precision compensation method is used for compensating the movement error of the feed assembly of the slicing machine, the slicing machine comprises the feed assembly, the fixed shaft assembly, the rotary cutting assembly and the bearing assembly, the rotary cutting assembly is sleeved on the fixed shaft assembly through the bearing assembly and is in rotary fit with the fixed shaft assembly, and the feed assembly can drive the silicon rod to move towards the rotary cutting assembly along the preset direction, so that the silicon rod is cut into silicon wafers by the rotary cutting assembly. The precision compensation method comprises the following steps: cutting the silicon rod into a silicon wafer along a preset direction, and acquiring a first fluctuation curve of the surface of the silicon wafer in the direction of the axis a of the silicon rod, or acquiring a second fluctuation curve of the surface of the silicon wafer in the direction of the axis a of the silicon rod in the process of moving the feed assembly along the preset direction. And obtaining the corresponding relation between the feed quantity delta Y of the feed assembly along the preset direction and the axial offset delta Z of the feed assembly along the fixed shaft assembly according to the first fluctuation curve or the second fluctuation curve. When the feeding component is positioned at different feeding positions along the preset direction, the temperature of the fixed shaft component is correspondingly adjusted, so that the fixed shaft component drives the rotary cutting component to deviate along the axial direction of the fixed shaft component through axial thermal deformation, and the axial deviation delta X of the rotary cutting component along the fixed shaft component is equal to the axial deviation delta Z of the feeding component along the fixed shaft component in size and in the same direction.
In one embodiment, the slicer further comprises a seat assembly fixedly connected to the axial limit of the fixed shaft assembly to prevent the axial limit of the fixed shaft assembly from moving relative to the seat assembly along the axial direction of the fixed shaft assembly, and the axial direction of the fixed shaft assembly is parallel to the direction of the silicon rod axis a. The bearing component is fixedly connected to the fixed connection part of the fixed shaft component, so that the fixed shaft component can drive the bearing component to move along the axial direction of the fixed shaft component through the fixed connection part, and the fixed connection part and the axial limiting part are arranged at intervals. The precision compensation method further comprises the following steps: and obtaining the relation between the offset delta X of the rotary cutting assembly along the axial direction of the fixed shaft assembly and the temperature change delta T of the fixed shaft assembly between the fixed connection position and the axial limiting position according to a formula delta X = delta T X a d, wherein a is the linear expansion coefficient of the fixed shaft assembly, and d is the distance between the fixed connection position and the axial limiting position. When the feeding component is positioned at different feeding positions along the preset direction, the temperature of the fixed shaft component positioned between the fixed connection part and the axial limiting part is correspondingly adjusted, so that the fixed shaft component drives the rotary cutting component to shift along the axial direction of the fixed shaft component through axial thermal deformation, and the axial offset delta X of the rotary cutting component along the fixed shaft component is equal to the axial offset delta Z of the feeding component along the fixed shaft component in size and in the same direction.
In one embodiment, the stationary shaft assembly is provided with a heat exchange chamber into which a heat exchange medium can be introduced, and the heat exchange medium can exchange heat with the stationary shaft assembly to regulate the temperature of the stationary shaft assembly. It will be appreciated that such an arrangement is advantageous for increasing the rate of change of temperature of the stationary shaft assembly.
In one embodiment, a temperature sensor is arranged at a part of the fixed shaft assembly between the fixed connection and the axial limit, and the temperature sensor is used for measuring the temperature of the fixed shaft assembly between the fixed connection and the axial limit. The precision compensation method further comprises the following steps: and calculating the difference between the current temperature value and the initial temperature value of the fixed shaft assembly according to the temperature value measured by the temperature sensor. And comparing the difference with the current temperature change delta T of the fixed shaft assembly. And according to the comparison result, regulating the temperature of the heat exchange medium fed into the heat exchange cavity so that the difference value between the current temperature value and the initial temperature value of the fixed shaft assembly is the same as the current temperature change delta T of the fixed shaft assembly. It will be appreciated that such an arrangement is advantageous for improving the accuracy of the temperature change of the stationary shaft assembly.
The application also provides a slicing machine, which comprises a feed assembly, a fixed shaft assembly, a rotary cutting assembly and a bearing assembly, wherein the rotary cutting assembly is sleeved on the fixed shaft assembly through the bearing assembly and is in rotary fit with the fixed shaft assembly, and the feed assembly can drive the silicon rod to move towards the rotary cutting assembly along a preset direction so that the silicon rod is cut into silicon wafers by the rotary cutting assembly.
In one embodiment, the slicer further comprises a seat assembly fixedly connected to the axial limit of the fixed shaft assembly to prevent the axial limit of the fixed shaft assembly from moving relative to the seat assembly along the axial direction of the fixed shaft assembly, wherein the axial direction of the fixed shaft assembly is parallel to the direction of the silicon rod axis a;
the bearing component is fixedly connected to the fixed connection part of the fixed shaft component, so that the fixed shaft component can drive the bearing component to move along the axial direction of the fixed shaft component through the fixed connection part, and the fixed connection part and the axial limiting part are arranged at intervals.
In one embodiment, the stationary shaft assembly is provided with a heat exchange chamber into which a heat exchange medium can be introduced, and the heat exchange medium can exchange heat with the stationary shaft assembly to regulate the temperature of the stationary shaft assembly.
In one embodiment, a liquid inlet pipe is arranged in the heat exchange cavity, the liquid inlet pipe is inserted into the heat exchange cavity from the second end of the fixed shaft assembly and extends towards the first end of the fixed shaft assembly, one end, close to the first end of the fixed shaft assembly, of the liquid inlet pipe is communicated with the heat exchange cavity, and a liquid outlet of the heat exchange cavity is formed in the second end of the fixed shaft assembly.
In one embodiment, a temperature sensor is arranged at a part of the fixed shaft assembly between the fixed connection and the axial limit, and the temperature sensor is used for measuring the temperature of the fixed shaft assembly between the fixed connection and the axial limit.
In one embodiment, the outer periphery of the fixed shaft assembly is provided with annular limiting steps, the bearing assembly comprises a first rolling bearing and a second rolling bearing, the inner ring of the first rolling bearing and the inner ring of the second rolling bearing are respectively abutted to two ends of the limiting steps, and the outer ring of the first rolling bearing and the outer ring of the second rolling bearing are respectively abutted to two ends of the bearing assembly.
In one embodiment, a first inner ring compression block is arranged at one end, far away from the limiting step, of the inner ring of the first rolling bearing, and the first inner ring compression block can apply compression force towards the limiting step to the inner ring of the first rolling bearing so that the inner ring of the first rolling bearing is in tight fit with the limiting step. The inner ring of the second rolling bearing is far away from one end of the limiting step and is provided with a second inner ring compression block, and the second inner ring compression block can apply compression force towards the limiting step to the inner ring of the second rolling bearing so as to enable the inner ring of the second rolling bearing to be in tight fit with the limiting step. One end of the outer ring of the first rolling bearing, which is far away from the second rolling bearing, is provided with a first outer ring compression block, and the first outer ring compression block can apply compression force towards the first rolling bearing to the outer ring of the first rolling bearing so that the outer ring of the first rolling bearing is tightly matched with the rotary cutting assembly. One end of the outer ring of the second rolling bearing, which is far away from the first rolling bearing, is provided with a second outer ring compression block, and the second outer ring compression block can apply compression force towards the first rolling bearing to the outer ring of the second rolling bearing so that the outer ring of the second rolling bearing is tightly matched with the rotary cutting assembly. It will be appreciated that such an arrangement is advantageous in order to avoid sliding of the first and second rolling bearings along the axial direction of the stationary shaft assembly.
In one embodiment, the second rolling bearing is arranged at one end of the limiting step, which is close to the axial limiting position, a diagonal contact bearing is arranged at one side of the second outer ring compression block and one side of the second inner ring compression block, which is close to the second rolling bearing, the second outer ring compression block and the second inner ring compression block respectively compress the first rolling bearing through the angular contact bearing, and the fixed connection position is arranged at the position of the fixed shaft assembly, which corresponds to the center point of the diagonal contact bearing. It will be appreciated that such an arrangement facilitates positioning of the bearing assembly and the rotary cutting assembly along the axial direction of the stationary shaft assembly.
In one embodiment, the linear expansion coefficient of the rotary cutting assembly is less than or equal to 5 μm/(m.K). It can be appreciated that such an arrangement is beneficial to reducing the influence of the axial expansion and contraction of the rotary cutting assembly on the axial movement of the rotary cutting assembly along the fixed shaft assembly.
Compared with the prior art, the precision compensation method and the slicer provided by the application have the advantages that the temperature change of the fixed shaft assembly is controlled to further control the fixed shaft assembly to generate thermal expansion and contraction along the axial direction, and when the feeding assembly is positioned at different feeding positions along the preset direction, the fixed shaft assembly drives the rotary cutting assembly to drive the axial offset delta X of the rotary cutting assembly along the fixed shaft assembly through the axial thermal deformation to be equal to the axial offset delta Z of the feeding assembly along the fixed shaft assembly in size and in the same direction. Therefore, when the feed assembly is positioned at different feed positions, the rotary cutting assembly and the feed assembly synchronously deviate along the axial direction of the fixed shaft assembly, the offset is equal in size and the direction is the same, further, the movement error of the feed assembly along the direction of the axis a of the silicon rod is effectively compensated, and the warping degree of the silicon wafer is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following descriptions are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.
Fig. 1 is a partial cross-sectional view of a microtome according to one embodiment of the present application.
Reference numerals: 100. a silicon rod; 200. a feed assembly; 300. a base assembly; 310. a cutting chamber body; 320. a first fixing seat; 321. a first fitting hole; 330. the second fixing seat; 331. a second fitting hole; 340. fixing the end cover; 400. a stationary shaft assembly; 410. an axial limit position; 420. fixing the joint; 430. a first fixed shaft; 440. a limit step; 450. a heat exchange cavity; 451. a liquid outlet; 452. a high-pressure plug; 461. a first end; 462. a second end; 470. a backwater cover; 471. a water return hole; 480. a liquid inlet pipe; 500. rotating the cutting assembly; 510. a first cutting portion; 520. a spacer bush; 530. a bearing seat; 540. a sheave; 550. a belt wheel; 600. a bearing assembly; 610. a first bearing; 620. a first rolling bearing; 630. a second rolling bearing; 640. a first inner ring pressing block; 650. a first outer ring compression block; 660. a second inner ring pressing block; 670. a second outer ring pressing block; 680. angular contact bearings; 700. a temperature sensor; 800. a displacement sensor.
Detailed Description
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Microtomes are devices for cutting semiconductor material (typically silicon rods) into thin slices of silicon wafers. In addition, in order to ensure that the silicon wafer cannot fall off or even break in the subsequent adsorption and transfer process, the cut silicon wafer needs to be ensured to have smaller warping degree. The warp is also referred to as bow, and specifically, the warp of the silicon wafer refers to the degree of bow of the silicon wafer.
Generally, the slicing machine completes the slicing process of the silicon rod through the feed assembly, and the straightness of the movement of the feed assembly along the axis direction of the silicon rod directly affects the warping degree of the silicon wafer cut by the feed assembly.
Referring to fig. 1, in order to improve the moving linearity of the feed assembly 200 along the axial direction of the silicon rod 100 and reduce the warpage of the silicon wafer, the present application provides a precision compensation method and a microtome. The precision compensation method provided by the application is used for compensating the movement error of the feed assembly 200 of the slicing machine along the direction of the axis a of the silicon rod 100. Note that the movement error along the direction of the axis a of the silicon rod 100 means: when the silicon rod 100 is cut, the feed assembly 200 is slightly swung along the direction of the axis a of the silicon rod 100, and the silicon wafer itself is extremely small in thickness, so that the silicon wafer may be warped due to the slight swing.
Specifically, as shown in fig. 1, the microtome includes a feed assembly 200, a fixed shaft assembly 400, a rotary cutting assembly 500, and a bearing assembly 600, wherein the rotary cutting assembly 500 is sleeved on the fixed shaft assembly 400 through the bearing assembly 600 and is in rotary fit with the fixed shaft assembly 400, and the feed assembly 200 can drive the silicon rod 100 to move towards the rotary cutting assembly 500 along a preset direction, so that the silicon rod 100 is cut into silicon wafers by the rotary cutting assembly 500.
The precision compensation method comprises the following steps: cutting the silicon rod 100 into silicon wafers along a preset direction, and acquiring a first fluctuation curve of the surface of the silicon wafers in the direction of the axis a of the silicon rod 100, or acquiring a second fluctuation curve of the surface of the silicon wafers in the direction of the axis a of the silicon rod 100 in the process of moving the feed assembly 200 along the preset direction. And obtaining the corresponding relation between the feeding amount delta Y of the feeding assembly 200 along the preset direction and the axial offset delta Z of the feeding assembly 200 along the fixed shaft assembly 400 according to the first fluctuation curve or the second fluctuation curve. When the feeding assembly 200 is at different feeding positions along the preset direction, the temperature of the fixed shaft assembly 400 is correspondingly adjusted, so that the fixed shaft assembly 400 drives the rotary cutting assembly 500 to shift along the axial direction of the fixed shaft assembly 400 through axial thermal deformation, and the axial shift δx of the rotary cutting assembly 500 along the fixed shaft assembly 400 is equal to the axial shift δz of the feeding assembly 200 along the fixed shaft assembly 400 in size and direction.
It should be noted that, in the process of moving the conventional feed assembly 200 along the preset direction, the feed assembly 200 swings to a certain extent in the direction of the axis a of the silicon rod 100, and therefore, the first fluctuation curve is a trajectory of the combined movement of the feed assembly 200 in the preset direction and the direction of the axis a of the silicon rod 100.
Further, it should be noted that, during the movement of the feeding assembly 200 along the preset direction, the feeding assembly 200 swings to a certain extent in the direction of the axis a of the silicon rod 100, and therefore, the second fluctuation curve is a trajectory of the combined movement of the feeding assembly 200 in the preset direction and the direction of the axis a of the silicon rod 100. Since the silicon wafer is cut by the feeding assembly 200 along the preset direction, the shapes of the second wave curve and the first wave curve are completely consistent, but the obtained modes are different.
The temperature change of the fixed shaft assembly 400 is controlled to further control the fixed shaft assembly 400 to expand with heat and contract with cold along the axial direction, and when the feeding assembly 200 is positioned at different feeding positions along the preset direction, the fixed shaft assembly 400 drives the rotary cutting assembly 500 to axially offset δx along the fixed shaft assembly 400 through axial thermal deformation, and the axial offset δz of the feeding assembly 200 along the fixed shaft assembly 400 is equal in magnitude and same in direction. In this way, when the feeding assembly 200 is located at different feeding positions, the rotary cutting assembly 500 and the feeding assembly 200 synchronously deviate along the axial direction of the fixed shaft assembly 400, and the deviation amounts are equal and the directions are the same, so that the movement error of the feeding assembly 200 along the direction of the axis a of the silicon rod 100 is effectively compensated, and the warpage of the silicon wafer is reduced.
Further, in an embodiment, the slicer further includes a base assembly 300, wherein the base assembly 300 is fixedly connected to an axial limit 410 of the fixed shaft assembly 400, so as to prevent the axial limit 410 of the fixed shaft assembly 400 from moving along the axial direction of the fixed shaft assembly 400 relative to the base assembly 300, and the axial direction of the fixed shaft assembly 400 is parallel to the direction in which the axis a of the silicon rod 100 is located. The bearing assembly 600 is fixedly connected to the fixed connection 420 of the fixed shaft assembly 400, so that the fixed shaft assembly 400 can drive the bearing assembly 600 to move along the axial direction of the fixed shaft assembly 400 through the fixed connection 420, and the fixed connection 420 and the axial limiting portion 410 are arranged at intervals.
It should be noted that the axial limit 410 may be a single point, a single surface, or a set of multiple points, and the housing assembly 300 only limits the axial movement of the axial limit 410 of the fixing shaft assembly 400, but does not limit the axial movement of other parts of the fixing shaft assembly 400. That is, when the fixing shaft assembly 400 expands with heat and contracts with cold, the fixing shaft assembly 400 at the axial limit 410 does not move axially due to the limiting effect of the base assembly 300, and other portions of the fixing shaft assembly 400 extend or contract in the axial direction, that is, other portions of the fixing shaft assembly 400 move in the axial direction.
Specifically, as shown in fig. 1, the base assembly 300 includes a cutting chamber main body 310, and a first fixing seat 320 and a second fixing seat 330 fixed at two ends of the cutting chamber main body 310, wherein the first fixing seat 320 is provided with a first assembly hole 321, the second fixing seat 330 is provided with a second assembly hole 331, the first assembly hole 321 and the second assembly hole 331 are coaxially arranged, a first end 461 of the fixed shaft assembly 400 is installed in the first assembly hole 321, and a second end 462 of the fixed shaft assembly 400 is installed in the second assembly hole 331. And, the end face of the second end 462 of the fixed shaft assembly 400 is provided with a fixed end cover 340, the fixed end cover 340 is fixedly connected with the second end 462 of the fixed shaft assembly 400 and the second fixing seat 330, and the axial limit position 410 is located at the end face of the second end 462 of the fixed shaft assembly 400.
Likewise, the fixed connection 420 need not be a single point, but may be a single surface or a collection of points. The bearing assembly 600 is fixedly connected to the fixing connection part 420 of the fixing shaft assembly 400, and when the fixing shaft assembly 400 moves axially due to expansion and contraction, the fixing shaft assembly 400 can drive the bearing assembly 600 to move axially synchronously.
More specifically, as shown in fig. 1, the fixed shaft assembly 400 includes a first fixed shaft 430 and a second fixed shaft (not shown) disposed opposite each other, and the rotary cutting assembly 500 includes a first cutting part 510 and a second cutting part (not shown) disposed opposite each other, the bearing assembly 600 includes a first bearing 610 and a second bearing (not shown), the first cutting part 510 is connected to the first fixed shaft 430 through the first bearing 610, the second cutting part is connected to the second fixed shaft through the second bearing, and a cutting line (not shown) is wound around the outside of the two oppositely disposed first cutting parts 510 and second cutting parts.
Further, in an embodiment, as shown in fig. 1, an annular limiting step 440 is provided on the outer periphery of the fixed shaft assembly 400, the bearing assembly 600 includes a first rolling bearing 620 and a second rolling bearing 630, the inner ring of the first rolling bearing 620 and the inner ring of the second rolling bearing 630 are respectively abutted against two ends of the limiting step 440, and the outer ring of the first rolling bearing 620 and the outer ring of the second rolling bearing 630 are respectively abutted against two ends of the bearing assembly 600. It should be noted that the annular limiting step 440 and the fixing shaft assembly 400 are integrally formed.
Specifically, as shown in fig. 1, the rotary cutting assembly 500 includes a spacer 520, a bearing housing 530, a sheave 540, and a pulley 550. The spacer 520 is sleeved on the outer side of the limit step 440 and is arranged at intervals with the limit step 440, and the outer ring of the first rolling bearing 620 and the outer ring of the second rolling bearing 630 are respectively abutted against two ends of the spacer 520. The bearing housing 530 is fixedly sleeved on the outer side of the spacer 520, and the pulley 550 is connected to one end of the bearing housing 530, so that a driving motor (not shown) can drive the bearing housing 530 to rotate around the fixed shaft assembly 400 through the pulley 550. The grooved wheels 540 are fixedly sleeved on the outer sides of the bearing seats 530, and the cutting wires are wound on the outer sides of the two oppositely arranged grooved wheels 540.
Still further, in one embodiment, the coefficient of linear expansion of the rotary cutting assembly 500 is less than or equal to 5 μm/(m.K). So, the rotation cutting assembly 500 is difficult to generate thermal expansion and cold shrinkage, that is, the influence of the thermal expansion and cold shrinkage of the rotation cutting assembly 500 on the axial movement amount of the rotation cutting assembly 500 along the fixed shaft assembly 400 is effectively reduced, and the integral displacement of the rotation cutting assembly 500 along the axial direction of the fixed shaft assembly 400 along with the fixed connection part 420 is effectively ensured.
In order to avoid sliding of the first rolling bearing 620 along the axial direction of the fixed shaft assembly 400, in an embodiment, as shown in fig. 1, an end of the inner ring of the first rolling bearing 620 away from the limiting step 440 is provided with a first inner ring pressing block 640, and the first inner ring pressing block 640 can apply a pressing force towards the limiting step 440 to the inner ring of the first rolling bearing 620, so that the inner ring of the first rolling bearing 620 is tightly matched with the limiting step 440. Likewise, the outer ring of the first rolling bearing 620 is provided with a first outer ring pressing block 650 at an end thereof remote from the second rolling bearing 630, and the first outer ring pressing block 650 can apply a pressing force toward the first rolling bearing 620 to the outer ring of the first rolling bearing 620 so that the outer ring of the first rolling bearing 620 is tightly fitted with the rotary cutting assembly 500.
In order to avoid the second rolling bearing 630 from sliding along the axial direction of the fixed shaft assembly 400, in an embodiment, as shown in fig. 1, an end of the inner ring of the second rolling bearing 630 away from the limiting step 440 is provided with a second inner ring pressing block 660, and the second inner ring pressing block 660 can apply a pressing force towards the limiting step 440 to the inner ring of the second rolling bearing 630, so that the inner ring of the second rolling bearing 630 is tightly matched with the limiting step 440. Likewise, the outer race of the second rolling bearing 630 is provided with a second outer race pressing block 670 at an end thereof remote from the first rolling bearing 620, and the second outer race pressing block 670 can apply a pressing force toward the first rolling bearing 620 to the outer race of the second rolling bearing 630 so that the outer race of the second rolling bearing 630 is tightly fitted with the rotary cutting assembly 500.
In an embodiment, as shown in fig. 1, the second rolling bearing 630 is disposed at one end of the limiting step 440 near the axial limiting position 410, and a pair of angular contact bearings 680 is disposed on one side of the second outer ring pressing block 670 and the second inner ring pressing block 660 near the second rolling bearing 630, where the second outer ring pressing block 670 and the second inner ring pressing block 660 press the first rolling bearing 620 through the angular contact bearings 680, respectively. Generally, the angular contact bearing 680 can withstand a large radial load, and thus, the bearing assembly 600 and the rotary cutting assembly 500 can be positioned along the axial direction of the stationary shaft assembly 400 by providing the angular contact bearing 680. Thus, the fixed connection 420 may be disposed at a location of the fixed shaft assembly 400 corresponding to a center point of a pair of angular contact bearings 680. Further, the two angular contact bearings 680 may be in a face-to-face mounting, but are not limited thereto, and the two angular contact bearings 680 may also be in a back-to-back mounting.
The precision compensation method specifically comprises the following steps: cutting the silicon rod 100 into silicon wafers along a preset direction, and obtaining a first fluctuation curve of the surface of the silicon wafers in the direction of the axis a of the silicon rod 100. And obtaining the corresponding relation between the feed amount delta Y of the feed assembly 200 along the preset direction and the axial offset delta Z of the feed assembly 200 along the fixed shaft assembly 400 according to the first fluctuation curve. According to the formula δx=δt×a×d, a relationship between an offset δx of the rotary cutting assembly 500 along the axial direction of the fixed shaft assembly 400 and a temperature change δt of the fixed shaft assembly 400 between the fixed connection 420 and the axial limit 410 is obtained, where a is a coefficient of linear expansion of the fixed shaft assembly 400 and d is a distance between the fixed connection 420 and the axial limit 410. When the feeding assembly 200 is at different feeding positions along the preset direction, the temperature of the fixed shaft assembly 400 between the fixed connection 420 and the axial limit 410 is correspondingly adjusted, so that the offset δx of the fixed shaft assembly 400 along the axial direction of the fixed shaft assembly 400, which is driven by the axial thermal deformation of the fixed shaft assembly 400, is equal to the offset δz of the feeding assembly 200 along the axial direction of the fixed shaft assembly 400, and the directions are the same.
Because of the existence of the axial limiting portion 410, only the fixed shaft assemblies 400 at two sides of the axial limiting portion 410 can displace along the axial direction, and because the fixed connection portion 420 and the axial limiting portion 410 are arranged at intervals, it is known that the fixed connection portion 420 is arranged at one side of the axial limiting portion 410, and the axial displacement amount of the fixed connection portion 420 depends on the axial expansion amount (i.e., the offset δx) of the fixed shaft assemblies 400 between the fixed connection portion 420 and the axial limiting portion 410. Thus, by the formula δt=δx/a×d, it is possible to calculate the corresponding temperature change δt when the offset of the rotary cutting assembly 500 (the rotary cutting assembly 500 axially moves in synchronization with the fixed connection 420) along the axial direction of the fixed shaft assembly 400 is δx. That is, the offset of the rotary cutting assembly 500 along the axial direction of the fixed shaft assembly 400 can be achieved by correspondingly adjusting the temperature of the fixed shaft assembly 400 between the fixed connection 420 and the axial stop 410 such that the temperature variation of the fixed shaft assembly 400 between the fixed connection 420 and the axial stop 410 is δt. In combination with adjusting the temperature of the stationary shaft assembly 400 between the fixed connection 420 and the axial limit 410 when the feed assembly 200 is at different feed positions along the predetermined direction, the offset δx of the rotary cutting assembly 500 along the axial direction of the stationary shaft assembly 400 is equal to the offset δz of the feed assembly 200 along the axial direction of the stationary shaft assembly 400. It can be seen that the synchronous movement of the rotary cutting assembly 500 and the feeding assembly 200 along the axial direction of the fixed shaft assembly 400 is realized, that is, the movement error caused by the axial movement of the feeding assembly 200 along the fixed shaft assembly 400 is compensated, and the warpage of the silicon wafer is greatly reduced.
To increase the rate of change of the temperature of the stationary shaft assembly 400, in one embodiment, as shown in fig. 1, the stationary shaft assembly 400 is provided with a heat exchange chamber 450, and a heat exchange medium can be introduced into the heat exchange chamber 450, and the heat exchange medium can exchange heat with the stationary shaft assembly 400 to adjust the temperature of the stationary shaft assembly 400. The heat exchange medium can entirely and effectively cover the entire inner wall of the heat exchange chamber 450, thereby greatly increasing the temperature change rate of the stationary shaft assembly 400. It should be noted that the heat exchange medium may be freon, alkane, ammonia or carbon dioxide. But is not limited thereto, in other embodiments, the stationary shaft assembly 400 may also be heated or cooled directly by a heating or cooling module.
Specifically, as shown in fig. 1, a liquid inlet tube 480 is disposed in the heat exchange cavity 450, the liquid inlet tube 480 is inserted into the heat exchange cavity 450 from the second end 462 of the fixed shaft assembly 400 and extends toward the first end 461 of the fixed shaft assembly 400, one end of the liquid inlet tube 480 near the first end 461 of the fixed shaft assembly 400 is communicated with the heat exchange cavity 450, and the liquid outlet 451 of the heat exchange cavity 450 is disposed at the second end 462 of the fixed shaft assembly 400. Thus, for the heat exchange medium needs to fill the whole heat exchange cavity 450, in this embodiment, after leaving the liquid inlet tube 480, the heat exchange medium only needs to fill the space between the outer wall of the liquid inlet tube 480 and the inner wall of the heat exchange cavity 450, and obviously, the volume of the space between the outer wall of the liquid inlet tube 480 and the inner wall of the heat exchange cavity 450 is smaller than that of the whole heat exchange cavity 450, so the heat exchange efficiency of the fixed assembly is further improved. It should be noted that the larger the ratio of the cross-sectional area of the liquid inlet tube 480 to the cross-sectional area of the heat exchange chamber 450, the faster the heat exchange medium fills the space between the outer wall of the liquid inlet tube 480 and the inner wall of the heat exchange chamber 450, i.e., the higher the heat exchange efficiency of the assembly after fixing.
Further, to facilitate machining of the heat exchange chamber 450, in one embodiment, as shown in FIG. 1, the heat exchange chamber 450 extends through the first end 461 and the second end 462 of the stationary shaft assembly 400 along an axial direction of the stationary shaft assembly 400. The opening of the heat exchange cavity 450 at the first end 461 of the fixed shaft assembly 400 is provided with a high-pressure plug 452, and the high-pressure plug 452 is used for plugging the opening of the heat exchange cavity 450 at the first end 461 of the fixed shaft assembly 400. The heat exchange cavity 450 is provided with a backwater cover 470 at the opening of the second end 462 of the fixed shaft assembly 400, the backwater cover 470 covers the opening of the heat exchange cavity 450 at the second end 462 of the fixed shaft assembly 400, the side wall of the backwater cover 470 is provided with a backwater hole 471, the heat exchange medium firstly enters the backwater cover 470 through the liquid outlet 451, and the heat exchange medium leaves the backwater cover 470 through the backwater hole 471.
In one embodiment, as shown in FIG. 1, the portion of the stationary shaft assembly 400 between the stationary connection 420 and the axial stop 410 is provided with a temperature sensor 700, and the temperature sensor 700 is used to determine the temperature of the stationary shaft assembly 400 between the stationary connection 420 and the axial stop 410. The precision compensation method further comprises the following steps: based on the temperature value measured by the temperature sensor 700, a difference between the current temperature value and the initial temperature value of the stationary shaft assembly 400 is calculated. The difference is compared with the current temperature change δt of the stationary shaft assembly 400. According to the comparison result, the temperature of the heat exchange medium introduced into the heat exchange chamber 450 is adjusted such that the difference between the current temperature value and the initial temperature value of the fixed shaft assembly 400 is the same as the current temperature variation δt of the fixed shaft assembly 400. In this manner, the current temperature of the stationary shaft assembly 400 may be adjusted in real time according to the real-time feedback of the temperature sensor 700 such that the difference between the current temperature value and the initial temperature value of the stationary shaft assembly 400 is the same as the current temperature variation δt of the stationary shaft assembly 400. As can be seen from the above, the temperature variation accuracy of the fixed shaft assembly 400 is improved by this arrangement.
In an embodiment, the precision compensation method may further include the steps of: a displacement sensor 800 is provided on the seat assembly 300 for measuring the actual offset of the rotary cutting assembly 500 along the axial direction of the stationary shaft assembly 400. The purpose of the displacement sensor 800 is also to detect whether the actual offset of the rotary cutting member 500 along the axial direction of the fixed shaft member 400 is the same as the calculated offset δx of the rotary cutting member 500 along the axial direction of the fixed shaft member 400, and if the data of the two offsets differ greatly, it may be necessary to recalculate the offset δx of the rotary cutting member 500 along the axial direction of the fixed shaft member 400.
Further, the displacement sensor 800 is one of an eddy current level sensor, a strain level sensor, an inductance type sensor, a differential voltage-varying type sensor, and a hall sensor.
The application also provides a slicer, which adopts the precision compensation method of any embodiment to compensate the movement error of the feed assembly 200 of the slicer along the direction of the axis a of the silicon rod 100.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of the application should be determined from the following claims.
Claims (12)
1. The precision compensation method is characterized by comprising a cutter feeding assembly (200) for compensating a movement error of a slicing machine, wherein the slicing machine comprises the cutter feeding assembly (200), a fixed shaft assembly (400), a rotary cutting assembly (500) and a bearing assembly (600), the rotary cutting assembly (500) is sleeved on the fixed shaft assembly (400) through the bearing assembly (600) and is in rotary fit with the fixed shaft assembly (400), and the cutter feeding assembly (200) can drive a silicon rod (100) to move towards the rotary cutting assembly (500) along a preset direction so that the silicon rod (100) is cut into silicon wafers by the rotary cutting assembly (500);
the precision compensation method comprises the following steps:
cutting the silicon rod (100) into a silicon wafer along a preset direction, and acquiring a first fluctuation curve of the surface of the silicon wafer in the direction of the axis a of the silicon rod (100), or acquiring a second fluctuation curve of the surface of the silicon wafer in the direction of the axis a of the silicon rod (100) in the process of moving the feed assembly (200) along the preset direction;
Obtaining the corresponding relation between the feed amount delta Y of the feed assembly (200) along the preset direction and the axial offset delta Z of the feed assembly (200) along the fixed shaft assembly (400) according to the first fluctuation curve or the second fluctuation curve,
when the feeding component (200) is positioned at different feeding positions along a preset direction, correspondingly adjusting the temperature of the fixed shaft component (400) so that the fixed shaft component (400) drives the rotary cutting component (500) to deviate along the axial direction of the fixed shaft component (400) through axial thermal deformation, and the axial deviation delta X of the rotary cutting component (500) along the fixed shaft component (400) is equal to the axial deviation delta Z of the feeding component (200) along the fixed shaft component (400) in size and direction;
the slicing machine further comprises a base assembly (300), wherein the base assembly (300) is fixedly connected to an axial limiting position (410) of the fixed shaft assembly (400) so as to prevent the axial limiting position (410) of the fixed shaft assembly (400) from moving relative to the base assembly (300) along the axial direction of the fixed shaft assembly (400), and the axial direction of the fixed shaft assembly (400) is parallel to the direction of the axis a of the silicon rod (100);
the bearing assembly (600) is fixedly connected to a fixed connection part (420) of the fixed shaft assembly (400), so that the fixed shaft assembly (400) can drive the bearing assembly (600) to move along the axial direction of the fixed shaft assembly (400) through the fixed connection part (420), and the fixed connection part (420) and the axial limiting part (410) are arranged at intervals;
The precision compensation method further comprises the following steps:
obtaining a relation between an offset δx of the rotary cutting assembly (500) along the axial direction of the fixed shaft assembly (400) and a temperature variation δt of the fixed shaft assembly (400) between the fixed connection (420) and the axial limit (410) according to a formula δx=δt×a×d, wherein a is a linear expansion coefficient of the fixed shaft assembly (400), d is a distance between the fixed connection (420) and the axial limit (410),
when the feeding component (200) is positioned at different feeding positions along a preset direction, correspondingly adjusting the temperature of the fixed shaft component (400) between the fixed connection part (420) and the axial limiting part (410), so that the fixed shaft component (400) drives the rotary cutting component (500) to shift along the axial direction of the fixed shaft component (400) through axial thermal deformation, and the offset delta X of the rotary cutting component (500) along the axial direction of the fixed shaft component (400) is equal to the offset delta Z of the feeding component (200) along the axial direction of the fixed shaft component (400) in size and in the same direction.
2. The precision compensation method according to claim 1, characterized in that the fixed shaft assembly (400) is provided with a heat exchange cavity (450), a heat exchange medium can be introduced into the heat exchange cavity (450), and the heat exchange medium can exchange heat with the fixed shaft assembly (400) so as to adjust the temperature of the fixed shaft assembly (400).
3. The precision compensation method according to claim 2, characterized in that the part of the fixed shaft assembly (400) located between the fixed connection (420) and the axial limit (410) is provided with a temperature sensor (700), the temperature sensor (700) being used for determining the temperature of the fixed shaft assembly (400) located between the fixed connection (420) and the axial limit (410);
the precision compensation method further comprises the following steps:
calculating a difference between a current temperature value and an initial temperature value of the stationary shaft assembly (400) based on a temperature value measured by the temperature sensor (700),
comparing the difference with the current temperature change delta T of the fixed shaft assembly (400),
and according to the comparison result, adjusting the temperature of the heat exchange medium flowing into the heat exchange cavity (450) so that the difference value between the current temperature value and the initial temperature value of the fixed shaft assembly (400) is the same as the current temperature change delta T of the fixed shaft assembly (400).
4. A slicer, characterized in that the precision compensation method according to any one of claims 1-3 is adopted to compensate the movement error of a feed assembly (200) of the slicer, the slicer comprises the feed assembly (200), a fixed shaft assembly (400), a rotary cutting assembly (500) and a bearing assembly (600), the rotary cutting assembly (500) is sleeved on the fixed shaft assembly (400) through the bearing assembly (600) and is in rotary fit with the fixed shaft assembly (400), and the feed assembly (200) can drive a silicon rod (100) to move towards the rotary cutting assembly (500) along a preset direction so that the silicon rod (100) is cut into silicon wafers by the rotary cutting assembly (500).
5. The microtome according to claim 4, further comprising a seat assembly (300), the seat assembly (300) being fixedly connected to an axial stop (410) of the stationary shaft assembly (400) to prevent axial movement of the axial stop (410) of the stationary shaft assembly (400) relative to the seat assembly (300) along the axis of the stationary shaft assembly (400), the axis of the stationary shaft assembly (400) being parallel to the direction of the axis a of the silicon rod (100);
the bearing assembly (600) is fixedly connected to a fixed connection part (420) of the fixed shaft assembly (400), so that the fixed shaft assembly (400) can drive the bearing assembly (600) to move along the axial direction of the fixed shaft assembly (400) through the fixed connection part (420), and the fixed connection part (420) and the axial limiting part (410) are arranged at intervals.
6. The microtome according to claim 5, wherein the stationary shaft assembly (400) is provided with a heat exchange chamber (450), wherein a heat exchange medium is introduced into the heat exchange chamber (450), and wherein the heat exchange medium is capable of exchanging heat with the stationary shaft assembly (400) to regulate the temperature of the stationary shaft assembly (400).
7. The slicer of claim 6, wherein a liquid inlet tube (480) is disposed in the heat exchange chamber (450), the liquid inlet tube (480) is inserted into the heat exchange chamber (450) from a second end (462) of the fixed shaft assembly (400) and extends toward a first end (461) of the fixed shaft assembly (400), an end of the liquid inlet tube (480) adjacent to the first end (461) of the fixed shaft assembly (400) is in communication with the heat exchange chamber (450), and a liquid outlet (451) of the heat exchange chamber (450) is disposed at a second end (462) of the fixed shaft assembly (400).
8. The microtome according to claim 6, wherein a portion of the stationary shaft assembly (400) located between the stationary connection (420) and the axial stop (410) is provided with a temperature sensor (700), the temperature sensor (700) being adapted to determine the temperature of the stationary shaft assembly (400) located between the stationary connection (420) and the axial stop (410).
9. The slicer of claim 5, wherein an annular limiting step (440) is provided on an outer circumference of the fixed shaft assembly (400), the bearing assembly (600) includes a first rolling bearing (620) and a second rolling bearing (630), an inner ring of the first rolling bearing (620) and an inner ring of the second rolling bearing (630) are respectively abutted to two ends of the limiting step (440), and an outer ring of the first rolling bearing (620) and an outer ring of the second rolling bearing (630) are respectively abutted to two ends of the bearing assembly (600).
10. The slicer of claim 9, wherein an end of the inner ring of the first rolling bearing (620) away from the limit step (440) is provided with a first inner ring pressing block (640), and the first inner ring pressing block (640) can apply a pressing force to the inner ring of the first rolling bearing (620) toward the limit step (440) so that the inner ring of the first rolling bearing (620) is tightly fitted with the limit step (440);
A second inner ring compression block (660) is arranged at one end, far away from the limiting step (440), of the inner ring of the second rolling bearing (630), and the second inner ring compression block (660) can apply a compression force towards the limiting step (440) to the inner ring of the second rolling bearing (630) so as to enable the inner ring of the second rolling bearing (630) to be in tight fit with the limiting step (440);
a first outer ring compression block (650) is arranged at one end, far away from the second rolling bearing (630), of the outer ring of the first rolling bearing (620), and the first outer ring compression block (650) can apply a compression force towards the first rolling bearing (620) to the outer ring of the first rolling bearing (620) so as to enable the outer ring of the first rolling bearing (620) to be in tight fit with the rotary cutting assembly (500);
one end of the outer ring of the second rolling bearing (630) far away from the first rolling bearing (620) is provided with a second outer ring compression block (670), and the second outer ring compression block (670) can apply a compression force towards the first rolling bearing (620) to the outer ring of the second rolling bearing (630), so that the outer ring of the second rolling bearing (630) is in tight fit with the rotary cutting assembly (500).
11. The slicer of claim 10, wherein the second rolling bearing (630) is disposed at an end of the limiting step (440) near the axial limiting portion (410), a pair of angular contact bearings (680) is disposed at a side of the second outer ring pressing block (670) and the second inner ring pressing block (660) near the second rolling bearing (630), the second outer ring pressing block (670) and the second inner ring pressing block (660) respectively press the first rolling bearing (620) through the angular contact bearings (680), and the fixed connection portion (420) is disposed at a position of the fixed shaft assembly (400) corresponding to a center point of the pair of angular contact bearings (680).
12. The microtome according to claim 4, wherein the linear expansion coefficient of the rotary cutting assembly (500) is less than or equal to 5 μm/(m.k).
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| CN202210605934.2A CN115070968B (en) | 2022-05-31 | 2022-05-31 | Precision compensation method and slicer |
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| JPH08290421A (en) * | 1995-04-21 | 1996-11-05 | Tokyo Seimitsu Co Ltd | Grooved roller shaft support part cooling device of wire saw |
| CN102689368A (en) * | 2011-03-23 | 2012-09-26 | 硅电子股份公司 | Method for slicing wafers from a workpiece |
| CN206186131U (en) * | 2016-10-28 | 2017-05-24 | 青岛高测科技股份有限公司 | Buddha's warrior attendant line / resin line silicon rod slicer |
| CN108724495A (en) * | 2017-04-24 | 2018-11-02 | 上海新昇半导体科技有限公司 | Silicon wafer cutting device |
| CN111168868A (en) * | 2020-01-17 | 2020-05-19 | 徐州鑫晶半导体科技有限公司 | Wire cutting device and workpiece cutting method |
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2022
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|---|---|---|---|---|
| JPH08290421A (en) * | 1995-04-21 | 1996-11-05 | Tokyo Seimitsu Co Ltd | Grooved roller shaft support part cooling device of wire saw |
| CN102689368A (en) * | 2011-03-23 | 2012-09-26 | 硅电子股份公司 | Method for slicing wafers from a workpiece |
| CN206186131U (en) * | 2016-10-28 | 2017-05-24 | 青岛高测科技股份有限公司 | Buddha's warrior attendant line / resin line silicon rod slicer |
| CN108724495A (en) * | 2017-04-24 | 2018-11-02 | 上海新昇半导体科技有限公司 | Silicon wafer cutting device |
| CN111168868A (en) * | 2020-01-17 | 2020-05-19 | 徐州鑫晶半导体科技有限公司 | Wire cutting device and workpiece cutting method |
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