[go: up one dir, main page]

CN115132919A - Light-operated artificial synapse device and preparation method thereof - Google Patents

Light-operated artificial synapse device and preparation method thereof Download PDF

Info

Publication number
CN115132919A
CN115132919A CN202110327791.9A CN202110327791A CN115132919A CN 115132919 A CN115132919 A CN 115132919A CN 202110327791 A CN202110327791 A CN 202110327791A CN 115132919 A CN115132919 A CN 115132919A
Authority
CN
China
Prior art keywords
light
artificial synapse
synapse device
controlled artificial
transparent electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110327791.9A
Other languages
Chinese (zh)
Other versions
CN115132919B (en
Inventor
刘益春
王中强
单旋宇
付申成
张昕彤
徐海阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northeast Normal University
Original Assignee
Northeast Normal University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northeast Normal University filed Critical Northeast Normal University
Priority to CN202110327791.9A priority Critical patent/CN115132919B/en
Publication of CN115132919A publication Critical patent/CN115132919A/en
Application granted granted Critical
Publication of CN115132919B publication Critical patent/CN115132919B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20Multistable switching devices, e.g. memristors
    • H10N70/257Multistable switching devices, e.g. memristors having switching assisted by radiation or particle beam, e.g. optically controlled devices
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/06Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/061Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using biological neurons, e.g. biological neurons connected to an integrated circuit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • H10N70/041Modification of switching materials after formation, e.g. doping
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/841Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/881Switching materials
    • H10N70/883Oxides or nitrides
    • H10N70/8833Binary metal oxides, e.g. TaOx
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Molecular Biology (AREA)
  • Neurology (AREA)
  • Artificial Intelligence (AREA)
  • Computational Linguistics (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • General Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photovoltaic Devices (AREA)

Abstract

本发明公开了一种光控人工突触器件及其制备方法,其光控人工突触器件包括:惰性电极;透明电极;光电忆阻层,光电忆阻层设置在透明电极与惰性电极之间,其用于模拟突触。本发明的光控人工突触器件可以在惰性电极施加正电压,透明电极接地,光电忆阻层在电场作用下形成导电通道,电导上升,在紫外光和可见光的调控下实现光门控的可逆激活/抑制。本发明的光控人工突触器件为两端结构,结构简单,器件尺寸可降至纳米量级,功耗小,借助于可见/紫外光信号能够实现对电导变化范围的可逆调节,为实现光电类脑计算系统提供了器件基础。由于可以基于常见材料复合实现光、电、温度、湿度的多维度调节,在未来的新型光电材料领域有着良好应用前景。

Figure 202110327791

The invention discloses a light-controlled artificial synapse device and a preparation method thereof. The light-controlled artificial synapse device comprises: an inert electrode; a transparent electrode; , which is used to simulate synapses. The light-controlled artificial synapse device of the invention can apply a positive voltage to the inert electrode, the transparent electrode is grounded, the photoelectric memristive layer forms a conductive channel under the action of the electric field, the conductance rises, and the reversible light-gating control is realized under the control of ultraviolet light and visible light. activate/inhibit. The light-controlled artificial synapse device of the present invention has a two-terminal structure, and the structure is simple, the device size can be reduced to the nanometer level, and the power consumption is small. Brain-like computing systems provide the device foundation. Since the multi-dimensional adjustment of light, electricity, temperature and humidity can be realized based on the composite of common materials, it has a good application prospect in the field of new optoelectronic materials in the future.

Figure 202110327791

Description

一种光控人工突触器件及其制备方法A kind of light-controlled artificial synapse device and preparation method thereof

技术领域technical field

本发明属于微电子材料与器件领域技术领域,尤其涉及一种光控人工突触器件及其制备方法。The invention belongs to the technical field of the field of microelectronic materials and devices, and in particular relates to a light-controlled artificial synapse device and a preparation method thereof.

背景技术Background technique

类脑研究是人工智能领域的研究前沿,而构建人工神经突触为实现神经拟态计算提供了硬件基础。突触器系统——也称为人工神经网络——是允许电子系统基本上以类似于生物大脑的方式工作的计算系统。突触器系统可以由各种关于生物神经元和突触建模的电子电路组成。现有的人工突触器件都是基于电信号突触功能模拟的,可调性和准确性很低。Brain-inspired research is the research frontier in the field of artificial intelligence, and the construction of artificial neural synapses provides a hardware basis for neuromorphic computing. Synaptic systems — also known as artificial neural networks — are computing systems that allow electronic systems to work essentially in a manner similar to a biological brain. Synaptic systems can be composed of various electronic circuits for modeling biological neurons and synapses. Existing artificial synaptic devices are all based on electrical signal synaptic function simulation, with low tunability and accuracy.

发明内容SUMMARY OF THE INVENTION

(一)发明目的(1) Purpose of the invention

本发明的目的是提供一种光控人工突触器件及其制备方法以解决现有技术中的人工突触器件可调性和准确性很低的技术问题。The purpose of the present invention is to provide a light-controlled artificial synapse device and a preparation method thereof so as to solve the technical problem of low adjustability and accuracy of the artificial synapse device in the prior art.

(二)技术方案(2) Technical solutions

为解决上述问题,本发明的第一方面提供了一种光控人工突触器件,包括:惰性电极;透明电极;光电忆阻层,所述光电忆阻层设置在所述透明电极与所述惰性电极之间,其用于模拟突触。In order to solve the above problems, the first aspect of the present invention provides a light-controlled artificial synapse device, comprising: an inert electrode; a transparent electrode; between inert electrodes, which are used to simulate synapses.

进一步地,所述光电忆阻层为多孔氧化钛掺杂银纳米颗粒复合薄膜。Further, the photo-memristive layer is a porous titanium oxide-doped silver nanoparticle composite film.

进一步地,所述惰性电极的厚度为100±20nm;所述光电忆阻层的厚度为900±50nm。Further, the thickness of the inert electrode is 100±20 nm; the thickness of the photoelectric memristive layer is 900±50 nm.

进一步地,所述光电忆阻层中的银纳米颗粒为球型,且直径为11±4nm。Further, the silver nanoparticles in the photoelectric memristive layer are spherical and have a diameter of 11±4 nm.

根据本发明的另一个方面,提供一种光控人工突触器件的制备方法,包括:S1、在透明电极上使用提拉法制得带有多孔氧化钛薄膜的透明电极;S2、将所述带有多孔氧化钛薄膜的透明电极在紫外光照射下浸渍于0.1mol/L硝酸银溶液中沉积银纳米颗粒,制得带有光电忆阻层的透明电极;S3、在所述带有光电忆阻层的透明电极远离所述透明电极的一侧沉积惰性电极,制得光控人工突触器件。According to another aspect of the present invention, there is provided a method for preparing a light-controlled artificial synapse device, comprising: S1. using a pulling method on a transparent electrode to prepare a transparent electrode with a porous titanium oxide film; S2. The transparent electrode with the porous titanium oxide film is immersed in a 0.1 mol/L silver nitrate solution under ultraviolet light irradiation to deposit silver nanoparticles to obtain a transparent electrode with a photomemristive layer; S3. An inert electrode is deposited on the side of the transparent electrode of the layer away from the transparent electrode to prepare a light-controlled artificial synapse device.

进一步地,步骤S3中的沉积惰性电极采用热蒸发或溅射工艺。Further, the deposition of the passive electrode in step S3 adopts a thermal evaporation or sputtering process.

进一步地,步骤S1中提拉后还包括:退火,退火温度为450-500℃。Further, after the pulling in step S1, the method further includes: annealing, and the annealing temperature is 450-500°C.

进一步地,步骤S2中紫外光照射的紫外光的波长为365nm,光照时间为15分钟。Further, the wavelength of the ultraviolet light irradiated by the ultraviolet light in step S2 is 365 nm, and the illumination time is 15 minutes.

进一步地,步骤S3中沉积惰性电极所用金属掩模版孔径为100-500μm,电极厚度为100±20nm。Further, the aperture diameter of the metal mask used for depositing the inert electrode in step S3 is 100-500 μm, and the thickness of the electrode is 100±20 nm.

(三)有益效果(3) Beneficial effects

本发明的上述技术方案具有如下有益的技术效果:The above-mentioned technical scheme of the present invention has the following beneficial technical effects:

本发明的光控人工突触器件可以在惰性电极施加正电压,透明电极接地,光电忆阻层在电场作用下形成导电通道,电导上升,在紫外光和可见光的调控下实现光门控的可逆激活/抑制。本发明的光控人工突触器件为两端结构,结构简单,器件尺寸可降至纳米量级,功耗小,借助于可见/紫外光信号能够实现对电导变化范围的可逆调节,为实现光电类脑计算系统提供了器件基础。由于可以基于常见材料复合实现光、电、温度、湿度的多维度调节,在未来的新型光电材料领域有着良好应用前景。The light-controlled artificial synapse device of the present invention can apply a positive voltage to the inert electrode, the transparent electrode is grounded, the photoelectric memristive layer forms a conductive channel under the action of the electric field, the conductance rises, and the reversible light-gating control is realized under the control of ultraviolet light and visible light. activation/inhibition. The light-controlled artificial synapse device of the present invention has a two-terminal structure, the structure is simple, the size of the device can be reduced to the nanometer level, the power consumption is small, and the reversible adjustment of the conductance variation range can be realized by means of the visible/ultraviolet light signal. Brain-like computing systems provide the device foundation. Since the multi-dimensional adjustment of light, electricity, temperature, and humidity can be realized based on the composite of common materials, it has a good application prospect in the field of new optoelectronic materials in the future.

附图说明Description of drawings

图1是根据本发明一实施方式的光控人工突触器件结构示意图。FIG. 1 is a schematic structural diagram of a light-controlled artificial synapse device according to an embodiment of the present invention.

图2是根据本发明一实施方式的光控人工突触器件的制备方法流程图。FIG. 2 is a flowchart of a method for fabricating a light-controlled artificial synapse device according to an embodiment of the present invention.

图3是根据本发明一实施方式的光控人工突触器件经过紫外光照射后的电流-电压曲线图。FIG. 3 is a current-voltage curve diagram of the light-controlled artificial synapse device after being irradiated with ultraviolet light according to an embodiment of the present invention.

图4是根据本发明一实施方式的光控人工突触器件经过可见光照射后的电流-电压曲线图。FIG. 4 is a current-voltage curve diagram of the light-controlled artificial synapse device after being irradiated with visible light according to an embodiment of the present invention.

图5是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后电学脉冲刺激的电导变化图。FIG. 5 is a graph of the conductance change of the light-controlled artificial synapse device after being irradiated with ultraviolet light and visible light by electrical pulse stimulation according to an embodiment of the present invention.

图6是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后的对脉冲易化功能图。FIG. 6 is a functional diagram of the facilitation of pulses after the light-controlled artificial synapse device is irradiated with ultraviolet light and visible light according to an embodiment of the present invention.

图7是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后的STDP功能图。FIG. 7 is a functional diagram of STDP after the light-controlled artificial synapse device is irradiated with ultraviolet light and visible light according to an embodiment of the present invention.

附图标记:Reference number:

1:惰性电极;2:透明电极;3:光电忆阻层;31:银纳米颗粒。1: Inert electrode; 2: Transparent electrode; 3: Photoelectric memristive layer; 31: Silver nanoparticles.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明了,下面结合具体实施方式并参照附图,对本发明进一步详细说明。应该理解,这些描述只是示例性的,而并非要限制本发明的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本发明的概念。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the specific embodiments and the accompanying drawings. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present invention.

在附图中示出了根据本发明实施例的层结构示意图。这些图并非是按比例绘制的,其中为了清楚的目的,放大了某些细节,并且可能省略了某些细节。图中所示出的各种区域、层的形状以及它们之间的相对大小、位置关系仅是示例性的,实际中可能由于制造公差或技术限制而有所偏差,并且本领域技术人员根据实际所需可以另外设计具有不同形状、大小、相对位置的区域/层。A schematic diagram of a layer structure according to an embodiment of the present invention is shown in the accompanying drawings. The figures are not to scale, some details are exaggerated for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the figures, as well as their relative sizes and positional relationships are only exemplary, and in practice, there may be deviations due to manufacturing tolerances or technical limitations, and those skilled in the art should Regions/layers with different shapes, sizes, relative positions can be additionally designed as desired.

显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。Obviously, the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

此外,下面所描述的本发明不同实施方式中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

以下将参照附图更详细地描述本发明。在各个附图中,相同的元件采用类似的附图标记来表示。为了清楚起见,附图中的各个部分没有按比例绘制。The present invention will be described in more detail below with reference to the accompanying drawings. In the various figures, like elements are designated by like reference numerals. For the sake of clarity, various parts in the figures have not been drawn to scale.

图1是根据本发明一实施方式的光控人工突触器件结构示意图。FIG. 1 is a schematic structural diagram of a light-controlled artificial synapse device according to an embodiment of the present invention.

如图1所示,根据本发明一实施例中的一实施方式,提供一种光控人工突触器件,包括:惰性电极1;透明电极2;光电忆阻层3,所述光电忆阻层3设置在所述透明电极2与所述惰性电极1之间,其用于模拟突触。本发明的光控人工突触器件可以在惰性电极施加正电压,透明电极接地,光电忆阻层在电场作用下形成导电通道,电导上升,在紫外光和可见光的调控下实现光门控的可逆激活/抑制。本发明的光控人工突触器件为两端结构,结构简单,器件尺寸可降至纳米量级,功耗小,借助于可见/紫外光信号能够实现对电导变化范围的可逆调节,为实现光电类脑计算系统提供了器件基础。由于可以基于常见材料复合实现光、电、温度、湿度的多维度调节,在未来的新型光电材料领域有着良好应用前景。As shown in FIG. 1 , according to an embodiment of the present invention, a light-controlled artificial synapse device is provided, including: an inert electrode 1 ; a transparent electrode 2 ; a photoelectric memristive layer 3 , the photoelectric memristive layer 3 is arranged between the transparent electrode 2 and the inert electrode 1, which is used to simulate a synapse. The light-controlled artificial synapse device of the present invention can apply a positive voltage to the inert electrode, the transparent electrode is grounded, the photoelectric memristive layer forms a conductive channel under the action of the electric field, the conductance rises, and the reversible light-gating control is realized under the control of ultraviolet light and visible light. activation/inhibition. The light-controlled artificial synapse device of the present invention has a two-terminal structure, the structure is simple, the size of the device can be reduced to the nanometer level, the power consumption is small, and the reversible adjustment of the conductance variation range can be realized by means of the visible/ultraviolet light signal. Brain-like computing systems provide the device foundation. Since the multi-dimensional adjustment of light, electricity, temperature, and humidity can be realized based on the composite of common materials, it has a good application prospect in the field of new optoelectronic materials in the future.

光电忆阻层3在原有电信号调控的基础上引入了光信号进而调节电导的状态。On the basis of the original electrical signal regulation, the photomemristor layer 3 introduces an optical signal to adjust the conductance state.

本发明的光控人工突触器件的电学特征功能是:在可见光辐照后,器件忆阻特性激活,能够模拟突触功能;在紫外光辐照后,器件忆阻特性被消除,模拟突触功能消失;可见光和紫外光交替运行,能实现忆阻突触功能的可逆激活与抑制。该器件的工作机理在于,可见光能够诱导银纳米颗粒31发生等离子体共振,促进银原子氧化为银离子,使其在电场作用下更易于迁移,从而激活忆阻器运行;紫外光激发氧化钛价带电子,促进银离子还原为银原子,阻碍银离子迁移,从而抑制忆阻器运行。本发明的光信号可逆激活和抑制忆阻型突触器件为实现光电类脑计算系统提供了器件基础。The electrical characteristic function of the light-controlled artificial synapse device of the present invention is: after the visible light irradiation, the memristive characteristic of the device is activated, and the synaptic function can be simulated; after the ultraviolet light irradiation, the memristive characteristic of the device is eliminated, simulating the synapse The function disappears; the visible light and ultraviolet light operate alternately, which can realize the reversible activation and inhibition of the memristive synaptic function. The working mechanism of the device is that visible light can induce plasmon resonance of silver nanoparticles 31, promote the oxidation of silver atoms to silver ions, and make it easier to migrate under the action of an electric field, thereby activating the operation of the memristor; ultraviolet light stimulates the valence of titanium oxide With electrons, it promotes the reduction of silver ions to silver atoms and hinders the migration of silver ions, thereby inhibiting the operation of the memristor. The optical signal reversible activation and inhibition memristive synaptic device of the present invention provides a device basis for realizing an optoelectronic brain-like computing system.

在本发明中,我们将氧化钛/银材料体系引入到光控人工突触器件中。该材料中的银纳米颗粒31在可见光作用下发生等离子体共振,并氧化成银离子,在电场作用下更容易迁移;紫外光作用下氧化钛价带电子被激发将银离子还原为原子,进而实现多波段光信号诱发的电导双向调节。银/氧化钛纳米复合材料由于可以基于常见材料复合实现光、电、温度、湿度的多维度调节,在未来的新型光电材料领域有着良好应用前景。In the present invention, we introduce the titanium oxide/silver material system into the light-controlled artificial synapse device. The silver nanoparticles 31 in the material undergo plasmon resonance under the action of visible light, and are oxidized into silver ions, which are easier to migrate under the action of an electric field; under the action of ultraviolet light, the electrons in the valence band of titanium oxide are excited to reduce the silver ions to atoms, and then Realize the bidirectional regulation of conductance induced by multi-band optical signal. Silver/titanium oxide nanocomposites have good application prospects in the field of new optoelectronic materials in the future because they can realize multi-dimensional adjustment of light, electricity, temperature, and humidity based on common materials.

在一可选实施例中,所述光电忆阻层3为多孔氧化钛掺杂银纳米颗粒复合薄膜。In an optional embodiment, the photo-memristive layer 3 is a porous titanium oxide-doped silver nanoparticle composite film.

在一可选实施例中,所述惰性电极1的厚度为100±20nm;所述光电忆阻层3的厚度为900±50nm。In an optional embodiment, the thickness of the passive electrode 1 is 100±20 nm; the thickness of the photo-memristive layer 3 is 900±50 nm.

在一可选实施例中,所述光电忆阻层3中的银纳米颗粒31为球型,且直径为11±4nm。In an optional embodiment, the silver nanoparticles 31 in the photo-memristive layer 3 are spherical and have a diameter of 11±4 nm.

在一可选实施例中,所述多孔氧化钛掺杂银纳米颗粒复合薄膜的银纳米颗粒在第一方向上的数量呈减小分布;所述第一方向为所述光电忆阻层3上靠近所述惰性电极1的一端到靠近所述透明电极2的一端的垂直方向。In an optional embodiment, the number of silver nanoparticles in the porous titanium oxide-doped silver nanoparticle composite film is reduced in a first direction; the first direction is on the photoelectric memristive layer 3 . The vertical direction from the end close to the inert electrode 1 to the end close to the transparent electrode 2 .

在一可选实施例中,所述透明电极2可以为FTO导电玻璃。In an optional embodiment, the transparent electrode 2 may be FTO conductive glass.

导电玻璃为掺杂氟的SnO2导电玻璃(SnO2:F),简称为FTO。The conductive glass is SnO2 conductive glass doped with fluorine (SnO2:F), referred to as FTO for short.

在一可选实施例中,所述透明电极2可以为ITO导电玻璃。In an optional embodiment, the transparent electrode 2 may be ITO conductive glass.

ITO导电玻璃是在钠钙基或硅硼基基片玻璃的基础上,利用磁控溅射的方法镀上一层氧化铟锡(俗称ITO)膜加工制作成的。ITO conductive glass is made by coating a layer of indium tin oxide (commonly known as ITO) film by magnetron sputtering on the basis of soda lime base or silicon boron base glass.

在一可选实施例中,所述惰性电极1可以为惰性金属。In an optional embodiment, the inert electrode 1 may be an inert metal.

在一可选实施例中,所述惰性电极1可以为金属金电极。In an optional embodiment, the inert electrode 1 may be a metal gold electrode.

在一可选实施例中,所述惰性电极1可以为金属铂电极。In an optional embodiment, the inert electrode 1 may be a metal platinum electrode.

本发明的光控人工突触器件的辐照条件为:可见光波长为500-720nm,辐照时间5-15分钟;紫外光波长为365nm,辐照时间5-15分钟。The irradiation conditions of the light-controlled artificial synapse device of the present invention are as follows: the wavelength of visible light is 500-720 nm, and the irradiation time is 5-15 minutes; the wavelength of ultraviolet light is 365 nm, and the irradiation time is 5-15 minutes.

图2是根据本发明一实施方式的光控人工突触器件的制备方法流程图。FIG. 2 is a flowchart of a method for fabricating a light-controlled artificial synapse device according to an embodiment of the present invention.

如图2所示,根据本发明另一实施例中的一实施方式,提供一种光控人工突触器件的制备方法,包括:As shown in FIG. 2, according to an implementation in another embodiment of the present invention, a method for preparing a light-controlled artificial synapse device is provided, including:

S1、在透明电极2上使用提拉法制得带有多孔氧化钛薄膜的透明电极2。S1, using the pulling method on the transparent electrode 2 to prepare the transparent electrode 2 with the porous titanium oxide film.

在一可选实施例中,步骤S1中提拉可以包括:在所述透明电极2上将二氧化钛溶胶和嵌段共聚物PEO20-PPO70-PPO20搅拌均匀,所述透明电极2通过提拉法在表面形成一层氧化钛薄膜。In an optional embodiment, the pulling in step S1 may include: stirring the titanium dioxide sol and the block copolymer PEO20-PPO70-PPO20 on the transparent electrode 2 evenly, and the transparent electrode 2 is on the surface of the transparent electrode 2 by a pulling method. A titanium oxide film is formed.

在一可选实施例中,步骤S1中提拉后还可以包括:退火,退火温度为450-500℃。经过退火,所述透明电极2表面上的氧化钛薄膜形成多孔结构,制得带有多孔氧化钛薄膜的透明电极2。In an optional embodiment, the pulling in step S1 may further include: annealing, and the annealing temperature is 450-500°C. After annealing, the titanium oxide film on the surface of the transparent electrode 2 forms a porous structure, and the transparent electrode 2 with the porous titanium oxide film is prepared.

在一可选实施例中,在大气环境下450-500℃退火30分钟。在高温调节下,高分子聚合物完全分解,形成多孔结构的氧化钛薄膜。In an alternative embodiment, the annealing is performed at 450-500° C. for 30 minutes in an atmospheric environment. Under the regulation of high temperature, the high molecular polymer is completely decomposed to form a titanium oxide film with a porous structure.

在一可选实施例中,步骤S1还可以包括:清洗,将透明电极2依次用三氯乙烯、丙酮、乙醇、二次去离子水在超声清洗机中超声10分钟,去除衬底表面的灰尘,油脂等杂质,并吹干。In an optional embodiment, step S1 may further include: cleaning, using trichloroethylene, acetone, ethanol, and secondary deionized water in order to ultrasonicate the transparent electrode 2 in an ultrasonic cleaning machine for 10 minutes to remove dust on the surface of the substrate , grease and other impurities, and blow dry.

在一可选实施例中,步骤S1中提拉可以包括:在清洗后的所述透明电极2上将二氧化钛溶胶和嵌段共聚物PEO20-PPO70-PPO20搅拌均匀,在清洗后的所述透明电极2表面形成一层氧化钛薄膜。In an optional embodiment, the pulling in step S1 may include: stirring the titanium dioxide sol and the block copolymer PEO20-PPO70-PPO20 on the cleaned transparent electrode 2 evenly, 2 A layer of titanium oxide film is formed on the surface.

在一可选实施例中,所述吹干采用空气,通过空气压缩机进行吹干。In an optional embodiment, the drying adopts air, and the drying is performed by an air compressor.

在一可选实施例中,所述吹干采用氮气。In an optional embodiment, nitrogen gas is used for the blow-drying.

S2、将所述带有多孔氧化钛薄膜的透明电极2在紫外光照射下浸渍于0.1mol/L硝酸银溶液中沉积银纳米颗粒31,制得带有光电忆阻层3的透明电极2。S2. The transparent electrode 2 with the porous titanium oxide film is immersed in a 0.1 mol/L silver nitrate solution under ultraviolet light irradiation to deposit silver nanoparticles 31 to prepare a transparent electrode 2 with a photomemristive layer 3 .

在一可选实施例中,步骤S2中紫外光照射的紫外光的波长为365nm,光照时间为15分钟。In an optional embodiment, the wavelength of the ultraviolet light irradiated by the ultraviolet light in step S2 is 365 nm, and the illumination time is 15 minutes.

在一可选实施例中,步骤S2中在紫外光照射下浸渍于0.1mol/L硝酸银溶液中沉积银纳米颗粒31还原结束后用去离子水冲洗并吹干,得到带有光电忆阻层3的透明电极2。In an optional embodiment, in step S2, the silver nanoparticles 31 are immersed in a 0.1 mol/L silver nitrate solution under ultraviolet light irradiation to deposit silver nanoparticles 31, and after the reduction is completed, the silver nanoparticles 31 are rinsed with deionized water and dried to obtain a photoelectric memristive layer. 3 transparent electrodes 2.

S3、在所述带有光电忆阻层3的透明电极2远离所述透明电极2的一侧沉积惰性电极1,制得光控人工突触器件。S3, depositing an inert electrode 1 on the side of the transparent electrode 2 with the photo-memristive layer 3 away from the transparent electrode 2 to prepare a photo-controlled artificial synapse device.

在一可选实施例中,步骤S3中的沉积惰性电极1采用热蒸发或溅射工艺。In an optional embodiment, the deposition of the passive electrode 1 in step S3 adopts a thermal evaporation or sputtering process.

在一可选实施例中,步骤S3中沉积惰性电极1所用金属掩模版孔径为100-500μm,电极厚度为100±20nm。In an optional embodiment, the aperture diameter of the metal mask used for depositing the passive electrode 1 in step S3 is 100-500 μm, and the electrode thickness is 100±20 nm.

本发明光控人工突触器件的制备方法中,借助紫外光在多孔氧化钛薄膜中沉积的银颗粒具有光致氧化还原特性。在可见光作用下,银纳米颗粒发生等离子体共振,银原子被氧化成银离子;在紫外光作用下,氧化钛价带中的电子被激发将银离子还原成银原子。其中,银/氧化钛薄膜的厚度为900±50nm,薄膜中银颗粒为球形且直径为11±4nm。In the preparation method of the light-controlled artificial synapse device of the present invention, the silver particles deposited in the porous titanium oxide film by means of ultraviolet light have photo-induced redox properties. Under the action of visible light, silver nanoparticles undergo plasmon resonance, and silver atoms are oxidized into silver ions; under the action of ultraviolet light, electrons in the valence band of titanium oxide are excited to reduce silver ions into silver atoms. Among them, the thickness of the silver/titanium oxide film is 900±50 nm, and the silver particles in the film are spherical and have a diameter of 11±4 nm.

图3是根据本发明一实施方式的光控人工突触器件经过紫外光照射后的电流-电压曲线图。FIG. 3 is a current-voltage curve diagram of the light-controlled artificial synapse device after being irradiated with ultraviolet light according to an embodiment of the present invention.

图4是根据本发明一实施方式的光控人工突触器件经过可见光照射后的电流-电压曲线图。FIG. 4 is a current-voltage curve diagram of the light-controlled artificial synapse device after being irradiated with visible light according to an embodiment of the present invention.

电学测试:图3和图4显示了经过紫外光(365nm)和可见光(500-720nm)照射后光控人工突触器件的忆阻特性(电流-电压)。Electrical test: Figures 3 and 4 show the memristive properties (current-voltage) of the light-controlled artificial synapse device after irradiation with ultraviolet light (365 nm) and visible light (500-720 nm).

如图3所示,对于经过15分钟紫外光照射的器件,正负电压扫描都不会使器件的电导发生变化,且在连续的正向或负向电压扫描下,器件电导没有规律的变化趋势。As shown in Figure 3, for the device irradiated by ultraviolet light for 15 minutes, the conductance of the device will not change with positive and negative voltage sweeps, and the conductance of the device does not change regularly under continuous positive or negative voltage sweeps. .

如图4所示,对于经过15分钟可见光照射的光控人工突触器件,在相同的电压扫描下出现了电阻连续变化的阻变行为。在连续的正电压扫描下,器件电导不断上升;在连续的负电压扫描下,器件电导不断下降。As shown in Fig. 4, for the light-controlled artificial synapse device irradiated with visible light for 15 minutes, the resistive-switching behavior with continuous resistance change appeared under the same voltage sweep. Under the continuous positive voltage sweep, the device conductance kept rising; under the continuous negative voltage sweep, the device conductance kept decreasing.

图5是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后电学脉冲刺激的电导变化图。FIG. 5 is a graph of the conductance change of the light-controlled artificial synapse device after being irradiated with ultraviolet light and visible light by electrical pulse stimulation according to an embodiment of the present invention.

图5显示了光控人工突触器件依次经过可见光(500-720nm)和紫外光(365nm)调节后,在特定电信号刺激下的响应。初始器件(即经过紫外光还原后的光控人工突触器件)在五个连续电脉冲(0.5V,100μs)刺激下电导没有明显变化。经过可见光照射后在相同电脉冲刺激下,器件电导出现了明显的上升,且脉冲之间有明显的易化现象,脉冲结束后弛豫过程较长并最终稳定在一个电导较高的状态。器件再次经过紫外光照射后,在相同脉冲刺激下,响应幅值变小,并在脉冲刺激结束后快速回到初始状态。Figure 5 shows the response of the light-controlled artificial synapse device to specific electrical signal stimulation after being sequentially modulated by visible light (500-720 nm) and ultraviolet light (365 nm). The initial device (ie, the photo-controlled artificial synapse device after UV reduction) did not change significantly in conductance under five consecutive electrical pulses (0.5 V, 100 μs). After being irradiated with visible light and stimulated by the same electrical pulse, the conductance of the device increased significantly, and there was an obvious facilitation phenomenon between the pulses. After the device was irradiated with ultraviolet light again, under the same pulse stimulation, the response amplitude became smaller, and quickly returned to the initial state after the pulse stimulation.

图6是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后的对脉冲易化功能图。FIG. 6 is a functional diagram of the facilitation of pulses after the light-controlled artificial synapse device is irradiated with ultraviolet light and visible light according to an embodiment of the present invention.

图6显示了光控人工突触器件在初始状态及5/10/15分钟可见光照射后的对脉冲易化现象。相同条件下,可见光照射时间越长,相邻脉冲之间的易化效果越明显,即PPF变化量越大。Figure 6 shows the pulse facilitation phenomenon of the light-controlled artificial synapse device in the initial state and after 5/10/15 minutes of visible light irradiation. Under the same conditions, the longer the visible light irradiation time, the more obvious the facilitation effect between adjacent pulses, that is, the greater the change in PPF.

图7是根据本发明一实施方式的光控人工突触器件经过紫外光、可见光照射后的STDP功能图。FIG. 7 is a functional diagram of STDP after the light-controlled artificial synapse device is irradiated with ultraviolet light and visible light according to an embodiment of the present invention.

图7给出了光控人工突触器件模拟脉冲时间依赖突触可塑性(STDP)学习规则的结果,光控人工突触器件的突触权重变化(ΔW)和脉冲刺激时序(Δt)之间呈指数的关系。增强/抑制效果随着时间差的减小而增大。且在相同条件下,可见光照射照射时间越长,突触权重变化越明显。Figure 7 presents the results of simulating the learning rule of pulse time-dependent synaptic plasticity (STDP) in the light-controlled artificial synapse device. index relationship. The enhancement/suppression effect increases as the time difference decreases. And under the same conditions, the longer the visible light irradiation time, the more obvious the synaptic weight change.

STDP为Spike Timing Dependnt Plasticity的缩写,依据时序放电的(突触器件)可塑性,或者时序相依可塑性,是实验生物学发现的突触学习规则之一。STDP is the abbreviation of Spike Timing Dependnt Plasticity. (Synaptic device) plasticity based on sequential discharge, or timing dependent plasticity, is one of the synaptic learning rules discovered in experimental biology.

本发明旨在保护一种光控人工突触器件及其制备方法,其光控人工突触器件包括:惰性电极1;透明电极2;光电忆阻层3,所述光电忆阻层3设置在所述透明电极2与所述惰性电极1之间,其用于模拟突触。本发明的光控人工突触器件可以在惰性电极施加正电压,透明电极接地,光电忆阻层在电场作用下形成导电通道,电导上升,在紫外光和可见光的调控下实现光门控的可逆激活/抑制。本发明的光控人工突触器件为两端结构,结构简单,器件尺寸可降至纳米量级,功耗小,借助于可见/紫外光信号能够实现对电导变化范围的可逆调节,为实现光电类脑计算系统提供了器件基础。由于可以基于常见材料复合实现光、电、温度、湿度的多维度调节,在未来的新型光电材料领域有着良好应用前景。The present invention aims to protect a light-controlled artificial synapse device and a preparation method thereof. The light-controlled artificial synapse device comprises: an inert electrode 1; a transparent electrode 2; Between the transparent electrode 2 and the inert electrode 1, it is used to simulate a synapse. The light-controlled artificial synapse device of the present invention can apply a positive voltage to the inert electrode, the transparent electrode is grounded, the photoelectric memristive layer forms a conductive channel under the action of the electric field, the conductance rises, and the reversible light-gating control is realized under the control of ultraviolet light and visible light. activate/inhibit. The light-controlled artificial synapse device of the present invention has a two-terminal structure, the structure is simple, the size of the device can be reduced to the nanometer level, the power consumption is small, and the reversible adjustment of the conductance variation range can be realized by means of the visible/ultraviolet light signal. Brain-like computing systems provide the device foundation. Since the multi-dimensional adjustment of light, electricity, temperature, and humidity can be realized based on the composite of common materials, it has a good application prospect in the field of new optoelectronic materials in the future.

应当理解的是,本发明的上述具体实施方式仅仅用于示例性说明或解释本发明的原理,而不构成对本发明的限制。因此,在不偏离本发明的精神和范围的情况下所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。此外,本发明所附权利要求旨在涵盖落入所附权利要求范围和边界、或者这种范围和边界的等同形式内的全部变化和修改例。It should be understood that the above-mentioned specific embodiments of the present invention are only used to illustrate or explain the principle of the present invention, but not to limit the present invention. Therefore, any modifications, equivalent replacements, improvements, etc. made without departing from the spirit and scope of the present invention should be included within the protection scope of the present invention. Furthermore, the appended claims of this invention are intended to cover all changes and modifications that fall within the scope and boundaries of the appended claims, or the equivalents of such scope and boundaries.

Claims (9)

1.一种光控人工突触器件,其特征在于,包括:1. a light-controlled artificial synapse device, is characterized in that, comprises: 惰性电极(1);inert electrode (1); 透明电极(2);transparent electrode (2); 光电忆阻层(3),所述光电忆阻层(3)设置在所述透明电极(2)与所述惰性电极(1)之间,其用于模拟突触。A photo memristive layer (3), the photo memristive layer (3) is arranged between the transparent electrode (2) and the inert electrode (1), which is used for simulating a synapse. 2.根据权利要求1所述的光控人工突触器件,其特征在于,2. The light-controlled artificial synapse device according to claim 1, characterized in that, 所述光电忆阻层(3)为多孔氧化钛掺杂银纳米颗粒复合薄膜。The photo-memristive layer (3) is a porous titanium oxide-doped silver nanoparticle composite film. 3.根据权利要求4所述的光控人工突触器件,其特征在于,3. The light-controlled artificial synapse device according to claim 4, wherein 所述惰性电极(1)的厚度为100±20nm;The thickness of the inert electrode (1) is 100±20nm; 所述光电忆阻层(3)的厚度为900±50nm。The thickness of the photo-memristive layer (3) is 900±50 nm. 4.根据权利要求2所述的光控人工突触器件,其特征在于,4. The light-controlled artificial synapse device according to claim 2, wherein 所述光电忆阻层(3)中的银纳米颗粒(31)为球型,且直径为11±4nm。The silver nanoparticles (31) in the photoelectric memristive layer (3) are spherical and have a diameter of 11±4 nm. 5.一种光控人工突触器件的制备方法,其特征在于,包括:5. A preparation method of a light-controlled artificial synapse device, characterized in that, comprising: S1、在透明电极(2)上使用提拉法制得带有多孔氧化钛薄膜的透明电极(2);S1, using the pulling method on the transparent electrode (2) to obtain a transparent electrode (2) with a porous titanium oxide film; S2、将所述带有多孔氧化钛薄膜的透明电极(2)在紫外光照射下浸渍于0.1mol/L硝酸银溶液中沉积银纳米颗粒(31),制得带有光电忆阻层(3)的透明电极(2);S2. The transparent electrode (2) with the porous titanium oxide film is immersed in a 0.1 mol/L silver nitrate solution under ultraviolet light irradiation to deposit silver nanoparticles (31) to obtain a photomemristive layer (3). ) of the transparent electrode (2); S3、在所述带有光电忆阻层(3)的透明电极(2)远离所述透明电极(2)的一侧沉积惰性电极(1),制得光控人工突触器件。S3, depositing an inert electrode (1) on the side of the transparent electrode (2) with the photoelectric memristive layer (3) away from the transparent electrode (2) to prepare a photo-controlled artificial synapse device. 6.根据权利要求5所述的光控人工突触器件的制备方法,其特征在于,6. The preparation method of the light-controlled artificial synapse device according to claim 5, wherein, 步骤S3中的沉积惰性电极(1)采用热蒸发或溅射工艺。The deposition of the inert electrode (1) in step S3 adopts a thermal evaporation or sputtering process. 7.根据权利要求5所述的光控人工突触器件的制备方法,其特征在于,步骤S1中提拉后还包括:7. The method for preparing a light-controlled artificial synapse device according to claim 5, characterized in that, after pulling in step S1, the method further comprises: 退火,退火温度为450-500℃。Annealing, the annealing temperature is 450-500 ℃. 8.根据权利要求5所述的光控人工突触器件的制备方法,其特征在于,8. The preparation method of the light-controlled artificial synapse device according to claim 5, wherein, 步骤S2中紫外光照射的紫外光的波长为365nm,光照时间为15分钟。In step S2, the wavelength of the ultraviolet light irradiated by the ultraviolet light is 365 nm, and the irradiation time is 15 minutes. 9.根据权利要求5所述的光控人工突触器件的制备方法,其特征在于,9. The preparation method of the light-controlled artificial synapse device according to claim 5, wherein, 步骤S3中沉积惰性电极(1)所用金属掩模版孔径为100-500μm,电极厚度为100±20nm。In step S3, the diameter of the metal mask used for depositing the inert electrode (1) is 100-500 μm, and the thickness of the electrode is 100±20 nm.
CN202110327791.9A 2021-03-26 2021-03-26 A light-controlled artificial synaptic device and preparation method thereof Active CN115132919B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110327791.9A CN115132919B (en) 2021-03-26 2021-03-26 A light-controlled artificial synaptic device and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110327791.9A CN115132919B (en) 2021-03-26 2021-03-26 A light-controlled artificial synaptic device and preparation method thereof

Publications (2)

Publication Number Publication Date
CN115132919A true CN115132919A (en) 2022-09-30
CN115132919B CN115132919B (en) 2025-04-29

Family

ID=83374688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110327791.9A Active CN115132919B (en) 2021-03-26 2021-03-26 A light-controlled artificial synaptic device and preparation method thereof

Country Status (1)

Country Link
CN (1) CN115132919B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114464732A (en) * 2022-01-25 2022-05-10 东北师范大学 Full-optical-control memristor with double-layer thin film structure and preparation method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110242873A1 (en) * 2010-03-31 2011-10-06 Bratkovski Alexandre M Photo-Responsive Memory Resistor and Method of Operation
US20130187116A1 (en) * 2012-01-19 2013-07-25 Globalfoundries Singapore Pte Ltd RRAM Device With Free-Forming Conductive Filament(s), and Methods of Making Same
RU159146U1 (en) * 2015-08-18 2016-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Иркутский государственный университет" MEMORISTOR SWITCH
CN109326711A (en) * 2018-08-10 2019-02-12 厦门大学 A metal nanocluster doped memristor and preparation method thereof
US20190244088A1 (en) * 2018-02-08 2019-08-08 University Of Massachusetts Artificial Neurons Using Diffusive Memristor
CN111069624A (en) * 2019-12-30 2020-04-28 东北师范大学 Preparation method and application of a polarization-sensitive and ultraviolet-resistant silver nanostructure
CN111525027A (en) * 2020-03-02 2020-08-11 中国科学院宁波材料技术与工程研究所 A method for reversibly regulating the conductance of memristors using optical signals

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110242873A1 (en) * 2010-03-31 2011-10-06 Bratkovski Alexandre M Photo-Responsive Memory Resistor and Method of Operation
US20130187116A1 (en) * 2012-01-19 2013-07-25 Globalfoundries Singapore Pte Ltd RRAM Device With Free-Forming Conductive Filament(s), and Methods of Making Same
RU159146U1 (en) * 2015-08-18 2016-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Иркутский государственный университет" MEMORISTOR SWITCH
US20190244088A1 (en) * 2018-02-08 2019-08-08 University Of Massachusetts Artificial Neurons Using Diffusive Memristor
CN109326711A (en) * 2018-08-10 2019-02-12 厦门大学 A metal nanocluster doped memristor and preparation method thereof
CN111069624A (en) * 2019-12-30 2020-04-28 东北师范大学 Preparation method and application of a polarization-sensitive and ultraviolet-resistant silver nanostructure
CN111525027A (en) * 2020-03-02 2020-08-11 中国科学院宁波材料技术与工程研究所 A method for reversibly regulating the conductance of memristors using optical signals

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ZHAO J, LIU S, ET AL.: "Memristor with Ag‐cluster‐doped TiO2 films as artificial synapse for neuroinspired computing", 《ADVANCED FUNCTIONAL MATERIALS》, vol. 28, 24 November 2017 (2017-11-24), pages 1 - 2 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114464732A (en) * 2022-01-25 2022-05-10 东北师范大学 Full-optical-control memristor with double-layer thin film structure and preparation method thereof

Also Published As

Publication number Publication date
CN115132919B (en) 2025-04-29

Similar Documents

Publication Publication Date Title
Wang et al. Flexible ZnO nanosheet‐based artificial synapses prepared by low‐temperature process for high recognition accuracy neuromorphic computing
Pei et al. A carbon-based memristor design for associative learning activities and neuromorphic computing
CN112599664B (en) An ultra-low energy consumption flexible thin film memristor that simulates neural synapses and its preparation method
CN107579155B (en) Optical reading nerve synapse device structure based on a-Si and preparation method thereof
CN104795493A (en) Nanowire array based memristor and manufacturing method thereof
CN110739393A (en) bionic synapse devices and manufacturing method and application thereof
CN109037442B (en) SPR neural synapse device based on a-SiOx memristive effect and its preparation method
CN112687792B (en) Light-stimulated artificial synapse device at two ends and preparation method and application thereof
CN114899312B (en) Graphene oxide memristor based on laminated structure and preparation method thereof
CN112436092A (en) Double-end photoelectric artificial synapse device and preparation method and application thereof
Liu et al. Self-Assembled VO2 mesh film-based resistance switches with high transparency and abrupt ON/OFF Ratio
Fu et al. Bend‐Resistant and Energy‐Friendly GO‐PVA/PVA Polymer Electret Synaptic Transistors for Neuromorphic Computations
CN113451423B (en) Heterojunction photoelectric synapse device based on plasmon effect
Fang et al. Two-terminal photoelectric dual modulation synaptic devices for face recognition
CN109449289B (en) Light-excited nerve synapse bionic memristor and preparation method thereof
CN109585650B (en) Glial cell-like neuromorphic device and preparation method thereof
CN115132919A (en) Light-operated artificial synapse device and preparation method thereof
Fiter et al. Optimization of power conversion efficiency of BaTiO3 as a compact layer in DSSC using response surface methodology/Box-Behnken design
CN110289350B (en) Metal porphyrin heterojunction-based memristor and preparation method and application thereof
Kim et al. Realization of High Mobility Synaptic Transistor through Control of Cross‐Linking Agent in a Polymer Dielectric Layer for Emerging Electric Double Layer
CN112864164B (en) Three-terminal artificial optical synapse and preparation method thereof
CN118829239A (en) An inorganic-organic hybrid nanofilm photoelectric device simulating neural synapses and a preparation method thereof
CN114464732A (en) Full-optical-control memristor with double-layer thin film structure and preparation method thereof
CN115623860B (en) A memristor based on silicon carbide nanowires and a method for preparing the same
CN114613907B (en) A conductive polymer-based bionic memristor and a preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant