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CN115285946B - Ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation and power generation device - Google Patents

Ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation and power generation device Download PDF

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CN115285946B
CN115285946B CN202111074461.XA CN202111074461A CN115285946B CN 115285946 B CN115285946 B CN 115285946B CN 202111074461 A CN202111074461 A CN 202111074461A CN 115285946 B CN115285946 B CN 115285946B
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郑直
雷岩
邢程程
齐瑞娟
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Abstract

The invention relates to an ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation and a power generation device. The flexible substrate is a flexible film, and Ag 2 Se with a (201) crystal face as a dominant growth crystal face and penetrating columnar crystals is grown on the flexible substrate. The invention prepares the uniform silver selenide film with (201) dominant crystal plane orientation and excellent crystallinity quickly and controllably through the room temperature selenization reaction for the first time, the film power factor and the thermoelectric figure of merit can respectively reach the ultra-high value of 2590 mu W m ‑1K‑2 and 1.2, and the film is used as a thermoelectric arm for the first time to assemble a series of flexible film thermoelectric power generation devices, the power density of the devices reaches the ultra-high performance of 27.6+/-1.95 W.m ‑2 (30K temperature difference) and 124+/-8.78 W.m ‑2 (60K temperature difference) under the room temperature working condition, and the invention has wide commercialized application prospect.

Description

一种具有(201)优势晶面取向的超高性能柔性硒化银薄膜及 发电器件An ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation and a power generation device

技术领域Technical Field

本发明属于热电材料与发电器件领域,尤其涉及一种的具有(201)优势晶面取向的超高性能柔性硒化银薄膜薄膜及热电发电器件。The present invention belongs to the field of thermoelectric materials and power generation devices, and in particular relates to an ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation and a thermoelectric power generation device.

背景技术Background technique

能源利用是人类保持可持续发展的不竭动力。可穿戴设备可以让人类成为物联网(IoT)的一部分并显示出巨大的商业化前景。但由于各种电池的寿命有限,持续为可穿戴或嵌入式设备供电正面临巨大挑战。作为一种新兴的能量收集工具,热电发电器(TEG)以独特的方式将热量转化为电能,正成为实现这一目标的最佳选择。相关半导体材料或实际发电器件的zT值、PF(功率因子)和MOPD(最大输出功率密度)等几个指标从不同方面反映了不同微观结构材料对热电性能的影响。根据众所周知的公式(PF=S2σ和zT=S2σTκ-1),理想的情况是获得更高的S(塞贝克系数)和σ(电导率),但同时保持低的κ(热导率)。然而在实际应用中同时优化这些因素非常困难,因为作为分子的S和作为分母的κ这两个关键因素往往会朝着同一个方向改变。更糟糕的是,作为公式中平方项的塞贝克系数变化趋势与载流子迁移率相反,而这是另一个正向影响σ的关键因素。尽管这样,寻求新材料以及更加高效制备策略的努力从未停止。Energy utilization is an inexhaustible driving force for human beings to maintain sustainable development. Wearable devices can make humans part of the Internet of Things (IoT) and show great commercial prospects. However, due to the limited life of various batteries, it is facing great challenges to continuously power wearable or embedded devices. As an emerging energy harvesting tool, thermoelectric generators (TEGs) convert heat into electrical energy in a unique way and are becoming the best choice to achieve this goal. Several indicators such as the zT value, PF (power factor) and MOPD (maximum output power density) of related semiconductor materials or actual power generation devices reflect the influence of different microstructure materials on thermoelectric performance from different aspects. According to the well-known formula (PF = S 2 σ and zT = S 2 σTκ -1 ), the ideal situation is to obtain higher S (Seebeck coefficient) and σ (conductivity), but keep low κ (thermal conductivity) at the same time. However, it is very difficult to optimize these factors simultaneously in practical applications because the two key factors, S as the numerator and κ as the denominator, often change in the same direction. Worse still, the Seebeck coefficient, which is the square term in the formula, changes in the opposite direction to the carrier mobility, which is another key factor that positively affects σ. Despite this, efforts to find new materials and more efficient preparation strategies have never stopped.

在过去几十年中,人们已经探索了许多传统块状硫族化物化合物来满足高zT值的要求,例如Bi2Te3、Bi2Se2、Bi0.5Sb1.5Te3、TiS2和Sb2Se2等,以实现在室温附近进行热电转换的任务,其中Bi2Te3等一些化合物已经用于商业化产品。考虑到块体材料的刚性特性限制了它们在F-TEG(柔性热电发电器)中的进一步应用,薄膜硫族化物以其高热电转换性能和柔性为未来人工智能和可穿戴设备指明了前景。显然,未来柔性可穿戴设备最理想的状态是在室温下工作。I-VI族(尤其是Ag-Se基)化合物是最近才出现的很有前途的一类硫族化物,在室温下作为柔性TEGs表现出了显著优势并受到极大关注。例如,n型窄带隙半导体β-Ag2Se(Eg=~0.04-0.2eV)因其优异的室温热电性能及良好的柔性被认为是有希望的F-TEG,特别是具有2:1Ag/Se摩尔化学计量比的Ag2Se已被几个研究小组证明在各种Ag-Se比例中表现出最佳性能。In the past few decades, many traditional bulk chalcogenide compounds have been explored to meet the requirements of high zT values, such as Bi 2 Te 3 , Bi 2 Se 2 , Bi 0.5 Sb 1.5 Te 3 , TiS 2 and Sb 2 Se 2 , etc., to achieve the task of thermoelectric conversion near room temperature, among which some compounds such as Bi 2 Te 3 have been used in commercial products. Considering that the rigid properties of bulk materials limit their further application in F-TEGs (flexible thermoelectric generators), thin film chalcogenides have pointed out the prospects for future artificial intelligence and wearable devices with their high thermoelectric conversion performance and flexibility. Obviously, the most ideal state for future flexible wearable devices is to work at room temperature. Group I-VI (especially Ag-Se-based) compounds are a promising class of chalcogenides that have emerged recently, showing significant advantages as flexible TEGs at room temperature and have received great attention. For example, the n-type narrow bandgap semiconductor β-Ag 2 Se (Eg = ∼0.04-0.2 eV) is considered a promising F-TEG due to its excellent room-temperature thermoelectric performance and good flexibility. In particular, Ag 2 Se with a 2:1 Ag/Se molar stoichiometry has been demonstrated by several research groups to exhibit the best performance among various Ag-Se ratios.

现有技术报道有通过单质银和硒在1000℃(10-4Torr)下直接反应10小时获得的多晶Ag2Se块状材料。另外,Cai及同事在Nature Communications报道了一种200℃和24MPa下热压制备的Ag2Se F-TEG(膜厚约10μm),具有约987.4μW m-1K-2的较高功率因子,在300K时估计zT为0.6,并通过Cu/AgCuSe掺入进一步将PF值提高到2231.5μW m-1K-2。但几乎全部现有报道的硒化策略不可避免地需要经过相对较高的温度(>130℃,从α相到β相的相变温度),或者需要高压或真空条件,这些也均不利于Ag2Se材料的进一步商业化推广。除此,如果可进一步降低薄膜厚度不仅可以降低成本,将有利于薄膜产品的柔韧性。Prior art reports have reported polycrystalline Ag 2 Se bulk materials obtained by direct reaction of elemental silver and selenium at 1000°C (10 -4 Torr) for 10 hours. In addition, Cai and colleagues reported in Nature Communications a Ag 2 Se F-TEG (film thickness of about 10 μm) prepared by hot pressing at 200°C and 24 MPa, with a high power factor of about 987.4 μW m -1 K -2 , an estimated zT of 0.6 at 300K, and the PF value was further increased to 2231.5 μW m -1 K -2 by Cu/AgCuSe incorporation. However, almost all the selenization strategies reported so far inevitably require relatively high temperatures (>130°C, the phase transition temperature from α phase to β phase), or high pressure or vacuum conditions, which are also not conducive to the further commercialization of Ag 2 Se materials. In addition, if the film thickness can be further reduced, it will not only reduce the cost, but also be beneficial to the flexibility of the film product.

本课题组在2013年申请了申请号为201310090546.6,发明名称为:一种室温下原位合成Ag2Se半导体光电薄膜材料的化学方法的发明专利,将单质Se粉溶解在Na2S的水溶液中形成橙黄色溶液,然后将表面溅射有一定厚度单质银膜的基底材料和上述溶液共置于同一容器中,先加入溶液后放入基底材料,并保证这些基底材料浸泡于液面以下,在7~35℃的温度范围内反应,根据实际情况反应不同时间(不同条件下,反应时间在1.5min~3h内变化),反应完成后即可在基底表面原位制备出银灰色Ag2Se半导体光电薄膜材料,所得产物用去离子水洗涤,80℃干燥。In 2013, our research group applied for an invention patent with application number 201310090546.6, and the invention name is: a chemical method for in-situ synthesis of Ag 2 Se semiconductor photoelectric thin film materials at room temperature. The elemental Se powder is dissolved in an aqueous solution of Na 2 S to form an orange-yellow solution, and then a substrate material with a certain thickness of elemental silver film sputtered on the surface and the above solution are placed in the same container. The solution is added first and then the substrate material is added, and it is ensured that these substrate materials are immersed below the liquid surface. The reaction is carried out in the temperature range of 7 to 35°C, and the reaction time varies according to the actual situation (under different conditions, the reaction time varies within 1.5min to 3h). After the reaction is completed, a silver-gray Ag 2 Se semiconductor photoelectric thin film material can be prepared in situ on the substrate surface. The obtained product is washed with deionized water and dried at 80°C.

本申请中,申请人经过大量实验,对硒化反应条件多方面进行调控,实现了具有(201)优势晶面取向、结晶性优良的均匀硒化银薄膜的可控制备,以此薄膜直接作为热电臂,原位制备的系列柔性薄膜热电发电器件,室温工作条件下器件功率密度达到27.6±1.95W·m-2(30K温差)和124±8.78W·m-2(30K温差)的超高性能,具有广阔的商业化应用前景。In the present application, the applicant has conducted a large number of experiments and regulated the selenization reaction conditions in many aspects, and achieved the controllable preparation of a uniform silver selenide film with (201) dominant crystal plane orientation and excellent crystallinity. This film is directly used as a thermoelectric arm to prepare a series of flexible thin-film thermoelectric power generation devices in situ. The device power density reaches 27.6±1.95W·m -2 (30K temperature difference) and 124±8.78W·m -2 (30K temperature difference) under room temperature working conditions. Ultra-high performance, it has broad prospects for commercial applications.

发明内容:Summary of the invention:

本发明所要解决的技术问题是:针对现有技术的不足,提供一种具有(201)优势晶面取向的超高性能柔性硒化银薄膜及发电器件。The technical problem to be solved by the present invention is: in view of the shortcomings of the prior art, an ultra-high performance flexible silver selenide film and a power generation device with a (201) dominant crystal plane orientation are provided.

本发明对要解决的问题所采取的技术方案是:The technical solution adopted by the present invention for the problem to be solved is:

提供一种具有(201)优势晶面取向的超高性能柔性硒化银薄膜,其为柔性薄膜,柔性基底上生长有(201)晶面为优势生长晶面、柱状晶体贯穿的Ag2Se。Provided is an ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation. The film is a flexible film on which Ag 2 Se with (201) crystal plane as the dominant growth crystal plane and columnar crystals running through it is grown on a flexible substrate.

按上述方案,柔性硒化银薄膜厚度为600-1400nm,表面均匀,且结晶性优良。According to the above scheme, the thickness of the flexible silver selenide film is 600-1400nm, the surface is uniform, and the crystallinity is excellent.

提供一种上述基于银单质薄膜原位大面积控制合成具有(201)优势晶面取向的超高性能柔性硒化银薄膜的方法,将单质Se粉溶解在Na2S的水溶液中形成深红色溶液,然后将银厚度为250~450nm的单质银薄膜浸入到该溶液中,反应合成具有(201)优势晶面取向的超高性能柔性硒化银薄膜。A method for in-situ large-area controlled synthesis of an ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation based on a single silver film is provided, wherein single Se powder is dissolved in an aqueous solution of Na2S to form a deep red solution, and then a single silver film with a silver thickness of 250 to 450 nm is immersed in the solution to react and synthesize an ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation.

按上述方案,所述的单质银薄膜采用柔性基底。According to the above scheme, the single-element silver film adopts a flexible substrate.

上述方案中,所使用的银单质薄膜成膜方法为直流磁控溅射或银镜反应湿化学方法。In the above scheme, the silver thin film forming method used is DC magnetron sputtering or silver mirror reaction wet chemical method.

上述方案中,所述的基底材料为柔性PI(聚酰亚胺)。In the above solution, the substrate material is flexible PI (polyimide).

上述方案中,Se源过量。In the above scheme, the Se source is in excess.

上述方案中,所述硫化钠/Se粉水溶液中的Se/S摩尔比为1:1-2:1。In the above scheme, the molar ratio of Se/S in the sodium sulfide/Se powder aqueous solution is 1:1-2:1.

上述方案中,所述的反应温度在20~40℃范围内选取;反应时间为15秒-60秒。In the above scheme, the reaction temperature is selected in the range of 20-40°C; the reaction time is 15 seconds to 60 seconds.

按上述方案,反应完成后,利用去离子水清洗,自然晾干即可,得到的硒化银薄膜样品为灰黑色。According to the above scheme, after the reaction is completed, it is washed with deionized water and dried naturally. The obtained silver selenide film sample is gray-black.

提供上述具有(201)优势晶面取向的超高性能柔性硒化银薄膜作为热电发电器件的应用。Provided is the application of the ultra-high performance flexible silver selenide film with (201) dominant crystal plane orientation as a thermoelectric power generation device.

提供以上述合成的柱状晶体贯穿的高取向性柔性硒化银热电薄膜直接作为热电臂制备的柔性薄膜热电发电器件。Provided is a flexible thin-film thermoelectric power generation device which is prepared by directly using the highly oriented flexible silver selenide thermoelectric film penetrated by the synthesized columnar crystals as the thermoelectric arm.

按上述方案,上述方法包括将以上制备的硒化银薄膜放入到热蒸发仪中,利用掩膜板在每一条硒化银薄膜的两端沉积金电极,直接作热电臂,制作发电器件。According to the above scheme, the above method includes placing the silver selenide film prepared above into a thermal evaporator, using a mask plate to deposit gold electrodes at both ends of each silver selenide film, directly making thermoelectric arms, and making power generation devices.

按上述方案,使用多条如4条硒化银薄膜串联,组成硒化银单臂温差发电器件。如4条硒化银薄膜上下并排放置,两端沉积金电极后,用银浆串联,一端作冷端,一端作热端,组装发电器件。According to the above scheme, multiple, for example, 4 silver selenide films are connected in series to form a silver selenide single-arm temperature difference power generation device. For example, 4 silver selenide films are placed side by side, gold electrodes are deposited at both ends, and then connected in series with silver paste, with one end as the cold end and the other end as the hot end, to assemble the power generation device.

本发明通过调控初始银单质薄膜厚度、Se含量,Se/S摩尔比等调控,以及进一步柔性基底的选择,硒化反应从单质Ag薄膜的上下两个界面同时进行,通过室温硒化反应可控制备了厚度600-1400纳米、具有(201)优势晶面取向、表面均匀且结晶性优良的灰黑色柔性硒化银薄膜。且反应迅速,有利获得结合牢固的硒化银薄膜,反应时间短,便于商业化使用。The present invention controls the thickness of the initial silver single substance film, the Se content, the Se/S molar ratio, etc., and further selects a flexible substrate, and the selenization reaction is carried out simultaneously from the upper and lower interfaces of the single substance Ag film. Through the room temperature selenization reaction, a gray-black flexible silver selenide film with a thickness of 600-1400 nanometers, a (201) dominant crystal plane orientation, a uniform surface, and excellent crystallinity can be prepared. The reaction is rapid, which is conducive to obtaining a firmly bonded silver selenide film, and the reaction time is short, which is convenient for commercial use.

本发明首次通过室温硒化反应,快速可控制备了具有(201)优势晶面取向、结晶性优良的均匀硒化银薄膜,其薄膜功率因子、热电优值可分别达到2590μW m-1K-2和1.2的超高值,并首次以此薄膜直接作为热电臂组装了系列柔性薄膜热电发电器件,室温工作条件下器件功率密度达到27.6±1.95W·m-2(30K温差)和124±8.78W·m-2(60K温差)的超高性能。该方法操作简单,无需高温、高压、锻压成型等复杂过程。低成本、低能耗,具有广阔的工业应用前景。克服了目前Ag2Se热电材料制备硒化策略需经过相对较高的温度(>130℃,从α相到β相的相变温度),反应时间较长、需要高压或真空条件的不足、且解决了晶体结晶性和趋向性差、热电性能不高的问题。The present invention is the first to rapidly and controllably prepare uniform silver selenide thin films with (201) dominant crystal plane orientation and excellent crystallinity through room temperature selenization reaction. The power factor and thermoelectric figure of merit of the film can reach ultra-high values of 2590μW m -1 K -2 and 1.2 respectively. For the first time, the film is directly used as a thermoelectric arm to assemble a series of flexible thin film thermoelectric power generation devices. The device power density reaches ultra-high performance of 27.6±1.95W·m -2 (30K temperature difference) and 124±8.78W·m -2 (60K temperature difference) under room temperature working conditions. The method is simple to operate and does not require complex processes such as high temperature, high pressure, forging and pressing. It is low-cost and low-energy, and has broad industrial application prospects. It overcomes the shortcomings of the current Ag2Se thermoelectric material preparation selenization strategy, which requires relatively high temperature (>130℃, phase transition temperature from α phase to β phase), long reaction time, and high pressure or vacuum conditions, and solves the problems of poor crystallinity and tendency and low thermoelectric performance.

本发明的优点:Advantages of the present invention:

1、硒化银薄膜具有明显(201)优势晶面取向、表面均匀且结晶性优良,与无(201)优势晶面取向相比较,热电性能(ZT值和PF值)均得到大幅提高,优化过的薄膜功率因子(PF值)、热电优值(zT)可分别达到2590μWm-1K-2和1.2的超高值。1. Silver selenide film has obvious (201) dominant crystal plane orientation, uniform surface and excellent crystallinity. Compared with the film without (201) dominant crystal plane orientation, the thermoelectric performance (ZT value and PF value) is greatly improved. The optimized film power factor (PF value) and thermoelectric figure of merit (zT) can reach ultra-high values of 2590μWm - 1K -2 and 1.2 respectively.

2、本发明的方法能够原位控制合成具有明显(201)优势晶面取向的超高性能柔性硒化银薄膜,能够很好地控制Ag2Se薄膜材料的形貌、尺寸、厚度、晶相,获得高取向性柱状晶体贯穿的晶体薄膜。2. The method of the present invention can in-situ control the synthesis of ultra-high performance flexible silver selenide thin films with obvious (201) dominant crystal plane orientation, and can well control the morphology, size, thickness, and crystal phase of the Ag 2 Se thin film material to obtain a crystal film with highly oriented columnar crystals running through it.

原位制备薄膜宏观几何形状可控,能够实现大尺寸器件制作,器件性能重复性高;The macroscopic geometry of the in-situ prepared thin film is controllable, which enables the fabrication of large-scale devices with high repeatability of device performance;

能够原位大面积控制合成;反应快速,室温水溶液反应1分钟内即可完成,操作简单,并有利于获得结合牢固的硒化银薄膜;适应工业化应用的需要,且绿色环保。The invention can control the synthesis over a large area in situ; the reaction is fast, and the reaction in room temperature aqueous solution can be completed within 1 minute; the operation is simple, and it is conducive to obtaining a firmly bonded silver selenide film; it meets the needs of industrial applications and is green and environmentally friendly.

3、基于前述柔性硒化银薄膜直接作为热电臂组装的系列柔性薄膜热电发电器件,室温工作条件下器件功率密度与无(201)优势晶面取向的硒化银制备的热电器件相比较,性能均得到大幅提高,优化器件功率密度达到27.6±1.95W·m-2(30K温差)和124±8.78W·m-2(30K温差)的超高性能。3. Based on the above-mentioned flexible silver selenide film directly used as a series of flexible thin film thermoelectric power generation devices assembled as thermoelectric arms, the device power density under room temperature working conditions is greatly improved compared with the thermoelectric devices prepared with silver selenide without (201) dominant crystal plane orientation. The optimized device power density reaches ultra-high performance of 27.6±1.95W·m -2 (30K temperature difference) and 124±8.78W·m -2 (30K temperature difference).

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1、室温原位硒化反应得到灰黑色硒化银薄膜的实物图;Figure 1 is a physical picture of a gray-black silver selenide film obtained by in-situ selenization reaction at room temperature;

图2、对比例1沉积150nm银薄膜反应得到硒化银薄膜的X-射线粉末衍射图;FIG2 is an X-ray powder diffraction diagram of a silver selenide film obtained by depositing a 150 nm silver film in Comparative Example 1;

图3-图4、对比例1得到硒化银薄膜的扫描电子显微镜表面及截面形貌图;Figures 3-4 are scanning electron microscope surface and cross-sectional morphologies of the silver selenide film obtained in Comparative Example 1;

图5、对比例1得到硒化银薄膜的最大输出功率图;FIG5 is a diagram showing the maximum output power of the silver selenide film obtained in Comparative Example 1;

图6、对比例1得到硒化银薄膜的最大输出功率密度图;FIG6 is a graph showing the maximum output power density of the silver selenide film obtained in Comparative Example 1;

图7、实施例1沉积250nm银薄膜反应得到硒化银薄膜的X-射线粉末衍射图;FIG7 is an X-ray powder diffraction diagram of a silver selenide film obtained by depositing a 250 nm silver film in Example 1;

图8-图9、实施例1得到硒化银薄膜的扫描电子显微镜图;Fig. 8-Fig. 9 are scanning electron microscope images of the silver selenide film obtained in Example 1;

图10、实施例1得到硒化银薄膜的最大输出功率图;FIG10 is a diagram showing the maximum output power of the silver selenide film obtained in Example 1;

图11、实施例1得到硒化银薄膜的最大输出功率密度图;FIG11 is a diagram showing the maximum output power density of the silver selenide film obtained in Example 1;

图12、实施例2沉积350nm银薄膜反应得到硒化银薄膜的X-射线粉末衍射图;FIG12 is an X-ray powder diffraction diagram of a silver selenide film obtained by depositing a 350 nm silver film in Example 2;

图13-图14、实施例2得到硒化银薄膜的扫描电子显微镜表面及截面形貌图;Figures 13-14 are scanning electron microscope surface and cross-sectional morphologies of the silver selenide film obtained in Example 2;

图15、实施例2得到硒化银薄膜的截面同轴透射背散射电子衍射图像;FIG15 is a cross-sectional coaxial transmission backscattered electron diffraction image of the silver selenide film obtained in Example 2;

图16、实施例2得到硒化银薄膜的最大输出功率图;FIG16 is a diagram showing the maximum output power of the silver selenide film obtained in Example 2;

图17、实施例2得到硒化银薄膜的最大输出功率密度图;FIG17 is a diagram showing the maximum output power density of the silver selenide film obtained in Example 2;

图18、实施例3沉积450nm银薄膜反应得到硒化银薄膜的X-射线粉末衍射图;FIG18 is an X-ray powder diffraction pattern of a silver selenide film obtained by depositing a 450 nm silver film in Example 3;

图19-图20、实施例3应得到硒化银薄膜的扫描电子显微镜图;Figures 19-20 are scanning electron microscope images of the silver selenide film obtained in Example 3;

图21、实施例3得到硒化银薄膜的最大输出功率图;FIG21 is a diagram showing the maximum output power of the silver selenide film obtained in Example 3;

图22、实施例3得到硒化银薄膜的最大输出功率密度图。FIG22 is a diagram showing the maximum output power density of the silver selenide film obtained in Example 3.

图23、与Ag反应(对应P-1000)的Se/Na2S水溶液自然干燥后固体粉末残留物的SEM-EDS图谱;FIG23 : SEM-EDS spectrum of the solid powder residue after the Se/Na 2 S aqueous solution reacted with Ag (corresponding to P-1000) was naturally dried;

图24、硒化银单臂温差发电机器件图。Figure 24. Device diagram of a silver selenide single-arm temperature difference generator.

具体实施方式:Detailed ways:

本发明基于银单质薄膜原位大面积控制合成了柱状晶体贯穿的高取向性柔性硒化银热电薄膜与发电器件。通过调控初始银单质薄膜厚度、基底类型、Se含量、反应时间等参数,可以使硒化反应从单质Ag薄膜上下两个界面同时进行,在PI(聚酰亚胺)基底上通过室温硒化反应快速可控制备了600-1400纳米厚度、具有(201)优势晶面取向、表面均匀且结晶性优良的灰黑色柔性硒化银薄膜,并原位制备了系列柔性薄膜热电发电器件。The present invention synthesizes a highly oriented flexible silver selenide thermoelectric film and a power generation device with columnar crystals in-situ and in large areas based on a single silver film. By adjusting the initial single silver film thickness, substrate type, Se content, reaction time and other parameters, the selenization reaction can be carried out simultaneously from the upper and lower interfaces of the single Ag film. A gray-black flexible silver selenide film with a thickness of 600-1400 nanometers, a (201) dominant crystal plane orientation, a uniform surface and excellent crystallinity is quickly and controllably prepared on a PI (polyimide) substrate through a room temperature selenization reaction, and a series of flexible thin film thermoelectric power generation devices are prepared in-situ.

进一步利用掩膜板在每一条硒化银薄膜两端沉积金电极,直接作为4个热电臂,将4条硒化银薄膜上下并排放置,用银浆串联,然后一端作冷端,一端作热端,组装成硒化银单臂温差发电器件。并控制硒化银热电臂的有效长度为14mm。控制器件两端的温差,对其实际输出性能进行评价。Further, gold electrodes were deposited at both ends of each silver selenide film using a mask plate, directly used as four thermoelectric arms, and four silver selenide films were placed side by side up and down, connected in series with silver paste, and then one end was used as the cold end and the other end as the hot end to assemble a silver selenide single-arm temperature difference power generation device. The effective length of the silver selenide thermoelectric arm was controlled to be 14mm. The temperature difference at both ends of the device was controlled to evaluate its actual output performance.

实施例1Example 1

(1)制备单质银薄膜(1) Preparation of single silver thin film

利用直流磁控溅射的方法在聚酰亚胺(PI)基底上沉积大约250nm银薄膜,溅射电流为40mA,溅射真空度为4×10-3mbar,使用膜厚监控对溅射的银薄膜厚度进行控制。溅射过程中使用掩膜版对沉积的银薄膜尺寸等进行控制,最终在PI基底表面沉积的单质银薄膜为4个平行排列的长方形。其中,每个长方形的长为16mm,宽为5mm,长方形之间的间隔为5mm。A silver film of about 250 nm was deposited on a polyimide (PI) substrate using a DC magnetron sputtering method. The sputtering current was 40 mA, the sputtering vacuum was 4×10 -3 mbar, and the thickness of the sputtered silver film was controlled using a film thickness monitor. During the sputtering process, a mask was used to control the size of the deposited silver film. Finally, the single silver film deposited on the surface of the PI substrate was 4 parallel rectangles. Each rectangle was 16 mm long and 5 mm wide, and the interval between the rectangles was 5 mm.

(2)制备硒化银薄膜及热电性能评价(2) Preparation of silver selenide thin films and evaluation of thermoelectric properties

在25℃、常压条件下,称取0.6g Na2S·9H2O加入到20mL去离子水中溶解,然后向其中加入0.2g Se粉,搅拌使其溶解,得到一深红色溶液。然后将上述制备的单质银薄膜浸入到该溶液中,反应大约20s,使银单质完全转化为硒化银。完成后,利用去离子水清洗,自然晾干即可。反应过程中可观察监测到硒化反应从单质Ag薄膜的上下两个界面同时进行,得到的硒化银薄膜样品为灰黑色,如图1所示。图7为所得样品的XRD图,其PDF卡号为:71-2410,测试结果显示制备的薄膜材料与β相硒化银高度匹配,且显示出较强的(201)晶面取向;图8和9为所得样品的SEM图,测试结果显示样品的厚度为600nm,硒化银薄膜材料是由微米级的大晶粒相互交织构成的,薄膜从微观层面观察具有较好的致密性,晶粒之间具有丰富的界面。经截面同轴透射背散射电子衍射表征,可以看出硒化银薄膜为柱状贯穿晶体。经样品XRD以及将与Ag反应的Se/Na2S水溶液自然干燥后固体粉末残留物的SEM-EDS图谱标注,得到银单质薄膜中的银完全转化,反应完全。At 25°C and normal pressure, weigh 0.6g Na 2 S·9H 2 O and add it to 20mL deionized water to dissolve, then add 0.2g Se powder and stir to dissolve it to obtain a deep red solution. Then immerse the above-prepared single silver film in the solution and react for about 20s to completely convert the silver into silver selenide. After completion, wash with deionized water and dry naturally. During the reaction, it can be observed that the selenization reaction proceeds simultaneously from the upper and lower interfaces of the single Ag film, and the obtained silver selenide film sample is gray-black, as shown in Figure 1. Figure 7 is the XRD diagram of the obtained sample, and its PDF card number is: 71-2410. The test results show that the prepared thin film material is highly matched with β-phase silver selenide and shows a strong (201) crystal plane orientation; Figures 8 and 9 are SEM images of the obtained samples. The test results show that the thickness of the sample is 600nm. The silver selenide thin film material is composed of large micron-sized grains interwoven with each other. The film has good density from a microscopic level and has abundant interfaces between the grains. Characterization by cross-sectional coaxial transmission backscattered electron diffraction shows that the silver selenide film is a columnar crystal. The sample XRD and the SEM-EDS spectrum of the solid powder residue after the Se/Na2S aqueous solution reacting with Ag is naturally dried, and the silver in the silver single substance film is completely converted and the reaction is complete.

经过测量,制备的硒化银薄膜材料在300K时塞贝克系数为-129μV/K,电导率为1440S/cm,热导率为0.74W/(m·K),功率因子为2400μW/(m·K),热电优值为大约0.97。After measurement, the prepared silver selenide thin film material has a Seebeck coefficient of -129μV/K at 300K, an electrical conductivity of 1440S/cm, a thermal conductivity of 0.74W/(m·K), a power factor of 2400μW/(m·K), and a thermoelectric figure of merit of approximately 0.97.

(2)硒化银单臂温差发电机器件组装及性能评价(2) Assembly and performance evaluation of silver selenide single-arm thermoelectric generator devices

将以上制备的硒化银薄膜放入到热蒸发仪中,利用掩膜版在每一条硒化银的两端沉积金电极,并控制硒化银热电臂的有效长度为14mm。利用室温固化的银浆将4条硒化银热电臂串联起来,组装成硒化银单臂温差发电机器件,如图24所示。控制器件两端的温差,对其实际输出性能进行评价。控制冷端温度为25℃,热端温度从35℃升至85℃,温度间隔为10℃。利用数字源表对器件的输出进行测量,如图10和图11所示,在10℃到60℃温差条件下,对应的最大输出功率分别为19.6,118,313,580.7,925和1346.8nW,对应的最大输出功率密度分别为1.66,10.05,26.56,49.28,78.5和114.29W/m2The silver selenide film prepared above was placed in a thermal evaporator, and gold electrodes were deposited at both ends of each silver selenide using a mask, and the effective length of the silver selenide thermoelectric arm was controlled to be 14 mm. Four silver selenide thermoelectric arms were connected in series using room temperature cured silver paste to assemble a silver selenide single-arm thermoelectric generator device, as shown in Figure 24. The temperature difference at both ends of the device was controlled to evaluate its actual output performance. The cold end temperature was controlled to be 25°C, and the hot end temperature was increased from 35°C to 85°C, with a temperature interval of 10°C. The output of the device was measured using a digital source meter, as shown in Figures 10 and 11. Under the temperature difference conditions of 10°C to 60°C, the corresponding maximum output powers were 19.6, 118, 313, 580.7, 925 and 1346.8 nW, respectively, and the corresponding maximum output power densities were 1.66, 10.05, 26.56, 49.28, 78.5 and 114.29 W/m 2 , respectively.

实施例2Example 2

(1)制备单质银薄膜(1) Preparation of single silver thin film

利用直流磁控溅射的方法在聚酰亚胺(PI)基底上沉积大约350nm银薄膜,溅射电流为40mA,溅射真空度为4×10-3mbar,使用膜厚监控对溅射的银薄膜厚度进行控制。溅射过程中使用掩膜版对沉积的银薄膜尺寸等进行控制,最终在PI基底表面沉积的单质银薄膜为4个平行排列的长方形。其中,每个长方形的长为16mm,宽为5mm,长方形之间的间隔为5mm。A 350nm silver film was deposited on a polyimide (PI) substrate using a DC magnetron sputtering method. The sputtering current was 40mA, the sputtering vacuum was 4×10 -3 mbar, and the thickness of the sputtered silver film was controlled using a film thickness monitor. During the sputtering process, a mask was used to control the size of the deposited silver film. Finally, the single silver film deposited on the surface of the PI substrate was 4 parallel rectangles. Each rectangle was 16mm long and 5mm wide, and the interval between the rectangles was 5mm.

(2)制备硒化银薄膜及热电性能评价(2) Preparation of silver selenide thin films and evaluation of thermoelectric properties

在25℃、常压条件下,称取0.6g Na2S·9H2O加入到20mL去离子水中溶解,然后向其中加入0.2g Se粉,搅拌使其溶解,得到一深红色溶液。然后将上述制备的单质银薄膜浸入到该溶液中,反应大约30s,使银单质完全转化为硒化银。完成后,利用去离子水清洗,自然晾干即可。得到的硒化银薄膜样品为灰黑色。图12为所得样品的XRD图,其PDF卡号为:71-2410,测试结果显示制备的薄膜材料与β相硒化银高度匹配,且显示出较强的(201)晶面取向;图13和14为所得样品的SEM图,测试结果显示样品的厚度为1000nm,硒化银薄膜材料是由微米级的大晶粒相互交织构成的,薄膜从微观层面观察具有较好的致密性,晶粒之间具有丰富的界面。图15为所得样品的截面同轴透射背散射电子衍射波段对比度图像,可以看出硒化银薄膜为柱状贯穿晶体。经样品XRD以及将与Ag反应(对应P-1000)的Se/Na2S水溶液自然干燥后固体粉末残留物的SEM-EDS图谱(如图23所示)表征,得到银单质薄膜中的银完全转化,反应完全。At 25°C and normal pressure, weigh 0.6g Na 2 S·9H 2 O and add it to 20mL deionized water to dissolve, then add 0.2g Se powder and stir to dissolve it to obtain a deep red solution. Then immerse the above-prepared single silver film in the solution and react for about 30s to completely convert the silver into silver selenide. After completion, wash it with deionized water and dry it naturally. The obtained silver selenide film sample is gray-black. Figure 12 is the XRD diagram of the obtained sample, and its PDF card number is: 71-2410. The test results show that the prepared film material is highly matched with β-phase silver selenide and shows a strong (201) crystal plane orientation; Figures 13 and 14 are SEM images of the obtained samples. The test results show that the thickness of the sample is 1000nm. The silver selenide film material is composed of large micron-sized grains interwoven with each other. The film has good density from the microscopic level and has abundant interfaces between the grains. Figure 15 is a cross-sectional coaxial transmission backscattered electron diffraction band contrast image of the obtained sample, from which it can be seen that the silver selenide film is a columnar through-crystal. Characterized by the sample XRD and the SEM-EDS spectrum of the solid powder residue after the Se/Na 2 S aqueous solution reacting with Ag (corresponding to P-1000) is naturally dried (as shown in Figure 23), the silver in the silver single substance film is completely converted and the reaction is complete.

经过测量,制备的硒化银薄膜材料在300K时塞贝克系数为-134μV/K,电导率为1440S/cm,热导率为0.66W/(m·K),功率因子为2590μW/(m·K),热电优值为大约1.2。After measurement, the prepared silver selenide thin film material has a Seebeck coefficient of -134μV/K at 300K, an electrical conductivity of 1440S/cm, a thermal conductivity of 0.66W/(m·K), a power factor of 2590μW/(m·K), and a thermoelectric figure of merit of approximately 1.2.

(3)硒化银单臂温差发电机器件组装及性能评价(3) Assembly and performance evaluation of silver selenide single-arm thermoelectric generator devices

将以上制备的硒化银薄膜放入到热蒸发仪中,利用掩膜版在每一条硒化银的两端沉积金电极,并控制硒化银热电臂的有效长度为14mm。利用室温固化的银浆将4条硒化银热电臂串联起来,组装成硒化银单臂温差发电机器件。控制器件两端的温差,对其实际输出性能进行评价。控制冷端温度为25℃,热端温度从35℃升至85℃,温度间隔为10℃。利用数字源表对器件的输出进行测量,如图16和图17所示,在10℃到60℃温差条件下,对应的最大输出功率分别为36.6,241,576,1120,1790和2580nW,对应的最大输出功率密度分别为1.75,11.5,27.6,53.5,85.6和124W/m2The silver selenide film prepared above was placed in a thermal evaporator, and gold electrodes were deposited at both ends of each silver selenide using a mask, and the effective length of the silver selenide thermoelectric arm was controlled to be 14 mm. Four silver selenide thermoelectric arms were connected in series using room temperature cured silver paste to assemble a silver selenide single-arm thermoelectric generator device. The temperature difference at both ends of the device was controlled to evaluate its actual output performance. The cold end temperature was controlled to be 25°C, and the hot end temperature was increased from 35°C to 85°C with a temperature interval of 10°C. The output of the device was measured using a digital source meter, as shown in Figures 16 and 17. Under the temperature difference conditions of 10°C to 60°C, the corresponding maximum output powers were 36.6, 241, 576, 1120, 1790 and 2580 nW, respectively, and the corresponding maximum output power densities were 1.75, 11.5, 27.6, 53.5, 85.6 and 124 W/m 2 , respectively.

实施例3Example 3

(1)制备单质银薄膜(1) Preparation of single silver thin film

利用直流磁控溅射的方法在聚酰亚胺(PI)基底上沉积大约450nm银薄膜,溅射电流为40mA,溅射真空度为4×10-3mbar,使用膜厚监控对溅射的银薄膜厚度进行控制。溅射过程中使用掩膜版对沉积的银薄膜尺寸等进行控制,最终在PI基底表面沉积的单质银薄膜为4个平行排列的长方形。其中,每个长方形的长为16mm,宽为5mm,长方形之间的间隔为5mm。A silver film of about 450nm was deposited on a polyimide (PI) substrate by direct current magnetron sputtering, with a sputtering current of 40mA and a sputtering vacuum of 4×10 -3 mbar. The thickness of the sputtered silver film was controlled by film thickness monitoring. During the sputtering process, a mask was used to control the size of the deposited silver film. Finally, the single silver film deposited on the surface of the PI substrate was 4 parallel rectangles. Each rectangle was 16mm long and 5mm wide, and the interval between the rectangles was 5mm.

(2)制备硒化银薄膜及热电性能评价(2) Preparation of silver selenide thin films and evaluation of thermoelectric properties

在25℃、常压条件下,称取0.6g Na2S·9H2O加入到20mL去离子水中溶解,然后向其中加入0.2g Se粉,搅拌使其溶解,得到一深红色溶液。然后将上述制备的单质银薄膜浸入到该溶液中,反应大约40s,使银单质完全转化为硒化银。完成后,利用去离子水清洗,自然晾干即可。得到的硒化银薄膜样品为灰黑色。图18为所得样品的XRD图,其PDF卡号为:71-2410,测试结果显示制备的薄膜材料与β相硒化银高度匹配,且显示出较强的(201)晶面取向;图19和20为所得样品的SEM图,测试结果显示样品的厚度为1400nm,硒化银薄膜材料是由微米级的大晶粒相互交织构成的,薄膜从微观层面观察具有较好的致密性,晶粒之间具有丰富的界面。经截面同轴透射背散射电子衍射表征,可以看出硒化银薄膜为柱状贯穿晶体。经样品XRD以及将与Ag反应的Se/Na2S水溶液自然干燥后固体粉末残留物的SEM-EDS图谱表征,得到银单质薄膜中的银完全转化,反应完全。At 25°C and normal pressure, weigh 0.6g Na2S·9H2O and add it to 20mL deionized water to dissolve, then add 0.2g Se powder and stir to dissolve it to obtain a deep red solution. Then immerse the above-prepared single silver film in the solution and react for about 40s to completely convert the silver into silver selenide. After completion, wash it with deionized water and dry it naturally. The obtained silver selenide film sample is gray-black. Figure 18 is the XRD diagram of the obtained sample, and its PDF card number is: 71-2410. The test results show that the prepared film material is highly matched with β-phase silver selenide and shows a strong (201) crystal plane orientation; Figures 19 and 20 are SEM images of the obtained samples. The test results show that the thickness of the sample is 1400nm. The silver selenide film material is composed of large micron-sized grains interwoven with each other. The film has good density from the microscopic level and has rich interfaces between the grains. The cross-sectional coaxial transmission backscattered electron diffraction characterization shows that the silver selenide film is a columnar through-crystal. The sample XRD and the SEM-EDS spectrum of the solid powder residue after the Se/Na2S aqueous solution reacting with Ag is naturally dried show that the silver in the silver single substance film is completely converted and the reaction is complete.

经过测量,制备的硒化银薄膜材料在300K时塞贝克系数为-138μV/K,电导率为1230S/cm,热导率为0.76W/(m·K),功率因子为2340μW/(m·K),热电优值为大约0.92。After measurement, the prepared silver selenide thin film material has a Seebeck coefficient of -138μV/K at 300K, an electrical conductivity of 1230S/cm, a thermal conductivity of 0.76W/(m·K), a power factor of 2340μW/(m·K), and a thermoelectric figure of merit of approximately 0.92.

(2)硒化银单臂温差发电机器件组装及性能评价(2) Assembly and performance evaluation of silver selenide single-arm thermoelectric generator devices

将以上制备的硒化银薄膜放入到热蒸发仪中,利用掩膜版在每一条硒化银的两端沉积金电极,并控制硒化银热电臂的有效长度为14mm。利用室温固化的银浆将4条硒化银热电臂串联起来,组装成硒化银单臂温差发电机器件。控制器件两端的温差,对其实际输出性能进行评价。控制冷端温度为25℃,热端温度从35℃升至85℃,温度间隔为10℃。利用数字源表对器件的输出进行测量,如图21和图22所示,在10℃到60℃温差条件下,对应的最大输出功率分别为对应的最大输出功率分别为41.8,268.4,706.7,1308.4,2060和2927nW,对应的最大输出功率密度分别为1.40,9.01,23.74,43.95,69.20和98.32W/m2The silver selenide film prepared above was placed in a thermal evaporator, and gold electrodes were deposited at both ends of each silver selenide using a mask, and the effective length of the silver selenide thermoelectric arm was controlled to be 14 mm. Four silver selenide thermoelectric arms were connected in series using room temperature cured silver paste to assemble a silver selenide single-arm thermoelectric generator device. The temperature difference at both ends of the device was controlled to evaluate its actual output performance. The cold end temperature was controlled to be 25°C, and the hot end temperature was increased from 35°C to 85°C with a temperature interval of 10°C. The output of the device was measured using a digital source meter, as shown in Figures 21 and 22. Under the temperature difference of 10°C to 60°C, the corresponding maximum output powers were 41.8, 268.4, 706.7, 1308.4, 2060 and 2927 nW, respectively, and the corresponding maximum output power densities were 1.40, 9.01, 23.74, 43.95, 69.20 and 98.32 W/m 2 , respectively.

同时我们研究了不同初始银薄膜厚度,以及其他不同条件,发现:本发明的工艺反应条件对目标产品的成功合成有重要的影响。At the same time, we studied different initial silver film thicknesses and other different conditions and found that the process reaction conditions of the present invention have an important influence on the successful synthesis of the target product.

比如初始银薄膜厚度影响目标产物的晶面取向:参考实施例方法制备单质银薄膜,银薄膜初始厚度150nm;在25℃、常压条件下,称取0.6g Na2S·9H2O加入到20mL去离子水中溶解,然后向其中加入0.2g Se粉,搅拌使其溶解,得到一深红色溶液。然后将上述制备的单质银薄膜浸入到该溶液中,反应后银单质完全转化为硒化银。反应完成后,利用去离子水清洗,自然晾干即可。得到的硒化银薄膜样品为灰黑色。图2为所得样品的XRD图,其PDF卡号为:71-2410,测试结果显示制备的薄膜材料与β相硒化银高度匹配,显示出较强的(121)晶面取向;图3和4为所得样品的SEM图,测试结果显示样品的厚度为550nm。经过测量,上述硒化银薄膜材料在300K时塞贝克系数为-138μV/K,电导率为856S/cm,热导率为1.13W/(m·K),功率因子为1630μW/(m·K),热电优值为大约0.43。性能明显差于实施例1-3合成的硒化银薄膜材料性能。For example, the initial silver film thickness affects the crystal orientation of the target product: a single silver film is prepared according to the reference example method, and the initial thickness of the silver film is 150nm; at 25°C and normal pressure, 0.6g Na 2 S·9H 2 O is weighed and added to 20mL deionized water to dissolve, and then 0.2g Se powder is added thereto and stirred to dissolve, obtaining a deep red solution. Then the single silver film prepared above is immersed in the solution, and the silver element is completely converted into silver selenide after the reaction. After the reaction is completed, it is washed with deionized water and dried naturally. The obtained silver selenide film sample is gray-black. Figure 2 is the XRD diagram of the obtained sample, and its PDF card number is: 71-2410. The test results show that the prepared film material is highly matched with β-phase silver selenide and shows a strong (121) crystal orientation; Figures 3 and 4 are SEM images of the obtained sample, and the test results show that the thickness of the sample is 550nm. After measurement, the Seebeck coefficient of the silver selenide thin film material at 300K is -138μV/K, the electrical conductivity is 856S/cm, the thermal conductivity is 1.13W/(m·K), the power factor is 1630μW/(m·K), and the thermoelectric figure of merit is about 0.43. The performance is significantly worse than that of the silver selenide thin film material synthesized in Examples 1-3.

Claims (9)

1. 一种具有(201)优势晶面取向的超高性能柔性硒化银薄膜,其特征在于:为柔性薄膜,柔性基底上生长有(201)晶面为优势生长晶面、柱状晶体贯穿的Ag2Se,制备方法为:将单质Se粉溶解在Na2S的水溶液中形成深红色溶液,其中:硫化钠/Se粉水溶液中的Se / S摩尔比为1:1-2:1,然后将银厚度为250~450nm的单质银薄膜浸入到该溶液中,反应合成具有(201)优势晶面取向的超高性能柔性硒化银薄膜。1. An ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation, characterized in that: it is a flexible film, Ag 2 Se with a (201) crystal plane as a dominant growth crystal plane and columnar crystals running through it is grown on a flexible substrate, and the preparation method is: dissolving a single substance Se powder in an aqueous solution of Na 2 S to form a deep red solution, wherein: the Se/S molar ratio in the sodium sulfide/Se powder aqueous solution is 1:1-2:1, and then immersing a single substance silver film with a silver thickness of 250-450nm into the solution to react and synthesize an ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation. 2.根据权利要求1所述的硒化银薄膜,其特征在于:柔性硒化银薄膜厚度为600-1400nm,表面均匀,且结晶性优良。2. The silver selenide film according to claim 1 is characterized in that the flexible silver selenide film has a thickness of 600-1400 nm, a uniform surface, and excellent crystallinity. 3. 基于银单质薄膜合成权利要求1所述的具有(201)优势晶面取向的超高性能柔性硒化银薄膜的方法,其特征在于:将单质Se粉溶解在Na2S的水溶液中形成深红色溶液,其中:硫化钠/Se粉水溶液中的Se / S 摩尔比为1:1-2:1,然后将银厚度为250~450nm的单质银薄膜浸入到该溶液中,反应合成具有(201)优势晶面取向的超高性能柔性硒化银薄膜。3. A method for synthesizing the ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation as claimed in claim 1 based on a single silver film, characterized in that: single Se powder is dissolved in an aqueous solution of Na2S to form a deep red solution, wherein: the Se/S molar ratio in the sodium sulfide/Se powder aqueous solution is 1:1-2:1, and then a single silver film with a silver thickness of 250~450nm is immersed in the solution to react and synthesize an ultra-high performance flexible silver selenide film with a (201) dominant crystal plane orientation. 4.根据权利要求3所述的方法,其特征在于:所述的单质银薄膜采用柔性基底,所使用的银单质薄膜成膜方法为直流磁控溅射或银镜反应湿化学方法。4. The method according to claim 3 is characterized in that: the single-substance silver thin film adopts a flexible substrate, and the single-substance silver thin film forming method used is a DC magnetron sputtering or a silver mirror reaction wet chemical method. 5.根据权利要求3所述的方法,其特征在于:基底材料为柔性PI聚酰亚胺。5. The method according to claim 3, characterized in that the substrate material is flexible PI polyimide. 6.根据权利要求3所述的方法,其特征在于:Se源过量。The method according to claim 3 , characterized in that the Se source is excessive. 7.根据权利要求3所述的方法,其特征在于:反应温度在20~40℃范围内选取;反应时间为15秒-60秒。7. The method according to claim 3, characterized in that: the reaction temperature is selected in the range of 20-40°C; and the reaction time is 15 seconds to 60 seconds. 8.权利要求1所述的超高性能柔性硒化银薄膜作为热电发电器件的应用。8. Use of the ultra-high performance flexible silver selenide film described in claim 1 as a thermoelectric power generation device. 9.权利要求1所述的超高性能柔性硒化银热电薄膜直接作为热电臂制备的柔性薄膜热电发电器件。9. A flexible thin-film thermoelectric power generation device prepared by directly using the ultra-high performance flexible silver selenide thermoelectric film described in claim 1 as a thermoelectric arm.
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