CN115365995B - Chemical mechanical polishing integrated equipment for noncircular curved surface of large-size quartz crucible - Google Patents

Abstract

The invention provides chemical mechanical polishing integrated equipment for a non-circular curved surface of a large-size quartz crucible, which comprises: the polishing device comprises a crucible fixed sucker clamp, a polishing disc, a floating spindle, a flange, a spindle rotating system, a spindle assembly, a spindle up-and-down moving system, a frame, an operating system and a polishing liquid drop adding system. The device designed by the invention ensures the positioning precision of the crucible through the crucible fixing sucker clamp, realizes the up-and-down and rotary movement of the polishing disc through the rotation and up-and-down movement of the main shaft, realizes the simultaneous high-precision polishing and polishing of the inner wall of the crucible, simultaneously adjusts the extrusion acting force between the polishing wheel and the inner wall of the crucible through the hydraulic telescopic module, and realizes the high-quality and high-efficiency chemical mechanical polishing of the inner wall of the crucible, especially the non-circular curved surface inner wall of the large-size crucible through the assistance of ultrasound.

Description

A large-size quartz crucible non-circular surface chemical mechanical grinding and polishing integrated equipment

technical field

The invention belongs to the technical field of mechanical processing equipment, in particular to a chemical-mechanical grinding-polishing integrated equipment with a non-circular surface of a large-sized quartz crucible.

Background technique

Quartz crucible is an essential basic material for drawing large-diameter single crystal silicon and developing large-scale integrated circuits, and plays an important role in the development of semiconductor and photovoltaic industries. With the rapid development of the domestic photovoltaic industry and the technology upgrade driven by large-size silicon wafers, the requirements for the purity, precision and surface quality of quartz crucibles are becoming increasingly stringent.

Large-sized quartz crucibles generally have a size of 28 inches or more. After the quartz crucible is produced, cracks, chipping, dirt, and air bubbles will inevitably appear on the inner wall. Due to the influence of these factors, the subsequent crystal pulling effect will be great. At a discount, prolonged use at high temperatures also increases the likelihood of bursting. And most of these defects are tiny defects, which are not easy to be found. At present, the crucible will be coated with a special thin layer before use, but the existence of these defects will not only affect the coating of the special coating, but also leave potential hazards for the subsequent drawing of silicon ingots. Therefore, defects such as cracks and chips in the quartz crucible must be removed by grinding and polishing.

The general mechanical stress grinding and polishing method will form a damaged layer on the surface, and the non-circular surface of the crucible is doomed to be unusable after grinding and polishing. Conventional chemical mechanical polishing can produce ultra-smooth surfaces for flat materials, but the inner wall of large-sized quartz crucibles has a non-circular surface, and due to the high hardness and large size of the crucible, there is no equipment that can perform non-destructive grinding and polishing on it. reports. Therefore, the present invention proposes a device capable of chemical-mechanical grinding and polishing the inner wall of a large-sized crucible, that is, an integrated chemical-mechanical grinding-polishing device for a non-circular surface of a crucible.

Contents of the invention

The purpose of the present invention is to provide a high-quality and efficient chemical-mechanical grinding and polishing equipment for quartz crucibles, especially non-circular surfaces of large-sized crucibles. Therefore, an integrated chemical-mechanical grinding and polishing equipment for large-sized quartz crucibles and non-circular surfaces is proposed. .

The specific technical scheme of the present invention to achieve the above object is as follows: a large-size quartz crucible non-circular surface chemical mechanical grinding and polishing integrated equipment, including: crucible fixed suction cup fixture, grinding and polishing disc, floating main shaft, flange plate, main shaft rotation system, main shaft Components, spindle up and down moving system, frame, polishing liquid dripping system and operating system. Wherein the frame is provided with a horizontal partition, a frame shell and a guide rail, the crucible fixed suction cup fixture is connected with the bottom of the frame shell through the guide rail, the spindle rotation system components and the spindle up and down moving system components are connected through the frame horizontal partition and The fixed and floating main shafts are connected to the main shaft through the flange and fixed below it. The grinding and polishing disc is connected to the floating main shaft. The grinding and polishing disc contains an ultrasonic vibration module and a hydraulic telescopic module. The ultrasonic vibration module is set inside the grinding and polishing disc. The telescopic rod of the hydraulic telescopic module The group is arranged in the grinding and polishing table, the hydraulic motor and hydraulic pump of the hydraulic telescopic module are arranged on the upper surface of the grinding and polishing table, the operating system is set on one side of the frame, the main shaft rotates, the main shaft moves up and down, the ultrasonic vibration in the grinding and polishing table, and the hydraulic telescopic rod , The vacuum suction cup is controlled by the operating system.

The frame includes a partition, a housing and a guide rail, wherein the partition is fixed on the upper half of the housing in a horizontal posture; the housing is rectangular and is divided into two parts by the horizontal partition; the guide rail is provided with two tracks, respectively The symmetrical distribution is fixed at the bottom of the rectangular housing.

The clamp for fixing the crucible suction cup includes a ventilation pipe, a baffle plate, a screw mandrel, a first pulley set, a gear, an arc-shaped rubber pad (the arc fits the outer side wall of the crucible), a concave surface of the suction cup (the shape fits the shape of the bottom of the crucible), The first bevel gear set, the second pulley set, the baffle motor, the third pulley set, the second bevel gear set, the fourth pulley set, bearings, air extraction system (air pump, coupling, air pump motor, etc.), upper Crucible blank grooves. Among them, the air pipe is distributed inside the suction cup, and several arc-shaped rubber pads are evenly arranged on the baffle. The baffle is symmetrically distributed on both sides of the fixture and connected to the screw rod. The pulley set is connected, the right gear is connected with the fourth pulley set, the first pulley set is connected with the second pulley set through the first bevel gear set, the third pulley set is connected with the fourth pulley set through the second bevel gear set, and the second pulley set is connected with the second pulley set through the second bevel gear set. and the third belt pulley group are all connected with the baffle motor shaft, and the bearings are arranged at each connection. The output end of the air pump motor is connected with the air pump through a coupling, and the output end of the air pump is connected with each air hole for vacuum suction. The upper crucible blank groove is centrally arranged in front of the concave surface of the suction cup, so that the crucible blank can be sent to the position to be processed in a vertical posture. Driven by the baffle motor, the baffles on both sides of the fixture can move to the middle at the same speed at the same time, and at the same time, the arc surface of the arc-shaped rubber pad is attached to the outer wall of the crucible and pushes the crucible to ensure that the crucible is in the center. Driven by the air pump motor, the air extraction system can make the air pipe inside the suction cup in a vacuum or near vacuum state, firmly adsorb the crucible to the concave surface of the suction cup, cooperate with the baffle plate and the arc pad to realize the precise fixing of the crucible and avoid machining When there is slight shaking.

The main shaft rotation system includes a main shaft rotation motor, a bearing, and a sixth pulley set. Wherein, the bearing is installed in the through hole of the horizontal partition, the rotating motor is vertically installed under the partition through the bearing, the motor shaft is connected to one end of the sixth pulley group above the partition, and the other end of the sixth pulley group is connected to the main shaft assembly. Driven by the spindle rotating motor, the spindle can realize autorotation.

The main shaft assembly includes a hollow shaft, a bearing, a sleeve, a guide rail block, a main shaft holder, and a main shaft connection port. Among them, the rotating shaft is a hollow structure, passing through the horizontal partition of the frame through bearings, the upper end of the rotating shaft above the partition is connected and fixed to the sixth pulley group, the sleeve is connected to the lower rotating shaft, the guide rail block is fixed on one side of the sleeve, and the cage One end goes through the guide rail to match it, and the other end is connected and fixed on the horizontal partition of the frame, in a firm vertical state. When the main shaft moves up and down, the guide rail block can move up and down smoothly along with the sleeve along the cage. The main shaft connection port is at the bottom of the rotating shaft, and it can be connected with flanges of different sizes for use together.

The main shaft up and down moving system includes a connecting shaft assembly and a main shaft up and down moving motor. Among them, the connecting shaft assembly runs through both sides of the horizontal partition plate of the frame through bearings, the lower end of the connecting shaft assembly is connected and fixed to one side of the sleeve, the upper end of the connecting shaft assembly is connected with the motor that controls the up and down movement of the main shaft, and the motor for moving the main shaft up and down is installed horizontally on the above the partition. Start the motor to move the spindle up and down to realize the up and down movement of the spindle.

The floating main shaft is vertically connected below the rotating main shaft through a flange, which is used to reduce the radial collision force generated by the connecting parts below.

The grinding and polishing disc includes a grinding and polishing wheel set, a fifth pulley set, a grinding and polishing wheel set motor, a hydraulic telescopic module, and an ultrasonic vibration module. Among them, the hydraulic telescopic module includes a spring, a hydraulic telescopic rod, a hydraulic pump, a hydraulic pump motor, a hydraulic valve, and a coupling; the ultrasonic vibration module includes an ultrasonic concentrator and an ultrasonic vibrator. The grinding and polishing disc shell is composed of two semicircular hollow shells with different radii, and the edge of the semicircular shell with a larger radius is respectively provided with three U-shaped grooves at intervals of 45 degrees. The grinding and polishing wheel set is set as three groups of grinding and polishing wheels, which are one group of grinding wheels and two groups of polishing wheels. The three groups of grinding and polishing wheels are distributed in the U-shaped groove in the order of grinding wheel-polishing wheel-polishing wheel. The middle part passes through the bearing, and the upper part is connected and fixed to the fifth pulley group; there are three sets of the fifth pulley group, one end of each pulley group is respectively connected with three sets of grinding and polishing wheel handles, and the other end is connected with the grinding and polishing wheel group motor, and the grinding and polishing wheel group The motor is vertically fixed between two adjacent hydraulic telescopic rods; there are three groups of hydraulic telescopic rods, which are horizontally installed inside the semicircular shell with a larger radius at intervals of 45 degrees, and can achieve 0-3mm axial expansion and contraction. One end of the hydraulic telescopic rod is connected to the bearing that runs through the handle of the grinding and polishing wheel. The middle part of the hydraulic telescopic rod is provided with a spring, and the other end of the hydraulic telescopic rod is connected and fixed on the central shaft. The surface of the small semi-circular shell is combined with the hydraulic telescopic rod, and the hydraulic pump motor can be started to control the hydraulic telescopic rod to expand and contract slightly, so as to realize the changing force of the grinding and polishing wheel group, thereby controlling the grinding and polishing pressure. The ultrasonic vibration module is horizontally installed and fixed inside a semicircular shell with a small radius, in which the ultrasonic vibrator is in contact with the central shaft. When the ultrasonic concentrator is activated, the ultrasonic vibrator can ultrasonically vibrate the central shaft, and then form a Ultrasonic vibration realizes the work of ultrasonic-assisted chemical machinery grinding first and then polishing.

The polishing solution dripping system includes a polishing solution container, a temperature-adjustable magnetic stirrer, a peristaltic pump, and a rubber tube. Among them, the polishing liquid dripping system is divided into two groups and arranged on both sides of the equipment. The temperature-adjustable magnetic stirrer and the peristaltic pump are set on the polishing liquid dripping system platform. The input and output ends of the peristaltic pump are respectively connected to rubber tubes. The other end of the rubber tube connected to the end extends into the polishing liquid container, and the rubber tube connected to the output end extends into the mouth of the crucible and is close to the inner wall. The polishing liquid container is placed on the stage of the temperature-adjustable magnetic stirrer. When working, the temperature-adjustable magnetic stirrer regulates the constant temperature of the polishing liquid, and can continuously stir the polishing liquid to prevent the precipitation of the polishing liquid, and the peristaltic pump quantitatively adds the polishing liquid.

The operating system includes a switch and an operation panel. Through the operation panel, the crucible can be precisely fixed and clamped, the contact position and state between the grinding and polishing wheel group and the inner wall of the crucible can be controlled, the ultrasonic vibration power and the expansion degree of the hydraulic rod can be adjusted, and the external polishing solution dripped along the inner wall of the crucible can be used to realize ultrasonic Assisted chemical mechanical grinding and polishing of large size quartz crucibles with variable force.

The present invention has the following advantages:

1. The present invention can ensure the positioning accuracy of the crucible by designing the crucible fixed suction cup fixture, the main shaft rotation system, the main shaft assembly, the main shaft up and down movement system, the floating main shaft, and the grinding and polishing disc, and can realize the up and down and rotating movement of the grinding and polishing disc, realizing the crucible The circular grinding and polishing of the side of the inner wall ensures the precision of the grinding and polishing of the crucible, and solves the problem that the non-circular surface of the large-sized crucible is difficult to be ground and polished by high-quality and efficient automatic machinery.

2. The present invention is designed with a set of grinding wheels and two sets of polishing wheels. During work, the grinding wheels firstly polish the predetermined area, and then the two sets of polishing wheels polish the polished area, which saves the process of replacing the grinding wheels and realizes large Convenient and efficient chemical mechanical grinding and polishing of non-circular surfaces of crucibles.

3. The invention is designed with a hydraulic telescopic module and an ultrasonic vibration module, which can adjust the extrusion force between the grinding wheel and the inner wall of the crucible during grinding and polishing, and cooperate with ultrasonic assisted grinding and polishing to improve the processing quality and efficiency of the crucible.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained according to these drawings without any creative effort.

Figure 1 is a front view of the grinding and polishing equipment.

Fig. 2 is a top view of the crucible fixing suction cup fixture.

Figure 3 is a top view of the grinding and polishing disc.

Figure 4 is a front view of the grinding and polishing disc.

In the figure: 1. Crucible fixed suction cup fixture, 2. Crucible, 3. Grinding and polishing disc, 4. Floating spindle, 5. Flange, 6. Spindle rotation system, 7. Spindle assembly, 8. Up and down moving system, 9. Machine rack, 10. operating system, 11 polishing liquid dripping system;

1-1. Air pipe, 1-2. Baffle plate, 1-3. Screw rod, 1-4. First pulley set, 1-5. Gear, 1-6. Curved rubber pad, 1-7. Suction cup concave surface, 1-8. The first bevel gear set, 1-9. The second pulley set, 1-10. Baffle motor, 1-11. The third pulley set, 1-12. The second bevel gear set, 1 -13. The fourth pulley set, 1-14. Bearing, 1-15. Air pump, 1-16. Coupling, 1-17. Air pump motor, 1-18. Upper crucible blank groove; 3-1. Grinding and polishing wheel group, 3-1-1, grinding wheel; 3-1-2, the first polishing wheel; 3-1-3, the second polishing wheel; 3-2. Spring, 3-3. Hydraulic telescopic rod, 3-4. Fifth pulley group, 3-4-1, fifth pulley A; 3-4-2, fifth pulley B; 3-4-3, fifth pulley C; 3-5. Grinding and polishing pulley group Motor, 3-6. Hydraulic pump, 3-7. Hydraulic pump motor, 3-8. Ultrasonic concentrator, 3-9. Ultrasonic vibrator, 3-10. Hydraulic valve, 3-11. Coupling, 3- 12. Center shaft of grinding and polishing disc; 6-1. Spindle rotating motor, 6-2. Bearing, 6-3. Sixth pulley group; 7-1. Guide rail block, 7-2. Spindle cage, 7-3. Bearing , 7-4. Sleeve, 7-5. Main shaft connection port, 7-6. Rotating shaft; 8-1. Connecting shaft assembly, 8-2. Main shaft moving up and down motor; 9-1. Horizontal partition, 9-2 .Square frame shell, 9-3. Guide rail; 10-1. Operation panel, 10-2. Operation panel switch; 11-1. Polishing liquid container, 11-2. Adjustable temperature magnetic stirrer, 11-3. Polishing liquid dripping system platform, 11-4. Peristaltic pump, 11-5. Rubber tube.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

The technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with accompanying drawings 1 to 4 .

As shown in Figures 1-4, the embodiment of the present invention discloses a large-size quartz crucible with non-circular curved surface chemical-mechanical grinding and polishing equipment, including: a crucible fixed suction cup fixture 1, a grinding and polishing disc 3, a floating spindle 4, and a flange 5. Main shaft rotation system 6, main shaft assembly 7, up and down moving system 8, frame 9, operating system 10. Wherein the frame 9 is provided with a horizontal partition 9-1, a frame housing 9-2 and a guide rail 9-3, the body of the crucible fixed suction cup fixture 1 is connected to the frame housing 9-2 through the guide rail 9-3, It is used to clamp the crucible to be ground and polished. The crucible is located in the concave surface 1-7 of the suction cup set on the upper surface of the fixed suction cup fixture 1 of the crucible (wherein the shape of the concave surface of the suction cup matches the shape of the bottom of the crucible), the spindle rotation system has 6 components, and the spindle moves up and down The components of the system 8 are connected and fixed through the horizontal partition 9-1 of the frame, the floating main shaft 4 is connected with the main shaft assembly 7 through the flange 5 and fixed below it, the grinding and polishing disc 3 is connected with the floating main shaft 4, and the grinding and polishing disc 3 contains ultrasonic vibration module and a hydraulic telescopic module, the ultrasonic vibration module includes an ultrasonic concentrator 3-8, an ultrasonic vibrator 3-9, and the hydraulic telescopic module includes a spring 3-2, a hydraulic telescopic rod 3-3, and a hydraulic pump 3-6 , hydraulic pump motor 3-7, hydraulic valve 3-10, coupler 3-11, ultrasonic concentrator 3-8, ultrasonic vibrator 3-9 are arranged inside the grinding and polishing disc 3, spring 3-2, hydraulic telescopic rod 3 -3 is arranged in the grinding and polishing disc 3, hydraulic pump 3-6, hydraulic motor 3-7, coupling 3-11, hydraulic valve 3-10 and other components are arranged on the upper surface of grinding and polishing disc 3, and the operating system 10 is arranged on the frame 9 On one side, the main shaft rotates, the main shaft moves up and down, the ultrasonic vibration in the grinding and polishing disc, the hydraulic telescopic rod, and the vacuum suction cup are controlled by the operating system 10 .

The frame 9 includes a partition 9-1, a square housing 9-2 and a guide rail 9-3, wherein the partition 9-1 is fixed on the upper half of the housing 9-2 in a horizontal posture; the housing 9-2 2 is rectangular and is divided into two parts by a horizontal partition 9-1; the guide rail 9-3 is provided with two tracks, which are symmetrically fixed and distributed at the bottom of the rectangular housing 9-2 respectively.

The crucible fixing suction cup fixture 1 includes a ventilation pipe 1-1, a baffle plate 1-2, a screw rod 1-3, a first pulley group 1-4, a gear 1-5, an arc-shaped rubber pad 1-6, and a suction cup Concave surface 1-7 (the shape matches the shape of the bottom of the crucible), the first bevel gear set 1-8, the second pulley set 1-9, the baffle motor 1-10, the third pulley set 1-11, the second bevel gear set 1-12, the fourth pulley set 1-13, bearing 1-14, air extraction system (air extraction pump 1-15, coupling 1-16, air extraction pump motor 1-17), upper crucible groove 1-18. Among them, the ventilation pipe 1-1 is distributed inside the suction cup fixture 1, a number of arc-shaped rubber pads 1-6 are evenly arranged on the baffle plate 1-2, and there are two groups of baffle plate 1-2, which are symmetrical on both sides of the fixture 1 Distributed and connected with the corresponding screw rods 1-3, the screw rods 1-3 on both sides are connected with the corresponding gears 1-5, the left gear 1-5 is connected with the first pulley set 1-4, and the right gear is connected with the fourth pulley Group 1-13 is connected, the first pulley group 1-4 is connected with the second pulley group 1-9 through the first conical gear group 1-8, the third pulley group 1-11 is connected with the second bevel gear group 1-12 The four pulley groups 1-13 are connected, the second pulley group 1-9 and the third pulley group 1-11 are all connected on the baffle motor 1-10 shaft, and the bearings 1-14 are arranged at each connection. The output end of air pump motor 1-17 links to each other with air pump 1-15 by coupling 1-16, and the output end of air pump 1-15 links to each other with each air hole, is used for the vacuum suction of suction cup internal air pipe 1-1. The groove 1-18 of the upper crucible blank is centered and set in front of the concave surface 1-7 of the suction cup, so that the blank of the upper crucible 2 can enter into the concave surface 1-7 of the suction cup in a vertical posture. Driven by the baffle motor 1-10, the baffles 1-2 on both sides of the fixture can move to the middle at the same speed at the same time, and at the same time, the arc-shaped rubber pad 1-6 is attached to the outer wall of the crucible 2 and pushes the crucible 2 to move , to ensure that the crucible 2 is in a vertical state and in the center. Driven by the air pump motor 1-15, the air pumping system can make the air pipe 1-1 inside the suction cup be in a vacuum or a near-vacuum state, thereby adsorbing the crucible 2 to the concave surface 1-7 of the suction cup, and cooperating with the baffle plate 1-2 and The arc pads 1-6 realize precise fixing of the crucible 2 and avoid slight shaking during processing.

The main shaft rotation system 6 includes a main shaft rotation motor 6-1, a bearing 6-2, and a sixth pulley set 6-3. Wherein, the bearing 6-2 is installed in the through hole of the horizontal partition 9-1, the rotating motor 6-1 is installed vertically below the partition 9-1 through the bearing 6-2, and the shaft of the motor 6-1 is mounted on the partition 9-1. The upper part is connected with one end of the sixth pulley set 6 - 3 , and the other end of the sixth pulley set 6 - 3 is connected with the main shaft assembly 7 . Driven by the main shaft rotating motor 6-1, the main shaft can realize autorotation.

The spindle assembly 7 includes a guide rail block 7-1, a spindle holder 7-2, a bearing 7-3, a sleeve 7-4, a spindle connection port 7-5, and a hollow shaft 7-6. Wherein, the rotating shaft 7-6 is a hollow structure, the bearing 7-3 is installed in the through hole of the horizontal partition 9-1, and the upper end of the rotating shaft 7-6 above the partition is connected and fixed to the sixth pulley group 6-3, and the sleeve 7 -4 is connected to the lower rotating shaft 7-6, the guide rail block 7-1 is fixed on one side of the sleeve 7-4, one end of the main shaft holder 7-2 passes through the guide rail block 7-1 and cooperates with it, and the other end is connected and fixed on On the horizontal dividing plate 9-1 of the frame, it is in a firm vertical state. When the main shaft moves up and down, the guide rail block 7-1 can move up and down steadily along the cage 7-2 along with the sleeve 7-4. The main shaft connecting port is at the bottom of the rotating shaft 7-6, and is used in conjunction with flanges of different sizes.

The main shaft up and down moving system 8 includes a connecting shaft assembly 8-1 and a main shaft up and down moving motor 8-2. Among them, the connecting shaft assembly 8-1 runs through both sides of the horizontal partition plate 9-1 of the frame through bearings, the lower end is connected and fixed with one side of the sleeve 7-4, and the upper end is connected with the motor 8-2 that controls the main shaft to move up and down. Up and down moving motor 8-2 is horizontally installed above the dividing plate. Start the main shaft to move up and down motor 8-2, can realize the up and down movement of the main shaft.

The floating main shaft 4 is vertically connected below the rotating main shaft 7 through the flange 5, which is used to reduce the radial collision force generated by the lower connecting parts.

The grinding and polishing disc 3 includes a grinding and polishing wheel set 3-1, a fifth pulley set 3-4, a grinding and polishing wheel set motor 3-5, the hydraulic telescopic module, and the ultrasonic vibration module. The shell of the grinding and polishing disc 3 is composed of two semicircular hollow shells with different radii, and the edge of the semicircular shell with a larger radius is respectively provided with three U-shaped grooves at intervals of 45 degrees. The grinding and polishing wheel group 3-1 is set as three groups of grinding and polishing wheels, which are respectively one group of grinding wheels and two groups of polishing wheels. The order of the second polishing wheel 3-1-3 is distributed at the U-shaped groove, the middle part of the grinding and polishing wheel handle passes through the bearing, and the upper part is connected and fixed to the fifth pulley set 3-4; the fifth pulley set 3-4 is provided with three groups, One end of the fifth pulley A3-4-1, the fifth pulley B3-4-2, and the fifth pulley C3-4-3 are respectively connected with three groups of grinding and polishing wheel handles, and the other end is connected with the grinding and polishing wheel group motor 3-5, The motor 3-5 of the grinding and polishing wheel group is fixed vertically between two adjacent hydraulic telescopic rods 3-3; the hydraulic telescopic rods 3-3 are provided with three groups, which are horizontally installed inside the semicircular shell with a larger radius at intervals of 45 degrees. Axial expansion and contraction of 0-3 mm can be realized. One end of the hydraulic telescopic rod is connected to the bearing that runs through the handle of the grinding and polishing wheel. The middle part is provided with a spring 3-2. The other end of the hydraulic telescopic rod 3-3 is connected and fixed on the central axis of the grinding and polishing disc. Above, the hydraulic pump 3-6, the hydraulic pump motor 3-7, the hydraulic valve 3-10, and the coupling 3-11 are arranged on the surface of the semicircular shell with a smaller radius, and after the combination, they are connected with the hydraulic telescopic rod 3-3 to start The hydraulic pump motor 3-7 can adjust the hydraulic telescopic rod 3-3 to carry out small expansion and contraction, so as to realize the changing force applied to the grinding and polishing wheel group 3-1, thereby controlling the grinding and polishing pressure. The ultrasonic vibration module is horizontally installed and fixed inside a semicircular shell with a small radius, wherein the ultrasonic vibrator 3-9 is in contact with the central axis, and when the ultrasonic concentrator 3-8 is started, the ultrasonic vibrator 3-9 can align the central axis Ultrasonic vibration, thereby forming ultrasonic vibration on the grinding and polishing wheel 3-1, and realizing ultrasonic-assisted chemical mechanical grinding and polishing.

The polishing liquid dripping system 11 includes a polishing liquid container 11-1, a temperature-adjustable magnetic stirrer 11-2, a polishing liquid dripping system platform 11-3, a peristaltic pump 11-4, and a rubber tube 44-5. Among them, the polishing liquid dripping system 11 is divided into two groups and arranged on both sides of the equipment, the temperature-adjustable magnetic stirrer 11-2 and the peristaltic pump 11-4 are arranged on the polishing liquid dripping system platform 11-3, and the peristaltic pump 11-4 The input end and the output end are respectively connected to the rubber tube 11-5, the other end of the rubber tube connected to the input end extends into the polishing solution container 11-1, and the rubber tube connected to the output end extends into the mouth of the crucible 2 and clings to it. On the inner wall, the polishing solution container 11-1 is placed on the stage of the temperature-adjustable magnetic stirrer 11-2. When working, the temperature-adjustable magnetic stirrer 11-2 regulates the constant temperature of the polishing liquid, and can continuously stir the polishing liquid to prevent the precipitation of the polishing liquid, and the peristaltic pump 11-4 quantitatively adds the polishing liquid dropwise.

The operating system 10 includes an operation panel 10-1 and a switch 10-2. Through the operation panel 10-1, the precise fixing and clamping of the crucible can be realized, the grinding and polishing position and force application state of the grinding and polishing wheel group in the crucible can be controlled, and the power of ultrasonic vibration and the expansion of the hydraulic rod can be adjusted. The polishing liquid dripped on the inner wall of the crucible realizes chemical mechanical grinding and polishing of large-size quartz crucibles with variable force under the assistance of ultrasound.

To sum up, this large-size quartz crucible non-circular surface chemical-mechanical grinding-polishing integrated equipment ensures the positioning accuracy of the crucible through the fixed suction cup fixture of the crucible, and realizes the up-and-down and rotating movement of the grinding-polishing disc through the rotation and up-down movement of the main shaft, realizing the crucible Simultaneous high-precision grinding and polishing of the inner wall, while adjusting the extrusion force between the grinding wheel and the inner wall of the crucible through the hydraulic telescopic module, with the assistance of ultrasound, solves the problem of high quality and high efficiency of the inner wall of the crucible, especially the inner wall of the non-circular surface of the large-sized crucible. The problem of chemical mechanical grinding and polishing.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present invention. scope.

Claims (8)

1. The utility model provides a large-scale quartz crucible non-circular curved surface chemical mechanical polishing integration equipment which characterized in that includes: the crucible fixing chuck clamp is used for clamping a crucible to be polished, the frame comprises a frame shell, a horizontal partition plate and a guide rail, the crucible fixing chuck clamp is connected with the bottom of the frame shell through the guide rail, the output ends of the main shaft rotating system assembly and the main shaft up-down moving system assembly are connected with the main shaft assembly, the main shaft rotating system and the main shaft up-down moving system are connected and fixed through the frame horizontal partition plate, the polishing disc is connected with the output end of the main shaft assembly, the polishing disc comprises an ultrasonic vibration module and a hydraulic telescopic module, the hydraulic telescopic module is used for adjusting extrusion acting force between the polishing wheel and the inner wall of the crucible during polishing, the ultrasonic vibration module is used for forming ultrasonic vibration for the polishing wheel during polishing, and realizing ultrasonic auxiliary chemical mechanical polishing work, and the main shaft rotating system, the main shaft up-down moving system, the ultrasonic vibration module and the hydraulic telescopic module and the crucible fixing chuck clamp are controlled through the operation system;

the ultrasonic vibration module comprises an ultrasonic energy collector and an ultrasonic vibrator connected with the ultrasonic energy collector, the hydraulic telescopic module comprises a spring, a hydraulic telescopic rod, a hydraulic pump motor, a hydraulic valve and a connector, one end of the hydraulic telescopic rod is connected with a bearing penetrating through a grinding and polishing wheel handle, the spring is arranged in the middle of the hydraulic telescopic rod, the other end of the hydraulic telescopic rod is connected and fixed on a central shaft of a grinding and polishing disc, the hydraulic pump motor, the hydraulic valve and the connector are combined and then connected with the hydraulic telescopic rod, the ultrasonic energy collector and the ultrasonic vibrator are arranged in the grinding and polishing disc, the spring and the hydraulic telescopic rod are arranged in the grinding and polishing disc, and the hydraulic pump, the hydraulic motor, the connector and the hydraulic valve are arranged on the upper surface of the grinding and polishing disc; the ultrasonic vibrator is contacted with the central shaft of the grinding and polishing disc, and can perform ultrasonic vibration on the central shaft, so that ultrasonic vibration is formed on the grinding and polishing wheel, and ultrasonic auxiliary chemical mechanical grinding and polishing work is realized;

the grinding and polishing disc comprises a grinding and polishing wheel set, a fifth belt wheel set, a grinding and polishing wheel set motor, a hydraulic telescopic module and an ultrasonic vibration module, wherein the grinding and polishing disc shell consists of two semicircular hollow shells with different radiuses, three U-shaped grooves are respectively arranged at the edges of the semicircular shells with larger radiuses at intervals of 45 degrees, the grinding and polishing wheel set is formed into three groups of grinding and polishing wheels, each group of grinding wheels and two groups of polishing wheels, the three groups of grinding and polishing wheels are distributed at the U-shaped grooves in the sequence of grinding wheels, a first polishing wheel and a second polishing wheel, the middle part of a grinding and polishing wheel handle penetrates through a bearing, and the upper part of the grinding and polishing wheel handle is fixedly connected with the fifth belt wheel set; one end of the fifth belt pulley A, one end of the fifth belt pulley B and one end of the fifth belt pulley C are respectively connected with three grinding and polishing wheel handles, the other end of the fifth belt pulley A, one end of the fifth belt pulley B and one end of the fifth belt pulley C are respectively connected with a grinding and polishing wheel set motor, and the grinding and polishing wheel set motor is vertically fixed between two adjacent hydraulic telescopic rods; the hydraulic telescopic rods are provided with three groups and horizontally arranged in a semicircular shell with a larger radius at 45-degree intervals.

2. The large-size quartz crucible noncircular curved surface chemical mechanical polishing integrated device according to claim 1, wherein the crucible fixing chuck clamp comprises an air suction system, a baffle plate, a screw rod, a first belt pulley set, a gear, a rubber cushion block, a first conical pulley set, a second belt pulley set, a baffle plate motor, a third belt pulley set, a second conical pulley set, a fourth belt pulley set and a bearing, wherein the air suction system is distributed inside the chuck clamp, a plurality of rubber cushion blocks are uniformly distributed on the baffle plate and are used for being attached to the outer side wall of the crucible after being clamped, the baffle plate is provided with two groups, the two groups are symmetrically distributed on two sides of the clamp and are connected with corresponding screw rods, the screw rods on two sides are connected with corresponding gears, a left side gear is connected with the first belt pulley set, a right side gear is connected with the fourth belt pulley set, the first belt pulley set is connected with the second belt pulley set through the first conical pulley set, the second belt pulley set and the third belt pulley set is connected with a shaft of the baffle plate motor, and the bearing is arranged at each connection position.

3. The large-size quartz crucible non-circular curved surface chemical mechanical polishing integrated device according to claim 2, wherein the air extraction system comprises a sucker concave surface, a vent pipe, an air pump, a connector and an air pump motor, the air pump motor is connected with the air pump through the connector, the output end of the air pump is connected with the sucker concave surface through the vent pipe, the shape of the sucker concave surface is matched with the shape of the bottom of the crucible, the sucker concave surface is used for adsorbing the bottom of the crucible, and the air extraction system is used for realizing accurate fixation of the crucible and avoiding tiny shaking during processing by matching with a baffle plate and a rubber cushion block.

4. The large-size quartz crucible non-circular curved surface chemical mechanical polishing integrated device according to claim 1, wherein the spindle assembly comprises a guide rail block, a spindle retainer, a bearing, a sleeve, a spindle connection port and a rotating shaft, wherein the rotating shaft is of a hollow structure, the bearing is arranged in a through hole of a horizontal partition plate, the upper end of the rotating shaft above the partition plate is fixedly connected with a sixth belt pulley group, the sleeve is connected to the lower rotating shaft, the guide rail block is fixed on one side of the sleeve, one end of the spindle retainer penetrates through the guide rail block and is matched with the guide rail block, the other end of the spindle retainer is connected and fixed on a horizontal partition plate of the frame, the guide rail block can move stably up and down along the spindle retainer along with the sleeve when the spindle moves up and down, and the spindle connection port is arranged at the lowest part of the rotating shaft and is used for connecting flanges with different sizes.

5. The integrated equipment for chemical mechanical polishing of a non-circular curved surface of a large-sized quartz crucible according to claim 1 or 4, further comprising a floating spindle vertically connected below the spindle assembly by a flange plate for reducing radial collision force generated by the lower connector.

6. The integrated equipment for chemical mechanical polishing of a non-circular curved surface of a large-size quartz crucible according to claim 1 or 4, wherein the main shaft rotating system comprises a main shaft rotating motor, a bearing and a sixth belt pulley set, wherein the bearing is arranged in a through hole of a horizontal partition plate, the rotating motor is vertically arranged below the partition plate through the bearing, a motor shaft is connected with one end of the sixth belt pulley set above the partition plate, and the other end of the sixth belt pulley set is connected with a main shaft assembly.

7. The large-size quartz crucible non-circular curved surface chemical mechanical polishing integrated device according to claim 1, wherein the spindle up-and-down moving system comprises a connecting shaft assembly and a spindle up-and-down moving motor, wherein the connecting shaft assembly penetrates through two sides of a horizontal partition plate of the frame through a bearing, the lower end of the connecting shaft assembly is fixedly connected with one side of a sleeve, the upper end of the connecting shaft assembly is connected with a motor for controlling the spindle to move up and down, and the spindle up-and-down moving motor is horizontally arranged above the partition plate.

8. The large-size quartz crucible non-circular curved surface chemical mechanical polishing integrated equipment according to claim 1, wherein the polishing liquid dripping system comprises a polishing liquid container, a temperature-adjustable magnetic stirrer, a peristaltic pump and a rubber tube, wherein the polishing liquid dripping system is respectively arranged at two sides of the inside of the equipment, the temperature-adjustable magnetic stirrer and the peristaltic pump are arranged on a polishing liquid dripping system platform, an input end and an output end of the peristaltic pump are respectively connected with the rubber tube, the other end of the rubber tube connected with the input end extends into the polishing liquid container, the rubber tube connected with the output end extends into a crucible opening and clings to the inner wall, and the polishing liquid container is placed on a temperature-adjustable magnetic stirrer stage.